CN113847659A - Clean room pressure difference gradient control system and control method - Google Patents
Clean room pressure difference gradient control system and control method Download PDFInfo
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- CN113847659A CN113847659A CN202111000309.7A CN202111000309A CN113847659A CN 113847659 A CN113847659 A CN 113847659A CN 202111000309 A CN202111000309 A CN 202111000309A CN 113847659 A CN113847659 A CN 113847659A
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- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000004891 communication Methods 0.000 claims abstract description 13
- 238000004378 air conditioning Methods 0.000 claims abstract description 9
- 238000005516 engineering process Methods 0.000 abstract description 2
- 230000005055 memory storage Effects 0.000 abstract description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/62—Control or safety arrangements characterised by the type of control or by internal processing, e.g. using fuzzy logic, adaptive control or estimation of values
- F24F11/63—Electronic processing
- F24F11/64—Electronic processing using pre-stored data
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/70—Control systems characterised by their outputs; Constructional details thereof
- F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
- F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/70—Control systems characterised by their outputs; Constructional details thereof
- F24F11/80—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air
- F24F11/83—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air by controlling the supply of heat-exchange fluids to heat-exchangers
- F24F11/84—Control systems characterised by their outputs; Constructional details thereof for controlling the temperature of the supplied air by controlling the supply of heat-exchange fluids to heat-exchangers using valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F7/00—Ventilation
- F24F7/003—Ventilation in combination with air cleaning
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F7/00—Ventilation
- F24F7/007—Ventilation with forced flow
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2110/00—Control inputs relating to air properties
- F24F2110/40—Pressure, e.g. wind pressure
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Signal Processing (AREA)
- Ventilation (AREA)
- Fluid Mechanics (AREA)
- Fuzzy Systems (AREA)
- Mathematical Physics (AREA)
Abstract
The invention discloses a clean room pressure difference gradient control system, which belongs to the technical field of automatic control and comprises a central air-conditioning device, a first room, a second room and a controller, wherein the second room is arranged at one side of the first room, and the central air-conditioning device comprises a blower and an exhaust fan; the invention also discloses a control method of the clean room pressure difference gradient control system; the invention uses the automation technology, so that the controller can monitor the room constant air volume valve and the room variable air volume valve in real time through the communication module, and the controller can be endowed with the optimal opening degree of memory storage after starting up each time in the later period according to the opening degrees of the room constant air volume valve and the room variable air volume valve which are recorded under different working conditions, so as to initially position the opening degrees of the room constant air volume valve and the room variable air volume valve, and then stably adjust the opening degrees, so that the pressure difference of the clean room is quickly stabilized, and the pressure difference gradient of the clean area can be quickly established.
Description
Technical Field
The invention belongs to the technical field of automatic control, and particularly relates to a clean room pressure difference gradient control system and a control method.
Background
For the control of the indoor pressure difference, because the influence factors are more, such as the air supply amount, the air return amount and the air exhaust amount, and the infiltration amount between rooms or between rooms and corridors, certain interference can be caused, and further certain influence is generated on the production and the experimental results.
Therefore, it is desirable to provide a clean room pressure gradient control system and method.
Disclosure of Invention
To solve the problems set forth in the background art described above. The invention provides a clean room pressure difference gradient control system and a clean room pressure difference gradient control method, which have the characteristics of quickly and effectively controlling the indoor pressure and quickly establishing stable gradient pressure difference in rooms with different cleanness grades.
Another object of the present invention is to provide a method for controlling a clean room pressure gradient control system.
In order to achieve the purpose, the invention provides the following technical scheme: a clean room pressure difference gradient control system comprises a central air conditioning device, a first room, a second room and a controller, wherein the second room is arranged on one side of the first room, the central air conditioning device comprises a blower and an exhaust fan, the air inlet ends of the first room and the second room are provided with blowers, the exhaust fan is arranged at the air outlet ends of the first room and the second room, the air inlet end of the first room and the air supply end of the blower, the air inlet end of the second room and the air supply end of the blower, the air outlet end of the first room and the fresh air end of the blower, the air outlet end of the first room and the air return end of the second room and the fresh air end of the blower, the air outlet end of the second room and the air return end of the blower, the air outlet end of the first room and the air inlet end of the exhaust fan and the air outlet end of the second room and the air inlet end of the blower are all connected through pipelines, an air supply differential pressure sensor is arranged between the air inlet ends of the first room and the second room and the air supply end of the air supply machine, a first constant air volume valve is arranged on one side, close to the air inlet end of the first room, of the pipeline, a second constant air volume valve is arranged between the air inlet ends of the first room and the second room and the air supply end of the air supply machine, a first differential pressure sensor is arranged in the first room, a second differential pressure sensor is arranged in the second room, a first variable air volume valve is arranged on one side, close to the first room, of the pipeline, between the air outlet ends of the first room and the second room and the fresh air end of the air supply machine, a second variable air volume valve is arranged on one side, close to the second room, of the pipeline, between the air outlet ends of the first room and the second room and the fresh air end of the air supply machine, between the air-out end in first room and the second room and the new trend end of forced draught blower the one side that is close to the new trend end of forced draught blower on the pipeline is provided with the new air valve, between the air-out end in first room and the second room and the return air end of forced draught blower the one side that is close to the return air end of forced draught blower on the pipeline is provided with the return air valve, between the air-out end in first room and the second room and the air inlet end of exhaust fan one side that is close to the exhaust fan air inlet end on the pipeline is provided with air exhaust differential pressure sensor and exhaust valve respectively, the controller passes through communication module and is connected with new air valve, return air valve, first air quantity valve, first variable air quantity valve, second variable air quantity valve and exhaust valve.
Further, the controller is a local control screen or a remote control computer.
A control method of a clean room pressure difference gradient control system comprises the following steps:
s1: when the unit is started, the fresh air valve, the return air valve and the exhaust air valve are opened according to working conditions, and then the air feeder and the exhaust air fan are started according to the working conditions;
s2: the controller performs constant air pressure regulation on the air feeder to stabilize air feeding pressure;
s3: the controller adjusts the constant air pressure of the exhaust fan to stabilize the exhaust pressure;
s4: the controller monitors a first constant air volume valve and a first variable air volume valve of a first room through the communication module, and the controller performs constant pressure adjustment on the first variable air volume valve of the first room according to the pressure of the first room acquired by the first differential pressure sensor and records the optimal opening degree of the first constant air volume valve and the first variable air volume valve when the first constant air volume valve and the first variable air volume valve are stable;
s5: the controller monitors a second constant air volume valve and a second variable air volume valve of a second room through the communication module, and the controller performs constant pressure adjustment on the second variable air volume valve of the second room according to the pressure of the second room acquired by the second differential pressure sensor and records the optimal opening degree of the second constant air volume valve and the second variable air volume valve when the second constant air volume valve and the second variable air volume valve are stable;
s6: the controller adjusts the fresh air valve, the return air valve and the exhaust valve according to the working condition requirement.
Further, in the present invention, in step S2, the controller performs the specific step of constant air pressure adjustment on the blower: the controller adjusts the constant air pressure of the air feeder according to the air supply pressure collected by the air supply pressure difference sensor.
Further, in step S3, the controller specifically adjusts the constant air pressure of the exhaust fan by: the controller adjusts the constant air pressure of the exhaust fan according to the exhaust pressure collected by the exhaust valve.
Further, in the present invention, in the steps S4 and S5, the opening degrees of the first constant air volume valve and the first variable air volume valve in the first room and the second constant air volume valve and the second variable air volume valve in the second room, which correspond to the stable pressure difference under the last working condition recorded by the controller, are 80% and 68%, respectively, after the unit is started again, the opening degrees of the first constant air volume valve and the first variable air volume valve in the first room and the second constant air volume valve and the second variable air volume valve in the second room are directly opened to 80% and 68%, and then the adjustment is performed, so as to reduce the adjustment time of the pressure difference process, so as to rapidly stabilize the pressure.
Compared with the prior art, the invention has the beneficial effects that:
the invention uses the automation technology, so that the controller can monitor the room constant air volume valve and the room variable air volume valve in real time through the communication module, and the controller can be endowed with the optimal opening degree of memory storage after starting up each time in the later period according to the opening degrees of the room constant air volume valve and the room variable air volume valve which are recorded under different working conditions, so as to initially position the opening degrees of the room constant air volume valve and the room variable air volume valve, and then stably adjust the opening degrees, so that the pressure difference of the clean room is quickly stabilized, and the pressure difference gradient of the clean area can be quickly established.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a block diagram of the present invention;
in the figure: 1. a fresh air valve; 2. a return air valve; 3. a central air conditioning unit; 4. a blower; 5. an air supply pressure difference sensor; 6. a first fixed air volume valve; 7. a first differential pressure sensor; 8. a first room; 9. a first variable air volume valve; 10. a second fixed air volume valve; 11. a second variable air volume valve; 12. a second room; 13. a second differential pressure sensor; 14. an exhaust differential pressure sensor; 15. an exhaust valve; 16. an exhaust fan; 17. a communication module; 18. And a controller.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides the following technical solutions: a pressure difference gradient control system of a clean room comprises a central air conditioning device 3, a first room 8, a second room 12 and a controller 18, wherein one side of the first room 8 is provided with the second room 12, the central air conditioning device 3 comprises a blower 4 and an exhaust fan 16, the air inlet ends of the first room 8 and the second room 12 are provided with the blower 4, the air outlet ends of the first room 8 and the second room 12 are provided with the exhaust fan 16, the air inlet end of the first room 8 and the air supply end of the blower 4, the air inlet end of the second room 12 and the air supply end of the blower 4, the air outlet end of the first room 8 and the fresh air end of the blower 4, the air outlet end of the first room 8 and the air return end of the blower 4, the air outlet end of the second room 12 and the air return end of the blower 4, the air outlet end of the first room 8 and the air inlet end of the exhaust fan 16 and the air outlet end of the second room 12 and the air return end of the blower 16 are connected through pipelines, an air supply pressure difference sensor 5 is arranged on one side, close to the air supply end of the air supply machine 4, of the air inlet end of the first room 8 and the second room 12 and the air supply end of the air supply machine 4, a first constant air volume valve 6 is arranged on one side, close to the air inlet end of the first room 8, of the air inlet end of the first room 8 and the second room 12 and the air supply end of the air supply machine 4, a second constant air volume valve 10 is arranged on one side, close to the air inlet end of the second room 12, of the air inlet end of the first room 8 and the air supply end of the second room 12 and the air supply end of the air supply machine 4, a first pressure difference sensor 7 is arranged in the first room 8, a second pressure difference sensor 13 is arranged in the second room 12, a first variable air volume valve 9 is arranged on one side, close to the first room 8, close to one side, close to the second room 12, of the air outlet end of the first room 8 and the air supply machine 12 and one side, close to the second room 12, of the air supply end of the air supply machine 4 The air conditioner comprises a metering valve 11, wherein a fresh air valve 1 is arranged on one side, close to a fresh air end of an air feeder 4, of an air outlet end of a first room 8 and a second room 12 and a fresh air end of the air feeder 4 on a pipeline between the fresh air ends of the air feeder 4, a return air valve 2 is arranged on one side, close to a return air end of the air feeder 4, of an air outlet end of the first room 8 and the second room 12 and one side, close to an air inlet end of an air exhauster 16, of an air inlet end of the air exhauster 4 on a pipeline between the air outlet end of the first room 8 and the air inlet end of the second room 12, an air exhaust differential pressure sensor 14 and an air exhaust valve 15 are respectively arranged, and a controller 18 is connected with the fresh air valve 1, the return air valve 2, a first constant air volume valve 6, a first variable air volume valve 9, a second constant air volume valve 10, a second variable air volume valve 11 and the air exhaust valve 15 through a communication module 17.
Specifically, the controller 18 is a local control screen or a remote control computer.
A control method of a clean room pressure difference gradient control system comprises the following steps:
s1: when the unit is started, the fresh air valve 1, the return air valve 2 and the exhaust valve 15 are opened according to working conditions, and then the air feeder 4 and the exhaust fan 16 are started according to the working conditions;
s2: the controller 18 regulates the constant air pressure of the air feeder 4 to stabilize the air feeding pressure;
s3: the controller 18 adjusts the constant air pressure of the exhaust fan 16 to stabilize the exhaust air pressure;
s4: the controller 18 monitors the first constant air volume valve 6 and the first variable air volume valve 9 of the first room 8 through the communication module 17, and the controller 18 performs constant pressure regulation on the first variable air volume valve 9 of the first room 8 according to the pressure of the first room 8 acquired by the first differential pressure sensor 7 and records the optimal opening degree of the first constant air volume valve 6 and the first variable air volume valve 9 when the first constant air volume valve and the first variable air volume valve 9 are stable;
s5: the controller 18 monitors the second constant air volume valve 10 and the second variable air volume valve 11 of the second room 12 through the communication module 17, and the controller 18 performs constant pressure regulation on the second variable air volume valve 11 of the second room 12 according to the pressure of the second room 12 acquired by the second differential pressure sensor 13 and records the optimal opening of the second constant air volume valve 10 and the second variable air volume valve 11 when the second constant air volume valve 10 and the second variable air volume valve 11 are stable;
s6: the controller 18 adjusts the fresh air valve 1, the return air valve 2 and the exhaust air valve 15 according to the requirements of working conditions.
Specifically, in step S2, the controller 18 performs the specific step of constant air pressure adjustment of the blower 4: the controller 18 performs constant air pressure adjustment of the blower 4 based on the air supply pressure detected by the air supply pressure difference sensor 5.
Specifically, in step S3, the controller 18 performs the specific steps of constant air pressure adjustment on the exhaust fan 16: the controller 18 adjusts the constant air pressure of the exhaust fan 16 according to the exhaust air pressure collected by the exhaust valve 15.
Specifically, in steps S4 and S5, the openings of the first constant air volume valve 6 and the first variable air volume valve 9 in the first room 8 and the second constant air volume valve 10 and the second variable air volume valve 11 in the second room 12 corresponding to the stable pressure difference recorded by the controller 18 under the last operating condition are 80% and 68%, respectively, and after the unit is started again, the openings of the first constant air volume valve 6 and the first variable air volume valve 9 in the first room 8 and the second constant air volume valve 10 and the second variable air volume valve 11 in the second room 12 are directly opened to 80% and 68%, and then the adjustment is performed, so that the adjustment time of the pressure difference process is reduced, and the pressure is rapidly stabilized.
The working principle and the using process of the invention are as follows: when the unit is started, the fresh air valve 1, the return air valve 2 and the exhaust air valve 15 are opened according to working conditions, the blower 4 and the exhaust fan 16 are started according to the working conditions, the controller 18 performs constant air pressure regulation on the blower 4 according to the air supply pressure collected by the air supply pressure difference sensor 5 and stabilizes the air supply pressure, the controller 18 performs constant air pressure regulation on the exhaust fan 16 according to the exhaust air pressure collected by the exhaust air pressure difference sensor 14 and stabilizes the exhaust air pressure, the controller 18 monitors the first constant air valve 6 and the first variable air valve 9 of the first room 8 and the second constant air valve 10 and the second variable air valve 11 of the second room 12 through the communication module 17, the controller 18 performs constant pressure regulation on the first variable air valve 9 of the first room 8 according to the pressure of the first room 8 collected by the first pressure difference sensor 7 and records the optimal opening of the first constant air valve 6 and the first variable air valve 9 when being stable, the controller 18 performs constant pressure adjustment on the second variable air volume valve 11 of the second room 12 according to the pressure of the second room 12 acquired by the second differential pressure sensor 13, and simultaneously records the optimal opening of the second constant air volume valve 10 and the second variable air volume valve 11 when the second constant air volume valve and the second variable air volume valve are stable, and the controller 18 adjusts the fresh air valve 1, the return air valve 2 and the exhaust air valve 15 according to the working condition requirements;
under the working condition, after the unit is started, if the openings of the indoor constant air volume valve and the indoor variable air volume valve corresponding to the stable pressure difference under the last working condition are respectively 80% and 68%, the openings of the indoor constant air volume valve and the indoor variable air volume valve are directly opened to 80% and 68% after the unit is started, and then the indoor constant air volume valve and the indoor variable air volume valve are adjusted, so that the adjustment time of the pressure difference process is shortened, and the pressure is quickly and stably.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. A clean room pressure differential gradient control system comprising a central air conditioning unit (3), a first room (8), a second room (12) and a controller (18), characterized in that: one side in first room (8) is provided with second room (12), central air conditioning unit (3) are including forced draught blower (4) and exhaust fan (16), the air inlet end in first room (8) and second room (12) is provided with forced draught blower (4), the air-out end in first room (8) and second room (12) is provided with exhaust fan (16), the air inlet end in first room (8) and the air supply end of forced draught blower (4), the air inlet end in second room (12) and the air supply end of forced draught blower (4), the air-out end in first room (8) and the new trend end of forced draught blower (4), the air-out end in first room (8) and the return air end of forced draught blower (4), the air-out end in second room (12) and the new trend end of forced draught blower (4), the air-out end in second room (12) and the return air end of forced draught blower (4), the air-out end in first room (8) and the air-out end of forced draught blower (16) and the air-out end in second room (12) and the air-out end and exhaust air end of air-out end and air-out end of forced draught blower (4), air-out end and air-out end of first room (8) and exhaust fan (16) The air inlet ends of the fans (16) are connected through pipelines, the air inlet ends of the first room (8) and the second room (12) are connected with the air supply end of the air supply blower (4), an air supply pressure difference sensor (5) is arranged at one side, close to the air supply end of the air supply blower (4), of the pipeline, the air inlet ends of the first room (8) and the second room (12) are connected with the air supply end of the air supply blower (4), a first constant air volume valve (6) is arranged at one side, close to the air inlet end of the first room (8), of the pipeline, the air inlet ends of the first room (8) and the second room (12) are connected with the air supply end of the air supply blower (4), a second constant air volume valve (10) is arranged at one side, close to the air inlet end of the second room (12), of the pipeline, a first pressure difference sensor (7) is arranged in the first room (8), and a second pressure difference sensor (13) is arranged in the second room (12), between the air-out end in first room (8) and second room (12) and the new trend end of forced draught blower (4) be close to one side in first room (8) on the pipeline and be provided with first variable air volume valve (9), between the air-out end in first room (8) and second room (12) and the new trend end of forced draught blower (4) on the pipeline one side that is close to second room (12) is provided with second variable air volume valve (11), between the air-out end in first room (8) and second room (12) and the new trend end of forced draught blower (4) on the pipeline one side that is close to forced draught blower (4) new trend end is provided with new air valve (1), between the air-out end in first room (8) and second room (12) and the return air end of forced draught blower (4) on the pipeline one side that is close to forced draught blower (4) return air end is provided with return air valve (2), between the air-out end in first room (8) and second room (12) and the air-out end of forced draught blower (16) on the exhaust pipe be close to air-in air-out end (16) exhaust fan (16) on the exhaust pipeline The air exhaust device is characterized in that an air exhaust differential pressure sensor (14) and an air exhaust valve (15) are respectively arranged on one side of the air exhaust device, and the controller (18) is connected with the fresh air valve (1), the air return valve (2), the first constant air volume valve (6), the first variable air volume valve (9), the second constant air volume valve (10), the second variable air volume valve (11) and the air exhaust valve (15) through a communication module (17).
2. The clean room differential pressure gradient control system of claim 1, wherein: the controller (18) is a local control screen or a remote control computer.
3. A control method of a clean room pressure difference gradient control system is characterized by comprising the following steps:
s1: when the unit is started, the fresh air valve (1), the return air valve (2) and the exhaust valve (15) are opened according to working conditions, and then the air feeder (4) and the exhaust fan (16) are started according to the working conditions;
s2: the controller (18) performs constant air pressure regulation on the air feeder (4) to stabilize air feeding pressure;
s3: the controller (18) adjusts the constant air pressure of the exhaust fan (16) to stabilize the exhaust air pressure;
s4: the controller (18) monitors a first constant air volume valve (6) and a first variable air volume valve (9) of the first room (8) through the communication module (17), the controller (18) performs constant pressure adjustment on the first variable air volume valve (9) of the first room (8) according to the pressure of the first room (8) acquired by the first pressure difference sensor (7), and simultaneously records the optimal opening degree of the first constant air volume valve (6) and the first variable air volume valve (9) when the first constant air volume valve and the first variable air volume valve (9) are stable;
s5: the controller (18) monitors a second constant air volume valve (10) and a second variable air volume valve (11) of the second room (12) through the communication module (17), the controller (18) performs constant pressure adjustment on the second variable air volume valve (11) of the second room (12) according to the pressure of the second room (12) acquired by the second pressure difference sensor (13), and simultaneously records the optimal opening degree of the second constant air volume valve (10) and the second variable air volume valve (11) when the second constant air volume valve and the second variable air volume valve are stable;
s6: the controller (18) adjusts the fresh air valve (1), the return air valve (2) and the exhaust valve (15) according to the working condition requirement.
4. The method of claim 3, wherein the method comprises the steps of: in step S2, the controller (18) performs a specific step of constant air pressure adjustment of the blower (4): the controller (18) performs constant air pressure adjustment on the air blower (4) according to the air supply pressure collected by the air supply pressure difference sensor (5).
5. The method of claim 3, wherein the method comprises the steps of: in the step S3, the controller (18) specifically adjusts the constant air pressure of the exhaust fan (16): the controller (18) adjusts the constant air pressure of the exhaust fan (16) according to the exhaust air pressure collected by the exhaust valve (15).
6. The method of claim 3, wherein the method comprises the steps of: in the steps S4 and S5, the opening degrees of the first constant air volume valve (6) and the first variable air volume valve (9) of the first room (8) and the second constant air volume valve (10) and the second variable air volume valve (11) of the second room (12) corresponding to the stable pressure difference recorded by the controller (18) under the last working condition are 80% and 68%, respectively, and after the unit is turned on again, the opening degrees of the first constant air volume valve (6) and the first variable air volume valve (9) of the first room (8) and the second constant air volume valve (10) and the second variable air volume valve (11) of the second room (12) are directly opened to 80% and 68%, and then adjustment is performed, so that the adjustment time of the pressure difference process is reduced, and the pressure is rapidly stabilized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111000309.7A CN113847659B (en) | 2021-08-30 | 2021-08-30 | Clean room pressure difference gradient control system and control method |
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| CN114777311A (en) * | 2022-04-11 | 2022-07-22 | 南京福加自动化科技有限公司 | Clean room pressure difference variable working condition rapid balance control system and control method |
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