CN114071848B - Plasma diagnostic circuit and method - Google Patents
Plasma diagnostic circuit and method Download PDFInfo
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- CN114071848B CN114071848B CN202111154274.2A CN202111154274A CN114071848B CN 114071848 B CN114071848 B CN 114071848B CN 202111154274 A CN202111154274 A CN 202111154274A CN 114071848 B CN114071848 B CN 114071848B
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- 238000000034 method Methods 0.000 title claims abstract description 8
- 238000005070 sampling Methods 0.000 claims abstract description 57
- 238000002955 isolation Methods 0.000 claims abstract description 26
- 238000003745 diagnosis Methods 0.000 claims abstract description 10
- 238000012545 processing Methods 0.000 claims abstract description 9
- 238000001914 filtration Methods 0.000 claims description 7
- 239000003381 stabilizer Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 7
- 238000012544 monitoring process Methods 0.000 abstract description 3
- 230000003750 conditioning effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000002405 diagnostic procedure Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
- H05H1/0081—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature by electric means
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Abstract
The invention relates to a plasma diagnosis circuit and a method, wherein the circuit comprises a triangular wave driving module and a signal adjusting module, the triangular wave driving module is used for generating triangular wave signals, amplifying the triangular wave signals and outputting the triangular wave signals, and collecting voltage adjusting signals and at least two groups of current sampling signals from an output loop; the signal adjusting module is used for carrying out signal processing on the voltage adjusting signal and at least two groups of current sampling signals and converting the voltage adjusting signal and the at least two groups of current sampling signals into voltage signals for isolation output. The invention adopts the triangular wave signal to carry out high-power driving, greatly improves the range of plasma diagnosis, adopts current double-range sampling, has higher current resolution, improves the measurement precision, isolates the voltage monitoring signal ground from the triangular wave output signal ground in an isolation output mode, and increases the measurement stability.
Description
Technical Field
The invention relates to the technical field of plasma diagnosis, in particular to a plasma diagnosis circuit and a method.
Background
The plasma diagnostic circuit is used to obtain the plasma I-V characteristic curve. The traditional plasma diagnosis circuit has low output power and lower measurable plasma density; the single-range acquisition circuit cannot be well compatible with large and small currents; the measurement accuracy of the plasma is easily affected by non-isolated output.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the problems existing in the prior art, and provide a plasma diagnosis circuit and a method, which have the advantages of high power, double measuring ranges and isolated output.
In order to solve the above technical problems, the present invention provides a plasma diagnostic circuit, comprising:
the triangular wave driving module is used for generating triangular wave signals, amplifying the triangular wave signals and outputting the triangular wave signals, and collecting voltage adjustment signals and at least two groups of current sampling signals from an output loop;
and the signal adjusting module is used for carrying out signal processing on the voltage adjusting signal and at least two groups of current sampling signals and converting the voltage adjusting signal and the at least two groups of current sampling signals into voltage signals for isolation output.
In one embodiment of the present invention, the power supply system further comprises a power management module for supplying power to the triangular wave driving module and the signal adjustment module, and for electrically isolating the input power.
In one embodiment of the present invention, the power management module includes a power filter, a voltage converter, and a three terminal regulator; the power filter is configured to filter the input power; the voltage converter is configured to convert the filtered power supply to a plurality of voltages; the three-terminal voltage regulator is configured to output the voltage.
In one embodiment of the present invention, the number of the voltage converters is plural, and the filtered power source can be converted into different voltages by using the plural voltage converters.
In one embodiment of the present invention, the triangular wave driving module includes a triangular wave generating circuit, an analog amplifying circuit, a power amplifier output circuit and a signal sampling circuit; the triangular wave generation circuit is configured to generate the triangular wave signal; the analog amplifying circuit is configured to amplify the triangular wave signal; the power amplifier output circuit is configured to output the amplified triangular wave signal; the signal sampling circuit is configured to convert the triangular wave signal into a voltage adjustment signal and at least two sets of current sampling signals on an output loop.
In one embodiment of the present invention, the frequency of the triangular wave signal is 500Hz, the voltage is ±46V, and the current can reach 1A.
In one embodiment of the present invention, the signal adjustment module includes an amplifying circuit, a filtering circuit, an isolation circuit, and a clipping circuit; the amplifying circuit is configured to amplify the voltage adjustment signal and the at least two sets of current sampling signals; the filtering circuit is configured to filter the amplified voltage adjustment signal and at least two groups of current sampling signals; the isolation circuit is configured to output an isolated signal; the clipping circuit is configured to clip the isolated signal and output a voltage signal.
In one embodiment of the invention, the signal conditioning module is configured to convert the voltage conditioning signal to a voltage signal isolated output of 0-5V and to convert at least two sets of current sample signals to a voltage signal isolated output of 0-5V.
In one embodiment of the present invention, the at least two sets of current sampling signals include two sets of current sampling signals having currents of 0-10 mA and 0-1A, respectively.
In addition, the invention also provides a plasma diagnosis method, which comprises the following steps:
generating a triangular wave signal, amplifying the triangular wave signal, outputting the triangular wave signal, and collecting a voltage adjustment signal and at least two groups of current sampling signals from an output loop;
and carrying out signal processing on the voltage regulation signal and at least two groups of current sampling signals, and converting the voltage regulation signal and the at least two groups of current sampling signals into voltage signals for isolation output.
Compared with the prior art, the technical scheme of the invention has the following advantages:
the invention adopts the triangular wave signal to carry out high-power driving, greatly improves the range of plasma diagnosis, adopts current double-range sampling, has higher current resolution, improves the measurement precision, adopts isolation output, isolates the voltage monitoring signal ground from the triangular wave output signal ground, and increases the measurement stability.
Drawings
In order that the invention may be more readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings.
Fig. 1 is a schematic block diagram of the present invention.
Fig. 2 is a schematic diagram of the structure of the triangular wave driving module of the present invention.
Fig. 3 is a schematic diagram of a signal conditioning module according to the present invention.
Description of the specification reference numerals: 10. a power management module; 20. a triangular wave driving module; 30. and a signal adjustment module.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the invention and practice it.
Example 1
Referring to fig. 1 to 3, a first embodiment of the present invention provides a plasma diagnostic circuit, which includes a triangular wave driving module 20, a signal adjusting module 30 and a power management module 10, wherein the triangular wave driving module 20 is used for generating a triangular wave signal, amplifying the triangular wave signal and outputting the amplified triangular wave signal, and collecting a voltage adjusting signal and at least two groups of current sampling signals from an output loop; the signal adjustment module 30 is configured to perform signal processing on the voltage adjustment signal and at least two sets of current sampling signals, and convert the voltage adjustment signal and the at least two sets of current sampling signals into voltage signals for isolation output; the power management module 10 is used for supplying power to the triangular wave driving module 20 and the signal adjusting module 30, and for completing electrical isolation of an input power supply.
Wherein, the power management module 10 comprises a power filter, a voltage converter and a three-terminal voltage regulator; the power supply filter is configured to perform a filtering process on an input power supply; the voltage converter is configured to convert the filtered power supply to a plurality of voltages; the three-terminal voltage regulator is configured to output a voltage.
Specifically, the number of the voltage converters is three, the number of the three-terminal voltage regulators is two, the input power supply filters power supply interference through a power supply filter, firstly, the filtered power supply is converted into +50V voltage through a DC/DC voltage converter, and then 5V voltage is output through the three-terminal voltage regulators; the filtered power supply is converted into-50V voltage through a DC/DC voltage converter, and then-5V voltage is output through a three-terminal voltage stabilizer; and thirdly, the filtered power supply is converted into G5V voltage through a DC/DC voltage converter, so that +/-50V, +/-5V and G5V voltage are provided for the triangular wave driving module 20 and the signal conditioning module.
The power management module 10 also has a short-circuit overcurrent protection function, and outputs +/-50V voltage ripple less than or equal to 150mV and +/-5V voltage ripple less than or equal to 0.15mV.
The triangular wave driving module 20 comprises a triangular wave generating circuit, an analog amplifying circuit, a power amplifier output circuit and a signal sampling circuit; the triangular wave generating circuit is configured to generate a triangular wave signal with an amplitude of + -1V; the analog amplifying circuit is configured to amplify the triangular wave signal into a triangular wave signal of + -46V; the power amplifier output circuit is configured to output the amplified triangular wave signal; the signal sampling circuit is configured to convert the triangular wave signal into a voltage adjustment signal and at least two sets of current sampling signals, such as voltage adjustment signals V1-V2, one set of current sampling signals V2-GND, and another set of current sampling signals V3-GND, on the output loop.
The triangular wave driving module 20 can generate a triangular wave signal with a frequency of 500Hz and a voltage of ±46V, and the current thereof can reach 1A.
The signal adjusting module 30 comprises an amplifying circuit, a filtering circuit, an isolating circuit and a limiting circuit; the amplifying circuit is configured to amplify the voltage adjustment signal and the at least two sets of current sampling signals; the filtering circuit is configured to filter the amplified voltage adjustment signal and at least two groups of current sampling signals; the isolation circuit is configured to output an isolated signal; the clipping circuit is configured to clip the isolated signal and output a voltage signal.
The signal adjustment module 30 is configured to convert the voltage adjustment signal into a voltage signal with 0-5V for isolation output, and convert at least two sets of current sampling signals into a voltage signal with 0-5V for isolation output.
The invention adopts the triangular wave signal to carry out high-power driving, greatly improves the range of plasma diagnosis, adopts current double-range sampling, has higher current resolution, improves the measurement precision, isolates the voltage monitoring signal ground from the triangular wave output signal ground in an isolation output mode, and increases the measurement stability.
Example two
Embodiment 2 of the present invention provides a plasma diagnostic method, comprising the steps of:
s100: generating a triangular wave signal, amplifying the triangular wave signal, outputting the triangular wave signal, and collecting a voltage adjustment signal and at least two groups of current sampling signals from an output loop;
s200: and carrying out signal processing on the voltage adjustment signal and at least two groups of current sampling signals, and converting the voltage adjustment signal and the at least two groups of current sampling signals into voltage signals for isolation output.
The above details are described in the first embodiment, and the present invention is not described herein.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations and modifications of the present invention will be apparent to those of ordinary skill in the art in light of the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present invention.
Claims (2)
1. A plasma diagnostic circuit, comprising:
the triangular wave driving module is used for generating triangular wave signals, amplifying the triangular wave signals and outputting the triangular wave signals, and collecting voltage adjustment signals and at least two groups of current sampling signals from an output loop;
the signal adjusting module is used for performing signal processing on the voltage adjusting signal and at least two groups of current sampling signals and converting the voltage adjusting signal and the at least two groups of current sampling signals into voltage signals for isolation output;
the triangular wave driving module comprises a triangular wave generating circuit, an analog amplifying circuit, a power amplifier output circuit and a signal sampling circuit; the triangular wave generation circuit is configured to generate the triangular wave signal; the analog amplifying circuit is configured to amplify the triangular wave signal; the power amplifier output circuit is configured to output the amplified triangular wave signal; the signal sampling circuit is configured to collect a voltage adjustment signal and at least two sets of current sampling signals on an output loop;
the signal adjusting module comprises an amplifying circuit, a filter circuit, an isolating circuit and a limiting circuit; the amplifying circuit is configured to amplify the voltage adjustment signal and the at least two sets of current sampling signals; the filtering circuit is configured to filter the amplified voltage adjustment signal and at least two groups of current sampling signals; the isolation circuit is configured to output an isolated signal; the limiting circuit is configured to perform limiting processing on the isolation signal and output a voltage signal;
the power supply management module is used for supplying power to the triangular wave driving module and the signal adjusting module and is used for completing electrical isolation of an input power supply;
the power management module comprises a power filter, a voltage converter and a three-terminal voltage stabilizer; the power filter is configured to filter the input power; the voltage converter is configured to convert the filtered power supply to a plurality of voltages; the three-terminal voltage regulator is configured to output the voltage;
the number of the voltage converters is multiple, and the filtered power supply can be converted into different voltages by utilizing the voltage converters;
the frequency of the triangular wave signal is 500Hz, the voltage is + -46V, and the current can reach 1A;
the signal adjustment module is configured to convert the voltage adjustment signal into a voltage signal isolation output of 0-5V, and convert at least two groups of current sampling signals into a voltage signal isolation output of 0-5V;
the at least two sets of current sampling signals comprise two sets of current sampling signals, wherein the currents of the two sets of current sampling signals are 0-10 mA and 0-1A respectively.
2. A method of plasma diagnosis, comprising:
generating a triangular wave signal, amplifying the triangular wave signal, outputting the triangular wave signal, and collecting a voltage adjustment signal and at least two groups of current sampling signals from an output loop;
performing signal processing on the voltage adjustment signal and at least two groups of current sampling signals, and converting the voltage adjustment signal and the at least two groups of current sampling signals into voltage signals for isolation output;
the triangular wave driving module comprises a triangular wave generating circuit, an analog amplifying circuit, a power amplifier output circuit and a signal sampling circuit; the triangular wave generation circuit is configured to generate the triangular wave signal; the analog amplifying circuit is configured to amplify the triangular wave signal; the power amplifier output circuit is configured to output the amplified triangular wave signal; the signal sampling circuit is configured to collect a voltage adjustment signal and at least two sets of current sampling signals on an output loop;
the signal adjusting module comprises an amplifying circuit, a filter circuit, an isolating circuit and a limiting circuit; the amplifying circuit is configured to amplify the voltage adjustment signal and the at least two sets of current sampling signals; the filtering circuit is configured to filter the amplified voltage adjustment signal and at least two groups of current sampling signals; the isolation circuit is configured to output an isolated signal; the limiting circuit is configured to perform limiting processing on the isolation signal and output a voltage signal;
the power supply management module is used for supplying power to the triangular wave driving module and the signal adjusting module and is used for completing electrical isolation of an input power supply;
the power management module comprises a power filter, a voltage converter and a three-terminal voltage stabilizer; the power filter is configured to filter the input power; the voltage converter is configured to convert the filtered power supply to a plurality of voltages; the three-terminal voltage regulator is configured to output the voltage;
the number of the voltage converters is multiple, and the filtered power supply can be converted into different voltages by utilizing the voltage converters;
the frequency of the triangular wave signal is 500Hz, the voltage is + -46V, and the current can reach 1A;
the signal adjustment module is configured to convert the voltage adjustment signal into a voltage signal isolation output of 0-5V, and convert at least two groups of current sampling signals into a voltage signal isolation output of 0-5V;
the at least two sets of current sampling signals comprise two sets of current sampling signals, wherein the currents of the two sets of current sampling signals are 0-10 mA and 0-1A respectively.
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| CN202111154274.2A CN114071848B (en) | 2021-09-29 | 2021-09-29 | Plasma diagnostic circuit and method |
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| CN202111154274.2A CN114071848B (en) | 2021-09-29 | 2021-09-29 | Plasma diagnostic circuit and method |
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| CN114071848B true CN114071848B (en) | 2024-02-23 |
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