CN114060515A - Vacuum sealing structure - Google Patents
Vacuum sealing structure Download PDFInfo
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- CN114060515A CN114060515A CN202111448402.4A CN202111448402A CN114060515A CN 114060515 A CN114060515 A CN 114060515A CN 202111448402 A CN202111448402 A CN 202111448402A CN 114060515 A CN114060515 A CN 114060515A
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- sealing
- dovetail groove
- blind plate
- vacuum
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- 238000007789 sealing Methods 0.000 title claims abstract description 214
- 239000001307 helium Substances 0.000 claims abstract description 34
- 229910052734 helium Inorganic materials 0.000 claims abstract description 34
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 34
- 238000001514 detection method Methods 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 19
- 238000001819 mass spectrum Methods 0.000 claims abstract description 11
- 230000006378 damage Effects 0.000 claims abstract description 9
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 241000251468 Actinopterygii Species 0.000 claims description 4
- 230000000694 effects Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000000994 depressogenic effect Effects 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002407 reforming Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Gasket Seals (AREA)
Abstract
The invention discloses a vacuum sealing structure which comprises a sealing blind plate A, a detachable piece A, an O-shaped rubber ring, a screw A, a screw B and a vacuum chamber. The sealing blind plate A is provided with a dovetail-shaped sealing groove, and one or more sunken structures are arranged outwards from the outer side surface of the dovetail groove. The A detachable piece is installed in the sunken structure of the A sealing blind plate, the thickness of the A detachable piece is the same as the sunken step depth of the A sealing blind plate, the inner side surface of the A detachable piece is an arc inclined surface, and the A detachable piece is overlapped with the arc inclined surface on the outer side of the dovetail groove of the A sealing blind plate and is spliced into a whole circle of arc inclined surface on the outer side of the dovetail groove. A through groove is formed in the binding face of the A detachable piece and the A sealing blind plate and used for helium mass spectrum vacuum sealing detection of a vacuum sealing face at the bottom of the dovetail groove. The through groove structure of the detachable piece A greatly facilitates helium mass spectrum leak detection of the vacuum sealing surface of the dovetail groove; after the A detachable piece is removed, the O-shaped rubber ring is extremely convenient to take out, and the problems that the O-shaped rubber ring in the dovetail groove is difficult to take out and is extremely easy to damage in the taking-out process and even scratches a vacuum sealing surface are solved.
Description
Technical Field
The invention relates to a vacuum sealing structure, in particular to a dovetail groove (also called a dovetail groove) vacuum sealing structure, and belongs to the technical field of vacuum.
Background
In the design of the vacuum sealing structure, an O-shaped rubber ring is often placed in a dovetail groove to seal vacuum, and the width dimension of an opening of the dovetail groove is slightly smaller than the diameter of the cross section of the O-shaped rubber ring, so that the O-shaped rubber ring cannot fall out of the vacuum sealing groove in the process of assembling and disassembling equipment.
The O-shaped rubber ring is pressed into a dovetail groove when in use and is flush with the surface of an opening of the dovetail groove, the cross section of the O-shaped rubber ring is pressed and deformed into a trapezoid with four corners being fillets, the O-shaped rubber ring is deformed permanently for a period of time, the cross section of the O-shaped rubber ring is close to the cross section of the dovetail groove, the O-shaped rubber ring is difficult to take out at the moment, the O-shaped rubber ring is frequently damaged and can be taken out, and sometimes the sealing ring is taken out by using a sharp tool to scratch the vacuum sealing surface at the bottom of the dovetail groove. .
In summary, the prior art has the following problems: firstly, the O-shaped rubber ring in the dovetail groove often can not be reused, which causes great maintenance cost of the equipment: firstly, the manufacturing cost of large-size O-shaped rubber rings is high, the diameters of the O-shaped rubber rings for sealing the main vacuum chamber of a large-size vacuum device such as a large-size particle cyclotron are several meters or even tens of meters, the O-shaped rubber rings need to be customized, the price of the customized O-shaped rubber rings is thousands of yuan to tens of thousands of yuan, and once the O-shaped rubber rings are disassembled and damaged, the economic loss is high; secondly, the reserve capacity of spare parts of the O-shaped rubber ring is increased, and the spare parts of the O-shaped rubber ring are easy to damage when the O-shaped rubber ring is disassembled in the prior art, so the reserve capacity of the spare parts of the O-shaped rubber ring needs to be increased, and the cost is increased. Secondly, still can bring the side effect when changing O shape rubber circle, because of the O shape rubber circle in the dovetail is difficult to take out, often need use metal tool to dig out or choose it out, the easy fish tail dovetail slot bottom vacuum seal face of this process leads to the vacuum seal gas leakage.
Disclosure of Invention
The invention provides a vacuum sealing structure aiming at the defects of the prior art and aims to solve the problems that in the prior art, an O-shaped rubber ring is difficult to take out, the O-shaped rubber ring is extremely easy to damage in the taking-out process, and even a vacuum sealing surface at the bottom of a dovetail groove is scratched sometimes to cause vacuum sealing air leakage and large maintenance cost of large-scale vacuum equipment.
The invention provides the following technical scheme for solving the technical problems:
a vacuum sealing structure comprises a sealing blind plate A, a detachable piece A with a vacuum leakage detection vent groove, an O-shaped rubber ring used as a vacuum sealing element, a screw A, a screw B and a vacuum chamber; the method is characterized in that: the periphery of the reverse side of the sealing blind plate A is provided with a dovetail groove at a position close to the large radius, the dovetail groove is provided with an inner side surface, an outer side surface and a bottom surface along the radial direction of the sealing blind plate A, the cross section of the dovetail groove formed by the inner side surface, the outer side surface and the bottom surface is an isosceles trapezoid, the inner side surface and the outer side surface are side edges of the dovetail groove, and the bottom surface is the bottom edge of the dovetail groove; the dovetail groove is provided with an opening, the width of the opening is smaller than that of the bottom surface, the O-shaped rubber ring is arranged in the dovetail groove of the sealing blind plate A, the opening of the dovetail groove is smaller than the diameter of the section of the O-shaped rubber ring, and the O-shaped rubber ring cannot fall out of the dovetail groove when the sealing blind plate A is placed or operated in any direction; one or more sunken structures are outwards arranged on the outer side surface of the dovetail groove, namely one or more sections of the outer side surface of the dovetail groove are removed, the bottom of each sunken structure is a plane, a threaded hole is formed in each sunken plane and is used for connecting and fixing an A detachable piece with a vacuum leak detection vent groove, the A detachable piece is fixedly installed in the sunken structure of the A sealing blind plate through an A screw, and the A screw penetrates through the A detachable piece and is screwed into the A sealing blind plate to realize the fixed connection of the A detachable piece and the A sealing blind plate; the screw B connects and fixes the assembled component and the vacuum chamber and compresses the O-shaped rubber ring, thereby realizing the vacuum sealing function of the vacuum sealing structure.
The quantity of the A detachable pieces is the same as that of the sunken structures on the outer side surface of the dovetail groove of the A sealing blind plate, and the A detachable pieces are provided with countersunk screw holes or stepped holes for penetrating A screws to fixedly connect the A screws in the sunken structures on the outer side surface of the dovetail groove of the A sealing blind plate; the thickness of the detachable part A is the same as the depth of the sunken step of the sealing blind plate A; the inner side surface of the A detachable piece is an arc inclined surface which is superposed with the arc inclined surface on the outer side of the dovetail groove of the A sealing blind plate and has the same size.
A through groove is formed in the surface, which is attached to the sunken plane of the sealing blind plate A, of the detachable part A with the vacuum leak detection vent groove, the groove serves as a helium channel during helium mass spectrum vacuum leak detection, helium sprayed during leak detection easily reaches the vacuum sealing surface at the bottom of the isosceles trapezoid dovetail groove, and vacuum sealing detection on the sealing surface can be conveniently achieved.
When O shape rubber circle is taken out to needs, loosen and take off a set of or multiunit A screw, remove the removable piece of A that corresponds, then O shape rubber circle lateral surface part region exposes, takes out O shape rubber circle very easily, and the rubber circle can not damage and can use repeatedly, takes out O shape rubber circle process can not fish tail dovetail bottom sealing face.
The vacuum sealing structure is also provided with another structural form and comprises a sealing blind plate B, a detachable piece B, an O-shaped rubber ring used as a vacuum sealing element, screws A, screws B and a vacuum chamber, wherein a dovetail groove with an isosceles trapezoid cross section is arranged on the periphery of the sealing blind plate B at the position close to the large radius on the reverse side of the sealing blind plate B, the dovetail groove is provided with an inner side surface, an outer side surface and a bottom surface along the radial direction of the sealing blind plate B, the inner side surface of the dovetail groove of the sealing blind plate B is removed towards an inward certain radius area to form a sunken plane structure, a threaded hole is formed in the sunken plane and used for connecting and fixing the detachable piece B, the detachable piece B is fixedly installed in the sunken structure of the sealing blind plate B through the screws A, and the annular outer side surface of the detachable piece B forms the inner side surface of the dovetail groove; the O-shaped rubber ring is arranged in the dovetail groove; the screw B connects and fixes the assembled component and the vacuum chamber and compresses the O-shaped rubber ring, thereby realizing the vacuum sealing function of the vacuum sealing structure.
The detachable part B is in a circular ring shape, the outer side surface of the circular ring is an arc-shaped inclined surface, and the arc-shaped inclined surface finally forms the inner side surface of the dovetail groove; the inner side surface of the ring has the same size as the inner diameter of the step of the sealing blind plate B sinking structure, and the thickness of the ring is the same as the sinking depth of the sealing blind plate B; the detachable part B is provided with a countersunk screw hole or a stepped hole for penetrating the screw A and fixedly connecting the screw A in the sunken structure of the sealing blind plate B, and the O-shaped rubber ring is placed in a half dovetail groove opened at the inner side of the sealing blind plate B; b, placing the detachable piece into a sunken plane in the dovetail groove of the sealing blind plate B; and screwing the screw A to realize the fixed connection of the detachable piece B and the sealing blind plate B.
The outer side arc inclined plane of the B detachable piece is spliced with the B sealing blind plate missing the inner side face of the dovetail groove to form a complete dovetail groove structure, the bottom face of the dovetail groove is a vacuum sealing face, and the two side faces limit the spatial position of the O-shaped rubber ring.
When O shape rubber circle is taken out to needs, loosen and take off A screw, remove the detachable piece of B, then O shape rubber circle medial surface exposes, takes off O shape rubber circle very easily, and this process can not harm O shape rubber circle and dovetail bottom vacuum seal face.
Advantageous effects of the invention
1. According to the invention, the inner side surface or the outer side surface of the dovetail groove of the vacuum sealing structure is completely or partially removed, the removed part is filled by the detachable part B or the detachable part A, and the removable part B or the detachable part A and the partial missing dovetail groove form the complete dovetail groove together, so that the vacuum sealing function of the dovetail groove is met, the O-shaped rubber ring can be conveniently taken out, the vacuum sealing surface at the bottom of the dovetail groove and the O-shaped rubber ring cannot be damaged in the taking-out process, and the O-shaped rubber ring can be repeatedly used. And because the sealing ring is taken out by using a detachable part instead of a sharp tool, the problem that the vacuum sealing surface at the bottom of the dovetail groove is easily damaged in the taking-out process and the problem that the O-shaped rubber ring is difficult to take out is solved.
2. The invention designs a vent hole channel at the bottom of a detachable part A, wherein the detachable part A is not only a component forming the outer side surface of a dovetail groove, but also a channel for vacuum leak detection, a helium channel is arranged at the bottom of the detachable part A, the helium channel is directly communicated with the outer side surface of the dovetail groove close to a bottom surface area, helium is sprayed from a fillet at the bottom of a sealing ring pressed into a trapezoidal section, and the sealing surface at the bottom of the dovetail groove is just detected, so that the long-term difficult problem is solved: in the traditional method, a joint area is formed between the outer side surface of the dovetail groove and the deformed O-shaped rubber ring 3, so that helium is difficult to enter a sealing surface area at the bottom of the dovetail groove, and the problem of difficulty in helium mass spectrum vacuum leak detection is caused.
Drawings
FIG. 1 is a schematic view of A-type explosive disassembly of a vacuum sealing structure of a dovetail groove of the invention;
FIG. 2 is a schematic view of a dovetail groove vacuum sealing structure in the prior art;
FIG. 2-1 is an enlarged view of a portion of FIG. 2;
FIG. 3 is a schematic view of a dovetail groove vacuum sealing structure of the present invention in type A;
FIG. 4 is a schematic view of a sectional line position and a sectional view of a dovetail groove vacuum sealing structure of the present invention;
FIG. 4-1 is a sectional view of a dovetail groove vacuum seal structure of the present invention, taken along line A-A;
FIG. 4-2 is a sectional view of a dovetail groove vacuum sealing structure of the present invention, taken along line A and line B;
FIG. 4-3 is an enlarged view of a portion of FIG. 4-1 of the present invention;
FIG. 5-1 is a schematic structural view of a type A front face part of the dovetail groove vacuum sealing structure of the present invention;
FIG. 5-2 is a schematic view of a type A reverse side part of the dovetail groove vacuum sealing structure of the present invention;
FIG. 6 is an exploded and disassembled schematic view of the A-type part structure of the vacuum sealing structure of the dovetail groove of the invention;
FIG. 6-1 is an enlarged view of a portion of FIG. 6 of the present invention;
FIG. 7 is a schematic view of a sealing blind plate A in a dovetail groove vacuum sealing structure type A of the present invention;
FIG. 8-1 is a schematic front view of a detachable part A in a dovetail groove vacuum sealing structure type A of the present invention;
FIG. 8-2 is a schematic reverse side view of a detachable part A in a dovetail groove vacuum sealing structure type A of the present invention;
FIG. 9-1 is a B-type sectional view of the dovetail groove vacuum sealing structure of the present invention.
FIG. 9-2 is an enlarged view of a portion of FIG. 9-1 of the present invention;
FIG. 10-1 is a schematic structural view of a B-type part of the dovetail groove vacuum sealing structure of the present invention;
FIG. 10-2 is an exploded and disassembled schematic view of a B-type partial structure of the dovetail groove vacuum sealing structure of the invention.
Reference numerals: 1: a, sealing a blind plate; 1-1: a dovetail groove; a, a detachable piece; 2-1: a vent channel; 3: o-ring, 4: screw A, 5: screw B, 6: a vacuum chamber; 7: b, sealing a blind plate; 8: b, a detachable part; 9: and C, sealing the blind plate.
Detailed Description
The invention is further explained below with reference to the drawings in which:
design principle of the invention
1. The design principle of a combined dovetail groove. The invention relates to a novel dovetail groove formed by reforming and combining a traditional dovetail groove no matter in an A-type sealing structure or a B-type sealing structure. The structure A of the invention is that the part of the outer side surface of the dovetail groove is removed and the removed part is embedded into a detachable part A, and the inner side surface of the detachable part A and the outer side surface of the dovetail groove jointly form a whole circle of the outer side surface of the dovetail groove of an A-shaped sealing structure; the structure B of the invention is that the inner side surface of the dovetail groove is integrally removed, and the annular outer side surface of the annular detachable piece B forms the inner side surface of the dovetail groove of the B-shaped sealing structure. The dovetail groove is of a combined structure regardless of an A-type structure or a B-type structure, and the combined parts support and depend on each other: the novel dovetail groove depends on the support of a detachable piece, and the O-shaped rubber ring is not easy to take out without the detachable piece; meanwhile, the 'detachable part' also depends on the support of the dovetail groove, and the 'detachable part' has no use, and can generate new effects only after the 'detachable part' and the 'dovetail groove' are combined. Thus, the effect of the combination of the dovetail groove and the detachable member is much superior to the effect of the combination before.
2. Helium gas channel design principle. First, the helium gas channel is led to the outer side surface of the dovetail groove, so that vacuum leakage cannot occur, the vacuum sealing surface of the dovetail groove is a plane at the bottom of the dovetail groove, and two side surfaces beside the dovetail groove are used for limiting the space of the O-shaped rubber ring. From the vacuum angle, two side surfaces of the dovetail groove are not required to be sealed, only the vacuum sealing surface on the bottom surface is required to be sealed to be vacuum, air leakage of the two side surfaces is best to the maximum extent, vacuum virtual leakage cannot be caused, and therefore the helium channel is led to the outer side surface of the dovetail groove, vacuum cannot be leaked, and vacuum virtual leakage cannot be caused. Second, O shape rubber circle embedding trapezoidal dovetail to by the pressure distortion for four angles be the isosceles trapezoid at fillet, empty between this fillet and the dovetail base angle, the helium passageway of the removable piece of A structure spouts the position at this fillet with helium gas just, if there is the hourglass dovetail bottom surface, just detect very easily through helium mass spectrum vacuum leak hunting.
Based on the invention principle, the invention designs the vacuum sealing structure.
A vacuum sealing structure is shown in figures 1, 3, 4-1, 4-2, 4-3, 5-1, 5-2, 6-1, 7, 8-1 and 8-2 and comprises a sealing blind plate A, a detachable part A with a vacuum leakage detection vent groove 2-1, an O-shaped rubber ring 3 used as a vacuum sealing element, an A screw 4, a B screw 5 and a vacuum chamber 6; the method is characterized in that: the periphery of the reverse side of the sealing blind plate A1 is provided with a dovetail groove 1-1, the dovetail groove 1-1 is provided with an inner side surface, an outer side surface and a bottom surface along the radial direction of the sealing blind plate A1, the section of the dovetail groove 1-1 formed by the inner side surface, the outer side surface and the bottom surface is an isosceles trapezoid, the inner side surface and the outer side surface are the side edges of the dovetail groove 1-1 isosceles trapezoid, and the bottom surface is the bottom edge of the dovetail groove 1-1 isosceles trapezoid; the dovetail groove 1-1 is provided with an opening, the width of the opening is smaller than the width of the bottom surface, the O-shaped rubber ring 3 is arranged in the dovetail groove 1-1 of the sealing blind plate A, the width of the opening of the dovetail groove 1-1 is smaller than the diameter of the section of the O-shaped rubber ring 3, and the O-shaped rubber ring 3 cannot fall out of the dovetail groove 1-1 when the sealing blind plate A is placed or operated in any direction; one or more sunken structures are outwards arranged on the outer side surface of the dovetail groove 1-1, namely one or more sections of the outer side surface of the dovetail groove 1-1 are removed, the bottom of each sunken structure is a plane, a threaded hole is formed in each sunken plane and is used for connecting and fixing an A detachable piece 2 with a vacuum leak detection vent groove 2-1, the A detachable piece 2 is fixedly installed in the sunken structure of the A sealing blind plate 1 through an A screw 4, and the A screw 4 penetrates through the A detachable piece 2 and is screwed into the A sealing blind plate 1 to realize the fixed connection of the A and the A sealing blind plates; the screw B5 connects and fixes the assembled components with the vacuum chamber 6 and compresses the O-shaped rubber ring 3, thereby realizing the vacuum sealing function of the vacuum sealing structure.
The quantity of the A detachable pieces 2 is the same as that of the sunken structures on the outer side surfaces of the dovetail grooves 1-1 of the A sealing blind plate 1, and the A detachable pieces 2 are provided with countersunk screw holes or stepped holes for penetrating the A screws 4 to fixedly connect the A screws in the sunken structures on the outer side surfaces of the dovetail grooves 1-1 of the A sealing blind plate 1; the thickness of the detachable part (A) 2 is the same as the depth of the sunken step of the sealing blind plate (A) 1; the inner side surface of the A detachable part 2 is an arc inclined surface which is superposed with the arc inclined surface at the outer side of the dovetail groove 1-1 of the A sealing blind plate 1 and has the same size.
As shown in fig. 8-1 and 8-2, a through groove 2-1 is arranged on the surface of the detachable part a 2 with a vacuum leak detection vent groove 2-1, which is attached to the sunken plane of the blind sealing plate a 1, the groove is used as a helium channel during helium mass spectrum vacuum leak detection, and helium sprayed during leak detection easily reaches the vacuum sealing surface at the bottom of the isosceles trapezoid dovetail groove 1-1, so that vacuum sealing detection on the sealing surface can be conveniently realized.
As shown in fig. 6, when the O-shaped rubber ring 3 needs to be taken out, one or more groups of screws 4 a are loosened and taken down, the corresponding detachable part 2 a is removed, partial area of the outer side surface of the O-shaped rubber ring 3 is exposed, the O-shaped rubber ring 3 is easily taken out, the rubber ring cannot be damaged and can be used repeatedly, and the sealing surface at the bottom of the dovetail groove 1-1 cannot be scratched in the process of taking out the O-shaped rubber ring 3.
The vacuum sealing structure has another structural form and comprises a B sealing blind plate 7, a B detachable piece 8, an O-shaped rubber ring 3 used as a vacuum sealing element, an A screw 4, a B screw 5 and a vacuum chamber 6, wherein a dovetail groove 1-1 with an isosceles trapezoid cross section is arranged on the periphery of the reverse side of the B sealing blind plate 7 and close to a large radius, the dovetail groove 1-1 is provided with an inner side surface, an outer side surface and a bottom surface along the radial direction of the B sealing blind plate 7, the inner side surface of the dovetail groove 1-1 of the B sealing blind plate 7 is removed towards an inner certain radius area to form a sunken plane structure, a threaded hole is formed in the sunken plane and used for connecting and fixing the B detachable piece 8, the B detachable piece 8 is installed and fixed in the sunken structure of the B sealing blind plate 7 through the A screw 4, and the circular outer side surface of the B detachable piece 8 forms the inner side surface of the dovetail groove 1-1; the O-shaped rubber ring 3 is arranged in the dovetail groove 1-1; the screw B5 connects and fixes the assembled components with the vacuum chamber 6 and compresses the O-shaped rubber ring 3, thereby realizing the vacuum sealing function of the vacuum sealing structure.
As shown in fig. 10-2, the detachable part B8 is circular, the outer side of the circular ring is an arc-shaped inclined plane, and the arc-shaped inclined plane finally forms the inner side of the dovetail groove 1-1; the inner side surface of the ring is the same as the inner diameter of the step of the sunken structure of the sealing blind plate B7, and the thickness of the ring is the same as the sunken depth of the sealing blind plate B7; the detachable part 8 of B is provided with a countersunk screw hole or a step hole which is used for penetrating the screw 4 of A and fixedly connecting the screw in the sunken structure of the sealing blind plate 7 of B, and the O-shaped rubber ring 3 is placed in the half dovetail groove 1-1 which is opened at the inner side of the sealing blind plate 7 of B; the detachable part 8 of the B is placed in a sunken plane in the dovetail groove 1-1 of the sealing blind plate 7 of the B; the A screw 4 is screwed in to realize the fixed connection of the B detachable piece 8 and the B sealing blind plate 7.
As shown in the figure 10-2, the outer arc inclined surface of the B detachable piece 8 is spliced with the B sealing blind plate 7 missing the inner side surface of the dovetail groove 1-1 to form a complete dovetail groove 1-1 structure, the bottom surface of the dovetail groove 1-1 is a vacuum sealing surface, and the two side surfaces limit the space position of the O-shaped rubber ring 3.
When the O-shaped rubber ring 3 needs to be taken out, the screw A4 is loosened and taken down, the detachable part B8 is removed, the inner side surface of the O-shaped rubber ring 3 is exposed, the O-shaped rubber ring 3 is easily taken down, and the vacuum sealing surface at the bottom of the O-shaped rubber ring 3 and the dovetail groove 1-1 cannot be damaged in the process.
Example 1
By adopting the vacuum sealing structure of the dovetail groove 1-1 (shown in figures 1, 3, 4-1, 4-2, 4-3, 5-1, 5-2, 6-1, 7, 8-1 and 8-2), the vacuum sealing function of the dovetail groove 1-1 is met, the O-shaped rubber ring 3 can be conveniently taken out, the O-shaped rubber ring 3 and the vacuum sealing surface at the bottom of the dovetail groove 1-1 are not easy to damage in the process of taking out the O-shaped rubber ring 3, the repeated use of the O-shaped rubber ring 3 is facilitated, and helium mass spectrum vacuum leak detection is facilitated for the vacuum sealing surface at the bottom of the dovetail groove. The main process for realizing the functions is as follows:
(I) vacuum sealing structure: as shown in FIGS. 5-1, 5-2, 6-1 and 7, an O-shaped rubber ring 3 is placed in the dovetail groove 1-1 of the sealing blind plate A1; the A detachable piece 2 is placed in a sunken plane outside the dovetail groove 1-1 on the inner side of the A sealing blind plate 1; the A screw 4 is screwed in to realize the fixed connection of the A detachable piece 2 and the A sealing blind plate 1, and at the moment, the inner side arc inclined plane of the A detachable piece 2 is in butt joint coincidence with the outer side surface of the dovetail groove of the A sealing blind plate 1 to form a whole circle of outer side surface of the dovetail groove. The dovetail groove degree of depth is less than the cross-sectional diameter of O shape rubber circle 3, and dovetail opening width slightly is less than the cross-sectional diameter of O shape rubber circle 3, and the sealed blind plate 1 of A arbitrary orientation is put or the operation can not make O shape rubber circle 3 fall out the dovetail, even when the dovetail opening is downward, because dovetail opening width slightly is less than the cross-sectional diameter of O shape rubber circle 3 for O shape rubber circle 3 can not drop because of receiving gravity.
And (II) assembling a vacuum sealing structure with the vacuum chamber 6: as shown in fig. 1, 3, 4-1, 4-2, 4-3, the above-described assembled assembly is integrally buckled on a vacuum chamber 6, and a B screw 5 is tightened. The screw B5 realizes the fixed connection between the sealing blind plate 1 and the vacuum chamber 6, and simultaneously, the pretightening force presses and deforms the O-shaped rubber ring 3 and fills the O-shaped rubber ring into the dovetail groove, so that enough pressure is provided for the O-shaped rubber ring 3 to meet the vacuum sealing performance. The bottom surface of a dovetail groove 1-1 of the sealing blind plate A1 and the plane of the vacuum chamber 6 corresponding to the area of the O-shaped rubber ring 3 are vacuum sealing surfaces. Thus, the vacuum sealing function of the vacuum sealing structure of the invention is realized.
And (III) helium mass spectrum vacuum leak detection by using a vacuum sealing structure: as shown in fig. 3, 4-1, 4-2, 4-3, 5-1, 5-2, 8-1, and 8-2, after the components related to the vacuum seal are assembled, it is often necessary to evacuate the vacuum chamber 6 for helium mass spectrometer leak detection, generally, a vacuum system is connected to a helium mass spectrometer vacuum leak detector, and after the vacuum chamber 6 is evacuated, helium is sprayed to each vacuum seal position one by one, if the seal position has a leak point, helium is sucked into the vacuum chamber 6, and the leak detector displays that there is a leak in the vacuum seal. If there is defect such as fish tail or foreign matter in the sealed face of dovetail groove bottom vacuum, then vacuum seal can leak gas, nevertheless because the dovetail structure of adoption, O shape rubber circle 3 is pressed the deformation and fills the dovetail, O shape rubber circle is pressed the deformation back cross-section and is become isosceles trapezoid by circular, trapezoidal four corners is the fillet, has formed the laminating region between dovetail lateral surface and the O shape rubber circle 3 that has warp, make helium difficult entering dovetail bottom seal face region sometimes, cause helium mass spectrum vacuum leak hunting difficulty.
According to the invention, the through groove is arranged on the face of the sunken joint of the A detachable piece 2 and the A sealing blind plate 1, helium is sprayed inwards through the through groove during helium mass spectrum vacuum leak detection, so that the helium can easily enter the outer side position of the sealing face at the bottom of the dovetail groove corresponding to the O-shaped rubber ring 3 pressed into the trapezoid cross section under the condition that the vacuum sealing is leaked, and the helium can be easily detected if the vacuum sealing face is leaked.
(IV) taking out the rubber ring: as shown in fig. 1, 5-2, 6-1, 7, 8-1 and 8-2, when the O-shaped rubber ring 3 needs to be taken out, one or more groups of screws 4 a are loosened and removed, and the corresponding detachable member 2 a is removed, so that a partial area of the outer side surface of the O-shaped rubber ring 3 is exposed, the O-shaped rubber ring 3 can be easily taken out by hand, and the rubber ring is not damaged and can be used repeatedly. For the dovetail groove vacuum sealing structure in the prior art, as shown in fig. 2, the O-shaped rubber ring 3 pressed and deformed after being used for a period of time is difficult to take out, the O-shaped rubber ring 3 is often required to be damaged to take out, and sometimes, a sealing ring is taken out by using a sharp tool to scratch a vacuum sealing surface at the bottom of the dovetail groove.
Example 2
Firstly, as shown in figures 9-1, 9-2, 10-1 and 10-2, an O-shaped rubber ring 3 is placed in a half dovetail groove which is opened at the inner side of a sealing blind plate 7B; the detachable part 8 of the B is placed in a sunken plane in the dovetail groove of the sealing blind plate 7 of the B; the A screw 4 is screwed in to realize the fixed connection of the B detachable piece 8 and the B sealing blind plate 7, the outer side circular arc inclined plane of the B detachable piece 8 is spliced with the B sealing blind plate 7 missing the inner side surface of the dovetail groove to form a complete dovetail groove structure, the bottom surface of the dovetail groove is a vacuum sealing surface, and the two side surfaces limit the space position of the O-shaped rubber ring 3.
And (II) as shown in FIGS. 9-1, 9-2, 10-1 and 10-2, when the O-shaped rubber ring 3 needs to be taken out, the screw A4 is loosened and taken down, the detachable piece B8 is removed, the inner side surface of the O-shaped rubber ring 3 is exposed, the O-shaped rubber ring 3 is easily taken down, and the process does not damage the O-shaped rubber ring 3 and the vacuum sealing surface at the bottom of the dovetail groove.
It should be emphasized that the above-mentioned embodiments are merely illustrative and not restrictive, for example, the shapes of the sealing blind plate and the dovetail groove may be circular or other shapes, the number of the depressed steps of the sealing blind plate a and the number of the detachable members a may be 1 or more, the invention may also be used for sealing a liquid container or a positive pressure seal, and those skilled in the art may make modifications as necessary without inventive contribution to the above-mentioned embodiments after reading this specification, but only fall within the protection of the patent law within the scope of the claims of the present invention.
Claims (8)
1. A vacuum sealing structure comprises a sealing blind plate A, a detachable piece A with a vacuum leakage detection vent groove, an O-shaped rubber ring used as a vacuum sealing element, a screw A, a screw B and a vacuum chamber; the method is characterized in that: the periphery of the reverse side of the sealing blind plate A is provided with a dovetail groove at a position close to the large radius, the dovetail groove is provided with an inner side surface, an outer side surface and a bottom surface along the radial direction of the sealing blind plate A, the cross section of the dovetail groove formed by the inner side surface, the outer side surface and the bottom surface is an isosceles trapezoid, the inner side surface and the outer side surface are side edges of the dovetail groove, and the bottom surface is the bottom edge of the dovetail groove; the dovetail groove is provided with an opening, the width of the opening is smaller than that of the bottom surface, the O-shaped rubber ring is arranged in the dovetail groove of the sealing blind plate A, the opening of the dovetail groove is smaller than the diameter of the section of the O-shaped rubber ring, and the O-shaped rubber ring cannot fall out of the dovetail groove when the sealing blind plate A is placed or operated in any direction; one or more sunken structures are outwards arranged on the outer side surface of the dovetail groove, namely one or more sections of the outer side surface of the dovetail groove are removed, the bottom of each sunken structure is a plane, a threaded hole is formed in each sunken plane and is used for connecting and fixing an A detachable piece with a vacuum leak detection vent groove, the A detachable piece is fixedly installed in the sunken structure of the A sealing blind plate through an A screw, and the A screw penetrates through the A detachable piece and is screwed into the A sealing blind plate to realize the fixed connection of the A detachable piece and the A sealing blind plate; the screw B connects and fixes the assembled component and the vacuum chamber and compresses the O-shaped rubber ring, thereby realizing the vacuum sealing function of the vacuum sealing structure.
2.A vacuum sealing structure according to claim 1, wherein: the quantity of the A detachable pieces is the same as that of the sunken structures on the outer side surface of the dovetail groove of the A sealing blind plate, and the A detachable pieces are provided with countersunk screw holes or stepped holes for penetrating A screws to fixedly connect the A screws in the sunken structures on the outer side surface of the dovetail groove of the A sealing blind plate; the thickness of the detachable part A is the same as the depth of the sunken step of the sealing blind plate A; the inner side surface of the A detachable piece is an arc inclined surface which is superposed with the arc inclined surface on the outer side of the dovetail groove of the A sealing blind plate and has the same size.
3. A vacuum sealing structure according to claim 1, wherein: a through groove is formed in the surface, which is attached to the sunken plane of the sealing blind plate A, of the detachable part A with the vacuum leak detection vent groove, the groove serves as a helium channel during helium mass spectrum vacuum leak detection, helium sprayed during leak detection easily reaches the vacuum sealing surface at the bottom of the isosceles trapezoid dovetail groove, and vacuum sealing detection on the sealing surface can be conveniently achieved.
4. A vacuum sealing structure according to claim 1, wherein: when O shape rubber circle is taken out to needs, loosen and take off a set of or multiunit A screw, remove the removable piece of A that corresponds, then O shape rubber circle lateral surface part region exposes, takes out O shape rubber circle very easily, and the rubber circle can not damage and can use repeatedly, takes out O shape rubber circle process can not fish tail dovetail bottom sealing face.
5. Another form of vacuum sealing structure, characterized by: the vacuum sealing structure comprises a sealing blind plate B, a detachable part B, an O-shaped rubber ring used as a vacuum sealing element, a screw A, a screw B and a vacuum chamber, wherein a dovetail groove with an isosceles trapezoid cross section is arranged on the periphery of the sealing blind plate B at the position close to the large radius part on the reverse side of the sealing blind plate B, the dovetail groove is provided with an inner side surface, an outer side surface and a bottom surface along the radial direction of the sealing blind plate B, the inner side surface of the dovetail groove of the sealing blind plate B is removed towards an inner certain radius area to form a sunken plane structure, a threaded hole is formed in the sunken plane and used for connecting and fixing the detachable part B, the detachable part B is fixedly installed in the sunken structure of the sealing blind plate B through the screw A, and the annular outer side surface of the detachable part B forms the inner side surface of the dovetail groove; the O-shaped rubber ring is arranged in the dovetail groove; the screw B is used for connecting and fixing the assembled assembly and the vacuum chamber and tightly pressing the O-shaped rubber ring, so that the vacuum sealing function of the vacuum sealing structure is realized.
6. Another form of vacuum sealing structure according to claim 5, wherein: the detachable part B is in a circular ring shape, the outer side surface of the circular ring is an arc-shaped inclined surface, and the arc-shaped inclined surface finally forms the inner side surface of the dovetail groove; the inner side surface of the ring has the same size as the inner diameter of the step of the sealing blind plate B sinking structure, and the thickness of the ring is the same as the sinking depth of the sealing blind plate B; the detachable part B is provided with a countersunk screw hole or a stepped hole for penetrating the screw A and fixedly connecting the screw A in the sunken structure of the sealing blind plate B, and the O-shaped rubber ring is placed in a half dovetail groove opened at the inner side of the sealing blind plate B; b, placing the detachable piece into a sunken plane in the dovetail groove of the sealing blind plate B; and screwing the screw A to realize the fixed connection of the detachable piece B and the sealing blind plate B.
7. Another form of vacuum sealing structure according to claim 5, wherein: the outer side arc inclined plane of the B detachable piece is spliced with the B sealing blind plate missing the inner side face of the dovetail groove to form a complete dovetail groove structure, the bottom face of the dovetail groove is a vacuum sealing face, and the two side faces limit the spatial position of the O-shaped rubber ring.
8. Another form of vacuum sealing structure according to claim 5, wherein: when O shape rubber circle is taken out to needs, loosen and take off A screw, remove the detachable piece of B, then O shape rubber circle medial surface exposes, takes off O shape rubber circle very easily, and this process can not harm O shape rubber circle and dovetail bottom vacuum seal face.
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| CN202111448402.4A CN114060515B (en) | 2021-11-30 | 2021-11-30 | Vacuum sealing structure |
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| CN202111448402.4A CN114060515B (en) | 2021-11-30 | 2021-11-30 | Vacuum sealing structure |
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| CN114060515B CN114060515B (en) | 2024-06-11 |
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| CN114060515B (en) | 2024-06-11 |
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