CN113859723B

CN113859723B - Ring-breaking recovery rack

Info

Publication number: CN113859723B
Application number: CN202110997365.6A
Authority: CN
Inventors: 吴应秋; 尹俊辉; 沈文强
Original assignee: Zhixin Semiconductor Co ltd
Current assignee: Zhixin Semiconductor Co ltd
Priority date: 2021-08-27
Filing date: 2021-08-27
Publication date: 2023-04-25
Anticipated expiration: 2041-08-27
Also published as: CN113859723A

Abstract

The invention relates to the technical field of semiconductor material storage, and provides a ring collapse recovery frame, which comprises the following components: a base mechanism including a base; the first limiting mechanism comprises a plurality of supporting pieces, wherein the bottom ends of the supporting pieces are fixed on the base, the axial directions of the supporting pieces are perpendicular to the main surface of the base, and the supporting pieces are used for limiting the inner edge of the collapse ring. According to the ring-breaking recovery frame, the plurality of supporting pieces limited at the inner circular edge of the ring-breaking ring are arranged to temporarily store and store the wafer ring-breaking ring, and meanwhile, the edge of the base plays a physical protection role on the thinner wafer ring-breaking ring.

Description

Ring-breaking recovery rack

Technical Field

The invention relates to the field of semiconductor material storage, in particular to a ring collapse recovery frame.

Background

As shown in fig. 1-2, in the semiconductor industry, wafer-breaking ring 30 needs to be recovered after the UV film 20 is manually removed after the chips 10 on the wafer are automatically picked up by the equipment. Because the wafer is broken and is about 3 millimeters irregular stainless steel sheet of shape, interior circle 31 is complete circular, and the outward flange is irregular, including four straight border 321 and two different opening 322 of shape, directly retrieve and keep in inconvenient, in order to avoid or reduce and break the ring deformation and lead to scrapping in retrieving the storage process, conveniently retrieve simultaneously and count, need design special broken ring recovery frame to break the ring to carry out temporary storage to the wafer.

Disclosure of Invention

The embodiment of the invention provides a broken ring recovery frame, which aims to solve the technical problem of inconvenient temporary storage and storage of broken rings of wafers with irregular shapes and thinner thickness.

The invention provides a ring collapse recovery frame, which comprises:

a base mechanism including a base;

the first limiting mechanism comprises a plurality of supporting pieces, wherein the bottom ends of the supporting pieces are fixed on the base, the axial directions of the supporting pieces are perpendicular to the main surface of the base, and the supporting pieces are used for limiting the inner edge of the collapse ring.

In some embodiments, the bottom surface of the base is provided with a threaded hole and a countersunk hole communicated with the threaded hole, the bottom end surfaces of the supporting pieces are provided with screw holes, the countersunk hole and the threaded hole are used for penetrating through a screw rod to be screwed into the screw holes, and the countersunk hole is used for limiting a screw head.

In some embodiments, the top surface of the base is provided with a plurality of limiting grooves, and a plurality of the supporting pieces and a plurality of the limiting pieces are fixed in the corresponding limiting grooves.

In some embodiments, the plurality of support members are each cylindrical rods.

In some embodiments, the plurality of supports are hollow cylindrical rods.

In some embodiments, the base is a steel plate.

In some embodiments, the number of the supporting pieces is four, and the supporting pieces are uniformly distributed at intervals along equal diameter and equal central angles with the center of the base as the center.

In some embodiments, the device further comprises a second limiting mechanism, wherein the second limiting mechanism comprises at least one pair of limiting pieces, the pair of limiting pieces are located on two sides of the pair of supporting pieces which are arranged in opposite directions, and the limiting pieces are respectively used for limiting the positions of straight outer edges of two sides of the collapse ring.

In some embodiments, the base is provided with two notches, and the two notches are located at two sides of the other pair of supporting pieces which are oppositely arranged.

In some embodiments, a pair of the limiting members and a corresponding pair of the supporting members are spaced apart along the same straight line.

The technical scheme provided by the invention has the beneficial effects that:

according to the ring-breaking recovery frame, the plurality of supporting pieces limited at the inner circular edge of the ring-breaking ring are arranged to temporarily store and store the wafer ring-breaking ring, and meanwhile, the edge of the base plays a physical protection role on the thinner wafer ring-breaking ring.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a wafer;

FIG. 2 is a schematic view of a wafer-level ring;

FIG. 3 is a schematic structural view of the ring-collapse recovery frame provided by the invention;

FIG. 4 is a schematic view of the bottom structure of the base provided by the present invention;

fig. 5 is a schematic front view of a base according to the present invention.

In the figure:

10. a chip; 20. a UV film; 30. wafer ring breakage; 31. an inner circle; 321. a straight edge; 322. a notch; 40. a base; 41. a threaded hole; 42. a countersink hole; 43. a limit groove; 50. a support; 60. a limiting piece; 70. and a hollow hole.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

The embodiment of the invention provides a ring-breaking recovery frame, which can solve the technical problem of inconvenient temporary storage and storage of wafer ring-breaking 30 with irregular shape and thinner thickness.

Referring to fig. 3, the present invention provides a ring-collapsing recovery rack, which includes a base mechanism and a first limiting mechanism, wherein the base mechanism includes a base 40; the first limiting mechanism comprises a plurality of supporting pieces 50, wherein the bottom ends of the supporting pieces 50 are fixed on the base 40, the axial directions of the supporting pieces 50 are perpendicular to the main surface of the base 40, and the supporting pieces 50 are used for limiting the edge of the inner circle 31 of the disintegrating ring.

According to the ring-breaking recovery frame, the plurality of supporting pieces 50 limited at the edge of the ring 31 in the ring-breaking ring are arranged, when the ring-breaking recovery frame is used, the wafer ring-breaking ring 30 is manually sleeved on the periphery of the plurality of supporting pieces 50, the temporary storage and storage effects on the wafer ring-breaking ring 30 are achieved, and meanwhile, the edge of the base 40 plays a physical protection role on the thinner wafer ring-breaking ring 30.

In an embodiment, referring to fig. 4, the bottom surface of the base 40 is provided with a threaded hole 41 and a slot hole 42 penetrating the threaded hole 41, the bottom end surfaces of the plurality of supporting members 50 are provided with screw holes, the slot hole 42 and the threaded hole 41 are used for penetrating through a screw rod to be screwed into the screw holes, the slot of the slot hole 42 is used for limiting a screw head, so that the screw head is prevented from being raised from the bottom surface of the base 40, and the ring-breaking recovery rack is unstable on a table top, thereby causing hidden danger and being unfavorable for the storage protection of the wafer ring-breaking 30.

In an embodiment, the wafer protection device further comprises a second limiting mechanism, the second limiting mechanism comprises at least one pair of limiting members 60, the pair of limiting members 60 are located on two sides of the pair of supporting members 50 which are arranged in opposite directions and are respectively used for limiting the positions of the straight outer edges of the two sides of the ring, so that when the wafer ring 30 moves on the periphery of the plurality of supporting members 50, a better protection effect is achieved by rigid contact between the limiting members 60 and the straight edges 321 and rigid contact between the plurality of supporting members 50 and the inner edges 31 of the wafer ring 30.

In an embodiment, referring to fig. 5, the top surface of the base 40 is provided with a plurality of limiting grooves 43, and a plurality of the supporting members 50 and a plurality of the limiting members 60 are respectively fixed in the corresponding limiting grooves 43, so that the supporting members 50 and the limiting members 60 are stably and vertically fixed on the front surface of the base 40, and deformation damage to the wafer ring 30 caused by displacement of the supporting members 50 and the limiting members 60 when the threaded connection between the supporting members 50 and the limiting members 60 is damaged during long-term reciprocating use of the ring-collapse recovery frame is avoided.

In one embodiment, the plurality of support members 50 are each cylindrical rods. The outer peripheral surface of the ring rod is a smooth surface, when the wafer collapse ring 30 is arranged on the periphery of the plurality of supporting pieces 50, the plurality of supporting pieces 50 are in point contact with the inner edge of the wafer collapse ring 30, the processing requirement on the supporting pieces 50 is low, the shape of the supporting pieces 50 does not need to be accurately designed according to the inner circle 31 of the wafer collapse ring 30, and deformation damage can not be caused to the inner circle 31 edge of the wafer collapse ring 30. The plurality of limiting members 60 are limited at the outer edge of the wafer collapse ring 30, and the cylindrical surface of the limiting members 60 and the outer edge of the wafer collapse ring 30 are also in point contact. By implementing the support 50 and the stop 60 as cylindrical rods, an effective storage protection is achieved for the wafer collapse rings 30 of thinner stainless steel sheet.

In one embodiment, the supporting members 50 and the limiting members 60 are hollow cylindrical rods, and the hollow holes 70 of the hollow cylindrical rods serve as weight reducing holes and reduce consumable materials of the rods.

The height of the hollow cylindrical rod is set according to production requirements.

In a preferred embodiment, a damping structure may be further disposed in the hollow hole 70 of the hollow cylindrical rod, where the damping structure is used to play a role in vibration prevention for the ring collapse recovery frame, so as to prevent the ring collapse recovery frame on the steel frame support table, and when the steel frame support table is impacted by an external force unavoidable to the production line or warehouse, the ring collapse recovery frame is inclined or vibrated, and deformation damage is caused to the wafer ring collapse 30.

In a more specific embodiment, the hollow hole 70 of the hollow cylindrical rod is a blind hole, the depth of the blind hole is 9/10 of the length of the rod, one end of the spring is fixed at the bottom of the blind hole, the other end of the spring is fixed with a plastic hard sphere, and the diameter of the plastic hard sphere is 1/2 of the aperture of the blind hole.

In one embodiment, the base 40 is a steel plate, and is easy and convenient to manufacture.

In one embodiment, the thickness of the steel plate is 6mm-20mm, so that the steel plate can play a role in rigid support, and meanwhile, the assembled ring-collapse recovery frame is moderate in weight and convenient to store and transport.

In an embodiment, the base 40 is implemented as a square steel plate, so that 4S management is performed on the support table when the wafer ring 30 is stored, positioning management is performed on the ring-breaking recovery rack, and checking and counting of the wafer ring 30 are facilitated through a visualization method.

In an embodiment, the number of the supporting members 50 is four, and the four supporting members 50 are uniformly spaced along the central angle of the base 40, which is equal diameter and equal center angle of the center of the circle, that is, the four supporting members 50 are divided into two pairs of supporting members 50 disposed opposite to each other.

In some embodiments, the base 40 is provided with two notches, and two notches are located on two sides of the other pair of the supporting members 50 disposed opposite to each other. The wafer can be broken and the ring 30 has the straight border 321 of opening 322 side to align and place in one of them breach department, plays the storage mistake proofing effect, is convenient for regularly store the wafer that irregular shape is broken and is closed and the ring 30 can also be broken and closed through handheld wafer to the ring 30, and two support pieces 50 along breach department slowly place the wafer and break the ring 30, play the storage guard action to the wafer and break the ring 30, still the accessible is broken and is closed and closed the ring 30 with the wafer of whole buttress and retrieve the frame and take out from breaking the ring from two breach departments ease, realizes more convenient and simple.

In one embodiment, a pair of the limiting members 60 and a corresponding pair of the supporting members 50 are spaced apart along the same straight line.

In the description of the present invention, it should be noted that the azimuth or positional relationship indicated by the terms "upper", "lower", etc. are based on the azimuth or positional relationship shown in the drawings, and are merely for convenience of describing the present invention and simplifying the description, and are not indicative or implying that the apparatus or element in question must have a specific azimuth, be constructed and operated in a specific azimuth, and thus should not be construed as limiting the present invention. Unless specifically stated or limited otherwise, the terms "mounted," "connected," and "coupled" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

It should be noted that in the present invention, relational terms such as "first" and "second" and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

The foregoing is only a specific embodiment of the invention to enable those skilled in the art to understand or practice the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A collapse ring recovery rack, comprising:

a base mechanism including a base;

the first limiting mechanism comprises a plurality of supporting pieces, wherein the bottom ends of the supporting pieces are fixed on the base, the axial directions of the supporting pieces are perpendicular to the main surface of the base, and the supporting pieces are used for limiting the inner circular edge of the collapse ring;

the second limiting mechanism comprises at least one pair of limiting pieces, wherein the pair of limiting pieces are positioned on two sides of the pair of supporting pieces which are arranged in opposite directions and are respectively used for limiting the positions of straight outer edges of two sides of the collapse ring;

two notches are formed in the base, and the two notches are located on two sides of the other pair of supporting pieces which are arranged in opposite directions.

2. The ring-breaking recovery rack according to claim 1, wherein the bottom surface of the base is provided with a threaded hole and a countersunk hole penetrating the threaded hole, the bottom end surfaces of the plurality of supporting pieces are provided with screw holes, the countersunk hole and the threaded hole are used for penetrating a screw rod to be screwed into the screw holes, and the countersunk hole is used for limiting a screw head.

3. The ring-collapsing recovery rack of claim 1, wherein the top surface of the base is provided with a plurality of limit grooves, and a plurality of the supporting members and a plurality of the limit members are fixed in the corresponding limit grooves.

4. The collapsible ring recovery rack of claim 1, wherein a plurality of said support members are cylindrical rods.

5. A collapsible ring recovery rack as claimed in claim 3, wherein a plurality of said support members are hollow cylindrical rods.

6. The collapse ring recovery frame of claim 1, wherein the base is a sheet steel member.

7. The ring-collapsing recovery rack of claim 1, wherein the number of the supporting members is four, and the supporting members are uniformly distributed at intervals along the same central angle with the center of the base as the center of a circle.

8. The collapsible ring recovery rack of claim 1, wherein a pair of said stop members and a corresponding pair of said support members are spaced along a common straight line.