CN113913757A

CN113913757A - Electron gun evaporation coating machine

Info

Publication number: CN113913757A
Application number: CN202111186915.2A
Authority: CN
Inventors: 刘迎春; 沈锦辉
Original assignee: Dongguan Xuhe Optoelectronics Technology Co ltd
Current assignee: Dongguan Xuhe Optoelectronics Technology Co ltd
Priority date: 2021-10-12
Filing date: 2021-10-12
Publication date: 2022-01-11
Anticipated expiration: 2041-10-12
Also published as: CN113913757B

Abstract

The invention discloses an electron gun evaporation coating machine in the technical field of coating, which comprises an atomization bin and a plurality of clamping bins for mounting workpieces, wherein the atomization bin is used for atomizing the workpieces; the clamping bins are arranged above the atomizing bin, and the clamping bins circulate through the atomizing bin for processing; the atomization bin can continuously perform evaporation operation on the workpieces in sequence, and the working efficiency of the equipment is greatly improved.

Description

Electron gun evaporation coating machine

Technical Field

The invention relates to the technical field of coating, in particular to an electron gun evaporation coating machine.

Background

The principle of the vacuum coating machine adopting the electronic evaporation mode is that an electron beam generated by an electrode in the coating machine is irradiated on a coating agent so as to evaporate the coating agent and attach the coating agent to a coated product.

When the traditional electron gun evaporation coating machine carries out continuous coating work, a working area needs to be cleaned firstly, then the working area needs to be vacuumized again, and when a workpiece is taken out after one-time coating, the evaporation state of a coating agent needs to be stopped firstly, then metal steam in the working area needs to be extracted, so that air pollution is avoided.

Based on the above, the invention designs an electron gun evaporation coating machine to solve the problems.

Disclosure of Invention

The invention aims to provide an electron gun evaporation coating machine, which solves the problems that when the traditional electron gun evaporation coating machine carries out continuous coating work, a working area needs to be cleaned firstly, then the working area is vacuumized again, and when a workpiece is taken out after one-time coating, the evaporation state of a coating agent needs to be stopped firstly, then metal steam in the working area needs to be extracted, so that air pollution is avoided, when the process is carried out, the coating machine cannot work, so that the continuity of the coating machine work is poor, the working efficiency is greatly reduced, and the coating agent is continuously cut into and cut out from the evaporation state, so that energy is wasted, and when the coating agent is cut out from the evaporation state, the coating agent is wasted.

In order to achieve the purpose, the invention provides the following technical scheme: an electron gun evaporation coating machine comprises an atomization bin and a plurality of clamping bins for mounting workpieces; it is a plurality of the centre gripping storehouse is installed in atomizing storehouse top, and is a plurality of the centre gripping storehouse circulates through atomizing storehouse and processes.

As a further scheme of the invention, the plurality of clamping bins are fixedly connected with a conveying belt together, the plurality of clamping bins are distributed on the conveying belt at equal intervals, the conveying belt is arranged above the atomizing bin, and the conveying belt is externally connected with a supporting mechanism.

As a further scheme of the invention, the atomization chamber comprises an atomization chamber, the upper end of the atomization chamber can be communicated with the inside of the clamping chamber, the upper end of the atomization chamber is penetrated and fixedly connected with a U-shaped slide rail, and the clamping chamber can be slidably connected and sealed with the U-shaped slide rail; an exhaust machine and a vacuum machine are respectively and fixedly connected to the left side and the right side of the atomization chamber on the outer side wall of the U-shaped slide rail; and the air ducts of the air exhauster and the vacuum machine penetrate through the U-shaped sliding rail and can act on the clamping chamber at the position.

As a further scheme of the invention, the clamping bin comprises an evaporation chamber, the inner side of the upper end of the evaporation chamber is fixedly connected with a clamping hand, the outer side of the upper end of the evaporation chamber is fixedly connected with a connecting rod, the connecting rod is fixedly connected with a conveying belt, and the front end and the rear end of the evaporation chamber completely penetrate through the evaporation chamber without an outer wall.

In a further aspect of the present invention, a communication port is opened on the left side of the lower end of the evaporation chamber, a partition plate is fixedly connected to the right side of the lower end of the evaporation chamber, the partition plate is flush with the lower end surface of the evaporation chamber, and the partition plate in the clamping chamber of the U-shaped slide rail is in contact with and sealed with the left side wall of the evaporation chamber in the clamping chamber of the U-shaped slide rail on the right side.

As a further scheme of the invention, the bottom of the atomization chamber is fixedly connected with a water-cooled crucible, an electron gun is arranged above the water-cooled crucible, and the electron gun is fixedly connected with the bottom end of the inner side of the atomization chamber; the bottom of the water-cooled crucible slides vertically and is connected with a base in a sealing manner;

the base lower extreme fixedly connected with slide bar, the slide bar lower extreme is provided with weighing machine and constructs, weighing machine constructs on can feeding back the electron gun with the weight change of interior plating agent of water-cooled crucible to change the output of electron gun.

As a further scheme of the invention, a protective cover is fixedly connected below the atomization chamber, and the sliding rod penetrates through the bottom of the protective cover and is in sliding connection with the protective cover.

As a further scheme of the invention, the weighing mechanism comprises two fixed supporting plates, the two fixed supporting plates are respectively and fixedly connected with the front side and the rear side of the lower end of the protective cover, the left end positions of the two fixed supporting plates are jointly and fixedly connected with a sliding frame, a conical roller and a rotating shaft are respectively and rotatably connected between the two fixed supporting plates, the conical roller and the rotating shaft are in transmission connection through a transmission belt, and the transmission belt is externally connected with a tensioning mechanism for tensioning; the lower end of the sliding rod is fixedly connected with a rack, the rotating shaft is coaxially and fixedly connected with a gear, and the rack is meshed with the gear; the left end of the conical roller is provided with a buckle, the left end of the buckle is fixedly connected with an elastic telescopic rod, the elastic telescopic rod is connected with the sliding frame in a sliding manner, and the buckle is clamped with the transmission belt; the transmission shaft of the conical roller penetrates through the fixed supporting plate at the rear side, the transmission shaft of the conical roller is sleeved with a fixing ring, the fixing ring is fixedly connected with the fixed supporting plate at the rear side, and a torsion spring is connected between the fixing ring and the transmission shaft of the conical roller; a transmission shaft of the conical roller penetrates through the part of the fixed supporting plate, and a speed sensor is arranged on the part, penetrating through the fixed supporting plate, of the transmission shaft and used for controlling the output power of the electron gun.

Compared with the prior art, the invention has the beneficial effects that:

1. according to the scheme, the working area of the coating machine is divided into the clamping bin for mounting the workpiece and the atomization bin for atomizing the coating agent, then the clamping bins are circularly clamped with the atomization bin and are jointly spliced into the working area, so that the clamping bins can independently perform the work of mounting the workpiece, vacuumizing, separating metal steam, taking the workpiece and cleaning the clamping bin before and after being matched with the atomization bin, the work of the atomization bin cannot be interfered, the atomization bin can continuously perform evaporation operation on the workpieces in sequence, and the working efficiency of the equipment is greatly improved; meanwhile, in the whole processing process, the plating agent is always kept in an evaporation state without being repeatedly excited from a non-evaporation state to an evaporation state, so that the energy loss is greatly saved, and the loss of redundant evaporation of the plating agent in the process of waiting for the plating agent to be in the evaporation state to the non-evaporation state is avoided; and the mode that the centre gripping storehouse is direct and the atomizing storehouse block spliced into a workspace jointly can let the metal steam in the atomizing storehouse directly act on the work piece to the same directness of traditional handicraft, need not transport, and then has avoided the various losses in the transportation.

2. The plating agent is supported by the base, the weight of the plating agent is measured, the change of the weight of the plating agent is fed back to the outside of the equipment, the evaporation rate of the plating agent is judged by the weight of the plating agent, the evaporation rate of the plating agent can be measured outside the equipment, the evaporation rate is measured by a high-end electronic element in the equipment in comparison with the traditional method, the influence of a high-temperature environment is avoided, the requirement of a measuring element is reduced, and the equipment cost is greatly saved.

3. The design of weighing machine constructs, utilizes the change of the drive ratio of torsional spring cooperation toper gyro wheel to the axis of rotation within a definite time, no matter what kind of density's metal plating agent in making the water-cooled crucible, the homoenergetic keeps leveling at the liquid level with the up end of water-cooled crucible for the distance of electron gun to the liquid level of metal plating agent melt can remain unchanged throughout, with the stability of the evaporation rate of guaranteeing the metal plating agent melt.

Drawings

FIG. 1 is a schematic diagram of the overall structure of the present invention;

FIG. 2 is a schematic front sectional view of the overall structure of the present invention;

FIG. 3 is a schematic view of the invention with the conveyor belt and the clamping chamber removed;

FIG. 4 is an enlarged view of the point A in FIG. 3;

FIG. 5 is a schematic front cross-sectional view of the stationary support plate of FIG. 3;

FIG. 6 is an enlarged view of the point B in FIG. 5;

FIG. 7 is a schematic front cross-sectional view of the water-cooled crucible of FIG. 3.

In the drawings, the components represented by the respective reference numerals are listed below:

1-1 atomizing chamber, 1-2U-shaped sliding rail, 1-3 vacuum machine, 1-4 exhauster, 2-1 evaporation chamber, 2-2 clamping hand, 2-3 connecting rod, 2-4 communicating port, 2-5 baffle, 3-1 water-cooled crucible, 3-2 base, 3-3 slide bar, 4 electron gun, 5 protective cover, 6-1 fixed support plate, 6-2 sliding frame, 6-3 conical roller, 6-4 rotating shaft, 6-5 rack, 6-6 gear, 6-7 buckle, 6-8 elastic telescopic rod, 6-9 fixed ring, 7 conveyor belt, 8 speed sensor, first station a, second station b, third station c and fourth station d.

Detailed Description

Referring to fig. 1-7, the present invention provides a technical solution: an electron gun evaporation coating machine comprises an atomization bin and a plurality of clamping bins for mounting workpieces; it is a plurality of the centre gripping storehouse is installed in atomizing storehouse top, and is a plurality of the centre gripping storehouse circulates through atomizing storehouse and processes.

When the traditional electron gun evaporation coating machine carries out continuous coating work, a working area needs to be cleaned firstly, then the working area is vacuumized again, and when a workpiece is taken out after one-time coating, the evaporation state of a coating agent needs to be stopped firstly, then metal steam in the working area needs to be extracted, so that air pollution is avoided;

according to the scheme, the working area of the coating machine is divided into the clamping bin for mounting the workpiece and the atomization bin for atomizing the coating agent, then the clamping bins are circularly clamped with the atomization bin and are jointly spliced into the working area, so that the clamping bins can independently perform the work of mounting the workpiece, vacuumizing, separating metal steam, taking the workpiece and cleaning the clamping bin before and after being matched with the atomization bin, the work of the atomization bin cannot be interfered, the atomization bin can continuously perform evaporation operation on the workpieces in sequence, and the working efficiency of the equipment is greatly improved; meanwhile, in the whole processing process, the plating agent is always kept in an evaporation state without being repeatedly excited from a non-evaporation state to an evaporation state, so that the energy loss is greatly saved, and the loss of redundant evaporation of the plating agent in the process of waiting for the plating agent to be in the evaporation state to the non-evaporation state is avoided; and the mode that the centre gripping storehouse is direct and the atomizing storehouse block spliced into a workspace jointly can let the metal steam in the atomizing storehouse directly act on the work piece to the same directness of traditional handicraft, need not transport, and then has avoided the various losses in the transportation.

As a further scheme of the invention, the plurality of clamping bins are fixedly connected with the conveyor belt 7 together, the plurality of clamping bins are distributed on the conveyor belt 7 at equal intervals, the conveyor belt 7 is arranged above the atomizing bin, and the conveyor belt 7 is externally connected with a supporting mechanism.

The conveying belt is mature in technology and simple in structure, so that the equipment cost is reduced, and the maintenance is easy; secondly because the conveyer belt is a closed loop circumference, can make on the conveyer belt with the centre gripping storehouse of processing station relative invert, and then make the installation of work piece in directly provide the support by the clamping part in the centre gripping storehouse, need not extra support, make work piece simple to operate.

As a further scheme of the invention, the atomization chamber comprises an atomization chamber 1-1, the upper end of the atomization chamber 1-1 can be communicated with the interior of the clamping chamber, the upper end of the atomization chamber 1-1 penetrates through and is fixedly connected with a U-shaped sliding rail 1-2, and the clamping chamber can be slidably connected with the U-shaped sliding rail 1-2 and is sealed; the outer side wall of the U-shaped sliding rail 1-2 is positioned at the left side and the right side of the atomization chamber 1-1 and is respectively and fixedly connected with an air exhauster 1-4 and a vacuum machine 1-3; and the air ducts of the air exhauster 1-4 and the vacuum machine 1-3 penetrate through the U-shaped slide rail 1-2 and can act on the clamping chamber at the positions of the air exhauster and the vacuum machine.

The exhaust machine 1-4 and the vacuum machine 1-3 are directly installed on two sides of the atomizing chamber 1-1, the distance between a station for pumping vacuum and purifying gas and an evaporation station is shortened, the transfer distance can be effectively reduced, and the gas permeation and leakage risk in the transfer process are reduced.

As a further scheme of the invention, the clamping bin comprises an evaporation chamber 2-1, the inner side of the upper end of the evaporation chamber 2-1 is fixedly connected with a clamping handle 2-2, the outer side of the upper end of the evaporation chamber 2-1 is fixedly connected with a connecting rod 2-3, the connecting rod 2-3 is fixedly connected with a conveyor belt 7, and the front end and the rear end of the evaporation chamber 2-1 are completely penetrated without an outer wall.

The outer walls of the front end and the rear end of the evaporation chamber 2-1 are directly removed and are blocked by the outer side wall of the U-shaped sliding rail 1-2, so that the space in the evaporation chamber 2-1 is directly exposed, a workpiece is conveniently taken, materials are saved, and the equipment cost is reduced.

As a further scheme of the invention, a communication port 2-4 is formed in the left side of the lower end of the evaporation chamber 2-1, a partition plate 2-5 is fixedly connected to the right side of the lower end of the evaporation chamber 2-1, the partition plate 2-5 is flush with the lower end face of the evaporation chamber 2-1, and the partition plate 2-5 in the clamping bin of the U-shaped slide rail 1-2 is in contact with and sealed with the left side wall of the evaporation chamber 2-1 in the clamping bin of the U-shaped slide rail 1-2 on the right side.

The partition plates 2-5 are arranged, so that when the evaporation chamber 2-1 is staggered with the atomization chamber 1-1, the atomization chamber 1-1 is blocked by the partition plates 2-5, and the steam in the atomization chamber 1-1 is prevented from being leaked and the steam in the atomization chamber 1-1 is prevented from being polluted by external gas.

As a further scheme of the invention, the bottom of the atomizing chamber 1-1 is fixedly connected with a water-cooled crucible 3-1, an electron gun 4 is arranged above the water-cooled crucible 3-1, and the electron gun 4 is fixedly connected with the bottom end of the inner side of the atomizing chamber 1-1; the bottom of the water-cooled crucible 3-1 is vertically and slidably connected with a base 3-2 in a sealing manner;

the lower end of the base 3-2 is fixedly connected with a sliding rod 3-3, the lower end of the sliding rod 3-3 is provided with a weighing mechanism, and the weighing mechanism can feed back the weight change of the plating agent in the water-cooled crucible 3-1 to the electron gun 4 and change the output power of the electron gun 4.

The plating agent is lifted through the base 3-2, the weight of the plating agent is measured, the change of the weight of the plating agent is fed back to the outside of the equipment, the evaporation rate of the plating agent is judged through the weight of the plating agent, the measurement of the evaporation rate of the plating agent can be carried out outside the equipment, the evaporation rate is measured through a high-end electronic element in the equipment in comparison with the traditional method, the influence of a high-temperature environment is avoided, the requirement of a measuring element is lowered, and the equipment cost is greatly saved.

As a further scheme of the invention, a protective cover 5 is fixedly connected below the atomization chamber 1-1, and the sliding rod 3-3 penetrates through the bottom of the protective cover 5 and is in sliding connection with the protective cover 5.

The protective cover 5 is arranged to prevent high-temperature emission of the metal plating agent, so that energy is saved and workers in the field are protected.

As a further scheme of the invention, the weighing mechanism comprises two fixed supporting plates 6-1, the two fixed supporting plates 6-1 are respectively and fixedly connected with the front side and the rear side of the lower end of the protective cover 5, the left end position between the two fixed supporting plates 6-1 is jointly and fixedly connected with a sliding frame 6-2, a conical roller 6-3 and a rotating shaft 6-4 are respectively and rotatably connected between the two fixed supporting plates 6-1, the conical roller 6-3 and the rotating shaft 6-4 are in transmission connection through a transmission belt, and the transmission belt is externally connected with a tensioning mechanism for tensioning; the lower end of the sliding rod 3-3 is fixedly connected with a rack 6-5, the rotating shaft 6-4 is coaxially and fixedly connected with a gear 6-6, and the rack 6-5 is meshed with the gear 6-6; a buckle 6-7 is arranged at the left end of the conical roller 6-3, an elastic telescopic rod 6-8 is fixedly connected to the left end of the buckle 6-7, the elastic telescopic rod 6-8 is in sliding connection with the sliding frame 6-2, and the buckle 6-7 is clamped with the transmission belt; the transmission shaft of the conical roller 6-3 penetrates through the fixed supporting plate 6-1 at the rear side, the transmission shaft of the conical roller 6-3 is sleeved with a fixed ring 6-9, the fixed ring 6-9 is fixedly connected with the fixed supporting plate 6-1 at the rear side, and a torsion spring is connected between the fixed ring 6-9 and the transmission shaft of the conical roller 6-3; the transmission shaft of the conical roller 6-3 penetrates through the fixed supporting plate 6-1, and a speed sensor 8 is arranged, wherein the speed sensor 8 is used for controlling the output power of the electron gun 4.

The design of the weighing mechanism utilizes the torsional spring to be matched with the transmission ratio change between the conical roller 6-3 and the rotating shaft 6-4, so that no matter what density of the metal plating agent is in the water-cooled crucible 3-1, the liquid level can be kept flush with the upper end face of the water-cooled crucible 3-1, the distance from the electron gun 4 to the liquid level of the metal plating agent melt can be kept unchanged all the time, and the stability of the evaporation rate of the metal plating agent melt is ensured.

The working principle is as follows: when the device works, a driving mechanism (the driving mechanism is driven in a stepping mode), a vacuum machine 1-3, an exhauster 1-4 and an electron gun 4 of the conveyor belt 7 are respectively started, and molten metal plating agent is injected into the water-cooled crucible 3-1; before the molten metal plating agent is injected, (as shown in figure 5), an elastic telescopic rod 6-8 is pulled according to the density of the molten metal plating agent, the position of a transmission belt on a conical roller 6-3 is changed through a buckle 6-7, and further, the transmission ratio from the conical roller 6-3 to a rotating shaft 6-4 is changed, so that the liquid level of the molten metal plating agent is kept on the upper end surface of a water-cooled crucible 3-1, the distance from an electron gun 4 to the liquid level of the molten metal plating agent can be kept constant all the time, so as to ensure the evaporation rate of the molten metal plating agent (refer to figure 7, the molten metal plating agent presses a base 3-2 in the water-cooled crucible 3-1, and further drives a rack 6-5 to move downwards, the rack 6-6 drives the gear 6 to rotate, the gear 6-6 drives the rotating shaft 6-4 to rotate, further, the rotating shaft 6-4 drives the conical roller 6-3 to rotate through the transmission belt, and then the conical roller 6-3 rotates relative to the fixing ring 6-9, so that the torsion spring is twisted, wherein the torsion of the torsion spring is equal to the balance of the supporting mechanism; according to the principle of energy conservation, the torsional elastic potential energy of the torsion spring is equal to the gravitational potential energy of the metal plating agent melt, namely the torsion angles of the torsion springs corresponding to the metal plating agent melt with the same mass are the same; the lower the density of the metal plating agent melt with the same mass and different densities, the larger the corresponding volume, if the density and the volume are kept at the same liquid level, the downward moving distance of the base 3-2 corresponding to the metal plating agent melt with low density is larger, namely the rotating angle of the rotating shaft 6-4 is larger, the transmission ratio between the corresponding conical roller 6-3 and the rotating shaft 6-4 is larger, taking fig. 6 as an example, the metal plating agent melt with high density is pulled to the right to be buckled by a buckle 6-7);

the conveyor belt 7 is driven by the driving mechanism to perform intermittent motion (as shown in fig. 2, the motion direction is clockwise rotation, the motion amplitude is from the second station b to the third station c, and the distances from the second station b to the third station c and from the third station c to the fourth station d are equal; the stop time is the evaporation time); when the clamping bin is positioned at the first station a, a workpiece is arranged at the position of the clamping hand 2-2 and is clamped by the clamping hand 2-2; then the clamping bin enters the U-shaped slide rail 1-2 under the driving of the conveyor belt 7, the front side wall and the rear side wall of the U-shaped slide rail 1-2 seal the front side and the rear side of the evaporation chamber 2-1, and the bottom of the U-shaped slide rail 1-2 seals the communicating port 2-4, so that a closed cavity is formed in the evaporation chamber 2-1; when the clamping bin is positioned at the second station b, the environment in the evaporation chamber 2-1 is sucked into a vacuum environment under the action of a vacuum machine 1-3; when the clamping bin is positioned at the third station c, the evaporation chamber 2-1 reaches the position right above the atomization chamber 1-1, the evaporation chamber 2-1 is communicated with the atomization chamber 1-1 through a communication port 2-4, so that the gaseous metal plating agent in the atomization chamber 1-1 enters the evaporation chamber 2-1 to evaporate a workpiece; then the clamping chamber moves to a fourth station d, at the moment, the evaporation chamber 2-1 starts to separate from the upper end of the atomization chamber 1-1, the upper end of the atomization chamber 1-1 is sealed by a partition plate 2-5, and the gaseous metal plating agent in the atomization chamber 1-1 is prevented from separating from the equipment; when the clamping bin is positioned at the fourth station d, the exhauster 1-4 extracts gas in the evaporation chamber 2-1 and cleans the residual gaseous metal plating agent in the evaporation chamber 2-1; finally, the clamping bin carries the evaporated workpiece to a first station a, and the workpiece is taken down in the process, and the process is repeated;

it should be noted that, as the molten metal plating agent in the water-cooled crucible 3-1 is continuously consumed, the gravity borne by the base 3-2 is reduced, and further the torsion angle of the torsion spring is reduced, the tapered roller 6-3 rotates, and the rotation speed of the tapered roller 6-3 is proportional to the evaporation speed of the molten metal plating agent (the speed of reducing the weight of the molten metal plating agent), in this process, the speed sensor 8 continuously detects the rotation speed of the tapered roller 6-3, and adjusts the output power of the electronic gun 4 according to the rotation speed of the tapered roller 6-3 through the control circuit, and the adjustment mode is: the faster the rotation speed of the conical roller 6-3, the smaller the output power of the electron gun 4.

Claims

1. An electron gun evaporation coating machine is characterized in that: comprises an atomization bin and a plurality of clamping bins for mounting workpieces; it is a plurality of the centre gripping storehouse is installed in atomizing storehouse top, and is a plurality of the centre gripping storehouse circulates through atomizing storehouse and processes.

2. The electron gun evaporation coater of claim 1, wherein: a plurality of the common fixedly connected with conveyer belt (7) in centre gripping storehouse, it is a plurality of centre gripping storehouse equidistance distributes on conveyer belt (7), install in atomizing storehouse top conveyer belt (7), conveyer belt (7) are external to have supporting mechanism.

3. The electron gun evaporation coater of claim 2, wherein: the atomization bin comprises an atomization chamber (1-1), the upper end of the atomization chamber (1-1) can be communicated with the interior of the clamping bin, the upper end of the atomization chamber (1-1) penetrates through and is fixedly connected with a U-shaped sliding rail (1-2), and the clamping bin can be slidably connected with and sealed with the U-shaped sliding rail (1-2); an exhaust machine (1-4) and a vacuum machine (1-3) are respectively and fixedly connected to the left side and the right side of the atomization chamber (1-1) on the outer side wall of the U-shaped slide rail (1-2); and the ventilation pipelines of the air exhauster (1-4) and the vacuum machine (1-3) penetrate through the U-shaped sliding rail (1-2) and can act on the clamping chamber at the position of the U-shaped sliding rail.

4. The electron gun evaporation coater of claim 3, wherein: the clamping chamber comprises an evaporation chamber (2-1), the inner side of the upper end of the evaporation chamber (2-1) is fixedly connected with a clamping hand (2-2), the outer side of the upper end of the evaporation chamber (2-1) is fixedly connected with a connecting rod (2-3), the connecting rod (2-3) is fixedly connected with a conveyor belt (7), and the front end and the rear end of the evaporation chamber (2-1) are completely penetrated without an outer wall.

5. The electron gun evaporation coater according to claim 4, wherein: the evaporation plating chamber is characterized in that a communicating port (2-4) is formed in the left side of the lower end of the evaporation plating chamber (2-1), a partition plate (2-5) is fixedly connected to the right side of the lower end of the evaporation plating chamber (2-1), the partition plate (2-5) is flush with the lower end face of the evaporation plating chamber (2-1), and the partition plate (2-5) in the clamping chamber of the U-shaped sliding rail (1-2) is in contact with and sealed with the left side wall of the evaporation plating chamber (2-1) in the clamping chamber of the U-shaped sliding rail (1-2) on the right side.

6. The electron gun evaporation coater of claim 5, wherein: the bottom of the atomizing chamber (1-1) is fixedly connected with a water-cooled crucible (3-1), an electron gun (4) is arranged above the water-cooled crucible (3-1), and the electron gun (4) is fixedly connected with the bottom end of the inner side of the atomizing chamber (1-1); the bottom of the water-cooled crucible (3-1) is vertically and slidably connected with a base (3-2) in a sealing way;

the device is characterized in that a sliding rod (3-3) is fixedly connected to the lower end of the base (3-2), a weighing mechanism is arranged at the lower end of the sliding rod (3-3), and the weighing mechanism can feed back the weight change of the plating agent in the water-cooled crucible (3-1) to the electron gun (4) and change the output power of the electron gun (4).

7. The electron gun evaporation coater of claim 6, wherein: the atomizing chamber (1-1) is fixedly connected with a protective cover (5) below, and the sliding rod (3-3) penetrates through the bottom of the protective cover (5) and is in sliding connection with the protective cover (5).

8. The electron gun evaporation coater according to claim 7, wherein: the weighing mechanism comprises two fixed supporting plates (6-1), the two fixed supporting plates (6-1) are respectively and fixedly connected with the front side and the rear side of the lower end of the protective cover (5), a sliding frame (6-2) is fixedly connected to the left end position between the two fixed supporting plates (6-1) together, a conical roller (6-3) and a rotating shaft (6-4) are respectively and rotatably connected between the two fixed supporting plates (6-1), the conical roller (6-3) and the rotating shaft (6-4) are in transmission connection through a transmission belt, and the transmission belt is externally connected with a tensioning mechanism for tensioning; the lower end of the sliding rod (3-3) is fixedly connected with a rack (6-5), the rotating shaft (6-4) is coaxially and fixedly connected with a gear (6-6), and the rack (6-5) is meshed with the gear (6-6); a buckle (6-7) is arranged at the left end of the conical roller (6-3), an elastic telescopic rod (6-8) is fixedly connected to the left end of the buckle (6-7), the elastic telescopic rod (6-8) is in sliding connection with the sliding frame (6-2), and the buckle (6-7) is clamped with the transmission belt; a transmission shaft of the conical roller (6-3) penetrates through the fixed supporting plate (6-1) at the rear side, the transmission shaft of the conical roller (6-3) is sleeved with a fixing ring (6-9), the fixing ring (6-9) is fixedly connected with the fixed supporting plate (6-1) at the rear side, and a torsion spring is connected between the fixing ring (6-9) and the transmission shaft of the conical roller (6-3); a transmission shaft of the conical roller (6-3) penetrates through the fixed supporting plate (6-1) to be provided with a speed sensor (8), and the speed sensor (8) is used for controlling the output power of the electron gun (4).