CN113899791B - Electrode sensor, preparation method thereof, detection system and detection method - Google Patents
Electrode sensor, preparation method thereof, detection system and detection method Download PDFInfo
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Abstract
The invention provides an electrode sensor, a preparation method thereof, a detection system and a detection method. The electrode sensor includes: a first electrode; the second electrode is positioned on one side of the first electrode and is spaced from the first electrode; a transparent isolation layer, which is used for coating the second electrode and isolating the gas to be detected from the second electrode; the first electrode and the second electrode are made of the same material; the first electrode reacts after contacting with the gas to be detected, and the surface color and the resistance of the first electrode change along with the change of the reaction time. Whether the environment contains the element to be detected is judged through the color change after the first electrode reacts with the gas to be detected, and meanwhile, the second electrode and the transparent isolation layer are adopted as contrast, so that the color change of the first electrode can be seen more quickly; and judging the concentration of the gas to be detected through the resistance of the first electrode after the reaction. The personal safety is early-warned, meanwhile, the transportation and storage environments of the devices are rapidly evaluated, and the high-reliability application of the devices in complex environments is guaranteed.
Description
Technical Field
The present invention relates to the field of integrated circuits, and in particular, to an electrode sensor, a method for manufacturing the same, a detection system, and a detection method.
Background
Along with the development of human civilization, a large amount of waste gas is generated in the industrialized process, wherein harmful elements exist in the air in the form of simple substances or compounds, the environment or human health is affected, and components are placed in the environment containing the gas capable of reacting with the components for a long time, so that the electronic equipment containing the components is also affected. In the case of failure of electronic components, most of the component failures are caused by the reaction of metals in the components with gaseous elements in the environment, which causes resistance change and even open circuit, resulting in the failure of the components. Therefore, it is necessary to monitor the element content in the environment and early warn of the possible effects of the corrosive environment. However, there is still a lack of a sensor capable of rapidly evaluating the concentration of a gas in an environment in the market, and the detection principle of the existing detection device and detection method is complex, so that it is not possible to know whether there are elements to be detected in the environment to be detected and whether the concentration of the elements is too high.
Disclosure of Invention
In order to solve the technical problems, the invention designs an electrode sensor, a preparation method, a detection system and a detection method thereof, which can rapidly detect whether elements to be detected exist in the environment and whether the element concentration is too high.
The invention relates to an electrode sensor, comprising:
a first electrode;
the second electrode is positioned on one side of the first electrode and is spaced from the first electrode;
a transparent isolation layer, which is used for coating the second electrode and isolating the gas to be detected from the second electrode;
the first electrode and the second electrode are made of the same material; the first electrode reacts after contacting with the gas to be detected, and the surface color and the resistance of the first electrode change along with the change of the reaction time.
In one embodiment, the electrode sensor further comprises:
the third electrode is arranged at intervals with the first electrode and the second electrode; the material of the third electrode is the same as that of the first electrode;
and the transparent adsorption layer is coated on the third electrode and is used for adsorbing the gas to be detected.
In one embodiment, the gas to be tested comprises a sulfur-containing compound; the first electrode, the second electrode and the third electrode all comprise silver electrodes or copper electrodes; the transparent isolation layer comprises a polymethyl methacrylate layer or 823 adhesive layer; the transparent adsorption layer comprises a silica gel layer.
In one embodiment, the shape of the first electrode, the shape of the second electrode, and the shape of the third electrode each include serpentine, multi-annular, delta, spring, linear, or sheet.
The invention also designs a preparation method of the electrode sensor, which comprises the following steps:
providing a substrate;
preparing first electrodes and second electrodes which are arranged at intervals on the substrate; the first electrode and the second electrode are made of the same material; the first electrode reacts after contacting with the gas to be detected, and the surface color and the resistance of the first electrode change along with the change of the reaction time;
and forming a transparent isolation layer on the substrate, wherein the second electrode is coated by the transparent isolation layer, and the transparent isolation layer is used for isolating the gas to be detected from the second electrode.
In one embodiment, the substrate comprises a glass substrate, and the method further comprises the step of performing hydrophobic treatment on the substrate before preparing the first electrode and the second electrode which are arranged at intervals on the substrate.
In one embodiment, a first electrode and a second electrode which are arranged at intervals are prepared on the substrate, and a third electrode is formed on the substrate, wherein the third electrode, the first electrode and the second electrode are arranged at intervals, and the material of the third electrode is the same as that of the first electrode; after forming the third electrode, the method further comprises: forming a transparent adsorption layer on the substrate; the transparent adsorption layer is coated on the third electrode and used for adsorbing the gas to be detected.
In one embodiment, the method for preparing the first electrode and the second electrode which are arranged at intervals on the substrate comprises an electroplating method, a chemical synthesis method, a chemical vapor deposition method, a physical sputtering method or an evaporation method; the method for forming the third electrode on the substrate comprises an electroplating method, a chemical synthesis method, a chemical vapor deposition method, a physical sputtering method or an evaporation method.
The invention also provides a detection system, comprising:
an electrode sensor as described in any one of the above aspects;
the detection device is electrically connected with at least the first electrode, and is used for detecting the resistance of the first electrode in real time when the electrode sensor is placed in an environment to be detected, and judging the concentration of the gas to be detected in the environment to be detected based on the resistance of the first electrode.
The invention also provides a detection method, which comprises the following steps:
placing the electrode sensor in any scheme in an environment to be tested;
after the first electrode is placed for a preset time, judging whether the surface color of the first electrode is changed compared with the surface color of the second electrode, and if so, judging that the environment to be detected contains the gas to be detected.
In one embodiment, the detection method further comprises:
and detecting the resistance of the first electrode, and judging the concentration of the gas to be detected in the environment to be detected based on the resistance of the first electrode.
The electrode sensor and the preparation method, the detection system and the detection method thereof have the following beneficial effects:
the electrode sensor, the preparation method, the detection system and the detection method thereof can rapidly detect whether the element to be detected exists in the environment and whether the element concentration is too high, and have low cost. Judging whether the to-be-detected element is contained in the to-be-detected environment through the color change of the first electrode of the electrode sensor after the first electrode is placed in the to-be-detected gas for a set time, and simultaneously adopting the second electrode and the transparent isolation layer coating the second electrode as a contrast, so that the color difference of the first electrode and the to-be-detected gas after the reaction can be more quickly and intuitively seen; the first electrode of the electrode sensor is placed in the gas to be detected through the detection system, the resistance of the first electrode is detected after the set time is reached, so that the concentration of the gas to be detected in the environment to be detected is judged, and whether the concentration of the gas to be detected in the environment to be detected is continuously changed is judged through monitoring the change of the resistance in real time. Through measuring and calibrating the gas to be measured in the environment, the early warning is carried out on personal safety, meanwhile, the transportation and storage environments of the components can be rapidly evaluated, further, the service life of the components is predicted and evaluated, countermeasures can be taken in advance, and the high-reliability application of the electronic components in the complex environment is ensured.
Drawings
Fig. 1 is a block diagram of an electrode sensor in one embodiment of the invention.
FIG. 2 is a flow chart of a method of manufacturing an electrode sensor in one embodiment of the invention.
FIG. 3 is a schematic diagram of a detection system in one embodiment of the invention.
FIG. 4 is a flow chart of a detection method in one embodiment of the invention.
Reference numerals illustrate:
1. an electrode sensor; 11. a first electrode; 12. a second electrode; 13. a third electrode; 14. a transparent isolation layer; 15. a transparent adsorption layer; 16. a substrate; 17. a bonding pad; 2. a detection device; 3. an environment simulation device to be tested; 31. a gas generating device; 32. a reaction device; 33. an exhaust gas treatment device.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the invention, whereby the invention is not limited to the specific embodiments disclosed below.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Along with the development of civilization of human beings, a large amount of waste gas is generated in the industrialized process, wherein harmful elements (such as sulfur element) exist in the air in the form of simple substances or compounds, which can affect the environment or the health of people, and components are placed in the environment containing the gas capable of reacting with the components for a long time, which can also have adverse effects on electronic equipment containing the components. In the case of failure of electronic components, most of the component failures are caused by the reaction of metals (such as silver) in the components with gaseous elements in the environment, which causes resistance changes and even opens, resulting in the failure of the components. Therefore, the element content in the environment is necessary to be monitored, the possible influence of the corrosion environment is early warned in advance, and the loss of personal and property safety is avoided. However, there is still a lack of a sensor capable of rapidly evaluating the concentration of a gas in an environment in the market, and the detection principle of the existing detection device and detection method is complex, so that it is not possible to know whether there are elements to be detected in the environment to be detected and whether the concentration of the elements is too high.
Therefore, the invention designs an electrode sensor, a preparation method, a detection system and a detection method thereof, which can rapidly detect whether the element to be detected exists in the environment and whether the element concentration is too high.
The invention designs an electrode sensor, and fig. 1 is a structural diagram of the electrode sensor in one embodiment. As shown in fig. 1, the electrode sensor includes:
a first electrode 11;
a second electrode 12, the second electrode 12 being located at one side of the first electrode 11 with a space from the first electrode 11;
a transparent isolation layer 14, the second electrode 12 is covered by the transparent isolation layer 14, and the transparent isolation layer 14 is used for isolating the gas to be tested from the second electrode 12;
the first electrode 11 and the second electrode 12 are made of the same material; the first electrode 11 reacts after contacting with the gas to be measured, and the surface color and resistance of the first electrode 11 change with the change of the reaction time.
Specifically, whether the to-be-measured environment contains the to-be-measured element or not is judged through the color change of the first electrode of the electrode sensor after the first electrode is placed in the to-be-measured gas for a set time, and meanwhile, the second electrode and the transparent isolation layer coating the second electrode are adopted as a contrast, so that the color difference of the first electrode and the to-be-measured gas after the reaction can be seen more quickly and intuitively.
In one embodiment, the gas to be measured may include a sulfur-containing compound; in particular, the sulfur-containing compounds include, but are not limited to, hydrogen sulfide gas, sulfur monoxide gas, sulfur dioxide gas, COS (carbonyl sulfide), or sulfur-containing amino acids.
Specifically, the first electrode 11 may include, but is not limited to, a silver electrode or a copper electrode; in this embodiment, the first electrode 11 is a silver electrode.
In particular, the second electrode 12 may include, but is not limited to, a silver electrode or a copper electrode; in this embodiment, the second electrode 12 is a silver electrode.
Specifically, the silver material or the copper material is a common material in the electronic component, and the silver electrode or the copper electrode is adopted to react with the gas to be detected in the environment to be detected, so that the contact condition of the electronic component with corrosive elements in the environment in the daily use process can be more truly reflected; it should be noted that in other embodiments, other metals (such as tin, aluminum, or iron) may be used, so that metals satisfying the conditions are protected by the present invention as electrodes.
In particular, the transparent barrier layer 14 may include, but is not limited to, a polymethyl methacrylate layer or 823 glue layer; in this embodiment, the transparent isolation layer 14 is a polymethyl methacrylate layer; specifically, the polymethyl methacrylate layer has good water vapor tightness and permeability, and can effectively isolate the electrode from contacting with elements to be detected.
In one embodiment, the shapes of the first electrode 11 and the second electrode 12 include, but are not limited to, serpentine, multi-annular, delta, spring, linear, or sheet; preferably, the shapes of the first electrode 11 and the second electrode 12 in this embodiment are both serpentine.
With continued reference to fig. 1, in one embodiment, the electrode sensor further comprises:
a third electrode 13, the third electrode 13 being arranged spaced apart from the first electrode 11 and the second electrode 12; the material of the third electrode 13 is the same as that of the first electrode 11;
the transparent adsorption layer 15, the third electrode 13 is wrapped by the transparent adsorption layer 15, and the transparent adsorption layer 15 is used for adsorbing the gas to be detected.
In one embodiment, the transparent adsorption layer 15 may include a silica gel layer, and the silica gel has an effect of adsorbing gas, and may adsorb sulfur element and its compounds in the environment, so as to accelerate the reaction between the third electrode 13 and the gas to be measured. It should be noted that the transparent adsorption layer 15 may be, but is not limited to, a silica gel layer, and all other transparent adsorption layers that meet the requirements may be used in the present invention.
In particular, the shape of the third electrode 13 may include, but is not limited to, serpentine, multi-annular, delta, spring, linear, or sheet. Preferably, the shape of the third electrode 13 in this embodiment is serpentine.
Referring to fig. 2 in combination with fig. 1, the present invention also provides a method for manufacturing an electrode sensor, including:
providing a substrate 16;
preparing first electrodes 11 and second electrodes 12 arranged at intervals on a substrate 16; the first electrode 11 and the second electrode 12 are made of the same material; the first electrode 11 reacts after contacting with the gas to be detected, and the surface color and the resistance of the first electrode 11 change along with the change of the reaction time;
a transparent isolation layer 14 is formed on the substrate, the second electrode 12 is covered by the transparent isolation layer 14, and the transparent isolation layer 14 is used for isolating the gas to be tested from the second electrode 12.
In one embodiment, the gas to be measured may include a sulfur-containing compound; in particular, the sulfur-containing compounds include, but are not limited to, hydrogen sulfide gas, sulfur monoxide gas, sulfur dioxide gas, COS (carbonyl sulfide), or sulfur-containing amino acids.
Specifically, the first electrode 11 may include a silver electrode or a copper electrode; in this embodiment, the first electrode 11 is a silver electrode.
Specifically, the second electrode 12 may include a silver electrode or a copper electrode; in this embodiment, the second electrode 12 is a silver electrode.
In particular, the transparent barrier layer 14 may include, but is not limited to, a polymethyl methacrylate layer or 823 glue layer; in this embodiment, the transparent isolation layer 14 is a polymethyl methacrylate layer; specifically, the polymethyl methacrylate layer has good water vapor tightness and permeability, and can effectively isolate the electrode from contacting with elements to be detected.
Specifically, the shapes of the first electrode 11 and the second electrode 12 may include serpentine, polycyclic, delta, spring, linear, or plate; preferably, the shapes of the first electrode 11 and the second electrode 12 in this embodiment are both serpentine.
In one embodiment, the method of preparing the first electrode and the second electrode spaced apart from each other on the substrate may include, but is not limited to, an electroplating method, a chemical synthesis method, CVD (chemical vapor deposition), a physical sputtering method, or an evaporation method; in this embodiment, the preparation method of the first electrode 11 and the second electrode 12 is an evaporation method.
Preferably, in this embodiment, the first electrode 11 and the second electrode 12 are silver electrodes, and the first electrode 11 and the second electrode are shaped as a serpentine electrode network. Specifically, as shown in fig. 1 (the picture only reflects the surrounding mode and does not reflect the actual size and proportion of the silver metal micro-wire), the electrode is formed by periodically surrounding the silver metal micro-wire, and the total length of the silver metal micro-wire is 250cm, the line width is 10um, the line spacing is 10um and the thickness is 100nm. The diameter of the silver metal micro-wires is as small as possible, so that the electrode under unit area can ensure the long distance of the wires as much as possible, and according to the calculation characteristics of the specific surface area of the one-dimensional material: S/V=2pi RL/(pi R2L) =2/R, and the one-dimensional silver wire with small diameter has the advantage of large surface volume ratio, so that the contact area of the silver metal micro wire and the gas to be detected can be increased, and the reaction rate of the electrode and the gas to be detected can be improved.
In one embodiment, a first electrode 11 and a second electrode 12 are prepared on a substrate at intervals, and a third electrode 13 is formed on the substrate, wherein the third electrode 13 is arranged with the first electrode 11 and the second electrode 12 at intervals, and the material of the third electrode 13 is the same as that of the first electrode 11; after forming the third electrode 13, it further includes: a step of forming a transparent adsorption layer 15 on a substrate; the transparent adsorption layer 15 is coated on the third electrode 13 and is used for adsorbing the gas to be detected.
In particular, the shape of the third electrode may include, but is not limited to, serpentine, multi-annular, chevron, spring-shaped, linear, or sheet-shaped; preferably, the shape of the third electrode 13 in this embodiment is serpentine.
In one embodiment, the method of forming the third electrode on the substrate may include, but is not limited to, electroplating, chemical synthesis, CVD, physical sputtering, or evaporation; in this embodiment, the third electrode 13 is prepared by vapor deposition.
Preferably, in this embodiment, the third electrode 13 is a silver electrode, the shape of the third electrode 13 is a serpentine electrode network, and the preparation method of the third electrode 13 is the same as that of the first electrode; specifically, as shown in fig. 1 (the picture only reflects the surrounding mode and does not reflect the actual size and proportion of the silver metal micro-wire), the electrode is formed by periodically surrounding the silver metal micro-wire, and the total length of the silver metal micro-wire is 250cm, the line width is 10um, the line spacing is 10um and the thickness is 100nm.
In one embodiment, the transparent adsorption layer 15 may include a silica gel layer, and the silica gel has an effect of adsorbing gas, and may adsorb sulfur element and its compounds in the environment, so as to accelerate the reaction between the third electrode 13 and the gas to be measured. It should be noted that the transparent adsorption layer 15 may be, but is not limited to, a silica gel layer, and all other transparent adsorption layers that meet the requirements may be used in the present invention.
In one embodiment, the substrate 16 may include a glass substrate, and the step of performing a hydrophobic treatment on the substrate 16 before preparing the first electrode 12 and the second electrode 12 which are arranged at intervals on the substrate 16; specifically, the substrate 16 is subjected to a hydrophobic treatment with plasma water.
Referring to fig. 3 in conjunction with fig. 1, the present invention also provides a detection system, including:
the electrode sensor 1 in any one of the above aspects;
the detection device 2 is electrically connected with at least the first electrode 11, and is used for detecting the resistance of the first electrode 11 in real time when the electrode sensor 1 is placed in the environment to be detected, and judging the concentration of the gas to be detected in the environment to be detected based on the resistance of the first electrode 11.
Specifically, the electrode sensor 1 may be the electrode sensor 1 in fig. 1 and the embodiment, and the specific structure of the electrode sensor 1 is shown in fig. 1 and the related text description, which is not repeated here.
In one embodiment, the gas to be measured may include a sulfur-containing compound; in particular, the sulfur-containing compounds include, but are not limited to, hydrogen sulfide gas, sulfur monoxide gas, sulfur dioxide gas, COS (carbonyl sulfide), or sulfur-containing amino acids.
Preferably, in this embodiment, the detecting device 2 may be a single chip microcomputer, and the first electrode 11 is electrically connected to the single chip microcomputer, so that the resistance change of the first electrode 11 can be monitored in real time.
Specifically, after the detection device 2 is electrically connected to the first electrode 11, when the first electrode 1 is placed in the environment to be detected, a detection voltage is applied to two ends of the first electrode 11, so as to detect the resistance of the first electrode 11 in real time.
In another embodiment, the detecting device 2 may be further electrically connected to the second electrode 12, for applying a detection voltage to both ends of the second electrode 12 when the electrode sensor 1 is placed in the environment to be measured, and detecting the resistance of the second electrode 12 in real time.
In another embodiment, the detecting device 2 may be further electrically connected to the third electrode 13, for applying a detection voltage to both ends of the third electrode 13 when the electrode sensor 1 is placed in the environment to be measured, and detecting the resistance of the third electrode 13 in real time.
Specifically, in order to facilitate the detection device 2 to apply the detection voltage to the first electrode 11, the second electrode 12, and the third electrode 13, pads 17 may also be provided at both ends of the first electrode 11, the second electrode 12, and the third electrode 13, respectively.
As an example, the material of the pad 17 may be the same as the material of the first electrode 11, the second electrode 12, and the third electrode 13; the pad 17 may be prepared using the same preparation process while the first electrode 11, the second electrode 12, and the third electrode 13 are prepared.
For convenience of experiments, the invention also provides an environment simulation device 3 to be tested, referring to fig. 3, the environment simulation device 3 to be tested comprises a gas generating device 31, a reaction device 32 and an exhaust gas treatment device 33; the gas generating device 31 is connected with the reaction device 32, the reaction device 32 is connected with the waste gas treatment device 33, the electrode sensor 1 is arranged in the reaction device 32, the gas generating device 31 provides the gas to be measured, in this embodiment, the gas to be measured is H 2 S (hydrogen sulfide) gas, H 2 The concentration of S is changed from 0 to 10 percent, the interval is 0.5 percent, the colors of the first electrode 11, the second electrode 12 and the third electrode 13 are continuously observed in the reaction process, whether the surface color of the first electrode 11 is changed compared with the surface color of the second electrode 12 is judged, if so, the environment to be detected contains the gas to be detected is judged; specifically, it is also possible to determine whether or not there is a gas to be measured by determining whether or not there is a change in the color of the third electrode 13; in addition, the resistance of the first electrode 11 is measured by the detection device 2 after the electrode sensor 1 is placed in the reaction device 32 for 30 minutes, and the concentration of the gas to be measured in the environment to be measured is determined based on the resistance of the first electrode 11. In particular, the resistance of the second electrode 12 or the third electrode 13 can also be measured by the detection device 2.
In practical life and industrial applications, the above-mentioned environment simulation device 3 to be measured may not be provided, but the electrode sensor may be directly placed in a real environment to be measured.
Referring to fig. 4 in combination with fig. 1 and fig. 3, the present invention further provides a detection method, where the detection method includes:
placing the electrode sensor 1 in any scheme in an environment to be tested;
after the preset time is set, whether the surface color of the first electrode 11 is changed compared with the surface color of the second electrode 12 is judged, and if so, the environment to be measured is judged to contain the gas to be measured.
Specifically, the electrode sensor 1 may be the electrode sensor 1 in fig. 1, fig. 3, and the embodiment, and the specific structure of the electrode sensor 1 is shown in fig. 1 and the related text description, which will not be repeated here.
In one embodiment, the gas to be measured may include a sulfur-containing compound; in particular, the sulfur-containing compounds include, but are not limited to, hydrogen sulfide gas, sulfur monoxide gas, sulfur dioxide gas, COS (carbonyl sulfide), or sulfur-containing amino acids.
In one embodiment, it may also be determined whether the surface color of the third electrode 13 changes, and if so, it is determined that the environment to be measured contains the gas to be measured.
In one embodiment, the detection method further comprises: detecting the resistance of the first electrode 11, and judging the concentration of the gas to be detected in the environment to be detected based on the resistance of the first electrode 11;
in another embodiment, the detection method further comprises: the resistance of the second electrode 12 is detected.
In another embodiment, the detection method further comprises: the resistance of the third electrode 13 is detected.
Specifically, in connection with the detection system of fig. 3, in the present embodiment, after the electrode sensor 1 is placed in the reaction device 32 for a preset time, the resistance of the first electrode 11 is measured by the detection device 2, and the concentration of the gas to be measured in the environment to be measured is determined based on the resistance of the first electrode 11.
In one embodiment, if the gas to be measured contains sulfur or a sulfur compound, the resistance of the resistance after the reaction between the first electrode 11 and the gas to be measured becomes larger as the reaction product increases.
It should be noted that, the resistance value of the resistor after the reaction between the first electrode 11 and the gas to be measured is different according to the component of the gas to be measured, in other embodiments, the resistance value of the resistor after the reaction between the first electrode 11 and the gas to be measured may be reduced with the increase of the reaction products, which is not limited by the above embodiments.
The electrode sensor, the preparation method, the detection system and the detection method thereof can rapidly detect whether the element to be detected exists in the environment and whether the element concentration is too high, and have low cost. Judging whether the to-be-detected element is contained in the to-be-detected environment through the color change of the first electrode of the electrode sensor after the first electrode is placed in the to-be-detected gas for a set time, and simultaneously adopting the second electrode and the transparent isolation layer coating the second electrode as a contrast, so that the color difference of the first electrode and the to-be-detected gas after the reaction can be more quickly and intuitively seen; the first electrode of the electrode sensor is placed in the gas to be detected through the detection system, the resistance of the first electrode is detected after the set time is reached, so that the concentration of the gas to be detected in the environment to be detected is judged, and whether the concentration of the gas to be detected in the environment to be detected is continuously changed is judged through monitoring the change of the resistance in real time. Through measuring and calibrating the gas to be measured in the environment, the early warning is carried out on personal safety, meanwhile, the transportation and storage environments of the components can be rapidly evaluated, further, the service life of the components is predicted and evaluated, countermeasures can be taken in advance, and the high-reliability application of the electronic components in the complex environment is ensured.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (10)
1. An electrode sensor, characterized in that the electrode sensor comprises:
a first electrode;
the second electrode is positioned on one side of the first electrode and is spaced from the first electrode;
a transparent isolating layer, which is used for isolating the gas to be detected from the second electrode so that the second electrode does not react with the gas to be detected; wherein the gas to be measured comprises a sulfur-containing compound; the sulfur-containing compound includes at least one of a hydrogen sulfide gas, a sulfur monoxide gas, a sulfur dioxide gas, a carbonyl sulfide, and a sulfur-containing amino acid;
the third electrode is arranged at intervals with the first electrode and the second electrode;
a transparent adsorption layer, which is used for coating the third electrode and adsorbing the gas to be detected; the transparent adsorption layer adsorbs the sulfur-containing compound to accelerate the reaction of the third electrode and the gas to be detected;
the shapes of the first electrode, the second electrode and the third electrode all comprise snakes; the materials of the first electrode, the second electrode and the third electrode all comprise silver metal micro-wire materials; the first electrode and the third electrode react after contacting with the gas to be detected, and the surface color and the resistance of the first electrode change along with the change of the reaction time; after the electrode sensor is placed in the environment of the gas to be detected for a preset time, the surface colors of the first electrode and the second electrode are different.
2. The electrode sensor of claim 1, wherein the transparent isolation layer comprises a polymethyl methacrylate layer or 823 glue layer; the transparent adsorption layer comprises a silica gel layer.
3. The electrode sensor of claim 1, wherein the shape of the first electrode, the shape of the second electrode, and the shape of the third electrode each comprise a multi-loop shape, a delta shape, a spring shape, a straight line shape, or a sheet shape.
4. A method of manufacturing an electrode sensor, comprising:
providing a substrate;
preparing a first electrode, a second electrode and a third electrode which are arranged at intervals on the substrate; the shapes of the first electrode, the second electrode and the third electrode all comprise snakes; the materials of the first electrode, the second electrode and the third electrode all comprise silver metal micro-wire materials;
forming a transparent isolation layer on the substrate, wherein the second electrode is coated by the transparent isolation layer, and the transparent isolation layer is used for isolating the gas to be tested from the second electrode so that the second electrode does not react with the gas to be tested; wherein the gas to be measured comprises a sulfur-containing compound; the sulfur-containing compound includes at least one of a hydrogen sulfide gas, a sulfur monoxide gas, a sulfur dioxide gas, a carbonyl sulfide, and a sulfur-containing amino acid;
forming a transparent adsorption layer on the substrate; the transparent adsorption layer is coated on the third electrode and used for adsorbing the gas to be detected; the transparent adsorption layer adsorbs the sulfur-containing compound to accelerate the reaction of the third electrode and the gas to be detected;
the first electrode and the third electrode react after contacting with the gas to be detected, and the surface color and the resistance of the first electrode change along with the change of the reaction time; after the electrode sensor is placed in the environment of the gas to be detected for a preset time, the surface colors of the first electrode and the second electrode are different.
5. The method of manufacturing an electrode sensor according to claim 4, wherein the substrate comprises a glass substrate, and further comprising the step of subjecting the substrate to a hydrophobic treatment before the first electrode and the second electrode are prepared on the substrate in a spaced arrangement.
6. The method of manufacturing an electrode sensor according to claim 4 or 5, wherein the transparent isolation layer comprises a polymethyl methacrylate layer or 823 adhesive layer; the transparent adsorption layer comprises a silica gel layer.
7. The method of manufacturing an electrode sensor according to claim 4, wherein the method of manufacturing the first electrode and the second electrode arranged at intervals on the substrate includes an electroplating method, a chemical synthesis method, a chemical vapor deposition method, a physical sputtering method, or an evaporation method; the method for forming the third electrode on the substrate comprises an electroplating method, a chemical synthesis method, a chemical vapor deposition method, a physical sputtering method or an evaporation method.
8. A detection system, the detection system comprising:
an electrode sensor according to any one of claims 1 to 3;
the detection device is electrically connected with at least the first electrode, and is used for detecting the resistance of the first electrode in real time when the electrode sensor is placed in an environment to be detected, judging whether the environment to be detected contains gas to be detected or not based on the surface colors of the first electrode, the second electrode and the third electrode, and judging the concentration of the gas to be detected in the environment to be detected based on the resistance of the first electrode.
9. A method of detection, the method comprising:
placing the electrode sensor of any one of claims 1 to 3 in an environment to be measured;
after the first electrode is placed for a preset time, judging whether the surface color of the first electrode is changed compared with the surface color of the second electrode and/or judging whether the surface color of the third electrode is changed, if so, judging that the environment to be detected contains the gas to be detected.
10. The method of detection of claim 9, wherein the method of detection further comprises:
and detecting the resistance of the first electrode, and judging the concentration of the gas to be detected in the environment to be detected based on the resistance of the first electrode.
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