CN113960149A - Bearing device, equipment and method for FIB-SIMS interconnection experiment - Google Patents
Bearing device, equipment and method for FIB-SIMS interconnection experiment Download PDFInfo
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- CN113960149A CN113960149A CN202010682805.4A CN202010682805A CN113960149A CN 113960149 A CN113960149 A CN 113960149A CN 202010682805 A CN202010682805 A CN 202010682805A CN 113960149 A CN113960149 A CN 113960149A
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- 238000002474 experimental method Methods 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims abstract description 16
- 238000012360 testing method Methods 0.000 claims abstract description 57
- 230000007246 mechanism Effects 0.000 claims description 8
- 230000009471 action Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
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- 238000012546 transfer Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/286—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/286—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
- G01N2001/2873—Cutting or cleaving
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Abstract
The invention discloses a bearing device, which comprises: the base comprises a bottom groove plate and a side groove plate, and the bottom groove plate and the side groove plate are connected with each other to form an accommodating groove in a surrounding mode; the bearing plate is arranged on the side groove plate so as to be capable of closing the opening of the accommodating groove and comprises a connecting end part and a free end part which are opposite, and the connecting end part is hinged to the side groove plate; and an adjusting member, which is partially arranged in the accommodating groove from the outside of the base through the side groove plate to adjust the free end part, so that the free end part moves relative to the opening. The invention also discloses equipment and a method for FIB-SIMS interconnection experiments by utilizing the bearing device. The invention solves the problem that the accuracy of the SIMS test result is influenced by the sample holder with a fixed inclination angle in the existing FIB-SIMS interconnection experiment.
Description
Technical Field
The invention relates to the technical field of vacuum experiments, in particular to a bearing device, equipment and a method for FIB-SIMS interconnection experiments.
Background
The artificial vacuum environment can realize local ultra-clean environment, and has important significance for growth and preparation of specific materials or experimental environment of specific experiments. Such as the growth of semiconductor wafers, the fabrication and testing of semiconductor devices, and microscopic inspection, are all performed in an artificial vacuum environment.
In order to facilitate experiments such as the growth of research materials, the manufacture of devices, performance tests and the like which are continuously carried out in an artificial vacuum environment, a common mode at present is a vacuum interconnection system, wherein a vacuum pipeline is arranged between vacuum cavities with different purposes, so that the different vacuum cavities are mutually communicated, and a sample conveying device which is pushed by magnetic force is arranged in the vacuum pipeline to realize the sample transmission between the different vacuum cavities.
For example, FIB (Focused Ion beam) -SIMS (Secondary Ion Mass Spectrometry) interconnection experiments were performed using the above-described vacuum interconnection system. Wherein, the FIB is used for cutting the sample in the FIB testing chamber, and the sample is transferred to the SIMS testing chamber for SIMS testing after the cutting is finished. When a sample is cut in the FIB testing chamber, the bearing surface of the bearing table for fixing the sample is required to be in an inclined state to carry out normal cutting. Therefore, the sample holder adopted in the FIB-SIMS interconnection experiment at present has a sample bearing surface with a fixed inclination angle. However, when the SIMS test is performed, the most ideal state of the sample is a horizontal state. Although the sample can also be subjected to the SIMS test in a tilted state, the tilted state of the sample affects the accuracy of the SIMS test result.
Disclosure of Invention
In order to solve the defects in the prior art, the invention adopts the following technical scheme:
in one aspect of the present invention, there is provided a carrier apparatus, comprising:
the base comprises a bottom groove plate and a side groove plate, and the bottom groove plate and the side groove plate are connected with each other to form an accommodating groove in a surrounding mode;
the bearing plate is arranged on the side groove plate so as to be capable of closing the opening of the accommodating groove, and comprises opposite connecting end parts and free end parts, and the connecting end parts are hinged to the side groove plate;
an adjusting member partially disposed from outside the base through the side slot plate and inside the receiving slot to adjust the free end portion so that the free end portion moves relative to the opening.
Preferably, the side trough plates include a first trough side plate, a second trough side plate and a third trough side plate;
the first groove side plate and the second groove side plate are arranged to face each other, the third groove side plate is connected between the first groove side plate and the second groove side plate and is positioned at a first side end of the first groove side plate and a first side end of the second groove side plate, the first side end of the first groove side plate and the first side end of the second groove side plate are positioned at the same side, and a second side end of the first groove side plate opposite to the first side end thereof and a second side end of the second groove side plate opposite to the first side end thereof are positioned at the same side;
the third groove side plate is provided with a first through hole, and part of the adjusting piece penetrates through the first through hole from the outside of the base and is arranged in the accommodating groove;
the connecting end part of the bearing plate is hinged to the second side end of the first groove side plate and the second side end of the second groove side plate.
Preferably, a second side end of the first slot side plate and a second side end of the second slot side plate are respectively provided with a connecting hole, and a through hole is formed in the connecting end part of the bearing plate;
the bearing device further comprises a hinge shaft, and the hinge shaft penetrates through the connecting hole and the through hole so that the connecting end part of the bearing plate is hinged to the second side end of the first groove side plate and the second side end of the second groove side plate.
Preferably, the adjusting member includes: a straight rod, an adjusting rod and a rotating cap; one axial end of the adjusting rod is connected to one axial end of the straight rod, the axial direction of the adjusting rod is intersected with the axial direction of the straight rod, and the rotating cap is connected to the other axial end of the straight rod;
wherein, under the condition that the adjusting rod is arranged in the accommodating groove, the rotating cap is arranged outside the base.
Preferably, the straight rod and the adjustment lever are integrally formed, and/or the straight rod and the rotation cap are threadedly connected.
Preferably, the spin cap comprises: a connecting piece and a rotating piece;
one axial end of the connecting piece is of a cylindrical structure, the inner wall of one axial end of the connecting piece is provided with an internal thread, the outer wall of the other axial end of the straight rod is provided with an external thread, and the internal thread is in threaded connection with the external thread; the rotary piece is connected to an end face of the other axial end of the connecting member.
Preferably, a normal of a plane where the rotating piece is located intersects with an axial direction of the adjusting rod, and/or the rotating piece is provided with a second through hole, and a central axis of the second through hole intersects with the axial direction of the adjusting rod.
Preferably, the carrying device further comprises: the movable mechanism can move, and the bottom groove plate of the base is arranged on the movable mechanism.
In another aspect of the present invention, there is provided an apparatus for FIB-SIMS interconnection experiments, the apparatus comprising: a FIB vacuum test chamber, a SIMS vacuum test chamber, a vacuum sample delivery conduit, and a carrier according to any one of claims 1 to 7;
wherein the FIB vacuum testing chamber and the SIMS vacuum testing chamber are communicated with each other through the vacuum sample conveying pipeline, and the bearing device is moved from the FIB vacuum testing chamber to the SIMS vacuum testing chamber through the vacuum sample conveying pipeline;
under the condition that the bearing device is positioned in the FIB vacuum test chamber, the free end part of the bearing plate of the bearing device is far away from the opening of the containing groove, so that the bearing surface of the bearing plate is adjusted to be in an inclined state; under the condition that the bearing device is positioned in the SIMS vacuum test chamber, the free end part of the bearing plate of the bearing device seals the opening of the accommodating groove, so that the bearing surface of the bearing plate is adjusted to be in a horizontal state.
In a further aspect of the present invention there is provided a method for FIB-SIMS interconnection experiments, characterized in that said method is carried out using the apparatus of claim 9 as follows:
placing a sample on the bearing surface of the bearing device, and adjusting the bearing surface of the bearing device to be in an inclined state;
placing the bearing device bearing the sample in the FIB vacuum test chamber to carry out FIB test;
moving the bearing device which carries the FIB test and bears the sample to the SIMS vacuum test chamber through the vacuum sample conveying pipeline;
and adjusting the bearing surface of the bearing device to be in a horizontal state in the SIMS vacuum test chamber, and carrying out the SIMS test.
The bearing device provided by the invention can adjust the inclination angle of the bearing surface according to the requirement, so that when the bearing device is applied to an FIB-SIMS interconnection experiment, the sample bearing surface in an inclined state is maintained in an FIB vacuum testing chamber, and the sample bearing surface in a horizontal state is maintained in an SIMS vacuum testing chamber, thereby improving the accuracy of an SIMS test result in the FIB-SIMS interconnection experiment.
Drawings
Fig. 1 is a schematic structural diagram of a carrying device in a state according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a carrying apparatus in another state according to an embodiment of the present invention;
FIG. 3 is an exploded view of a carrier according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of an apparatus for FIB-SIMS interconnection experiments according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention are described in detail below with reference to the accompanying drawings. Examples of these preferred embodiments are illustrated in the accompanying drawings. The embodiments of the invention shown in the drawings and described in accordance with the drawings are exemplary only, and the invention is not limited to these embodiments.
It should be noted that, in order to avoid obscuring the present invention with unnecessary details, only the structures and/or processing steps closely related to the scheme according to the present invention are shown in the drawings, and other details not so relevant to the present invention are omitted.
Example 1
The embodiment provides a carrying device, as shown in fig. 1 to 3, the carrying device includes a moving mechanism 1, a base 2, a carrying plate 3 and an adjusting member 4. As shown in fig. 3, the base 2 includes a bottom slot plate 21 and a side slot plate 22, the bottom slot plate 21 is disposed on the moving mechanism 1, and the bottom slot plate 21 and the side slot plate 22 are connected to form a receiving slot. The bearing plate 3 is arranged on the side groove plate 22 so as to be capable of sealing the opening of the accommodating groove; the carrier plate 3 comprises opposite attachment ends 31 and free ends 32, the attachment ends 31 being hinged to the side channel plates 22. A portion of the adjusting member 4 is disposed within the receiving slot from outside the base 2 through the side slot plate 22 to adjust the free end portion 32 such that the free end portion 32 moves relative to the opening. The carrying device of the embodiment has a walking function under the action of the moving mechanism 1. The moving mechanism 1 is preferably a magnetically propelled cart.
Preferably, as shown in fig. 3, the side groove plate 22 includes a first groove side plate 221, a second groove side plate 222, and a third groove side plate 223. The first and second slot side plates 221 and 222 are disposed to face each other. The third slot side plate 223 is connected between the first slot side plate 221 and the second slot side plate 222, and the third slot side plate 223 is located at a first side end of the first slot side plate 221 and a first side end of the second slot side plate 222. Wherein the first side end of the first slot side plate 221 and the first side end of the second slot side plate 222 are located on the same side; a second side end of the first slot side plate 221 opposite to the first side end thereof and a second side end of the second slot side plate 222 opposite to the first side end thereof are located at the same side.
Preferably, as shown in fig. 3, a second side end of the first slot side plate 221 and a second side end of the second slot side plate 222 are respectively provided with a connecting hole 224, and the connecting end portion 31 of the bearing plate 3 has a through hole 311 therein. The bearing device further includes a hinge shaft 5, and the hinge shaft 5 is inserted into the connection hole 224 and the through hole 311, so that the connection end 31 of the bearing plate 3 is hinged to the second side end of the first slot side plate 221 and the second side end of the second slot side plate 222.
Preferably, as shown in fig. 3, the third slot side plate 223 is provided with a first through hole 223a, and a portion of the adjusting member 4 passes through the first through hole 223a from outside the base 2 and is disposed in the receiving slot. Specifically, the adjusting member 4 includes a straight rod 41, an adjusting rod 42, and a rotating cap 43. One axial end of the adjusting rod 42 is connected to one axial end of the straight rod 41, the axial direction of the adjusting rod 42 intersects the axial direction of the straight rod 41, and the rotating cap 43 is connected to the other axial end of the straight rod 41. Wherein, under the condition that the adjusting rod 42 is arranged in the accommodating groove, the rotating cap 43 is arranged outside the base 2. The straight rod 41 and the adjusting rod 42 are preferably integrally formed, and the straight rod 41 and the rotating cap 43 are in threaded connection.
Preferably, as shown in fig. 3, the rotating cap 43 includes a connection member 431 and a rotating piece 432. One axial end of the connecting member 431 has a cylindrical structure, an inner wall of one axial end of the connecting member 431 has an internal thread (not shown in the drawings), and an outer wall of the other axial end of the straight rod 41 has an external thread, and the internal thread and the external thread are threadedly connected. The rotary piece 432 is connected to an end surface of the other axial end of the connecting member 431. Wherein, the normal of the plane of the rotating sheet 432 intersects with the axial direction of the adjusting rod 42. The rotating plate 432 further has a second through hole 432a, and a central axis of the second through hole 432a intersects with an axial direction of the adjusting rod 42.
The carrier device provided in this embodiment changes the tilting state of the carrier plate 3 by adjusting the adjusting member 4 according to actual needs, so as to change the position of the sample carried on the carrier device.
Example 2
The present embodiment provides an apparatus for FIB-SIMS interconnection experiments, as shown in fig. 4, the apparatus comprising: FIB vacuum test chamber 6, SIMS vacuum test chamber 7, vacuum sample feed line 8 and carrier A as described in example 1. The FIB vacuum test chamber 6 and the SIMS vacuum test chamber 7 are mutually communicated through the vacuum sample sending pipeline 8. The carrier A is moved from the FIB vacuum test chamber 6 to the SIMS vacuum test chamber 7 via the vacuum sample feed conduit 8;
under the condition that the bearing device a is located in the FIB vacuum testing chamber 6, the free end portion 32 of the bearing plate 3 of the bearing device a is far away from the opening of the accommodating groove, so that the bearing surface of the bearing plate 3 is adjusted to be in an inclined state, so as to perform ion beam cutting on the sample on the bearing device a;
after the step of the FIB vacuum test chamber 6 is completed, the carrier a reaches the SIMS vacuum test chamber 7 through the vacuum sample transfer line 8. In the case that the carrying device a is located in the SIMS vacuum testing chamber 7, the free end portion 32 of the carrying plate 3 of the carrying device a closes the opening of the receiving groove, so that the carrying surface of the carrying plate 3 is adjusted to be horizontal, so as to measure the sample on the carrying device a, thereby improving the accuracy of the SIMS test result.
The SIMS vacuum test chamber 7 is further provided with a robot arm (not shown) for rotating the spin cap of the carrier a.
Example 3
This example provides a method for FIB-SIMS interconnection experiments. The process was carried out using the apparatus described in example 2 as follows:
placing a sample on the bearing surface of the bearing device, and adjusting the bearing surface of the bearing device to be in an inclined state;
placing the bearing device bearing the sample in the FIB vacuum testing chamber 6 to carry out FIB testing;
moving the bearing device which carries the FIB-tested sample to the SIMS vacuum testing chamber 7 through the vacuum sample conveying pipeline 8;
and adjusting the bearing surface of the bearing device to be in a horizontal state in the SIMS vacuum testing chamber 7, and carrying out the SIMS test.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. A carrier, comprising:
the base comprises a bottom groove plate and a side groove plate, and the bottom groove plate and the side groove plate are connected with each other to form an accommodating groove in a surrounding mode;
the bearing plate is arranged on the side groove plate so as to be capable of closing the opening of the accommodating groove, and comprises opposite connecting end parts and free end parts, and the connecting end parts are hinged to the side groove plate;
an adjusting member partially disposed from outside the base through the side slot plate and inside the receiving slot to adjust the free end portion so that the free end portion moves relative to the opening.
2. The carrier in accordance with claim 1 wherein the side channel panels comprise a first channel side panel, a second channel side panel, and a third channel side panel;
the first groove side plate and the second groove side plate are arranged to face each other, the third groove side plate is connected between the first groove side plate and the second groove side plate and is positioned at a first side end of the first groove side plate and a first side end of the second groove side plate, the first side end of the first groove side plate and the first side end of the second groove side plate are positioned at the same side, and a second side end of the first groove side plate opposite to the first side end thereof and a second side end of the second groove side plate opposite to the first side end thereof are positioned at the same side;
the third groove side plate is provided with a first through hole, and part of the adjusting piece penetrates through the first through hole from the outside of the base and is arranged in the accommodating groove;
the connecting end part of the bearing plate is hinged to the second side end of the first groove side plate and the second side end of the second groove side plate.
3. The carrying device as claimed in claim 2, wherein the second side end of the first slot side plate and the second side end of the second slot side plate are respectively provided with a connecting hole, and the connecting end of the carrying plate is provided with a through hole;
the bearing device further comprises a hinge shaft, and the hinge shaft penetrates through the connecting hole and the through hole so that the connecting end part of the bearing plate is hinged to the second side end of the first groove side plate and the second side end of the second groove side plate.
4. The carrier as claimed in claim 1 wherein the adjustment member comprises: a straight rod, an adjusting rod and a rotating cap; one axial end of the adjusting rod is connected to one axial end of the straight rod, the axial direction of the adjusting rod is intersected with the axial direction of the straight rod, and the rotating cap is connected to the other axial end of the straight rod;
wherein, under the condition that the adjusting rod is arranged in the accommodating groove, the rotating cap is arranged outside the base.
5. The carrying device according to claim 4, wherein the straight rod and the adjustment rod are integrally formed and/or the straight rod and the swivel cap are threadedly connected.
6. The carrier according to claim 4 or 5 wherein the swivel cap comprises: a connecting piece and a rotating piece;
one axial end of the connecting piece is of a cylindrical structure, the inner wall of one axial end of the connecting piece is provided with an internal thread, the outer wall of the other axial end of the straight rod is provided with an external thread, and the internal thread is in threaded connection with the external thread; the rotary piece is connected to an end face of the other axial end of the connecting member.
7. The carrying device as claimed in claim 6, wherein the normal line of the plane of the rotating plate intersects with the axial direction of the adjusting rod, and/or the rotating plate has a second through hole, and the central axis of the second through hole intersects with the axial direction of the adjusting rod.
8. The carrier as claimed in claim 1, further comprising: the movable mechanism can move, and the bottom groove plate of the base is arranged on the movable mechanism.
9. An apparatus for FIB-SIMS interconnect experiments, the apparatus comprising: a FIB vacuum test chamber, a SIMS vacuum test chamber, a vacuum sample delivery conduit, and a carrier according to any one of claims 1 to 7;
wherein the FIB vacuum testing chamber and the SIMS vacuum testing chamber are communicated with each other through the vacuum sample conveying pipeline, and the bearing device is moved from the FIB vacuum testing chamber to the SIMS vacuum testing chamber through the vacuum sample conveying pipeline;
under the condition that the bearing device is positioned in the FIB vacuum test chamber, the free end part of the bearing plate of the bearing device is far away from the opening of the containing groove, so that the bearing surface of the bearing plate is adjusted to be in an inclined state; under the condition that the bearing device is positioned in the SIMS vacuum test chamber, the free end part of the bearing plate of the bearing device seals the opening of the accommodating groove, so that the bearing surface of the bearing plate is adjusted to be in a horizontal state.
10. A method for FIB-SIMS interconnection experiments, characterized in that said method is carried out using the apparatus of claim 9, as follows:
placing a sample on the bearing surface of the bearing device, and adjusting the bearing surface of the bearing device to be in an inclined state;
placing the bearing device bearing the sample in the FIB vacuum test chamber to carry out FIB test;
moving the bearing device which carries the FIB test and bears the sample to the SIMS vacuum test chamber through the vacuum sample conveying pipeline;
and adjusting the bearing surface of the bearing device to be in a horizontal state in the SIMS vacuum test chamber, and carrying out the SIMS test.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010682805.4A CN113960149B (en) | 2020-07-15 | 2020-07-15 | Bearing device, equipment and method for FIB-SIMS interconnection experiment |
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| CN202010682805.4A CN113960149B (en) | 2020-07-15 | 2020-07-15 | Bearing device, equipment and method for FIB-SIMS interconnection experiment |
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| CN113960149B CN113960149B (en) | 2024-07-12 |
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Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001000334A1 (en) * | 1999-06-25 | 2001-01-04 | Electro Scientific Industries, Inc. | Electronic component handler |
| CN1700017A (en) * | 2005-06-29 | 2005-11-23 | 中国科学院物理研究所 | Super high vacuum system sample feeding apparatus |
| KR200406312Y1 (en) * | 2005-03-23 | 2006-01-20 | 진-짜이 쳉 | Various Electrical Characteristics and Small Test Point Testing Module |
| JP2007262714A (en) * | 2006-03-28 | 2007-10-11 | Kaneso Co Ltd | Support member for level adjusting lever of drain trough |
| JP2018163109A (en) * | 2017-03-27 | 2018-10-18 | 日本製紙株式会社 | Sample holder for cross-sectional sample preparation device |
| CN108728800A (en) * | 2017-04-24 | 2018-11-02 | 中国科学院物理研究所 | For the Multifunctional treatment device in vacuum environment |
| CN109100186A (en) * | 2018-05-05 | 2018-12-28 | 青岛市中心医院 | Tumor biopsy materials tool |
| CN208399405U (en) * | 2018-06-28 | 2019-01-18 | 西门子中压开关技术（无锡）有限公司 | Detection device for vacuum interrupter |
| CN109342146A (en) * | 2018-11-30 | 2019-02-15 | 河海大学 | A kind of prismatical joint rock mass sample chemical cleavage device with angle |
| CN208580112U (en) * | 2018-06-21 | 2019-03-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of sample transfer device |
| CN208780528U (en) * | 2018-08-01 | 2019-04-23 | 武汉科技大学 | Petrophysical model test specimen inclination angle producing device |
| CN209352398U (en) * | 2019-01-14 | 2019-09-06 | 江苏省特种设备安全监督检验研究院 | A kind of variable cross-section car guide rail |
| CN210755438U (en) * | 2019-03-01 | 2020-06-16 | 天津塞维拉电梯轨道***有限公司 | Centering conveying device for T-shaped track |
| KR102124161B1 (en) * | 2020-01-21 | 2020-06-18 | 주식회사 명성기업 | A bookshelf with a combination of depth adjuster and tilt support |
| CN211018005U (en) * | 2019-10-31 | 2020-07-14 | 甘肃西电电气集团有限公司 | Novel middle-arranged high-voltage switch cabinet |
-
2020
- 2020-07-15 CN CN202010682805.4A patent/CN113960149B/en active Active
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001000334A1 (en) * | 1999-06-25 | 2001-01-04 | Electro Scientific Industries, Inc. | Electronic component handler |
| KR200406312Y1 (en) * | 2005-03-23 | 2006-01-20 | 진-짜이 쳉 | Various Electrical Characteristics and Small Test Point Testing Module |
| CN1700017A (en) * | 2005-06-29 | 2005-11-23 | 中国科学院物理研究所 | Super high vacuum system sample feeding apparatus |
| JP2007262714A (en) * | 2006-03-28 | 2007-10-11 | Kaneso Co Ltd | Support member for level adjusting lever of drain trough |
| JP2018163109A (en) * | 2017-03-27 | 2018-10-18 | 日本製紙株式会社 | Sample holder for cross-sectional sample preparation device |
| CN108728800A (en) * | 2017-04-24 | 2018-11-02 | 中国科学院物理研究所 | For the Multifunctional treatment device in vacuum environment |
| CN109100186A (en) * | 2018-05-05 | 2018-12-28 | 青岛市中心医院 | Tumor biopsy materials tool |
| CN208580112U (en) * | 2018-06-21 | 2019-03-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of sample transfer device |
| CN208399405U (en) * | 2018-06-28 | 2019-01-18 | 西门子中压开关技术（无锡）有限公司 | Detection device for vacuum interrupter |
| CN208780528U (en) * | 2018-08-01 | 2019-04-23 | 武汉科技大学 | Petrophysical model test specimen inclination angle producing device |
| CN109342146A (en) * | 2018-11-30 | 2019-02-15 | 河海大学 | A kind of prismatical joint rock mass sample chemical cleavage device with angle |
| CN209352398U (en) * | 2019-01-14 | 2019-09-06 | 江苏省特种设备安全监督检验研究院 | A kind of variable cross-section car guide rail |
| CN210755438U (en) * | 2019-03-01 | 2020-06-16 | 天津塞维拉电梯轨道***有限公司 | Centering conveying device for T-shaped track |
| CN211018005U (en) * | 2019-10-31 | 2020-07-14 | 甘肃西电电气集团有限公司 | Novel middle-arranged high-voltage switch cabinet |
| KR102124161B1 (en) * | 2020-01-21 | 2020-06-18 | 주식회사 명성기업 | A bookshelf with a combination of depth adjuster and tilt support |
Non-Patent Citations (3)
| Title |
|---|
| MINGJING JIANG ET: "Study of mechanical behavior and strain localization of methane hydrate bearing sediments with different saturations by a new DEM model", 《COMPUTERS AND GEOTECHNICS》, vol. 57, 31 December 2014 (2014-12-31), pages 122 - 138 * |
| 任国强 等，: "氮化镓单晶的液相生长", 《人工晶体学报》, vol. 49, no. 11, 30 November 2020 (2020-11-30), pages 2024 - 2037 * |
| 钟智: "承载板法在道路检测中的应用研究", 《道路工程》, no. 5, 31 December 2019 (2019-12-31), pages 1 - 3 * |
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