CN113936981B - Preparation method of impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode - Google Patents
Preparation method of impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode Download PDFInfo
- Publication number
- CN113936981B CN113936981B CN202111167986.8A CN202111167986A CN113936981B CN 113936981 B CN113936981 B CN 113936981B CN 202111167986 A CN202111167986 A CN 202111167986A CN 113936981 B CN113936981 B CN 113936981B
- Authority
- CN
- China
- Prior art keywords
- rhenium
- tungsten
- osmium
- powder
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/14—Solid thermionic cathodes characterised by the material
- H01J1/142—Solid thermionic cathodes characterised by the material with alkaline-earth metal oxides, or such oxides used in conjunction with reducing agents, as an emissive material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/14—Solid thermionic cathodes characterised by the material
- H01J1/146—Solid thermionic cathodes characterised by the material with metals or alloys as an emissive material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
- H01J9/042—Manufacture, activation of the emissive part
- H01J9/047—Cathodes having impregnated bodies
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
Abstract
A preparation method of an impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode relates to a microwave electric vacuum device manufacturing technology. Nanometer osmium powder is added on the basis of micron-sized particle powder with a rhenium coated tungsten structure, and the ternary mixed powder is sintered to form special structural powder of rhenium osmium alloy coated tungsten particles. The internal tungsten can diffuse to the outside in the cathode matrix sintering and cathode dipping processes, and a stable tungsten-rhenium-osmium ternary alloy film layer is formed on the surface of the cathode, so that the electron emission density of the cathode can be improved due to the existence of rhenium and osmium.
Description
Technical Field
The invention relates to the technical field of manufacturing of microwave electric vacuum devices, in particular to a preparation method of an impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode.
Background
The electric vacuum electronic device has very wide application in civil and military fields, such as microwave communication, medical diagnosis, radar and electronic pairResistance, and the like. Cathodes, which are known as electron sources for electric vacuum devices, play an important role in electric vacuum device applications. In recent years, with the continuous development of electric vacuum devices, the requirements of the devices on the electron emission capability of cathodes are becoming higher and higher, for example, in high-power terahertz radiation sources, the requirements of electron beam current density are generally as high as hundreds of A/cm 2 。
The barium-tungsten cathode is used as a cathode capable of continuously outputting larger current density in a hot cathode, is a common cathode in a high-power microwave electric vacuum device, and has the current density of 3-5A/cm at the maximum when the current is extracted at 1050 DEG C 2 Therefore, the performance of the device cannot meet the development requirements of the device. Although the current density can also be increased by increasing the operating temperature of the cathode, this also results in increased evaporation of the cathode, which greatly reduces the lifetime of the cathode.
On the basis of the barium-tungsten cathode, researchers find that the emission performance of the M-shaped cathode obtained by coating the surfaces of the cathodes with Re, os, ir and other element films can be several times that of the barium-tungsten cathode. However, since the film layer and W in the cathode matrix are alloyed and the surface electron emission ability is reduced after a long-term use of such a cathode, researchers have also attempted to add Re, os, ir to the cathode matrix to obtain an alloy-based impregnated cathode. Meanwhile, researchers find that the addition of Re, os, ir and other elements in the cathode matrix plays a role in improving the machining performance of the cathode. However, the currently studied mixed-base cathodes mainly comprise binary mixed-base cathodes such as tungsten rhenium, tungsten osmium, tungsten iridium and the like, and few studies are performed on ternary mixed-base cathodes.
In addition, since Os and Ir are expensive, adding too much Os and Ir into the matrix results in a significant increase in the cost of preparing the cathode, and therefore, how to add Os and Ir into the cathode, but retaining the added Os and Ir on the surface layer of the cathode is an important point of research.
In summary, the addition of rhenium and osmium to the tungsten matrix has a positive effect on the improvement of the cathode emission performance, and in addition, the improvement of the addition mode to obtain the cathode with the surface rich in Re and Os and excellent electron emission capability has great significance on the performance of the whole vacuum electronic device.
Disclosure of Invention
The invention provides a preparation method of an impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode, which comprises the steps of coating rhenium on the surface of tungsten particles by using a chemical vapor deposition method, and adding osmium elements to prepare ternary mixed powder; high temperature sintering to obtain cathode matrix, and soaking with metal active salt (BaCO 3 :CaCO 3 :Al 2 O 3 A ternary mixed-base cathode was prepared at 4:1:1). Wherein tungsten (W) is 40-60 wt%: 20 to 30 weight percent of rhenium (Re): osmium (Os) 15 to 40wt%, preferably tungsten rhenium in a ratio of 2:1.
the invention relates to a preparation method of a ternary mixed base diffusion cathode, which is characterized in that a tungsten-rhenium-osmium ternary mixed base matrix is formed by sintering special powder of tungsten particles coated by rhenium-osmium alloy. During the impregnation of the active salt and the cathode operation, the tungsten continuously diffuses outwards and reacts with the active salt during diffusion to produce the active species required for the cathode operation.
The ternary alloy film composed of tungsten (W) rhenium (Re) osmium (Os) is formed on the surface of the cathode by diffusion.
The active salt mainly comprises alkaline earth oxides such as barium oxide, calcium oxide, strontium oxide and the like and one or more of aluminum oxide, zirconium oxide, silicon oxide and tungsten oxide, which are prepared by high-temperature firing, and is conventional technology.
The preparation process comprises the following steps:
step one: preparing core-shell structure powder of rhenium coated tungsten; preferably; and (3) carrying out two-stage reduction on tungsten powder and ammonium perrhenate in a hydrogen tube furnace at 230 ℃ and 430 ℃, wherein in the reduction process, the ammonium perrhenate is firstly decomposed into rhenium oxide at 230 ℃ for 2 hours, and after the rhenium oxide volatilizes at 430 ℃ for 2 hours, nucleation and growth can be deposited on the surfaces of tungsten particles, so that a special structure of rhenium coated tungsten is finally formed.
Step two: adding nano osmium powder into the powder prepared in the first step to prepare ternary mixed powder;
step three: pre-sintering the ternary mixed powder prepared in the second step, and enabling the nano-scale fine osmium powder to perform alloying reaction with metal rhenium to form ternary core-shell powder structure powder of tungsten coated by rhenium and osmium; preferably, adding nano osmium powder into the rhenium coated tungsten core-shell structure powder, and keeping the temperature of the uniformly mixed powder in a high-temperature hydrogen furnace for 30min at 1300 ℃ to obtain ternary core-shell powder structure powder of rhenium osmium coated tungsten;
step four: the ternary core-shell powder structure powder of the rhenium osmium coated tungsten in the third step is subjected to compression molding and sintering to prepare a cathode matrix with pores, wherein the through holes occupy 10% -30% of the volume of the cathode matrix; preferably, a powder tablet press is adopted for bidirectional compression molding to obtain a sintered green body; heat-preserving the green body in a high-temperature hydrogen furnace at 1500 ℃ for 30min to obtain a cathode matrix with pores;
step five: impregnating the cathode matrix with the pores prepared in the step four with an emissive active salt;
step six: and (3) treating the surface of the cathode impregnated with the active salt according to the difference of the cleanliness of the surface of the cathode in a cleaning mode such as water washing, acid washing, alkali washing and the like or in a physical treatment method such as machining and the like, and then carrying out annealing treatment to obtain the tungsten-rhenium-osmium ternary mixed base cathode.
The actual effect of the cathode obtained by adopting the preparation method of the impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode is as follows:
1. the emission current density of the mixed-base diffusion cathode can be improved. The DC density of the cathode of the invention which can be effectively extracted at 950 ℃ is 9.3-10.2A/cm 2 The DC density of the binary tungsten osmium mixed base cathode at 950 ℃ is 7.8-8.5A/cm 2 Compared with the prior art, the method has the advantage of greatly improving.
2. The special powder structure of the ternary mixed base cathode prepared by the method can ensure that the surface of the cathode has higher rhenium and osmium content, and can reduce the dosage of noble metals such as rhenium and osmium in the cathode, thereby reducing the cost of the cathode. Meanwhile, when the presintering temperature is 1300 ℃, rhenium on the surfaces of the nano osmium powder and the rhenium tungsten powder can form a rhenium osmium alloy, and meanwhile, the coating structure can be ensured to still exist. And sintering the ternary mixed powder to form the special structural powder of the rhenium osmium alloy coated tungsten particles. The internal tungsten can diffuse to the outside in the cathode matrix sintering and cathode dipping processes, and a stable tungsten-rhenium-osmium ternary alloy film layer is formed on the surface of the cathode, so that the electron emission density of the cathode can be improved due to the existence of rhenium and osmium.
Drawings
FIG. 1 is a diagram of a cathode preparation process;
FIG. 2 is a schematic diagram of a preparation process of the tungsten-rhenium-osmium ternary mixed powder;
FIG. 3 SEM of pure tungsten powder, rhenium coated tungsten powder, ternary mixed powder, and ternary mixed matrix;
FIG. 4 is a ternary mixed base diffusion cathode pulse emission performance curve.
Detailed Description
The specific implementation process of the preparation method of the impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode is as follows, and the technical scheme of the invention is described in detail below, but the invention is not limited to the following examples.
Adopting ammonium metatungstate to perform two-stage reduction at 550 ℃ and 950 ℃ to obtain 2-4 um tungsten powder, wherein the morphology of the tungsten powder is shown in fig. 3 (a), 16g of tungsten powder and 14.31g of ammonium perrhenate are subjected to two-stage reduction in a tubular furnace, during the reduction process, the ammonium perrhenate is firstly decomposed into rhenium oxide at 230 ℃ for 2 hours, and because the rhenium oxide has good volatility, the rhenium oxide is further reduced during the volatilization process, and after the rhenium oxide is volatilized at 430 ℃ for 2 hours, nucleation and growth are deposited on the surfaces of tungsten particles, and finally, the special structure of rhenium coated tungsten is formed, as shown in fig. 3 (b), the tungsten-rhenium ratio is 2:1 rhenium coated tungsten powder.
Example 1:
8g of nano osmium powder is added into rhenium coated tungsten powder, and the ternary mixed powder which is uniformly mixed is subjected to heat preservation for 30min at 1300 ℃ in a high-temperature hydrogen furnace to obtain ternary mixed powder containing 50% of tungsten, 25% of rhenium and 25% of osmium, and the morphology of the ternary mixed powder is shown in a figure 3 (c).
Pressing and sintering ternary mixed base powder: and (3) weighing ternary mixed base powder, putting the ternary mixed base powder into a grinding tool with the inner diameter of 3mm, and adopting a powder tablet press to perform bidirectional compression molding. Maintaining the pressure for 25S under the pressure of 0.8Mp to obtain a sintered green compact; the green body is kept at 1500 ℃ for 30min in a high-temperature hydrogen furnace to obtain a ternary mixed base cathode matrix, and the microstructure is shown in fig. 3 (d).
The ternary mixed matrix is immersed 411 in metal salt at 1750 ℃ and subjected to salt washing and annealing treatment (under the hydrogen condition, the temperature is 1000 ℃ and the time is 1 hour) to obtain the ternary mixed matrix cathode.
The test result obtained after the inventive cathode is subjected to pulse emission test is shown in fig. 4.
Example 2:
4g of nano osmium powder is added into rhenium coated tungsten powder, and the ternary mixed powder which is uniformly mixed is subjected to heat preservation for 30min at 1300 ℃ in a high-temperature hydrogen furnace to obtain ternary mixed powder containing 57% of tungsten, 29% of rhenium and 14% of osmium, and the other steps are the same as in example 1.
The ternary mixed powder was pressed, sintered, washed with salt and annealed as in example 1 to obtain a ternary mixed base cathode. The test results obtained after the pulse emission test are shown in fig. 4.
Example 3:
16g of nano osmium powder is added into rhenium coated tungsten powder, and the uniformly mixed ternary mixed powder is subjected to heat preservation at 1300 ℃ for 30min in a high-temperature hydrogen furnace to obtain ternary mixed powder containing 40% of tungsten, 20% of rhenium and 40% of osmium, which is otherwise the same as in example 1.
The ternary mixed powder was pressed, sintered, washed with salt and annealed as in example 1 to obtain a ternary mixed base cathode. The test results obtained after the pulse emission test are shown in fig. 4.
Claims (8)
1. The preparation method of the impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode is characterized by comprising the following steps of:
step one: preparing core-shell structure powder of rhenium coated tungsten;
step two: adding nano osmium powder into the powder prepared in the first step to prepare ternary mixed powder;
step three: pre-sintering the ternary mixed powder prepared in the second step, and enabling the nano-scale fine osmium powder to perform alloying reaction with metal rhenium to form ternary core-shell powder structure powder of tungsten coated by rhenium and osmium;
step four: the ternary core-shell powder structure powder of the rhenium osmium coated tungsten in the third step is subjected to compression molding and sintering to prepare a cathode matrix with pores, wherein the through holes occupy 10% -30% of the volume of the cathode matrix;
step five: impregnating the cathode matrix with the pores prepared in the step four with an emissive active salt;
step six: and (3) treating the surface of the cathode impregnated with the active salt according to the difference of the cleanliness of the surface of the cathode in a cleaning mode such as water washing, acid washing, alkali washing and the like or in a physical treatment method such as machining and the like, and then carrying out annealing treatment to obtain the tungsten-rhenium-osmium ternary mixed base cathode.
2. The method for preparing the impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode according to claim 1, which is characterized by comprising the following steps: preparing core-shell structure powder of rhenium coated tungsten: and (3) carrying out two-stage reduction on tungsten powder and ammonium perrhenate in a hydrogen tube furnace at 230 ℃ and 430 ℃, wherein in the reduction process, the ammonium perrhenate is firstly decomposed into rhenium oxide at 230 ℃ for 2 hours, and after the rhenium oxide volatilizes at 430 ℃ for 2 hours, nucleation and growth can be deposited on the surfaces of tungsten particles, so that a special structure of rhenium coated tungsten is finally formed.
3. The method for preparing the impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode according to claim 1, which is characterized by comprising the following steps: adding nano osmium powder into the rhenium coated tungsten core-shell structure powder, and preserving the temperature of the uniformly mixed powder in a high-temperature hydrogen furnace for 30min at 1300 ℃ to obtain the rhenium osmium coated tungsten ternary core-shell structure powder.
4. The method for preparing the impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode according to claim 1, which is characterized by comprising the following steps: adopting a powder tablet press to perform bidirectional compression molding to obtain a sintered green body; and (3) preserving the green body in a high-temperature hydrogen furnace at 1500 ℃ for 30min to obtain the cathode matrix with pores.
5. The method for preparing the impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode according to claim 1, wherein the active salt mainly comprises active salts prepared by firing one or more of aluminum oxide, zirconium oxide, silicon oxide and tungsten oxide and alkaline earth oxides at high temperature.
6. The method for preparing an impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode according to claim 1, wherein tungsten (W) is 40-60 wt%: 20 to 30 weight percent of rhenium (Re): 15 to 40 weight percent of osmium (Os).
7. The method for preparing the impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode according to claim 6, wherein the proportion of tungsten-rhenium is 2:1.
8. an impregnated tungsten-rhenium osmium ternary mixed base diffusion cathode prepared according to the method of any one of claims 1-7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111167986.8A CN113936981B (en) | 2021-09-29 | 2021-09-29 | Preparation method of impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111167986.8A CN113936981B (en) | 2021-09-29 | 2021-09-29 | Preparation method of impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113936981A CN113936981A (en) | 2022-01-14 |
| CN113936981B true CN113936981B (en) | 2023-06-23 |
Family
ID=79277879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111167986.8A Active CN113936981B (en) | 2021-09-29 | 2021-09-29 | Preparation method of impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113936981B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57210538A (en) * | 1981-06-22 | 1982-12-24 | Nec Corp | Impregnation type cathode and its manufacturing process |
| JPS61264625A (en) * | 1985-05-20 | 1986-11-22 | Hitachi Ltd | Impregnated type cathode |
| JPH08138536A (en) * | 1994-11-15 | 1996-05-31 | Hitachi Ltd | Impregnated cathode, manufacture thereof, and cathode-ray tube using this |
| CN101335166A (en) * | 2007-06-27 | 2008-12-31 | 中国科学院电子学研究所 | Cathode three-element alloy film and method for preparing film covered dipping diffusion cathode |
| CN102628136A (en) * | 2012-04-13 | 2012-08-08 | 北京工业大学 | Rhenium tungsten based cathode material and preparation method thereof |
| CN103050354A (en) * | 2011-10-17 | 2013-04-17 | 中国科学院电子学研究所 | Storage film-coating dipped barium-tungsten cathode and preparation method |
| JP2017066463A (en) * | 2015-09-29 | 2017-04-06 | 住友金属鉱山株式会社 | Ni-COATED COPPER POWDER, AND CONDUCTIVE PASTE, CONDUCTIVE PAINT AND CONDUCTIVE SHEET USING THE SAME, AND METHOD FOR PRODUCING Ni-COATED COPPER POWDER |
-
2021
- 2021-09-29 CN CN202111167986.8A patent/CN113936981B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57210538A (en) * | 1981-06-22 | 1982-12-24 | Nec Corp | Impregnation type cathode and its manufacturing process |
| JPS61264625A (en) * | 1985-05-20 | 1986-11-22 | Hitachi Ltd | Impregnated type cathode |
| JPH08138536A (en) * | 1994-11-15 | 1996-05-31 | Hitachi Ltd | Impregnated cathode, manufacture thereof, and cathode-ray tube using this |
| CN101335166A (en) * | 2007-06-27 | 2008-12-31 | 中国科学院电子学研究所 | Cathode three-element alloy film and method for preparing film covered dipping diffusion cathode |
| CN103050354A (en) * | 2011-10-17 | 2013-04-17 | 中国科学院电子学研究所 | Storage film-coating dipped barium-tungsten cathode and preparation method |
| CN102628136A (en) * | 2012-04-13 | 2012-08-08 | 北京工业大学 | Rhenium tungsten based cathode material and preparation method thereof |
| JP2017066463A (en) * | 2015-09-29 | 2017-04-06 | 住友金属鉱山株式会社 | Ni-COATED COPPER POWDER, AND CONDUCTIVE PASTE, CONDUCTIVE PAINT AND CONDUCTIVE SHEET USING THE SAME, AND METHOD FOR PRODUCING Ni-COATED COPPER POWDER |
Non-Patent Citations (3)
| Title |
|---|
| 《High Current Density Ternary-Alloy-Film Dispenser Cathode for Terahertz Vacuum Devices》;R.K. Barik 等;《 2011 IEEE International Vacuum Electronics Conference (IVEC)》;第43-44页 * |
| 《新型三元混合基钡钨阴极的发射性能研究》;张红卫 等;《电子器件》;第第30卷卷(第第1期期);第57-59页 * |
| 《新型钨铼混合基阴极的热电子发射性能》;赖陈 等;《稀有金属材料与工程 》;第第45卷卷(第第7期期);第1871-1875页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113936981A (en) | 2022-01-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4797593A (en) | Cathode for electron tube | |
| CN110303165B (en) | Impregnated scandium oxide doped rhenium-tungsten multiphase mixed base diffusion cathode and preparation method thereof | |
| US7722804B2 (en) | Method of manufacturing a pressed scandate dispenser cathode | |
| JPH0584032B2 (en) | ||
| US4570099A (en) | Thermionic electron emitters | |
| JP5698882B1 (en) | Capacitor anode body and manufacturing method thereof | |
| CN109390195B (en) | Scandium-containing cathode at top layer of submicron structure and preparation method thereof | |
| CN113936981B (en) | Preparation method of impregnated tungsten-rhenium-osmium ternary mixed base diffusion cathode | |
| Takeuchi et al. | Rapid preparation of dense (La0. 9Sr0. 1) CrO3 ceramics by spark‐plasma sintering | |
| JPH1021932A (en) | Solid electrolyte type fuel cell and its manufacture | |
| TW526504B (en) | Method to produce an electrode and method to produce a capacitor | |
| US4275123A (en) | Hot-cathode material and production thereof | |
| JP4131709B2 (en) | Manufacturing method of solid electrolytic capacitor | |
| CN115947598B (en) | Antiferroelectric material capable of being co-fired with base metal inner electrode and preparation method thereof | |
| CN105788996A (en) | Sub-micron film scandium-tungsten cathode and preparation method thereof | |
| US4236287A (en) | Method of making a ruggedized high current density cathode | |
| CN1304152C (en) | Production for powdery diffused cathode base material containing scandium | |
| JP3667297B2 (en) | Solid oxide fuel cell and method for producing the same | |
| CN111036914A (en) | Additive manufacturing method of tungsten-based diffusion cathode | |
| JP5527664B2 (en) | Manufacturing method of fuel cell | |
| CN113929498B (en) | Coating for preparing barrier layer, preparation method of barrier layer and barrier layer | |
| JPH01267927A (en) | Solid-liquid matrix cathode | |
| WO2020123639A1 (en) | Method for producing an infiltrated solid oxide fuel cell layer | |
| KR102335014B1 (en) | Electrode material for solid oxide fuel cell and method for manufacturing the same | |
| JPWO2013190885A1 (en) | Solid electrolytic capacitor anode body |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |