CN113959424A - Orthogonal real-time correction method and device for micromechanical gyroscope and related components - Google Patents
Orthogonal real-time correction method and device for micromechanical gyroscope and related components Download PDFInfo
- Publication number
- CN113959424A CN113959424A CN202111233122.1A CN202111233122A CN113959424A CN 113959424 A CN113959424 A CN 113959424A CN 202111233122 A CN202111233122 A CN 202111233122A CN 113959424 A CN113959424 A CN 113959424A
- Authority
- CN
- China
- Prior art keywords
- orthogonal
- amplitude
- feedback signal
- signal
- quadrature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 45
- 238000001514 detection method Methods 0.000 claims abstract description 29
- 230000033228 biological regulation Effects 0.000 claims abstract description 27
- 238000006073 displacement reaction Methods 0.000 claims abstract description 12
- 230000004044 response Effects 0.000 claims description 25
- 238000001914 filtration Methods 0.000 claims description 14
- 238000004590 computer program Methods 0.000 claims description 10
- 230000008569 process Effects 0.000 claims description 10
- 230000005284 excitation Effects 0.000 claims description 6
- 238000003860 storage Methods 0.000 claims description 4
- 230000008859 change Effects 0.000 abstract description 10
- 230000010363 phase shift Effects 0.000 description 8
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000001629 suppression Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
Landscapes
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The application discloses an orthogonal real-time correction method, equipment and related components of a micromechanical gyroscope, which are applied to the micromechanical gyroscope under force balance closed-loop detection and comprise the following steps: acquiring an electric signal of the current sensitive mode vibration displacement; determining an amplitude of a quadrature feedback signal using the electrical signal; carrying out PI regulation on the amplitude of the orthogonal feedback signal to obtain an orthogonal correction voltage; the quadrature correction voltage is applied to a quadrature correction electrode of a micromechanical gyroscope to reduce an amplitude of the quadrature feedback signal. The orthogonal correction voltage applied to the orthogonal correction electrode is determined by acquiring the real-time electric signal, the orthogonal error is adjusted in real time, and therefore the amplitude of the orthogonal feedback signal is reduced as far as possible, the interference of the orthogonal error on zero-offset output is restrained, and high stability under the change of the ambient temperature is achieved.
Description
Technical Field
The invention relates to the field of micromechanical gyroscopes, in particular to an orthogonal real-time correction method and equipment of a micromechanical gyroscope and a related component.
Background
A silicon Micro-Mechanical-System (MEMS) vibratory gyroscope, referred to as a Micro-Mechanical gyroscope for short, has the advantages of small size, light weight, low cost, and the like, and has a wide application prospect in the military and civil fields. Zero bias stability is an important performance index of the micromechanical gyroscope. Due to the fact that the micro-machining manufacturing process is not complete, the uniformity of the structure is difficult to control, damping coupling and rigidity coupling interference are inevitably caused, and in-phase errors and quadrature errors are formed. Ideally, the interference of the quadrature error can be eliminated by 90 ° demodulation. However, in the actual gyro measurement and control circuit, phase shifts are generated, which cause the driving mode to work in a non-resonant state, and for Force to balance (FTR) closed loop detection, the orthogonal channel and the coriolis channel are coupled with each other, thereby causing interference to Zero offset (Zero Rate Output, Zero). Therefore, under the closed-loop detection of FTR, the zero offset output is interfered by the quadrature error and the circuit phase shift, which is an important cause of zero offset drift.
At present, the suppression technology for the influence of circuit phase shift is usually one-time phase compensation. However, the circuit phase shift varies slightly with the ambient temperature, and the original phase compensation is no longer suitable. If the orthogonal error fluctuation is obvious, the small phase change can cause the zero offset to generate large drift; the orthogonal correction is similar to the above, and is one-time rigidity correction, which cannot meet the requirement of environmental change.
Therefore, how to provide a solution to the above technical problems is a problem to be solved by those skilled in the art.
Disclosure of Invention
In view of the above, the present invention provides a method and apparatus for orthogonal real-time calibration of a micro-mechanical gyroscope, and related components. The specific scheme is as follows:
an orthogonal real-time correction method of a micromechanical gyroscope is applied to the micromechanical gyroscope under force balance closed-loop detection, and comprises the following steps:
acquiring an electric signal of the current sensitive mode vibration displacement;
determining an amplitude of a quadrature feedback signal using the electrical signal;
carrying out PI regulation on the amplitude of the orthogonal feedback signal to obtain an orthogonal correction voltage;
the quadrature correction voltage is applied to a quadrature correction electrode of a micromechanical gyroscope to reduce an amplitude of the quadrature feedback signal.
Preferably, the process of determining the amplitude of the quadrature feedback signal using the electrical signal includes:
performing quadrature demodulation on the electric signal, and then performing low-pass filtering to obtain the amplitude of a quadrature response signal;
and performing PI regulation on the amplitude of the orthogonal response signal to obtain the amplitude of an orthogonal feedback signal.
Preferably, the determining the amplitude of the quadrature feedback signal by using the electrical signal further includes:
carrying out in-phase demodulation on the electric signal, and then carrying out low-pass filtering to obtain the amplitude of the Coriolis response signal;
performing PI regulation on the amplitude of the Coriolis response signal to obtain the amplitude of a Coriolis feedback signal;
correspondingly, after the determining the amplitude of the quadrature feedback signal by using the electrical signal, the method further includes:
carrying out in-phase modulation on the amplitude of the orthogonal feedback signal to obtain a modulated orthogonal feedback signal, and carrying out orthogonal modulation on the amplitude of the Coriolis feedback signal to obtain a modulated Coriolis feedback signal;
superposing the modulated orthogonal feedback signal and the modulated Coriolis feedback signal to obtain a total balance force signal;
applying the total balanced force signal to an excitation electrode of the micromachined gyroscope.
Preferably, the process of performing PI adjustment on the amplitude of the quadrature feedback signal to obtain the quadrature correction voltage specifically includes:
and performing PI regulation on the amplitude of the orthogonal feedback signal and superposing a bias voltage to obtain an orthogonal correction voltage.
Correspondingly, the application also discloses an orthogonal real-time correction device of the micromechanical gyroscope, which is applied to the micromechanical gyroscope under the force balance closed-loop detection, and comprises the following components:
the displacement signal pickup circuit is used for acquiring an electric signal of the current sensitive modal vibration displacement;
the force balance closed loop detection module is used for carrying out the force balance closed loop detection and determining the amplitude of the orthogonal feedback signal by utilizing the electric signal;
and the orthogonal correction module is used for performing PI adjustment on the amplitude of the orthogonal feedback signal to obtain an orthogonal correction voltage, and applying the orthogonal correction voltage to an orthogonal correction electrode of the micromechanical gyroscope to reduce the amplitude of the orthogonal feedback signal.
Preferably, the force balance closed loop detection module comprises:
a first demodulator for quadrature demodulating the electrical signal;
the first filter is used for carrying out low-pass filtering on the electric signal after quadrature demodulation to obtain the amplitude of a quadrature response signal;
and the first PI controller is used for carrying out PI regulation on the amplitude of the orthogonal response signal to obtain the amplitude of the orthogonal feedback signal.
Preferably, the force balance closed loop detection module further comprises:
a second demodulator for demodulating the electrical signal in phase;
the second filter is used for carrying out low-pass filtering on the electric signal after in-phase demodulation to obtain the amplitude of the Coriolis response signal;
the second PI controller is used for carrying out PI regulation on the amplitude of the Coriolis response signal to obtain the amplitude of the Coriolis feedback signal;
the first modulator is used for carrying out in-phase modulation on the amplitude of the quadrature feedback signal to obtain a modulated quadrature feedback signal;
the second modulator is used for carrying out quadrature modulation on the amplitude of the Coriolis feedback signal to obtain a modulated Coriolis feedback signal;
and the first adder is used for superposing the modulated orthogonal feedback signal and the modulated Coriolis feedback signal to obtain a total balance force signal and applying the total balance force signal to an excitation electrode of the micromechanical gyroscope.
Preferably, the orthogonality correction module includes:
the third PI controller is used for carrying out PI regulation on the amplitude of the orthogonal feedback signal;
a bias voltage source for generating a bias voltage;
and the second adder is used for superposing the bias voltage and the output voltage of the third PI controller to obtain an orthogonal correction voltage, and applying the orthogonal correction voltage to an orthogonal correction electrode of the micromechanical gyroscope to reduce the amplitude of the orthogonal feedback signal.
Correspondingly, the application also discloses an orthogonal real-time correction device of the micromechanical gyroscope, which comprises:
a memory for storing a computer program;
a processor for implementing the steps of the method for orthogonal real-time correction of a micromechanical gyroscope according to any one of the preceding claims when executing said computer program.
Accordingly, the present application also discloses a readable storage medium having stored thereon a computer program which, when being executed by a processor, implements the steps of the method for orthogonal real-time correction of a micromechanical gyroscope according to any one of the above.
The application discloses an orthogonal real-time correction method of a micromechanical gyroscope, which is applied to the micromechanical gyroscope under the force balance closed-loop detection and comprises the following steps: acquiring an electric signal of the current sensitive mode vibration displacement; determining an amplitude of a quadrature feedback signal using the electrical signal; carrying out PI regulation on the amplitude of the orthogonal feedback signal to obtain an orthogonal correction voltage; the quadrature correction voltage is applied to a quadrature correction electrode of a micromechanical gyroscope to reduce an amplitude of the quadrature feedback signal. The orthogonal correction voltage applied to the orthogonal correction electrode is determined by acquiring the real-time electric signal, the orthogonal error is adjusted in real time, and therefore the amplitude of the orthogonal feedback signal is reduced as far as possible, the interference of the orthogonal error on zero-offset output is restrained, and high stability under the change of the ambient temperature is achieved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a flowchart illustrating a method for orthogonal real-time calibration of a micro-machined gyroscope according to an embodiment of the present invention;
FIG. 2 is a control block diagram of a method for orthogonal real-time calibration of a micromachined gyroscope according to an embodiment of the present invention;
fig. 3 is a structural distribution diagram of an orthogonal real-time calibration apparatus of a micro-mechanical gyroscope according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
At present, the suppression technology for the influence of circuit phase shift is usually one-time phase compensation. However, the circuit phase shift varies slightly with the ambient temperature, and the original phase compensation is no longer suitable. If the orthogonal error fluctuation is obvious, the small phase change can cause the zero offset to generate large drift; the orthogonal correction is similar to the above, and is one-time rigidity correction, which cannot meet the requirement of environmental change.
The orthogonal correction voltage applied to the orthogonal correction electrode is determined by acquiring the real-time electric signal, the orthogonal error is adjusted in real time, and therefore the amplitude of the orthogonal feedback signal is reduced as far as possible, the interference of the orthogonal error on zero-offset output is restrained, and high stability under the change of the ambient temperature is achieved.
The embodiment of the invention discloses an orthogonal real-time correction method of a micromechanical gyroscope, which is applied to the micromechanical gyroscope of Force to balance closed loop detection (FTR), and as shown in figure 1, the orthogonal real-time correction method comprises the following steps:
s1: acquiring an electric signal of the current sensitive mode vibration displacement;
s2: determining the amplitude of the quadrature feedback signal using the electrical signal;
s3: carrying out PI regulation on the amplitude of the orthogonal feedback signal to obtain an orthogonal correction voltage;
s4: an orthogonal correction voltage is applied to an orthogonal correction electrode of the micromechanical gyroscope to reduce the amplitude of the orthogonal feedback signal.
Specifically, the process of signal transformation is as shown in fig. 2, and the process of acquiring the electrical signal in step S1 includes: in a sensitive mode, acquiring an initial signal of an output electrode, and finally obtaining an available electric signal by passing the initial signal through a charge transfer circuit, a high-pass filter, a detector and an amplifier;
specifically, the process of determining the amplitude of the quadrature feedback signal using the electrical signal in step S2 includes:
carrying out quadrature demodulation on the electric signal, and then carrying out low-pass filtering to obtain the amplitude of a quadrature response signal;
performing PI regulation on the amplitude of the orthogonal response signal to obtain the amplitude V of the orthogonal feedback signalq。
Further, while the step S2 determines the amplitude of the quadrature feedback signal by using the electrical signal, the method further includes:
carrying out in-phase demodulation on the electric signals, and then carrying out low-pass filtering to obtain the amplitude of the Coriolis response signal;
performing PI regulation on the amplitude of the Coriolis response signal to obtain the amplitude V of the Coriolis feedback signalΩ；
Correspondingly, after the amplitude of the quadrature feedback signal is determined by using the electric signal, the method further comprises the following steps:
carrying out in-phase modulation on the amplitude of the orthogonal feedback signal to obtain a modulated orthogonal feedback signal, and carrying out orthogonal modulation on the amplitude of the Coriolis feedback signal to obtain a modulated Coriolis feedback signal;
superposing the modulated orthogonal feedback signal and the modulated Coriolis feedback signal to obtain a total balance force signal Vbalance；
The total balance force signal VbalanceTo the excitation electrodes of the micromechanical gyroscope.
Wherein the total balance force signal V is determined by means of an electrical signalbalanceI.e. two-way FTR closed loop detection, wherein the Coriolis feedback signal VΩAnd the angular velocity is output as the angular velocity of the micromechanical gyroscope through low-pass filtering.
According to the document "Effect of circuit phase delay on bias stability of MEMS gyroscope surface detection and self-compensation method", under the two-way FTR closed loop detection, when the detection circuits of the driving mode and the sensitive mode have the same phase shift, two ways of balanced force signals are obtained: quadrature feedback signal VqAnd a Coriolis feedback signal VΩThe balance force expression of (a) is respectively:
in the formula, VqAnd VΩIn particular the amplitude of the signal, and,
to drive modal phase shifts, AIIn the same phase of force amplitude, AqFor the amplitude of the orthogonal coupling force, KvfThe conversion coefficient of voltage to force in the micromechanical gyroscope.
For axisymmetric high Q gyros, AIGeneral ratio of AqBy a few orders of magnitude, negligible, the equilibrium force expression can be approximated as:
since the drive mode is phase controlled by a Phase Locked Loop (PLL), there is a
Wherein
Phase shift of the detection circuit in a sensitive mode.
Ideally, one-time circuit phase compensation would be
Compensated to approximately 0 deg. to reduce quadrature error nullingIn particular, when
So exist
And due to AqIs also generally much larger than AΩExistence of
The balance force expression above can be simplified as:
when the input angular rate Ω is 0, the zero-offset output is expressed as:
however, when the ambient temperature changes, the circuit phase shifts
Inevitably generates variation, so that the phase compensation of the original one-time circuit can not meet the compensation requirement, namely
While for high Q gyros, AqAlso, the temperature fluctuates greatly, resulting in
Is fluctuated, thereby having zero offset
Drift occurs.
To solve this problem, the present embodiment sets real-time compensation for zero offset, and in practice, the phase is to be compensated
It is very difficult to compensate to 0 ° in real time, where the amplitude a of the quadrature coupling force is chosenqAnd (3) restraining to 0 in real time, and specifically realizing the real-time correction through orthogonal rigidity, so that the high-stability output of the gyroscope under the change of the ambient temperature is achieved.
Specifically, the real-time correction of the orthogonal stiffness is realized by applying a direct current voltage, namely an orthogonal correction voltage V, to an orthogonal correction electrodeCThe rigidity coefficient of the harmonic oscillator in the direction is reduced, and the deviated vibration axis direction is corrected, so that the orthogonal error is reduced, namely the amplitude A of the orthogonal coupling forceqSuppressed to 0.
Since in the normal case, the quadrature correction voltage VCAmplitude of force coupled to quadratureqPresenting a negative correlation relationship; from the above are known
Thus the quadrature correction voltage VCWith the amplitude V of the quadrature feedback signalqAlso exhibits a negative correlation, based on which the voltage V can be corrected by quadratureCAdjusting the amplitude V of the quadrature feedback signalqTends to 0. Amplitude V of quadrature feedback signal when ambient temperature changesqIn response, the present embodiment adjusts the quadrature correction voltage V in real timeCSo that the amplitude V of the quadrature feedback signalqConstant at 0 while keeping the amplitude A of the orthogonal coupling forceqIs constant at 0, thereby realizing real-time suppression of orthogonal error interference.
Further, due to the quadrature correction voltage V required in practical applicationsCThe voltage output range of the digital controller is preferred, and a bias voltage V can be set to reduce the regulation amplitude during PI regulationbUnder the unchangeable condition of the regulation effect of guaranteeing quadrature correction voltage, the regulating variable to quadrature feedback signal reduces to reduced PI regulation power, improved regulation efficiency, also promptly, carry out PI regulation to quadrature feedback signal's amplitude, obtain the process of quadrature correction voltage, specifically include: to the orthogonalityThe amplitude of the feedback signal is subjected to PI regulation and superposed with a bias voltage VbTo obtain a quadrature correction voltage VC. Thereby expanding the quadrature correction voltage VCThe absolute voltage range of the controller also reduces the requirement on the voltage adjustable range of the controller during PI regulation.
The application discloses an orthogonal real-time correction method of a micromechanical gyroscope, which is applied to the micromechanical gyroscope under the force balance closed-loop detection and comprises the following steps: acquiring an electric signal of the current sensitive mode vibration displacement; determining an amplitude of a quadrature feedback signal using the electrical signal; carrying out PI regulation on the amplitude of the orthogonal feedback signal to obtain an orthogonal correction voltage; the quadrature correction voltage is applied to a quadrature correction electrode of a micromechanical gyroscope to reduce an amplitude of the quadrature feedback signal. The embodiment of the application determines the orthogonal correction voltage applied to the orthogonal correction electrode by acquiring the real-time electric signal, and adjusts the orthogonal error in real time, so that the amplitude of the orthogonal feedback signal is reduced as much as possible, the interference of the orthogonal error on zero-offset output is restrained, and high stability under the change of the ambient temperature is realized.
Correspondingly, the embodiment of the present application further discloses an orthogonal real-time calibration device for a micro-mechanical gyroscope, which is applied to a micro-mechanical gyroscope under the force balance closed-loop detection, and as shown in fig. 3, the orthogonal real-time calibration device includes:
the displacement signal pickup circuit 1 is used for acquiring an electric signal of the current sensitive modal vibration displacement;
the force balance closed loop detection module 2 is used for carrying out the force balance closed loop detection and determining the amplitude of the orthogonal feedback signal by using an electric signal;
and the orthogonal correction module 3 is used for performing PI adjustment on the amplitude of the orthogonal feedback signal to obtain an orthogonal correction voltage, and applying the orthogonal correction voltage to an orthogonal correction electrode of the micromechanical gyroscope to reduce the amplitude of the orthogonal feedback signal.
The embodiment of the application determines the orthogonal correction voltage applied to the orthogonal correction electrode by acquiring the real-time electric signal, and adjusts the orthogonal error in real time, so that the amplitude of the orthogonal feedback signal is reduced as much as possible, the interference of the orthogonal error on zero-offset output is restrained, and high stability under the change of the ambient temperature is realized.
In some specific embodiments, the unique signal pickup circuit 1 includes: a charge conversion circuit, a high-pass filter, a detector and an amplifier;
in some specific embodiments, the force balance closed loop detection module 2 includes:
a first demodulator 211 for quadrature-demodulating the electrical signal;
a first filter 212, configured to perform low-pass filtering on the quadrature-demodulated electrical signal to obtain an amplitude of the quadrature response signal;
and the first PI controller 213 is configured to perform PI adjustment on the amplitude of the quadrature response signal to obtain the amplitude of the quadrature feedback signal.
In some specific embodiments, the force balance closed loop detection module 2 further comprises:
a second demodulator 221 for demodulating the electric signal in phase;
a second filter 222, configured to perform low-pass filtering on the in-phase demodulated electrical signal to obtain an amplitude of the coriolis response signal;
the second PI controller 223 is configured to perform PI adjustment on the amplitude of the coriolis response signal to obtain the amplitude of the coriolis feedback signal;
a first modulator 214, configured to perform in-phase modulation on the amplitude of the quadrature feedback signal to obtain a modulated quadrature feedback signal;
the second modulator 224 is configured to perform quadrature modulation on the amplitude of the coriolis feedback signal to obtain a modulated coriolis feedback signal;
and the first adder 23 is configured to obtain a total balance force signal by superimposing the modulated quadrature feedback signal and the modulated coriolis feedback signal, and apply the total balance force signal to an excitation electrode of the micromechanical gyroscope.
In some specific embodiments, the force balance closed loop detection module 2 further comprises a third filter 225 for low pass filtering the coriolis feedback signal and outputting the angular rate.
In some specific embodiments, the orthogonality correction module 3 includes:
a third PI controller 31 for PI-adjusting the amplitude of the quadrature feedback signal;
a bias voltage source 32 for generating a bias voltage;
and a second adder 33 configured to add the bias voltage and the output voltage of the third PI controller 31 to obtain an orthogonal correction voltage, and apply the orthogonal correction voltage to an orthogonal correction electrode of the micromechanical gyroscope to reduce the amplitude of the orthogonal feedback signal.
Correspondingly, the embodiment of the application also discloses an orthogonal real-time correction device of the micromechanical gyroscope, which comprises:
a memory for storing a computer program;
a processor for implementing the steps of the method for orthogonal real-time correction of a micromechanical gyroscope according to any one of the preceding claims when executing said computer program.
Correspondingly, the embodiment of the application also discloses a readable storage medium, wherein a computer program is stored on the readable storage medium, and when the computer program is executed by a processor, the steps of the method for orthogonal real-time correction of the micromechanical gyroscope according to any one of the above items are realized.
In this embodiment, the details of the orthogonal real-time calibration method for the micro-mechanical gyroscope may refer to the description in the above embodiments, and are not repeated herein.
The orthogonal real-time correction device of the micro-mechanical gyroscope in the embodiment has the same technical effect as the orthogonal real-time correction method of the micro-mechanical gyroscope in the embodiment, and the details are not repeated here.
Finally, it should also be noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The method, the device and the related components for orthogonal real-time correction of the micromechanical gyroscope provided by the invention are described in detail, a specific example is applied in the description to explain the principle and the implementation mode of the invention, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
Claims (10)
1. The orthogonal real-time correction method of the micromechanical gyroscope is characterized in that the method is applied to the micromechanical gyroscope under the force balance closed-loop detection, and comprises the following steps:
acquiring an electric signal of the current sensitive mode vibration displacement;
determining an amplitude of a quadrature feedback signal using the electrical signal;
carrying out PI regulation on the amplitude of the orthogonal feedback signal to obtain an orthogonal correction voltage;
the quadrature correction voltage is applied to a quadrature correction electrode of a micromechanical gyroscope to reduce an amplitude of the quadrature feedback signal.
2. The method of claim 1, wherein the step of determining the amplitude of the quadrature feedback signal using the electrical signal comprises:
performing quadrature demodulation on the electric signal, and then performing low-pass filtering to obtain the amplitude of a quadrature response signal;
and performing PI regulation on the amplitude of the orthogonal response signal to obtain the amplitude of an orthogonal feedback signal.
3. The method of claim 2, wherein the determining the amplitude of the quadrature feedback signal using the electrical signal further comprises:
carrying out in-phase demodulation on the electric signal, and then carrying out low-pass filtering to obtain the amplitude of the Coriolis response signal;
performing PI regulation on the amplitude of the Coriolis response signal to obtain the amplitude of a Coriolis feedback signal;
correspondingly, after the determining the amplitude of the quadrature feedback signal by using the electrical signal, the method further includes:
carrying out in-phase modulation on the amplitude of the orthogonal feedback signal to obtain a modulated orthogonal feedback signal, and carrying out orthogonal modulation on the amplitude of the Coriolis feedback signal to obtain a modulated Coriolis feedback signal;
superposing the modulated orthogonal feedback signal and the modulated Coriolis feedback signal to obtain a total balance force signal;
applying the total balanced force signal to an excitation electrode of the micromachined gyroscope.
4. The method according to any one of claims 1 to 3, wherein the process of performing PI adjustment on the amplitude of the quadrature feedback signal to obtain the quadrature correction voltage specifically includes:
and performing PI regulation on the amplitude of the orthogonal feedback signal and superposing a bias voltage to obtain an orthogonal correction voltage.
5. An orthogonal real-time correction device of a micromechanical gyroscope is characterized in that the orthogonal real-time correction device is applied to the micromechanical gyroscope under force balance closed-loop detection, and comprises the following components:
the displacement signal pickup circuit is used for acquiring an electric signal of the current sensitive modal vibration displacement;
the force balance closed loop detection module is used for carrying out the force balance closed loop detection and determining the amplitude of the orthogonal feedback signal by utilizing the electric signal;
and the orthogonal correction module is used for performing PI adjustment on the amplitude of the orthogonal feedback signal to obtain an orthogonal correction voltage, and applying the orthogonal correction voltage to an orthogonal correction electrode of the micromechanical gyroscope to reduce the amplitude of the orthogonal feedback signal.
6. The apparatus of claim 5, wherein the force balance closed loop detection module comprises:
a first demodulator for quadrature demodulating the electrical signal;
the first filter is used for carrying out low-pass filtering on the electric signal after quadrature demodulation to obtain the amplitude of a quadrature response signal;
and the first PI controller is used for carrying out PI regulation on the amplitude of the orthogonal response signal to obtain the amplitude of the orthogonal feedback signal.
7. The apparatus of claim 6, wherein the force balance closed loop detection module further comprises:
a second demodulator for demodulating the electrical signal in phase;
the second filter is used for carrying out low-pass filtering on the electric signal after in-phase demodulation to obtain the amplitude of the Coriolis response signal;
the second PI controller is used for carrying out PI regulation on the amplitude of the Coriolis response signal to obtain the amplitude of the Coriolis feedback signal;
the first modulator is used for carrying out in-phase modulation on the amplitude of the quadrature feedback signal to obtain a modulated quadrature feedback signal;
the second modulator is used for carrying out quadrature modulation on the amplitude of the Coriolis feedback signal to obtain a modulated Coriolis feedback signal;
and the first adder is used for superposing the modulated orthogonal feedback signal and the modulated Coriolis feedback signal to obtain a total balance force signal and applying the total balance force signal to an excitation electrode of the micromechanical gyroscope.
8. The apparatus according to any one of claims 5 to 7, wherein the orthogonal correction module comprises:
the third PI controller is used for carrying out PI regulation on the amplitude of the orthogonal feedback signal;
a bias voltage source for generating a bias voltage;
and the second adder is used for superposing the bias voltage and the output voltage of the third PI controller to obtain an orthogonal correction voltage, and applying the orthogonal correction voltage to an orthogonal correction electrode of the micromechanical gyroscope to reduce the amplitude of the orthogonal feedback signal.
9. An orthogonal real-time calibration device for a micromechanical gyroscope, comprising:
a memory for storing a computer program;
processor for implementing the steps of the method for orthogonal real-time correction of a micromechanical gyroscope according to any one of claims 1 to 4 when executing said computer program.
10. A readable storage medium, characterized in that it has stored thereon a computer program which, when being executed by a processor, carries out the steps of the method for orthogonal real-time correction of micromechanical gyros according to any one of claims 1 to 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111233122.1A CN113959424B (en) | 2021-10-22 | 2021-10-22 | Orthogonal real-time correction method and device for micromechanical gyroscope and related components |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111233122.1A CN113959424B (en) | 2021-10-22 | 2021-10-22 | Orthogonal real-time correction method and device for micromechanical gyroscope and related components |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113959424A true CN113959424A (en) | 2022-01-21 |
| CN113959424B CN113959424B (en) | 2023-03-17 |
Family
ID=79466332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111233122.1A Active CN113959424B (en) | 2021-10-22 | 2021-10-22 | Orthogonal real-time correction method and device for micromechanical gyroscope and related components |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113959424B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117928508A (en) * | 2024-03-20 | 2024-04-26 | 四川图林科技有限责任公司 | Hemispherical resonator gyroscope standing wave azimuth angle resolving method in full-angle control mode |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102759365A (en) * | 2012-07-12 | 2012-10-31 | 中国人民解放军国防科学技术大学 | Bias stability improving method and device for silicon micromechanical gyroscope |
| CN103162680A (en) * | 2013-03-19 | 2013-06-19 | 中国人民解放军国防科学技术大学 | Silicon microgyroscope performance improving method and device based on force balance closed-loop control |
| CN103822623A (en) * | 2014-03-03 | 2014-05-28 | 中国兵器工业集团第二一四研究所苏州研发中心 | Quadrature error closed-loop compensating circuit for vibrating type silicon micromechanical gyroscope |
| CN111578923A (en) * | 2020-05-15 | 2020-08-25 | 中国人民解放军国防科技大学 | Closed-loop control method and system for resonant gyroscope |
| US20200408525A1 (en) * | 2019-06-26 | 2020-12-31 | Stmicroelectronics, Inc. | Mems gyroscope control circuit |
-
2021
- 2021-10-22 CN CN202111233122.1A patent/CN113959424B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102759365A (en) * | 2012-07-12 | 2012-10-31 | 中国人民解放军国防科学技术大学 | Bias stability improving method and device for silicon micromechanical gyroscope |
| CN103162680A (en) * | 2013-03-19 | 2013-06-19 | 中国人民解放军国防科学技术大学 | Silicon microgyroscope performance improving method and device based on force balance closed-loop control |
| CN103822623A (en) * | 2014-03-03 | 2014-05-28 | 中国兵器工业集团第二一四研究所苏州研发中心 | Quadrature error closed-loop compensating circuit for vibrating type silicon micromechanical gyroscope |
| US20200408525A1 (en) * | 2019-06-26 | 2020-12-31 | Stmicroelectronics, Inc. | Mems gyroscope control circuit |
| CN111578923A (en) * | 2020-05-15 | 2020-08-25 | 中国人民解放军国防科技大学 | Closed-loop control method and system for resonant gyroscope |
Non-Patent Citations (2)
| Title |
|---|
| 卜峰: "硅微机械轴对称陀螺测控技术与性能优化研究", 《中国博士学位论文全文数据库 工程科技Ⅱ辑》 * |
| 朱晓磊、郭述文、徐大诚、樊波、卜峰: "力平衡模式下MEMS陀螺正交误差实时校正***设计", 《传感器与微***》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117928508A (en) * | 2024-03-20 | 2024-04-26 | 四川图林科技有限责任公司 | Hemispherical resonator gyroscope standing wave azimuth angle resolving method in full-angle control mode |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113959424B (en) | 2023-03-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111578923B (en) | Closed-loop control method and system for resonant gyroscope | |
| KR102068973B1 (en) | System and method for gyroscope zero-rate-offset drift reduction through demodulation phase error correction | |
| CN108253952B (en) | Zero-bias self-calibration MEMS gyroscope and zero-bias self-calibration method thereof | |
| US9846055B2 (en) | Continuous mode reversal for rejecting drift in gyroscopes | |
| US9482553B2 (en) | Calibration systems and methods for gyroscopes | |
| CN110631570B (en) | System and method for improving temperature stability of silicon micro gyroscope scale factor | |
| WO2005103618A1 (en) | Gyroscope device | |
| US9574902B2 (en) | Calibration method for the scale factor of an axisymmetric vibratory gyroscope or gyrometer | |
| JP2006170620A (en) | Gyroscope sensor | |
| CN111551162B (en) | System and method for demodulating phase angle compensation of normal-pressure packaged MEMS gyroscope | |
| CN110482479B (en) | Simplified MEMS multi-ring resonance gyroscope self-adaptive closed-loop control method | |
| CN113532409B (en) | High-precision digital MEMS gyroscope control system and method | |
| CN113959424B (en) | Orthogonal real-time correction method and device for micromechanical gyroscope and related components | |
| TW201740084A (en) | Method for processing signals and device | |
| US10775169B2 (en) | Vibrating structure angular rate sensor | |
| CN111024056A (en) | High-dynamic-input MEMS gyroscope bandwidth expansion closed-loop control method | |
| TWI724127B (en) | Gyro device and control method of gyro device | |
| WO2012077314A1 (en) | Inertial force sensor | |
| CN116184815A (en) | Closed-loop control method and system for eliminating reset error of fiber optic gyroscope | |
| JP7302129B2 (en) | Gyro device and control method for gyro device | |
| JP2003247829A (en) | Angular velocity sensor | |
| Ma et al. | One-time frequency sweep to eliminate IQ coupling in MEMS vibratory gyroscopes | |
| US5533396A (en) | Vibrating gyroscope | |
| Su et al. | An improved driving control method for micro-machined vibratory gyroscope | |
| CN115507830A (en) | Control method, system and device of micromechanical gyroscope and storage medium |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231108 Address after: Room A401, Building 8, East Zone, Airport Business Park, No. 80 Huanhe North Road, Tianjin Pilot Free Trade Zone (Airport Economic Zone), Dongli District, Tianjin, 300300 Patentee after: Tianjin Xingdao Aerospace Technology Co.,Ltd. Address before: 1106C, Block A, Zhonghai Huanyu Business Center, No. 822 Qianmo Road, Xixing Street, Binjiang District, Hangzhou City, Zhejiang Province, 310051 Patentee before: Zhejiang Huaqi Huizhi Intellectual Property Service Co.,Ltd. Effective date of registration: 20231108 Address after: 1106C, Block A, Zhonghai Huanyu Business Center, No. 822 Qianmo Road, Xixing Street, Binjiang District, Hangzhou City, Zhejiang Province, 310051 Patentee after: Zhejiang Huaqi Huizhi Intellectual Property Service Co.,Ltd. Address before: 215104 106 International Education Park, Suzhou, Jiangsu. Patentee before: SUZHOU VOCATIONAL University |