CN113916380A - Dewar assembly and infrared detector - Google Patents
Dewar assembly and infrared detector Download PDFInfo
- Publication number
- CN113916380A CN113916380A CN202111273111.6A CN202111273111A CN113916380A CN 113916380 A CN113916380 A CN 113916380A CN 202111273111 A CN202111273111 A CN 202111273111A CN 113916380 A CN113916380 A CN 113916380A
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- dewar
- unit
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- ring
- annular
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- 239000000463 material Substances 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 238000003466 welding Methods 0.000 abstract description 8
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000006748 scratching Methods 0.000 abstract description 2
- 230000002393 scratching effect Effects 0.000 abstract description 2
- 239000011257 shell material Substances 0.000 description 40
- 239000012212 insulator Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000002161 passivation Methods 0.000 description 3
- 241000251468 Actinopterygii Species 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The invention provides a Dewar assembly and an infrared detector, wherein the Dewar assembly comprises a Dewar shell, a tubular getter unit, an annular fixing unit and a lead ring unit; the wire leading ring unit comprises a wire leading ring body and a wire leading ring outer shell, wherein the wire leading ring body is arranged on the wire leading ring outer shell, and the wire leading ring outer shell is fixedly connected with the Dewar outer shell; the annular fixing unit comprises an annular body and a first protruding part arranged on the annular body, and the first protruding part extends into the tubular getter unit to form interference fit and fixes the annular body on the lead ring shell. In the invention, the annular fixing unit and the tubular getter unit are in interference fit to be fixed on the lead ring shell, compared with the related technology, the structure is simple and practical, the assembly is convenient, and meanwhile, the risks of air leakage and air release of the Dewar shell are correspondingly reduced by forming holes on the Dewar shell, welding for many times and scratching the inner wall of the shell, so that the vacuum reliability of the Dewar assembly is improved.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a Dewar component and an infrared detector.
Background
The infrared detector mainly comprises a chip, a Dewar assembly and a refrigerator. The dewar assembly of the infrared detector provides a vacuum working environment for the chip. Vacuum life is an important reliability indicator for infrared detector dewar assemblies. In order to ensure the vacuum reliability of the infrared detector, an activatable getter unit can be arranged in the Dewar component, and after the infrared detector is used for a period of time, the getter unit in the Dewar component can be activated to adsorb gas released by internal materials of the Dewar component, so that the vacuum service life of the infrared detector is ensured, and the reliability of the infrared detector is improved.
In the related art infrared detector, the fixing and electrical connection of the getter unit are generally achieved by using an ohmic ring (Ω ring), an L-shaped plate, and an insulator. The specific process can be as follows: and an insulator is welded on the Dewar assembly through a hole on the Dewar shell, so that the insulator extends into one end of the Dewar shell, which is used for connecting a getter unit, an ohmic ring is used for clamping the getter unit and is welded on the inner wall of the Dewar shell, then an L-shaped sheet is welded on the inner wall of the Dewar shell, one end of an electrode of the getter unit is connected with the L-shaped sheet, and the other end of the electrode is connected with the insulator to form a conduction loop.
In the related art, the Dewar shell is provided with holes and welded for multiple times for fixing and electrically connecting the getter unit, so that a welding seam is added on the Dewar shell, the risk of gas leakage is increased, the surface passivation layer on the inner wall of the Dewar shell is damaged by multiple welding, the risk of gas generation of materials is increased, and the maintenance of the vacuum degree in the Dewar is not facilitated. Meanwhile, the insulator protrudes out of the outer surface of the Dewar shell, and is easy to collide by external force, and the insulator is easy to deform or leak gas after being subjected to the external force due to insufficient strength, so that the risk of vacuum failure of the Dewar is increased.
Disclosure of Invention
The invention aims to provide a Dewar component and an infrared detector so as to improve the vacuum reliability of the Dewar component.
It is another object of the present invention to facilitate assembly of the dewar assembly.
In order to solve the above technical problem, the present invention provides a dewar assembly comprising a dewar housing, a tubular getter unit, an annular fixing unit and a wire ring unit; the wire loop unit comprises a wire loop body and a wire loop outer shell, the wire loop body is arranged on the wire loop outer shell, and the wire loop outer shell is fixedly connected with the Dewar outer shell; the annular fixing unit comprises an annular body and a first protruding part arranged on the annular body, and the first protruding part extends into the tubular getter unit to form interference fit and fixes the annular body on the lead ring shell.
Optionally, the tubular getter unit includes a tubular getter body and two electrode ends, and the two electrode ends are located on the same side of the tubular getter body.
Optionally, the lead ring body is provided with a lead pin, and the lead pin is connected with the electrode end in a welding manner and used for electrical leading out.
Optionally, the annular fixing unit further includes a second protruding portion, the second protruding portion is disposed on the annular body, and the first protruding portion is disposed on the second protruding portion.
Optionally, at least a part of the inside of the first protruding portion and the second protruding portion is a hollow structure.
Optionally, the hollow structure is a cavity penetrating through the first protruding portion, the second protruding portion and the annular body.
Optionally, the cross-sectional area of the second protrusion is smaller than the cross-sectional area of the tubular getter unit.
Optionally, the material of the annular fixing unit is metal.
Optionally, a step is arranged on an inner wall of the end, opposite to the lead ring body, of the lead ring casing, and the annular fixing unit is fixed on the inner wall of the lead ring casing by using the step.
According to another aspect of the present invention, the present embodiment further provides an infrared detector, which includes the dewar assembly as described above.
In summary, the dewar assembly and the infrared detector provided by the invention have the following beneficial effects: utilize the first bellying of fixed unit of annular to stretch into the interior interference fit of tubulose getter unit and form in order to be fixed in the wire ring shell with tubulose getter unit, and utilize wire ring shell and dewar shell to be connected, in order to form the dewar subassembly, for the trompil and the welding of insulator, ohm ring and L type support among the correlation technique, simple structure is practical not only, and convenient assembling, the while has also correspondingly reduced trompil on the dewar shell, weld many times, fish tail shell inner wall so that reduce the risk of dewar shell gas leakage and gassing (producing gas), thereby the vacuum reliability of dewar subassembly has been improved.
Drawings
It will be appreciated by those skilled in the art that the drawings are provided for a better understanding of the invention and do not constitute any limitation to the scope of the invention.
FIG. 1 is a schematic cross-sectional view of a Dewar assembly provided in an embodiment of the present application;
FIG. 2 is a first partially schematic cross-sectional view of a Dewar assembly according to an embodiment of the present application;
fig. 3 is a second schematic partial cross-sectional view of a dewar assembly provided by an embodiment of the present application.
In the drawings:
10-a dewar housing; 11-a first dewar housing; 12-a second dewar housing;
20-a tubular getter unit; 21-a tubular getter body; 22-electrode terminal;
30-a ring-shaped fixing unit; 31-a first boss; 32-a second boss; 33-an annular body; 331-a first surface; 332-a second surface;
40-a wire loop unit; 41-lead ring body; 411-a guide pin; 42-wire loop housing; 421-step;
51-a base; 52-chip; 53-Cold finger.
Detailed Description
To further clarify the objects, advantages and features of the present invention, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. It is to be noted that the drawings are in greatly simplified form and are not to scale, but are merely intended to facilitate and clarify the explanation of the embodiments of the present invention. Further, the structures illustrated in the drawings are often part of actual structures. In particular, the drawings may have different emphasis points and may sometimes be scaled differently.
It will be understood that when an element or layer is referred to as being "on" …, "or" connected to "other elements or layers, it can be directly on, connected to, or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on …", "directly connected to" other elements or layers, there are no intervening elements or layers present. Although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present invention. Spatial relationship terms such as "below … …", "below", "lower", "above … …", "above", "upper", and the like may be used herein for ease of description to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, then elements or features described as "below" … …, or "beneath" would then be oriented "on" other elements or features. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatial descriptors used herein interpreted accordingly. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of the associated listed items.
The invention provides a Dewar component and an infrared detector, which can improve the vacuum reliability of the Dewar component and facilitate the assembly of the Dewar component.
Fig. 1 is a schematic view of a dewar assembly provided in an embodiment of the present application.
As shown in fig. 1, the dewar assembly according to the embodiment of the present invention includes a dewar housing 10, a tubular getter unit 20, a ring-shaped fixing unit 30 and a wire ring unit 40. The wire loop unit 40 includes a wire loop body 41 and a wire loop case 42, the wire loop body 41 is disposed on the wire loop case 42, and the wire loop case 42 is fixedly connected to the dewar case 10. The annular fixing unit 30 includes an annular body 33 and a first protrusion 31 disposed on the annular body 33, and the first protrusion 31 is used to extend into the tubular getter unit 20 to form an interference fit and fix the annular body 33 to the lead ring casing 42.
Wherein, the number of the tubular getter units 20 can be one or more according to the requirement, and a plurality of tubular getter units 20 are uniformly arranged on the annular fixed unit 30. In the present embodiment, as shown in fig. 2, two tubular getter units 20 are symmetrically disposed on an annular fixing unit 30. As shown in fig. 3, the tubular getter unit 20 comprises a tubular getter body 21 and two electrode ends 22, the two electrode ends 22 being located on the same side of the tubular getter body 21. Specifically, two electrode terminals 22 are disposed on a side of the getter body near the chip 52 for electrically connecting the wire loop unit 40 for activating the tubular getter body 21. The tubular getter body 21 has a larger surface area than the cylindrical (solid) getter unit, has a better getter effect, and facilitates the fixing effect in the present embodiment.
Referring to fig. 1, an annular fixing unit 30 is disposed on a side of the tubular getter body 21 opposite to the electrode terminal 22 (the lead ring body 41), and the tubular getter body 21 is fixed by the annular fixing unit 30. Specifically, the annular fixing unit 30 includes an annular body 33, a first protrusion 31 and a second protrusion 32. The annular body 33 may be, for example, a ring shape, an outer diameter of the ring is slightly smaller than an inner diameter of the lead ring casing 42, the annular body 33 includes a first surface 331 and a second surface 332 which are disposed opposite to each other, the second protrusion 32 is disposed on the first surface 331 of the annular body 33, and the first protrusion 31 is disposed on the second protrusion 32. The first projection 31 is intended to penetrate inside the tubular getter body 21 and form an interference fit to fix the tubular getter body 21 to the annular fixing unit 30.
In a preferred embodiment, the first protrusion 31 is a cylinder shape matching with the inside of the tubular getter body 21, and the interference fit between the first protrusion 31 and the tubular getter body 21 enables the two to have a better fixing effect under the condition of reducing the contact area, thereby relatively improving the air suction effect of the tubular getter body 21. It is understood that, compared to the related art in which the getter unit is fixed from the outside of the getter unit, the present embodiment in which the getter unit is fixed from the inside of the tubular getter body 21 can reduce the contact area of the first projection 31 with the tubular getter body 21, i.e., relatively increase the exposed area from the tubular getter body 21, thereby improving the getter effect thereof.
The second projection 32 has a cross-sectional area (for example, circular) greater than that of the first projection 31 for positioning the tubular getter body 21 when assembled, and the second projection 32 has a cross-sectional area smaller than that of the tubular getter body 21 for reducing the contact area therebetween to reduce the influence on the getter effect.
Further, the first protrusion portion 31 and the second protrusion portion 32 are at least partially hollow, so as to reduce the weight of the annular fixing unit 30, improve the fixing effect, and reduce the material consumption. Preferably, the hollow structure is a cavity penetrating through the first protrusion 31, the second protrusion 32 and the annular body 33. The material of the annular fixing unit 30 may be any suitable metal material, for example, the same material as that of the dewar housing (4J 29).
With reference to fig. 1, the wire loop unit 40 includes a wire loop body 41 and a wire loop casing 42. Specifically, the wire loop body 41 includes a plurality of pins 411 for communicating the inside and the outside of the dewar assembly, and the wire loop body 41 is disposed on one side of the wire loop casing 42 close to the chip 52 so as to electrically lead out the chip 52 and the tubular getter unit 20, thereby realizing the information transmission of the chip 52 and the activation of the tubular getter unit 20. The grommet casing 42 is used to fix the grommet body 41 and the ring-shaped fixing unit 30. Preferably, at least one step 421 protruding from the inner wall of the wire loop casing 42 is disposed on the inner wall of the end of the wire loop casing 42 opposite to the wire loop body 41, and the step 421 is used to facilitate assembly of the dewar assembly. The step 421 has a step surface perpendicular to the inner wall of the wire loop casing 42, and the step surface faces away from the wire loop body 41. When assembled, the first surface 331 of the ring-shaped fixing unit 30 is brought into surface contact with the step, and the edge (or side wall) of the second surface 332 of the ring-shaped fixing unit 30 is weld-joined to the inner wall of the lead ring case 42. It should be understood that step 421 may be a continuous whole surrounding the inner wall of wire loop casing 42 or may be a plurality of individual small steps 421 uniformly arranged. Of course, if the step 421 is not provided on the wire loop casing 42, other auxiliary tools may be used to achieve the assembly, and the fixing method of the ring-shaped fixing unit 30 and the wire loop casing 42 may be, for example, an adhesion method.
It should be noted that, in the present embodiment, the height of the lead ring casing 42 is required to completely cover the height of the lead ring body 41, the tubular getter unit 20 and the partial ring-shaped fixing unit 30 (the ring-shaped body 33 and the second protrusion 32) so as to facilitate the assembly of the three.
With reference to fig. 1, dewar housing 10 includes a first dewar housing 11 and a second dewar housing 12, wherein first dewar housing 11 and second dewar housing 12 are welded to two ends of lead ring housing 42, and form a closed cavity with base 51 and cold finger 53 disposed on base 51, for providing vacuum environment for chip 52. In this embodiment, the first dewar housing 11 may be located at one end of the dewar assembly close to the chip 52, and the first dewar housing 11 (also referred to as a window frame member) is provided with an optical window as an entrance for light of a specific wavelength band; second dewar shell 12 may be positioned at an end of the dewar assembly remote from chip 52, and a base 51 is fixedly attached to a side of second dewar shell 12 opposite to lead ring shell 42 remote from chip 52, and a refrigerator connected to base 51 is used to provide a low temperature environment for dewar assembly 10 and chip 52. First dewar shell 11, second dewar shell 12 and wire loop shell 42 may be made of the same metal material, for example, 4J 29. Furthermore, the inner walls of first dewar shell 11, second dewar shell 12, wire ring shell 42, base 51 and the outer walls of cold fingers 53 are provided with a passivation layer, such as a nickel plating coating, to prevent gas generation from the shell material, which is detrimental to vacuum stability within dewar assembly 10.
Specifically, the assembling process of the dewar assembly in the present embodiment may be, for example: first, the tubular getter unit 20 is assembled to the first protrusion 31 of the annular fixing unit 30 by interference fit, the first surface 331 of the annular fixing unit 30 is placed on the step 421 of the lead ring housing 42, the annular fixing unit 30 is welded to the inner wall of the lead ring housing 42 from the second surface 332 of the annular fixing unit 30, the electrode terminal 22 of the tubular getter unit 20 is welded to the lead pin 411 of the lead ring body 41, so that the tubular getter unit 20 is fixed and electrically connected to the lead ring housing 42, and then the first and second dewar housings 11 and 12 are welded to both ends of the lead ring housing 42, i.e., for assembly of the dewar assembly. In the assembly process of the dewar assembly in the embodiment, the annular fixing unit 30 is used for directly fixing the tubular getter unit 20 on the lead ring shell 42, so that the assembly of the insulator, the ohmic ring and the L-shaped bracket in the related technology is reduced, the assembly is simpler and easier, and the risk of gas leakage and gas release (gas generation) of the dewar shell is reduced by correspondingly reducing the operations and procedures of opening a hole on the dewar shell, welding for many times, scratching the inner wall of the shell and the like. It will be appreciated that perforating, welding and scoring the inner wall of the dewar housing not only destroys the integrity of the dewar assembly increasing the risk of leakage of the opening and weld, but also destroys the passivation layer on the inner wall of the dewar housing increasing the risk of outgassing of the dewar housing material.
The embodiment of the application still provides an infrared detector, infrared detector includes dewar subassembly, chip and refrigerator, the dewar subassembly adopts such as above-mentioned dewar subassembly, including dewar shell, tubulose getter unit, the fixed unit of annular, lead ring unit, base and cold finger to form a closed cavity and be used for providing vacuum environment, the refrigerator is located the bottom of base and indicates the cylinder with cold and be connected and be used for providing the cold source to the dewar subassembly, the chip sets up in above-mentioned closed cavity and is located the one end that cold finger, so that receive the cold source that the refrigerator provided.
In summary, the dewar assembly and the infrared detector provided by the invention have the following beneficial effects: utilize the first bellying of fixed unit of annular to stretch into the interior interference fit of tubulose getter unit and form in order to be fixed in the wire ring shell with tubulose getter unit, and utilize wire ring shell and dewar shell to be connected, in order to form the dewar subassembly, for the trompil and the welding of insulator, ohm ring and L type support among the correlation technique, simple structure is practical not only, and convenient assembling, the while has also correspondingly reduced trompil on the dewar shell, weld many times, fish tail shell inner wall so that reduce the risk of dewar shell gas leakage and gassing (producing gas), thereby the vacuum reliability of dewar subassembly has been improved.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.
Claims (10)
1. A Dewar assembly, comprising a Dewar housing, a tubular getter unit, an annular fixing unit and a wire loop unit;
the wire loop unit comprises a wire loop body and a wire loop outer shell, the wire loop body is arranged on the wire loop outer shell, and the wire loop outer shell is fixedly connected with the Dewar outer shell;
the annular fixing unit comprises an annular body and a first protruding part arranged on the annular body, and the first protruding part extends into the tubular getter unit to form interference fit and fixes the annular body on the lead ring shell.
2. The dewar assembly according to claim 1, wherein the tubular getter unit comprises a tubular getter body and two electrode ends, both electrode ends being located at a same side of the tubular getter body.
3. The dewar assembly according to claim 2, wherein the lead ring body has a lead pin welded to the electrode terminal for electrical lead-out.
4. The dewar assembly according to claim 1, wherein the annular fixing unit further comprises a second boss provided on the annular body, the first boss being provided on the second boss.
5. The dewar assembly according to claim 4, wherein an inside of the first and second bosses is at least partially a hollow structure.
6. The dewar assembly of claim 5, wherein the hollow structure is a cavity passing through the first boss, the second boss and the annular body.
7. The dewar assembly according to claim 4, wherein a cross sectional area of the second convex portion is smaller than a cross sectional area of the tubular getter unit.
8. The dewar assembly according to claim 1, wherein the material of the annular fixing unit is metal.
9. The dewar assembly according to claim 1, wherein the ring casing is provided with a step with respect to an inner wall of one end of the ring body, and the ring-shaped fixing unit is fixed to the inner wall of the ring casing by the step.
10. An infrared detector, characterized in that it comprises a dewar assembly according to claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111273111.6A CN113916380A (en) | 2021-10-29 | 2021-10-29 | Dewar assembly and infrared detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111273111.6A CN113916380A (en) | 2021-10-29 | 2021-10-29 | Dewar assembly and infrared detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113916380A true CN113916380A (en) | 2022-01-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111273111.6A Pending CN113916380A (en) | 2021-10-29 | 2021-10-29 | Dewar assembly and infrared detector |
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| Country | Link |
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| CN (1) | CN113916380A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114353953A (en) * | 2022-01-13 | 2022-04-15 | 浙江珏芯微电子有限公司 | Dewar cold head for rapid refrigeration and infrared detector Dewar assembly |
| CN114397023A (en) * | 2022-01-13 | 2022-04-26 | 浙江珏芯微电子有限公司 | Infrared detector dewar |
| CN116625517A (en) * | 2023-07-21 | 2023-08-22 | 浙江珏芯微电子有限公司 | Novel infrared detector Dewar |
-
2021
- 2021-10-29 CN CN202111273111.6A patent/CN113916380A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114353953A (en) * | 2022-01-13 | 2022-04-15 | 浙江珏芯微电子有限公司 | Dewar cold head for rapid refrigeration and infrared detector Dewar assembly |
| CN114397023A (en) * | 2022-01-13 | 2022-04-26 | 浙江珏芯微电子有限公司 | Infrared detector dewar |
| CN114353953B (en) * | 2022-01-13 | 2024-04-12 | 浙江珏芯微电子有限公司 | Dewar cold head for rapid refrigeration and infrared detector Dewar assembly |
| CN116625517A (en) * | 2023-07-21 | 2023-08-22 | 浙江珏芯微电子有限公司 | Novel infrared detector Dewar |
| CN116625517B (en) * | 2023-07-21 | 2023-10-20 | 浙江珏芯微电子有限公司 | Novel infrared detector Dewar |
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