CN113916947A - Humidity information identification system and method based on flexible humidity sensor array - Google Patents
Humidity information identification system and method based on flexible humidity sensor array Download PDFInfo
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Abstract
The invention relates to a humidity information identification system and method based on a flexible humidity sensor array. The humidity sensor comprises a flexible humidity sensor array, a data collector and a microcontroller electrically connected with the data collector, wherein the microcontroller can extract corresponding humidity characteristic information measured by each row of flexible humidity sensor units in the flexible humidity sensor array after processing the received humidity array information, and the humidity characteristic information comprises Yna times of high humidity, Ynb positions of high humidity and Ync state information of high humidity repeatedly appearing in each row; and the microcontroller compares the extracted humidity characteristic information of m rows with a humidity identification model prestored in the microcontroller so as to identify the humidity information corresponding to the humidity characteristic information. The invention can effectively realize the extraction of the humidity information and the identification of the humidity information, and improve the identification precision and reliability.
Description
Technical Field
The invention relates to a gesture recognition system and method, in particular to a humidity information recognition system and method based on a flexible humidity sensor array.
Background
With the development of the internet, human-computer interaction becomes more and more important, and interaction modes become more and more, so that the development of various human-computer interaction modes is particularly important. As a man-machine interaction carrier, the sensor can effectively convert signals sent by various human bodies into information which can be recognized by a machine. Common man-machine interaction sensors often require a human body to directly make physical contact with the sensor to generate signals, such as pressure sensors. Thus, due to the nature of physical contact, the interaction of physical contact inevitably results in mechanical wear of the sensor or, in some applications, is limited, such as the presence of noxious substances or gases within a noxious environment, resulting in physical contact not being direct at the time of the particular interaction.
In order to solve the problem of physical contact interaction mode, non-contact interaction sensors and the like are applied. However, conventional non-contact sensors often require more complicated manufacturing processes and expensive manufacturing equipment, such as infrared sensors. Therefore, the humidity sensor capable of effectively detecting the humidity of the fingertip can realize non-contact human-computer interaction, namely, the humidity generated by sweat evaporation of the fingertip of a human is used as an information source to serve as a human-computer interaction means.
When the means of human-computer interaction is realized by adopting the humidity sensor, the interaction can be realized without direct physical contact with the sensor, the service life of a human-computer interaction system can be prolonged, in addition, the manufacturing difficulty and cost can be reduced, and the device is environment-friendly and energy-saving.
In order to realize the interaction of load information, a humidity sensor array is generally required to be adopted, and when the humidity sensor array is adopted, the problem that how to effectively extract information and further effectively identify the information is urgently needed to be solved at present is solved.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides a humidity information identification system and method based on a flexible humidity sensor array, which can effectively realize extraction of humidity information and identification of the humidity information, improve identification precision and reliability, and simultaneously, when humidity data is processed and analyzed in a microcontroller, a cloud end does not need to be uploaded, so that the speed of processing information feedback is increased.
According to the technical scheme provided by the invention, the humidity information identification system based on the flexible humidity sensor array comprises the flexible humidity sensor array and a data acquisition unit electrically connected with the flexible humidity sensor array, wherein the flexible humidity sensor array comprises m rows and n columns of flexible humidity sensor units; the humidity sensor further comprises a microcontroller electrically connected with the data acquisition unit, when sampling time t passes under sampling frequency f, the data acquisition unit acquires humidity array information corresponding to the flexible humidity sensor array, and the data acquisition unit transmits the acquired humidity array information to the microcontroller;
after receiving the humidity array information, the microcontroller processes the received humidity array information to extract and obtain corresponding humidity characteristic information measured by any row of flexible humidity sensor units, wherein the humidity characteristic information comprises Yna of the occurrence number of high humidity, Ynb of the occurrence number of the high humidity and Ync of the repeated occurrence of the high humidity in each row;
and the microcontroller compares the extracted humidity characteristic information corresponding to all the rows of flexible humidity sensor units with a humidity identification model prestored in the microcontroller so as to identify the humidity information corresponding to the humidity characteristic information.
When the data acquisition unit passes through sampling time t under sampling frequency f, and the microcontroller processes the received humidity array information, adding t x f humidity arrays to obtain a humidity characteristic array, wherein the microcontroller can extract and obtain humidity characteristic information according to the humidity characteristic array; the state information Ync of high humidity repeatedly occurring per line in the humidity characteristic information includes the number of times high humidity repeatedly occurring and the position information of the repeated high humidity.
The microcontroller is also connected with the display screen, and the microcontroller can display and output the identified humidity information through the display screen;
one end of each row of flexible humidity sensor units in the flexible humidity sensor array is connected with a common end and then is in adaptive connection with the data acquisition unit, and the other end of each row of flexible humidity sensor units in the flexible humidity sensor array is connected with a data acquisition port of the data acquisition unit.
The flexible humidity sensor unit in the flexible humidity sensor array is prepared by adopting a semiconductor process, the flexible humidity sensor unit comprises a flexible substrate and a plurality of humidity-sensitive units arranged on the flexible substrate, and the humidity-sensitive units comprise humidity-sensitive bases arranged on the flexible substrate and humidity-sensitive nano forests matched with the humidity-sensitive bases.
The flexible humidity-sensitive sensor also comprises a substrate supporting layer arranged on the flexible substrate, and the substrate supporting layer and the humidity-sensitive base are the same process step layer;
the flexible substrate comprises a PET flexible film, a PI flexible film or a PEN flexible film, and the humidity-sensitive substrate comprises ITO.
The flexible humidity sensor unit is prepared by the following process, wherein the preparation process comprises the following steps:
step 1, providing a flexible substrate, and arranging a humidity sensitive material layer on the flexible substrate;
and 5, performing a nano forest process on the humidity-sensitive substrate coating body to obtain a humidity-sensitive nano forest matched with the humidity-sensitive substrate.
The polymer layer is photosensitive polyimide or non-photosensitive polyimide; the polymer layer has a thickness of 1 to 20 μm.
When the polymer layer is made of photosensitive polyimide, the humidity-sensitive substrate coating body is obtained after photoetching the polymer layer.
When the non-photosensitive polyimide is used as the polymer layer, the step 4 specifically comprises the following steps:
step 4.1, a polymer mask layer is arranged on the polymer layer, and the polymer mask layer covers the polymer layer;
step 4.2, etching and patterning the polymer mask layer to obtain a polymer etching mask layer;
4.3, carrying out dry etching on the polymer layer by using the polymer etching mask layer so as to obtain a humidity-sensitive substrate coating body;
and 4.4, removing the polymer etching mask layer.
A humidity information identification method based on a flexible humidity sensor array comprises the flexible humidity sensor array and a data acquisition unit electrically connected with the flexible humidity sensor array, wherein the flexible humidity sensor array comprises m rows and n columns of flexible humidity sensor units; the humidity sensor further comprises a microcontroller electrically connected with the data acquisition unit, when sampling time t passes under sampling frequency f, the data acquisition unit acquires humidity array information corresponding to the flexible humidity sensor array, and the data acquisition unit transmits the acquired humidity array information to the microcontroller;
after receiving the humidity array information, the microcontroller processes the received humidity array information to extract and obtain corresponding humidity characteristic information measured by any row of flexible humidity sensor units, wherein the humidity characteristic information comprises Yna of the occurrence number of high humidity, Ynb of the occurrence number of the high humidity and Ync of the repeated occurrence of the high humidity in each row;
and the microcontroller compares the extracted humidity characteristic information corresponding to all the rows of flexible humidity sensor units with a humidity identification model prestored in the microcontroller so as to identify the humidity information corresponding to the humidity characteristic information.
The invention has the advantages that: after receiving the humidity array information, the microcontroller processes the received humidity array information, and can extract and obtain corresponding humidity characteristic information measured by each row of flexible humidity sensor units in the flexible humidity sensor array, wherein the humidity characteristic information comprises Yna of high humidity, Ynb of high humidity and Ync of high humidity occurring repeatedly in each row;
the microcontroller compares the extracted humidity characteristic information of m lines with a humidity identification model prestored in the microcontroller to identify the humidity information corresponding to the humidity characteristic information, so that the extraction of the humidity information and the identification of the humidity information can be effectively realized, and the identification precision and reliability are improved; when the humidity data is processed and analyzed in the microcontroller, the cloud end does not need to be uploaded, and the information feedback processing speed is increased.
Drawings
FIG. 1 is a block diagram of the present invention.
FIG. 2 is a schematic diagram of a circuit of the flexible humidity sensor array of the present invention in cooperation with a data collector.
FIG. 3 is a schematic diagram of humidity information recognition according to the present invention.
FIGS. 4-8 are cross-sectional views of process steps for one embodiment of a flexible humidity sensor unit of the present invention, wherein
FIG. 4 is a sectional view after preparing a moisture-sensitive material layer according to the present invention.
FIG. 5 is a cross-sectional view showing a substrate support layer and a humidity-sensitive base prepared according to the present invention.
Fig. 6 is a cross-sectional view of a polymer layer produced in accordance with the present invention.
FIG. 7 is a cross-sectional view of the moisture-sensitive substrate cover of the present invention after it has been prepared.
FIG. 8 is a cross-sectional view of a humidity sensitive nano forest prepared according to the present invention.
FIGS. 9-13 are cross-sectional views of alternative process steps for implementing a flexible humidity sensor unit in accordance with the present invention, wherein
Fig. 9 is a cross-sectional view of a polymer mask layer prepared in accordance with the present invention.
FIG. 10 is a cross-sectional view of a polymer etch mask layer made in accordance with the present invention.
FIG. 11 is a cross-sectional view of the moisture-sensitive substrate cover of the present invention after it has been prepared.
Fig. 12 is a cross-sectional view of the removal of a polymer etch mask layer in accordance with the present invention.
FIG. 13 is a cross-sectional view of a moisture sensitive nano-forest prepared according to the present invention.
Description of reference numerals: the humidity sensor comprises a data acquisition unit 1, a microcontroller 2, a display screen 3, a flexible humidity sensor array 4, a flexible humidity sensor unit 5, a flexible substrate 6, a humidity sensitive material layer 7, a humidity sensitive material window 8, a polymer layer 9, a humidity sensitive substrate coating body 10, a humidity sensitive nano forest 11, a substrate supporting layer 12, a humidity sensitive substrate 13, a polymer mask layer 14 and a polymer etching mask layer 15.
Detailed Description
The invention is further illustrated by the following specific figures and examples.
As shown in fig. 1: in order to effectively realize the extraction of humidity information and the identification of the humidity information and improve the identification precision and reliability, the humidity sensor comprises a flexible humidity sensor array 4 and a data acquisition unit 1 electrically connected with the flexible humidity sensor array 4, wherein the flexible humidity sensor array 4 comprises m rows and n columns of flexible humidity sensor units 5; the humidity sensor is characterized by further comprising a microcontroller 2 electrically connected with the data acquisition unit 1, when sampling time t passes under sampling frequency f, humidity array information corresponding to the flexible humidity sensor array 4 is acquired by the data acquisition unit 1, and the acquired humidity array information is transmitted into the microcontroller 2 by the data acquisition unit 1;
after receiving the humidity array information, the microcontroller 2 processes the received humidity array information to extract and obtain corresponding humidity characteristic information measured by any row of the flexible humidity sensor units 5, where the humidity characteristic information includes Yna of the number of occurrences of high humidity, Ynb of the occurrences of high humidity, and Ync of the status information of the occurrences of high humidity repeatedly for each row;
the microcontroller 2 compares the extracted humidity characteristic information corresponding to all the rows of the flexible humidity sensor units 5 with a humidity identification model pre-stored in the microcontroller 2 to identify the humidity information corresponding to the humidity characteristic information.
Specifically, the flexible humidity sensor units 5 in the flexible humidity sensor array 4 are distributed in an array, wherein m rows and n columns of flexible humidity sensor units 5 are arranged in the flexible humidity sensor array 4, the specific sizes of m and n can be selected according to actual needs, and are specifically determined by selecting application scenes of humidity identification and the like, which are well known to those skilled in the art and are not described herein again. The measurement of the humidity information of the application scene can be realized through the flexible humidity sensor array 4, and the specific process of measuring the humidity of the corresponding position by using the flexible humidity sensor unit 5 in the flexible humidity sensor array 4 is consistent with the prior art, which is known by persons skilled in the art and is not repeated herein.
The data acquisition unit 1 is connected with the flexible humidity sensor array 4 in an adaptive mode, and all flexible humidity sensor units 5 in the flexible humidity sensor array 4 can be used for acquiring humidity information through the data acquisition unit 1. The data acquisition unit 1 can adopt the existing commonly used data acquisition circuit form, and the specific circuit form of the data acquisition unit 1 can be selected according to actual needs, which is not described herein again.
In addition, the microcontroller 2 is also connected with the display screen 3, and the microcontroller 2 can display and output the identified humidity information through the display screen 3; one ends of all the flexible humidity sensor units 5 in each row in the flexible humidity sensor array 4 are mutually connected to form a common end and are in adaptive connection with the data acquisition unit 1, and the other end of each flexible humidity sensor unit 5 in each row in the flexible humidity sensor array 4 is connected with a data acquisition port of the data acquisition unit 1.
In the embodiment of the present invention, the microcontroller 2 may adopt an existing commonly used microprocessor chip, and the specific type of the microcontroller 2 may be selected according to actual needs, which is known to those skilled in the art, and is not described herein again. The display screen 3 may be in a conventional form, such as an LED screen or an LCD screen, and the specific connection and matching form of the microcontroller 2, the data collector 1, and the display screen 3 may be consistent with the conventional form, which is known to those skilled in the art, and will not be described herein again.
Fig. 2 shows an equivalent schematic diagram of the flexible humidity sensor unit 5 in the flexible humidity sensor array 4, where the sensor in fig. 2 is the flexible humidity sensor unit 5, and the flexible humidity sensor units 5 in the flexible humidity sensor array 4 in fig. 2 are distributed in a 3 × 3 array, that is, n is equal to m is equal to 3, when n and m are in other cases, reference may be made to the case in fig. 2, which is known to those skilled in the art, and details are not described herein again.
During specific implementation, the sampling frequency of the data acquisition unit 1 for acquiring the corresponding humidity values of all the flexible humidity sensor units 5 in the flexible humidity sensor array 4 is f, and the specific size of the sampling frequency f can be selected according to actual needs, and is generally related to the requirements of a measured humidity environment and the like, and is specifically known by those skilled in the art, and is not described herein again. The sampling frequency f corresponds to the sampling period, and when one sampling period passes, the data collector 1 can collect the humidity values corresponding to all the flexible humidity sensor units 5. Through a sampling period, according to the humidity value collection of all flexible humidity sensor units 5, a single-period humidity array can be obtained, the size of the single-period humidity array is consistent with that of the flexible humidity sensor array 4, the value of an array element in the single-period humidity array is the humidity value measured by the flexible humidity sensor units 5 at corresponding positions in the flexible humidity sensor array 4, and the single-period humidity array is specifically known to those skilled in the art and is not repeated herein.
After the sampling time t, all the collected humidity array information can be transmitted to the microcontroller 2, so that the microcontroller 2 can extract the humidity characteristic information. Specifically, the sampling time t may be one sampling period or an integral multiple M of the sampling period, and when the sampling time t is one sampling period, that is, the humidity array information is a single-cycle humidity array; and when the sampling time t is an integral multiple M of the sampling period, the humidity array information is formed by M corresponding single-period humidity arrays.
In specific implementation, after receiving the humidity array information, the microcontroller 2 processes the received humidity array information to extract and obtain corresponding humidity characteristic information measured by any row of the flexible humidity sensor units 5 in the flexible humidity sensor array 4, where the humidity characteristic information includes the high humidity number Yna, the position Ynb where the high humidity occurs, and the status information Ync of each row where the high humidity occurs repeatedly. Due to the existence of the m rows of flexible humidity sensor units 5, the microcontroller 2 extracts corresponding humidity characteristic information from all the rows of flexible humidity sensor units 5, that is, the extraction of the humidity measurement state values of all the rows of flexible humidity sensor units 5 in the flexible humidity sensor array 4 can be realized.
In the embodiment of the present invention, a humidity identification model is pre-stored in the microcontroller 2, the humidity identification model is adapted to the current flexible humidity sensor array 4, the humidity identification model may be feature information corresponding to the humidity information in fig. 3, or an algorithm model set according to specific conditions of the flexible humidity sensor array 4, when the humidity identification model is the algorithm model, the feature information corresponding to the humidity information in fig. 3 is identified by using an algorithm, specifically, models such as a neural network may be used, specific conditions of the humidity identification model may be selected according to actual needs, which is known to those skilled in the art, and is not described herein again.
In specific implementation, when the data acquisition unit 1 passes through sampling time t under sampling frequency f, and the microcontroller 2 processes received humidity array information, t × f humidity arrays are added to obtain a humidity characteristic array, and the microcontroller 2 can extract humidity characteristic information according to the humidity characteristic array; the state information Ync of high humidity repeatedly occurring per line in the humidity characteristic information includes the number of times high humidity repeatedly occurring and the position information of the repeated high humidity.
In the embodiment of the invention, in order to improve the accuracy of humidity identification, when the sampling time t passes under the sampling frequency f, the data acquisition unit 1 can acquire t × f humidity arrays in a total manner, and the humidity arrays are the single-cycle humidity arrays in the above description; i.e. t x f single-cycle humidity arrays are obtained, and generally, the sampling time t x the sampling frequency f is a positive integer. Adding the t × f single-period humidity arrays to obtain a humidity characteristic array, and extracting humidity characteristic information by the microcontroller 2 according to the humidity characteristic array; the state information Ync in which high humidity repeatedly occurs per line in the humidity characteristic information includes the number of times high humidity repeatedly occurs and position information of the repeated occurrence of high humidity.
Fig. 3 shows the result of the flexibility of one 3 × 3, which allows the sensor array 4 to perform humidity information identification, and the following describes the first humidity information identification in fig. 3 in detail. Specifically, the microcontroller 2 first extracts humidity characteristic information of all the flexible humidity sensor 5 units in the first row, where the number Yna of occurrences of high humidity is 3, the positions Ynb of occurrences of high humidity are (the position is 1 row, 1 column, 1 row, 2 column, and 1 row, 3 column), the state information Ync of occurrences of high humidity repeatedly in each row is 1 number of occurrences of high humidity repeatedly, and the position of occurrences of high humidity repeatedly is 1 row, 3 column.
When the microcontroller 2 extracts the humidity characteristic information of all the flexible humidity sensor units 5 in the second row, the number of occurrences of high humidity Yna is 1, the position Ynb of the occurrences of high humidity is (the position is 2 rows and 3 columns), and the number of occurrences of high humidity is 0 for each row of the repeated high humidity status information Ync. When the microcontroller 2 extracts the humidity characteristic information of all the flexible humidity sensor units 5 in the third row, the number of occurrences of high humidity Yna is 1, the position Ynb of the occurrences of high humidity is (the position is 3 rows and 3 columns), and the state information Ync of the occurrences of high humidity repeatedly in each row is 0.
Therefore, the microcontroller 2 can extract the humidity characteristic information corresponding to the three rows of flexible humidity sensor units 5, and then obtain the humidity identification result of 1 → 2 → 3 → 6 → 9 in the figure.
For other humidity recognition results and actual humidity recognition scenarios in fig. 3, reference may be made to the above description, which is well known to those skilled in the art and will not be described herein again.
During specific implementation, the flexible humidity sensor unit 5 generally adopts a capacitance form, so that capacitance values corresponding to humidity values are obtained through the flexible humidity sensor unit 5, different humidity values can be reflected due to different capacitance values obtained through the flexible humidity sensor unit 5, and specific conditions are consistent with the existing conditions.
In the embodiment of the invention, after the microcontroller 2 obtains the humidity characteristic array, the capacitance value of each humidity characteristic element in the humidity characteristic array can be converted into a corresponding humidity value; according to the environment where the flexible humidity sensor array 4 is located, the microcontroller 2 can compare the converted humidity value with the humidity threshold adapted to the environment where the flexible humidity sensor array 4 is located, thereby determining whether each humidity characteristic element in the humidity characteristic array is in a high humidity state, the size of the humidity threshold and the specific situation of judging whether the humidity characteristic element is in the high humidity state are generally related to the situations of the humidity environment and the like, and the humidity characteristic element can be specifically selected according to actual needs, which is well known by persons skilled in the art and is not described herein again.
The microcontroller 2 counts whether each humidity characteristic element in the humidity characteristic array is in a high humidity state, that is, the humidity characteristic information corresponding to m rows of flexible sensors 5 in the flexible humidity sensor array 4 can be obtained, that is, the humidity characteristic information corresponding to each row of flexible humidity sensor units 5 can be determined, and the method specifically comprises the following steps: high humidity number Yna, location Ynb where high humidity occurs, and status information Ync that high humidity occurs repeatedly per row. After the microcontroller 2 determines the humidity characteristic information corresponding to each row of the flexible humidity sensor units 5, the humidity characteristic information corresponding to all the flexible humidity sensor units 5 contained in all the flexible humidity sensor arrays 4 can be obtained, and the humidity characteristic information of all the rows can be identified by using the humidity identification model of the microcontroller 2, i.e. the humidity information can be identified. During specific implementation, when humidity data are processed and analyzed in the microcontroller 2, the cloud end does not need to be uploaded, and the information feedback processing speed is increased.
As shown in fig. 8 and 13, the flexible humidity sensor unit 5 in the flexible humidity sensor array 4 is prepared by a semiconductor process, the flexible humidity sensor unit 5 includes a flexible substrate 6 and a plurality of humidity-sensitive units disposed on the flexible substrate 6, and the humidity-sensitive units include a humidity-sensitive substrate 13 disposed on the flexible substrate 6 and a humidity-sensitive nano forest 11 adapted to the humidity-sensitive substrate 13.
In the embodiment of the present invention, the flexible humidity sensor 5 further includes a substrate supporting layer 12 disposed on the flexible substrate 6, and the substrate supporting layer 12 and the humidity sensitive base 13 are the same process step layer; the flexible substrate 6 includes a PET (polyethylene terephthalate) flexible film, a PI (polyimide) flexible film, or a PEN (polyethylene naphthalate) flexible film, and the humidity-sensitive substrate 13 includes ITO.
In specific implementation, the flexible humidity sensor unit 5 with the above structure is prepared by the following process, and the preparation process comprises the following steps:
step 1, providing a flexible substrate 6, and arranging a humidity sensitive material layer 7 on the flexible substrate 6;
as shown in fig. 4, the thickness of the flexible substrate 6 is 50 μm to 1000 μm, the thickness of the humidity sensitive material layer 7 is 200nm to 1 μm, and when the humidity sensitive material layer 7 is ITO (indium tin oxide), the humidity sensitive material layer 7 can be prepared on the flexible substrate 6 by a conventional method, which is well known to those skilled in the art and will not be described herein again.
as shown in fig. 5, the patterning of the humidity-sensitive material layer 7 can be realized by the conventional technical means, and after the patterning of the humidity-sensitive material layer 7, the substrate supporting layer 12 and the humidity-sensitive substrate 13 can be obtained at the same time, and the specific process of patterning the humidity-sensitive material layer 7 is well known to those skilled in the art and will not be described herein again.
as shown in fig. 6, the polymer layer 9 is a photosensitive polyimide or a non-photosensitive polyimide; the thickness of the polymer layer 9 is 1 μm to 20 μm, and the specific type of the polymer layer 9 and the specific preparation process of the polymer layer 9 can be implemented by the conventional and commonly used techniques, which are specifically known to those skilled in the art and will not be described herein again.
as shown in fig. 7, when the polymer layer 9 is made of photosensitive polyimide, the humidity-sensitive base cover 10 is obtained by photo-etching the polymer layer 9, that is, the polymer layer 9 is photo-etched by using a photo-etching mask to remove the polymer layer 9 on the substrate support layer 12, and the humidity-sensitive base cover 10 is formed by covering the polymer layer 9 on the humidity-sensitive base 13. The strength of the flexible substrate 6 can be increased by using the substrate support layer 12 on the flexible substrate 6.
As shown in fig. 9 to 12, when the non-photosensitive polyimide is used as the polymer layer 9, the step 4 specifically includes the following steps:
step 4.1, arranging a polymer mask layer 14 on the polymer layer 9, wherein the polymer mask layer 14 covers the polymer layer 9;
as shown in fig. 9, the polymer mask layer 14 may be a thermal silicon oxide layer, the polymer mask layer 14 may be prepared on the polymer layer 9 by using PECVD and other processes, and the specific material type of the polymer mask layer 14 and the process of preparing the polymer mask layer 14 on the polymer layer 9 may be selected according to the needs, and are specifically known to those skilled in the art, and will not be described herein again.
Step 4.2, etching and patterning the polymer mask layer 14 to obtain a polymer etching mask layer 15;
as shown in fig. 10, the polymer mask layer 4 is patterned by means in the art, and after the patterning, a polymer etching mask layer 15 can be obtained, where the polymer etching mask layer 15 is located right above the humidity-sensitive substrate 13. Of course, the specific patterning manner of the polymer mask layer 14 can be selected according to actual needs, which is well known in the art and will not be described herein.
4.3, carrying out dry etching on the polymer layer 9 by using the polymer etching mask layer 15 so as to obtain the humidity-sensitive substrate coating body 10;
as shown in fig. 11, the polymer etching mask layer 15 is used as a mask to dry-etch the polymer layer 9, so as to obtain the humidity-sensitive substrate cladding body 10 by using the polymer layer 9, and the process and technique of dry-etching the polymer layer 9 are well known to those skilled in the art and will not be described herein again.
And 4.4, removing the polymer etching mask layer 15.
As shown in fig. 12, the polymer etching mask layer 15 is removed by a method commonly used in the art, and the specific process is well known in the art and will not be described herein again.
And 5, performing a nano forest process on the humidity-sensitive substrate coating body 10 to obtain a humidity-sensitive nano forest 11 matched with the humidity-sensitive substrate 13.
As shown in fig. 8 and 13, the moisture-sensitive substrate coating 10 is subjected to a nano forest process, which may be selected according to actual needs, and is known to those skilled in the art, and is not described herein again. That is, after the nano forest process, the humidity sensitive nano forest 11 can be prepared, and the specific process and process for etching the humidity sensitive substrate coating 10 to obtain the humidity sensitive nano forest 11 are well known to those skilled in the art and will not be described herein again.
In summary, the humidity information identification method based on the flexible humidity sensor array of the present invention can be obtained, including the flexible humidity sensor array 4 and the data collector 1 electrically connected to the flexible humidity sensor array 4, wherein the flexible humidity sensor array 4 has m rows and n columns of flexible humidity sensor units 5; the humidity sensor also comprises a microcontroller 2 electrically connected with the data acquisition unit 1, when sampling time t passes under sampling frequency f, the data acquisition unit 1 can acquire humidity array information corresponding to the flexible humidity sensor array 4, and the data acquisition unit 1 transmits the acquired humidity array information to the microcontroller 2;
after receiving the humidity array information, the microcontroller 2 can extract and obtain corresponding humidity characteristic information measured by each row of flexible humidity sensor units 5 in the flexible humidity sensor array 4 after processing the received humidity array information, wherein the humidity characteristic information comprises Yna times of high humidity, Ynb positions where high humidity occurs, and Ync state information of high humidity occurring repeatedly in each row;
the microcontroller 2 compares the extracted humidity characteristic information of m rows with a humidity identification model prestored in the microcontroller 2 to identify the humidity information corresponding to the humidity characteristic information.
Specifically, the data acquisition unit 1 and the microcontroller 2 cooperate to realize the acquisition and identification process of the humidity information acquired by the flexible humidity sensor array 4, which is not described herein again with reference to the above description.
Claims (10)
1. A humidity information identification system based on a flexible humidity sensor array comprises the flexible humidity sensor array (4) and a data acquisition unit (1) electrically connected with the flexible humidity sensor array (4), wherein the flexible humidity sensor array (4) comprises m rows and n columns of flexible humidity sensor units (5); the method is characterized in that: the humidity sensor is characterized by further comprising a microcontroller (2) electrically connected with the data acquisition unit (1), when sampling time t passes under sampling frequency f, humidity array information corresponding to the flexible humidity sensor array (4) is acquired by the data acquisition unit (1), and the acquired humidity array information is transmitted into the microcontroller (2) by the data acquisition unit (1);
after receiving the humidity array information, the microcontroller (2) processes the received humidity array information to extract corresponding humidity characteristic information measured by any row of flexible humidity sensor units (5), wherein the humidity characteristic information comprises Yna of high humidity occurrence number, Ynb of high humidity occurrence position and Ync of high humidity occurrence state repeatedly occurring in each row;
the microcontroller (2) compares the extracted humidity characteristic information corresponding to all the rows of flexible humidity sensor units (5) with a humidity identification model prestored in the microcontroller (2) to identify the humidity information corresponding to the humidity characteristic information.
2. The humidity information identification system based on flexible humidity sensor array as claimed in claim 1, wherein: when the data acquisition unit (1) passes through sampling time t under sampling frequency f, and the microcontroller (2) processes the received humidity array information, t x f humidity arrays are added to obtain a humidity characteristic array, and the microcontroller (2) can extract and obtain humidity characteristic information according to the humidity characteristic array; the state information Ync of high humidity repeatedly occurring per line in the humidity characteristic information includes the number of times high humidity repeatedly occurring and the position information of the repeated high humidity.
3. The humidity information recognition system based on flexible humidity sensor array according to claim 1 or 2, wherein: the microcontroller (2) is also connected with the display screen (3), and the microcontroller (2) can display and output the identified humidity information through the display screen (3);
one end of each row of flexible humidity sensor units (5) in the flexible humidity sensor array (4) is connected with a common end and then is in adaptive connection with the data acquisition unit (1), and the other end of each row of flexible humidity sensor units (5) in the flexible humidity sensor array (4) is connected with a data acquisition port of the data acquisition unit (1).
4. The humidity information recognition system based on flexible humidity sensor array according to claim 1 or 2, wherein: flexible humidity sensor unit (5) adopt the semiconductor technology to prepare simultaneously in flexible humidity sensor array (4) and obtain, flexible humidity sensor unit (5) are including flexible substrate (6) and a plurality of humidity sensitive unit that set up on flexible substrate (6), humidity sensitive unit including set up humidity sensitive basement (13) on flexible substrate (6) and with humidity sensitive nanometer forest (11) of humidity sensitive basement (13) adaptation.
5. The humidity information identification system based on flexible humidity sensor array according to claim 4, wherein: the flexible humidity-sensitive sensor (5) further comprises a substrate supporting layer (12) arranged on the flexible substrate (6), and the substrate supporting layer (12) and the humidity-sensitive base (13) are the same process step layer;
the flexible substrate (6) comprises a PET flexible film, a PI flexible film or a PEN flexible film, and the humidity-sensitive substrate (13) comprises ITO.
6. The humidity information recognition system based on flexible humidity sensor array according to claim 5, wherein the flexible humidity sensor unit (5) is prepared by the following process, the preparation process comprises the following steps:
step 1, providing a flexible substrate (6), and arranging a humidity sensitive material layer (7) on the flexible substrate (6);
step 2, patterning the humidity sensitive material layer (7) to obtain a substrate supporting layer (12) and a plurality of humidity sensitive bases (13) which are positioned on the flexible substrate (6);
step 3, preparing a polymer layer (9), wherein the polymer layer (9) is pressed and covered on a substrate supporting layer (12), a humidity sensitive base (13) and supported on a flexible substrate (6);
step 4, patterning the polymer layer (9) to obtain a humidity-sensitive substrate coating body (10) for coating a humidity-sensitive substrate (13);
and 5, performing a nano forest process on the humidity-sensitive substrate coating body (10) to obtain a humidity-sensitive nano forest (11) matched with the humidity-sensitive substrate (13).
7. The humidity information recognition system based on flexible humidity sensor array according to claim 6, wherein the polymer layer (9) is photosensitive polyimide or non-photosensitive polyimide; the polymer layer (9) has a thickness of 1 to 20 [ mu ] m.
8. The humidity information recognition system based on flexible humidity sensor array according to claim 7, wherein when the polymer layer (9) is made of photosensitive polyimide, the moisture sensitive substrate cover (10) is obtained by photo-etching the polymer layer (9).
9. The humidity information recognition system based on flexible humidity sensor array as claimed in claim 7, wherein when the polymer layer (9) is made of non-photosensitive polyimide, the step 4 comprises the following steps:
step 4.1, a polymer mask layer (14) is arranged on the polymer layer (9), and the polymer mask layer (14) covers the polymer layer (9);
step 4.2, etching and patterning the polymer mask layer (14) to obtain a polymer etching mask layer (15);
4.3, carrying out dry etching on the polymer layer (9) by utilizing the polymer etching mask layer (15) to obtain a humidity-sensitive substrate coating body (10);
and 4.4, removing the polymer etching mask layer (15).
10. A humidity information identification method based on a flexible humidity sensor array comprises the flexible humidity sensor array (4) and a data acquisition unit (1) electrically connected with the flexible humidity sensor array (4), wherein the flexible humidity sensor array (4) comprises m rows and n columns of flexible humidity sensor units (5); the method is characterized in that: the humidity sensor is characterized by further comprising a microcontroller (2) electrically connected with the data acquisition unit (1), when sampling time t passes under sampling frequency f, humidity array information corresponding to the flexible humidity sensor array (4) is acquired by the data acquisition unit (1), and the acquired humidity array information is transmitted into the microcontroller (2) by the data acquisition unit (1);
after receiving the humidity array information, the microcontroller (2) processes the received humidity array information to extract corresponding humidity characteristic information measured by any row of flexible humidity sensor units (5), wherein the humidity characteristic information comprises Yna of high humidity occurrence number, Ynb of high humidity occurrence position and Ync of high humidity occurrence state repeatedly occurring in each row;
the microcontroller (2) compares the extracted humidity characteristic information corresponding to all the rows of flexible humidity sensor units (5) with a humidity identification model prestored in the microcontroller (2) to identify the humidity information corresponding to the humidity characteristic information.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102783955A (en) * | 2012-07-27 | 2012-11-21 | 中国科学院电工研究所 | Pressure distribution detection device |
| CN109580723A (en) * | 2018-10-23 | 2019-04-05 | 华中科技大学 | A kind of preparation method and product of flexible humidity sensor |
| CN211927121U (en) * | 2020-04-29 | 2020-11-13 | 浙江工业大学 | Array type flexible temperature sensor wireless acquisition system |
| CN112881481A (en) * | 2021-01-15 | 2021-06-01 | 江苏创芯海微科技有限公司 | High-performance humidity sensor and preparation method thereof |
| CN113063829A (en) * | 2021-04-12 | 2021-07-02 | 无锡科技职业学院 | Flexible film humidity sensor detection system |
| US20210267814A1 (en) * | 2018-06-15 | 2021-09-02 | Coloplast A/S | Moisture assessment system for wound care |
| CN113465796A (en) * | 2021-07-01 | 2021-10-01 | 西北工业大学 | Flexible integrated array pressure sensor and preparation method thereof |
-
2021
- 2021-10-18 CN CN202111210844.5A patent/CN113916947A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102783955A (en) * | 2012-07-27 | 2012-11-21 | 中国科学院电工研究所 | Pressure distribution detection device |
| US20210267814A1 (en) * | 2018-06-15 | 2021-09-02 | Coloplast A/S | Moisture assessment system for wound care |
| CN109580723A (en) * | 2018-10-23 | 2019-04-05 | 华中科技大学 | A kind of preparation method and product of flexible humidity sensor |
| CN211927121U (en) * | 2020-04-29 | 2020-11-13 | 浙江工业大学 | Array type flexible temperature sensor wireless acquisition system |
| CN112881481A (en) * | 2021-01-15 | 2021-06-01 | 江苏创芯海微科技有限公司 | High-performance humidity sensor and preparation method thereof |
| CN113063829A (en) * | 2021-04-12 | 2021-07-02 | 无锡科技职业学院 | Flexible film humidity sensor detection system |
| CN113465796A (en) * | 2021-07-01 | 2021-10-01 | 西北工业大学 | Flexible integrated array pressure sensor and preparation method thereof |
Non-Patent Citations (1)
| Title |
|---|
| 梅海霞: "基于压敏硅橡胶的柔性压力传感器及其阵列的研究", 《中国优秀博硕士学位论文全文数据库(博士)信息科技辑》 * |
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