CN114026707A - Multilayer superconducting article, superconducting coil, actuator, motor, stage apparatus and lithographic apparatus - Google Patents

Abstract

The present invention provides a multilayer superconducting article (600) extending in a Longitudinal Direction (LD), the article comprising: -a substrate layer (610) extending in the longitudinal direction; -a superconducting layer (620) extending in the longitudinal direction; -a further layer (630) extending in the longitudinal direction; wherein the substrate layer or the further layer comprises one or more cooling protrusions extending in the longitudinal direction and in a lateral direction.

Description

Multilayer superconducting article, superconducting coil, actuator, motor, stage apparatus and lithographic apparatus

Cross Reference to Related Applications

This application claims priority to european application 19182977.9 filed on 27.6.2019, and the entire contents of which are incorporated herein by reference.

Technical Field

The present invention relates to multilayer superconducting articles, such as: a belt, a superconducting coil, an actuator, a motor, a stage apparatus and a lithographic apparatus.

Background

A lithographic apparatus is a machine that is configured to apply a desired pattern onto a substrate. For example, lithographic apparatus can be used in the manufacture of Integrated Circuits (ICs). A lithographic apparatus may, for example, project a pattern (also often referred to as a "design layout" or "design") of a patterning device (e.g., a mask) onto a layer of radiation-sensitive material (resist) disposed on a substrate (e.g., a wafer).

As semiconductor manufacturing processes continue to advance, the amount of functional elements (such as transistors) per device has steadily increased while the size of circuit elements has steadily decreased over the decades, following a trend commonly referred to as "moore's law". To keep pace with moore's law, the semiconductor industry is seeking technologies that can produce smaller and smaller features. To project a pattern onto a substrate, a lithographic apparatus may use electromagnetic radiation. The wavelength of this radiation determines the minimum size of features patterned on the substrate. Typical wavelengths currently used are 365nm (i-line), 248nm, 193nm and 13.5 nm. A lithographic apparatus using Extreme Ultraviolet (EUV) radiation (having a wavelength in the range 4 to 20mm, for example 6.7nm or 13.5nm) may be used to form smaller features on a substrate than a lithographic apparatus using radiation having a wavelength of 193nm, for example.

In order to project a desired pattern onto the substrate, the patterning device is typically displaced relative to the radiation beam in order to generate a patterned radiation beam. Simultaneously, the substrate is displaced relative to the patterned beam of radiation so as to receive the pattern onto the radiation-sensitive material on the substrate. To achieve the desired displacement, the patterning device and the substrate are typically mounted on a stage, which is typically moved and positioned by a plurality of actuators and motors, such as electromagnetic actuators and electromagnetic motors. To improve the performance of lithographic apparatus, in particular the throughput of the apparatus, there is a continuing need for stronger motors and actuators for the displacement and positioning of the patterning device and substrate. To meet this demand, the use of superconducting motors may be considered. In order to maintain these motors in a superconducting state, the superconducting coils applied to these motors need to be maintained below a critical temperature. In order to do this, it is necessary to effectively eliminate any losses occurring in the coil. It would be desirable to improve the cooling capacity of known superconducting coils or motors.

Disclosure of Invention

In order to improve the cooling capacity of known superconducting coils or motors, according to a first aspect of the invention, there is provided a multilayer superconducting article extending in a longitudinal direction, comprising:

-a substrate layer extending in said longitudinal direction;

-a superconducting layer extending in the longitudinal direction;

-a further layer extending in the longitudinal direction;

wherein the substrate layer or the further layer comprises one or more cooling protrusions extending in the longitudinal direction and in a lateral direction.

According to a second aspect of the present invention, there is provided a superconducting coil comprising a plurality of windings made of superconducting tape, the superconducting coil further comprising one or more inserts arranged in spaces between adjacent windings of the plurality of windings, the one or more inserts having a width greater than a width of the superconducting tape.

According to a further aspect of the invention, there is provided an actuator or motor comprising a superconducting coil according to the invention.

According to a further aspect of the invention there is provided a platform apparatus comprising an actuator or motor according to the invention.

According to a further aspect of the invention, there is provided a lithographic apparatus comprising a stage apparatus according to the invention.

Drawings

Embodiments of the invention will now be described, by way of example only, with reference to the accompanying schematic drawings in which:

fig. 1 depicts a schematic overview of a lithographic apparatus;

FIG. 2 depicts a detailed view of a part of the lithographic apparatus of FIG. 1;

figure 3 schematically depicts a position control system;

fig. 4 schematically depicts a plan view of a superconducting tape known in the art;

fig. 5 schematically depicts a cross-sectional view of a superconducting coil known in the art;

fig. 6 schematically depicts a plan view of a superconducting tape according to an embodiment of the invention;

figures 7 and 8 schematically depict cross-sectional views of a superconducting article according to an embodiment of the invention;

figures 9 to 12 schematically depict cross-sectional views of a superconducting coil according to an embodiment of the invention;

figures 13 to 16 schematically depict plan views of superconducting coils according to embodiments of the invention;

fig. 17 to 21 schematically depict plan views of mounting arrangements of coils according to the invention.

Fig. 22 schematically depicts a cross-sectional view of a superconducting article according to an embodiment of the invention.

Detailed Description

In this document, the terms "radiation" and "beam" are used to encompass all types of electromagnetic radiation, including ultraviolet radiation (e.g. having a wavelength of 365nm, 248nm, 193nm, 157nm or 126 nm) and EUV (extreme ultraviolet radiation, e.g. having a wavelength in the range of about 5 to 100 nm).

The terms "reticle", "mask" or "patterning device" as used in this disclosure may be broadly interpreted as referring to a generic patterning device that can be used to impart an incident radiation beam with a patterned cross-section that corresponds to a pattern to be created in a target portion of the substrate. In this context, the term "light valve" may also be used. Examples of other such patterning devices, in addition to classical masks (transmissive or reflective, binary, phase-shift, hybrid, etc.), include programmable mirror arrays and programmable LCD arrays.

FIG. 1 schematically depicts a lithographic apparatus LA. The lithographic apparatus LA comprises: an illumination system (also referred to as an illuminator) IL configured to condition a radiation beam B (e.g. UV radiation, DUV radiation or EUV radiation); a mask support (e.g. a mask table) MT constructed to support a patterning device (e.g. a mask) MA and connected to a first positioner PM configured to accurately position the patterning device MA in accordance with certain parameters; a substrate support (e.g. a wafer table) WT constructed to hold a substrate (e.g. a resist-coated wafer) W and connected to a second positioner PW configured to accurately position the substrate support in accordance with certain parameters; and a projection system (e.g. a refractive projection lens system) PS configured to project a pattern imparted to the radiation beam B by patterning device MA onto a target portion C (e.g. comprising one or more dies) of the substrate W.

In operation, the illumination system IL receives a radiation beam from a radiation source SO, for example, via a beam delivery system BD. The illumination system IL may include various types of optical components, such as refractive, reflective, magnetic, electromagnetic, electrostatic and/or other types of optical components, or any combination thereof, for directing, shaping, and/or controlling radiation. The illuminator IL may be used to condition the radiation beam B to have a desired spatial and angular intensity distribution in its cross-section at the plane of the patterning device MA.

The term "projection system" PS used herein should be broadly interpreted as encompassing any type of projection system, including refractive, reflective, catadioptric, anamorphic, magnetic, electromagnetic and/or electrostatic optical systems, or any combination thereof, as appropriate for the exposure radiation being used, and/or for other factors such as the use of an immersion liquid or the use of a vacuum. Any use of the term "projection lens" herein may be considered as synonymous with the more general term "projection system" PS.

The lithographic apparatus LA may be of the type: at least a portion of the substrate W may be covered by a liquid having a relatively high refractive index, e.g. water, so as to fill a space between the projection system PS and the substrate W, which is also referred to as immersion lithography. US6952253, which is incorporated by reference into the present invention, gives more information about immersion technology.

The lithographic apparatus LA may also be of a type having two or more substrate supports WT (also referred to as "dual stage"). In such "multi-stage" machines the substrate supports WT may be used in parallel, and/or steps may be performed on a substrate W positioned on one of the substrate supports WT in preparation for subsequent exposure of the substrate W while another substrate W on another substrate support WT is being used to expose a pattern on the other substrate W.

In addition to the substrate support WT, the lithographic apparatus LA may also include a measurement stage. The measuring platform is arranged to hold a sensor and/or a cleaning device. The sensor may be arranged to measure a property of the projection system PS or a property of the radiation beam B. The measurement platform may hold a plurality of sensors. The cleaning device may be arranged to clean a part of the lithographic apparatus, for example a part of the projection system PS or a part of the system providing the immersion liquid. The measurement stage can be moved under the projection system PS while the substrate support WT is away from the projection system PS.

In operation, the radiation beam B is incident on the patterning device (e.g., mask) MA, which is held on the mask support MT, and is patterned by the pattern (design layout) present on the patterning device MA. Having traversed the patterning device MA, the radiation beam B passes through the projection system PS, which focuses the beam onto a target portion C of the substrate W. With the aid of the second positioner PW and position measurement system PMS, the substrate support WT can be moved accurately, e.g. so as to position different target portions C in the path of the radiation beam B at focused and aligned positions. Similarly, the first positioner PM and possibly another position sensor (which is not explicitly depicted in fig. 1) can be used to accurately position the patterning device MA with respect to the path of the radiation beam B. Patterning device MA and substrate W may be aligned using mask alignment marks Ml, M2 and substrate alignment marks Pl, P2. Although the substrate alignment marks P1, P2 as illustrated occupy dedicated target portions, they may be located in spaces between target portions. When substrate alignment marks P1, P2 are located between target portions C, these substrate alignment marks are referred to as scribe-lane alignment marks.

For purposes of illustrating the invention, a Cartesian coordinate system is used. The cartesian coordinate system has three axes, namely an x-axis, a y-axis and a z-axis. Each of the three axes is orthogonal to the other two axes. Rotation about the x-axis is referred to as Rx rotation. Rotation about the y-axis is referred to as Ry rotation. The rotation around the z-axis is called Rz rotation. The x-axis and y-axis define a horizontal plane, while the z-axis is along the vertical direction. The cartesian coordinate system is not limited to the present invention and is for illustration only. Alternatively, another coordinate system (such as a cylindrical coordinate system) may be used to illustrate the invention. The orientation of the cartesian coordinate system may be different, for example, such that the z-axis has a component along the horizontal plane.

FIG. 2 shows a more detailed view of a portion of the lithographic apparatus LA of FIG. 1. The lithographic apparatus LA may be provided with a base frame BF, a balance mass BM, a metrology frame MF and a vibration isolation system IS. The metrology frame MF supports the projection system PS. Additionally, the metrology frame MF may support a portion of the position measurement system PMS. The metrology frame MF IS supported by the base frame BF via the vibration isolation system IS. The vibration isolation system IS arranged to prevent or reduce propagation of vibrations from the base frame BF to the metrology frame MF.

The second positioner PW is arranged to accelerate the substrate support WT by providing a driving force between the substrate support WT and the balancing mass BM. The driving force accelerates the substrate support WT in a desired direction. Due to conservation of momentum, the driving force is also applied to the balancing mass BM with equal magnitude but in the opposite direction to the desired direction. Typically, the mass of the balancing mass BM is significantly greater than the mass of the second positioner PW and moving parts of the substrate support WT.

In an embodiment, the second positioner PW is supported by the balancing mass BM. For example, wherein the second positioner PW comprises a planar motor for levitating the substrate support WT above the balancing mass BM. In another embodiment, the second positioner PW is supported by the base frame BF. For example, wherein the second positioner PW comprises a linear motor and wherein the second positioner PW comprises a bearing (e.g., a gas bearing) to suspend the substrate support WT above the base frame.

The position measurement system PMS may comprise any type of sensor suitable for determining the position of the substrate support WT. The position measurement system PMS may comprise any type of sensor suitable for determining the position of the mask support MT. The sensor may be an optical sensor, such as an interferometer or encoder. The position measurement system PMS may comprise a combined system of interferometers and encoders. The sensor may be another type of sensor, such as a magnetic sensor, a capacitive sensor, or an inductive sensor. The position measurement system PMS may determine the position relative to a reference (e.g. the metrology frame MF or the projection system PS). The position measurement system PMS may determine the position of the substrate table WT and/or the mask support MT by measuring the position or by measuring a time derivative of the position, such as velocity or acceleration.

The position measurement system PMS may comprise an encoder system. Encoder systems are known from, for example, US patent application US2007/0058173a1, filed 2006, 9, 7, which is hereby incorporated by reference. The encoder system includes an encoder head, a grating, and a sensor. The encoder system may receive a primary radiation beam and a secondary radiation beam. Both the primary radiation beam and the secondary radiation beam originate from the same radiation beam, i.e. the original radiation beam. At least one of the primary radiation beam and the secondary radiation beam is generated by diffracting the original radiation beam with the grating. If both the primary radiation beam and the secondary radiation beam are generated by diffracting the original radiation beam with the grating, the primary radiation beam needs to have a different diffraction order than the secondary radiation beam. Different diffraction orders such as +1 order, -1 order, +2 order, and-2 order. The encoder system optically combines the primary radiation beam and the secondary radiation beam into a combined radiation beam. Sensors in the encoder head determine the phase or phase difference of the combined radiation beam. The sensor generates a signal based on the phase or phase difference. The signal is indicative of a position of the encoder head relative to the grating. One of the encoder head and the grating may be arranged on the substrate structure WT. The other of the encoder head and the grating may be arranged on the metrology frame MF or the base frame BF. For example, a plurality of encoder heads are arranged on the metrology frame MF, while a grating is arranged on the top surface of the substrate support WT. In another example, the grating is arranged on a bottom surface of the substrate support WT and the encoder head is arranged below the substrate support WT.

The position measurement system PMS may comprise an interferometer system. Interferometer systems are known from, for example, U.S. patent application US6,020,964, filed 7, 13, 1998, which is hereby incorporated by reference. The interferometer system may include a beam splitter, a mirror, a reference mirror, and a sensor. The radiation beam is split by the beam splitter into a reference beam and a measurement beam. The measurement beam propagates to the mirror and is reflected by the mirror back to the beam splitter. The reference beam propagates to the reference mirror and is reflected by the reference mirror back to the beam splitter. At the beam splitter, the measurement beam and the reference beam are combined into a combined radiation beam. The combined radiation beam is incident on the sensor. The sensor determines the phase or frequency of the combined radiation beam. The sensor generates a signal based on the phase or the frequency. The signal is representative of the displacement of the mirror. In an embodiment, the mirror is connected to the substrate support WT. The reference mirror may be connected to the metrology frame MF. In an embodiment, the measurement beam and the reference beam are combined into a combined radiation beam by additional optical components instead of the beam splitter.

The first positioner PM may include a long stroke module and a short stroke module. The short stroke module is arranged to move the mask support MT with high accuracy over a small movement range with respect to the long stroke module. The long stroke module is arranged to move the short stroke module relative to the projection system PS over a large range of movement with relatively low accuracy. With the combination of the long-stroke module and the short-stroke module, the first positioner PM is able to move the mask support MT with high accuracy over a large movement range with respect to the projection system PS. Similarly, the second positioner PW may include a long-stroke module and a short-stroke module. The short stroke module is arranged to move the substrate support WT relative to the long stroke module over a small range of movement with high accuracy. The long stroke module is arranged to move the short stroke module relative to the projection system PS over a large range of movement with relatively low accuracy. With the combination of the long-stroke module and the short-stroke module, the second positioner PW is able to move the substrate support WT over a large range of movement with high accuracy relative to the projection system PS.

The first positioner PM and the second positioner PW are each provided with an actuator for moving the mask support MT and the substrate support WT, respectively. The actuator may be a linear actuator for providing a driving force along a single axis (e.g., y-axis). Multiple linear actuators may be employed to provide driving forces along multiple axes. The actuator may be a planar actuator for providing driving forces along multiple axes. For example, the planar actuator may be arranged to move the substrate support WT with 6 degrees of freedom. The actuator may be an electromagnetic actuator comprising at least one coil and at least one magnet. The actuator is arranged to move the at least one coil relative to the at least one magnet by applying a current to the at least one coil. The actuator may be a moving magnet type actuator having the at least one magnet coupled to the substrate support WT and the mask support MT, respectively. The actuator may be a moving coil actuator having said at least one coil coupled to the substrate support WT and the mask support MT, respectively. The actuator may be a voice coil actuator, a magneto resistive actuator, a lorentz actuator or a piezo actuator, or any other suitable actuator. In an embodiment of the invention, the first positioner PM and/or the second positioner PW includes one or more actuators or motors according to the invention for displacing or positioning the mask support MT and/or the substrate support WT.

The lithographic apparatus LA comprises a position control system PCS, as schematically depicted in fig. 3. The position control system PCS includes a set point generator SP, a feedforward controller FF and a feedback controller FB. The position control system PCS provides a drive signal to the actuator ACT. The actuator ACT may be an actuator for the first positioner PM or the second positioner PW. The actuator ACT drives a facility P, which may comprise the substrate support WT or the mask support MT. The output of the facility P is a position quantity, such as position or velocity or acceleration. The position quantity is measured with the position measurement system PMS. The position measuring system PMS generates a signal as a position signal representing the position quantity of the installation P. The set-point generator SP generates a signal as a reference signal representing a desired position quantity of the facility P. For example, the reference signal represents a desired trajectory of the substrate support WT. The difference between the reference signal and the position signal forms an input for the feedback controller FB. Based on the input, the feedback controller FB provides at least a portion of the drive signal to the actuator ACT. The reference signal may form an input for the feedforward controller FF. Based on said input, said feedforward controller FF provides at least part of said drive signal to said actuator ACT. The feed forward FF may utilize information about the dynamics of the plant P, such as mass, stiffness, resonance modes, and eigenfrequencies.

The present invention relates to a superconducting article, and more particularly to a multilayer superconducting article such as a superconducting tape. Such superconducting tapes may be used, for example, to manufacture coils that may be applied in actuators or motors. Superconducting tapes are generally known and comprise several different layers.

Fig. 4 schematically illustrates the construction of a known multilayer superconducting tape. The multilayer superconducting tape 100 as shown includes multiple layers stacked in a stacking direction SD as indicated. The multilayer superconducting tape 100 as shown includes a substrate layer 110, which substrate layer 110 may be made of, for example, a non-magnetic material or alloy. The multilayer superconducting tape 100 further includes a layer of superconducting material 120, for example a (RE) BCO type material, whereby RE represents a rare earth material, such as yttrium. The layer of superconducting material 120 may be applied, for example, by a vapor deposition technique or the like. In known arrangements, one or more buffer layers or capping layers are provided between the substrate layer 110 and the superconducting layer 120, which ensure proper growth of the superconducting layer 120. The multilayer superconducting tape 100 also includes an electrical stabilizer layer 130, for example made of copper or any other suitable electrically conductive material. In a known arrangement, a silver contact layer and/or a solder layer may be applied between the superconducting layer 120 and the stabilizing layer 130. Typically, the different layers of the multilayer superconducting tape 100 have substantially the same width W, defined as the dimension of the tape in the transverse direction TD, which is the direction perpendicular to the longitudinal direction LD of the tape and perpendicular to the stacking direction SD. As shown in fig. 4, the superconducting tape may be applied, for example, to a winding coil, which may be applied, for example, in an electromagnetic motor or actuator.

In order to remain in a superconducting state, the combination of current, local magnetic field strength, and local temperature through the superconducting layer must be within certain limits/ranges. If losses occur in the superconducting tape or coil during operation or operation, the losses need to be eliminated in order to ensure that the triple conditions of current, local magnetic field strength, and temperature are maintained. To be able to remove the ongoing losses, the superconducting tapes are typically arranged in contact with a coolant (e.g., liquid nitrogen or liquid helium), depending on the desired operating temperature or operating temperature of the superconducting tapes or coils. Fig. 5 schematically shows a cross-sectional view of a superconducting coil 500, said superconducting coil 500 being arranged within a housing 510 provided with a coolant 520. Typically, the housing will include an inlet and an outlet for the cooling fluid 520. In the embodiment shown, the coil 500 comprises 8 concentric windings or turns 500.1, 500.2 wound closely together. In the embodiment shown in the figures, each winding 500.1, 500.2 comprises a plurality of layers, as shown in the detailed view of the winding 500.2. In particular, the winding may include a substrate layer 500.21, a superconducting layer 500.22, and a stabilizer layer 500.23 in a manner similar to the superconducting tape 100 shown in fig. 4. In order to cool the superconducting coil 500, heat exchange (from the coil 500 to the coolant 520) is required via the surface of the coil 500 interfacing or contacting the coolant 520. In the embodiment shown, any heat or losses thus need to be transferred via the outer surfaces of the coil windings 500.1, 500.2 in contact with the coolant 520 (i.e. the outer surfaces 530.1 to 530.4 of the group of 8 concentric windings). The surface of the superconducting coil 500 in contact with the coolant 520 may be referred to as a heat exchange surface, for example. In such embodiments, the performance of superconducting coil 500 may be limited by the amount of heat or losses that may be removed via outer surfaces 530.1 through 530.4. It has been proposed in the literature to increase the heat exchange surface of superconducting coils by including a layer of porous material or shims between adjacent windings of the superconducting coils in order to allow coolant to flow between the adjacent windings. However, this arrangement results in an increase in the size of the cross-section of the coil, particularly the coil width CW, when the same number of turns needs to be accommodated. Such an arrangement would thus result in a reduced current density per unit length along the width of the coil.

It is an object of the invention to provide alternative ways to increase the heat exchanging surface of the superconducting coils in order to increase the cooling capacity.

In an embodiment of the invention, there is provided a multilayer superconducting article extending in a longitudinal direction, comprising a substrate layer, a superconducting layer, and a further layer, wherein the substrate layer or the further layer comprises one or more cooling protrusions or fins or the like. The cooling projections or fins may extend both in the longitudinal direction and in a transverse direction substantially perpendicular to the longitudinal direction.

By such cooling projections or fins, the superconducting article can be cooled more efficiently. In particular, the use of said cooling protrusions or fins enables to increase the heat exchange surface with the cooling liquid.

In an embodiment, at least a portion of the substrate layer or the further layer extends beyond a side surface of the superconducting layer.

In an embodiment, the further layer may have the function of a stabilizing layer. According to these embodiments of the invention, at least a portion of the substrate layer or the stabilization layer extends beyond a side surface of the superconductor layer.

Such an embodiment is schematically illustrated in fig. 6 and 7.

Fig. 6 schematically illustrates a plan view of a superconducting article 600 (e.g., tape) according to an embodiment of the present invention, and fig. 7 schematically illustrates a cross-sectional view of the article 600. The superconducting article 600 includes a substrate layer 610, a superconducting layer 620, and another layer 630 (which may be, for example, a stabilizer layer). As can be seen, the layers 610, 620, 630 are stacked in said stacking direction SD. Layers 610, 620, and 630 of superconducting article 600 extend in both the longitudinal direction LD and the transverse direction TD. Within the meaning of the present invention, length is used to denote the dimension of the article or of a layer of the article in the longitudinal direction LD, width is used to denote the dimension of the article or of a layer of the article in the transverse direction TD, and thickness is used to denote the dimension of the article or of a layer of the article in the stacking direction SD. The surfaces of the layers extending in both the longitudinal direction LD and the transverse direction TD as applied in the superconducting article according to the present invention are referred to as main surfaces, while the surfaces of the layers extending in both the longitudinal direction LD and the stacking direction SD are referred to as side surfaces. In fig. 6 and 7, reference numeral 630.1 thus denotes the main surface of the further layer 630, reference numeral 630.2 thus denotes the side surface of the further layer 630, and reference numeral 620.2 denotes the side surface of the superconducting layer 620.

According to an embodiment of the invention, the substrate layer or the further layer comprises one or more cooling protrusions or fins or the like. In the embodiment shown in the figure, it can be seen that the width of the further layer 630 is greater than the width of the substrate layer 610 or the superconductive layer 620. As such, the further layer 630 extends slightly beyond the substrate layer 610 and the superconductive layer 620 in the transverse direction TD. In particular, the further layer 630 applied in the superconducting article 600 extends beyond the lateral surface 620.2 of the superconducting layer. In other words, the side surface 630.2 of the further layer is further away from the plane of symmetry P of the superconducting layer 620 than the side surface 620.2 of the superconducting layer 620. By doing so, the heat exchange surface of the superconducting article may be significantly increased. In the embodiment shown, the portion of the further layer 630 that extends beyond the substrate layer 610 and the superconductive layer 620 is indicated by reference numeral 632 in fig. 7. Thus, the portion 632 may be considered a cooling tab or a heat sink.

Providing one or more cooling protrusions or fins to the superconducting article may be accomplished in various ways.

Fig. 8 schematically illustrates a cross-sectional view of various superconducting articles that have been provided with cooling protrusions, according to an embodiment of the invention. Said cross-section being in a plane substantially perpendicular to said longitudinal direction of said superconducting article, which may be, for example, a tape.

Fig. 8(a) schematically illustrates a cross-sectional view of an embodiment of a superconducting article 800 including a substrate layer 810, a superconducting layer 820, and another layer 830. The further layer may, for example, be a stabilizing layer, for example made of or comprising an electrical conductor (e.g. Cu, Al, Ni, etc.). The layers are stacked in a stacking direction SD and extend in the transverse direction TD. In the embodiment shown, the right side surface 810.2 of the substrate layer 820 extends beyond the right side surfaces 820.2 and 830.2 of the superconductive layer 820 and the further layer 830. By doing so, the portion of the substrate layer 810 indicated by reference numeral 812 beyond the side surfaces 820.2 and 830.3 may act as a cooling tab or heat sink. In the embodiment shown, the left side surfaces of the substrate layer 810, the superconductive layer 820, and the further layer 830 are substantially flush. Fig. 8(b) schematically illustrates a cross-sectional view of another embodiment of a superconducting article 900 including a substrate layer 910, a superconducting layer 920, and another layer 930. In the embodiment shown, cooling protrusions are provided on both sides of the superconducting article 900. In particular, in the embodiment shown in the figures, the right side surface 910.2 of the substrate layer 910 extends beyond the right side surface 920.2 of the superconducting layer 920 and the right side surface 930.2 of the further layer 930, and the left side surface 910.4 of the substrate layer 910 extends beyond the left side surface 920.4 of the superconducting layer 920 and the left side surface 930.4 of the further layer 930. Further increase of the heat exchange surface may be achieved by having cooling protrusions or fins 912, 914 on both sides of the superconducting article 900.

Instead of having the substrate layer or the further layer having an increased width with respect to the width of the superconducting layer, cooling protrusions or fins may also be realized by an asymmetric stacking of different layers of the superconducting article. Fig. 8(c) illustrates such an embodiment. Fig. 8(c) schematically illustrates a cross-sectional view of an embodiment of a superconducting article 1000 including a substrate layer 1010, a superconducting layer 1020, and another layer 1030. In the embodiment shown, the further layer 1030 is shifted to the right with respect to the substrate layer 1010 and the superconductive layer 1020. By doing so, the cooling protrusion 1032 is realized. With regard to this embodiment, it may further be noted that, assuming that the width of the further layer 1030 is substantially the same as the width of the substrate layer 1010 and the superconductive layer 1020, a cooling protrusion is also generated on the left side. In particular, it can be considered that portions of the substrate layer 1010 and the superconductive layer 1020 extend beyond the side surface 1030.2 of the further layer 1030, thus creating additional heat exchange surfaces. In particular, when the superconducting article 1000 is applied as a magnet coil or an actuator coil and is present in a coolant (such as liquid nitrogen), heat exchange may occur via portions of the major surface 1020.1 of the superconducting layer 1020. With regard to such a cooling projection on the left side formed by the portion of the superconducting layer and the portion of the substrate layer, it may be noted that it may not be desirable to use the portion of the superconducting layer as a heat exchanging surface for directly interacting with the coolant, since such an arrangement means that a portion of the superconducting layer is not bound by, for example, the further layer 1030. Thus, during use, portions of the superconductive layer extending beyond the side surfaces of the further layer 1030 may be subjected to forces exerted thereon and may deflect or deform. For example, when the superconducting article 1000 is used to form a coil of a superconducting actuator, a force will be exerted on a current carrying conductor of the actuator, particularly on the superconducting layer of the actuator coil. In the embodiment of fig. 8(c), these forces may cause deformation of the left cooling tab.

To avoid or mitigate this, measures may be taken to avoid that the part of the superconducting layer that extends beyond the side surface of the further layer carries current during use. Fig. 8(d) schematically shows a cross-sectional view of such an embodiment. Fig. 8(d) schematically illustrates a cross-sectional view of an embodiment of a superconducting article 1100 including a substrate layer 1110, a superconducting layer 1120, and another layer 1130. In the embodiment shown, the further layer 1130 is shifted to the left with respect to the substrate layer 1110 and the superconductive layer 1120. In the embodiment shown in the figure, it is assumed that the superconducting layer 1120 comprises two parallel portions 1120.1, 1120.2. By the movement of the further layer 1130, a cooling protrusion 1132 is realized on the left side and, provided that the width of the further layer 1130 is substantially the same as the width of the substrate layer 1110 and the superconductive layers 1120.1, 1120.2, a cooling protrusion is also generated on the right side. In the embodiment shown in the figure, it is assumed that the parallel portions 1120.1, 1120.2 of the superconductive layer 1120 are insulated from each other. This may be achieved, for example, by cutting the superconducting layer 1120 along the longitudinal axis after the superconducting layer has been applied. By doing so, it may for example be ensured that during operation or normal use, the portion 1120.2 of the superconducting layer 1120.1, 1120.2 remains inactive, i.e. does not carry any current. This may be achieved, for example, by connecting only a portion 1120.1 of the superconducting layer 1120 to a power supply (e.g., a voltage or current source). When the portion 1120.2 of the superconducting layer 1120 carries no current, no force will act on the cooling protrusion produced on the right side.

As an alternative to disabling a portion of the superconducting layer 1120 as shown in fig. 8(d), it may also be ensured during manufacture that the superconducting layer extends only to the surface covered by the further layer 1130, e.g. a stabilizer layer. Fig. 8(e) schematically shows such an embodiment. Fig. 8(e) schematically illustrates a cross-sectional view of an embodiment of a superconducting article 1200 including a substrate layer 1210, a superconducting layer 1220, and another layer 1230. In the embodiment shown, the further layer 1230 is shifted to the left with respect to the substrate layer 1210 and the superconductive layer 1220. In the embodiment shown, the superconducting layer 1220 has a width smaller than that of the substrate layer 1210, the superconducting layer 1220 being arranged such that it is completely covered by the further layer 1230 or completely sandwiched between the substrate layer 1210 and the further layer 1230.

Fig. 22 schematically illustrates a cross-sectional view of a superconducting article 2600 (e.g., tape) according to an embodiment of the invention. Superconducting article 2600 includes a substrate layer 2610, a conductive layer 2620, and another layer 2630 (which may be, for example, a stabilization layer), the conductive layer 2620 including a superconducting element 2620.1 and a conductive element 2620.2 (e.g., made of copper or any other suitable conductive material) having substantially the same thickness as the superconducting element. It can be seen that the layers 2610, 2620, 2630 are stacked in the stacking direction SD. The layers 2610, 2620, and 2630 of the superconducting article 2600 extend in both the longitudinal direction LD and the transverse direction TD. In fig. 22, reference numeral 2630.1 denotes a main surface of the other layer 2630, reference numeral 2630.2 denotes a side surface of the other layer 2630, and reference numeral 2620.12 denotes a side surface of the superconducting element 2620.1. According to an embodiment of the invention, the substrate layer or the further layer comprises one or more cooling protrusions or fins or the like. In the embodiment shown, it can be seen that the width of the further layer 2630 is greater than the width of the substrate layer 2610 or the conductive layer 2620. As such, the further layer 2630 extends slightly beyond the substrate layer 2610 and the conductive layer 2620 in the lateral direction TD. In particular, the further layer 2630 as applied in the superconducting article 2600 extends beyond the side surface 2620.2 of the superconducting layer. In the embodiment shown, the portion of the further layer 2630 that extends beyond the substrate layer 2610 and the conductive layer 2620 is denoted by reference numeral 2632 in fig. 22. Thus, the portion 2632 may be considered a cooling tab or a heat sink. Fig. 22 shows a gap 2620.3 between the superconducting element 2620.1 and the conductive element 2620.2, which is advantageous because it allows the two elements to expand even if there is a difference in thermal expansion rates of the elements. If the further layer 2630 comprises a thermally conductive material, heat exchange between the superconducting element 2620.1 and the electrically conductive element 2620.2 may occur. The cooling capability of the stack of superconducting articles 2600 may be further increased if the material of substrate layer 2610 is also thermally conductive.

Superconductive articles according to the present invention may be manufactured using similar processes and materials as used to manufacture known superconductive articles or tapes.

The substrate layer as applied in the superconducting article according to the invention may for example be made of Hastelloy^TMNickel alloy, stainless steel, ferromagnetic or non-ferromagnetic alloys. The main surface of the substrate layer may, for example, be electropolished to obtain the desired low roughness and/or the desired flatness. Typical thicknesses of the substrate layer may be, for example, in the range of 30 to 150 microns. One or more buffer layers may be applied on the substrate layer in the superconducting article according to the present invention prior to applying the superconducting layer. For example, the superconducting article according to the present invention may include Al₂O₃Or Y₂O₃Layer, LaMnO₃A layer, a MgO layer or the like. For example, these layers may be applied to provide appropriate texturing for subsequent application of the superconductive layer.

The superconducting layer as applied may for example comprise a rare earth barium copper oxide, i.e. (RE) BCO composition. To apply the (RE) BCO material layer, a process such as pulsed laser deposition may be applied. These materials may also be referred to as 2G (second generation) superconducting materials.

The superconducting layer may be covered with a silver coating and then a stabilizing layer (e.g., copper or copper alloy) applied (e.g., soldered) thereon.

In the embodiments of the superconducting article according to the present invention as discussed above, the use of the superconducting layer is discussed. It may be noted that the superconducting article may be formed from a plurality of stacked superconducting layers.

It may further be noted that the superconducting article according to the present invention may comprise one or more insulating layers or insulating materials. Examples of such insulating layers or materials may include, for example, polyimide (Kapton) tape wrapping, fiberglass, and/or Kapton wrapping. Varnish or epoxy fillers (e.g. thermally conductive fillers) as well as sol-gels may be applied. TiO may also be used₂Or including colloidal graphite or Al₂O₃The coating of (1).

The superconducting article according to the invention may advantageously be applied to form a coil, which may be applied in a superconducting magnet, an actuator or a motor. These coils may be, for example, circular coils, racetrack coils, pancake coils, non-pancake coils, etc.

Fig. 9 schematically shows a cross-sectional view of a superconducting coil according to the present invention, such a coil being manufactured using a superconducting article (e.g., a tape-shaped superconducting article according to the present invention). Fig. 9 schematically illustrates a cross-sectional view of a coil 1300 having 4 turns, each turn having a cross-section similar to the cross-section of the superconducting article 1200 illustrated in fig. 8(e), and thus comprising a substrate layer 1210, a superconducting layer 1220, and another layer 1230. As can be seen, cooling protrusions 1240 are available on both the top side of the coil and the bottom side of the coil due to the displacement of the further layer 1230 relative to the substrate layer 1210. In the illustrated embodiment, the dashed line 1310 schematically illustrates the housing of the superconducting coil 1300. In the embodiment shown, a small gap 1250 is provided between adjacent turns of the superconducting coil 1300, thereby further increasing the heat exchange capacity or capacity of the coil. In an embodiment, the gap 1250 may be created, for example, by introducing a shim during the winding process of the coil. The spacer may for example be made of a porous material to allow close contact between the coil and the coolant applied within the housing. Alternatively, the spacer may be made of a conductive material. It may be noted, however, that the turns of the coil may also be wound tightly together, i.e. without any gaps between them. In this arrangement, the coil 1300 will still have increased cooling capacity as compared to known coils such as the coil 500 shown in fig. 5.

According to another aspect of the present invention, a superconducting coil is provided that also provides improved cooling capability. Such a superconducting coil may be described as a superconducting coil comprising a plurality of windings made of superconducting tape, whereby the superconducting coil further comprises one or more inserts arranged in spaces between adjacent windings of the plurality of windings, the one or more inserts having a width larger than the width of the superconducting tape.

For example, these inserts may be arranged between adjacent windings during the winding process of the coil. In an embodiment, the one or more inserts may be a tape that is wound together with the superconducting tape. By providing the inserts between adjacent windings with a width greater than the superconducting tape, heat transfer from the superconducting coils towards the coolant is facilitated. By providing an insert having a width greater than the width of the superconducting tape, the insert will extend beyond the side surfaces of the superconducting coils, whereby the portion extending beyond the superconducting coils may be considered to act as or act as a cooling projection or heat sink. As such, in the superconducting coils according to the present invention, heat from the superconducting coils may be transferred to the one or more inserts, for example via conduction, to one or more tips of the inserts, i.e., cooling tabs or fins, via conduction, and then into the coolant around the superconducting coils and inserts. In an embodiment, the one or more inserts as applied in the superconducting coil according to the present invention are made of a thermally conductive material (e.g. Cu, Al, Ni, etc.).

In an embodiment, the superconducting tape as applied to form the superconducting coil is a superconducting tape according to the invention.

Fig. 10 schematically illustrates a cross-sectional view of a superconducting coil 1400 according to the present invention, the coil being disposed in a housing 1425, for example, containing a coolant for maintaining the coil 1400 at a desired temperature. The superconducting coil 1400 includes 4 turns or windings 1410 of superconducting tape. Between adjacent windings 1410 of the coil 1400, inserts 1420 are provided having a width Wi that is greater than the width W of the superconducting tape used to make the coil 1400. In the embodiment shown, the insert 1420 extends beyond only one side surface 1410.2 of the coil 1410. In the embodiment shown, the side surfaces of one or more inserts are substantially flush with the other side surface of the coil, forming a substantially flat upper surface 1400.2 of the coil 1400. However, in embodiments, the insert 1420 may extend beyond both side surfaces of the superconducting tape wrapped around the coil. In the embodiment shown in the figures, the inserts do not completely fill the gaps between adjacent windings. By doing so, the heat exchange surface of the superconducting coil 1400 may be further increased. Alternatively, the one or more inserts as applied have a thickness substantially corresponding to the gap between adjacent windings, thus completely filling said gap between adjacent windings.

As mentioned, the insert applied may be a co-wound conductive strip or ribbon. Alternatively, the insert may be a discrete strip inserted between adjacent windings. In an embodiment, the one or more inserts may be arranged, for example, along substantially straight portions of the plurality of windings. Note that the one or more inserts need not be applied between each pair of adjacent windings.

In an embodiment of the invention, the one or more inserts are arranged between the windings in a meandering, i.e. meandering, manner. By doing so, the heat exchange surface between the superconducting coil and the applied coolant can be further increased. Such an embodiment is schematically illustrated in fig. 11. Fig. 11 schematically shows a cross-sectional view of a superconducting coil 1500 according to the present invention, the coil being arranged in a housing 1525, e.g. containing a coolant for maintaining the superconducting coil 1500 at a desired temperature. The superconducting coil 1500 includes 4 turns or windings 1510 of superconducting tape. Between adjacent windings 1510 of the coil 1500, inserts 1520 are provided. In the embodiment shown, the insert 1520 has a U-shaped cross-section. This U-shaped cross-section is obtained by folding a substantially flat insert around the windings 1510 or a portion of the windings 1510. As can be seen, the insert applied has a width Wi that is greater than the width W of the windings 1510 of the coil 1500. Due to the U-shape of the insert, channels 1530 may be created between the insert 1510 and the side surfaces of the windings 1510 of the coil 1500, which channels may advantageously be used by the coolant provided in the housing 1525.

Fig. 12 shows another example of a superconducting coil 1600 according to the present invention, the coil being arranged in a housing 1625 containing, for example, a coolant for maintaining the superconducting coil 1600 at a desired temperature. In the embodiment shown, the inserts 1620, 1622 are applied in a meandering manner between the windings 1610 of the coil 1600. In the embodiment shown, the inserts 1620, 1622 are applied in a meandering manner between the 4 windings 1610 of the coil 1600. For example, the insert may be disposed along a substantially straight portion of the coil winding. This arrangement may be achieved by suitably folding the strip-shaped elements 1620, 1622 during the winding process of said coil 1600.

In an embodiment, the superconducting tape as applied in the superconducting coil according to the present invention comprises a matrix of stabilizing material and superconducting material. Such superconducting tapes may be referred to as multifilamentary superconducting tapes. Such tapes are also known as 1G (first generation) superconducting wires and tapes.

Fig. 13 to 16 schematically show plan views of superconducting coils according to the present invention.

Fig. 13 schematically illustrates a racetrack coil 1700 made of a superconducting article according to the present invention. According to the present invention, the superconducting article includes a layer 1710 including one or more cooling protrusions. In the embodiment shown, the layer 1710 extends beyond the superconductive layer 1720 of the superconductive article, substantially along the entire length of the coil 1700.

Fig. 14 schematically illustrates a racetrack coil 1800 made of a superconducting tape 1810, further comprising one or more inserts 1820 disposed in spaces between adjacent ones of the plurality of windings of the superconducting tape 1810, the one or more inserts 1820 having a width greater than the width of the superconducting tape 1810. In the embodiment shown, the insert 1820 is disposed along a substantially straight portion of the coil 1800. Note that the inserts need not have an increased width along their entire length; there may be portions where the cooling lugs are removed or the insert is interrupted. In the latter case, a plurality of spaced apart inserts may be applied, for example, along a straight portion of the coil 1800.

Fig. 15 schematically illustrates a circular or toroidal coil 1900 made of a superconducting article according to the present invention. According to the invention, the superconducting article includes a layer 1910 comprising one or more cooling protrusions. In the embodiment shown, the layer 1910 extends beyond the superconducting layer 1920 of the superconducting article, substantially along the entire length of the coil 1900.

Fig. 16 schematically illustrates a circular or toroidal coil 2000 made of superconducting tape 2010, further including an insert 2020 disposed in a space between adjacent windings of the plurality of windings, the insert having a width greater than a width of the superconducting tape 2010.

Fig. 17 to 22 schematically show possible mounting arrangements of superconducting coils according to the invention. The mounting arrangement is suitable for a toroidal coil 2100, similar to coil 2000 shown in fig. 16. As will be appreciated, similar mounting arrangements may be applied to other embodiments of coils according to the invention.

Fig. 17 schematically shows a plan view of a coil 2100 according to the invention, said coil 2100 being mounted to a core 2200.

Fig. 18 schematically shows a plan view of a coil 2100 according to the present invention, the coil 2100 being mounted to a core 2210, the core 2210 extending to a base 2300. In the embodiment shown, there is a gap between the insert 2120 of the coil and the base 2300, thus allowing coolant to reach all side surfaces of the coil 2100.

Fig. 19 schematically shows a plan view of a coil 2100 according to the invention, the coil 2100 being mounted to a core 2210, the core 2210 extending to a base 2300, whereby an insert 2120 of the coil is arranged to contact the base 2300. In such an embodiment, the insert 2120 may be welded to the base 2300, for example. Cooling may be achieved via conduction cooling towards the base and/or via cooling channels formed between the insert 2120, the base 2300 and the superconducting coils 2110.

Fig. 20 schematically shows a plan view of the coil 2100 according to the invention, the coil 2100 being held at the outer circumference by a collet 2400, the collet 2400 being extended or mounted to a base 2300. In the embodiment shown, there is a gap between the insert 2120 of the coil and the base 2300, thus allowing coolant to reach all side surfaces of the coil 2100. Alternatively, the insert 2120 may be configured to contact the base 2300 in a manner similar to that shown in fig. 19.

Fig. 21 schematically shows a plan view of the coil 2100 according to the invention, the coil 2100 being held at the outer circumference by a collet 2400, the collet 2400 being extended or mounted to a base 2300. The mounting arrangement further comprises a cover 2500. In the embodiment shown, the cover 2500 contacts the top surface of the coil 2100, and similarly, the insert 2120 of the coil is configured to contact the base 2300. Alternatively, there may be a gap between the cover 2500 and the top surface of the coil 2100 and/or between the insert 2120 and the base 2300 of the coil.

In an embodiment, the superconducting coil according to the present invention, for example, a coil as shown in fig. 9 to 21, may be applied to a superconducting actuator or motor according to the present invention. Such a superconducting actuator or motor may be regarded as an example of an electromagnetic actuator or motor. Such electromagnetic actuators or motors typically operate due to the interaction between a coil assembly and a magnet assembly, in particular due to the interaction between current carrying coils of the coil assembly and the magnetic field generated by the magnet assembly. Superconducting coils may be employed in the coil assemblies of these actuators or motors, or in the magnet assemblies of these actuators or motors, or both.

The superconducting actuator or motor according to the invention may advantageously be applied in a lithographic apparatus according to the invention to position or displace a component or element of the lithographic apparatus. In particular, the superconducting actuator or motor may be applied to the positioning of a support (such as the substrate support WT or the mask support MT discussed above). In such embodiments, the invention may thus provide a stage apparatus comprising an object support (e.g. for supporting a mask or substrate), the stage apparatus further comprising one or more motors or actuators according to the invention.

Although specific reference may be made in this text to the use of lithographic apparatus in the manufacture of ICs, it should be understood that the lithographic apparatus described herein may have other applications. Possible other applications include the manufacture of integrated optical systems, guidance and detection patterns for magnetic domain memories, flat panel displays, Liquid Crystal Displays (LCDs), thin film magnetic heads, etc.

Although specific reference may be made in this text to embodiments of the invention in the context of lithographic apparatus, embodiments of the invention may be used in other apparatus. Embodiments of the invention may form part of a mask inspection apparatus, a metrology apparatus, or any apparatus that measures or processes an object such as a wafer (or other substrate) or a mask (or other patterning device). These devices may be generally referred to as lithographic tools. Such a lithography tool may use vacuum conditions or ambient (non-vacuum) conditions.

Although specific reference may have been made above to the use of embodiments in the context of optical lithography, it will be appreciated that the invention is not limited to optical lithography and may be used in other applications, for example imprint lithography, where the context allows.

Embodiments of the invention may be implemented in hardware, firmware, software, or any combination thereof, as the context allows. Embodiments of the invention may also be implemented as instructions stored on a machine-readable medium, which may be read and executed by one or more processors. A machine-readable medium may include any mechanism for storing or transmitting information in a form readable by a machine (e.g., a computing device). For example, a machine-readable medium may include Read Only Memory (ROM); random Access Memory (RAM); a magnetic storage medium; an optical storage medium; a flash memory device; electrical, optical, acoustical or other form of propagated signals (e.g., carrier waves, infrared signals, digital signals, etc.), and others. Additionally, firmware, software, routines, instructions may be described herein as performing certain actions. However, it should be understood that such descriptions are merely for convenience and that such actions in fact result from computing devices, processors, controllers, or other devices executing the firmware, software, routines, instructions, etc., and in so doing may cause an actuator or other device to interact with the physical world.

While specific embodiments of the invention have been described above, it will be appreciated that the invention may be practiced otherwise than as described. The above description is intended to be illustrative and not restrictive. Thus, it will be apparent to one skilled in the art that modifications may be made to the invention as described without departing from the scope of the claims set out below. Other aspects of the invention are set forth in the numbering below.

1. A multilayer superconducting article extending in a longitudinal direction, comprising:

-a substrate layer extending in said longitudinal direction;

-a superconducting layer extending in the longitudinal direction;

-a further layer extending in the longitudinal direction;

wherein the substrate layer or the further layer comprises one or more cooling protrusions extending in the longitudinal direction and in a lateral direction.

2. The multilayer superconducting article of aspect 1, wherein the one or more cooling protrusions extend beyond a side surface of the superconducting layer.

3. The multilayer superconducting article of aspect 1 or 2, wherein the substrate layer comprises the one or more cooling protrusions, the substrate layer having a width greater than a width of the other layer.

4. The multilayer superconducting article of aspect 1 or 2, wherein the other layer comprises the one or more cooling protrusions, the other layer having a width greater than a width of the substrate layer.

5. The multilayer superconducting article of aspect 1 or 2, wherein the substrate layer comprises the one or more cooling protrusions, a side surface of the substrate layer extending beyond a side surface of the other layer in the lateral direction.

6. The multilayer superconducting article of aspect 1 or 2, wherein the other layer comprises the one or more cooling protrusions, a side surface of the other layer extending beyond the side surface of the substrate layer in a lateral direction.

7. The multilayer superconducting article according to any one of the preceding aspects, wherein the further layer comprises a stabilizer layer.

8. A multilayer superconducting article according to any one of the preceding aspects, wherein the substrate layer and the further layer are substantially planar, extending in the longitudinal direction and the transverse direction.

9. A multilayer superconducting article according to any one of the preceding aspects, wherein each of the substrate layer, superconducting layer and the further layer has a pair of substantially parallel major surfaces extending in the longitudinal direction and the transverse direction.

10. The multilayer superconducting article according to any one of the preceding aspects, wherein the substrate layer, superconducting layer and the further layer are stacked in a stacking direction substantially perpendicular to the longitudinal direction and the transverse direction.

11. The multilayer superconducting article according to any one of the preceding aspects, further comprising at least one of the following layers:

-an insulating layer;

a cover layer, or

-a buffer layer.

12. The multilayer superconducting article according to any one of the preceding aspects, wherein the article is a tape.

13. A superconducting coil made from the tape of aspect 11.

14. A superconducting coil comprising a plurality of windings made of superconducting tape, the superconducting coil further comprising one or more inserts disposed in spaces between adjacent windings of the plurality of windings, the one or more inserts having a width greater than a width of the superconducting tape.

15. The superconducting coil of aspect 14 wherein the superconducting tape comprises a first or second generation superconducting material.

16. The superconducting coil of aspect 14 or 15 wherein the superconducting tape is the tape of aspect 11.

17. The superconducting coil of any one of aspects 14 to 16, wherein a side surface of the one or more inserts is substantially flush with a side surface of the tape.

18. The superconducting coil of any one of aspects 14 to 17, wherein the one or more inserts are made of a thermally conductive material.

19. The superconducting coil of any one of aspects 14-18, wherein the one or more inserts have a thickness that substantially corresponds to a gap between the adjacent windings.

20. The superconducting coil of any one of aspects 14-19 wherein the one or more inserts are arranged along substantially straight portions of the plurality of windings.

21. The superconducting coil according to any one of aspects 14 to 20, wherein the one or more inserts are arranged in a meandering manner between the windings.

22. An actuator comprising a superconducting coil according to any one of aspects 13 to 21.

23. The actuator of aspect 22, wherein the actuator comprises a coil assembly and a magnet assembly configured to cooperate to generate a force or torque, the superconducting coil configured as a component of the coil assembly or the magnet assembly.

24. A motor comprising a superconducting coil according to any one of aspects 13 to 21.

25. The motor of aspect 24, wherein the motor comprises a coil assembly and a magnet assembly configured to work in cooperation to generate a force or torque, the superconducting coil being configured as a component of the coil assembly or the magnet assembly.

26. The motor of aspect 25, wherein the motor is configured as a one-dimensional linear motor or a two-dimensional planar motor.

27. A stage apparatus comprising an actuator according to aspect 22 or 23 or a motor according to any one of aspects 24 to 26.

28. The stage apparatus of aspect 27 wherein the stage apparatus comprises an object support for supporting an object, the actuator or motor being configured to displace or position the object support.

29. A lithographic apparatus comprising a stage apparatus according to aspect 27 or 28.

30. The lithographic apparatus of aspect 29, wherein the stage apparatus is configured to support a mask or substrate.

Claims (30)

1. A multilayer superconducting article extending in a longitudinal direction, comprising:

-a substrate layer extending in said longitudinal direction;

-a superconducting layer extending in the longitudinal direction;

-a further layer extending in the longitudinal direction;

wherein the substrate layer or the further layer comprises one or more cooling protrusions extending in the longitudinal direction and in a lateral direction.

2. The multilayer superconducting article of claim 1, wherein the one or more cooling protrusions extend beyond a side surface of the superconducting layer.

3. The multilayer superconducting article of claim 1 or 2, wherein the substrate layer comprises the one or more cooling protrusions, the substrate layer having a width greater than a width of the other layer.

4. The multilayer superconducting article of claim 1 or 2, wherein the other layer comprises the one or more cooling protrusions, the other layer having a width greater than a width of the substrate layer.

5. The multilayer superconducting article of claim 1 or 2, wherein the substrate layer comprises the one or more cooling protrusions, a side surface of the substrate layer extending beyond a side surface of the other layer in the lateral direction.

6. The multilayer superconducting article of claim 1 or 2, wherein the other layer comprises the one or more cooling protrusions, a side surface of the other layer extending beyond a side surface of the substrate layer in a lateral direction.

7. A multilayer superconducting article according to any one of the preceding claims, wherein the further layer comprises a stabilizer layer.

8. A multilayer superconducting article according to any one of the preceding claims, wherein the substrate layer and the further layer are substantially planar, extending in the longitudinal direction and the transverse direction.

9. A multilayer superconducting article according to any one of the preceding claims, wherein each of the substrate layer, superconducting layer and the further layer has a pair of substantially parallel major surfaces extending in the longitudinal direction and the transverse direction.

10. A multilayer superconducting article according to any one of the preceding claims, wherein the substrate layer, superconducting layer and the further layer are stacked in a stacking direction substantially perpendicular to the longitudinal direction and the transverse direction.

11. A multilayer superconducting article according to any one of the preceding claims, further comprising at least one of the following layers:

-an insulating layer;

a cover layer, or

-a buffer layer.

12. A multilayer superconducting article according to any one of the preceding claims, wherein the article is a tape.

13. A superconducting coil made from the tape of claim 11.

14. A superconducting coil comprising a plurality of windings made of superconducting tape, the superconducting coil further comprising one or more inserts disposed in spaces between adjacent windings of the plurality of windings, the one or more inserts having a width greater than a width of the superconducting tape.

15. The superconducting coil of claim 14 wherein the superconducting tape comprises a first-generation or a second-generation superconducting material.

16. The superconducting coil according to claim 14 or 15, wherein the superconducting tape is a tape according to claim 11.

17. The superconducting coil of any one of claims 14 to 16 wherein side surfaces of the one or more inserts are substantially flush with side surfaces of the tape.

18. The superconducting coil of any one of claims 14 to 17 wherein the one or more inserts are made of a thermally conductive material.

19. The superconducting coil of any one of claims 14 to 18 wherein the one or more inserts have a thickness that substantially corresponds to a gap between the adjacent windings.

20. The superconducting coil of any one of claims 14 to 19 wherein the one or more inserts are arranged along substantially straight portions of the plurality of windings.

21. The superconducting coil of any one of claims 14 to 20 wherein one or more inserts are arranged in a meandering manner between the windings.

22. An actuator comprising a superconducting coil according to any one of claims 13 to 21.

23. The actuator of claim 22, wherein the actuator comprises a coil assembly and a magnet assembly configured to cooperate to generate a force or torque, the superconducting coil being configured as a component of the coil assembly or the magnet assembly.

24. A motor comprising a superconducting coil according to any one of claims 13 to 21.

25. The motor of claim 24, wherein the motor comprises a coil assembly and a magnet assembly configured to work in concert to generate a force or torque, the superconducting coils configured as components of the coil assembly or the magnet assembly.

26. The motor of claim 25, wherein the motor is configured as a one-dimensional linear motor or a two-dimensional planar motor.

27. A platform apparatus comprising an actuator according to claim 22 or 23 or a motor according to any one of claims 24 to 26.

28. The stage apparatus according to claim 27 wherein the stage apparatus comprises an object support for supporting an object, the actuator or motor being configured to displace or position the object support.

29. A lithographic apparatus comprising a stage apparatus according to claim 27 or 28.

30. The lithographic apparatus of claim 29, wherein the stage apparatus is configured to support a mask or a substrate.

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