CN113976460A - Self-interacting shutoff door detects smooth device of chip - Google Patents

Self-interacting shutoff door detects smooth device of chip Download PDF

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Publication number
CN113976460A
CN113976460A CN202111625304.3A CN202111625304A CN113976460A CN 113976460 A CN113976460 A CN 113976460A CN 202111625304 A CN202111625304 A CN 202111625304A CN 113976460 A CN113976460 A CN 113976460A
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China
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gate
self
chip
connecting block
inlet side
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CN202111625304.3A
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CN113976460B (en
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李星星
吕克振
杨文宝
方勇
张胜春
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Tianjin Jinhaitong Semiconductor Equipment Co ltd
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Tianjin Jinhaitong Semiconductor Equipment Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/02Measures preceding sorting, e.g. arranging articles in a stream orientating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67271Sorting devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The invention provides a leveling device for a detection chip of a self-adjusting plugging door, which comprises a bottom plate, wherein an inlet side plate is vertically arranged above the bottom plate, a cylinder is arranged at the central line of the feeding side of the inlet side plate, the movable end of the cylinder is fixedly connected to a gate connecting block, the lower part of the gate connecting block is connected with a gate through a pin, so that the gate can float up and down and rotate relative to the pin, a plunger frame is fixedly arranged on the gate connecting block, which is close to the inlet side plate, spring plungers are symmetrically arranged on the plunger frame, follower wheels are symmetrically arranged at the left end and the right end of the gate, and extend out of the bottom of the gate, sensors are symmetrically arranged at the two ends of the discharging side of the inlet side plate, the height of the sensors can be adjusted, and the cylinder and the sensors are both in signal connection with an external controller. According to the device for detecting the flatness of the chip by the self-adjusting plugging door, the arranged gate, the gate connecting block and the pin can self-adaptively adjust the inclination angle according to the inclination of the plane of the upper charging tray, so that a good sealing effect is achieved.

Description

Self-interacting shutoff door detects smooth device of chip
Technical Field
The invention belongs to the field of three-temperature chip testing and sorting machines, and particularly relates to a device for detecting chip flatness by a self-adjusting plugging door.
Background
When the chip of the three-temperature (low temperature, normal temperature and high temperature) chip testing sorter is used for testing, the internal temperature of the machine table is-55-130 ℃. Under the low temperature environment, if the sealing performance is not good at the machine tray inlet and outlet, the phenomenon of frosting in a large range is easily formed when indoor normal temperature air enters, thus the work of the machine is influenced, and the internal movement mechanism of the machine is seriously damaged even. When the high low temperature of board switches, if sealed effect is unqualified, also cause the unable linear steady rising of internal temperature or reduce easily, can't reach for a long time and set for ambient temperature, influence sorter efficiency of software testing, also can reduce user and use experience.
The existing plugging mode is that a door hinge structure is adopted, a plugging door plate is installed at the inlet of a material tray through a hinge, the same side of the hinge is connected with a cylinder push rod through a connecting rod, and therefore the opening and closing of a plugging door can be controlled through the expansion and contraction of a cylinder. The defects of the prior art are as follows: 1. the traditional door hinge structure has low space utilization rate, complex structure and inconvenient later maintenance; 2. the door of the traditional door hinge structure cannot automatically adjust the deflection angle, so that the plugging effect is not ideal; 3. the traditional door hinge mode has a complex structure and high overall cost; 4. the material tray can not be attached to the material tray for plugging in the process of entering the material tray.
Disclosure of Invention
In view of this, the present invention provides a device for detecting flatness of a chip of a self-adjusting sealing door, so as to solve the problems of a complex structure and incapability of automatically adjusting a deflection angle of the existing sealing door.
In order to achieve the purpose, the technical scheme of the invention is realized as follows:
a device for leveling detection chips of a self-adjusting plugging door comprises a bottom plate, wherein an inlet side plate is vertically arranged above the bottom plate, a cylinder is arranged at the center line of the feeding side of the inlet side plate, the movable end of the cylinder is fixedly connected to a gate connecting block, the lower part of the gate connecting block is connected with a gate through a pin, so that the gate can vertically float and rotate relative to the pin, a plunger frame is fixedly arranged on one side, close to the inlet side plate, of the gate connecting block, spring plungers are symmetrically arranged on the plunger frame and used for pushing the gate to move, follower wheels are symmetrically arranged at the left end and the right end of the gate and extend out of the bottom of the gate, and the follower wheels are used for stabilizing a material tray and ensuring the flatness of the detection chips; the sensors are symmetrically installed at two ends of the discharging side of the inlet side plate, the height of each sensor is adjustable, each sensor is used for detecting a chip, and the air cylinder and the sensors are connected to an external controller in a signal mode.
Furthermore, the middle part of the gate is provided with a long slot hole, a mounting hole is arranged below the gate connecting block, and the pin sequentially penetrates through the mounting hole and the long slot hole to connect the gate and the gate connecting block.
Furthermore, the distance between the long edges of the long slotted hole is smaller than the telescopic length of the spring plunger.
Further, the spring plunger is a ball-type plunger.
Furthermore, a pair of pressing sheets are symmetrically arranged on two sides of the inlet side plate respectively and are positioned on the inner side of the follow-up wheel, and the pressing sheets are in clearance fit with the gate.
Further, the import curb plate is the rectangular plate that one end was equipped with U type groove, and the equal fixed connection in both ends in U type groove is to the bottom plate, and U type inslot is used for passing the conveying board.
Furthermore, sensor adjusting blocks are symmetrically arranged on two sides of the inlet side plate and used for installing the sensor, and the height of the sensor can be adjusted through the sensor installing blocks.
Compared with the prior art, the device for detecting the flatness of the chip by the self-adjusting plugging door has the following advantages:
(1) according to the device for detecting the flatness of the chip by the self-adjusting plugging door, the arranged gate, the gate connecting block and the pin can self-adaptively adjust the inclination angle according to the inclination of the plane of the upper charging tray, so that a good sealing effect is achieved.
(2) According to the device for detecting the flatness of the chip by the self-adjusting plugging door, the bottom of the gate is contacted with the plane of the feeding disc and can be buffered by the plunger spring, so that the durability of the mechanism is improved.
(3) According to the device for detecting the flatness of the chip by the self-adjusting plugging door, when a material tray enters, the flatness of the chip is detected and an inlet is sealed to the maximum extent; the stability that the charging tray got into can be improved.
(4) According to the device for detecting the flatness of the chip by the self-adjusting plugging door, the vertical tree-shaped structure is more compact relative to the hinge structure, and the space utilization rate is high; simple structure and convenient maintenance.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate an embodiment of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic diagram of an apparatus for detecting chip leveling in a self-adjusting plugging door according to an embodiment of the present invention;
FIG. 2 is an enlarged view taken at A in FIG. 1;
FIG. 3 is a side view of an apparatus for self-adjusting block-off doors to detect flattening of a chip according to an embodiment of the present invention;
FIG. 4 is a front view of an apparatus for detecting chip flatness from a self-adjusting sealing door according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of an adaptive tilt angle of an apparatus for detecting flatness of a chip by a self-adjusting plugging door according to an embodiment of the present invention;
fig. 6 is a diagram illustrating a positional relationship between a sensor adjustment block and a sensor according to an embodiment of the present invention.
Description of reference numerals:
1-a bottom plate; 2-inlet side plate; 3-a cylinder; 4-a spring plunger; 5-plunger rack; 6-gate connecting block; 7-tabletting; 8-a gate; 9-pins; 10-a transfer plate; 11-a material tray; 12-a conveyor belt; 13 chips; 14-a follower wheel adjusting block; 15-a follower wheel; 16-a sensor adjustment block; 161-adjusting holes; 17-a sensor.
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
A device for leveling detection chips of self-adjusting plugging doors is shown in figures 1 to 6 and comprises a bottom plate 1, an inlet side plate 2 is vertically arranged above the bottom plate 1, an air cylinder 3 is fixedly arranged at the central line of the feeding side of the inlet side plate 2, the movable end of the air cylinder 3 is fixedly connected to a gate connecting block 6, the lower part of the gate connecting block 6 is connected with a gate 8 through a pin 9, so that the gate 8 can float up and down and rotate relative to the pin 9, and the air cylinder 3 provides power for the movement of the gate 8; a plunger frame 5 is fixedly installed on one side, close to the inlet side plate 2, of the gate connecting block 6, spring plungers 4 are symmetrically arranged on the plunger frame 5, the spring plungers 4 are used for pushing the gate 8 to move, follow-up wheels 15 are symmetrically installed at the left end and the right end of the gate 8, and the follow-up wheels 15 extend out of the bottom of the gate 8 and are used for stabilizing a material tray and ensuring the flatness of a detection chip; sensor 17 is installed to the both ends symmetry of import curb plate 2 ejection of compact side, and sensor 17's height-adjustable, and the sensor is used for detecting the chip, and cylinder 3 and sensor 17 all are connected to outside controller.
Plunger frame 5 is located between gate connecting block 6 and the import curb plate 2, and is preferred, and gate connecting block 6 is close to one side of import curb plate 2 and is equipped with the recess, and plunger frame 5 has practiced thrift the whole space of this device greatly through bolt fixed mounting in the recess.
According to the scheme, the inclination angle can be adaptively adjusted according to the inclination of the plane of the feeding disc, so that a good sealing effect is achieved; when the material tray enters, the smoothness of the chip and the inlet sealing to the maximum degree are simultaneously detected; the bottom of the gate is contacted with the plane of the feeding disc, and can be buffered by a plunger spring, so that the durability of the mechanism is improved; the vertical tree-shaped structure is more compact relative to the hinge structure, and the space utilization rate is high; the structure is simple, and the maintenance is convenient; the stability that the charging tray got into can be improved.
The external controller can be a controller of the three-temperature chip testing sorting machine or a controller on the production line.
The inlet side plate 2 is a rectangular plate, the two ends of the discharge side of the inlet side plate 2 are symmetrically provided with sensor adjusting blocks 16, as shown in fig. 6, each sensor adjusting block 16 is of an L-shaped plate structure, one side, far away from the inlet side plate 2, of each sensor adjusting block 16 is fixedly provided with a sensor 17, each sensor adjusting block 16 is provided with a plurality of adjusting holes 161, each adjusting hole 161 is a long hole, each inlet side plate 2 is provided with a plurality of screw holes, and after bolts sequentially penetrate through the long holes and the screw holes, each sensor adjusting block 16 is fixedly connected with the inlet side plate 2; in the specific production process, when the chips 13 with different thicknesses need to be tested, the height of the sensor 17 needs to be adjusted, at the moment, the worker unscrews the bolt, moves the sensor adjusting block 16 up and down to a required position, namely, the adjusting hole 161 and the screw hole on the inlet side plate 2 move relatively, and then screws the bolt. Since the sensor 17 is fixed on the sensor adjusting block 16, the height of the sensor 17 is adjusted by the sensor adjusting block 16, and the sensor 17 adopts a digital optical fiber sensing amplifier, so that whether the chip 13 is arranged or not and whether the chip 13 is arranged flatly or not can be judged by detecting the light intensity.
A pair of follow-up wheel adjusting blocks 14 are symmetrically arranged at two ends of the gate 8, a follow-up wheel 15 is arranged on each follow-up wheel adjusting block 14, and the follow-up wheels 15 play a role in stabilizing the material tray in the transportation process of the material tray 11 and are also used for ensuring the accuracy of detecting the flatness of the chip 13.
The plunger frame 5 is fixed on the gate connecting block 6 by screws, the left side and the right side of the plunger frame 5 are fixed with a pair of spring plungers 4, and the symmetrical structure can ensure that the gate 8 is stressed uniformly. The spring plunger 4 is a ball-type plunger, and compared with a cylindrical plunger, the spring plunger has the advantage of being suitable for a contact surface with a complicated and changeable angle.
A pair of preforming 7 of symmetry installation respectively in 2 both sides of import curb plate, and preforming 7 is located follower wheel 15 inboardly, and preforming 7 all with 8 clearance fit of gate, breaks away from original orbit when the purpose prevents the gate motion, prevents unexpected the emergence. Considering that the gate 8 is a frequently moving part and certain friction is generated in the movement, a wear-resistant smooth surface material is considered in the material selection.
Preferably, the middle part of the gate 8 is provided with a long slot hole, a mounting hole is arranged below the gate connecting block 6, and the pin 9 sequentially penetrates through the mounting hole and the long slot hole to connect the gate 8 and the gate connecting block 6. The connection between the gate 8 and the pin 9 is designed as a long slotted hole, and the mode has two functions: firstly, the gate 8 has a space floating up and down, so that the momentum when the gate 8 reaches the bottommost position can be offset by the spring plunger 4, and the durability of the materials of the bottom plate 1 and the gate 8 is improved; secondly, increase a rotational degree of freedom around pin 9, after conveying board 10 installation and debugging, relative bottom plate 1 has certain inclination alpha (as shown in fig. 5), and alpha is different in different boards, requires that gate 8 gets off and laminates as far as possible with conveying board 10, just so can guarantee the shutoff effect, adopts pin 9 to connect just can let gate 8 self-adaptation come to laminate this contained angle alpha.
The long edge distance of the long slot hole is smaller than the telescopic length of the spring plunger 4, so that the spring plunger 4 is prevented from being over-pressurized, and a certain protection effect is achieved.
Import curb plate 2 is the rectangular plate that one end was equipped with U type groove, and the equal fixed connection in both ends in U type groove is to bottom plate 1, and U type inslot is used for passing conveying board 10. The conveying plate 10 is fixed on the bottom plate 1 and mainly used for carrying the transportation function of the material tray 11.
Example (b):
bottom plate 1 top fixed mounting conveying board 10, conveying board 10 passes the position between import curb plate 2 and the bottom plate 1, make import curb plate 2 perpendicular with conveying board 10, conveying board 10 both sides are connected to conveyer belt 12 respectively, conveyer belt 12 top is used for placing charging tray 11, and charging tray 11 is located conveying board 10 top, be used for placing chip 13 on the charging tray 11, the motor is conveyer belt 12's output power, conveyer belt 12 leans on frictional force can be carried into and carry out charging tray 11, evenly put the test chip 13 on the charging tray.
Feeding a material tray:
a photoelectric sensor is arranged on the outer side (on a flow line) of a three-temperature chip testing and sorting machine (hereinafter referred to as a machine table), the photoelectric sensor is used for identifying whether a material tray 11 is arranged on a conveying plate 10 or not and transmitting a signal to a controller in real time, when the controller judges that the machine table is internally provided with no material tray 11, the controller controls the electromagnetic valve of the air cylinder 3 to act, the specific control air cylinder 3 retracts into a push rod, the push rod of the air cylinder 3 drives a gate connecting block 6 to move upwards, and after a pin 9 on the gate connecting block 6 moves to the uppermost position of a long slotted hole of a gate 8, the pin 9 is formally contacted with the gate 8 and drives the gate 8 to move upwards. After the push rod of cylinder 3 reached extreme position, gate 8 arrived the highest point promptly, and the time delay time is set for by the controller is inside to this time quantum, and after reaching the set time, the controller control conveyer belt 12 motor corotation utilizes conveyer belt 12 to rely on the transportation to advance the charging tray 11 inside the board.
Detecting and plugging a tray chip:
the sensor 17 transmits the acquired signals to the controller in real time, when the controller judges that the chip 13 is close to, the controller controls the cylinder 3 to extend out of the push rod, the push rod drives the gate connecting block 6 and the plunger frame 5 to move downwards, initially, the pin 9 is positioned at the uppermost part of the slotted hole and does not cause downward thrust to the gate 8, the gate 8 gradually moves downwards along with the push rod of the cylinder 3, when the follower wheel 15 on the gate 8 moves downwards until contacting the material tray 11, a certain gap is left between the gate 8 and the test chip 13 (the design sealing effect is better than that before), at the moment, the pin 9 is positioned at the position between the topmost part and the bottommost part of the slotted hole of the gate 8, namely, the gate 8 is not influenced by force, the two spring plungers 4 on the plunger frame 5 are stressed and play a role of buffering, and the follower wheel 15 is also ensured to stably press the moving material tray 11, the test chip 13 is effectively prevented from being displaced by vibration during transportation. The sensor 17 can detect whether the test chip 13 is flatly arranged in the material tray 11 or not in the transportation process, when the test chip 13 protrudes, the light intensity value of the sensor 17 is abnormal, after the controller interprets the abnormality, an alarm instruction can be triggered, meanwhile, the motor of the conveyor belt 12 is controlled to stop working, at the moment, the conveyor belt 12 stops conveying the material tray 11, and the controller prompts whether the material tray 11 needs to be withdrawn or not. If no alarm is generated, when the material tray 11 completely enters, the bottom of the follower wheel 15 is suspended at the moment, the cylinder 3 can continuously extend out of the push rod, the gate 8 gradually moves downwards along with the push rod of the cylinder 3 being pushed out, when the follower wheel 15 on the gate 8 is in surface contact with the conveying plate 10, the pin 9 is still positioned between the topmost part and the bottommost part of the long slot hole of the gate 8, namely, the gate 8 is not influenced by action force, the two spring plungers 4 on the plunger frame 5 are stressed and play a role in buffering, when the stress of the gate 8 is balanced, namely, the elastic forces of the spring plungers 4 on two sides are balanced, the resultant force of gravity and the plate surface reaction force is zero, the gate 8 stops moving, the push rod of the cylinder 3 also reaches the lowest position, and the state of the gate 8 is in a complete plugging state at the moment.
Adaptive Tilt Angle description
As shown in fig. 5, if the transfer plate 10 is not parallel to the bottom plate 1 and differs from the bottom plate by an inclination angle α, when the gate 8 descends to the bottom, the spring plungers 4 on both sides are gradually compressed and are unevenly stressed on both sides, and the compression stroke of the inner spring is different due to the different stresses of the spring plungers 4, i.e. the situation that the spring plungers are more compressed and inclined is caused. Under the action of the two spring plungers 4 which are not in the same compressed state, the shutter 8 will form a moment in the clockwise or counterclockwise direction around the pin 9, which enables the shutter 8 to tightly abut against the transfer plate 10, which also achieves the purpose of self-adjusting the angle.
Discharging a material tray:
if the material tray 11 needs to come out from the interior of the machine, when the sensor 17 receives that the detection chip 13 approaches, the signal is transmitted to the controller, the controller receives the delay signal, and the cylinder 3 is controlled to extend out of the push rod, so that the material tray 11 is ensured to reach the bottom of the gate 8 when the cylinder 3 is pushed out. The other actions are the same as the steps of the tray 11 entering, and are not described herein.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims (7)

1. The utility model provides a smooth device of self-interacting shutoff door detection chip which characterized in that: the detection device comprises a bottom plate, wherein an inlet side plate is vertically arranged above the bottom plate, a cylinder is arranged at the central line of the feeding side of the inlet side plate, the movable end of the cylinder is fixedly connected to a gate connecting block, the lower part of the gate connecting block is connected with a gate through a pin, so that the gate can float up and down and rotate relative to the pin, a plunger frame is fixedly arranged on one side of the gate connecting block close to the inlet side plate, spring plungers are symmetrically arranged on the plunger frame and used for pushing the gate to move, follower wheels are symmetrically arranged at the left end and the right end of the gate, and the follower wheels extend out of the bottom of the gate and are used for stabilizing a material tray and ensuring the flatness of a detection chip; the sensors are symmetrically installed at two ends of the discharging side of the inlet side plate, the height of each sensor is adjustable, each sensor is used for detecting a chip, and the air cylinder and the sensors are connected to an external controller in a signal mode.
2. The device of claim 1 for detecting chip flatness of a self-adjusting plugging door, wherein: the middle part of gate is equipped with the long slot hole, and gate connecting block below is equipped with the mounting hole, and the pin passes mounting hole and long slot hole in proper order and then connects gate and gate connecting block.
3. The device for detecting the flatness of a chip of a self-adjusting plugging door according to claim 2, wherein: the long edge distance of the long slot hole is smaller than the telescopic length of the spring plunger.
4. The device of claim 1 for detecting chip flatness of a self-adjusting plugging door, wherein: the spring plunger is a ball-shaped head plunger.
5. The device of claim 1 for detecting chip flatness of a self-adjusting plugging door, wherein: a pair of pressing sheets are symmetrically arranged on two sides of the inlet side plate respectively and are positioned on the inner side of the follow-up wheel, and the pressing sheets are in clearance fit with the gate.
6. The device of claim 1 for detecting chip flatness of a self-adjusting plugging door, wherein: the import curb plate is the rectangular plate that one end was equipped with U type groove, and the equal fixed connection in both ends in U type groove is to the bottom plate, and U type inslot is used for passing the conveying board.
7. The device of claim 1 for detecting chip flatness of a self-adjusting plugging door, wherein: sensor adjusting blocks are symmetrically arranged on two sides of the inlet side plate and used for installing the sensor, and the height of the sensor can be adjusted through the sensor installing blocks.
CN202111625304.3A 2021-12-29 2021-12-29 Self-interacting shutoff door detects smooth device of chip Active CN113976460B (en)

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Publication number Priority date Publication date Assignee Title
CN114935498A (en) * 2022-07-19 2022-08-23 天津金海通半导体设备股份有限公司 Test arm dynamic moment locking device

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CN107724687A (en) * 2017-11-16 2018-02-23 宿迁市鹏辉混凝土构件有限公司 A kind of concrete building plate flatness control device
CN112045531A (en) * 2020-09-23 2020-12-08 彭良九 Chip polishing mechanism capable of testing and detecting flatness of chip
CN113436993A (en) * 2021-06-17 2021-09-24 四川熙隆半导体科技有限公司 Semiconductor chip template transfer device

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Publication number Priority date Publication date Assignee Title
US3367476A (en) * 1964-12-23 1968-02-06 Ibm Orienting and contacting device
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CN104776823A (en) * 2015-05-08 2015-07-15 河海大学 Detecting device and detecting method for surface evenness of gate
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Publication number Priority date Publication date Assignee Title
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CN114935498B (en) * 2022-07-19 2022-10-25 天津金海通半导体设备股份有限公司 Test arm dynamic moment locking device

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