CN113970247A

CN113970247A - Through type heating furnace for ALD equipment

Info

Publication number: CN113970247A
Application number: CN202111259168.0A
Authority: CN
Inventors: 杨永远; 陈福俭; 李岩; 李阳; 李万朋; 段世飞; 李博; 尹嘉琦; 孔奕人; 高畅
Original assignee: Linton Kayex Technology Co Ltd
Current assignee: Linton Kayex Technology Co Ltd
Priority date: 2021-10-28
Filing date: 2021-10-28
Publication date: 2022-01-25
Anticipated expiration: 2041-10-28

Abstract

The invention belongs to the technical field of ALD (atomic layer deposition) processes, and particularly relates to a pass-type heating furnace for ALD equipment, which comprises a preheating furnace; one side of the preheating furnace is provided with a front furnace opening, and the other side of the preheating furnace is provided with a rear furnace door; a front lifter is fixedly connected to the side wall of one side of the preheating furnace, and a rear lifter is fixedly connected to the other side of the preheating furnace; the side wall of one side of the preheating furnace is connected with a front furnace door in a sliding way, and the side wall of the other side of the preheating furnace is connected with a rear furnace door in a sliding way; the front lifting machine is connected with the front furnace door, and the rear lifting machine is connected with the rear furnace door; a conveying mechanism is arranged in the preheating furnace; an intracavity heater is arranged at the bottom end of the inner wall of the preheating furnace; a through type heating furnace for an ALD device is provided, wherein a front door and a rear door are arranged and can be opened simultaneously, heated materials are automatically conveyed out of a furnace body, materials to be heated are automatically conveyed into the furnace body and are ready for heating, so that the time is saved and the efficiency is improved in continuous operation.

Description

Through type heating furnace for ALD equipment

Technical Field

The invention belongs to the technical field of ALD (atomic layer deposition) processes, and particularly relates to a pass-type heating furnace for ALD equipment.

Background

Atomic Layer Deposition (ALD) is a chemical vapor deposition method of thin films based on ordered, surface self-saturating reactions; an automatic line of an ALD production process furnace comprises a preheating chamber, a reaction chamber and a cooling chamber.

The preheating furnace body of the existing ALD process furnace equipment mainly adopts a single-door cylindrical structure design, workpieces enter from a front door, and after the process is finished, the workpieces exit from the front door.

Disclosure of Invention

To remedy the deficiencies of the prior art, at least one of the technical problems set forth in the background is addressed.

The technical scheme adopted by the invention for solving the technical problems is as follows: the invention relates to a passing-type heating furnace for ALD equipment, which comprises a preheating furnace; one side of the preheating furnace is provided with a front furnace opening, and the other side of the preheating furnace is provided with a rear furnace door; a front lifter is fixedly connected to the side wall of one side of the preheating furnace, and a rear lifter is fixedly connected to the other side of the preheating furnace; the side wall of one side of the preheating furnace is connected with a front furnace door in a sliding way, and the side wall of the other side of the preheating furnace is connected with a rear furnace door in a sliding way; the front lifting machine is connected with the front furnace door, and the rear lifting machine is connected with the rear furnace door; the inner walls of the front furnace door and the rear furnace door are respectively provided with a first heater; a conveying mechanism is arranged in the preheating furnace; an intracavity heater is arranged at the bottom end of the inner wall of the preheating furnace; the top end of the preheating furnace is provided with an axial flow fan; the preheating furnace body of the existing ALD process furnace equipment mainly adopts a single-furnace-door cylindrical structure design, a workpiece enters from a front door, and after the process is finished, the workpiece exits from the front door, so that compared with the workpieces produced in large batch, the single-door structure restricts the logistics time and has certain influence on the improvement of the productivity; when the preheating furnace works, the forehearth door is lifted by the forehearth lifter, then the materials are matched with the conveying device in the cavity through the external conveying mechanism and are conveyed into the preheating furnace, and then the forehearth door is closed by the forehearth lifter; after the preheating process is finished, the rear furnace door is lifted by a rear lifter, and the conveying mechanism in the cavity is matched with an external conveying device to convey the material out of the cavity of the preheating furnace; the front and rear furnace doors of the hot cavity are designed into lifting doors, and the doors are provided with first heaters, so that the temperature requirement in the furnace can be still met quickly; after heating, the front door and the rear door can be opened simultaneously, the heated materials are automatically conveyed out of the furnace body, the materials to be heated are automatically conveyed into the furnace body to be heated, and heating is prepared, so that the time is saved in continuous operation, and the efficiency is improved.

Preferably, the inner walls of the front furnace door and the rear furnace door are respectively provided with a first heater; during operation, furnace gate and back furnace gate design become the lift gate before the hot chamber, and take first heater on the door, pass through conveying mechanism when with material transport advance preheating furnace in, can be quick at this moment through first heater compensate preceding furnace gate and back furnace gate and open and shut the heat that runs off, and then promote the interior temperature of stove fast, improve the heating efficiency of preheating furnace.

Preferably, the conveying mechanism comprises a transmission shaft and an endless conveyor belt; one end of each transmission shaft is rotatably connected to the inner wall of the preheating furnace, and the other end of each transmission shaft is fixedly connected with a chain wheel; a chain is fixedly connected to the inner wall of the annular conveying belt; the chain wheel and the chain are meshed with each other; the side walls of the two sides of the preheating furnace are fixedly connected with fixing plates through first fixing columns; the transmission shaft penetrates through the fixed plate and is rotatably connected to the fixed plate; a group of fixed blocks is fixedly connected to the side walls of the two sides of the annular conveying belt through second fixed columns; a first through groove is formed in the middle of the fixing block, and a first connecting column is connected in the first through groove in a sliding mode; the end part of the first connecting column, which is close to the fixed plate, is fixedly connected with an arc-shaped block, and the other end of the first connecting column is fixedly connected with an extrusion plate; the arc-shaped block is fixedly connected to the side wall of the fixed block through a spring; the fixed plate pushes the arc-shaped block to move towards the fixed block through the pushing assembly; when the material conveying device works, when materials are conveyed, the transmission shaft is started, the transmission shaft drives the endless conveyor belt to rotate due to the fact that the chain wheel and the chain of the transmission shaft are meshed with each other, the materials placed on the conveyor belt are driven to move, mutual offset cannot occur between the chain wheel and the chain due to the fact that the chain wheel and the chain are meshed with each other, and conveying stability of the endless conveyor belt can be guaranteed; when the annular conveying belt drives the fixing block to move through the second fixing column, the fixing block rotates from the arc to enter linear motion, the arc block is pushed to move towards the fixing block through the pushing assembly on the fixing plate at the moment, the arc block is extruded to form a spring, the arc block can push the extrusion plate to move towards the annular conveying belt through the first connecting column when moving, and then the material placed on the annular conveying belt can be extruded and fixed, the extrusion plate can move synchronously with the annular conveying belt, so that when the extrusion plate extrudes and fixes the material, the movement of the material on the annular conveying belt cannot be influenced, meanwhile, the material is fixed through the extrusion plate, the condition that the material moves towards the annular conveying belt can be prevented, the extrusion plate is fixed through two sides of the material, the material can be moved and fixed at the center of the annular conveying belt, and the guiding effect is achieved.

Preferably, the pushing assembly comprises a first plane, a first inclined plane and a second plane; the middle parts of the opposite surfaces of the pair of fixed plates are provided with first planes; second planes are arranged on the opposite surfaces of the pair of fixed plates and close to the two ends of the opposite surfaces of the fixed plates; the first plane and the second plane are mutually connected through a first inclined plane; the linear distance between the first plane and the side wall of the annular conveyor belt is smaller than the linear distance between the second plane and the side wall of the annular conveyor belt; during operation, when arc piece arc motion, arc piece and second plane contact each other this moment, when arc piece gets into linear motion, arc piece carries out on the first plane from the second plane through first inclined plane, the lateral wall linear distance because of first plane and endless conveyor is less than the linear distance of second plane and endless conveyor lateral wall, when arc piece gets into the first plane from the second plane, can promote arc piece and remove to the endless conveyor direction, and then fix through stripper plate and material, it is simple and convenient to remove, and when transporting the material from the preceding furnace gate pine back furnace gate, arc piece can follow the first plane and get into in the second plane this moment, can relieve the extrusion of stripper plate to the material, can not influence the material and export from back furnace gate.

Preferably, a group of corrugated grooves are formed in the side wall, close to the annular conveyor belt, of the extrusion plate; during operation, because of the material preheats in preheating furnace, in order to reduce the contact surface of stripper plate and material, let the material fully preheat, the corrugated groove has been seted up to the lateral wall of the stripper plate of setting, utilizes the corrugated groove can effectually reduce the area of contact of stripper plate and material, guarantees that the laminating of stripper plate and material fully preheats.

Preferably, an air outlet cavity is formed in the lug of the corrugated groove; a first air outlet hole is formed in the side wall, close to the corrugated groove, of the air outlet cavity; a first cavity is formed in the fixed block; the inner wall of the first cavity is in sealed sliding connection with the sliding plate; a third fixing column is fixedly connected to the side wall, close to the extrusion plate, of the sliding plate; the third fixing column penetrates through the first cavity and is fixedly connected to the extrusion plate; the first cavity and the air outlet cavity are communicated with each other through a hose; the hose is positioned on the side wall of the first cavity close to the extrusion plate at the communication point of the first cavity; the during operation, when the arc piece promoted the stripper plate through first connecting column, the stripper plate removed to the endless conveyor direction this moment, then can drive the slide through the third fixed column and remove in first cavity, because of the slide at first cavity inner seal sliding connection, gas in the first cavity can get into the intracavity of giving vent to anger through the hose this moment, then spout through first venthole, spun gas can blow to the contact surface of stripper plate and material, can further blow off above impurity, can avoid appearing on the contact surface of stripper plate and material that impurity influences the complete degree on the surface of material and the fixed effect of stripper plate.

Preferably, the first connecting column comprises a second connecting rod and a T-shaped rod; one end of the second connecting rod is fixedly connected to the arc-shaped block, and the other end of the second connecting rod is provided with a T-shaped groove; the bottom of the T-shaped groove is fixedly connected with a T-shaped rod through a spring; the end part of the T-shaped rod is fixedly connected to the extrusion plate; the during operation sets up first spliced pole and is second connecting rod and T shape pole, lets first spliced pole have certain elasticity, can be suitable for and fix the material of different width, and T shape pole sliding connection in the T-slot, and T shape pole cushions through the spring, can avoid the stripper plate to appear the rigidity collision between the material, also has certain cushioning effect to the material.

Preferably, a pair of symmetrical arc-shaped elastic sheets is fixedly connected in the groove of the corrugated groove; the pair of arc-shaped elastic sheets are bent oppositely; the during operation, when passing through conveying mechanism with the material in the past furnace gate and getting into fire door center department, conveying mechanism can halt this moment, in order to prevent the material the condition that mutual dislocation removal from appearing on endless conveyor, be equipped with a pair of symmetric distribution's arc shell fragment in the recess in ripple groove, at arc shell fragment and material inner wall contact department each other, can extrude the arc shell fragment and remove to ripple groove inner wall direction this moment, elasticity through the arc shell fragment can with the material inner wall laminating of mutual extrusion, further increase the frictional force of stripper plate and material, when avoiding appearing conveying mechanism scram, the material is in endless conveyor gliding condition.

Preferably, a second cavity is formed in the extrusion plate relative to the groove of the corrugated groove; a sliding plate is connected in the second cavity in a sliding manner; the sliding plates are connected with each other through the first thin ropes and the curved inner walls of the arc-shaped elastic sheets; the end parts of the second connecting rods are communicated with each other through second strings and sliding plates; a fillet is arranged at the opening of the first through groove close to the extrusion plate; the during operation, when stripper plate and material inner wall do not contact, first string and second string are in taut state this moment, the pulling arc shell fragment is in crooked at ripple inslot recess, can avoid stretching out the ripple inslot at the arc shell fragment, the condition of losing appears when clearing up or maintaining the stove in, when stripper plate and material camera are laminated, T shape post can be at T inslot removal this moment, and then make first stay cord and second stay cord be in not hard up state, let the arc shell fragment laminate each other with the stripper plate under the spring action, and set up and be equipped with the wearing and tearing that the fillet can avoid the second string near the opening part of stripper plate in first logical groove.

Preferably, a group of pressing blocks is fixedly connected to the bent outer side wall of the arc-shaped elastic sheet; the pressing block is made of a soft graphite packing; the section of the pressing block is arc-shaped; a hollow cavity is formed in the pressing block; a second air outlet hole is formed in the top end of the hollow cavity; when the preheating furnace works, a group of pressing blocks are fixedly connected to the bent outer side wall of the arc-shaped elastic sheet, the pressing blocks are soft graphite packing, so that the friction force between the arc-shaped elastic sheet and the inner wall of a material can be increased, the pressing blocks are graphite packing, and the graphite packing is made of a high-temperature-resistant material, so that the performance of the graphite packing cannot be influenced in the preheating furnace; when briquetting and material inner wall contacted extrusion each other, the gas of cavity intracavity can be through the blowout of second venthole, and the spun gas can clear up the contact surface of briquetting and material, guarantees the clean and tidy of pressfitting face, all plays the guard action to briquetting and material lateral wall.

The invention has the following beneficial effects:

1. according to the through type heating furnace for the ALD equipment, the front furnace door and the rear furnace door of the hot cavity are designed into the lifting doors, and the first heater is arranged on the lifting doors, so that the temperature requirement in the furnace can be still met quickly; after heating, the front door and the rear door can be opened simultaneously, the heated materials are automatically conveyed out of the furnace body, the materials to be heated are automatically conveyed into the furnace body to be heated, and heating is prepared, so that the time is saved in continuous operation, and the efficiency is improved.

2. According to the through type heating furnace for the ALD equipment, the pushing assembly on the fixing plate pushes the arc-shaped block to move towards the fixing block to extrude the spring on the arc-shaped block, the extruding plate is pushed to move towards the annular conveying belt through the first connecting column when the arc-shaped block moves, materials placed on the annular conveying belt can be extruded and fixed, and the materials can be movably fixed at the center of the annular conveying belt to play a role in fixing and guiding.

Drawings

The invention will be further explained with reference to the drawings.

FIG. 1 is a front view of the present invention;

FIG. 2 is a view taken from the direction A of FIG. 1;

FIG. 3 is an enlarged view of a portion of FIG. 2 at B;

FIG. 4 is an enlarged view of a portion of FIG. 3 at C;

FIG. 5 is an enlarged view of a portion of FIG. 3 at D;

fig. 6 is a perspective view of the fixing plate;

FIG. 7 is a cross-sectional view of the arc-shaped spring plate

FIG. 8 is a cross-sectional view of a compact;

in the figure: 1. preheating a furnace; 11. a front furnace mouth; 12. a rear furnace mouth; 13. a front oven door; 14. a rear oven door; 15. a front-end elevator; 16. a rear elevator; 17. a conveying mechanism; 18. an intracavity heater; 19. a first heater; 2. a drive shaft; 21. a sprocket; 22. an endless conveyor belt; 23. a chain; 24. a first fixed column; 25. a fixing plate; 26. a second fixed column; 27. a fixed block; 28. a pressing plate; 29. a first connecting column; 3. an arc-shaped block; 31. a first through groove; 32. a first plane; 33. a first inclined plane; 34. a second plane; 35. a corrugated groove; 36. a first cavity; 37. a slide plate; 38. a third fixing column; 39. an air outlet cavity; 391. a first air outlet 391; 4. a second connecting rod; 41. a T-shaped slot; 42. a T-shaped rod; 43. an arc-shaped elastic sheet; 44. a second cavity; 45. a sliding plate; 46. a first string; 47. a second string; 48. briquetting; 5. a hollow cavity; 51. and a second air outlet.

Detailed Description

In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.

Example one

As shown in fig. 1, a pass-through furnace for ALD equipment according to an embodiment of the present invention includes a preheating furnace 1; one side of the preheating furnace 1 is provided with a front furnace opening 11, and the other side is provided with a rear furnace door 14; a front lifter 15 is fixedly connected to the side wall of one side of the preheating furnace 1, and a rear lifter 16 is fixedly connected to the other side of the preheating furnace; the side wall of one side of the preheating furnace 1 is connected with a front furnace door 13 in a sliding way, and the side wall of the other side of the preheating furnace 1 is connected with a rear furnace door 14 in a sliding way; the front lifting machine 15 is connected with the front furnace door 13, and the rear lifting machine 16 is connected with the rear furnace door 14; a conveying mechanism 17 is arranged in the preheating furnace 1; an intracavity heater 18 is arranged at the bottom end of the inner wall of the preheating furnace 1; the top end of the preheating furnace 1 is provided with an axial flow fan; the preheating furnace 1 of the existing ALD process furnace equipment is mainly designed in a single-furnace-door cylindrical structure, workpieces enter from a front door, and after the process is finished, the workpieces exit from the front door, so that compared with workpieces produced in large batch, the single-door structure restricts the logistics time and has certain influence on the improvement of the productivity; therefore, when the preheating furnace works, the forehearth door 13 is lifted by the forehearth lifting machine 15, then materials are matched with the conveying device in the cavity through the external conveying mechanism 17 and are conveyed into the preheating furnace 1, and then the forehearth door 13 is closed by the forehearth lifting machine 15; after the preheating process is finished, the rear furnace door 14 is lifted by the rear lifting machine 16, and the conveying mechanism 17 in the cavity is matched with an external conveying device to convey the material out of the cavity of the preheating furnace 1; thus, the temperature requirement in the furnace can be still quickly met; after heating, the front door and the rear door can be opened simultaneously, the heated materials are automatically conveyed out of the furnace body, the materials to be heated are automatically conveyed into the furnace body to be heated, and heating is prepared, so that the time is saved in continuous operation, and the efficiency is improved.

The inner walls of the front furnace door 13 and the rear furnace door 14 are respectively provided with a first heater 19; during operation, the front furnace door 13 and the rear furnace door 14 of the hot cavity are designed into lifting doors, the first heater 19 is arranged on the lifting doors, when materials are conveyed into the preheating furnace 1 through the conveying mechanism 17, the heat lost by opening and closing the front furnace door 13 and the rear furnace door 14 can be rapidly compensated through the first heater 19, the temperature in the furnace is rapidly lifted, and the heating efficiency of the preheating furnace 1 is improved.

Example two

As shown in fig. 2 to 6, the conveying mechanism 17 includes a drive shaft 2 and an endless belt 22; one end of each of the transmission shafts 2 is rotatably connected to the inner wall of the preheating furnace 1, and the other end of each of the transmission shafts is fixedly connected with a chain wheel 21; a chain 23 is fixedly connected to the inner wall of the annular conveyor belt 22; the chain wheel 21 and the chain 23 are meshed with each other; the side walls of two sides of the preheating furnace 1 are fixedly connected with fixing plates 25 through first fixing columns 24; the transmission shaft 2 penetrates through the fixed plate 25 and is rotatably connected to the fixed plate 25; a group of fixed blocks 27 are fixedly connected to the side walls of the two sides of the annular conveyor belt 22 through second fixed columns 26; a first through groove 31 is formed in the middle of the fixing block 27, and a first connecting column 29 is connected in the first through groove 31 in a sliding manner; the end part of the first connecting column 29 close to the fixed plate 25 is fixedly connected with the arc-shaped block 3, and the other end is fixedly connected with the extrusion plate 28; the arc-shaped block 3 is fixedly connected to the side wall of the fixed block 27 through a spring; the fixed plate 25 pushes the arc-shaped block 3 to move towards the fixed block 27 through the pushing assembly; when the material conveying device works, when materials are conveyed, the transmission shaft 2 is started, the transmission shaft 2 drives the annular conveying belt 22 to rotate due to the fact that the chain wheel 21 of the transmission shaft 2 is meshed with the chain 23, the materials placed on the conveying belt are driven to move, and due to the fact that the chain wheel 21 is meshed with the chain 23, the chain wheel 21 and the chain 23 cannot deviate from each other, and conveying stability of the annular conveying belt 22 can be guaranteed; when the annular conveyor belt 22 drives the fixed block 27 to move through the second fixed column 26, when the fixed block 27 enters linear motion from arc rotation, the pushing assembly on the fixed plate 25 pushes the arc block 3 to move towards the fixed block 27, the spring on the arc block 3 is extruded, the extrusion plate 28 is pushed to move towards the annular conveyor belt 22 through the first connecting column 29 when the arc block 3 moves, and then the material placed on the annular conveyor belt 22 can be extruded and fixed, because the extrusion plate 28 can move synchronously with the annular conveyor belt 22, when the extrusion plate 28 extrudes and fixes the material, the movement of the material on the annular conveyor belt 22 cannot be influenced, meanwhile, the material is fixed through the extrusion plate 28, the condition that the material moves towards the offset on the annular conveyor belt 22 can be prevented, and the material can be moved and fixed at the center of the annular conveyor belt 22 through the extrusion and fixation of the extrusion plates 28 positioned at two sides of the material, the guiding function is achieved.

The pushing assembly comprises a first plane 32, a first inclined plane 33 and a second plane 34; a first plane 32 is arranged in the middle of the opposite surfaces of the pair of fixed plates 25; the opposite surfaces of the pair of fixed plates 25 are provided with second planes 34 close to the two ends; the first plane 32 and the second plane 34 are connected with each other through a first inclined plane 33; the linear distance between the first plane 32 and the side wall of the endless conveyor 22 is smaller than the linear distance between the second plane 34 and the side wall of the endless conveyor 22; during operation, when arc block 3 moves in an arc shape, arc block 3 and second plane 34 contact each other at this moment, when arc block 3 gets into linear motion, arc block 3 goes on first plane 32 from second plane 34 through first inclined plane 33, because of the lateral wall linear distance of first plane 32 and endless conveyor 22 is less than the linear distance of second plane 34 and endless conveyor 22 lateral wall, when arc block 3 gets into first plane 32 from second plane 34, can promote arc block 3 and move to endless conveyor 22 direction, and then fix through stripper plate 28 and material, it is simple and convenient to move, and when transporting the material loose back furnace gate 14 from preceding furnace gate 13, arc block 3 can get into in second plane 34 from first plane 32 at this moment, can remove the extrusion of stripper plate 28 to the material, can not influence the material and export from back furnace gate 12.

A group of corrugated grooves 35 are formed in the side wall of the extrusion plate 28 close to the annular conveyor belt 22; during operation, preheat in preheater 1 because of the material, in order to reduce the contact surface of stripper plate 28 and material, let the material fully preheat, corrugated groove 35 has been seted up to the lateral wall of the stripper plate 28 that sets up, utilizes corrugated groove 35 can effectual reduction stripper plate 28 and the area of contact of material, guarantees that the laminating of stripper plate 28 and material fully preheats.

An air outlet cavity 39 is formed in the convex block of the corrugated groove 35; a first air outlet hole 391 is formed in the side wall of the air outlet cavity 39 close to the corrugated groove 35; a first cavity 36 is formed in the fixed block 27; the inner wall of the first cavity 36 is hermetically and slidably connected with a sliding plate 37; a third fixing column 38 is fixedly connected to the side wall of the sliding plate 37 close to the extrusion plate 28; the third fixing column 38 penetrates through the first cavity 36 and is fixedly connected to the extrusion plate 28; the first cavity 36 and the air outlet cavity 39 are communicated with each other through a hose; the hose is located on the side wall of the first cavity 36 near the squeeze plate 28 at the communication point of the first cavity 36; in operation, when arc piece 3 promoted stripper plate 28 through first spliced pole 29, stripper plate 28 moved to endless conveyor belt 22 direction this moment, then can drive slide 37 through third fixed column 38 and remove in first cavity 36, because of slide 37 is at first cavity 36 internal seal sliding connection, gas in first cavity 36 can pass through the hose this moment and get into in gas outlet chamber 39, then spout through first venthole 391, spun gas can blow to the contact surface of stripper plate 28 and material, can further blow impurity above-mentioned, can avoid appearing impurity influence the complete degree on the surface of material and the fixed effect of stripper plate 28 on the contact surface of stripper plate 28 and material.

The first connecting column 29 comprises a second connecting rod 4 and a T-shaped rod 42; one end of the second connecting rod 4 is fixedly connected to the arc-shaped block 3, and the other end of the second connecting rod is provided with a T-shaped groove 41; a T-shaped rod 42 is fixedly connected to the bottom of the T-shaped groove 41 through a spring; the end part of the T-shaped rod 42 is fixedly connected to the extrusion plate 28; during operation sets up first spliced pole 29 for second connecting rod 4 and T shape pole 42, lets first spliced pole 29 have certain elasticity, can be suitable for and fix the material of different width, and T shape pole 42 sliding connection in T shape groove 41, and T shape pole 42 cushions through the spring, can avoid the stripper plate 28 to appear rigid collision between the material, also has certain cushioning effect to the material.

A pair of symmetrical arc-shaped elastic sheets 43 is fixedly connected in the groove of the corrugated groove 35; the pair of arc-shaped elastic sheets 43 are bent back to back; in operation, when getting into fire door center department with the material from preceding furnace gate 13 through conveying mechanism 17, conveying mechanism 17 can pause this moment, in order to prevent the material the condition that mutual dislocation removed from appearing on endless conveyor 22, be equipped with a pair of symmetric distribution's arc shell fragment 43 in the recess of ripple groove 35, contact department each other at arc shell fragment 43 and material inner wall, can extrude arc shell fragment 43 and remove to ripple groove 35 recess inner wall direction this moment, elasticity through arc shell fragment 43 can extrude the laminating with the material inner wall each other, further increase the frictional force of stripper plate 28 and material, when avoiding appearing conveying mechanism 17 scram, the material is in the gliding condition of endless conveyor 22.

A second cavity 44 is formed in the extrusion plate 28 at the position corresponding to the groove of the corrugated groove 35; a sliding plate 45 is slidably connected in the second cavity 44; the sliding plate 45 is connected with the curved inner wall of the arc-shaped elastic sheet 43 through a first string 46; the ends of the second connecting rod 4 are communicated with each other through a second string 47 and a sliding plate 45; a fillet is arranged at the opening of the first through groove 31 close to the extrusion plate 28; during operation, when stripper plate 28 and material inner wall do not contact, first string 46 and second string 47 are in taut state this moment, pulling arc shell fragment 43 is in crooked in ripple groove 35 recess, can avoid stretching out outside ripple groove 35 at arc shell fragment 43, the condition that the book decreases appears when clearing up or maintaining the stove in, when stripper plate 28 and material camera laminating, T shape post can remove in T-slot 41 this moment, and then make first stay cord and second stay cord be in not hard up state, let arc shell fragment 43 laminate each other with stripper plate 28 under the spring action, and set up and be equipped with the wearing and tearing that fillet can avoid second string 47 at the opening part that first logical groove 31 is close to stripper plate 28.

A group of pressing blocks 48 are fixedly connected to the bent outer side wall of the arc-shaped elastic sheet 43; the pressing block 48 is made of a soft graphite packing; the section of the pressing block 48 is arc-shaped; a hollow cavity 5 is formed in the pressing block 48; a second air outlet hole 51 is formed at the top end of the hollow cavity 5; when the preheating furnace 1 works, a group of pressing blocks 48 are fixedly connected to the bent outer side wall of the arc-shaped elastic sheet 43, the pressing blocks 48 are soft graphite packing, so that the friction force between the arc-shaped elastic sheet 43 and the inner wall of a material can be increased, the pressing blocks 48 are graphite packing which is made of high-temperature-resistant materials, and the performance of the graphite packing cannot be influenced in the preheating furnace 1; when briquetting 48 and material inner wall contacted extrusion each other, the gas in well cavity 5 can be through the blowout of second venthole 51, and the spun gas can be cleared up the contact surface of briquetting 48 and material, guarantees the clean and tidy of pressfitting face, all plays the guard action to briquetting 48 and material lateral wall.

The working principle is as follows: the forehearth door 13 is lifted by the forehearth lifter 15, then the materials are matched with the conveying device in the cavity body through the external conveying mechanism 17 and are conveyed into the preheating furnace 1, and then the forehearth door 13 is closed by the forehearth lifter 15; after the preheating process is finished, the rear furnace door 14 is lifted by the rear lifting machine 16, and the conveying mechanism 17 in the cavity is matched with an external conveying device to convey the material out of the cavity of the preheating furnace 1; the front and rear oven doors 14 of the hot chamber are designed into lifting doors, and the doors are provided with first heaters 19, so that the temperature requirement in the oven can be quickly met; after heating is finished, the front door and the rear door can be opened simultaneously, the heated materials are automatically conveyed out of the furnace body, the materials to be heated are automatically conveyed into the furnace body to be heated, and heating is prepared, so that the time is saved for continuous operation, and the efficiency is improved; when materials are conveyed, the transmission shaft 2 is started at the moment, the transmission shaft 2 drives the endless conveyor belt 22 to rotate due to the fact that the chain wheel 21 of the transmission shaft 2 is meshed with the chain 23, the materials placed on the conveyor belt are driven to move, mutual offset cannot occur between the chain wheel 21 and the chain 23 due to the fact that the chain wheel 21 and the chain 23 are meshed with each other, and conveying stability of the endless conveyor belt 22 can be guaranteed; when the arc-shaped block 3 moves in an arc shape, the arc-shaped block 3 is contacted with the second plane 34 at the moment, when the arc-shaped block 3 moves in a straight line, the arc-shaped block 3 moves on the first plane 32 from the second plane 34 through the first inclined plane 33, because the straight line distance between the first plane 32 and the side wall of the annular conveyor belt 22 is smaller than the straight line distance between the second plane 34 and the side wall of the annular conveyor belt 22, when the arc-shaped block 3 moves on the first plane 32 from the second plane 34, the extrusion plate 28 is pushed to move towards the annular conveyor belt 22 through the first connecting column 29 when the arc-shaped block 3 moves, and then the material placed on the annular conveyor belt 22 can be extruded and fixed, because the extrusion plate 28 moves synchronously with the annular conveyor belt 22, when the extrusion plate 28 extrudes and fixes the material, the material can not be influenced on the annular conveyor belt 22, meanwhile, the material can be fixed through the extrusion plate 28, and the condition that the moving direction of the material deviates on the annular conveyor belt 22 can be prevented, the materials can be movably fixed at the center of the annular conveyor belt 22 by the extrusion and fixation of the extrusion plates 28 positioned at the two sides of the materials, so that a guiding effect is achieved; when the arc-shaped block 3 pushes the extrusion plate 28 through the first connecting column 29, at this time, the extrusion plate 28 moves towards the direction of the endless conveyor belt 22, then the third fixing column 38 drives the sliding plate 37 to move in the first cavity 36, because the sliding plate 37 is in sliding connection with the first cavity 36 in a sealing manner, at this time, gas in the first cavity 36 enters the gas outlet cavity 39 through the hose, and then is sprayed out through the first gas outlet 391, the sprayed gas blows the contact surface of the extrusion plate 28 and the material, impurities on the contact surface can be further blown off, and the influence of the impurities on the contact surface of the extrusion plate 28 and the material on the integrity of the surface of the material and the fixing effect of the extrusion plate 28 can be avoided; the first connecting column 29 is provided with the second connecting rod 4 and the T-shaped rod 42, so that the first connecting column 29 has certain flexibility and can be suitable for fixing materials with different widths, the T-shaped rod 42 is in sliding connection in the T-shaped groove 41, the T-shaped rod 42 is buffered through a spring, the extrusion plate 28 can be prevented from rigidly colliding the materials, and a certain buffering effect is also achieved on the materials; when stripper plate 28 and material inner wall contactless, first string 46 and second string 47 are in taut state this moment, pulling arc shell fragment 43 is in crooked in ripple groove 35 recess, can avoid stretching out outside ripple groove 35 at arc shell fragment 43, the condition that the breakage appears when clearing up or maintaining the stove, when stripper plate 28 and material camera laminating, T shape post can remove in T-slot 41 this moment, and then make first stay cord and second stay cord be in not hard up state, let arc shell fragment 43 laminate each other with stripper plate 28 under the spring action, elasticity through arc shell fragment 43 can with the mutual extrusion laminating of material inner wall, further increase the frictional force of stripper plate 28 and material, when avoiding appearing conveying mechanism 17 scram, the gliding condition of material at endless conveyor 22.

The front, the back, the left, the right, the upper and the lower are all based on figure 1 in the attached drawings of the specification, according to the standard of the observation angle of a person, the side of the device facing an observer is defined as the front, the left side of the observer is defined as the left, and the like.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience in describing the present invention and for simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the scope of the present invention.

The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A through type heating furnace for an ALD device is characterized in that: comprises a preheating furnace (1); one side of the preheating furnace (1) is provided with a front furnace opening (11), and the other side is provided with a rear furnace door (14); a front lifter (15) is fixedly connected to the side wall of one side of the preheating furnace (1), and a rear lifter (16) is fixedly connected to the other side of the preheating furnace; a front furnace door (13) is connected to the side wall of one side of the preheating furnace (1) in a sliding manner, and a rear furnace door (14) is connected to the side wall of the other side of the preheating furnace in a sliding manner; the front lifting machine (15) is connected with the front furnace door (13), and the rear lifting machine (16) is connected with the rear furnace door (14); a conveying mechanism (17) is arranged in the preheating furnace (1); an intracavity heater (18) is arranged at the bottom end of the inner wall of the preheating furnace (1); and an axial flow fan is arranged at the top end of the preheating furnace 1.

2. A pass-through furnace for an ALD apparatus according to claim 1, characterized in that: and the inner walls of the front furnace door (13) and the rear furnace door (14) are respectively provided with a first heater (19).

3. A furnace for a pass-through type heating furnace for an ALD apparatus according to claim 2, characterized in that: the conveying mechanism (17) comprises a transmission shaft (2) and an annular conveying belt (22); one end of each of the transmission shafts (2) is rotatably connected to the inner wall of the preheating furnace (1), and the other end of each of the transmission shafts is fixedly connected with a chain wheel (21); a chain (23) is fixedly connected to the inner wall of the annular conveying belt (22); the chain wheel (21) and the chain (23) are meshed with each other; the side walls of two sides of the preheating furnace (1) are fixedly connected with fixing plates (25) through first fixing columns (24); the transmission shaft (2) penetrates through the fixing plate (25) and is rotatably connected to the fixing plate (25); a group of fixed blocks (27) are fixedly connected to the side walls of the two sides of the annular conveying belt (22) through second fixed columns (26); a first through groove (31) is formed in the middle of the fixing block (27), and a first connecting column (29) is connected in the first through groove (31) in a sliding mode; the end part of the first connecting column (29) close to the fixed plate (25) is fixedly connected with an arc-shaped block (3), and the other end of the first connecting column is fixedly connected with an extrusion plate (28); the arc-shaped block (3) is fixedly connected to the side wall of the fixed block (27) through a spring; the fixed plate (25) pushes the arc-shaped block (3) to move towards the fixed block (27) through the pushing assembly.

4. A pass-through furnace for an ALD apparatus according to claim 3, characterized in that: the pushing assembly comprises a first plane (32), a first inclined plane (33) and a second plane (34); a first plane (32) is arranged in the middle of the opposite surfaces of the pair of fixed plates (25); the opposite surfaces of the pair of fixed plates (25) are provided with second planes (34) close to the two ends; the first plane (32) and the second plane (34) are connected with each other through a first inclined plane (33); the linear distance between the first plane (32) and the side wall of the endless conveyor (22) is smaller than the linear distance between the second plane (34) and the side wall of the endless conveyor (22).

5. A flow-through furnace for an ALD apparatus according to claim 4, characterized in that: and a group of corrugated grooves (35) are formed in the side wall, close to the annular conveyor belt (22), of the extrusion plate (28).

6. A flow-through furnace for an ALD apparatus according to claim 5, characterized in that: an air outlet cavity (39) is formed in the convex block of the corrugated groove (35); a first air outlet hole (391) is formed in the side wall, close to the corrugated groove (35), of the air outlet cavity (39); a first cavity (36) is formed in the fixed block (27); the inner wall of the first cavity (36) is in sealed sliding connection with a sliding plate (37); a third fixing column (38) is fixedly connected to the side wall of the sliding plate (37) close to the extrusion plate (28); the third fixing column (38) penetrates through the first cavity (36) and is fixedly connected to the extrusion plate (28); the first cavity (36) and the air outlet cavity (39) are communicated with each other through a hose; the hose is located on a side wall of the first cavity (36) near the squeeze plate (28) at a communication point of the first cavity (36).

7. A flow-through furnace for an ALD apparatus according to claim 6, characterized in that: the first connecting column (29) comprises a second connecting rod (4) and a T-shaped rod (42); one end of the second connecting rod (4) is fixedly connected to the arc-shaped block (3), and the other end of the second connecting rod is provided with a T-shaped groove (41); a T-shaped rod (42) is fixedly connected to the bottom of the T-shaped groove (41) through a spring; the end of the T-shaped rod (42) is fixedly connected to the extrusion plate (28).

8. A furnace for a pass-through type furnace for ALD apparatus according to claim 7, wherein: a pair of symmetrical arc-shaped elastic sheets (43) is fixedly connected in the groove of the corrugated groove (35); the pair of arc-shaped elastic sheets (43) are bent back to back.

9. A furnace for a flow-through type furnace for an ALD apparatus according to claim 8, characterized in that: a second cavity (44) is formed in the extrusion plate (28) at the position corresponding to the groove of the corrugated groove (35); a sliding plate (45) is connected in the second cavity (44) in a sliding manner; the sliding plate (45) is connected with the bent inner wall of the arc-shaped elastic sheet (43) through a first string (46); the end parts of the second connecting rods (4) are communicated with each other through second strings (47) and sliding plates (45); and a rounded corner is arranged at the opening of the first through groove (31) close to the extrusion plate (28).

10. A furnace for a flow-through type furnace for an ALD apparatus according to claim 9, characterized in that: a group of pressing blocks (48) are fixedly connected to the bent outer side wall of the arc-shaped elastic sheet (43); the pressing block (48) is made of a soft graphite packing; the section of the pressing block (48) is arc-shaped; a hollow cavity (5) is formed in the pressing block (48); and a second air outlet hole (51) is formed in the top end of the hollow cavity (5).