CN114019437A - Direct-current voltage calibration adapter plate of integrated circuit test system and calibration method - Google Patents
Direct-current voltage calibration adapter plate of integrated circuit test system and calibration method Download PDFInfo
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- 238000012360 testing method Methods 0.000 title claims abstract description 175
- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000005259 measurement Methods 0.000 claims abstract description 36
- 238000004088 simulation Methods 0.000 claims description 21
- 238000005070 sampling Methods 0.000 claims description 4
- 210000001503 joint Anatomy 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 7
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- 238000004364 calculation method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
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Abstract
The invention discloses a direct-current voltage calibration adapter plate and a calibration method of an integrated circuit test system, which are based on the test flow of a test system to chip direct-current voltage parameters, the direct-current voltage calibration adapter plate is designed, an external instrument is connected in parallel in a test loop through the direct-current voltage calibration adapter plate, so that a test signal of the direct-current voltage parameters of the test system is led out, the external instrument performs online measurement, a measured parameter standard value obtained by the external instrument is compared with a measured indication value of the test system, and further the error of the test system is obtained, the calibration of a normal test flow completely based on the direct-current voltage parameters of the test system is realized, and the technical indexes of the test system under the actual working condition can be truly reflected; the test signal is led out to an external instrument for measurement, so that complete magnitude tracing is realized; in addition, during calibration, the test system only needs to use common mass production chips, and the test system end does not need to develop programs and manufacture calibration interface boards, so that the coverage rate of field calibration is improved.
Description
Technical Field
The invention relates to the technical field of integrated circuit test system measurement, in particular to a direct-current voltage calibration adapter plate and a calibration method of an integrated circuit test system.
Background
At present, the method for calibrating the direct current voltage parameter of the integrated circuit test system (test system for short) mainly comprises the following steps: (1) calibration board or external instrument based methods; (2) a standard swatch based method. Based on the method of calibrating the board or externally connecting the instrument, the test system is different from the actual setting and working condition, and cannot completely reflect the technical index of the direct current voltage parameter of the test system under the actual working condition. The method based on the standard sample wafer can only be used for magnitude comparison due to instability of the standard sample wafer, and the comparison only solves the problem of checking the mutual coordination consistency between test systems and does not really solve the problem of tracing the direct-current voltage parameters.
In addition, the types of integrated circuit test systems are numerous, the current calibration method needs to develop a special program at a test system end aiming at different types of test systems, and needs to design and manufacture a special calibration interface board, the calibration program and the special interface board for developing the test system need to consume a large amount of manpower and material resources, the utilization rate of the test system at a user site is high, the development time is difficult to guarantee, and therefore the calibration coverage rate of the test system is limited.
Disclosure of Invention
The invention provides a direct-current voltage calibration adapter plate of an integrated circuit test system, which overcomes the technical defects.
In order to achieve the technical purpose, the invention provides a direct-current voltage calibration adapter plate of an integrated circuit test system, which comprises an adapter plate body, wherein pin connection points, test simulation pins and online calibration terminals are arranged on the adapter plate body, the pin connection points are arranged in one-to-one correspondence with pins of a test chip, the test simulation pins are in one-to-one butt joint with test interfaces of the integrated circuit test system, and the online calibration terminals are connected with an external instrument; the integrated circuit test system and the test chip form a test loop through the connection between the pin connection point and the test simulation pin; the external instrument is arranged in the test loop in parallel through connection between the online calibration terminal and the pin connection point or the test simulation pin.
The invention also provides a direct current voltage parameter calibration method of the integrated circuit test system, which comprises the following steps:
the test chip is installed in a test interface of a test system through a direct-current voltage calibration adapter plate, and a test signal is led out from a calibration terminal of the direct-current voltage calibration adapter plate to an external instrument;
based on the testing process of the testing system for the direct current voltage parameters of the chip, the testing system loads a chip testing program, and dynamically acquires and counts testing signals in real time by adopting an external instrument in the process of testing the chip;
extracting measurement parameters of a measurement stable period from the statistical measurement data, and analyzing the measurement parameters to obtain a measurement parameter standard value;
and comparing the standard value of the measurement parameter with the measurement indication value of the test system to obtain the error of the test system.
Compared with the prior art, the method is characterized in that a direct-current voltage calibration adapter plate is designed based on the test flow of the test system to the direct-current voltage parameters of the chip, an external instrument is connected in parallel in a test loop through the direct-current voltage calibration adapter plate, so that test signals of the direct-current voltage parameters of the test system are led out, online measurement is carried out by the external instrument, the standard values of the measured parameters obtained by the external instrument are compared with the measured indication values of the test system, and further the error of the test system is obtained, so that the calibration is realized based on the normal test flow of the direct-current voltage parameters of the test system completely, and the technical indexes of the test system under the actual working condition can be truly reflected; the test signal is led out to an external instrument for measurement, so that complete magnitude tracing is realized; in addition, during calibration, the test system only needs to use common mass production chips, and the test system end does not need to develop programs and manufacture calibration interface boards, so that the coverage rate of field calibration is improved.
Drawings
FIG. 1 is a block diagram of a DC voltage parameter calibration method for an integrated circuit test system according to an embodiment of the present invention;
FIG. 2 is a block diagram of a DC calibration adapter board of an IC testing system according to an embodiment of the present invention;
fig. 3 is a schematic diagram of parallel paths among a pin connection point, a test analog pin, and an online calibration terminal according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Based on the above, an embodiment of the present invention provides a method for calibrating a dc voltage parameter of an integrated circuit test system, as shown in fig. 1, which includes the following steps:
s1, installing the test chip 20 in the test interface of the test system through the dc voltage calibration adapter board 10, and leading out the test signal from the online calibration terminal 13 of the dc voltage calibration adapter board 10 to the external instrument 40.
The direct-current voltage calibration adapter plate 10 includes an adapter plate body, as shown in fig. 2, the adapter plate body is provided with pin connection points 11, test simulation pins 12 and online calibration terminals 13, the pin connection points 11 are arranged in one-to-one correspondence with pins of the test chip 20, the test simulation pins 12 are in one-to-one butt joint with test interfaces of the integrated circuit test system 30, and the online calibration terminals 13 are connected with an external instrument 40; the integrated circuit test system 30 and the test chip 20 form a test loop through the connection between the pin connection point 11 and the test simulation pin 12; the external meter 40 is arranged in parallel in the test loop by the connection between the in-line calibration terminal 13 and the pin connection point 11 or the test analog pin 12.
When the external instrument 40 is connected with the pin connection point 11 through the on-line calibration terminal 13 in parallel in the test loop, the positive pin of the on-line calibration terminal 13 is electrically connected with the positive pin of the parameter to be measured in the pin connection point 11 through the connection medium, and the negative pin of the on-line calibration terminal 13 is electrically connected with the negative pin of the pin connection point 11 through the connection medium.
When the external instrument 40 is connected with the test simulation pin 12 through the on-line calibration terminal 13 in parallel, the positive pin of the on-line calibration terminal 13 is electrically connected with the positive pin of the parameter to be tested in the test simulation pin 12 through the connection medium, and the negative pin of the on-line calibration terminal 13 is electrically connected with the negative pin of the test simulation pin 12 through the connection medium.
Specifically, a chip clamp 101 which is used for packaging and is consistent with a test chip 20 is arranged on the front surface of the adapter plate body, and pin connection points 11 which are arranged in one-to-one correspondence with pins of the test chip 20 are arranged in the chip clamp 101; the back of switching plate body is equipped with test simulation pin 12, test simulation pin 12 with the pin tie point 11 of chip anchor clamps 101 passes through the inside connecting medium one-to-one electric connection of switching plate body, online calibration terminal 13 is close to switching plate body one side setting.
The parallel path among the pin connection point 11, the test simulation pin 12 and the online calibration terminal 13 is shown in fig. 3, the negative pin of the pin connection point 11 is connected with the negative pin of the test simulation pin 12, and the positive pin of the test simulation pin 12 is connected with the positive pin of the pin connection point 11 in a one-to-one correspondence manner, so that a test loop is formed; the positive pin of the on-line calibration terminal 13 is connected with the positive pin of the parameter to be measured in the pin connection point 11, and the negative pin of the on-line calibration terminal 13 is connected with the negative pin of the pin connection point 11, so that the external instrument is arranged in the test loop in parallel. Specifically, in the embodiment of the present invention, the negative pin of the online calibration terminal 13 is connected to the negative pin of the pin connection point 11, and the positive electrode of the online calibration terminal 13 is connected to the V of the pin connection point 11 through the connection cableOHAnd pins corresponding to the parameters are connected.
Therefore, first, a test program corresponding to the test chip 20 is loaded on the digital integrated circuit test system 30, and the test board of the test chip 20 is loaded on the test head of the test system; then the direct voltage calibration adapter plate 10 is placed in a fixture of the test plate, then the test chip 20 is placed in a chip fixture 101 of the direct voltage calibration adapter plate 10, and finally the external instrument 40 is connected to the on-line calibration terminal 13 of the direct voltage calibration adapter plate 10 through a connecting cable, so that a test calibration loop of the direct voltage parameters of the integrated circuit test system is completed.
And S2, loading a chip test program by the test system based on the test flow of the test system to the chip direct-current voltage parameters, and dynamically acquiring and counting test signals in real time by adopting the external instrument 40 in the process of chip test.
Firstly, the external instrument 40 is controlled to enter a direct current voltage real-time dynamic acquisition state, acquired data are recorded, then the integrated circuit testing system 30 is controlled to test the testing chip 20, and the acquired data of the external instrument 40 is calibration original data in the chip testing process. The sampling rate of the external instrument 40 is set to ensure that the external instrument 40 acquires at least one sampling point within the signal duration; for example, if VOHThe duration of the signal is 1ms, the sampling rate of the external meter 40 should be > 1 kS/s.
In this embodiment, the external instrument 40 is a digital multimeter 3458A manufactured by Agilent corporation for measuring VOHThe test device is used as a voltmeter during parameter setting, the measurement function of 3458A is set as DCV (direct current voltage), two direct current voltage measurement interfaces of 3458A are fixedly connected with the online calibration terminal 13 of the direct current voltage calibration adapter plate 10 through a connecting cable, the external instrument 40 can be connected in parallel in the test loop of the integrated circuit test system 30 and the test chip 20 in this way, and the external instrument can directly measure the test chip VOHV of parameter corresponding pinOHA signal.
And S3, extracting the measurement parameters of the measurement stable time period from the statistical measurement data, and analyzing the measurement parameters to obtain the standard values of the measurement parameters.
Since the electrical components in the entire test loop do not reach the optimum stable state when the measurement is started and is about to be finished, the obtained measurement data is also unstable, and according to the experience of a person skilled in the art, the measurement data of the test loop in the stable period can be selected first, and then the measurement parameters in the stable period are subjected to mean value calculation to obtain the standard values of the measurement parameters.
And S4, comparing the standard value of the measurement parameter with the measurement indicating value of the test system, and further obtaining the error of the test system.
The invention relates to a direct-current voltage calibration adapter plate and a calibration method of an integrated circuit test system, which are based on the test flow of a test system to chip direct-current voltage parameters, a direct-current voltage calibration adapter plate 10 is designed, an external instrument 40 is connected in parallel in a test loop through the direct-current voltage calibration adapter plate 10, so that a test signal of the direct-current voltage parameters of the test system is led out, the external instrument 40 performs online measurement, and the measurement data obtained by the external instrument 40 is compared with the test data of the test system, so that the test system is calibrated, the normal test flow completely based on the direct-current voltage parameters of the test system is calibrated, and the technical indexes of the test system under the actual working condition can be truly reflected; and the test signal is led out to the external instrument 40 for measurement, so that complete magnitude tracing is realized; in addition, during calibration, the test system only needs to use common mass production chips, and the test system end does not need to develop programs and manufacture calibration interface boards, so that the coverage rate of field calibration is improved.
It can be clearly understood by those skilled in the art that, for convenience and brevity of description, the specific working processes of the system, the apparatus and the module described above may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (8)
1. A direct current voltage calibration adapter plate of an integrated circuit test system is characterized by comprising an adapter plate body, wherein pin connection points, test simulation pins and online calibration terminals are arranged on the adapter plate body, the pin connection points are arranged in a one-to-one correspondence with pins of a test chip, the test simulation pins are in one-to-one butt joint with test interfaces of the integrated circuit test system, and the online calibration terminals are connected with an external instrument; the integrated circuit test system and the test chip form a test loop through the connection between the pin connection point and the test simulation pin; the external instrument is arranged in the test loop in parallel through connection between the online calibration terminal and the pin connection point or the test simulation pin.
2. The direct-current voltage calibration patch panel of claim 1, wherein the positive pin of the on-line calibration terminal is electrically connected to the positive pin of the parameter to be measured in the pin connection point through a connection medium, and the negative pin of the on-line calibration terminal is electrically connected to the negative pin of the pin connection point through a connection medium.
3. The direct-current voltage calibration patch panel of claim 1, wherein the positive pin of the on-line calibration terminal is electrically connected to the positive pin of the test simulation pin for testing the parameters to be tested via a connection medium, and the negative pin of the on-line calibration terminal is electrically connected to the negative pin of the test simulation pin via a connection medium.
4. The direct-current voltage calibration adapter plate of the integrated circuit test system as claimed in claim 1, wherein a chip clamp for packaging the same chip as the test chip is disposed on the adapter plate body, and pin connection points corresponding to the pins of the test chip are disposed inside the chip clamp.
5. The direct-current voltage calibration adapter plate of claim 4, wherein the chip clamp is disposed on the front surface of the adapter plate body, the test analog pins are disposed on the back surface of the adapter plate body, the pin connection points of the test analog pins and the chip clamp are electrically connected in a one-to-one correspondence manner through a connection medium inside the adapter plate body, and the on-line calibration terminals are disposed near one side of the adapter plate body.
6. An integrated circuit test system dc voltage parameter calibration method using the integrated circuit test system dc voltage calibration patch panel of any one of claims 1 to 5, comprising the steps of:
the test chip is installed in a test interface of a test system through a direct-current voltage calibration adapter plate, and a test signal is led out from a calibration terminal of the direct-current voltage calibration adapter plate to an external instrument;
based on the testing process of the testing system for the direct current voltage parameters of the chip, the testing system loads a chip testing program, and dynamically acquires and counts testing signals in real time by adopting an external instrument in the process of testing the chip;
extracting measurement parameters of a measurement stable period from the statistical measurement data, and analyzing the measurement parameters to obtain a measurement parameter standard value;
and comparing the standard value of the measurement parameter with the measurement indication value of the test system to obtain the error of the test system.
7. The method as claimed in claim 6, wherein the analyzing the measured parameter to obtain a standard value of the measured parameter comprises: and calculating the average value of the measured parameters to obtain the standard value of the measured parameters.
8. The method as claimed in claim 6, wherein the external meter collects at least one sampling point during the duration of the signal to be tested.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111085518.6A CN114019437A (en) | 2021-09-16 | 2021-09-16 | Direct-current voltage calibration adapter plate of integrated circuit test system and calibration method |
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| CN202111085518.6A CN114019437A (en) | 2021-09-16 | 2021-09-16 | Direct-current voltage calibration adapter plate of integrated circuit test system and calibration method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116068478A (en) * | 2023-03-07 | 2023-05-05 | 紫光同芯微电子有限公司 | Chip downloading calibration system and using method |
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| CN102323561A (en) * | 2011-08-03 | 2012-01-18 | 刘冲 | Pulse high-current amplitude calibrating device for semiconductor device test system |
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| CN109375127A (en) * | 2018-09-30 | 2019-02-22 | 中国船舶重工集团公司第七0九研究所 | Integrated circuit test system self-checking device and method based on analog-digital converter |
| CN208607348U (en) * | 2018-08-10 | 2019-03-15 | 北京悦芯科技有限公司 | Calibrate ancillary equipment and calibration system |
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2021
- 2021-09-16 CN CN202111085518.6A patent/CN114019437A/en active Pending
Patent Citations (5)
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| CN102323561A (en) * | 2011-08-03 | 2012-01-18 | 刘冲 | Pulse high-current amplitude calibrating device for semiconductor device test system |
| CN103513206A (en) * | 2012-06-29 | 2014-01-15 | 中国船舶重工集团公司第七0九研究所 | Calibration device and method for microampere direct current in integrated circuit testing system |
| CN107783069A (en) * | 2017-08-28 | 2018-03-09 | 中国船舶重工集团公司第七0九研究所 | The on-line calibration system and method for DC measurement in integrated circuit test system |
| CN208607348U (en) * | 2018-08-10 | 2019-03-15 | 北京悦芯科技有限公司 | Calibrate ancillary equipment and calibration system |
| CN109375127A (en) * | 2018-09-30 | 2019-02-22 | 中国船舶重工集团公司第七0九研究所 | Integrated circuit test system self-checking device and method based on analog-digital converter |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116068478A (en) * | 2023-03-07 | 2023-05-05 | 紫光同芯微电子有限公司 | Chip downloading calibration system and using method |
| CN116068478B (en) * | 2023-03-07 | 2023-08-15 | 紫光同芯微电子有限公司 | Chip downloading calibration system and using method |
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