CN113978132B - Acousto-electrophoresis composite flow focusing micro-nano jet printing method and device - Google Patents
Acousto-electrophoresis composite flow focusing micro-nano jet printing method and device Download PDFInfo
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- CN113978132B CN113978132B CN202111094855.1A CN202111094855A CN113978132B CN 113978132 B CN113978132 B CN 113978132B CN 202111094855 A CN202111094855 A CN 202111094855A CN 113978132 B CN113978132 B CN 113978132B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
- B41J3/4073—Printing on three-dimensional objects not being in sheet or web form, e.g. spherical or cubic objects
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
The invention discloses an acoustophoresis composite flow focusing micro-nano jet printing device, which comprises an inner nozzle communicated with a jet printing fluid supply device, and a flow focusing assembly and an acoustophoresis focusing assembly which are distributed outside the inner nozzle; the invention realizes the preparation of controllable micro-or even nano-scale droplets, gets rid of the dependence of the existing electronic jet printing technology on the electrical, chemical and magnetic properties of the material, provides possibility for 'lossless' jet printing of high-viscosity printing ink, further realizes high-precision and high-resolution printing of the high-viscosity jet printing material, and meets the large-area and high-precision cross-scale manufacturing requirements of printing electronic devices.
Description
Technical Field
The invention relates to the technical field of high-precision electronic jet printing, in particular to a acoustophoresis composite flow focusing micro-nano jet printing method and device.
Background
The spray printing high-precision micro-pattern or microstructure can be widely applied to the production field of electronic products, such as the production and manufacturing of electronic devices such as flexible displays, organic light emitting display devices, electronic paper, printed circuit boards, flexible sensors and the like. The electronic jet printing is a new electronic technology for manufacturing organic/inorganic material electronic devices on flexible/ductile plastic or thin metal substrates, has the advantages of flexibility, batch production, low energy consumption, less waste and the like, and has wide application prospects in the fields of information, energy, medical treatment, national defense and the like.
In recent years, the emergence of new two-dimensional nanomaterials with high carrier mobility has brought a hope for the innovation of printed functional materials. The material provides more channels for the movement of ions, greatly improves the speed of the movement of the ions, and is widely applied to the manufacture of various electronic devices. However, the existing preparation method based on the novel two-dimensional nano-material electronic device still continues to use the traditional semiconductor processing technology, and has the problems of complex process, large material waste and the like, so that the electronic jet printing technology can be considered to be adopted to process the material. Compared with the traditional device production process, the electronic jet printing technology can directly deposit the organic functional material on the substrate to form a pattern and reach the resolution of micron or even nanometer, so the electronic jet printing technology is likely to become one of the mainstream manufacturing processes of the material devices in the future.
However, the conventional inkjet printing process is only suitable for micron-scale printing of low-viscosity materials, and the realization of nano-scale precision electrofluid inkjet printing is limited by the working condition of high electric field, and the ejected material is required to have a specific electromagnetic characteristic, so that the conventional electronic inkjet printing technology needs to be further improved in order to adapt to more material applications and reduce the complexity of the manufacturing process.
In recent years, acoustic wave-based acoustophoresis jetting technology is proposed in the industry, the technology is directly applied to droplet jetting by acoustic radiation force, and the method is not dependent on the electrical, chemical and magnetic properties of materials, and is particularly suitable for some jet printing liquids with higher viscosity. When the technology is applied to materials without electromagnetic characteristics, the corresponding materials can be made into printable ink, and the jet printing and accurate deposition forming of high-viscosity organic solution can be realized, so that the large-area and high-precision cross-scale manufacturing requirements of printed electronic devices are met. However, the inability to control the droplet size to the nanometer level makes the technique very challenging on the way to improve resolution, and the difficulty in shrinking the droplet size makes the technique unable to achieve precise control of fine patterns.
Disclosure of Invention
The invention aims to provide a method and a device for acoustophoresis composite flow focusing micro-nano jet printing, which are independent of the electrical, chemical and magnetic characteristics of materials and can be applied to nano-scale precision fluid jet printing.
In order to solve the technical problems, the technical solution of the invention is as follows:
a acoustophoresis composite flow focusing micro-nano jet printing device is characterized in that: the device comprises an inner nozzle communicated with a device for supplying jet printing fluid, and a flow focusing assembly and an acoustophoresis focusing assembly which are distributed outside the inner nozzle; the inner nozzle is provided with a liquid outlet, and a substrate for carrying jet printing liquid drops is arranged below the liquid outlet; the flow focusing assembly comprises an air cavity and a focusing cavity surrounding the liquid outlet, and the air cavity is connected with an external driving fluid supply device and the focusing cavity; the acoustophoresis focusing assembly comprises a sound wave generator and a resonant cavity which are communicated with each other, and the resonant cavity is arranged at the downstream of the liquid outlet.
Preferably, a jet printing liquid drop sorting assembly is further arranged at the downstream of the resonant cavity, and the jet printing liquid drop sorting assembly comprises an outer nozzle and a bulk acoustic wave generator, wherein the outer nozzle and the inner nozzle are coaxially distributed, and the bulk acoustic wave generator is used for sorting liquid drops.
Preferably, the middle section of the outer wall of the inner nozzle pipe horizontally protrudes outwards and is expanded and then is bent downwards to form an air cavity cover body; a focusing piece is arranged below the inner nozzle, and the air cavity cover body is connected to the focusing piece in a covering mode and forms the air cavity with the focusing piece.
Preferably, a five-axis motion platform is arranged below the liquid outlet, and the substrate for carrying the jet printing liquid drops is loaded on the five-axis motion platform.
Preferably, the resonant cavity is a flat layered gap structure, and the height of the layered gap of the resonant cavity is smaller than the wavelength of the ultrasonic wave generated by the sound generator.
Preferably, the focusing device comprises a shell and a focusing piece arranged in the shell, wherein the shell is formed by oppositely covering an upper cover and a lower cover, an opening is formed in the center of the top of the upper cover, and a sound wave generator is arranged on the upper cover; the outer diameter of the focusing piece is slightly smaller than the inner diameter of the lower cover, the focusing piece and the lower cover are coaxially stacked, so that an annular gap with the width equivalent to the height of the resonant cavity is reserved between the outer edge of the focusing piece and the inner wall of the lower cover, and sound waves generated by the sound wave generator enter the shell through the opening and enter the resonant cavity through the annular gap.
A acoustophoresis composite flow focusing micro-nano jet printing method is characterized by comprising the following steps:
firstly, a spray printing fluid supply device supplies spray printing fluid to a micro-nano spray printing device through an inner nozzle;
step two, high-speed flowing driving fluid is introduced around the liquid outlet of the inner nozzle, so that the flowing focusing of the jet printing fluid is realized;
thirdly, arranging an acoustophoresis focusing assembly at the downstream of the liquid outlet of the inner nozzle, wherein the acoustophoresis focusing assembly acts on the jet printing fluid to realize acoustophoresis focusing of the jet printing fluid and obtain controllable micron-level or even nano-level jet printing liquid drops;
screening the generated jet printing liquid drops to obtain micro-nano jet printing liquid drops, and ejecting the micro-nano jet printing liquid drops from a micro-nano jet printing device;
and fifthly, the five-axis motion platform drives the substrate to move so as to realize that the micro-nano jet printing liquid drops are received at different spatial positions above the substrate, and further, the deposition, solidification and film forming of the micro-nano jet printing liquid drops are realized.
Preferably, the driving fluid in the second step is nitrogen gas passing at a high speed.
Preferably, the acoustophoresis focusing assembly comprises an acoustic wave generator and a resonant cavity, the acoustic wave generator comprises a radio frequency signal source, a power amplifier and a piezoelectric layer structure connected with an upper electrode and a lower electrode, the radio frequency signal source generates a control signal, the control signal is amplified by the power amplifier and then transmitted to the upper electrode and the lower electrode, and the piezoelectric layer structure is driven to vibrate and generate acoustic waves based on the piezoelectric effect.
Preferably, the bulk acoustic wave generator is controllable to give more kinetic energy to the droplets with larger sizes, so that the droplets enter the recovery pipe and are recovered, and the droplets meeting the requirements are smoothly sprayed on the lower substrate from the liquid outlet pipe.
After the scheme is adopted, the invention combines the flow focusing technology and the acoustophoresis focusing technology, and utilizes the external high-speed driving fluid to controllably crush the jet printing fluid based on the sound wave after the jet printing fluid is subjected to flow focusing, so that the method can overcome the defect that the existing push type process can only jet the low-viscosity fluid, and can avoid the dependence of pull type jet on the electrical, chemical and magnetic properties of the material, and meanwhile, the viscous shearing force in jet flow can not damage the inherent properties of the jet printing material, thereby providing possibility for the lossless jet of high-viscosity printing ink. The invention can make various materials into printable ink, further improve the application mode of the materials, realize high-precision and high-resolution printing of high-viscosity jet printing materials, and meet the large-area and high-precision cross-scale manufacturing requirements of printed electronic devices.
Meanwhile, the invention is different from the existing flow focusing technology, micron-sized droplets can be formed by utilizing viscous shearing force in micro-jet, stable and controllable string micro-droplets can be generated by introducing the acoustophoresis technology at the same time, and the droplets are further crushed, so that the requirement of precise control on formation of fine patterns on various flexible substrates required by the jet printing technology is met. The invention is also different from the existing acoustophoresis focusing technology, the existing acoustophoresis focusing technology can not control the size of the liquid drop at the nanometer level, and the flowing focusing technology is compounded, so that the liquid drop can be further controllably crushed by the acoustophoresis focusing after the liquid drop is initially crushed, and micro-or even nano-level micro-drops are obtained based on the self-viscous shearing force action of the material, thereby realizing the application of the acoustophoresis focusing in high-precision and high-resolution electronic printing.
Drawings
FIG. 1 is a schematic diagram of a micro-nano jet printing device according to the invention;
FIG. 2 is a schematic view of the internal structure of a first view angle of a nozzle of the micro-nano jet printing device;
FIG. 3 is a schematic view of the internal structure of a second viewing angle of the nozzle of the micro-nano jet printing device according to the invention;
FIG. 4 is a schematic flow diagram of a micro-nano jet printing method of the invention.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples.
The invention discloses an acoustophoresis composite flow focusing micro-nano jet printing device, which is shown in figures 1-3 and is a preferred embodiment of the invention, and as shown in figure 1, the micro-nano jet printing device comprises an inner nozzle 1 communicated with a jet printing fluid supply device 41, and a flow focusing assembly and an acoustophoresis focusing assembly which are distributed outside the inner nozzle 1, wherein the inner nozzle 1 is provided with a liquid outlet 11, and a substrate 2 for bearing jet printing liquid drops is arranged below the liquid outlet 11; the jet printing fluid is output from the liquid outlet 11, the flow focusing assembly carries out flow focusing on the jet printing fluid, so that the jet printing fluid is polymerized to form a slender micro-jet, and the micro-jet is crushed to form micron-level droplets after being descended for a certain distance; meanwhile, in the descending process of the microjet-shaped jet printing fluid, the microjet-shaped jet printing fluid is further subjected to acoustophoresis focusing and separation by the acoustophoresis focusing assembly, so that the microjet-shaped jet printing fluid is further broken under the action of sound pressure shearing force to obtain required micrometer and even nanometer-level droplets, and the droplets fall on the substrate 2 below the liquid outlet 11 for deposition and molding. The device can obtain micron-level or even nano-level micro-droplets with controllable sizes by two-stage focusing of jet printing fluid, thereby realizing precise control jet printing of fine patterns.
Specifically, as shown in fig. 2 to 3, the nozzle of the micro-nano jet printing device includes a housing 3, and an inner nozzle 1 and a focusing assembly installed inside the housing, where the focusing assembly includes the above-mentioned flow focusing assembly and acoustophoresis focusing assembly. The substrate 2 below the showerhead is prior art and not shown in the figure. The housing 3 can be formed by oppositely covering and connecting an upper cover 31 and a lower cover 32, wherein the lower cover 32 is provided with a lower outlet 80 penetrating through the cover body at the center, and the upper cover 31 and the lower cover 32 are locked by screws 33. The inner nozzle 1 is communicated with a jet printing fluid supply device 41 through a liquid conveying pipe 12, and a fluid cavity 14 is formed inside the inner nozzle 1. In the embodiment, the device 41 for supplying printing fluid is disposed outside the spray head, so that the housing 3 is opened with an infusion hole 34, and the infusion tube 12 passes through the infusion hole 34 and is sleeved on the output nozzle of the device 41 for supplying printing fluid. The device 41 for supplying the jet printing fluid continuously feeds the jet printing fluid into the fluid chamber 14 upstream of the liquid outlet 11 of the inner nozzle 1 by means of an internal liquid feed pump, and the jet printing fluid is discharged from the liquid outlet 11 via the fluid chamber 14.
The flow focusing means that fluid flowing out of an inner nozzle forms a stable cone at a liquid outlet of the inner nozzle after being focused by a small hole under the drive of high-speed incompatible fluid, a micro-jet is formed at the top end of the cone and then is crushed at a certain distance outside the hole to generate micro-droplets, but the stable control of the size of the micro-droplets is often difficult to realize by a series of micro-droplets obtained by simply adopting the flow focusing. To achieve the flow focusing of the jet printing fluid, the flow focusing assembly comprises an air cavity 5 surrounding the body of the inner nozzle 1 and a focusing cavity 6 surrounding the liquid outlet 11. Specifically, as shown in fig. 2, the upper end of the inner nozzle 1 is sleeved with a liquid conveying pipe 12, the inner diameter of the lower end is contracted and provided with a liquid outlet 11, and the middle section of the outer wall of the inner nozzle 1 is horizontally and outwardly bulged, expanded and bent downwards to form an air cavity cover body 51; a focusing member 61 is arranged below the inner nozzle 1, and an air cavity cover body 51 is covered on the focusing member 61 and forms an air cavity 5 with the focusing member 61. In order to ensure the air cavity 5 to be airtight, a rubber sealing ring 52 is arranged at the joint of the air cavity cover body 51 and the focusing piece 61, a compression nut 53 is arranged above the air cavity cover body 51, the compression nut 53 is provided with an external thread, the focusing piece 61 is provided with a bowl-shaped structure with a liquid outlet 63 as the center, the inner wall of the upper opening of the focusing piece 61 is provided with an internal thread matched with the external thread of the compression nut 53, the compression nut 53 is locked on the opening of the focusing piece 61 and presses the air cavity cover body 51 in the focusing piece 61, and then the airtight air cavity 5 is formed between the air cavity cover body 51 and the focusing piece 61.
The air chamber 5 connects the external supply drive fluid device 42 with the resonant cavity 8. Specifically, an air inlet 54 is formed in the air cavity cover body 51, an air inlet pipe 55 is sleeved on the air inlet 54 in a threaded manner, the air inlet pipe 55 penetrates through the outer shell 3 and then is connected with the driving fluid supply device 42, the driving fluid is high-speed incompatible fluid which plays a focusing role on fluid from the inner nozzle 1 in flowing focusing, the driving fluid supply device 42 in the embodiment is a nitrogen supply mechanism, such as a nitrogen bottle, high-pressure nitrogen enters the air cavity 5 through the air inlet pipe 55, the air cavity 5 surrounds the inner nozzle 1 and enables the high-pressure nitrogen to enter the focusing cavity 6 from all directions, and the focusing effect on jet printing fluid is achieved. Specifically, the outer wall of the lower end of the inner nozzle 1 forms an inverted cone structure 56, the center of the focusing part 61 is recessed to form a circular truncated cone-shaped matching groove 62 which is matched with the outer wall of the lower end of the inner nozzle 1 and has a large upper part and a small lower part, a gap is reserved between the matching groove 62 and the inverted cone structure 56 to form a focusing cavity 6, a liquid outlet hole 63 is formed in the middle of the matching groove 62, and the aperture of the liquid outlet hole 63 is slightly smaller than the aperture of the liquid outlet 11. In the embodiment, the generation of droplets selects a multiphase flow method (liquid-gas flow focusing manner) in flow focusing, that is, a velocity gradient is generated locally in a channel by designing a fluid channel structure so that droplets are generated by utilizing the interaction of a shearing force, a viscous force and an interfacial tension between two phases. During operation, high-pressure nitrogen gas flows out from the liquid outlet 63 after being converged by the focusing cavity 6, the jet printing fluid forms a stable cone on the liquid outlet 11 due to the high-speed flowing nitrogen gas, and after a slender micro-jet is formed at the top end of the cone, the micro-jet passes through the liquid outlet 63 and is broken at a certain distance below the liquid outlet 63 to generate micro-droplets, and the micro-droplets enter the lower outlet 80 at the center of the lower cover 32.
The micro-jet obtained by pure flow focusing is broken to form micro-droplets which are often uncontrollable, so that a composite acoustophoresis focusing assembly is needed to obtain controllable micro-or even nano-scale micro-droplets. The acoustophoresis focusing assembly comprises a sound generator 7 and a resonant cavity 8 which are mutually communicated, the resonant cavity 8 is arranged at the downstream of the liquid outlet 11 and is of a flat layered gap structure, the height of the layered gap of the resonant cavity 8 is smaller than the wavelength of ultrasonic waves generated by the sound generator 7, the ultrasonic waves enter the resonant cavity 8 and then are subjected to sub-wavelength ultrasonic focusing, a formed ultrasonic field can further shear and tear micro-droplets formed by micro-jet crushing, the size of the finally obtained micro-droplets is determined by the sound pressure of the ultrasonic field, and the sound pressure of the ultrasonic waves is influenced by the working voltage of the sound generator, so that the size of the finally obtained micro-droplets can be controlled by adjusting the working voltage of the sound generator, and the size of the obtained jet printing micro-droplets can be controlled. Specifically, an opening 311 is formed in the center of the top of the upper cover 31, the upper cover 31 is provided with the sound wave generator 7, sound waves generated by the sound wave generator 7 enter the inside of the housing 3 through the opening 311 and are transmitted inside, and the sound wave generator 7 and the upper cover 31 can be fixedly connected through glue or threads. In this embodiment, the acoustic wave generator 7 is a film acoustic wave generator 7, which includes a radio frequency signal source, a power amplifier and a piezoelectric layer structure connected with an upper electrode and a lower electrode, wherein the electrodes and the piezoelectric layer structure can be prepared by an IC process: firstly, alternately depositing a plurality of layers of molybdenum (Mo) and silicon dioxide (SiO 2) by chemical vapor deposition and magnetron sputtering to form a bottom Bragg reflector; next, molybdenum and aluminum nitride (AlN) were etched to serve as top (bottom) electrodes and piezoelectric layers; then, silicon dioxide is deposited by using a chemical vapor deposition method to be used as a passivation layer; finally, the passivation layer and piezoelectric layer are etched to create the top (bottom) electrode. The radio frequency signal source is electrically connected with the upper electrode and the lower electrode through the power amplifier, and the working voltage of the film body sound generator can be adjusted by controlling the power amplifier. During operation, ultrasonic waves generated by the film body acoustic generator 7 enter the resonant cavity 8 below the focusing member 61, and through sub-wavelength ultrasonic focusing of the resonant cavity 8, an acoustophoresis action field is formed at the lower outlet 80 in the center of the lower cover 32, so as to perform acoustophoresis focusing on the jet printing fluid. Specifically, a circular focusing piece 61 is in clearance fit with a circular lower cover 32, the focusing piece 61 is arranged above the lower cover 32, a flat layered circular resonant cavity 8 with the height smaller than the wavelength of ultrasonic waves is formed between the focusing piece 61 and the lower cover 32, the outer diameter of the focusing piece 61 is slightly smaller than the inner diameter of the lower cover 32, the focusing piece 61 and the lower cover are coaxially stacked, an annular gap 82 with the width equivalent to the height of the resonant cavity 8 is reserved between the outer edge of the focusing piece 61 and the inner wall of the lower cover 32, and ultrasonic waves generated by the sound wave generator 7 uniformly enter the resonant cavity 8 from all directions through the annular gap 82. Meanwhile, the outer side wall of the focusing part 61 protrudes outwards to form three positioning columns 84, the positioning columns 84 are uniformly distributed on the outer wall of the focusing part 61, the sectional areas of the positioning columns 84 are small, the influence on ultrasonic waves passing through the annular gap 82 is ignored, the outer diameter of the outer edge of each positioning column 84 enclosing a synthetic circle is the same as the inner diameter of the inner wall of the lower cover 32, and the positioning columns 84 can ensure that the focusing part 61 and the lower cover 32 are coaxially arranged. The lower end of the positioning column 84 is provided with a supporting leg 81 for ensuring the height of the resonant cavity 8, the focusing piece 61 is directly placed in the lower cover 32 and forms a gap-shaped resonant cavity 8 with the inner surface of the lower cover 32, and the ultrasonic waves meet the annular gap 82 and the resonant cavity 8 to generate sub-wavelength ultrasonic focusing. When the acoustic radiation force is large enough, the acoustic wave will make acoustophoretic focusing on the micro-jet passing through the center of the ring resonator and break it into dispersed micro-droplets with certain controllability, and the dispersed micro-droplets flow out from the lower liquid outlet 63.
In order to ensure the high-precision jet printing quality, the droplets subjected to twice focusing crushing need to be screened and filtered before printing, and a small amount of droplets which are not sufficiently crushed need to be filtered and filtered. 8 low reaches of resonant cavity still are equipped with and spout seal liquid drop and select separately the subassembly, spout seal liquid drop and select separately the subassembly including with the outer nozzle 9 of 1 coaxial distribution of inner nozzle and the bulk acoustic wave generator 93 of selecting separately the liquid drop, it is specific, outer nozzle 9 is installed at lower cover 32 bottom surface center, adopt threaded connection between outer nozzle 9 and the lower cover 32, be equipped with in the outer nozzle 9 with the coaxial drain pipe 91 of inner nozzle 1, recovery tube 92 has radially been seted up along outer nozzle 9 in drain pipe 91 middle section, recovery tube 92 runs through outer nozzle 9 lateral wall, intercommunication drain pipe 91 and outer nozzle 9 exterior space. The bulk acoustic wave generator 93 is arranged on the side wall of the outer nozzle 9 opposite to the recovery tube 92, the bulk acoustic wave generator 93 is acted on the lithium niobate crystal by an interdigital electrode, different kinetic energy is given to liquid drops with different volumes by bulk acoustic waves, the kinetic energy given by the larger volume is larger, therefore, the liquid drops with smaller size cannot obtain enough kinetic energy, but only can move downwards from the central liquid outlet tube 91 to leave the outer nozzle 9 to be deposited and formed on the substrate material. The droplets with larger size will obtain more kinetic energy, and then can enter the recovery pipe 92 and be ejected outwards, so as to realize the recovery and reuse of the large droplets. The jet printing liquid drop sorting assembly can further obtain jet printing liquid drops with continuously adjustable sizes by controlling the bulk acoustic wave generator 93, and the jet printing liquid drops can meet the cross-size jet printing requirements of micron to nanometer according to needs.
Further, a five-axis motion platform is arranged below the liquid outlet 11, a substrate 2 for carrying jet printing liquid drops is loaded on the five-axis motion platform, the substrate 2 can freely move on multiple dimensions through the electric control five-axis motion platform, the jet printing liquid drops are deposited to different spatial positions above the substrate after passing through a sorting mechanism and a jet printing liquid drop sorting component, and are solidified and formed into a film, and then a final high-precision electronic device is formed.
According to the invention, the flow focusing module and the acoustophoresis focusing module are connected in series in two stages, and the outlet dimension of the sorting mechanism can be adjusted as required by opening/closing the flow focusing module, so that a trans-dimension micro-nano composite jet printing mode without replacing the device is realized.
As shown in fig. 4, the acoustophoresis composite flow focusing micro-nano jet printing method adopting the device comprises the following steps:
firstly, the solution flows into a flow, the jet printing fluid supply device 41 supplies jet printing fluid to the micro-nano jet printing device through the inner nozzle 1, the jet printing fluid supply device 41 continuously conveys the jet printing fluid to the inner nozzle 1 positioned in the spray head through an inner liquid supply pump through an infusion tube 12, and the jet printing fluid is discharged from a liquid outlet 11 of the inner nozzle 1.
Step two, flow focusing, wherein high-speed flowing driving fluid is introduced around the liquid outlet 11 of the inner nozzle 1, the driving fluid is high-speed passing nitrogen incompatible with the jet printing fluid in the embodiment, so that the flow focusing of the jet printing fluid is realized, specifically, a liquid outlet 63 is arranged below the liquid outlet 11 of the inner nozzle 1, the high-speed flowing nitrogen rapidly flows out of the liquid outlet 63 after passing around the liquid outlet 11, the high-speed flowing nitrogen enables the jet printing fluid to form a stable cone on the liquid outlet 11, and after a slender micro-jet is formed at the top end of the cone, the micro-jet passes through the liquid outlet 63 and is crushed at a certain distance below the liquid outlet 63 to generate micro-droplets;
thirdly, acoustophoretic focusing, namely arranging an acoustophoretic focusing assembly at the downstream of the liquid outlet 11 of the inner nozzle 1, wherein the acoustophoretic focusing assembly acts on the jet printing fluid to realize acoustophoretic focusing of the jet printing fluid and obtain controllable micron or even nano-level jet printing liquid drops; furthermore, the acoustophoresis focusing assembly comprises an acoustic wave generator 7 and a resonant cavity 8, the acoustic wave generator 7 comprises a radio frequency signal source, a power amplifier and a piezoelectric layer structure connected with an upper electrode and a lower electrode, the radio frequency signal source generates a control signal, the signal is transmitted to the upper electrode and the lower electrode after being amplified by the power amplifier, the piezoelectric layer structure is driven to vibrate and generate acoustic waves based on the piezoelectric effect, and the application of the power amplifier can realize high-precision control of the acoustic waves.
Screening and jetting, namely screening the generated jet printing liquid drops to obtain micro-nano jet printing liquid drops, and jetting the micro-nano jet printing liquid drops from a micro-nano jet printing device; specifically, an outer nozzle 9 which is coaxially distributed with the inner nozzle 1 is arranged below the liquid outlet 11, a liquid outlet pipe 91 which is coaxial with the inner nozzle 1 is arranged in the outer nozzle 9, a recovery pipe 92 is arranged at the middle section of the liquid outlet pipe 91 along the radial direction of the outer nozzle 9, and the recovery pipe 92 penetrates through the side wall of the outer nozzle 9 and is communicated with the outer space of the liquid outlet pipe 91 and the outer nozzle 9; the side wall of the outer nozzle 9 is provided with a bulk acoustic wave generator 93 opposite to the recovery tube 92, the bulk acoustic wave generator 93 can give more kinetic energy to the liquid drops with larger size in a controllable way, so that the liquid drops enter the recovery tube 92 and are recovered, and the liquid drops meeting the requirements are smoothly sprayed on the substrate 2 below from the liquid outlet tube 91.
And fifthly, the five-axis motion platform drives the substrate 2 to move so as to realize that the micro-nano jet printing liquid drops are received at different spatial positions above the substrate 2, and further realize the deposition, solidification and film forming of the micro-nano jet printing liquid drops.
The above-mentioned embodiments are only preferred embodiments of the present invention, and do not limit the technical scope of the present invention, so that the changes and modifications made by the claims and the specification of the present invention should fall within the scope of the present invention.
Claims (9)
1. A acoustophoresis composite flow focusing micro-nano jet printing device is characterized in that: the device comprises an inner nozzle communicated with a device for supplying jet printing fluid, and a flow focusing component and an acoustophoresis focusing component which are distributed outside the inner nozzle; the inner nozzle is provided with a liquid outlet, and a substrate for bearing jet printing liquid drops is arranged below the liquid outlet; the flow focusing assembly comprises an air cavity and a focusing cavity surrounding the liquid outlet, and the air cavity is connected with an external driving fluid supply device and the focusing cavity; the acoustophoresis focusing assembly comprises a sound generator and a resonant cavity which are communicated with each other, and the resonant cavity is arranged at the downstream of the liquid outlet;
the micro-nano jet printing device also comprises a shell and a focusing piece arranged in the shell, wherein the shell is formed by oppositely covering an upper cover and a lower cover, an opening is formed in the center of the top of the upper cover, and a sound wave generator is arranged on the upper cover; the outer diameter of the focusing piece is slightly smaller than the inner diameter of the lower cover, the focusing piece and the lower cover are coaxially stacked, so that an annular gap with the width equivalent to the height of the resonant cavity is reserved between the outer edge of the focusing piece and the inner wall of the lower cover, and sound waves generated by the sound wave generator enter the shell through the opening and enter the resonant cavity through the annular gap.
2. The acoustophoresis composite flow focusing micro-nano jet printing device according to claim 1, characterized in that: and a jet printing liquid drop sorting assembly is further arranged at the downstream of the resonant cavity and comprises an outer nozzle and a bulk acoustic wave generator, wherein the outer nozzle and the inner nozzle are coaxially distributed, and the bulk acoustic wave generator is used for sorting liquid drops.
3. The acoustophoresis composite flow focusing micro-nano jet printing device according to claim 1, which is characterized in that: the middle section of the outer wall of the pipe of the inner nozzle is horizontally outwards bulged and expanded and then is downwards bent to form an air cavity cover body; the focusing piece is arranged below the inner nozzle, and the air cavity cover body is connected to the focusing piece in a covering mode and forms the air cavity with the focusing piece.
4. The acoustophoresis composite flow focusing micro-nano jet printing device according to claim 1, characterized in that: and a five-axis motion platform is arranged below the liquid outlet, and the substrate for carrying the jet printing liquid drops is loaded on the five-axis motion platform.
5. The acoustophoresis composite flow focusing micro-nano jet printing device according to claim 1, which is characterized in that: the resonant cavity is of a flat layered gap structure, and the height of the layered gap of the resonant cavity is smaller than the wavelength of ultrasonic waves generated by the sound generator.
6. An acoustophoresis composite flow focusing micro-nano jet printing method adopting the micro-nano jet printing device of claim 1 is characterized by comprising the following steps:
firstly, a spray printing fluid supply device supplies spray printing fluid to a micro-nano spray printing device through an inner nozzle;
step two, high-speed flowing driving fluid is introduced around the liquid outlet of the inner nozzle, so that the flowing focusing of the jet printing fluid is realized;
thirdly, arranging an acoustophoresis focusing assembly at the downstream of the liquid outlet of the inner nozzle, wherein the acoustophoresis focusing assembly acts on the jet printing fluid to realize acoustophoresis focusing of the jet printing fluid and obtain controllable micron or nanometer-level jet printing liquid drops;
step four, screening the generated jet printing liquid drops to obtain micro-nano jet printing liquid drops, and ejecting the micro-nano jet printing liquid drops from a micro-nano jet printing device;
and step five, the five-axis motion platform drives the substrate to move so as to realize that different spatial positions above the substrate bear the micro-nano jet printing liquid drops, and further realize the deposition, solidification and film formation of the micro-nano jet printing liquid drops.
7. The acoustophoresis composite flow focusing micro-nano jet printing method according to claim 6, which is characterized in that: and in the second step, the driving fluid adopts high-speed passing nitrogen.
8. The acoustophoresis composite flow focusing micro-nano jet printing method according to claim 6, which is characterized in that: the acoustophoresis focusing assembly comprises an acoustic wave generator and a resonant cavity, the acoustic wave generator comprises a radio frequency signal source, a power amplifier and a piezoelectric layer structure connected with an upper electrode and a lower electrode, the radio frequency signal source generates a control signal, the control signal is amplified by the power amplifier and then transmitted to the upper electrode and the lower electrode, and the piezoelectric layer structure is driven to vibrate and generate acoustic waves based on the piezoelectric effect.
9. The acoustophoresis composite flow focusing micro-nano jet printing method according to claim 6, which is characterized in that: an outer nozzle which is coaxially distributed with the inner nozzle is arranged below the liquid outlet, a liquid outlet pipe which is coaxial with the inner nozzle is arranged in the outer nozzle, a recovery pipe is arranged at the middle section of the liquid outlet pipe along the radial direction of the outer nozzle, and the recovery pipe penetrates through the side wall of the outer nozzle and is communicated with the outer space of the liquid outlet pipe and the outer nozzle; the body sound wave generator is arranged on the side wall of the outer nozzle opposite to the recovery pipe, the body sound wave generator can give more kinetic energy to the liquid drops with larger sizes in a controllable mode, the liquid drops with larger sizes enter the recovery pipe and are recovered, and the liquid drops meeting the requirements smoothly pass through the liquid outlet pipe and are sprayed on the substrate below.
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