CN114089160A - Method for assembling, repairing and testing parameter setting of vertical probe card device - Google Patents
Method for assembling, repairing and testing parameter setting of vertical probe card device Download PDFInfo
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- G—PHYSICS
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Abstract
The invention discloses a method for assembling, repairing and testing parameter setting of a vertical probe card device, which relates to the technical field of probe cards; the assembling method sequentially executes the steps of needle connection, distance adjustment, hanging, plate penetration, fixing and electric connection; the repairing method sequentially performs the steps of integral dismounting, fixed mounting, dismounting and separating, probe replacing, probe repairing and reassembling; the test parameter setting method sequentially executes the steps of assumed length, plane test, contact pressure calculation, deformation calculation, height setting and effective length calculation; the invention discloses a method for assembling, repairing and setting test parameters of a vertical probe card device, which solves the problems of assembling, repairing and setting test parameters of a vertical probe card with an upper guide plate, a middle guide plate, a lower guide plate, a deformation connecting device, a first probe, a second probe, a circuit board and a first welding pad in sequence.
Description
Technical Field
The invention discloses a method for assembling, repairing and testing parameter setting of a vertical probe card device, and relates to the technical field of probe cards.
Background
The production of a chip mainly needs to go through four links of design, manufacturing, packaging and testing, and a fresh wafer discharged from a furnace needs to be tested after the wafer is manufactured, in this link, the electrical performance of each chip can be detected, and wafer detection mainly has two purposes:
firstly, identifying qualified chips to enter a packaging process, and saving unnecessary packaging cost;
second, electrical parameters of the circuit are evaluated to maintain the quality level of the process.
The probe card is an important consumable in wafer test, and is mainly used in the wafer test link, which is a medium between the wafer and the electronic test system in the wafer test, and the probe card is also used in the engineering verification link before the mass production of chips
The probe card is mainly divided into three categories, namely a cantilever card, a vertical card and an MEMS card according to the structure, but the existing vertical probe card has the following problems:
firstly, the deformation and offset of the probe;
when the probe is detected, after the probe is contacted with an object to be detected, the probe bears not only axial force, but also shearing force and bending moment, the probe has lateral bending deformation and cannot strictly keep vertical action on a welding pad or a convex block, if the lateral bending deformation of the probe is too large, the probe can often scratch the welding pad to cause test failure, if the lateral bending deformation of the probe is smaller, but in the repeated test process, through a large amount of extrusion deformation, the probe can also have unrecoverable bending deformation, if the lateral bending deformation is too large, the scratching of the welding pad or poor contact can be caused, and the service life of the probe card is shortened;
secondly, during detection, the contact problem between the probe and a welding pad of the object to be detected is solved;
during detection, the contact condition of the probe and a welding pad or a lug of an object to be detected is judged through a pin mark acting on the welding pad or the lug, observation is carried out through a microscope, if the pin mark of the probe is fuzzy, the contact of the probe and the object to be detected is poor, the measurement result is directly inaccurate, the contact pressure can be considered to be increased, the contact pressure is increased, the pin mark of the probe is overlarge, the packaging yield is influenced, and the problem of moderate contact pressure is solved;
degree of flatness
The flatness is the vertical distance between the highest point and the lowest point of a probe needle piece on a probe card, which defines the vertical displacement from the first electrical contact to the last electrical contact of the tip of the probe needle, and during the assembly process of the probe, the flatness problem exists, but the maximum flatness is required to be not more than 25mm, the flatness is rarely concerned, but the flatness directly influences the contact with a bonding pad, directly or indirectly influences key test variables such as contact pressure, contact resistance and definition of needle marks, and the like, and how to overcome the problem of poor contact caused by the flatness.
Thirdly, repairing and assembling the probe
As an important consumable in wafer testing, the physical shape of the probe tip changes to directly influence the testing result, and a large possibility of damaging a testing device exists, the probe tip in a large number of probes is subjected to physical deformation or extrusion to cause lateral bending of the probe, the subsequent detection cannot be carried out, but the continuous detection cannot be carried out only by a small number, most probes still can continue to work, and the replaced probe card can only be selected to be scrapped due to complicated repairing, assembling and replacing procedures, so that the resource waste exists.
Disclosure of Invention
The invention overcomes the defects of the prior art and provides a method for setting the assembling, repairing and testing parameters of the vertical probe card device, which respectively realizes the assembling, repairing and testing parameters setting of the vertical probe card device.
The technical scheme of the invention is as follows:
a method for assembling a vertical probe card device comprises the following steps:
step a, connecting needles, electrically connecting a plurality of first probes with the upper ends of a plurality of corresponding stabilizing parts through threads, and electrically connecting a plurality of second probes with the lower ends of a plurality of corresponding limiting parts through threads;
b, adjusting the distance, arranging a plurality of elastic needles arranged in an array in the threaded through holes on the side wall of the stabilizing part through the action of threads, and adjusting the effective length of the elastic needles to be S by rotating the elastic needles0；
C, hanging the part, and correspondingly inserting a limiting bead at one end of the elastic needle into a limiting through hole of the limiting part;
d, penetrating a plate, namely enabling a plurality of groups of first probes connected with the stabilizing parts to penetrate through the vertical limiting holes from the lower end face of the upper guide plate, and enabling the upper ends of the stabilizing parts to be clamped with limiting pads correspondingly arranged on the lower end face of the upper guide plate; adjusting the upper guide plate to align with the middle guide plate and the lower guide plate, enabling a plurality of second probes to penetrate through corresponding vertical limiting through holes of the middle guide plate and the lower guide plate, and enabling the lower ends of a plurality of stabilizing parts to be clamped with limiting pads correspondingly arranged on the upper end face of the middle guide plate;
e, fixing, namely connecting the upper guide plate, the middle guide plate and the lower guide plate through connecting bolts, and fixing the upper guide plate, the middle guide plate and the lower guide plate through adjusting the connecting bolts;
and f, electrically connecting, abutting the plurality of first welding pads on the circuit board against the corresponding first probes, and enabling the first probes to act on the centers of the corresponding first welding pads.
A method for repairing a vertical probe card device comprises the following steps:
a, integrally detaching, moving the bearing platform by utilizing a longitudinal linear guide rail on the probe platform and a sliding driving device thereof, separating a second welding pad center on the bearing platform from a second probe tip, releasing the electrical connection between the circuit board and the testing machine, then adjusting a locking knob on the probe platform to release the fixation, and detaching a vertical probe card device of a probe to be replaced from the bearing platform on the probe platform;
and b, fixedly mounting, fixing the new vertical probe card device on a probe card mounting table above the bearing table, leveling the probe card device, locking and fixing the probe card through a locking knob to finish the fixed placement of the probe card, and electrically connecting the circuit board with a testing machine to perform detection work.
Step c, disassembling and separating, separating the circuit board from the first probes, separating the upper guide plate, the middle guide plate and the lower guide plate by adjusting the connecting bolts, taking the plurality of first probes out of the upper guide plate, taking the plurality of second probes out of the middle guide plate and the lower guide plate, separating the limiting parts correspondingly connected with the first probes from the stabilizing parts correspondingly connected with the second probes, and taking the elastic needles provided with the limiting beads out of the limiting through holes on the limiting parts to finish the separation;
d, replacing the probes, assembling and connecting the first probes, the second probes and the deformation connecting devices which are ready to be replaced, penetrating a plurality of first probes through the vertical limiting through holes of the upper guide plate and a plurality of second probes through the vertical limiting through holes of the middle guide plate and the lower guide plate, connecting the upper guide plate, the middle guide plate and the lower guide plate through connecting bolts, and fixing the upper guide plate, the middle guide plate and the lower guide plate through adjusting the connecting bolts;
e, probe repair, namely detecting a first probe and a second probe which replace the following probes, screening the physical deformation of the tips of the first probe and the second probe, and polishing and repairing the first probe and the second probe by using a probe polisher;
and f, reassembling, and reassembling and installing the first probe and the second probe which are polished and repaired and the replaced deformed connecting device.
A method for setting test parameters of a vertical probe card device comprises the following steps:
step a, assuming length,
Assembling a plurality of vertical probe card devices to be tested, adjusting the length of an elastic needle arranged on the side wall of a stabilizing part through a thread effect in the assembling process, adjusting the effective length of the elastic needle, preliminarily setting the effective length of the elastic needle as S, and then assembling the vertical probe card devices;
step b, plane test
Mounting the assembled vertical probe card to be tested on a test probe stationOn the platform, the contact flatness test is carried out one by one, the distance between the highest point and the lowest point of a second probe tip on the vertical probe card is measured, namely the vertical displacement from the first electrical contact to the last electrical contact of the second probe tip, and the change range of the recorded flatness is ymin-ymaxTake its maximum value ymaxThe amount of vertical displacement required to be added as a second probe;
step c, calculation of contact pressure
After the flatness test is finished, the test probe station is used for carrying out contact pressure test experiments one by one, the bearing table is moved by utilizing the longitudinal linear guide rail on the probe station and the sliding driving device thereof, so that the center of a second welding pad on the bearing table acts on the tip of a second probe, the second welding pad of an object to be tested stops stably acting on the second welding pad, then the needle mark on the second welding pad is observed through a microscope, the force measuring instrument is used for recording the force acting on the bearing table, when clear normal needle marks are obtained, the force measuring instrument is used for recording the pressure range F acting on the bearing table at the momentmin-FmaxTaking the minimum value FminAs the driving force for driving the bearing platform, according to the number m of the second probes, the stress analysis is carried out, and the contact pressure is specified to be
Step d, deformation calculation
D1, measuring the elastic modulus E and the inertia moment I of the material of the elastic needle;
d2, analyzing the stress to calculate the concentrated load of the limiting part on one end of the elastic needle via the limiting ball, and when the number of the elastic needles is n, calculating the concentrated load of the limiting ball on one end of the elastic needle as
Step d3, drawing concentrated load
Acting on the position-limiting bead, on the elastic needleBending moment diagram, i.e. MPDrawing;
step d4, drawing unit load
Moment diagram when acting on the limiting bead, i.e. M, on the elastic needle1A drawing;
step d5, calculating the longitudinal displacement of the limiting bead according to the graph multiplication
Wherein:
s is a preliminary set value of the effective length of the elastic needle;
Fminin order to record the force acting on the carrier table by means of a force measuring device, when a clear normal needle mark is obtained, the pressure range F acting on the carrier table at the time is recorded by means of the force measuring devicemin-FmaxTaking the minimum value FminAs the driving force to drive the bearing platform;
m in the formula is the number of the second probes;
n in the formula is the number of the elastic needles;
e in the formula is the elastic modulus of the elastic needle;
i in the formula is the inertia moment of the elastic needle;
step e, height setting
Measuring the distance x from the lowest end of the second probe to the upper surface of the second pad at the initial time1；
Step f, effective length calculation
The vertical displacement of the limiting bead is set to be delta x + delta y, namely the vertical displacement is originally set
Then increase by y, and y is equal to ymaxAnd the maximum acting force of the limiting bead and the limiting part is kept as
Then the elastic needle is recalculatedEffective length, establishing an equation
Is solved out
I.e. an effective length of S0Adjusting the length of the elastic needles arranged on the side wall of the stabilizing part in an array manner to change the effective length S of the originally set elastic needle into S0；
S in the formula: preliminary set values of the effective lengths of the elastic needles 4-7;
s in the formula0: an optimal value of the effective length of the elastic needles 4-7;
f in the equationmin: the force measuring instrument is used for recording the force acting on the bearing platform, and when clear normal needle marks are obtained, the force measuring instrument is used for recording the pressure range F acting on the bearing platform at the momentmin-FmaxTaking the minimum value F thereofminAs a driving force for driving the carrier table
M in the formula: number of second probes
N in the formula: the number of the elastic needles.
Step g, moving the distance, setting the distance x for the center of the second bonding pad on the bearing table to move upwards by pushing1+Δx+Δy；
Wherein:
when the length of the elastic needle is set to be S, the vertical displacement of the limiting bead is set to be delta x;
Δ y is the amount of vertical displacement required to add the second probe, and y is the range of variation according to flatnessmin-ymaxTake its maximum value ymaxThe amount of vertical displacement Δ y that needs to be added as a second probe;
Δ x + Δ y is a value for setting the vertical displacement of the position-limiting bead, i.e., the vertical displacement that the second probe needs to reach.
The invention has the beneficial effects that:
1. in the detection process, the bending deformation of the elastic needle is movably connected with the limiting part through the limiting bead, so that the limiting part does not shift transversely and only moves vertically, the second probe only bears the axial force and does not bear the shearing force and the bending moment, the second probe does not have lateral bending deformation, the second probe is strictly kept to vertically act on the second welding pad, and even in a large number of repeated testing processes, through a large number of contact extrusion, the probe can not generate unrecoverable bending deformation, the problem of scratching the welding pad or poor contact can be avoided, and the service life of the probe card is prolonged.
2. The length of the elastic needles arranged on the side wall of the stabilizing part in an array is adjusted to change the effective length S of the originally set elastic needle to an optimal value S0Therefore, under the condition that the contact pressure is almost unchanged, the bending deformation of the elastic needle is increased, the vertical displacement of the second probe is increased, the flatness problem generated in the assembling process is solved, the second probe at the highest point in a plurality of second probes can be ensured to be fully contacted with the second welding pad, and when the second probe with a few lowest points is contacted with the corresponding second welding pad, even if the vertical displacement of the second probe at the lowest point is slightly larger than delta x + delta y, the contact pressure is still smaller than that at the moment
The needle marks are still in a reasonable requirement range, the needle marks can be clear, good contact can be realized, and the problems existing in the contact can be solved by increasing the deformation of the elastic needle without increasing the contact pressure.
3. In setting the parameters, the range of variation of the flatness was recorded as ymin-ymaxTake its maximum value ymaxAs the vertical deformation quantity of the second probe which needs to be increased, the maximum deformation quantity can effectively ensure the effective contact of all the second probes and the second welding pad, and the pressure range F on the bearing tablemin-FmaxTaking the minimum value FminThe purpose of the driving force for driving the bearing table is to obtain clear needle marks, reduce the force action on the second welding pad to the maximum extent and establish an equation
Is solved out
I.e. an effective length of S0Adjusting the length of the elastic needles arranged on the side wall of the stabilizing part in an array manner to change the effective length S of the originally set elastic needle into S0The effective length of the elastic needle obtained by designing, testing, valuing and strictly calculating the parameters is used for increasing the vertical displacement of all the second probes so as to solve the problem of poor contact, the optimal value determination method is scientific and effective, and when the traditional design parameters are effectively determined, a large number of tests are required to be controlled manually, so that the technical high requirements of operators and the operation accuracy are met.
4. In the detection process, the effective length of the elastic needle is S0The vertical probe card device of (1) is installed on a bearing platform on a probe platform, and at the initial measuring time, the distance from the lowest end of the second probe to the upper surface of the second welding pad is set as x1The moving distance is set to x1+ Δ x + Δ y, i.e. moving the carrier table at a constant speed by using the linear guide rail and the sliding driving device on the probe table, and pushing the second pad on the carrier table to move upwards by a distance x1+ Δ x + Δ y, such parameter setting can satisfy the requirement of deflection, can satisfy the requirement of the contact pressure between second probe and the second pad again, can obtain clear needle mark on the second pad through the propulsion distance parameter of control plummer, has improved work efficiency and test data's accuracy.
5. The invention discloses a probe card device, which is characterized in that a vertical probe card device needing to replace probes is detached from a probe station, a plurality of first probes, a plurality of second probes and a deformation connecting device are detached, and main consumable items of the first probes and the second probes are checked after the first probes and the second probes are separated.
Drawings
FIG. 1 is a diagram of a vertical probe card apparatus separated from an object to be measured;
FIG. 2 is a diagram of a vertical probe card apparatus in contact with an object;
FIG. 3 is a cross-sectional view showing an internal structure of a vertical probe card device
FIG. 4 is an assembled view of a vertical probe card apparatus;
FIG. 5 is a schematic diagram of the connection of the first probe, the deformed connecting device and the second probe;
FIG. 6 is a schematic diagram showing the variation of vertical movement distance of an object to be measured;
FIG. 7 is a schematic diagram of the change of the displacement after the adjustment of the data setting of the deformed connecting device;
FIG. 8 is a graph showing bending moment of the elastic needle under concentrated load;
FIG. 9 is a graph showing the bending moment of the elastic needle under a unit load;
fig. 10 is a cross-sectional view of the stopper in front view.
In the figure: 1-upper guide plate, 2-middle guide plate, 3-lower guide plate, 4-deformation connecting device, 4-1-limiting piece, 4-2-limiting through hole, 4-2-1-chute, 4-3-limiting bead, 4-4-stabilizing piece, 4-5-limiting pad, 4-6-threaded through hole, 4-7-elastic pin, 5-first probe, 6-second probe, 7-circuit board, 8-first welding pad, 9-object to be measured, and 10-second welding pad.
Detailed Description
The invention will be described in detail below with reference to the following drawings:
detailed description of the invention
This embodiment is a vertical probe card device embodiment.
As shown in fig. 1-10, the vertical probe card apparatus disclosed in this embodiment includes an upper guide plate 1, a middle guide plate 2, a lower guide plate 3, a deformation connecting device 4, a first probe 5, a second probe 6, a circuit board 7, and a first pad 8; the upper guide plate 1, the middle guide plate 2 and the lower guide plate 3 are respectively provided with a plurality of vertical limiting through holes correspondingly, a plurality of deformation connecting devices 4 are arranged between the upper guide plate 1 and the middle guide plate 2 in an array manner, one ends of a plurality of first probes 5 penetrate through the vertical limiting through holes of the upper guide plate 1 to be electrically connected with one ends of the corresponding deformation connecting devices 4, the other ends of the plurality of first probes are connected with corresponding first welding pads 8 on a circuit board 7, one ends of a plurality of second probes 6 sequentially penetrate through the vertical limiting through holes of the lower guide plate 3 and the middle guide plate 2 and are electrically connected with the other ends of the corresponding deformation connecting devices 4, and the other ends of the plurality of second probes 6 correspond to a plurality of second welding pads 10 arranged on an object to be detected 9;
the deformation connecting device 4 comprises a limiting piece 4-1, a limiting bead 4-3, a stabilizing piece 4-4, a limiting pad 4-5 and an elastic needle 4-7; limiting through holes 4-2 are formed in the limiting piece 4-1 in an array mode, limiting beads 4-3 are arranged in the limiting through holes 4-2, a plurality of stabilizing pieces 4-4 are arranged between the upper guide plate 1 and the middle guide plate 2 in an array mode through limiting pads 4-5, a plurality of threaded through holes 4-6 are formed in the side wall of each stabilizing piece 4-4, one ends of a plurality of elastic needles 4-7 arranged in an array mode are arranged in the threaded through holes 4-6, and the other ends of the elastic needles 4-7 are connected with the limiting beads 4-3 in the limiting through holes 4-2; in the detection process, a second welding pad 10 on an object to be detected 9 is close to a second probe 6 under the pushing action of a bearing platform and is abutted against the second probe to generate force action, the second probe 6 pushes a limiting part 4-1 to move vertically upwards under the action of the second welding pad 10, the force action is uniformly acted on one end of an elastic needle 4-7 arranged in an array through a limiting ball 4-3, the elastic needle 4-7 is subjected to bending deformation under the action of force, the elastic needle 4-7 can make the limiting ball 4-3 abut against the lower end face of the side wall of a limiting through hole 4-2 formed in the limiting part 4-1 by utilizing the elastic potential energy of the elastic bending deformation of the elastic needle 4-7, so as to realize electric closed circuit connection, after the test is finished, the second welding pad 10 is separated from the second probe 6 under the action of the bearing platform, and simultaneously, the reaction force of the elastic needle 4-7 makes the corresponding second probe 6 vertically move downwards, aiming at the approaching and separating of the second probe 6 and the second welding pad 10 in the repeated detection process, the deformation and recovery of the elastic needle 4-7 can enable the second probe 6 to reciprocate so as to adapt to the detection of a large number of second welding pads 10, in the detection process, the bending deformation of the elastic needle 4-7 can enable the limiting piece 4-1 not to generate lateral deviation and only to move vertically through the movable connection of the limiting ball 4-3 and the limiting piece 4-1, the second probe 6 only bears the axial force action and does not bear the shearing force and the bending moment, the second probe 6 does not have lateral bending deformation, the second probe 6 strictly keeps acting on the second welding pad 10 vertically, even if a large amount of contact extrusion is carried out in the repeated detection process, the unrecoverable bending deformation of the probe can not be generated, and the problems of welding pad scratching or poor contact can not be caused, the service life of the probe card is prolonged;
assembling a plurality of vertical probe card devices to be tested, adjusting the length of an elastic needle 4-7 arranged on the side wall of a stabilizing part 4-4 through a thread effect adjusting array in the assembling process, adjusting the effective length of the elastic needle 4-7, preliminarily setting the effective length of the elastic needle 4-7 as S, and then assembling the vertical probe card devices;
after the flatness test is finished, the assembled vertical probe card to be tested is arranged on a bearing table of a test probe table, the contact flatness test is carried out one by one, the distance between the highest point and the lowest point of the tip of the second probe 6 on the vertical probe card is measured, namely the vertical displacement from the first electrical contact to the last electrical contact of the tip of the second probe 6 is recorded, and the variation range of the flatness is ymin-ymaxTaking the maximum value y thereofmaxAs the second probe 6, the amount of vertical displacement that needs to be increased
The test probe station is used for carrying out contact pressure test experiments one by one, the bearing table is moved by utilizing the longitudinal linear guide rail on the probe station and the sliding driving device thereof, so that the center of the second welding pad 10 on the bearing table acts on the tip of the second probe 6, the second welding pad 10 of the object to be tested 9 is stopped by stably acting on the second welding pad, then the needle mark on the second welding pad 10 is observed through a microscope, the force acting on the bearing table is recorded by utilizing a force measuring instrument, when clear normal needle marks are obtained, the pressure range F acting on the bearing table at the moment is recorded by utilizing the force measuring instrumentmin-FmaxTaking the minimum value FminAs the driving force for driving the bearing platform, according to the number m of the second probes 6, the stress analysis is carried out, and the contact pressure is specified to be
Calculating the deformation,
Measuring the elastic modulus E and the inertia moment I of the material of the elastic needle 4-7;
the stress analysis calculates the concentrated load of the limiting part 4-1 acting on one end of the elastic needle 4-7 through the limiting bead 4-3, when the number of the elastic needles is n, the concentrated load of the limiting bead 4-3 acting on one end of the elastic needle 4-7 is calculated as
Drawing concentrated loads
Moment diagram when acting on the position limiting bead 4-3 and the elastic needle 4-7, namely MPA drawing;
plotting unit load
Moment diagram when acting on the position limiting bead 4-3 and the elastic needle 4-7, namely M1A drawing;
calculating the longitudinal displacement of the limiting bead 4-3 according to the graph multiplication
Need to explain: the method is a calculation method of the deformation, and aims at the situation that the number of the elastic needles is n, and the method takes n as 2 or 3 as the optimal value;
the longitudinal displacement Deltax of the limiting bead 4-3 is calculated by graph multiplication
Wherein:
m in the equationP：MPDifferential area in the figure;
m in the equation1：M1Differential area in the figure;
e in the formula: the modulus of elasticity of the elastic needle;
i in the formula: the moment of inertia of the elastic needle;
a in the formulaω: the area of a moment diagram;
y in the equationc: area A of a moment diagramωThe centroid of the other straight line bending moment diagram corresponds to the vertical mark of the other straight line bending moment diagram;
s in the formula: the effective length of the elastic needle 4-7 is preliminarily set to a value indicating that S is smaller than the optimum value S of the elastic needle 4-70And the ratio of the preliminarily set length S of the elastic needle 4-7 to the diameter of the elastic needle 4-7 is measured to be 3 through experiments, which is most reasonable
F in the equationmin: the force measuring instrument is used for recording the force acting on the bearing platform, and when clear normal needle marks are obtained, the force measuring instrument is used for recording the pressure range F acting on the bearing platform at the momentmin-FmaxTaking the minimum value F thereofminAs a driving force for driving the carrier table
M in the formula: number of second probes 6
N in the formula: the number of the elastic needles 4-7.
The method comprises the steps of assuming the length of each elastic needle 4-7 to be S in a reasonable range, assembling a part of vertical probe card devices for testing, sequentially performing flatness test and contact pressure test, and detecting the flatness range y of the vertical probe card devicesmin-ymaxMaximum value ymaxAs the vertical displacement of the second probe 6 needs to be increased, the problem of poor contact between the second probe 6 and the second bonding pad 10 is effectively solved, and the average deformation is increased from Δ x to Δ x + ymaxAnd by Δ x + ymaxAs one end longitudinal displacement of the elastic needle 4-7, effective contact with the second bonding pad 10 can be effectively ensured even at the lowest point of the second probe 6, and the maximum deformation is aimed at satisfying all effective contact between the second probe and the second bonding pad to the maximum extent, contact pressure test experiment, observing the needle mark on the second bonding pad 10 through a microscope, and recording the needle mark acting on the bearing table by using a dynamometerThe magnitude of the force, when a clear normal needle mark is obtained, is recorded by a force measuring instrument in the pressure range F acting on the bearing table at the momentmin-FmaxTaking the minimum value FminThe purpose of the driving force for driving the carrier is to obtain clear needle marks and minimize the force acting on the second bonding pads 10, and the contact pressure is specified as m according to the number of the second probes 6 and the stress analysis
The vertical displacement of the limiting bead 4-3 is set to be delta x + delta y, namely the original vertical displacement is set to be delta x + delta y
Then, Δ y is added, and Δ y ═ ymaxAnd the maximum acting force of the limiting bead 4-3 and the limiting part 4-1 is kept as
The effective length of the elastic needle 4-7 is recalculated and the equation is established
Is solved out
I.e. an effective length of S0And with S0As the optimal value of the effective length of the elastic needle 4-7, the length of the elastic needle 4-7 arranged on the side wall of the stabilizing member 4-4 in an array is adjusted to change the effective length S of the originally set elastic needle into S0Therefore, the effective length of the elastic needles 4-7 is increased, the bending deformation of the elastic needles 4-7 can be increased under the condition that the contact pressure is unchanged, the vertical displacement of the second probe 6 is increased, the problem of flatness generated in the assembling process is solved, and the bearing platform is controlled to push the second welding pad to move upwards by x1At a distance of + deltax + deltay,
wherein x1For the distance from the lowest end of a second probe arranged on the probe platform to the upper surface of a second welding pad, when the length of the delta x is set to be S, the vertical displacement of the limiting bead is realized, and the delta y is increased as requiredThe vertical displacement of the second probe is y according to the variation range of flatnessmin-ymaxTake its maximum value ymaxThe vertical displacement delta y required to be added as the second probe can ensure that the second probe at the highest point in the plurality of second probes can be fully contacted with the second bonding pad, and when the second probe at the lowest point is contacted with the corresponding second bonding pad, the vertical displacement of the second probe at the lowest point is slightly larger than delta x + delta y, and the contact pressure is smaller than delta y
Make the needle mark still in reasonable requirement within range, can make the needle mark clear, can realize good contact again, with through not increasing contact pressure, solve the problem that exists in the contact through the deflection that increases the elasticity needle, even there is a small number of contact pressure grow but still in the regulation within range, and the effective length of the elasticity needle that this parameter was through designing, experiment, the value, the reachs of strict calculation, in order to increase the vertical displacement volume of all second probes in order to solve the problem of contact failure, optimal value determining method science is effective, when effectual solution traditional design parameter is confirmed, need manual control to carry out a large amount of experiments, the problem to the high requirement of operating personnel technique and operation accuracy.
The side wall of one end of the limiting through hole 4-2 is provided with a chute 4-2-1, the inclination angle of the bottom wall of the chute 4-2-1 can meet the condition that the bent elastic needle 4-7 is positioned in the chute 4-2-1 and is not in contact with the bottom wall of the chute 4-2-1, and the chute 4-2-1 can be completely matched with the deformed and bent elastic needle 4-7, so that the elastic needle 4-7 is fully deformed, and the vertical displacement generated when the elastic needle 4-7 is deformed can be accurately calculated.
The deformation connecting device 4, the first probe 5 and the second probe 6 are made of tungsten, beryllium copper and palladium alloy.
The array corresponding to the limiting pads 4-5 is arranged on the lower end face of the upper guide plate 1 and the upper end face of the upper guide plate 1, the limiting pads 4-5 arranged on the upper guide plate 1 are provided with through holes, the first probes 5 penetrate through the through holes of the limiting pads 4-5 to be connected with the stabilizing parts 4-4, and the limiting pads 4-5 are made of ceramics, so that the insulating effect can be achieved, and meanwhile, the stabilizing parts 4-4 can be fixed.
An external thread is arranged at one end of the first probe 5, a threaded hole is formed in the upper end of the stabilizing part 4-4, and the first probe 5 is electrically connected with the stabilizing part 4-4 through the thread.
An external thread is arranged at one end of the second probe 6, a threaded hole is formed in the lower end of the limiting part 4-1, and the second probe 6 is electrically connected with the limiting part 4-1 through the thread.
In the detection process, the second welding pad 10 on the object to be detected 9 is pushed by the bearing table to approach the second probe 6 and abut against the second probe to generate force action, the second probe 6 pushes the limiting part 4-1 to move vertically and upwards under the action of the second welding pad 10, the force action is uniformly acted on one end of the elastic pins 4-7 arranged in the array through the limiting balls 4-3, the elastic pins 4-7 are bent and deformed under the action of the force, the elastic pins 4-7 can utilize the elastic potential energy of the elastic bending deformation of the elastic pins 4-7 to ensure that the limiting balls 4-3 abut against the lower end face of the side wall of the limiting through hole 4-2 formed in the limiting part 4-1 to realize the electric closed circuit connection in the deformation connecting device 4, and meanwhile, the deformation connecting device 4, the first probe 5 and the second probe 6 are all made of tungsten, The test device is characterized in that the test device is made of beryllium copper and palladium alloy, a first probe 5 and a second probe 6 are arranged on a deformation connecting device 4 through a screw thread effect to form electric closed connection of the beryllium copper and the palladium alloy, the first probe 5 is in contact with a first welding pad 8 on a circuit board 7, the second probe 6 is in contact with a second welding pad 10 on an object to be tested 9 to complete electric connection between a vertical probe card device and the object to be tested 9, then a computer sends a test starting signal to the computer, a test finishing signal and a test state signal are sent to the computer after the test of the test machine is finished, the test machine checks the test state signal after obtaining the test finishing signal, and a test report is output according to the state signal.
The upper guide plate 1, the middle guide plate 2 and the lower guide plate 3 are connected through connecting bolts 11 arranged in an annular array.
Detailed description of the invention
The present embodiment is an embodiment of a vertical probe card apparatus.
The method for setting the test parameters of the vertical probe card device disclosed by the embodiment comprises the following steps:
step a, assuming length,
Assembling a plurality of vertical probe card devices to be tested, adjusting the length of an elastic needle 4-7 arranged on the side wall of a stabilizing part 4-4 through a thread effect adjusting array in the assembling process, adjusting the effective length of the elastic needle 4-7, preliminarily setting the effective length of the elastic needle 4-7 as S, and then assembling the vertical probe card devices;
step b, plane test
Mounting the assembled vertical probe card to be tested on a bearing table of a test probe station, testing the contact flatness one by one, measuring the distance between the highest point and the lowest point of the tip of the second probe 6 on the vertical probe card, namely the vertical displacement from the first electrical contact to the last electrical contact of the tip of the second probe 6, and recording the variation range of the flatness as ymin-ymaxTake its maximum value ymaxAs the second probe 6 requires an increased amount of vertical displacement;
step b, contact pressure,
After the flatness test is finished, the test probe stations are used for carrying out contact pressure test experiments one by one, the bearing table is moved by utilizing the longitudinal linear guide rail on the probe station and the sliding driving device thereof, so that the center of the second welding pad 10 on the bearing table acts on the tip of the second probe 6, the second welding pad 10 of the object to be tested 9 is stopped by stably acting on, then the needle mark on the second welding pad 10 is observed by a microscope, the force measuring instrument is utilized for recording the force acting on the bearing table, and when clear normal needle marks are obtained, the force measuring instrument is utilized for recording the pressure range F acting on the bearing table at the momentmin-FmaxTaking the minimum value FminAs the driving force for driving the bearing platform, according to the number m of the second probes 6, the stress analysis is carried out, and the contact pressure is specified to be
Step c, deformation calculation,
1, measuring the elastic modulus E and the inertia moment I of the material of the elastic needle 4-7;
2, calculating the concentrated load of the limiting part 4-1 acting on one end of the elastic needle 4-7 through the limiting ball 4-3 by stress analysis, and when the number of the elastic needles is n, calculating the concentrated load of the limiting ball 4-3 acting on one end of the elastic needle 4-7 as
(3) Drawing concentrated loads
Moment diagram when acting on the position-limiting bead 4-3 and the elastic needle 4-7, namely MPA drawing; 4 plotting unit load
Moment diagram when acting on the position-limiting bead 4-3 and the elastic needle 4-7, namely M1A drawing; 5 calculating the longitudinal displacement of the limiting bead 4-3 according to the multiplication of the figure
D, setting the height, measuring the initial time, wherein the distance from the lowest end of the second probe 6 arranged on the probe station to the upper surface of the second welding pad 10 is x1；
Step e, effective length,
The vertical displacement of the limiting bead 4-3 is set to be delta x + delta y, namely the original vertical displacement is set to be delta x + delta y
Then increase by y, and y is equal to ymaxAnd the maximum acting force of the limiting bead 4-3 and the limiting part 4-1 is kept as
The effective length of the elastic needle 4-7 is recalculated and the equation is established
Is solved out
I.e. an effective length of S0Adjusting the length of the elastic needles 4-7 arrayed on the side wall of the stabilizing part 4-4 to change the effective length S of the originally set elastic needle into S0；
S in the formula: preliminary set values of the effective lengths of the elastic needles 4-7;
s in the formula0: an optimal value of the effective length of the elastic needles 4-7;
f in the equationmin: the force measuring instrument is used for recording the force acting on the bearing platform, and when clear normal needle marks are obtained, the force measuring instrument is used for recording the pressure range F acting on the bearing platform at the momentmin-FmaxTaking the minimum value FminAs a driving force for driving the carrier table
M in the formula: number of second probes 6
N in the formula: the number of the elastic needles 4-7.
E, moving the distance, setting the distance x for the center of the second bonding pad 10 on the carrier stage to move upward by pushing1+Δx+Δy；
Wherein: delta x is the vertical displacement of the limiting bead 4-3 when the length of the elastic needle 4-7 is set to be S;
Δ y is the amount of vertical displacement required to add the second probe 6, and y is the range of variation according to flatnessmin-ymaxTake its maximum value ymaxAs the amount of vertical displacement Δ y that the second probe 6 needs to be increased;
Δ x + Δ y is a value for setting the vertical displacement of the position-limiting bead 4-3, i.e., the vertical displacement that the second probe 6 needs to reach.
Detailed description of the invention
The present embodiment is an embodiment of a vertical probe card apparatus.
A method for calculating the probe displacement of a vertical probe card device comprises the following steps:
step a, measuring the elastic modulus E and the inertia moment I of the material of the elastic needle 4-7;
step b, calculating the action of the limiting part 4-1 on one end of the elastic needle 4-7 through the limiting bead 4-3 by stress analysisConcentrated load, when the number of the elastic needles is n, the concentrated load of the limiting bead 4-3 acting on one end of the elastic needle 4-7 is calculated as
Step c, drawing concentrated load
Moment diagram when acting on the position-limiting bead 4-3 and the elastic needle 4-7, namely MPA drawing;
step d, drawing unit load
Moment diagram when acting on the position-limiting bead 4-3 and the elastic needle 4-7, namely M1A drawing;
step e, calculating the longitudinal displacement of the limiting bead 4-3 according to the graph multiplication
Wherein: s in the formula: preliminary set values of the effective lengths of the elastic needles 4-7;
f in the equationmin: the force measuring instrument is used for recording the force acting on the bearing platform, and when clear normal needle marks are obtained, the force measuring instrument is used for recording the pressure range F acting on the bearing platform at the momentmin-FmaxTaking the minimum value F thereofminAs a driving force for driving the carrier table
M in the formula: the number of second probes 6;
n in the formula: 4-7 elastic needles;
e in the formula: the elastic modulus of the elastic needle 4-7;
i in the formula: moment of inertia of the elastic needles 4-7.
Detailed description of the invention
The present embodiment is an embodiment of a vertical probe card apparatus.
A method for determining the optimal length of elastic needle includes such steps as
Step a, assuming length,
Assembling a plurality of vertical probe card devices to be tested, adjusting the length of an elastic needle 4-7 arranged on the side wall of a stabilizing part 4-4 through a thread effect adjusting array in the assembling process, adjusting the effective length of the elastic needle 4-7, preliminarily setting the effective length of the elastic needle 4-7 as S, and then assembling the vertical probe card devices;
step b, deformation calculation,
1, measuring the elastic modulus E and the inertia moment I of the material of the elastic needle 4-7;
2, calculating the concentrated load of the limiting part 4-1 acting on one end of the elastic needle 4-7 through the limiting beads 4-3 by stress analysis, and when the number of the elastic needles is n, calculating the concentrated load of the limiting beads 4-3 acting on one end of the elastic needle 4-7 as
3 drawing concentrated load
Moment diagram when acting on the position-limiting bead 4-3 and the elastic needle 4-7, namely MPA drawing;
4 plotting unit load
Moment diagram when acting on the position-limiting bead 4-3 and the elastic needle 4-7, namely M1A drawing;
5 calculating the longitudinal displacement of the limiting bead 4-3 according to the multiplication of the figure
F in the formulamin: the force measuring instrument is used for recording the force acting on the bearing platform, and when clear normal needle marks are obtained, the force measuring instrument is used for recording the pressure range F acting on the bearing platform at the momentmin-FmaxTaking the minimum value FminAs a driving force for driving the carrier table
M in the formula: the number of second probes 6;
n in the formula: 4-7 elastic needles;
e in the formula: the elastic modulus of the elastic needle 4-7;
i in the formula: moment of inertia of the elastic needles 4-7.
Step c, effective length,
The vertical displacement of the limiting bead 4-3 is set to be delta x + delta y, namely the original vertical displacement is set to be delta x + delta y
Then increase by y, and y is equal to ymaxAnd the maximum acting force of the limiting bead 4-3 and the limiting part 4-1 is kept as
The effective length of the elastic needle 4-7 is recalculated and the equation is established
Is solved out
I.e. an effective length of S0Adjusting the length of the elastic needles 4-7 arrayed on the side wall of the stabilizing part 4-4 to change the effective length S of the originally set elastic needle into S0。
Wherein: delta x is the vertical displacement of the limiting bead 4-3 when the length of the elastic needle 4-7 is set to be S;
Δ y is the amount of vertical displacement required to add the second probe 6, and y is the range of variation according to flatnessmin-ymaxTake its maximum value ymaxAs the amount of vertical displacement Δ y that the second probe 6 needs to be increased;
Δ x + Δ y is a value for setting the vertical displacement of the position-limiting bead 4-3, i.e., the vertical displacement that the second probe 6 needs to reach.
Detailed description of the invention
A method for inspecting a vertical probe card apparatus, comprising the steps of:
step a, fixing and mounting the object to be tested 9 on a bearing table on a probe table, and completing assemblyThe effective length of the elastic needle 4-7 is S0The vertical probe card device is fixed on a probe card mounting table above the bearing table, the probe card is leveled, then the probe card is locked and fixed through a locking knob to complete the fixed placement of the probe card, and then the circuit board 7 is electrically connected with a testing machine;
b, aligning and positioning, namely moving the bearing table by utilizing the transverse linear guide rail, the longitudinal linear guide rail and the sliding driving device thereof on the probe table until the center of the second welding pad 10 on the object to be tested 9 on the bearing table is contacted with the tip of the second probe 6, and finishing the alignment;
c, setting the height, moving the bearing platform by utilizing the longitudinal linear guide rail on the probe platform and the sliding driving device thereof, separating the center of the second welding pad 10 on the bearing platform from the tip of the second probe 6, and enabling the distance from the tip of the second probe 6 to the upper end surface of the second welding pad 10 to be x1Completing the height setting;
d, pressing and pushing, namely utilizing the upward linear guide rail on the probe station and the sliding driving device thereof to move the bearing table at a constant speed, and pushing the second welding pad 10 on the bearing table to move upwards by a distance x1+Δx+Δy；
Wherein: x is the number of1Is the distance from the lowest end of the second probe 6 mounted on the probe station to the upper surface of the second pad 10;
delta x is the vertical displacement of the limiting bead 4-3 when the length of the elastic needle 4-7 is set to be S;
Δ y is the amount of vertical displacement required to add the second probe 6, and y is the range of variation according to flatnessmin-ymaxTake its maximum value ymaxAs the amount of vertical displacement Δ y that the second probe 6 needs to be increased;
Δ x + Δ y is a value for setting the vertical displacement amount of the position-limiting bead, that is, the vertical displacement amount that the second probe 6 needs to reach.
And e, after the closed circuit test and the contact of the second probe 6 are finished, the computer sends a test starting signal to the test machine, after the test of the test machine is finished, a test finishing signal and a test state signal are sent to the computer, the computer checks the test state signal after obtaining the test finishing signal, and a test report is output according to the state signal.
Detailed description of the invention
A method for repairing a vertical probe card device comprises the following steps:
a, integrally detaching, moving the bearing table by using a longitudinal linear guide rail on the probe table and a sliding driving device thereof, separating the center of a second welding pad 10 on the bearing table from the tip of a second probe 6, releasing the electric connection between the circuit board 7 and a testing machine, then adjusting a locking knob on the probe table to release the fixation, and detaching a vertical probe card device of the probe to be replaced from an installation table on the probe table;
and b, fixedly mounting, fixing the new vertical probe card device on a probe card mounting table above the bearing table, leveling the probe card device, locking and fixing the probe card through a locking knob to finish the fixed placement of the probe card, and electrically connecting the circuit board 7 with a testing machine to perform detection work.
Step c, disassembling and separating, separating the circuit board 7 from the first probe 5, separating the upper guide plate 1, the middle guide plate 2 and the lower guide plate 3 by adjusting the connecting bolt 11, taking the plurality of first probes 5 out of the upper guide plate 1, taking the plurality of second probes 6 out of the middle guide plate 2 and the lower guide plate 3, separating the limiting parts 4-1 correspondingly connected with the first probes 5 from the stabilizing parts 4-4 correspondingly connected with the second probes 6, and taking the elastic pins 4-7 provided with the limiting beads 4-3 out of the limiting through holes 4-2 on the limiting parts 4-1 to finish separation;
d, replacing the probes, assembling and connecting the first probes 5 and the second probes 6 which are ready to be replaced with the deformation connecting device 4, enabling a plurality of first probes 5 to penetrate through the vertical limiting through holes of the upper guide plate 1, enabling a plurality of second probes 6 to penetrate through the vertical limiting through holes of the middle guide plate 2 and the lower guide plate 3, connecting the upper guide plate 1, the middle guide plate 2 and the lower guide plate 3 through connecting bolts 11, and fixing the upper guide plate 1, the middle guide plate 2 and the lower guide plate 3 through adjusting the connecting bolts 11;
e, probe repair, namely detecting the first probe 5 and the second probe 6 which replace the following probes, screening the physical deformation of the tips of the first probe and the second probe, and polishing and repairing the first probe 5 and the second probe 6 by using a probe polishing machine;
and f, reassembling and reassembling the first probe 5 and the second probe 6 which are polished and repaired and the replaced deformed connecting device 4.
The physical deformation of the tip of the second probe 6 can affect the pollutant and oxide layer of the second probe 6 penetrating into the second welding pad 10, and can affect the contact resistance, so that the contact resistance is larger, the current is smaller, and the test failure is caused, the method adopts the steps of replacing the first probe 5, the second probe 6 and the deformation connecting device 4, so that the working efficiency can be greatly improved, simultaneously, the disassembled vertical probe card device is checked, and the main consumable items are the first probe and the second probe The second probe performs rapid repair of the target.
Detailed description of the invention
A method for assembling a vertical probe card device comprises the following steps:
step a, connecting needles, electrically connecting a plurality of first probes 5 with the upper ends of a plurality of corresponding stabilizing parts 4-4 through threads, and electrically connecting a plurality of second probes 6 with the lower ends of a plurality of corresponding limiting parts 4-1 through threads;
b, adjusting the distance, arranging a plurality of elastic needles 4-7 arranged in an array in threaded through holes 4-6 on the side wall of the stabilizing part 4-4 through the action of threads, and adjusting the effective length of the elastic needles 4-7 to be S by rotating the elastic needles 4-70；
C, hanging the part, and correspondingly inserting a limiting bead 4-3 at one end of an elastic needle 4-7 into a limiting through hole 4-2 of a limiting part 4-1;
c, penetrating a plate, enabling a plurality of groups of first probes 5 connected with stabilizing pieces 4-4 to penetrate through vertical limiting holes from the lower end face of the upper-layer guide plate 1, and enabling the upper ends of the stabilizing pieces 4-4 to be clamped with limiting pads 4-5 correspondingly arranged on the lower end face of the upper-layer guide plate 1; adjusting the upper guide plate 1 to be aligned with the middle guide plate 2 and the lower guide plate 3, enabling a plurality of second probes 6 to penetrate through corresponding vertical limiting through holes of the middle guide plate 2 and the lower guide plate 3, and enabling the lower ends of a plurality of stabilizing parts 4-4 to be clamped with limiting pads correspondingly arranged on the upper end face of the middle guide plate 2;
e, fixing, namely connecting the upper guide plate 1, the middle guide plate 2 and the lower guide plate 3 through connecting bolts 11, and fixing the upper guide plate, the middle guide plate 2 and the lower guide plate through adjusting the connecting bolts 11;
and f, electrically connecting, abutting the plurality of first welding pads 8 on the circuit board 7 against the corresponding first probes 5, and enabling the first probes 5 to act on the centers of the corresponding first welding pads 8.
The above embodiments relate to a vertical probe card apparatus and various component embodiments. It should be noted that, in these embodiments, various technical solutions can be arranged and combined, and those skilled in the art can exhaust the results of each permutation and combination according to the mathematical knowledge of permutation and combination learned in high school, and the results of each permutation and combination should be understood as being disclosed in the present application.
The above embodiments are merely illustrative of the present patent and do not limit the scope of the patent, and those skilled in the art can make modifications to the parts thereof without departing from the spirit and scope of the patent.
Claims (3)
1. A method for assembling a vertical probe card device is characterized in that: the method comprises the following steps:
step a, connecting needles, electrically connecting a plurality of first probes (5) with the upper ends of a plurality of corresponding stabilizing parts (4-4) through threads, and electrically connecting a plurality of second probes (6) with the lower ends of a plurality of corresponding limiting parts (4-1) through threads;
b, adjusting the distance, arranging a plurality of elastic needles (4-7) arranged in an array in the threaded through holes (4-6) on the side wall of the stabilizing part (4-4) through the action of threads, and adjusting the effective length of the elastic needles (4-7) by rotating the elastic needles (4-7)Degree of S0；
C, hanging the part, and correspondingly inserting a limiting bead (4-3) at one end of the elastic needle (4-7) into a limiting through hole (4-2) of the limiting part (4-1);
d, penetrating the plate, enabling a plurality of groups of first probes (5) connected with the stabilizing parts (4-4) to penetrate through the vertical limiting holes from the lower end face of the upper guide plate (1), and enabling the upper ends of the stabilizing parts (4-4) to be clamped with limiting pads (4-5) correspondingly arranged on the lower end face of the upper guide plate (1); adjusting the upper guide plate (1) to be aligned with the middle guide plate (2) and the lower guide plate (3), enabling a plurality of second probes (6) to penetrate through corresponding vertical limiting through holes of the middle guide plate (2) and the lower guide plate (3), and enabling the lower ends of a plurality of stabilizing parts (4-4) to be clamped with limiting pads correspondingly arranged on the upper end face of the middle guide plate (2);
e, fixing, namely connecting the upper guide plate (1), the middle guide plate (2) and the lower guide plate (3) through connecting bolts (11), and fixing the upper guide plate, the middle guide plate and the lower guide plate through adjusting the connecting bolts (11);
and f, electrically connecting, abutting the plurality of first welding pads (8) on the circuit board (7) against the corresponding first probes (5), and enabling the first probes (5) to act on the centers of the corresponding first welding pads (8).
2. A method for repairing a vertical probe card device is characterized by comprising the following steps: the method comprises the following steps:
a, integrally detaching, moving the bearing table by using a longitudinal linear guide rail on the probe table and a sliding driving device thereof, separating the center of a second welding pad (10) on the bearing table from the tip of a second probe (6), releasing the electric connection between a circuit board (7) and a testing machine, then adjusting a locking knob on the probe table to release the fixation, and detaching a vertical probe card device of a probe to be replaced from the bearing table on the probe table;
and b, fixedly installing, fixing the new vertical probe card device on a probe card installing table above the bearing table, leveling the probe card device, locking and fixing the probe card through a locking knob to finish the fixed placement of the probe card, and electrically connecting the circuit board (7) with a testing machine to perform detection work.
Step c, disassembling and separating, separating the circuit board (7) from the first probes (5), separating the upper guide plate (1), the middle guide plate (2) and the lower guide plate (3) by adjusting the connecting bolts (11), taking the plurality of first probes (5) out of the upper guide plate (1), taking the plurality of second probes (6) out of the middle guide plate (2) and the lower guide plate (3), separating the limiting parts (4-1) correspondingly connected with the first probes (5) from the stabilizing parts (4-4) correspondingly connected with the second probes (6), taking the elastic needles (4-7) provided with the limiting beads (4-3) out of the limiting through holes (4-2) on the limiting parts (4-1), and completing separation;
d, replacing the probes, assembling and connecting the first probes (5) and the second probes (6) which are ready to be replaced with the deformation connecting device (4), enabling a plurality of first probes (5) to penetrate through vertical limiting through holes of the upper guide plate (1), enabling a plurality of second probes (6) to penetrate through vertical limiting through holes of the middle guide plate (2) and the lower guide plate (3), connecting the upper guide plate (1), the middle guide plate (2) and the lower guide plate (3) through connecting bolts (11), and fixing the upper guide plate, the middle guide plate and the lower guide plate through adjusting the connecting bolts (11);
e, probe repair, namely detecting a first probe (5) and a second probe (6) which replace the following probes, screening the physical deformation of the tips of the first probe and the second probe, and polishing and repairing the first probe (5) and the second probe (6) by using a probe polishing machine;
and f, reassembling and reassembling the first probe (5) and the second probe (6) which are polished and repaired and the replaced deformed connecting device (4).
3. A method for setting test parameters of a vertical probe card device is characterized by comprising the following steps: the method comprises the following steps:
step a, assuming length
Firstly assembling a plurality of vertical probe card devices to be tested, in the assembling process, adjusting the length of an elastic needle (4-7) arranged on the side wall of a stabilizing member (4-4) through a thread effect adjusting array, adjusting the effective length of the elastic needle (4-7), preliminarily setting the effective length of the elastic needle (4-7) as S, and then assembling the vertical probe card devices;
step b, plane test
To be assembledThe vertical probe card to be tested is arranged on a bearing table of a test probe table, contact flatness test is carried out one by one, the distance between the highest point and the lowest point of the tip of a second probe (6) on the vertical probe card is measured, namely the vertical displacement from the first electrical contact to the last electrical contact of the tip of the second probe (6) is measured, and the change range of flatness is recorded as ymin-ymaxTake its maximum value ymaxAs the second probe (6) requires an increased amount of vertical displacement;
step c, calculation of contact pressure
After the flatness test is finished, the test probe stations are used for carrying out contact pressure test experiments one by one, the bearing table is moved by utilizing the longitudinal linear guide rail on the probe station and the sliding driving device thereof, so that the center of the second welding pad (10) on the bearing table acts on the tip of the second probe (6), the second welding pad (10) of the object to be tested (9) is stopped stably, then the needle mark on the second welding pad (10) is observed through a microscope, the force measuring instrument is used for recording the force acting on the bearing table, and when clear normal needle marks are obtained, the force measuring instrument is used for recording the pressure range F acting on the bearing table at the momentmin-FmaxTaking the minimum value FminAs the driving force for driving the bearing platform, according to the number m of the second probes (6), the stress analysis is carried out to set the contact pressure to be
Step d, deformation calculation
D1, measuring the elastic modulus E and the inertia moment I of the material of the elastic needle (4-7);
d2, analyzing and calculating the concentrated load of the limiting part (4-1) acting on one end of the elastic needle (4-7) through the limiting bead (4-3), and calculating the concentrated load of the limiting bead (4-3) acting on one end of the elastic needle (4-7) as n when the number of the elastic needles is n
Step d3, drawing concentrated load
Moment diagram when acting on the position limiting bead (4-3) and the elastic needle (4-7), namely MPA drawing;
step d4, drawing unit load
Moment diagram when acting on the position limiting bead (4-3) and the elastic needle (4-7), namely M1A drawing;
d5, calculating the longitudinal displacement of the limiting bead (4-3) according to the graph multiplication
Wherein:
s is a preliminary set value of the effective length of the elastic needle (4-7);
Fminin order to record the force acting on the carrier table by means of a force measuring device, when a clear normal needle mark is obtained, the pressure range F acting on the carrier table at the time is recorded by means of the force measuring devicemin-FmaxTaking the minimum value FminAs the driving force to drive the bearing platform;
m in the formula is the number of the second probes (6);
n in the formula is the number of the elastic needles (4-7);
e in the formula is the elastic modulus of the elastic needle (4-7);
i in the formula is the inertia moment of the elastic needle (4-7);
step e, height setting
The distance from the lowest end of the second probe (6) mounted on the probe station to the upper surface of the second pad (10) is x1；
Step f, effective length calculation
The vertical displacement of the limiting bead (4-3) is set to be delta x + delta y, namely the original vertical displacement is set to be delta x + delta y
Then, Δ y is added, and Δ y ═ ymaxAnd the maximum acting force of the limiting bead (4-3) and the limiting part (4-1) is kept as
Then the effective length of the elastic needle (4-7) is recalculated, and an equation is established
Is liberated to
I.e. an effective length of S0Adjusting the length of the elastic needles (4-7) arranged on the side wall of the stabilizing part (4-4) in an array manner to change the effective length S of the originally set elastic needle into S0；
S in the formula: preliminary set values of the effective lengths of the elastic needles 4-7;
s in the formula0: an optimal value of the effective length of the elastic needles 4-7;
f in the equationmin: the force measuring instrument is used for recording the force acting on the bearing platform, and when clear normal needle marks are obtained, the force measuring instrument is used for recording the pressure range F acting on the bearing platform at the momentmin-FmaxTaking the minimum value FminAs a driving force for driving the carrier table
M in the formula: the number of the second probes (6)
N in the formula: the number of the elastic needles (4-7).
Step g, moving distance, setting the distance x for the center of the second welding pad (10) on the bearing platform to move upwards by pushing1+Δx+Δy；
Wherein:
delta x is the vertical displacement of the limiting bead (4-3) when the length of the elastic needle (4-7) is set to be S;
delta y is the amount of vertical displacement required to add the second probe (6), and y is the range of variation according to flatnessmin-ymaxTake its maximum value ymaxThe vertical displacement amount delta y required to be increased as the second probe (6);
the delta x + delta y is a value for setting the vertical displacement of the limiting bead (4-3), namely the vertical displacement required by the second probe (6).
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| WO2023240786A1 (en) * | 2022-06-17 | 2023-12-21 | 上海泽丰半导体科技有限公司 | Stroke compensation system and method for probe card |
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| CN101598743A (en) * | 2008-06-02 | 2009-12-09 | 旺矽科技股份有限公司 | Probe |
| CN101738509A (en) * | 2008-11-24 | 2010-06-16 | 旺矽科技股份有限公司 | High-frequency vertical probe device |
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