CN113932734B - Wafer edge contour tester - Google Patents
Wafer edge contour tester Download PDFInfo
- Publication number
- CN113932734B CN113932734B CN202111393274.8A CN202111393274A CN113932734B CN 113932734 B CN113932734 B CN 113932734B CN 202111393274 A CN202111393274 A CN 202111393274A CN 113932734 B CN113932734 B CN 113932734B
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- ring
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- fixedly arranged
- light source
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V21/00—Supporting, suspending, or attaching arrangements for lighting devices; Hand grips
- F21V21/14—Adjustable mountings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B15/00—Special procedures for taking photographs; Apparatus therefor
- G03B15/02—Illuminating scene
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
- F21Y2115/00—Light-generating elements of semiconductor light sources
- F21Y2115/10—Light-emitting diodes [LED]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a wafer edge contour tester, which belongs to the technical field of wafer detection equipment and comprises a base, wherein a wafer fixing assembly is fixedly arranged at the top of the base, an adjustable light source assembly is fixedly arranged at the top of the base and positioned at one side of the wafer fixing assembly, the adjustable light source assembly comprises a movable module, a light source module and an adjusting module, and the adjusting module comprises a fixing ring; according to the invention, the position of the light source module can be moved by the movable module through the arrangement of the adjustable light source assembly, the light source module can supplement light to the wafer through the LED light supplementing lamp, the use position of the light source module can be adjusted by the adjusting module, the use angle of the light source module can be adjusted through the arrangement of the adjustable connecting assembly, the use position and angle of the LED light supplementing lamp can be conveniently adjusted through the arrangement of the adjustable connecting assembly, the light supplementing effect is effectively improved, and the image capturing effect of the camera is further improved.
Description
Technical Field
The invention relates to the technical field of wafer detection equipment, in particular to a wafer edge contour tester.
Background
The wafer edge contour tester is the latest keyless measuring equipment based on machine vision, can replace the traditional tools such as calipers, and the like, realizes high-efficiency accurate measurement, and the basic workflow of the wafer edge contour tester is as follows: the method comprises the steps of connecting a camera, turning on a light source, starting software, placing a product to be tested on a detection platform, collecting an image, configuring a detection step, setting output items, setting parameters such as a proportion coefficient, a compensation coefficient and a tolerance for the output items, clicking to start detection after the setting is completed, replacing the product, automatically detecting in real time by a program, outputting a result, pressing a space key to record data, and carrying out statistical analysis and report output after the product is tested.
Most of the auxiliary light sources used in the existing wafer edge contour tester are external light sources, so that a user needs to adjust the auxiliary light sources on site according to the use requirement, and the adjustment is inconvenient, and therefore the wafer edge contour tester needs to be proposed.
Disclosure of Invention
The invention aims to provide a wafer edge contour tester, which has the advantage of being convenient for adjusting a light source used by the wafer edge contour tester so as to solve the problems in the prior art.
In order to achieve the above purpose, the invention provides a wafer edge profile tester, which comprises a base, wherein a wafer fixing component is fixedly arranged at the top of the base, an adjustable light source component is fixedly arranged at the top of the base and positioned at one side of the wafer fixing component, the adjustable light source component comprises a movable module, a light source module and an adjusting module, the adjusting module comprises a fixed ring, a fixed groove is formed in the inner ring of the fixed ring, a connecting ring is slidingly connected with the inner cavity of the fixed groove, the surface of the connecting ring penetrates through the fixed groove and extends to the outside of the fixed groove, the light source module is fixedly arranged on the inner ring of the connecting ring, and the connecting ring is driven by a driving component;
the driving assembly comprises a fixing plate and a gear ring, wherein the fixing plate is fixedly arranged on the surface of the fixing ring, the gear ring is fixedly arranged on the outer ring of the connecting ring, the gear ring is in sliding connection with the inner wall of the fixing groove, a driving motor is fixedly arranged on the surface of the fixing plate, a driving gear is fixedly arranged on an output shaft of the driving motor, and the top of the driving gear penetrates through the fixing ring and extends to the inner cavity of the fixing groove to be meshed with the surface of the gear ring.
Preferably, the light source module comprises LED light filling lamps, the LED light filling lamps are provided with four groups, and the four groups of LED light filling lamps are fixedly arranged on the inner ring of the connecting ring at equal intervals.
Preferably, the movable module comprises a servo motor and a channel, wherein the servo motor is fixedly arranged at the front end and the rear end of one side of the base, the channel is arranged in the base, the channel and the servo motor are correspondingly arranged, a threaded rod is supported by an inner cavity bearing of the channel, an output shaft of the servo motor penetrates through the base and extends to the inner cavity of the channel and one end of the threaded rod, a sliding block is connected with the surface of the threaded rod in a threaded manner, a connecting plate is fixedly arranged at the top of the sliding block, the top of the connecting plate penetrates through the channel and extends to the upper side of the base, and the connecting plate is connected with a fixing ring through an adjustable connecting assembly.
Preferably, the adjustable connecting assembly comprises fixing rods fixedly mounted on the front side and the rear side of the fixing ring, one end of the fixing rod, far away from the fixing ring, is supported by a surface bearing of the connecting plate, a rotary damper is fixedly mounted on one side, far away from the fixing ring, of the connecting plate, and one end, far away from the fixing ring, of the fixing rod penetrates through the connecting plate and extends to the outer portion of the connecting plate to be fixedly mounted with an inner ring of the rotary damper.
Preferably, the sliding bars are fixedly arranged on the front side and the rear side of the inner cavity of the channel, sliding grooves matched with the sliding bars are formed in the front side and the rear side of the sliding blocks, and the inner walls of the sliding grooves are in sliding connection with the surfaces of the sliding bars.
Preferably, the wafer fixing assembly comprises a supporting plate fixedly mounted on the top of the base, a bottom plate is hinged to the surface of the supporting plate, a vacuum chuck is fixedly mounted on one side of the bottom plate, and the vacuum chuck and the supporting plate are positioned through a positioning assembly.
Preferably, the positioning assembly comprises a positioning groove and a positioning column, the positioning column is fixedly arranged on the surface of the supporting plate, the positioning groove is formed in one side, far away from the vacuum chuck, of the bottom plate, the inner cavity of the positioning groove is fixedly provided with a magnet block, and one end of the positioning column penetrates through the positioning groove and extends to the inner cavity of the positioning groove to be magnetically attracted with the magnet block.
Preferably, the annular limiting rods are fixedly installed on two sides of the inner cavity of the fixing groove, the limiting grooves matched with the annular limiting rods are formed in the surfaces of the connecting rings, and the inner walls of the limiting grooves are in sliding connection with the surfaces of the annular limiting rods.
Preferably, the bottom of the fixed ring is provided with a through groove, the top of the through groove is communicated with the bottom of the fixed groove, the surface of the driving gear is in sliding connection with the inner cavity of the through groove, and the top of the driving gear penetrates through the groove and extends to the inner cavity of the fixed groove to be meshed with the surface of the gear ring.
Preferably, the surface of the base is provided with a moving groove matched with the connecting plate, the bottom of the moving groove is communicated with the top of the channel, and the surface of the connecting plate is in sliding connection with the inner wall of the moving groove.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the position of the light source module can be moved by the movable module through the arrangement of the adjustable light source assembly, the light source module can supplement light to the wafer through the LED light supplementing lamp, the use position of the light source module can be adjusted by the adjusting module, the use angle of the light source module can be adjusted through the arrangement of the adjustable connecting assembly, the use position and angle of the LED light supplementing lamp can be conveniently adjusted through the arrangement of the adjustable connecting assembly, the light supplementing effect is effectively improved, and the image capturing effect of the camera is further improved;
2. according to the invention, the wafer to be detected can be fixed through the arrangement of the wafer fixing assembly, ninety-degree rotation can be carried out between the vacuum chuck and the supporting plate through the hinge piece, the advantages of detecting the edge profile and the edge thickness of the wafer can be realized, and the detection angle of the wafer can be fixed through the arrangement of the positioning assembly.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic view of a partial structure of the inside of the fixing groove of the present invention;
FIG. 3 is a schematic view of the structure of the annular stop lever of the present invention;
FIG. 4 is a schematic view of a portion of the drive assembly of the present invention;
FIG. 5 is a schematic view of a wafer holder assembly according to the present invention;
FIG. 6 is a schematic diagram of a mobile module according to the present invention;
FIG. 7 is a schematic view of a slide bar according to the present invention.
In the figure: 1. a base; 2. a fixing ring; 3. a fixing groove; 4. a connecting ring; 5. a fixing plate; 6. a gear ring; 7. a driving motor; 8. a drive gear; 9. an LED light supplementing lamp; 10. a servo motor; 11. a channel; 12. a threaded rod; 13. a slide block; 14. a connecting plate; 15. a fixed rod; 16. a rotary damper; 17. a slide bar; 18. a support plate; 19. a bottom plate; 20. a vacuum chuck; 21. a positioning groove; 22. positioning columns; 23. a magnet block; 24. an annular limiting rod; 25. a through groove; 26. and a moving groove.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-7, the invention provides a wafer edge contour tester, which comprises a base 1, wherein a wafer fixing component is fixedly arranged at the top of the base 1, the wafer fixing component comprises a supporting plate 18 fixedly arranged at the top of the base 1, the surface of the supporting plate 18 is hinged with a bottom plate 19, one side of the bottom plate 19 is fixedly provided with a vacuum chuck 20, the vacuum chuck 20 and the supporting plate 18 are positioned by a positioning component, the positioning component comprises a positioning groove 21 and a positioning column 22, the positioning column 22 is fixedly arranged on the surface of the supporting plate 18, the positioning groove 21 is arranged on one side of the bottom plate 19 far away from the vacuum chuck 20, a magnet block 23 is fixedly arranged in an inner cavity of the positioning groove 21, and one end of the positioning column 22 penetrates through the positioning groove 21 and extends to the inner cavity of the positioning groove 21 to be magnetically attracted with the magnet block 23;
the wafer to be detected can be fixed by the arrangement of the wafer fixing component so as to test the outline of the wafer, the wafer to be detected can be fixed by the arrangement of the vacuum chuck 20, in the embodiment, the vacuum chuck 20 is communicated with vacuum equipment (such as a vacuum generator and the like, not shown) through a connecting pipe, then the wafer to be detected is contacted with the vacuum chuck 20, the vacuum equipment is started to suck, so that negative air pressure is generated in the chuck, the wafer to be detected is firmly sucked, when a user needs to take down the wafer, the wafer can be stably inflated into the vacuum chuck 20, the negative air pressure in the vacuum chuck 20 is changed into zero air pressure or slightly positive air pressure, and the vacuum chuck 20 can be separated from the wafer;
in this embodiment, the vacuum chuck 20 is hinged to the support plate 18 through a hinge, so that the detection angle of the wafer can be adjusted, in this embodiment, the support plate 18 is L-shaped, positioning columns 22 are fixedly installed on the top and the side surfaces of the support plate 18, when the edge profile of the wafer needs to be detected, the positioning columns 22 on the side surfaces of the support plate 18 can be magnetically attracted to the magnet blocks 23, when the edge thickness of the wafer needs to be detected, the positioning columns 22 on the top of the support plate 18 can be magnetically attracted to the magnet blocks 23, in this embodiment, the rotation angle of the wafer is ninety degrees, so that the edge profile and the edge thickness of the wafer can be effectively detected, and in this embodiment, the positioning columns 22 are made of metal materials and can be magnetically attracted to the magnet blocks 23;
the top of the base 1 and one side of the wafer fixing assembly are fixedly provided with an adjustable light source assembly, the adjustable light source assembly comprises a movable module, a light source module and an adjusting module, the adjusting module comprises a fixing ring 2, a fixing groove 3 is formed in the inner ring of the fixing ring 2, a connecting ring 4 is slidably connected to the inner cavity of the fixing groove 3, annular limiting rods 24 are fixedly arranged on two sides of the inner cavity of the fixing groove 3, limiting grooves matched with the annular limiting rods 24 are formed in the surfaces of the connecting ring 4, the inner walls of the limiting grooves are slidably connected with the surfaces of the annular limiting rods 24, the surfaces of the connecting ring 4 penetrate through the fixing groove 3 and extend to the outer part of the fixing groove 3, the light source module is fixedly arranged on the inner ring of the connecting ring 4, the light source module comprises LED light supplementing lamps 9, the LED light supplementing lamps 9 are provided with four groups, and the LED light supplementing lamps 9 are fixedly arranged on the inner ring of the connecting ring 4 at equal intervals;
through the setting of the light source module, the LED light filling lamp 9 can carry out light filling to the wafer to promote the image capturing effect of camera, through the setting of adjusting the module, the tie-ring 4 is in the same place with fixed slot 3 sliding connection, can adjust the position of use of LED light filling lamp 9 through rotating tie-ring 4, in order to promote the light filling effect, through the cooperation use of annular gag lever post 24 and spacing groove, can promote tie-ring 4 pivoted stability, effectively played spacing effect to tie-ring 4;
the connecting ring 4 is driven by a driving assembly, the driving assembly comprises a fixed plate 5 and a gear ring 6, the fixed plate 5 is fixedly arranged on the surface of the fixed ring 2, the gear ring 6 is fixedly arranged on the outer ring of the connecting ring 4, the gear ring 6 is in sliding connection with the inner wall of the fixed groove 3, a driving motor 7 is fixedly arranged on the surface of the fixed plate 5, a driving gear 8 is fixedly arranged on an output shaft of the driving motor 7, the top of the driving gear 8 penetrates through the fixed ring 2 and extends to the inner cavity of the fixed groove 3 to be meshed with the surface of the gear ring 6, a through groove 25 is formed in the bottom of the fixed ring 2, the top of the through groove 25 is communicated with the bottom of the fixed groove 3, the surface of the driving gear 8 is in sliding connection with the inner cavity of the through groove 25, and the top of the driving gear 8 penetrates through the groove 25 and extends to the inner cavity of the fixed groove 3 to be meshed with the surface of the gear ring 6;
through the arrangement of the driving assembly, when the use position of the LED light supplementing lamp 9 needs to be adjusted, the driving motor 7 can be opened through the external controller, the output shaft of the driving motor 7 drives the driving gear 8 to rotate, the rotation of the driving gear 8 drives the gear ring 6 to rotate, the rotation of the gear ring 6 drives the connecting ring 4 to rotate, the position of the LED light supplementing lamp 9 is adjusted, a rotating space can be provided for the driving gear 8 through the arrangement of the through groove 25, and the driving motor 7 can be conveniently installed through the arrangement of the fixing plate 5;
the movable module comprises a servo motor 10 and a channel 11, wherein the servo motor 10 is fixedly arranged at the front end and the rear end of one side of a base 1, the channel 11 is arranged in the base 1, the channel 11 and the servo motor 10 are correspondingly arranged, an inner cavity bearing of the channel 11 is supported by a threaded rod 12, an output shaft of the servo motor 10 penetrates through the base 1 and extends to the inner cavity of the channel 11 to be fixedly arranged at one end of the threaded rod 12, a sliding rod 17 is fixedly arranged at the front side and the rear side of the inner cavity of the channel 11, sliding grooves matched with the sliding rod 17 are respectively formed in the front side and the rear side of the sliding rod 13, the inner wall of each sliding groove is in sliding connection with the surface of the sliding rod 17, a connecting plate 14 is fixedly arranged at the top of the sliding rod 13, the top end of the connecting plate 14 penetrates through the channel 11 and extends to the upper side of the base 1, a movable groove 26 matched with the connecting plate 14 is formed in the surface of the base 1, the bottom of the movable groove 26 is communicated with the top of the channel 11, and the surface of the connecting plate 14 is in sliding connection with the inner wall of the movable groove 26;
through the setting of the movable module, the use positions of the adjustable module and the light source module can be adjusted, when a user needs to adjust the use positions of the adjustable module and the light source module, the servo motor 10 can be opened through the external controller, the output shaft of the servo motor 10 drives the threaded rod 12 to rotate, the rotation of the threaded rod 12 drives the sliding block 13 to move in the inner cavity of the channel 11, the movement of the sliding block 13 drives the connecting plate 14 to move, the movement of the connecting plate 14 drives the adjustable module and the light source module to move through the adjustable connecting assembly, the purpose of adjusting the use positions of the adjustable module and the light source module is achieved, the sliding block 13 can be limited through the cooperation of the sliding rod 17 and the sliding groove, the movement stability of the sliding block 13 is improved, and a movement space can be provided for the connecting plate 14 through the setting of the moving groove 26;
the connecting plate 14 is connected with the fixed ring 2 through an adjustable connecting assembly, the adjustable connecting assembly comprises a fixed rod 15 fixedly arranged on the front side and the rear side of the fixed ring 2, one end of the fixed rod 15 away from the fixed ring 2 is supported by a surface bearing of the connecting plate 14, one side of the connecting plate 14 away from the fixed ring 2 is fixedly provided with a rotary damper 16, one end of the fixed rod 15 away from the fixed ring 2 penetrates through the connecting plate 14 and extends to the outside of the connecting plate 14 to be fixedly arranged with the inner ring of the rotary damper 16, the adjustable connecting assembly comprises a fixed rod 15 fixedly arranged on the front side and the rear side of the fixed ring 2, one end of the fixed rod 15 away from the fixed ring 2 is supported by a surface bearing of the connecting plate 14, one side of the connecting plate 14 away from the fixed ring 2 is fixedly provided with the rotary damper 16, and one end of the fixed rod 15 away from the fixed ring 2 penetrates through the connecting plate 14 and extends to the outside of the connecting plate 14 to be fixedly arranged with the inner ring of the rotary damper 16;
through adjustable coupling assembling's setting, can adjust the angle of solid fixed ring 2, and then the angle of use of adjustment light source module, the user is when need adjusting the angle of use of light source module, rotatable solid fixed ring 2, gu fixed ring 2's rotation can drive LED light filling lamp 9 synchronous rotation, adjust its angle of use, with promote the light filling effect, through setting up of dead lever 15, dead lever 15 rotates through supporting bearing and connecting plate 14 to be connected together, can be convenient for carry out angle modulation to solid fixed ring 2, through setting up of rotary damper 16, can fix gu fixed ring 2's inclination, make it carry out the light filling work with fixed inclination.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. Wafer edge profile tester, including base (1), its characterized in that: the adjustable light source module comprises a movable module, a light source module and an adjusting module, wherein the adjusting module comprises a fixed ring (2), a fixed groove (3) is formed in an inner ring of the fixed ring (2), a connecting ring (4) is slidably connected to an inner cavity of the fixed groove (3), the surface of the connecting ring (4) penetrates through the fixed groove (3) and extends to the outside of the fixed groove (3), the light source module is fixedly arranged on the inner ring of the connecting ring (4), and the connecting ring (4) is driven by a driving assembly;
the driving assembly comprises a fixed plate (5) and a gear ring (6), the fixed plate (5) is fixedly arranged on the surface of the fixed ring (2), the gear ring (6) is fixedly arranged on the outer ring of the connecting ring (4), the gear ring (6) is in sliding connection with the inner wall of the fixed groove (3), a driving motor (7) is fixedly arranged on the surface of the fixed plate (5), a driving gear (8) is fixedly arranged on the output shaft of the driving motor (7), and the top of the driving gear (8) penetrates through the fixed ring (2) and extends to the inner cavity of the fixed groove (3) to be meshed with the surface of the gear ring (6);
the light source module comprises LED light supplementing lamps (9), wherein the LED light supplementing lamps (9) are provided with four groups, and the four groups of LED light supplementing lamps (9) are fixedly arranged on the inner ring of the connecting ring (4) at equal intervals;
the utility model provides a movable module includes servo motor (10) and channel (11), servo motor (10) fixed mounting is in the front and back both ends of base (1) one side, the inside in base (1) is seted up in channel (11), channel (11) are corresponding setting with servo motor (10), the inner chamber bearing of channel (11) supports has threaded rod (12), the output shaft of servo motor (10) runs through base (1) and extends to the inner chamber of channel (11) and the one end fixed mounting of threaded rod (12), the surface threaded connection of threaded rod (12) has slider (13), the top fixed mounting of slider (13) has connecting plate (14), the top of connecting plate (14) runs through channel (11) and extends to the top of base (1), connecting plate (14) are in the same place through adjustable coupling assembling and solid fixed ring (2).
2. The wafer edge profile tester of claim 1, wherein: the adjustable connecting assembly comprises fixing rods (15) fixedly mounted on the front side and the rear side of the fixing ring (2), one end of the fixing ring (2) away from the fixing rods (15) is supported by a surface bearing of the connecting plate (14), one side, away from the fixing ring (2), of the connecting plate (14) is fixedly provided with a rotary damper (16), and one end, away from the fixing ring (2), of the fixing rods (15) penetrates through the connecting plate (14) and extends to the outer portion of the connecting plate (14) to be fixedly mounted with an inner ring of the rotary damper (16).
3. The wafer edge profile tester of claim 1, wherein: slide bars (17) are fixedly mounted on the front side and the rear side of the inner cavity of the channel (11), sliding grooves matched with the slide bars (17) are formed in the front side and the rear side of the sliding block (13), and the inner walls of the sliding grooves are in sliding connection with the surfaces of the slide bars (17).
4. The wafer edge profile tester of claim 1, wherein: the wafer fixing assembly comprises a supporting plate (18) fixedly arranged at the top of the base (1), a bottom plate (19) is hinged to the surface of the supporting plate (18), a vacuum chuck (20) is fixedly arranged on one side of the bottom plate (19), and the vacuum chuck (20) and the supporting plate (18) are positioned through a positioning assembly.
5. The wafer edge profile tester as recited in claim 4, wherein: the positioning assembly comprises a positioning groove (21) and a positioning column (22), wherein the positioning column (22) is fixedly arranged on the surface of the supporting plate (18), the positioning groove (21) is formed in one side, far away from the vacuum chuck (20), of the bottom plate (19), a magnet block (23) is fixedly arranged in an inner cavity of the positioning groove (21), and one end of the positioning column (22) penetrates through the positioning groove (21) and extends to the inner cavity of the positioning groove (21) to magnetically attract the magnet block (23).
6. The wafer edge profile tester of claim 1, wherein: annular limiting rods (24) are fixedly mounted on two sides of the inner cavity of the fixed groove (3), limiting grooves matched with the annular limiting rods (24) are formed in the surfaces of the connecting rings (4), and the inner walls of the limiting grooves are in sliding connection with the surfaces of the annular limiting rods (24).
7. The wafer edge profile tester of claim 1, wherein: the bottom of solid fixed ring (2) has seted up logical groove (25), the top of logical groove (25) communicates with the bottom of fixed slot (3), the surface of drive gear (8) and the inner chamber sliding connection of logical groove (25), the top of drive gear (8) runs through groove (25) and extends to the inner chamber of fixed slot (3) and the surface engagement of ring gear (6).
8. The wafer edge profile tester of claim 1, wherein: the surface of base (1) is offered and is moved groove (26) with connecting plate (14) looks adaptation, the bottom of moving groove (26) communicates with the top of channel (11), the surface of connecting plate (14) and the inner wall sliding connection of moving groove (26).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111393274.8A CN113932734B (en) | 2021-11-23 | 2021-11-23 | Wafer edge contour tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111393274.8A CN113932734B (en) | 2021-11-23 | 2021-11-23 | Wafer edge contour tester |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113932734A CN113932734A (en) | 2022-01-14 |
| CN113932734B true CN113932734B (en) | 2023-08-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111393274.8A Active CN113932734B (en) | 2021-11-23 | 2021-11-23 | Wafer edge contour tester |
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| CN (1) | CN113932734B (en) |
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