CN113945228B - Flexible parallel multi-degree-of-freedom space micro-vibration device - Google Patents
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- G—PHYSICS
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
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- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
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Abstract
The invention discloses a flexible parallel multi-degree-of-freedom space micro-vibration device, which comprises a micro-vibration transmission branched chain mechanism, a sensor mounting mechanism, a plane 2PP driving mechanism and the like. The micro-vibration transmission branched chain mechanism comprises three motion branched chains which are uniformly distributed at 120 degrees, each motion branched chain comprises a plane 2PP driving mechanism, and each plane driving mechanism comprises a piezoelectric ceramic driver, an elliptic flexible unit group and a straight beam flexible unit group. The three plane 2PP driving mechanisms are driven to move through charge and discharge of six piezoelectric ceramics, simultaneously, the multi-degree-of-freedom space pose movement of the space micro-vibration device is realized through three groups of single-axis rotation flexible units and three groups of three-axis rotation flexible units, and the micro-vibration calibration of the MEMES inertial sensor is realized through high-frequency input of the piezoelectric ceramics.
Description
Technical Field
The invention belongs to the field of micro-vibration measurement, and particularly relates to a flexible parallel multi-degree-of-freedom space micro-vibration device.
Background
The micro vibration refers to reciprocating motion or oscillation with small magnitude, which is mainly generated by normal operation of stepping components such as a solar cell array driving mechanism, high-speed components such as a momentum wheel and swinging components such as a camera swinging mirror, during the on-orbit operation of the spacecraft. The amplitudes of the accelerations can be classified into three types, namely quasi-steady acceleration, transient acceleration and vibration acceleration. The micro-vibration is complex in form, has the characteristics of small amplitude, wide frequency band, inherent property, selectivity, difficult suppression, difficult measurement, multi-directional vibration and the like, and seriously influences the high-precision attitude pointing precision of various high-sensitivity payloads carried by high-resolution space remote sensing satellites and spacecrafts. Micro-vibrations can affect the main performance index of the spacecraft payload and scientific experiments related to the orbital gravity environment.
The micro-vibration measurement and micro-vibration experiment is an important content for developing micro-vibration measurement research, and plays a role in the micro-vibration research work. The MEMS inertial sensor is a key component for carrying out micro-vibration measurement and micro-vibration experiments, so that micro-vibration calibration of the MEMS inertial sensor is realized, the precision of micro-vibration measurement and micro-vibration experiment research can be improved, the on-orbit mechanical environment of various spacecrafts can be ensured, and the service life of the spacecrafts is prolonged.
At present, the single-degree-of-freedom vibration device of the main stream in China can only realize single-degree-of-freedom vibration excitation, and the installation direction of various sensors needs to be continuously changed so as to realize multi-axis vibration calibration. In the implementation process, the sensor needs to be frequently disassembled and assembled, and the installation position and direction of the sensor are changed, so that the operation is complex, and various errors are inevitably introduced in the whole process. The two-degree-of-freedom vibration device mainly adopts a resonance beam device based on amplitude ratio and phase difference, and when the sensor is calibrated, the resonance beam device needs to work near resonance frequency, and high-precision control is difficult to realize. More importantly, the conventional acceleration sensor dynamic vibration device cannot realize dynamic calibration of micro-vibration level of the MEMS inertial sensor, and cannot meet the requirements of micro-vibration measurement and micro-vibration experiments.
The flexible hinge consists of a notch type flexible unit in the middle and a rigid body connected with the notch type flexible unit, under the action of external load, the elastic deformation of the material can be utilized to enable the interconnected rigid bodies to generate tiny displacement and rotation, and a plane and space flexible parallel mechanism can be formed by connecting a plurality of flexible hinges in series and connecting flexible branched chains in parallel. The flexible mechanism has the advantages of small mass, small volume, high precision, no clearance, no lubrication, no friction and the like, and has been applied to multiple fields of bioengineering, green medical treatment, integrated circuits, aviation manufacturing and the like. Considering that the flexible mechanism has small stroke, high precision and high frequency, high-frequency and high-precision motion can be generated, so that high-precision micro-vibration is generated, therefore, the flexible parallel multi-degree-of-freedom space micro-vibration device is researched and designed based on the flexible parallel mechanism, the multi-axial batch calibration of the sensor can be completed at the same time, and the batch calibration requirement of the MEMES inertial sensor is met.
Disclosure of Invention
Aiming at the problem of multi-axial micro-vibration calibration of MEMES inertial sensors, the invention provides a high-precision flexible parallel multi-degree-of-freedom space micro-vibration device, which comprises a micro-vibration transmission branched chain mechanism, a sensor mounting mechanism and a plane 2PP driving mechanism.
The micro-vibration transmission branched chain mechanism comprises three motion branched chains which are uniformly distributed at 120 degrees, wherein the first piezoelectric ceramic 1 and the second piezoelectric ceramic 2 are fixedly connected with the first plane 2PP driving mechanism 3 through respective front-end threads and rear-end bases; the third piezoelectric ceramic 4 and the fourth piezoelectric ceramic 5 are fixedly connected with the second plane 2PP driving mechanism 6 through respective front end threads and a rear end base; the fifth piezoelectric ceramic 7 and the sixth piezoelectric ceramic 8 are fixedly connected with a third plane 2PP driving mechanism 9 through respective front end threads and a rear end base; the first piezoelectric ceramic 1, the second piezoelectric ceramic 2, the third piezoelectric ceramic 4, the fourth piezoelectric ceramic 5, the fifth piezoelectric ceramic 7 and the sixth piezoelectric ceramic 8 are uniformly distributed at 90 degrees; the first plane 2PP driving mechanism 3, the second plane 2PP driving mechanism 6 and the third plane 2PP driving mechanism 9 are all positioned in the same plane and are all distributed at 120 degrees. The first plane 2PP driving mechanism 3 is fixedly connected with the first connecting platform 10 through the middle rigid platform, the first connecting platform 10 is fixedly connected with the first connecting block 13, the first connecting block 13 is fixedly connected with the first rotating flexible unit 16, the first rotating flexible unit 16 is fixedly connected with the first branched rigid body 19, the first branched rigid body 19 is fixedly connected with the first triaxial rotating flexible unit 22, and the first triaxial rotating flexible unit 22 is fixedly connected with the first terminal connecting block 25; the second plane 2PP driving mechanism 6 is fixedly connected with the second connecting platform 11 through the middle rigid platform, the second connecting platform 11 is fixedly connected with the second adapter block 14, the second adapter block 14 is fixedly connected with the second rotating flexible unit 17, the second rotating flexible unit 17 is fixedly connected with the second branched-chain rigid body 20, the second branched-chain rigid body 20 is fixedly connected with the second triaxial rotating flexible unit 23, and the second triaxial rotating flexible unit 23 is fixedly connected with the second terminal adapter block 26; the third plane 2PP driving mechanism 9 is fixedly connected with the third connecting platform 12 through the middle rigid platform, the third connecting platform 12 is fixedly connected with the third switching block 15, the third switching block 15 is fixedly connected with the third rotating flexible unit 18, the third rotating flexible unit 18 is fixedly connected with the third branched chain rigid body 21, the third branched chain rigid body 21 is fixedly connected with the third triaxial rotating flexible unit 24, and the third triaxial rotating flexible unit 24 is fixedly connected with the third terminal switching block 27.
The sensor mounting mechanism is distributed with detected acceleration sensors, wherein the first terminal adapter block 25, the second terminal adapter block 26 and the third terminal adapter block 27 are fixedly connected with the moving platform 28 at the same time, the moving platform 28 is fixedly connected with the sensor adapter platform 29, the sensor adapter platform 29 is distributed with detected MEMES inertial sensor groups 30, and the detected sensors are uniformly adhered to the sensor adapter platform 29 according to the test requirements.
The plane 2PP driving mechanism comprises a first plane 2PP driving mechanism 3, a second plane 2PP driving mechanism 6 and a third plane 2PP driving mechanism 9, and the three groups of driving mechanisms are identical in structural size and are uniformly distributed at 120 degrees. The first piezoelectric ceramic 1 is in interference fit connection with an inner groove of the rigid platform 3-1 through a rear end base, the first piezoelectric ceramic 1 is connected with an external first elliptic flexible unit group 3-2 through a front end screw thread, and the first elliptic flexible unit group 3-2 is fixedly connected with the first straight beam flexible unit group 3-3; the second piezoelectric ceramic 2 is connected with the inner groove of the rigid platform 3-1 in an interference fit manner through a rear end base, the second piezoelectric ceramic 2 is connected with the outer second elliptical flexible unit group 3-4 through front end threads, and the second elliptical flexible unit group 3-4 is fixedly connected with the second straight beam flexible unit group 3-5. One side of the third elliptic flexible unit group 3-6 is fixedly connected with the rigid platform 3-1, and the other side is fixedly connected with the third straight beam flexible unit group 3-7; one side of the fourth elliptic flexible unit group 3-8 is fixedly connected with the rigid platform 3-1, and the other side is fixedly connected with the fourth straight beam flexible unit group 3-9. The first elliptic flexible unit group 3-2, the second elliptic flexible unit group 3-4, the third elliptic flexible unit group 3-6 and the fourth elliptic flexible unit group 3-8 are all provided with a plurality of groups of elliptic or other notch type flexible units with the same size and are uniformly distributed at 90 degrees. The first straight beam flexible unit group 3-3, the second straight beam flexible unit group 3-5, the third straight beam flexible unit group 3-7 and the fourth straight beam flexible unit group 3-9 are all provided with a plurality of groups of straight beams or other notch type flexible units with the same size, are uniformly distributed at 90 degrees, and are fixedly connected with the middle rigid platform of the first plane 2PP driving mechanism 3.
The beneficial effects of the invention are as follows:
1. The flexible parallel multi-degree-of-freedom space micro-vibration device adopts the space flexible parallel mechanism, has extremely small vibration quantity, high frequency, high precision and multiple degrees of freedom, can simulate real space micro-vibration excitation, and meets the multi-axial batch calibration requirement of MEMES inertial sensors.
2. According to the flexible parallel multi-degree-of-freedom space micro-vibration device, 3 2-PP motion mechanisms are adopted for driving, the planar 2-PP motion mechanisms do not generate coupling motion in a plane perpendicular to a motion plane, the precision of the multi-degree-of-freedom space calibration mechanism can be improved, and more importantly, high-precision motion control is easier to realize because of no coupling motion.
3. The flexible parallel multi-degree-of-freedom space micro-vibration device is driven by the piezoelectric ceramic driver, and the piezoelectric ceramic has the advantages of high frequency response, wide frequency band, high resolution, high response speed, difficult external interference and the like, and can ensure that the device generates high-frequency micro-vibration.
4. The flexible parallel multi-degree-of-freedom space micro-vibration device adopts the flexible hinge as a basic component unit, so that the whole machine has no gap, no abrasion and compact structure, the dynamic response speed of the system can be effectively improved, and the generation of high-precision micro-vibration can be ensured.
Drawings
Fig. 1 is a front view of a flexible parallel multi-degree of freedom space micro-vibration device.
Description of the reference numerals: 1-first piezoelectric ceramic, 2-second piezoelectric ceramic, 3-first plane 2PP driving mechanism, 4-third piezoelectric ceramic, 5-fourth piezoelectric ceramic, 6-second plane 2PP driving mechanism, 7-fifth piezoelectric ceramic, 8-sixth piezoelectric ceramic, 9-third plane 2PP driving mechanism, 10-first connecting platform, 11-second connecting platform, 12-third connecting platform, 13-first adapter block, 14-second adapter block, 15-third adapter block, 16-first rotating flexible unit, 17-second rotating flexible unit, 18-third rotating flexible unit, 19-first branched rigid body, 20-second branched rigid body, 21-third branched rigid body, 22-first triaxial rotating flexible unit, 23-second triaxial rotating flexible unit, 24-third triaxial rotating flexible unit, 25-first terminal adapter block, 26-second terminal adapter block, 27-third terminal adapter block, 28-moving platform, 29-sensor adapter platform and 30-measured MEMEMEMEMES inertial sensor group.
Fig. 2 is a top view of a flexible parallel multi-degree of freedom space micro-vibration device.
Description of the reference numerals: the piezoelectric ceramic comprises 1-first piezoelectric ceramic, 2-second piezoelectric ceramic, 3-first plane 2PP driving mechanism, 4-third piezoelectric ceramic, 5-fourth piezoelectric ceramic, 6-second plane 2PP driving mechanism, 7-fifth piezoelectric ceramic, 8-sixth piezoelectric ceramic, 9-third plane 2PP driving mechanism, 3-1-rigid platform, 3-2-first elliptic flexible unit group, 3-3-first straight beam flexible unit group, 3-4-second elliptic flexible unit group, 3-5-second straight beam flexible unit group, 3-6-third elliptic flexible unit group, 3-7-third straight beam flexible unit group, 3-8-fourth elliptic flexible unit group and 3-9-fourth straight beam flexible unit group.
Detailed Description
The invention is further described below with reference to the drawings and the detailed description. It should be emphasized that the following description is merely exemplary in nature and is in no way intended to limit the scope of the invention or its applications.
As shown in FIG. 1, the flexible parallel multi-degree-of-freedom space micro-vibration device mainly comprises a micro-vibration transmission branched chain mechanism, a sensor mounting mechanism and a plane 2PP driving mechanism. The micro-vibration transmission branched chain mechanism comprises three motion branched chains which are uniformly distributed at 120 degrees, and the sensor mounting mechanism is distributed with acceleration sensors to be measured. The first piezoelectric ceramic 1 and the second piezoelectric ceramic 2 are fixedly connected with a first plane 2PP driving mechanism 3 through respective front end threads and a rear end base; the third piezoelectric ceramic 4 and the fourth piezoelectric ceramic 5 are fixedly connected with the second plane 2PP driving mechanism 6 through respective front end threads and a rear end base; the fifth piezoelectric ceramic 7 and the sixth piezoelectric ceramic 8 are fixedly connected with a third plane 2PP driving mechanism 9 through respective front end threads and a rear end base; the first piezoelectric ceramic 1, the second piezoelectric ceramic 2, the third piezoelectric ceramic 4, the fourth piezoelectric ceramic 5, the fifth piezoelectric ceramic 7 and the sixth piezoelectric ceramic 8 are uniformly distributed at 90 degrees; the first plane 2PP driving mechanism 3, the second plane 2PP driving mechanism 6 and the third plane 2PP driving mechanism 9 are all positioned in the same plane and are all distributed at 120 degrees. The first plane 2PP driving mechanism 3 is fixedly connected with the first connecting platform 10 through the middle rigid platform, the first connecting platform 10 is fixedly connected with the first connecting block 13, the first connecting block 13 is fixedly connected with the first rotating flexible unit 16, the first rotating flexible unit 16 is fixedly connected with the first branched rigid body 19, the first branched rigid body 19 is fixedly connected with the first triaxial rotating flexible unit 22, and the first triaxial rotating flexible unit 22 is fixedly connected with the first terminal connecting block 25; the second plane 2PP driving mechanism 6 is fixedly connected with the second connecting platform 11 through the middle rigid platform, the second connecting platform 11 is fixedly connected with the second adapter block 14, the second adapter block 14 is fixedly connected with the second rotating flexible unit 17, the second rotating flexible unit 17 is fixedly connected with the second branched-chain rigid body 20, the second branched-chain rigid body 20 is fixedly connected with the second triaxial rotating flexible unit 23, and the second triaxial rotating flexible unit 23 is fixedly connected with the second terminal adapter block 26; the third plane 2PP driving mechanism 9 is fixedly connected with the third connecting platform 12 through the middle rigid platform, the third connecting platform 12 is fixedly connected with the third switching block 15, the third switching block 15 is fixedly connected with the third rotating flexible unit 18, the third rotating flexible unit 18 is fixedly connected with the third branched chain rigid body 21, the third branched chain rigid body 21 is fixedly connected with the third triaxial rotating flexible unit 24, and the third triaxial rotating flexible unit 24 is fixedly connected with the third terminal switching block 27. The first terminal adapter block 25, the second terminal adapter block 26 and the third terminal adapter block 27 are fixedly connected with the moving platform 28 at the same time, the moving platform 28 is fixedly connected with the sensor adapter platform 29, the sensor adapter platform 29 is distributed with the MEMES inertial sensor group 30 to be tested, and the sensor to be tested is uniformly adhered to the sensor adapter platform 29.
As shown in fig. 1 and 2, the planar 2PP driving mechanism includes a first planar 2PP driving mechanism 3, a second planar 2PP driving mechanism 6, and a third planar 2PP driving mechanism 9, where the three groups of driving mechanisms have identical structural dimensions and are uniformly distributed at 120 degrees. The first piezoelectric ceramic 1 is in interference fit connection with an inner groove of the rigid platform 3-1 through a rear end base, the first piezoelectric ceramic 1 is connected with an external first elliptic flexible unit group 3-2 through a front end screw thread, and the first elliptic flexible unit group 3-2 is fixedly connected with the first straight beam flexible unit group 3-3; the second piezoelectric ceramic 2 is connected with the inner groove of the rigid platform 3-1 in an interference fit manner through a rear end base, the second piezoelectric ceramic 2 is connected with the outer second elliptical flexible unit group 3-4 through front end threads, and the second elliptical flexible unit group 3-4 is fixedly connected with the second straight beam flexible unit group 3-5. One side of the third elliptic flexible unit group 3-6 is fixedly connected with the rigid platform 3-1, and the other side is fixedly connected with the third straight beam flexible unit group 3-7; one side of the fourth elliptic flexible unit group 3-8 is fixedly connected with the rigid platform 3-1, and the other side is fixedly connected with the fourth straight beam flexible unit group 3-9. The first elliptic flexible unit group 3-2, the second elliptic flexible unit group 3-4, the third elliptic flexible unit group 3-6 and the fourth elliptic flexible unit group 3-8 are all provided with a plurality of groups of elliptic or other notch type flexible units with the same size and are uniformly distributed at 90 degrees. The first straight beam flexible unit group 3-3, the second straight beam flexible unit group 3-5, the third straight beam flexible unit group 3-7 and the fourth straight beam flexible unit group 3-9 are all provided with a plurality of groups of straight beams or other notch type flexible units with the same size, are uniformly distributed at 90 degrees, and are fixedly connected with the middle rigid platform of the first plane 2PP driving mechanism 3.
The flexible parallel multi-degree-of-freedom space micro-vibration device can generate six-degree-of-freedom space high-precision pose motion, provide small-magnitude space micro-vibration, and realize micro-vibration calibration of a high-precision acceleration sensor, and the specific working process is as follows:
The first piezoelectric ceramic 1 inputs voltage to generate driving force to drive the first elliptic flexible unit group 3-2 and the third elliptic flexible unit group 3-6 to elastically deform, and the first elliptic flexible unit group 3-2 and the third elliptic flexible unit group 3-6 generate tangential motion, namely linear motion along the axial direction of the first piezoelectric ceramic 1 due to the limitation of the rigid platform 3-1, and the first elliptic flexible unit group 3-2 transmits the driving force to the first straight beam flexible unit group 3-3 and the third straight beam flexible unit group 3-7 through the middle rigid body to generate axial motion, namely linear motion along the axial direction of the first piezoelectric ceramic 1 and transmits the driving force to the middle rigid platform of the first plane 2PP driving mechanism 3 to drive the middle rigid platform to generate motion so as to realize the linear motion along the axial direction of the first piezoelectric ceramic 1; similarly, the second piezoelectric ceramic 2 inputs voltage to generate driving force to drive the second elliptic flexible unit group 3-4 and the fourth elliptic flexible unit group 3-8 to generate elastic deformation, and the second elliptic flexible unit group 3-4 and the fourth elliptic flexible unit group 3-8 generate tangential motion, namely linear motion along the axial direction of the second piezoelectric ceramic 2 due to the limitation of the rigid platform 3-1, and the second elliptic flexible unit group 3-4 transmits the driving force to the second straight beam flexible unit group 3-5 and the fourth straight beam flexible unit group 3-9 through the middle rigid body to generate axial motion, namely linear motion along the axial direction of the second piezoelectric ceramic 2 and transmits the driving force to the middle rigid platform of the first plane 2PP driving mechanism 3 to drive the middle rigid platform to generate motion so as to realize linear motion along the axial direction of the second piezoelectric ceramic 2.
The first piezoelectric ceramic 1, the second piezoelectric ceramic 2, the third piezoelectric ceramic 4, the fourth piezoelectric ceramic 5, the fifth piezoelectric ceramic 7 and the sixth piezoelectric ceramic 8 are respectively input with voltages according to design requirements, driving force, elastic deformation of four groups of elliptic flexible unit groups and elastic deformation of four groups of straight beam flexible unit groups are respectively transmitted to middle rigid platforms of the first plane 2PP driving mechanism 3, the second plane 2PP driving mechanism 6 and the third plane 2PP driving mechanism 9, movement and force are transmitted to the first rotary flexible unit 16 through the first connecting platform 10 and the first connecting block 13, movement and force are transmitted to the second rotary flexible unit 17 through the second connecting platform 11 and the second connecting block 14, movement and force are transmitted to the third rotary flexible unit 18 through the third connecting platform 12 and the third connecting block 15, and meanwhile, the first rotary flexible unit 16, the second rotary flexible unit 17 and the third rotary flexible unit 18 are driven to generate elastic deformation; then, the motion and force are transmitted to the first triaxial rotating flexible unit 22 through the first branched rigid body 19, the motion and force are transmitted to the second triaxial rotating flexible unit 23 through the second branched rigid body 20, the motion and force are transmitted to the third triaxial rotating flexible unit 24 through the third branched rigid body 21, and the first triaxial rotating flexible unit 22, the second triaxial rotating flexible unit 23 and the third triaxial rotating flexible unit 24 are driven to generate elastic deformation; the motion and force are transmitted to the motion platform 28 and the sensor switching platform 29 through the first terminal switching block 25, the second terminal switching block 26 and the third terminal switching block 27, so that the multi-degree-of-freedom pose motion and the space micro-vibration are transmitted to the MEMES inertial sensor group 30 to be measured, and then the flexible parallel multi-degree-of-freedom space micro-vibration device is enabled to generate a multi-degree-of-freedom space high-precision pose motion track according to the calibration requirements of the static characteristics and the dynamic characteristics of the MEMEMES inertial sensor by changing the input voltages of the first piezoelectric ceramic 1, the second piezoelectric ceramic 2, the third piezoelectric ceramic 4, the fourth piezoelectric ceramic 5, the fifth piezoelectric ceramic 7 and the sixth piezoelectric ceramic 8, so that the small-magnitude space micro-vibration calibration is provided.
Claims (3)
1. A flexible parallel multi-degree-of-freedom space micro-vibration device comprises a micro-vibration transmission branched chain mechanism, a sensor mounting mechanism and a plane 2PP driving mechanism; it is characterized in that the method comprises the steps of,
The first piezoelectric ceramic and the second piezoelectric ceramic are fixedly connected with the first plane 2PP driving mechanism through respective front-end threads and a rear-end base; the third piezoelectric ceramic and the fourth piezoelectric ceramic are fixedly connected with the second plane 2PP driving mechanism through respective front-end threads and a rear-end base; the fifth piezoelectric ceramic and the sixth piezoelectric ceramic are fixedly connected with the third plane 2PP driving mechanism through respective front end threads and a rear end base; the first piezoelectric ceramic, the second piezoelectric ceramic, the third piezoelectric ceramic, the fourth piezoelectric ceramic, the fifth piezoelectric ceramic and the sixth piezoelectric ceramic are uniformly distributed at 90 degrees; the first plane 2PP driving mechanism, the second plane 2PP driving mechanism and the third plane 2PP driving mechanism are all positioned in the same plane and are all distributed at 120 degrees; the first plane 2PP driving mechanism is fixedly connected with the first connecting platform, the first connecting block, the first rotating flexible unit, the first branched rigid body and the first triaxial rotating flexible unit, and the first triaxial rotating flexible unit is fixedly connected with the first terminal connecting block; the second plane 2PP driving mechanism is fixedly connected with the second connecting platform, the second switching block, the second rotating flexible unit, the second branched rigid body, the second triaxial rotating flexible unit and the second terminal switching block; the third plane 2PP driving mechanism is fixedly connected with a third connecting platform, a third switching block, a third rotating flexible unit, a third branched rigid body, a third triaxial rotating flexible unit and a third terminal switching block; the first terminal switching block, the second terminal switching block and the third terminal switching block are fixedly connected with the moving platform at the same time, the moving platform is fixedly connected with the sensor switching platform, and the sensor switching platform is distributed with MEMES inertial sensor groups to be tested;
The three groups of driving mechanisms are identical in structural dimension and are uniformly distributed at 120 degrees; the first piezoelectric ceramic and the second piezoelectric ceramic are in interference fit connection with the rigid platform and fixedly connected with the first elliptic flexible unit group and the second elliptic flexible unit group; the first elliptic flexible unit group, the second elliptic flexible unit group, the third elliptic flexible unit group and the fourth elliptic flexible unit group are provided with a plurality of groups of elliptic or other notch-type flexible units with the same size and are uniformly distributed at 90 degrees; the first straight beam flexible unit group, the second straight beam flexible unit group, the third straight beam flexible unit group and the fourth straight beam flexible unit group are provided with a plurality of groups of straight beams or other notch type flexible units with the same size, are uniformly distributed at 90 degrees, and are fixedly connected with a middle rigid platform of the first plane 2PP driving mechanism;
the first piezoelectric ceramic inputs voltage to generate driving force to drive the first elliptic flexible unit group and the third elliptic flexible unit group to generate tangential motion and drive the first straight beam flexible unit group and the third straight beam flexible unit group to generate axial motion so as to realize linear motion along the axial direction of the first piezoelectric ceramic; the second piezoelectric ceramic inputs voltage to generate driving force to drive the second elliptic flexible unit group and the fourth elliptic flexible unit group to generate tangential motion and drive the second straight beam flexible unit group and the fourth straight beam flexible unit group to generate axial motion so as to realize linear motion along the axial direction of the second piezoelectric ceramic;
Six piezoelectric ceramic drivers respectively drive three 2PP driving mechanisms and sequentially drive the first rotating flexible unit, the second rotating flexible unit and the third rotating flexible unit to generate elastic deformation, and the first triaxial rotating flexible unit, the second triaxial rotating flexible unit and the third triaxial rotating flexible unit generate elastic deformation to drive the motion platform to generate multi-degree-of-freedom pose motion and space micro-vibration, so that multi-axial batched dynamic calibration of the MEMES inertial sensor is realized.
2. The flexible parallel multi-degree-of-freedom space micro-vibration device of claim 1, wherein the device is driven by a plane 2-PP motion mechanism, and no coupling motion is generated in a plane perpendicular to the motion plane, so that the control difficulty can be reduced, and the precision of the multi-degree-of-freedom space calibration mechanism can be improved.
3. The flexible parallel multi-degree-of-freedom space micro-vibration device of claim 1, wherein a plurality of flexible hinge units are matched for use, so that the multi-axial batch calibration of the MEMES inertial sensor is realized.
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2021
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