CN113957417A - CVD fluidized deposition device and preparation method of silicon-carbon negative electrode material - Google Patents

CVD fluidized deposition device and preparation method of silicon-carbon negative electrode material Download PDF

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CN113957417A
CN113957417A CN202111070124.3A CN202111070124A CN113957417A CN 113957417 A CN113957417 A CN 113957417A CN 202111070124 A CN202111070124 A CN 202111070124A CN 113957417 A CN113957417 A CN 113957417A
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carbon
conveying mechanism
gas
silicon
reaction cavity
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汤刚
杨乐之
涂飞跃
肖可颂
罗磊
罗列科
彭青姣
方自力
陈涛
余林遇
覃事彪
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Changsha Research Institute of Mining and Metallurgy Co Ltd
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Changsha Research Institute of Mining and Metallurgy Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/442Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using fluidised bed process
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24Deposition of silicon only
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4417Methods specially adapted for coating powder
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
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    • H01M10/052Li-accumulators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/36Selection of substances as active materials, active masses, active liquids
    • H01M4/362Composites
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
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    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/36Selection of substances as active materials, active masses, active liquids
    • H01M4/38Selection of substances as active materials, active masses, active liquids of elements or alloys
    • H01M4/386Silicon or alloys based on silicon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/36Selection of substances as active materials, active masses, active liquids
    • H01M4/58Selection of substances as active materials, active masses, active liquids of inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy; of polyanionic structures, e.g. phosphates, silicates or borates
    • H01M4/583Carbonaceous material, e.g. graphite-intercalation compounds or CFx
    • H01M4/587Carbonaceous material, e.g. graphite-intercalation compounds or CFx for inserting or intercalating light metals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M2004/026Electrodes composed of, or comprising, active material characterised by the polarity
    • H01M2004/027Negative electrodes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

Abstract

The invention discloses a CVD fluidized deposition device and a preparation method of a silicon-carbon cathode material, wherein the CVD fluidized deposition device comprises a fluidized bed with a reaction cavity, a heating device for heating the reaction cavity and a collecting hopper for collecting the fluidized deposition material are arranged in the reaction cavity, the fluidized bed is connected with a carbon-based material conveying mechanism for conveying the carbon-based material into the reaction cavity, a gas-phase material conveying mechanism for conveying silicon source gas and reducing gas into the reaction cavity, a carrier gas conveying mechanism for inputting carrier gas into the reaction cavity and a negative pressure recovery assembly for recovering excess materials, a guide plate for dividing the reaction cavity into a fluidized cavity and a discharging cavity is arranged in the reaction cavity, the carbon-based material conveying mechanism, the gas-phase material conveying mechanism and the negative pressure recovery assembly are communicated with the fluidized cavity, and the carrier gas conveying mechanism is communicated with the discharging cavity. The CVD fluidized deposition device has the advantages of good coating, reliable work, high automation degree and high production efficiency.

Description

CVD fluidized deposition device and preparation method of silicon-carbon negative electrode material
Technical Field
The invention relates to the technical field of chemical vapor deposition equipment, in particular to a CVD fluidized deposition device and a preparation method of a silicon-carbon negative electrode material.
Background
Due to the advantages of high theoretical capacity (4200mAh/g), low discharge platform, abundant reserves and the like, the silicon negative electrode material becomes a new-generation negative electrode material which is most likely to replace the traditional graphite negative electrode material at present.
Silicon deposition is common in solar synthesis of polycrystalline or amorphous silicon by introducing Silane (SiH)4) Or (SiHCl)3) Silicon source is equalled, silicon is deposited on the surface of the silicon rod or the seed crystal grain and grows into a large shapeA silicon pillar or a silicon ingot. The reaction achieves the deposition effect by controlling the temperature, the atmosphere concentration and the pressure difference in the bell jar furnace, and realizes the deposition of the silicon rod with the silicon purity of more than 99.999 percent.
At present, the mainstream silicon negative electrode material synthesis scheme is relatively complex, and patent CN107785560A discloses a method for preparing a silicon-carbon negative electrode material by kneading and pressing, wherein the synthesis process comprises compounding carbon such as silicon and graphite, coating amorphous carbon such as asphalt, crushing, sieving, press-forming and the like; the synthesis process is complex, and although some problems in silicon carbon application can be solved to a certain extent, the process is complex, the equipment cost is high, and the preparation of nano silicon has an obvious capacity bottleneck.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a CVD fluidized deposition device which can realize better coating, is reliable in work, high in automation degree, high in production efficiency, simple and compact in structure and low in cost and a preparation method of a silicon-carbon negative electrode material.
In order to solve the technical problems, the invention adopts the following technical scheme:
the utility model provides a CVD fluidization deposition apparatus, is including the fluidized bed that has the reaction chamber, install the heating device who is used for heating the reaction chamber and be used for collecting the collection hopper that fluidizes the deposition material in the reaction chamber, the fluidized bed is connected with and is used for carrying carbon-based material conveying mechanism of carbon-based material in the reaction chamber, is used for carrying silicon source gas and gaseous material conveying mechanism of transport and is used for retrieving the negative pressure recovery subassembly in the reaction chamber to the reaction chamber, be equipped with in the reaction chamber and separate the reaction chamber for fluidization chamber and the guide plate in the play material chamber, carbon-based material conveying mechanism, gaseous material conveying mechanism and negative pressure recovery subassembly all with fluidization chamber intercommunication, carrier gas conveying mechanism with ejection of compact chamber intercommunication.
In the CVD fluidized deposition device, preferably, the fluidized chamber includes a straight cylinder section and an expanding section connected to the upper end of the straight cylinder section, the inner diameter of the expanding section gradually increases from bottom to top, a splitter plate is arranged in the expanding section, the filtering splitter plate is a conical filter plate with an upward vertex, the negative pressure recovery assembly is communicated with a space above the splitter plate, and the carbon-based material conveying mechanism and the gas-phase material conveying mechanism are both communicated with the straight cylinder section. Above-mentioned CVD fluidization deposition apparatus, it is preferred, collect the hopper including the collecting chamber and with the discharge gate that the collecting chamber communicates, the collecting chamber has the direction inclined plane of the fluidization deposition material direction discharge gate in with the collecting chamber, be equipped with on the discharge gate and be used for opening and close the valve of discharge gate.
In the CVD fluidized deposition apparatus, preferably, a discharge port of the collecting hopper is provided with a condenser and a cyclone separator.
In the CVD fluidized deposition apparatus, preferably, the carbon-based material conveying mechanism is a screw feeder, a peristaltic pump or a pneumatic conveyor.
In the CVD fluidized deposition apparatus, preferably, the deflector is a second-stage hole arrangement plate, a dispersion plate, or a molecular sieve type deflector.
Foretell CVD fluidization deposition apparatus, it is preferred, heating device is including installing the tube-shape hot plate in the fluidization intracavity, the tube-shape hot plate is laminated with the inside wall of circular reaction chamber, the bottom of tube-shape hot plate is equipped with the first section of dodging, the first thickness of dodging the section reduces from top to bottom gradually, the top of tube-shape hot plate is equipped with the second and dodges the section, the second dodges the thickness of section and reduces by supreme lower gradually.
As a general technical concept, the present invention also provides a method for preparing a silicon-carbon negative electrode material, which is prepared by using the CVD fluidized deposition apparatus, and comprises the following steps:
s1: inputting carrier gas into the reaction cavity through the carrier gas conveying mechanism to enable the pressure in the reaction cavity to reach a preset pressure, inputting the carbon-based material into the reaction cavity through the carbon-based material conveying mechanism, and adjusting the guide plate to enable the carbon-based material to generate fluidization;
s2: starting a heating device to heat the reaction cavity, so that the temperature in the reaction cavity is raised to a preset reaction temperature;
s3: inputting silicon source gas and reducing gas in a preset proportion into a reaction chamber through a gas-phase material conveying mechanism, and carrying out CVD fluidized deposition on the silicon source gas and the carbon-based material in the reaction chamber to form a fluidized deposition material;
s4: stopping inputting silicon source gas into the reaction cavity after preset time, starting the negative pressure recovery assembly to extract unreacted carbon-based materials, and continuously inputting carrier gas until the temperature of the reaction cavity is reduced to room temperature;
s5: and collecting the silicon-carbon negative electrode material from the collecting hopper.
In the above preparation method of the silicon-carbon negative electrode material, preferably, the silicon source gas is one or a combination of two or more of silane, disilane, dichlorosilane, trichlorosilane, tetrachlorosilane, dibromosilane, tribromosilane and tetrabromosilane.
In the preparation method of the silicon-carbon negative electrode material, preferably, the carbon-based material is one or a combination of more than two of carbon nanotubes, graphene oxide, natural graphite, artificial graphite and carbon microspheres.
In the above preparation method of the silicon-carbon negative electrode material, preferably, the carrier gas input into the reaction chamber by the carrier gas conveying mechanism is nitrogen, argon or helium.
In the preparation method of the silicon-carbon anode material, preferably, the preset reaction temperature is 500-1500 ℃.
In the above preparation method of the silicon-carbon anode material, preferably, the preset pressure is 0.01 to 100 bar.
In the above preparation method of the silicon-carbon negative electrode material, preferably, the reducing gas is hydrogen, and the preset ratio is that the reducing gas is calculated by a molar ratio of: a silicon source gas (2-10): 1; or the reducing gas is nitrogen, and the preset proportion is that the reducing gas is calculated according to the molar ratio: a silicon source gas (1-20): 1.
compared with the prior art, the invention has the advantages that:
when the CVD fluidized deposition device is used, the carbon-based material is conveyed into the reaction cavity through the carbon-based material conveying mechanism, carrier gas is conveyed into the reaction cavity through the carrier gas conveying mechanism to fluidize the carbon-based material in the reaction cavity, silicon source gas and reducing gas are conveyed into the reaction cavity through the gas-phase material conveying mechanism, the silicon source gas and the fluidized carbon-based material are subjected to CVD fluidized deposition in the reaction cavity, silicon is deposited on the surface of the carbon-based material, and good coating is achieved. The silicon-carbon cathode material prepared by the CVD fluidized deposition device has the advantages of uniform structure, high purity, good dispersibility and strong coating binding force. In addition, the device prepares the carbon-silicon cathode material by carrying out fluidized deposition on the silicon source gas and the carbon-based material, the preparation process is not influenced by the bottleneck of nano-silicon productivity, and the production efficiency is high. The CVD fluidized deposition device conveys reactants to the reaction cavity through the carbon-based material conveying mechanism and the gas-phase material conveying mechanism, is reliable in work, high in automation degree, capable of realizing continuous production and high in production efficiency. The CVD fluidized deposition device also has the advantages of simple and compact structure and low cost.
The silicon-carbon cathode material prepared by the preparation method of the silicon-carbon cathode material has the advantages of uniform structure, high purity, good dispersibility, strong coating binding force, no influence from the bottleneck of nano-silicon productivity and high production efficiency.
Drawings
FIG. 1 is a schematic structural view of a CVD fluidized deposition apparatus.
Fig. 2 is an SEM image of the silicon carbon negative electrode material prepared in example 3.
Illustration of the drawings:
1. a reaction chamber; 11. a fluidization chamber; 12. a discharge cavity; 2. a fluidized bed; 21. a diameter expanding section; 3. heating plates; 31. a first avoidance segment; 32. a second avoidance segment; 4. a carbon-based material conveying mechanism; 5. a gas-phase material conveying mechanism; 6. a carrier gas conveying mechanism; 7. a collecting hopper; 71. a material collecting cavity; 711. a guide inclined plane; 72. a discharge port; 73. a valve; 8. a baffle; 9. a negative pressure recovery assembly; 10. a splitter plate.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples.
Example 1:
as shown in FIG. 1, the CVD fluidized deposition apparatus of the present embodiment comprises a fluidized bed 2 having a reaction chamber 1, wherein a heating device for heating the reaction chamber 1 and a collection hopper 7 for collecting a fluidized deposition material are installed in the reaction chamber 1, and the collection hopper 7 is installed in the reaction chamber 1. The fluidized bed 2 is connected with a carbon-based material conveying mechanism 4, a gas-phase material conveying mechanism 5, a carrier gas conveying mechanism 6 and a negative pressure recovery assembly 9. The carbon-based material conveying mechanism 4 is used for conveying the carbon-based material into the reaction chamber 1. The gas-phase material transfer mechanism 5 is used for transferring the silicon source gas and the reducing gas into the reaction chamber 1. The carrier gas delivery mechanism 6 is used for inputting carrier gas into the reaction chamber 1 to fluidize the carbon-based material in the reaction chamber 1. The negative pressure recovery assembly 9 is used for excess materials. A guide plate 8 is arranged in the reaction cavity 1, the guide plate 8 divides the reaction cavity 1 into a fluidization cavity 11 and a discharge cavity 12, the carbon-based material conveying mechanism 4, the gas-phase material conveying mechanism 5 and the negative pressure recovery assembly 9 are communicated with the fluidization cavity 11, and the carrier gas conveying mechanism 6 is communicated with the discharge cavity 12. When the CVD fluidized deposition device is used, the carbon-based material is conveyed into the reaction cavity 1 through the carbon-based material conveying mechanism 4, carrier gas is input into the reaction cavity 1 through the carrier gas conveying mechanism 6 to fluidize the carbon-based material in the reaction cavity 1, silicon source gas and reducing gas are conveyed into the reaction cavity 1 through the gas-phase material conveying mechanism 5, the silicon source gas and the fluidized carbon-based material are subjected to CVD fluidized deposition in the reaction cavity 1, silicon is deposited on the surface of the carbon-based material, and good coating is achieved. The silicon-carbon cathode material prepared by the CVD fluidized deposition device has the advantages of uniform structure, high purity, good dispersibility and strong coating binding force. In addition, the device prepares the carbon-silicon cathode material by carrying out fluidized deposition on the silicon source gas and the carbon-based material, the preparation process is not influenced by the bottleneck of nano-silicon productivity, and the production efficiency is high. The CVD fluidized deposition device conveys reactants to the reaction cavity 1 through the carbon-based material conveying mechanism 4 and the gas-phase material conveying mechanism 5, the operation is reliable, the automation degree is high, the continuous production can be realized, and the production efficiency is high. The CVD fluidized deposition device also has the advantages of simple and compact structure and low cost.
In this embodiment, heating device is including installing tube-shape hot plate 3 in fluidization chamber 11, and tube-shape hot plate 3 and the laminating of the inside wall of circular reaction chamber 1, and the bottom of tube-shape hot plate 3 is equipped with first section 31 of dodging, and the first thickness of dodging section 31 reduces gradually from top to bottom, and the top of tube-shape hot plate 3 is equipped with the second and dodges section 32, and the second dodges the thickness of section 32 and reduces gradually from bottom to top. The first avoiding section 31 is arranged at the bottom end of the heating plate 3, so that the fluidized carbon-based material moves upwards smoothly and smoothly enters the region coated by the heating plate 3, and the deposition effect is improved. Set up the second on the top of hot plate 3 and dodge the end, make the downward motion of deposit material smooth and easy, can avoid deposit material at the top of hot plate 3 deposit.
In this embodiment, the fluidization chamber 11 includes a straight cylinder section and an expanding section 21 connected to the upper end of the straight cylinder section, the inner diameter of the expanding section 21 gradually increases from bottom to top, a splitter plate 10 is disposed in the expanding section 21, the filtering splitter plate 10 is a conical filter plate with an upward vertex, the negative pressure recovery assembly 9 is communicated with the space above the splitter plate 10, and the carbon-based material conveying mechanism 4 and the gas-phase material conveying mechanism 5 are both communicated with the straight cylinder section. The fluidized deposition material in the fluidizing chamber 11 is in a suspension state, so that the flow guide is formed, and the deposition effect is improved.
In this embodiment, the collecting hopper 7 includes a collecting chamber 71 and a discharge port 72 communicating with the collecting chamber 71, the collecting chamber 71 has a guide inclined surface 711 for guiding the fluidized deposition material in the collecting chamber 71 to the discharge port 72, and the discharge port 72 is provided with a valve 73 for opening and closing the discharge port 72. When the valve 73 closes the discharge port 72, the fluidized deposition material is collected in the accumulation chamber 71; when the valve 73 is opened, the fluidized deposition material in the collecting chamber 71 is discharged from the discharge hole 72, and the guide inclined surface 711 of the collecting chamber 71 makes the fluidized deposition material in the collecting chamber 71 flow toward the discharge hole 72, so that the fluidized deposition material in the collecting chamber 71 can be smoothly discharged outward.
In this embodiment, a condenser and a cyclone are provided at the discharge port 72 of the collection hopper 7. The condenser is used for condensing and recovering the silicon source gas, the reducing gas, and the carrier gas discharged from the discharge port 72. The cyclone is used to recover the unreacted carbon-based material discharged from the discharge port 72. The material is recovered through the condenser and the cyclone separator, so that the material utilization rate is improved, the cost is reduced, and the environment friendliness is good.
In this embodiment, the carbon-based material conveying mechanism 4 is a screw feeder, a peristaltic pump, or a pneumatic conveyor. The carbon-based material conveying mechanism 4 works reliably and can stably and uniformly convey the carbon-based material in the phase reaction cavity 1.
In this embodiment, the gas-phase material conveying mechanism 5 and the carrier gas conveying mechanism 6 are both gas tanks.
In this embodiment, the heating device adopts modes such as electric heating, microwave heating or high temperature flue gas to heat.
In this embodiment, the negative pressure recovery assembly 9 is a high-temperature vacuum pump, and the high-temperature vacuum pump is used for recovering unreacted carbon-based materials.
Example 2:
the preparation method of the silicon-carbon negative electrode material of the embodiment, which is performed by using the CVD fluidized deposition apparatus of the embodiment 1, includes the following steps:
s1: the carrier gas N is input into the reaction chamber 1 through the carrier gas conveying mechanism 62Gas flow of 2Nm3H, enabling the pressure in the reaction cavity 1 to reach 1bar, inputting 1kg of artificial graphite with the median particle size of 3um into the reaction cavity 1 through a screw feeder, and adjusting the guide plate 8 to enable the artificial graphite to generate fluidization;
s2: starting a heating device to heat the reaction cavity 1, so that the temperature in the reaction cavity 1 is raised to 800 ℃;
s3: h with a molar ratio of 5:1 is fed by a gas-phase material feeding mechanism 52And SiH4Introducing into the reaction chamber 1 SiH4Carrying out CVD fluidized deposition with artificial graphite in the reaction chamber 1 to form a fluidized deposition material;
s4: after 2h, the SiH input into the reaction chamber 1 is stopped4Opening the negative pressure recovery component 9 to extract unreacted artificial graphite, and continuously inputting carrier gas N2Until the temperature of the reaction cavity 1 is reduced to room temperature;
s5: the silicon carbon anode material is collected from the collection hopper 7.
Example 3:
the preparation method of the silicon-carbon negative electrode material of the embodiment, which is performed by using the CVD fluidized deposition apparatus of the embodiment 1, includes the following steps:
s1: inputting carrier gas Ar into the reaction cavity 1 through a carrier gas conveying mechanism 6 to enable the pressure in the reaction cavity 1 to reach 0.5bar, conveying 5kg of graphene oxide dispersion liquid with the solid content of 1% and the median particle size of 5 microns into the reaction cavity 1 through a peristaltic pump in a spraying mode, and adjusting a guide plate 8 to enable the artificial graphite to be fluidized;
s2: starting a heating device to heat the reaction cavity 1, so that the temperature in the reaction cavity 1 is raised to 200 ℃;
s3: h is fed by the gas-phase material feeding mechanism 52、SiHCl3And SiBr4Conveying the mixture into a reaction cavity 1 according to a molar ratio of 10:1:1 to ensure that SiHCl is delivered3And SiBr4Carrying out CVD fluidized deposition with graphene oxide in the reaction chamber 1 to form a fluidized deposition material;
s4: after 10h, the SiHCl input into the reaction chamber 1 is stopped3And SiBr4Starting the negative pressure recovery assembly 9 to extract unreacted artificial graphite, and continuously inputting carrier gas Ar until the temperature of the reaction cavity 1 is reduced to room temperature;
s5: the silicon carbon anode material is collected from the collection hopper 7.
The SEM image of the obtained silicon carbon negative electrode material is shown in fig. 2.
Example 4:
the preparation method of the silicon-carbon negative electrode material of the embodiment, which is performed by using the CVD fluidized deposition apparatus of the embodiment 1, includes the following steps:
s1: the carrier gas N is input into the reaction chamber 1 through the carrier gas conveying mechanism 62The pressure in the reaction cavity 1 reaches 100bar, 1kg of natural graphite with the median particle size of 5um is conveyed into the reaction cavity 1 through a pneumatic conveyor, and the flow guide plate 8 is adjusted to fluidize the artificial graphite;
s2: starting a heating device to heat the reaction cavity 1, so that the temperature in the reaction cavity 1 rises to 1200 ℃;
s3: h is fed by the gas-phase material feeding mechanism 52、SiH2Cl2And SiH4The mixture is conveyed into a reaction chamber 1 according to the molar ratio of 20:1:1 to cause SiH2Cl2And SiH4Carrying out CVD fluidized deposition with natural graphite in the reaction chamber 1 to form a fluidized deposition material;
s4: after 5h, SiH input into the reaction chamber 1 is stopped2Cl2And SiH4Opening the negative pressure recovery component 9 to extract unreacted natural graphite, and continuously inputting carrier gas N2Until the temperature of the reaction cavity 1 is reduced to room temperature;
s5: the silicon carbon anode material is collected from the collection hopper 7.
Comparative example 1:
commercial nano silicon with the median particle size of 30nm and natural graphite with the median particle size of 5um are mixed and uniformly mixed through a VC (vinyl chloride) mixer to prepare the silicon-carbon negative electrode material.
Comparative example 2:
the nano silicon with the median particle size of 100nm is prepared by adopting a mechanical grinding mode, and is mixed with natural graphite with the median particle size of 5um to prepare the silicon-carbon negative electrode material by adopting modes of binder mixing, spraying, compression molding, liquid phase coating granulation and the like.
The above examples 2 to 4 and comparative examples 1 to 2 were characterized and tested by the following methods:
testing the particle size distribution condition of the silicon-carbon negative electrode material by using a Malvern laser particle size tester MS 2000;
observing the surface appearance, the particle size and the like of a sample by adopting a field emission scanning electron microscope;
testing a silicon crystal structure in the silicon-carbon negative electrode material by using an X-ray diffractometer (testing equipment);
the electrochemistry was tested using the following method: pulping the silicon-carbon negative electrode material, the conductive agent and the binder according to the mass ratio of 94:1:5, controlling the solid content of the slurry to be about 40%, and coating the slurry on a copper foil current collector to obtain a negative electrode plate; using a metallic lithium plate as a counter electrode, 1mol/L LiPF6And the/EC + DMC electrolyte is assembled into a 2032 button cell. The battery adopts an LAND battery test system, and is tested under the condition of constant current charge and discharge at 0.1 ℃, and the voltage range is 0.005-1.5V;
the results of the battery tests performed on the examples and comparative examples, respectively, are shown in the following table:
Figure BDA0003260134670000061
Figure BDA0003260134670000071
the table shows that the silicon-carbon cathode material prepared by the CVD fluidized deposition device can be directly applied to batteries. The performance of the silicon-carbon cathode material prepared by the equipment is closer to the capacity and the first effect of the silicon-carbon cathode material prepared by the grinding process in the current market, and the cycle performance is better. The problems of complex process, small mechanical grinding capacity and the like exist in the prior physical grinding preparation of nano silicon-carbon materials; the method has simple equipment and simple process, and can provide certain reference significance for large-scale production of the silicon-carbon cathode.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above-described embodiments. Modifications and variations that may occur to those skilled in the art without departing from the spirit and scope of the invention are to be considered as within the scope of the invention.

Claims (10)

1. A CVD fluidization deposition device comprises a fluidized bed (2) with a reaction cavity (1), wherein a heating device for heating the reaction cavity (1) and a collection hopper (7) for collecting fluidization deposition materials are arranged in the reaction cavity (1), the CVD fluidization deposition device is characterized in that the fluidized bed (2) is connected with a carbon-based material conveying mechanism (4) for conveying carbon-based materials into the reaction cavity (1), a gas-phase material conveying mechanism (5) for conveying silicon source gas and reducing gas into the reaction cavity (1), a carrier gas conveying mechanism (6) for inputting carrier gas into the reaction cavity (1) and a negative pressure recovery assembly (9) for recovering excess materials, a guide plate (8) for dividing the reaction cavity (1) into a fluidization cavity (11) and a discharge cavity (12) is arranged in the reaction cavity (1), the carbon-based material conveying mechanism (4), the gas-phase material conveying mechanism (5) and the negative pressure recovery assembly (9) are all communicated with the fluidization cavity (11), the carrier gas conveying mechanism (6) is communicated with the discharging cavity (12).
2. The CVD fluidized deposition device according to claim 1, wherein the fluidizing chamber (11) comprises a straight cylinder section and an expanding section (21) connected to the upper end of the straight cylinder section, the inner diameter of the expanding section (21) is gradually increased from bottom to top, a splitter plate (10) is arranged in the expanding section (21), the filtering splitter plate (10) is a conical filter plate with an upward vertex, the negative pressure recovery assembly (9) is communicated with a space above the splitter plate (10), and the carbon-based material conveying mechanism (4) and the gas-phase material conveying mechanism (5) are both communicated with the straight cylinder section.
3. A CVD fluidized deposition apparatus according to claim 1, wherein the collection hopper (7) comprises a collection chamber (71) and a discharge port (72) communicating with the collection chamber (71), the collection chamber (71) has a guide inclined surface (711) for guiding the fluidized deposition material in the collection chamber (71) to the discharge port (72), and the discharge port (72) is provided with a valve (73) for opening and closing the discharge port (72).
4. A CVD fluidized deposition apparatus according to claim 3, characterized in that the discharge opening (72) of the collecting hopper (7) is provided with a condenser and a cyclone.
5. The CVD fluidization deposition device according to claim 1, wherein the heating device comprises a cylindrical heating plate (3) installed in a fluidization chamber (11), the cylindrical heating plate (3) is attached to the inner side wall of the circular reaction chamber (1), a first avoidance section (31) is arranged at the bottom end of the cylindrical heating plate (3), the thickness of the first avoidance section (31) is gradually reduced from top to bottom, a second avoidance section (32) is arranged at the top end of the cylindrical heating plate (3), and the thickness of the second avoidance section (32) is gradually reduced from bottom to top.
6. A preparation method for preparing a silicon-carbon negative electrode material by using the CVD fluidized deposition device of any one of claims 1 to 5, which is characterized by comprising the following steps:
s1: inputting carrier gas into the reaction cavity (1) through the carrier gas conveying mechanism (6) to enable the pressure in the reaction cavity (1) to reach a preset pressure, inputting the carbon-based material into the reaction cavity (1) through the carbon-based material conveying mechanism (4), and adjusting the guide plate (8) to enable the carbon-based material to generate fluidization;
s2: starting a heating device to heat the reaction cavity (1) so as to raise the temperature in the reaction cavity (1) to a preset reaction temperature;
s3: silicon source gas and reducing gas in a preset proportion are input into the reaction chamber (1) through the gas-phase material conveying mechanism (5), so that the silicon source gas and the carbon-based material are subjected to CVD fluidized deposition in the reaction chamber (1) to form a fluidized deposition material;
s4: stopping inputting silicon source gas into the reaction chamber (1) after preset time, starting the negative pressure recovery assembly (9) to extract unreacted carbon-based materials, and continuously inputting carrier gas until the temperature of the reaction chamber (1) is reduced to room temperature;
s5: and collecting the silicon-carbon negative electrode material from a collecting hopper (7).
7. The method for preparing the silicon-carbon anode material of claim 6, wherein the silicon source gas is one or a combination of more than two of silane, disilane, dichlorosilane, trichlorosilane, tetrachlorosilane, dibromosilane, tribromosilane and tetrabromosilane.
8. The method as claimed in claim 6, wherein the predetermined reaction temperature is 500-1500 ℃.
9. The method for preparing a silicon-carbon anode material according to claim 6, wherein the preset pressure is 0.01-100 bar.
10. The method for preparing a silicon-carbon anode material according to claim 6, wherein the reducing gas is hydrogen, and the predetermined ratio is the reducing gas in terms of molar ratio: 1 is silicon source gas (2-10); or the reducing gas is nitrogen, and the preset proportion is that the reducing gas is calculated according to the molar ratio: and (1-20) the silicon source gas is 1.
CN202111070124.3A 2021-09-13 2021-09-13 CVD fluidized deposition device and preparation method of silicon-carbon negative electrode material Pending CN113957417A (en)

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US20110220024A1 (en) * 2008-10-09 2011-09-15 Comm. A L'energie Atomique Et Aux Energies Alter. Device for the synthesis of nanoparticles by fluidized-bed chemical vapour deposition
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CN111188022A (en) * 2020-02-25 2020-05-22 上海旦元新材料科技有限公司 Preparation method of silicon cathode material coated by vapor deposition carbon nanotube
CN113215552A (en) * 2021-04-23 2021-08-06 株洲弗拉德科技有限公司 Method for preparing coating powder by adopting plasma vapor deposition process

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US20110220024A1 (en) * 2008-10-09 2011-09-15 Comm. A L'energie Atomique Et Aux Energies Alter. Device for the synthesis of nanoparticles by fluidized-bed chemical vapour deposition
US20120148728A1 (en) * 2010-12-09 2012-06-14 Siliken Sa Methods and apparatus for the production of high purity silicon
CN103172067A (en) * 2013-04-08 2013-06-26 无锡中彩科技有限公司 Cold wall fluidized bed and application thereof
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