CN114034471A - Method for measuring laser light path profile - Google Patents
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention provides a method for measuring a laser light path profile, which comprises the following specific processes: building a laser light path profile measuring system, wherein the system comprises a laser transmitter, a guide rail, a micro-motion turntable, a target surface, a moving base, an image sensor and a data processing module; the target surface is arranged on the guide rail through a micro-motion turntable and is aligned to the laser emitter; the laser beam measuring method has the advantages that the shape characteristics of the light spot at a specific distance from the emitter are obtained, so that the whole light path profile of the laser emitter is described, the relevant information between the laser emitter and the receiving target surface is more conveniently obtained, the spatial characteristics of the laser beam are comprehensively and objectively described, the multi-dimensional angle adjustment can be carried out on the laser emitter, and a calibration basis is provided for later imaging.
Description
Technical Field
The invention relates to a method for measuring a laser light path profile, and belongs to the technical field of photoelectric measurement.
Background
In the research, design and manufacture of a laser transmitter, the requirements on the performance of the laser transmitter are strict, and include threshold current and power output, modulation gain, relative intensity noise RIN, linear range, in-band flatness, temperature characteristics, spectral line width and alternating current equivalent input impedance, the specification parameters of the transmitter determine the beam spatial performance, such as beam divergence angle, field intensity distribution, beam waist spot size, beam width product, beam limit magnification diffraction factor M2 and the like, and the acquisition of the spatial performance parameters can be deduced on the basis of the acquisition of the laser spot size, so that the size of the laser spot needs to be accurately calculated, and the optical path spatial profile of the laser transmitter is further described by combining the distance information of the laser spot and the transmitter.
At present, the laser spot size is obtained by obtaining the spot size in the X direction and the spot size in the Y direction under a rectangular coordinate system, and then the laser light path information is obtained on the basis that the spot is an ideal circle, but in actual conditions, the spot output by a laser is not always a perfect circle or an ellipse, the spot shape at a specific distance is often an approximately circular irregular figure, bulges, grooves, burrs and the like are possible at the edge, and the quality of a laser beam cannot be scientifically and accurately reflected by simply using the beam parameters in the X direction and the Y direction.
Chinese patent application CN110260787A discloses a laser spot size full-angle evaluation and characterization method. By constructing a rectangular coordinate system with the spot centroid position as the origin, the laser spot sizes in different angular directions of the origin are solved according to the relation between the laser spot sizes and the light intensity second moment, so that the representation of the laser spot sizes in any angular direction with the horizontal direction is realized. However, the measured light spot is only limited to a certain position, and the adjustment is complicated if the light path profile of the whole laser transmitter is required to be described.
Chinese patent application CN111442744A discloses a laser transmitter and a device for aligning a calibration apparatus. The invention relates to the field of automobile calibration and provides a laser transmitter and a device for calibrating a calibration device. However, the invention patent is only limited to the field of automobile maintenance and equipment calibration technology, only one-dimensional angle adjustment can be performed, and the applicability is not strong.
Disclosure of Invention
In view of this, the present invention provides a method for measuring a laser optical path profile, which can accurately measure a laser profile.
The technical scheme for realizing the invention is as follows:
a method for measuring laser light path profile comprises the following specific processes:
step one, a laser light path profile measuring system is set up, and the system comprises a laser transmitter, a guide rail, a micro-motion turntable, a target surface, a moving base, an image sensor and a data processing module; the target surface is arranged on the guide rail through a micro-motion turntable and is aligned to the laser emitter;
step two, continuously adjusting the micro-motion turntable, wherein the image sensor collects a light spot image emitted to the target surface by the laser emitter;
selecting N images from the images acquired by the image sensor by the data processing module, and calculating the centroid corresponding to each selected image light spot and the light spot profile of each selected image; fusing the mass centers and the light spot profiles of the N images to obtain the mass center and the profile corresponding to the target surface light spot pattern at the current position;
moving the micro-motion turntable for multiple times to adjust the distance between the target surface and the laser emitter, and repeating the second step and the third step after each movement; when the moving times of the micro-motion turntable reach Nmax, obtaining Nmax groups of centroids and light spot contours, and entering a fifth step;
and fifthly, fitting a three-dimensional profile of a laser light path by using the center of mass and the profile according to the obtained center of mass and the obtained profile of the light spot of which the laser transmitter and the micro-motion turntable are at different distances and taking the distance as a Z axis.
Furthermore, the minimum N images in the area of the light spots are selected in the three steps.
Further, the third step of the present invention further includes preprocessing the image, where the preprocessing process is as follows: converting a corresponding light spot gray scale image captured by an image sensor into a binary image, connecting disconnected pixel points through morphological processing, if two non-zero connected region pixels are arranged around a certain pixel point 0, defaulting to 8 connection, and changing the value of 0 into 1; the enclosed area in the image is then filled to a value of 1 and noise is removed by erosion followed by dilation.
Furthermore, the guide rail is a movable guide rail made of a marble material and provided with scales.
Furthermore, the laser ranging system is used for measuring the distance of the movable micro-motion turntable.
Further, the interval between two adjacent movable micro-motion turntables is 0.01 m.
Advantageous effects
According to the invention, the spot shape characteristics at a specific distance from the emitter are obtained under the conditions that the beam quality of the laser emitter is not ideal and the spot shape is irregular, so that the whole light path profile of the laser emitter is described, the related information between the laser emitter and the receiving target surface is more conveniently obtained, the spatial characteristics of the laser beam are comprehensively and objectively described, and then the multi-dimensional angle adjustment can be carried out on the laser emitter, and a calibration basis is provided for later imaging.
Compared with the prior art, the laser light path profile measuring method provided by the invention solves the problem of measuring the whole laser light path profile, and is simple and flexible to operate and strong in practicability.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic diagram of a laser optical path profile measuring system provided by the present invention.
Fig. 2 is a block diagram of a hardware system of a laser optical path profile measuring system provided by the present invention.
Fig. 3 is a schematic view of a spot profile provided by the present invention.
Fig. 4 is a schematic diagram of ideal optical path imaging of a laser provided by the present invention.
Fig. 5 is a schematic diagram of the actual optical path imaging and distance of the laser provided by the present invention.
Fig. 6 is a diagram of the actual optical spots of the laser at different distances according to the present invention.
Fig. 7 is a graph of the actual optical path profile of the laser provided by the present invention.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
It should be noted that, in the case of no conflict, the features in the following embodiments and examples may be combined with each other; moreover, all other embodiments that can be derived by one of ordinary skill in the art from the embodiments disclosed herein without making any creative effort fall within the scope of the present disclosure.
It is noted that various aspects of the embodiments are described below within the scope of the appended claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the disclosure, one skilled in the art should appreciate that one aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method practiced using any number of the aspects set forth herein. Additionally, such an apparatus may be implemented and/or such a method may be practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.
An embodiment of the present application provides a method for measuring a laser light path profile, including the following steps:
step one, building a laser light path profile measuring system, as shown in fig. 1, wherein the system comprises a laser transmitter 1, a guide rail 4, a micro-motion turntable 3, a target surface 2, a moving base 5, an image sensor 6 and a data processing module; the target surface is arranged on the guide rail through a micro-motion turntable and is aligned to the laser emitter;
in specific implementation, as shown in fig. 2, the guide rail may be a moving guide rail made of a graduated marble material, and the moving guide rail made of the marble material provides an accurate distance between the laser emitter and the receiving target surface, and also provides Z-direction information for the final laser three-dimensional contour construction. The micro-motion turntable can be a micro-motion turntable with six degrees of freedom, can realize free adjustment in the X, Y, Z direction and the rotation direction around the X, Y, Z axis, and can adjust and control the minimum area of the target surface for receiving laser spots. The target surface receives the emitted laser to form a light spot, and the light spot can be carried by a high-precision large target surface. The movable base is provided with a pulley and carries the micro-motion turntable to move. The image sensor can be a CMOS camera with a high frame rate, can record a plurality of images in a short time and transmit the images to an upper computer to provide images for the construction of two-dimensional and three-dimensional laser profiles in the later period, and the data processing module can be realized by a lower computer. After the laser light path sinking system is preliminarily built, an initialization instruction is issued, and collimation and calibration of the laser transmitter and initialization of the CMOS camera are completed.
The whole laser light path profile measuring system is shown in figure 1 and comprises a laser transmitter (1), a high-precision large target surface (2), a micro-motion turntable (3) with six degrees of freedom, a marble material moving guide rail (4) with scales, a moving base (5), a high-frame-rate CMOS camera (6) for recording light spots, an upper computer module and a lower computer module, wherein the upper computer module comprises a PC for performing subsequent image analysis and processing. The high frame rate CMOS image sensor grabs the light spot of a laser generator on a high-precision large target surface carried on a micro-motion turntable, then the target surface light spot data is stored by utilizing the FPGA, then the target surface is continuously moved to a distance away from a laser transmitter on a guide rail, and the data is recorded. And after the measurement is finished, transmitting the image to a PC (personal computer), analyzing and processing the light spot image information at different distances by the PC, and further drawing a laser light path profile graph.
According to another embodiment of the application, higher measurement accuracy can be obtained by upgrading the pixels of the target surface image sensor, and the whole light spot image can be obtained by splicing a plurality of small target surfaces.
In another embodiment of the application, a set of laser ranging system can be additionally added to replace a scaled marble guide rail, the practicability of the system can be improved, the distances between light spots of different sizes and a laser transmitter can be obtained through corresponding laser light path profiles, and the system can be applied to distance measurement.
And step two, continuously adjusting the micro-motion turntable, and acquiring a light spot image emitted to the target surface by the laser emitter by the image sensor.
In specific implementation, the position of the fixed micro-motion turntable is unchanged at a fixed distance x0 from the laser emitter, the micro-motion turntable can be a micro-motion turntable with six degrees of freedom, the six degrees of freedom of the micro-motion turntable in the translation angle of X, Y, Z direction and the angle of rotation around X, Y, Z are continuously adjusted, and the light spot condition of the high-precision large target surface carried on the micro-motion turntable is obtained through the image sensor.
Selecting the N images with the minimum light spot area from the images acquired by the image sensor by the data processing module, and calculating the centroid corresponding to each selected image light spot and the light spot outline of each selected image; and fusing the mass centers and the light spot profiles of the N images to obtain the mass center and the profile corresponding to the target surface light spot pattern at the current position, as shown in fig. 3. The image with the smallest spot area is selected here because the area of its focused spot is smallest when the laser beam is normally incident on the lens. When the light is not normally incident, the imaging contour of the light-gathering spot is irregular, and the area is large. Ideally the spot is circular with a radius of:
ω'=λf/πω
wherein, omega is the radius of a spot on the surface of laser incident by the laser, lambda is the incident laser wavelength, f is the focal length of the lens, and omega' is the radius of a condensing spot.
In specific implementation, target surface light spots rotating at each degree of freedom of the rotary table are preprocessed, then 5 light spot patterns with the smallest area in all the light spots are selected, the coordinates of the centers of mass of the light spots are respectively obtained, the mean value of the coordinates is obtained, the light spot outlines in the 5 light spot patterns are fused, and the center of mass and the outline corresponding to the target surface light spot pattern at the current position are obtained.
The pretreatment process of the target surface light spots rotating in each degree of freedom of the rotary table is as follows: the corresponding light spot gray scale image captured by the image sensor is converted into a binary image, the connected and disconnected pixel points are processed through morphology, if two non-zero connected area pixels are arranged around a certain pixel point 0, the connected area pixels are generally regarded as 8 connected by default, and the value of 0 is changed into 1. The enclosed area in the image is then filled to a value of 1, which results in a spot of light with little noise. The noise is then removed by erosion followed by dilation to obtain the desired pattern for the baseline measurement.
The process of finding the coordinates of the centroid of the light spot is as follows: and acquiring a target light spot image, recording the width W (pixel number) and the height H (pixel number) of the target light spot image, establishing a plane rectangular coordinate system by taking the upper left corner of the image as a coordinate origin, the horizontal right direction as the positive direction of an x axis and the vertical downward direction as the positive direction of a y axis. Extracting the coordinate (x) of each pixel of the target spot imagei,yi) And the corresponding light intensity (I)(xi,yi)) Then the coordinates (x) of the centroid of the light spot can be obtainedc,yc) Comprises the following steps:
the error reduction process for averaging 5 spot maps is as follows: sequentially obtaining the coordinates of the mass center of the five-time spot pattern as (x)cj,ycj) J is 1, 2, 3, 4, 5. Then the corresponding mean (x) of the centroids can be foundc,yc) Comprises the following steps:
moving the micro-motion turntable for multiple times to adjust the distance between the target surface and the laser emitter, and repeating the second step and the third step after each movement; when the number of times of the micro-motion turntable movement reaches Nmax, obtaining Nmax groups of centroids and light spot profiles, and entering step five as shown in FIG. 6.
In specific implementation, the whole image sensing and measuring system device for measurement advances for a certain distance, the fixed distance x0 between the laser emitter and the micro-motion turntable is adjusted, the interval between two adjacent values is 0.01m, and the x0 is changed within the range of 0-10 m. And repeating the second step and the third step every time of value taking, and obtaining and recording the spot centroid (xi, yi), the shape profile (xi, yi) and the distance di between the laser emitter and the micro-motion turntable at the moment.
And step five, fitting a laser light path three-dimensional profile by using the center of mass and the profile according to the obtained center of mass and the obtained profile of the light spot of which the distance between the laser transmitter and the micro-motion turntable is different, and taking the distance as a Z axis, as shown in fig. 7.
When the method is specifically implemented, the fourth step is executed, the centroid and light spot shape images of the laser emitter and the micro-motion turntable at different distances can be obtained, and the distance is taken as the Z axis, so that the three-dimensional profile of the laser light path is finally obtained. The image of the laser emitter falling on the high-precision large target surface is often not an ideal regular circle or ellipse, as shown in fig. 4-5, but the specific self-feature of the laser emitter is more beneficial to the final reconstruction of the three-dimensional profile of the laser light path, and the self-feature of the laser spot is analyzed and processed, so that the corresponding feature points (bulges, grooves, burrs and the like) are identified, the laser spot images at different distances are matched, and the three-dimensional profile of the laser light path is finally drawn.
The three-dimensional laser light path outline method provided by the invention realizes real-time online rapidness, captures the laser light spot outline at a specific position by using a high frame rate CMOS image sensor, and is a non-contact measurement mode. The micro-motion turntable is sequentially stepped on the movable guide rail, measurement is rapid and convenient, two-dimensional laser light path contours and three-dimensional morphology features can be automatically output, the data processing module can be realized by adopting a lower computer, the upper computer can be adopted to image the two-dimensional laser light path contours and the three-dimensional morphology features, the upper computer is based on image sensing chips for imaging, commercial low-cost digital image sensing chips are adopted, cost is low, and system upgrading and expanding are facilitated.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the protection scope of the present invention, and although the present invention is described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solutions of the present invention can be modified or substituted equivalently without departing from the spirit and scope of the technical solutions of the present invention.
Claims (6)
1. A method for measuring the laser light path profile is characterized by comprising the following specific steps:
step one, a laser light path profile measuring system is set up, and the system comprises a laser transmitter, a guide rail, a micro-motion turntable, a target surface, a moving base, an image sensor and a data processing module; the target surface is arranged on the guide rail through a micro-motion turntable and is aligned to the laser emitter;
step two, continuously adjusting the micro-motion turntable, wherein the image sensor collects a light spot image emitted to the target surface by the laser emitter;
selecting N images from the images acquired by the image sensor by the data processing module, and calculating the centroid corresponding to each selected image light spot and the light spot profile of each selected image; fusing the mass centers and the light spot profiles of the N images to obtain the mass center and the profile corresponding to the target surface light spot pattern at the current position;
moving the micro-motion turntable for multiple times to adjust the distance between the target surface and the laser emitter, and repeating the second step and the third step after each movement; when the moving times of the micro-motion turntable reach Nmax, obtaining Nmax groups of centroids and light spot contours, and entering a fifth step;
and fifthly, fitting a three-dimensional profile of a laser light path by using the center of mass and the profile according to the obtained center of mass and the obtained profile of the light spot of which the laser transmitter and the micro-motion turntable are at different distances and taking the distance as a Z axis.
2. The method for measuring the laser beam path profile according to claim 1, wherein the step three selects the smallest N images in the spot area.
3. The method for measuring the laser light path profile according to claim 1, wherein the third step further comprises preprocessing the image, and the preprocessing is as follows: converting a corresponding light spot gray scale image acquired by an image sensor into a binary image, and if two non-zero connected region pixels are arranged around a certain pixel point 0, changing the value of 0 into 1; the enclosed area in the image is then filled to a value of 1 and then the noise is removed by an erosion-then-dilation operation.
4. The method of claim 1, wherein the guide rail is a movable guide rail made of a graduated marble material.
5. The method for measuring the laser optical path profile according to claim 1, wherein the laser ranging system is used for measuring the distance of the moving micro-motion turntable.
6. The method for measuring the laser light path profile according to claim 4 or 5, wherein the interval between two adjacent movable micro-motion turntables is 0.01 m.
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