CN113921590A - Heterogeneous P-type modulated gallium oxide power diode and preparation method thereof - Google Patents
Heterogeneous P-type modulated gallium oxide power diode and preparation method thereof Download PDFInfo
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- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 title claims abstract description 45
- 229910001195 gallium oxide Inorganic materials 0.000 title claims abstract description 45
- 238000002360 preparation method Methods 0.000 title claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 43
- 238000005530 etching Methods 0.000 claims abstract description 21
- 229910052751 metal Inorganic materials 0.000 claims description 33
- 239000002184 metal Substances 0.000 claims description 33
- 238000004519 manufacturing process Methods 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 13
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 10
- 229910052718 tin Inorganic materials 0.000 claims description 6
- 125000005842 heteroatom Chemical group 0.000 claims 3
- 230000015556 catabolic process Effects 0.000 abstract description 5
- 238000009826 distribution Methods 0.000 abstract description 3
- 230000005684 electric field Effects 0.000 abstract description 3
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000000137 annealing Methods 0.000 description 5
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 5
- 238000005566 electron beam evaporation Methods 0.000 description 4
- 238000001883 metal evaporation Methods 0.000 description 4
- 229910007271 Si2O3 Inorganic materials 0.000 description 3
- 238000005275 alloying Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004151 rapid thermal annealing Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005036 potential barrier Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0646—PN junctions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
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Abstract
The invention relates to a heterogeneous P-type modulated gallium oxide power diode and a preparation method thereof, wherein the heterogeneous P-type modulated gallium oxide power diode comprises the following components: the cathode, the substrate layer and the drift layer are sequentially stacked from bottom to top; etching the drift layer to form a plurality of columnar structures, and forming a groove between every two adjacent columnar structures; the dielectric layer is arranged above the columnar structure and at the bottom and the inner wall of the groove, and the dielectric layer and the drift layer form a heterogeneous PN junction structure; the anode is disposed on the dielectric layer. According to the heterogeneous P-type modulation gallium oxide power diode, the plurality of columnar structures are formed on the drift layer through etching, the grooves are formed between the adjacent columnar structures, the groove structures are combined with the P-type NiO medium layer, the P-type NiO is used for modulating the electric field distribution of the gallium oxide channel on the side face, and the breakdown voltage of the gallium oxide power diode is improved.
Description
Technical Field
The invention belongs to the technical field of semiconductor power devices, and particularly relates to a heterogeneous P-type modulated gallium oxide power diode and a preparation method thereof.
Background
Due to beta-Ga2O3The crystal material has ultra-wide forbidden band width and higher breakdown field strength, so that the beta-Ga2O3The manufactured power device has the characteristics of high voltage resistance and high power, and has the potential of application in the field of power electronics. In recent years, numerous scholars have begun to work on β -Ga2O3The research on crystal materials and power devices is carried out, but the breakdown field strength of the devices still has a large difference from the theoretical limit, and meanwhile, the thermal field emission current (TFE leakage current) is still large.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a heterogeneous P-type modulated gallium oxide power diode and a preparation method thereof. The technical problem to be solved by the invention is realized by the following technical scheme:
the invention provides a heterogeneous P-type modulated gallium oxide power diode, which comprises: a cathode, a substrate layer, a drift layer, a dielectric layer and an anode, wherein,
the cathode, the substrate layer and the drift layer are sequentially stacked from bottom to top;
etching the drift layer to form a plurality of columnar structures, and forming a groove between every two adjacent columnar structures;
the dielectric layer is arranged above the columnar structure and at the bottom and the inner wall of the groove, and the dielectric layer and the drift layer form a heterogeneous PN junction structure;
the anode is disposed on the dielectric layer.
In one embodiment of the invention, the substrate layer and the drift layer are both Si-or Sn-doped beta-Ga2O3And the doping concentration of the drift layer is lower than that of the substrate layer.
In one embodiment of the invention, the doping concentration of the drift layer is 1 × 1015cm-3-1×1017cm-3The thickness is 2-14 μm.
In an embodiment of the invention, the depth of the groove is 100-1300nm, and the distance between adjacent columnar structures is 10-110 μm.
In one embodiment of the invention, the dielectric layer is a P-type NiO material.
In one embodiment of the invention, the thickness of the dielectric layer is 50-350 nm.
In one embodiment of the invention, the cathode is a Ti/Au metal stack and the anode is a Ni/Au metal stack.
The invention provides a preparation method of a heterogeneous P-type modulated gallium oxide power diode, which comprises the following steps:
s1: selecting a substrate layer, and preparing a drift layer on the upper surface of the substrate layer;
s2: preparing a cathode on the lower surface of the substrate layer;
s3: etching the drift layer to form a plurality of columnar structures, and forming a groove between every two adjacent columnar structures;
s4: depositing a dielectric layer above the columnar structure and at the bottom and the inner wall of the groove;
s5: preparing an anode on the upper surface of the dielectric layer;
the dielectric layer and the drift layer form a heterogeneous PN junction structure.
In one embodiment of the invention, the substrate layer and the drift layer are both Si-or Sn-doped beta-Ga2O3A material, and the doping concentration of the drift layer is lower than that of the substrate layer;
the doping concentration of the drift layer is 1 multiplied by 1015cm-3-1×1017cm-3The thickness is 2-14 μm.
In one embodiment of the invention, the dielectric layer is made of a P-type NiO material, and the thickness of the dielectric layer is 50-350 nm.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the heterogeneous P-type modulated gallium oxide power diode, the plurality of columnar structures are formed on the drift layer through etching, meanwhile, the grooves are formed between the adjacent columnar structures, and the groove structures are combined with the P-type NiO medium layer, so that the electric field distribution of a P-type NiO modulated gallium oxide channel on the side surface is realized, and the breakdown voltage of the gallium oxide power diode is improved;
2. according to the heterogeneous P-type modulated gallium oxide power diode, the P-type NiO medium layer and the gallium oxide drift layer form a heterogeneous PN junction structure, and the potential barrier height of the heterogeneous P-type modulated gallium oxide power diode is larger than that of a Schottky structure, so that the reverse leakage current of an anode is obviously reduced.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention may be implemented in accordance with the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more clearly understood, the following preferred embodiments are described in detail with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic structural diagram of a heterogeneous P-type modulation gallium oxide power diode according to an embodiment of the present invention;
fig. 2 is a flowchart of a method for manufacturing a heterogeneous P-type modulation gallium oxide power diode according to an embodiment of the present invention;
fig. 3a to 3e are flow charts of processes for manufacturing a heterogeneous P-type modulated gallium oxide power diode according to an embodiment of the present invention.
Detailed Description
To further illustrate the technical means and effects of the present invention adopted to achieve the predetermined object, the following detailed description is provided with reference to the accompanying drawings and the detailed description for a heterogeneous P-type modulated gallium oxide power diode and a method for manufacturing the same according to the present invention.
The foregoing and other technical matters, features and effects of the present invention will be apparent from the following detailed description of the embodiments, which is to be read in connection with the accompanying drawings. The technical means and effects of the present invention adopted to achieve the predetermined purpose can be more deeply and specifically understood through the description of the specific embodiments, however, the attached drawings are provided for reference and description only and are not used for limiting the technical scheme of the present invention.
Example one
Referring to fig. 1, fig. 1 is a schematic structural diagram of a heterogeneous P-type modulated gallium oxide power diode according to an embodiment of the present invention, and as shown in the figure, the heterogeneous P-type modulated gallium oxide power diode according to the embodiment includes a cathode 1, a substrate layer 2, a drift layer 3, a dielectric layer 4, and an anode 5.
Wherein, the cathode 1, the substrate layer 2 and the drift layer 3 are sequentially stacked from bottom to top; a plurality of columnar structures 301 are formed on the drift layer 3 through etching, and a groove 302 is formed between every two adjacent columnar structures 301; the dielectric layer 4 is arranged above the columnar structure 301 and at the bottom and the inner wall of the groove 302, and the dielectric layer 4 and the drift layer 3 form a heterogeneous PN junction structure; an anode 5 is arranged on the dielectric layer 4.
In this embodiment, both the substrate layer 2 and the drift layer 3 are Si or Sn doped beta-Ga2O3Material and the doping concentration of the drift layer 3 is lower than the doping concentration of the substrate layer 2.
Optionally, the doping concentration of the drift layer 3 is 1 × 1015cm-3-1×1017cm-3The thickness is 2-14 μm.
Further, in the present embodiment, the depth of the groove 302 is 100-1300nm, and the distance between the adjacent pillar structures 301 is 10-110 μm.
In this embodiment, the dielectric layer 4 is a P-type NiO material, and the thickness of the dielectric layer 4 is 50-350 nm.
In this embodiment, the cathode 1 is a Ti/Au metal laminate and the anode 5 is a Ni/Au metal laminate.
According to the heterogeneous P-type modulation gallium oxide power diode, the plurality of columnar structures are formed on the drift layer through etching, meanwhile, the grooves are formed between the adjacent columnar structures, the groove structures are combined with the P-type NiO medium layer, the P-type NiO is used for modulating the electric field distribution of the gallium oxide channel on the side face, and the breakdown voltage of the gallium oxide power diode is improved.
In addition, in the heterogeneous P-type modulated gallium oxide power diode of the embodiment, the P-type NiO dielectric layer and the gallium oxide drift layer form a heterogeneous PN junction structure, and the potential barrier height of the heterogeneous P-type modulated gallium oxide power diode is larger than that of the schottky structure, so that the reverse leakage current of the anode is obviously reduced.
Example two
Referring to fig. 2, fig. 2 is a flowchart of a method for manufacturing a heterogeneous P-type modulation gallium oxide power diode according to an embodiment of the present invention, where as shown in the figure, the method for manufacturing a heterogeneous P-type modulation gallium oxide power diode according to the embodiment includes:
s1: selecting a substrate layer, and preparing a drift layer on the upper surface of the substrate layer;
in the present embodiment, heavily doped β -Ga of Si or Sn is optionally selected2O3As a substrate layer, heavily doped beta-Ga in Si or Sn by HVPE (Hydride Vapor Phase Epitaxy) process2O3Growing a layer of Si or Sn lightly doped beta-Ga on the substrate2O3As a drift layer.
In this embodiment, the doping concentration of the drift layer is lower than the doping concentration of the substrate layer.
Optionally, the drift layer has a thickness of 2-14 μm and a doping concentration of 1 × 1015cm-3-1×1017cm-3。
Optionally, the substrate layer has a doping concentration of 5 × 1018cm-3-5×1019cm-3。
S2: preparing a cathode on the lower surface of the substrate layer;
specifically, the method comprises the following steps:
s21: depositing a Ti/Au metal lamination layer on the lower surface of the substrate layer;
s22: placing the device at N2And carrying out rapid annealing treatment in the atmosphere to form a cathode, wherein the annealing temperature is 400-600 ℃.
In this embodiment, the thickness of the Ti/Au metal stacks is optionally 20/200nm, respectively.
S3: etching the drift layer to form a plurality of columnar structures, and forming a groove between every two adjacent columnar structures;
specifically, lightly doped beta-Ga is etched by utilizing an ICP plasma etcher2O3And etching the drift layer to form a plurality of columnar structures.
Optionally, the etching depth is 100-1300nm, and the distance between adjacent pillar structures 301 is 10-110 μm.
S4: depositing a dielectric layer above the columnar structure and at the bottom and the inner wall of the groove to form a dielectric layer;
specifically, P-type NiO is sputtered and deposited above the columnar structure and on the bottom and the inner wall of the groove by utilizing a sprayer device, and a dielectric layer is formed.
Optionally, the dielectric layer has a thickness of 50-350 nm.
S5: preparing an anode on the upper surface of the dielectric layer;
specifically, an electron beam evaporation table is adopted for manufacturing an anode electrode, Ni/Au laminated metal is adopted as the metal, the thicknesses of the metal are 45/400nm respectively, and metal stripping is carried out after the metal evaporation is finished to form the anode.
Further, referring to fig. 3a to 3e, fig. 3a to 3e are flow charts of a manufacturing process of the heterogeneous P-type modulation gallium oxide power diode according to an embodiment of the present invention, and as shown in the figure, a method for manufacturing the heterogeneous P-type modulation gallium oxide power diode according to the embodiment is specifically described.
1. Preparing gallium oxide power diode with drift layer thickness of 2 mu m
Selecting Si heavily doped beta-Ga2O3As a substrate layer, the doping concentration is 5 × 1018cm-3Heavily doped beta-Ga in Si2O3At the upper side, by HVPE process, epitaxially growing a layer of Si lightly doped beta-Ga2O3The layer is used as a drift layer, wherein the thickness of the drift layer is 2 μm, and the doping concentration of the drift layer is 1 × 1015cm-3As shown in fig. 3 a.
And 2, manufacturing a cathode electrode.
2.1) sputtering cathode metal by a Sputter device under the substrate layer, wherein the metal is Ti/Au in sequence and the thickness of the metal is 20/200 nm;
2.2) N at 400 ℃ with annealing furnace2And (5) performing rapid thermal annealing for 30 seconds in the atmosphere, and alloying the cathode metal to finish the manufacture of the cathode electrode, as shown in fig. 3 b.
And 3, etching the drift layer to form a plurality of columnar structures.
And etching the drift layer by using an ICP plasma etcher to form a plurality of columnar structures, and forming a groove between every two adjacent columnar structures, as shown in figure 3 c.
Wherein the etching depth is 700nm, and the distance between adjacent columnar structures is 60 μm.
And 4, depositing a dielectric layer above the columnar structure and at the bottom and the inner wall of the groove to form the dielectric layer.
And sputtering and depositing P-type NiO above the columnar structure and at the bottom and the inner wall of the groove by utilizing a sprayer device to form a dielectric layer. As shown in fig. 3 d.
Wherein the thickness of the P-type NiO is 50 nm.
And 5, manufacturing an anode electrode.
And (3) adopting an electron beam evaporation table to manufacture an anode electrode, wherein the metal is Ni/Au laminated metal with the thickness of 45/400nm, and metal stripping is carried out after the metal evaporation is finished to form the anode, as shown in figure 3 e.
2. Gallium oxide power diode with drift layer thickness of 8 mu m is prepared
Selecting Si heavily doped beta-Ga2O3As a substrate layer, heavily doped beta-Ga in Si2O3Epitaxially growing a layer of Si lightly doped beta-Ga by HVPE process2O3The layer is used as a drift layer, wherein the thickness of the drift layer is 8 μm, and the doping concentration of the drift layer is 1 × 1016cm-3As shown in fig. 3 a.
And 2, manufacturing a cathode electrode.
2.1) sputtering cathode metal by a Sputter device under the substrate layer, wherein the metal is Ti/Au in sequence and the thickness of the metal is 20/200 nm;
2.2) N at 500 ℃ with an annealing furnace2And (5) performing rapid thermal annealing for 30 seconds in the atmosphere, and alloying the cathode metal to finish the manufacture of the cathode electrode, as shown in fig. 3 b.
And 3, etching the drift layer to form a plurality of columnar structures.
And etching the drift layer by using an ICP plasma etcher to form a plurality of columnar structures, and forming a groove between every two adjacent columnar structures, as shown in figure 3 c.
Wherein the etching depth is 100nm, and the distance between adjacent columnar structures is 10 μm.
And 4, depositing a dielectric layer above the columnar structure and at the bottom and the inner wall of the groove to form the dielectric layer.
And sputtering and depositing P-type NiO above the columnar structure and at the bottom and the inner wall of the groove by utilizing a sprayer device to form a dielectric layer. As shown in fig. 3 d.
Wherein the thickness of the P-type NiO is 200 nm.
And 5, manufacturing an anode electrode.
And (3) adopting an electron beam evaporation table to manufacture an anode electrode, wherein the metal is Ni/Au laminated metal with the thickness of 45/400nm, and metal stripping is carried out after the metal evaporation is finished to form the anode, as shown in figure 3 e.
3. Preparing gallium oxide power diode with drift layer thickness of 14 μm
Selecting Si heavily doped beta-Ga2O3As a substrate layer, heavily doped beta-Ga in Si2O3Epitaxially growing a layer of Si lightly doped beta-Ga by HVPE process2O3The layer is used as a drift layerThe thickness is 14 μm, and the doping concentration of the drift layer is 1 × 1017cm-3As shown in fig. 3 a.
And 2, manufacturing a cathode electrode.
2.1) sputtering cathode metal by a Sputter device under the substrate layer, wherein the metal is Ti/Au in sequence and the thickness of the metal is 20/200 nm;
2.2) N at 600 ℃ with an annealing furnace2And (5) performing rapid thermal annealing for 30 seconds in the atmosphere, and alloying the cathode metal to finish the manufacture of the cathode electrode, as shown in fig. 3 b.
And 3, etching the drift layer to form a plurality of columnar structures.
And etching the drift layer by using an ICP plasma etcher to form a plurality of columnar structures, and forming a groove between every two adjacent columnar structures, as shown in figure 3 c.
Wherein the etching depth is 1300nm, and the distance between adjacent columnar structures is 110 μm.
And 4, depositing a dielectric layer above the columnar structure and at the bottom and the inner wall of the groove to form the dielectric layer.
And sputtering and depositing P-type NiO above the columnar structure and at the bottom and the inner wall of the groove by utilizing a sprayer device to form a dielectric layer. As shown in fig. 3 d.
Wherein the thickness of the P-type NiO is 350 nm.
And 5, manufacturing an anode electrode.
And (3) adopting an electron beam evaporation table to manufacture an anode electrode, wherein the metal is Ni/Au laminated metal with the thickness of 45/400nm, and metal stripping is carried out after the metal evaporation is finished to form the anode, as shown in figure 3 e.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that an article or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of additional like elements in the article or device comprising the element. The directional or positional relationships indicated by "upper", "lower", "left", "right", etc., are based on the directional or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (10)
1. A heterogeneous P-type modulated gallium oxide power diode, comprising: a cathode (1), a substrate layer (2), a drift layer (3), a dielectric layer (4) and an anode (5), wherein,
the cathode (1), the substrate layer (2) and the drift layer (3) are sequentially stacked from bottom to top;
a plurality of columnar structures (301) are formed on the drift layer (3) in an etching mode, and grooves (302) are formed between every two adjacent columnar structures (301);
the dielectric layer (4) is arranged above the columnar structure (301) and at the bottom and the inner wall of the groove (302), and the dielectric layer (4) and the drift layer (3) form a heterogeneous PN junction structure;
the anode (5) is arranged on the dielectric layer (4).
2. A heterogeneous P-type modulated gallium oxide power diode according to claim 1, characterized in that the substrate layer (2) and the drift layer (3) are both Si or Sn doped β -Ga2O3A material, and the doping concentration of the drift layer (3) is lower than the doping concentration of the substrate layer (2).
3. A heterogeneous P-type modulated gallium oxide power diode according to claim 2, characterized by the doping concentration of the drift layer (3)Degree of 1X 1015cm-3-1×1017cm-3The thickness is 2-14 μm.
4. The hetero P-type modulated gallium oxide power diode according to claim 1, wherein the depth of the groove (302) is 100-1300nm, and the distance between adjacent pillar structures (301) is 10-110 μm.
5. The hetero P-type modulated gallium oxide power diode of claim 1, characterized in that the dielectric layer (4) is a P-type NiO material.
6. The hetero P-type modulated gallium oxide power diode according to claim 1, characterized in that the thickness of the dielectric layer (4) is 50-350 nm.
7. A heterogeneous P-type modulating gallium oxide power diode according to claim 1, characterized by the cathode (1) being a Ti/Au metal stack and the anode (5) being a Ni/Au metal stack.
8. A preparation method of a heterogeneous P-type modulation gallium oxide power diode is characterized by comprising the following steps:
s1: selecting a substrate layer, and preparing a drift layer on the upper surface of the substrate layer;
s2: preparing a cathode on the lower surface of the substrate layer;
s3: etching the drift layer to form a plurality of columnar structures, and forming a groove between every two adjacent columnar structures;
s4: depositing a dielectric layer above the columnar structure and at the bottom and the inner wall of the groove;
s5: preparing an anode on the upper surface of the dielectric layer;
the dielectric layer and the drift layer form a heterogeneous PN junction structure.
9. The method of manufacturing a heterogeneous P-type modulated gallium oxide power diode of claim 8, wherein the method comprisesCharacterized in that the substrate layer and the drift layer are both Si or Sn doped beta-Ga2O3A material, and the doping concentration of the drift layer is lower than that of the substrate layer;
the doping concentration of the drift layer is 1 multiplied by 1015cm-3-1×1017cm-3The thickness is 2-14 μm.
10. The method of claim 8, wherein the dielectric layer is a P-type NiO material and has a thickness of 50-350 nm.
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