CN113839583B - Ultrasonic piezoelectric push rod motor and dead zone compensation method thereof - Google Patents
Ultrasonic piezoelectric push rod motor and dead zone compensation method thereof Download PDFInfo
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- CN113839583B CN113839583B CN202111011393.2A CN202111011393A CN113839583B CN 113839583 B CN113839583 B CN 113839583B CN 202111011393 A CN202111011393 A CN 202111011393A CN 113839583 B CN113839583 B CN 113839583B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
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Abstract
The invention provides an ultrasonic piezoelectric push rod motor and a dead zone compensation method thereof. The tail end of the shell is fixedly provided with a driving unit, the linear bearing is installed in the shell, the moving push rod is fixedly connected with the shell through a threaded lead screw, the moving push rod penetrates through a center hole of the linear bearing and a center hole of a shell end cover, a groove is formed in the surface of one side of the moving push rod, a magnetic coding piece is installed in the groove, the magnetic coding piece is over against the PCB Hall sensor and installed on the inner side of the shell, one end of a rotor of the driving unit is connected with the magnetic resistance type encoder, the magnetic resistance type encoder is arranged outside the tail end of the shell and corresponds to the driving unit, and the other end of the PCB Hall sensor is connected with the driving controller. The invention is used for solving the problem that the centering guide structure can not enable the moving shaft to always keep linear motion; the motor body is not provided with a stroke detection device, so that the closed-loop control is inconvenient; the characteristic of the speed regulation dead zone restricts the improvement of the performance of the ultrasonic motor control system.
Description
Technical Field
The invention belongs to the field of ultrasonic motors; in particular to an ultrasonic piezoelectric push rod motor and a dead zone compensation method thereof.
Background
In recent years, with the rapid development of ultra-precision machining, photolithography, precision measurement, and nanotechnology, the requirements for precision, speed, and stroke of precision positioning systems have become higher and higher. Wherein the drive means directly determines the speed, accuracy, stroke of the platform and the efficiency of the overall system.
The ultrasonic motor is a novel micromotor utilizing the inverse piezoelectric effect and the ultrasonic vibration of piezoelectric ceramics, has the advantages of fast response, small volume, light weight, large low-speed torque, easy control and the like, and has wide application prospect in the fields of precise instruments and meters, aerospace, intelligent robots, medical instruments and the like. The ultrasonic piezoelectric push rod motor adopts thread transmission, can directly output linear motion, has higher linear positioning precision, and has the advantages of simple structure and the like compared with other ultrasonic motors. However, the inchworm type piezoelectric push rod motor has the following defects: firstly, the centering guide structure can not enable the motion shaft to always keep linear motion; secondly, the motor body is not provided with a stroke detection device, so that closed-loop control is inconvenient; thirdly, the performance of the ultrasonic motor control system is limited by the characteristic of a speed regulation dead zone.
Disclosure of Invention
The invention provides an ultrasonic piezoelectric push rod motor and a dead zone compensation method thereof, which are used for solving the problems in the prior art.
The invention is realized by the following technical scheme:
an ultrasonic piezoelectric push rod motor comprises a shell 1-1, a shell end cover 1-2, a moving push rod 2, a threaded lead screw 3, a driving unit 4, a PCB Hall sensor 5, a magnetic coding patch 6, a linear bearing 7, a reluctance type encoder 8 and a driving controller;
the tail end of the shell 1-1 is fixedly provided with a driving unit 4, the linear bearing 7 is installed in the shell 1-1, the moving push rod 2 is fixedly connected with the shell 1-1 through a threaded lead screw 3, the moving push rod 2 penetrates through a center hole of the linear bearing 7 and a center hole of a shell end cover 1-2, a groove 2-1 is formed in the surface of one side of the moving push rod 2, a magnetic coding patch 6 is installed in the groove 2-1, the magnetic coding patch 6 is right opposite to the PCB Hall sensor 5, the PCB Hall sensor 5 is installed on the inner side of the shell 1-1, one end of a rotor of the driving unit 4 is connected with a reluctance type encoder 8, the reluctance type encoder 8 is arranged outside the tail end of the shell 1-1 and corresponds to the driving unit 4, and the other end of the PCB Hall sensor 5 is connected with a driving controller, the output signal of the magneto resistive encoder 8 is connected to a drive controller.
Further, an output signal of the PCB hall sensor 5 is connected with a driving controller of the driving unit 4, and an output signal of the magneto-resistive encoder 8 is connected with the driving controller of the driving unit 4, so as to form a double closed-loop negative feedback system; the travel of the ultrasonic piezoelectric push rod motor is detected through the PCB Hall sensor 5, compared with a given travel and an adjusting signal is output; the rotating speed of the ultrasonic piezoelectric push rod motor is detected through the magnetic resistance type encoder 8, and then the rotating speed is changed.
A dead-zone compensation method of an ultrasonic piezoelectric push rod motor comprises the following steps:
step 1: obtaining an expression of the amplitude of a traveling wave in the stator under the modulation of the positive amplitude and the negative amplitude of the voltage;
step 2: by varying the voltage conduction angle alphaA∈[0,2π]The rotating speed of the motor is adjusted, and the input voltage frequency of the fixed motor and the transformation ratio of the self-coupling voltage regulator are changed;
and step 3: step 2 based transformation ratio measurement alphaAThe relationship with the rotation speed;
and 4, step 4: measuring the amplitude modulation speed regulation characteristic of the ultrasonic motor when the input voltage amplitude is equal to be used as the step 3 alphaAComparing the relation with the rotating speed;
and 5: based on the same experiment platform, the MOSFET switching logics of the two driving circuits in the step 3 and the step 4 are changed, so that the conduction angles of two phases of voltages are equal, namely alpha is keptA＝αB∈[0,π/2]And two phases of voltages are in phase
Respectively equal to 90 degrees and minus 90 degrees, and measuring the relation between the amplitude of the input voltage and the rotating speed at the moment;
step 6: and (5) verifying the relation between the input voltage amplitude and the rotating speed obtained in the step (5) and confirming that the dead zone compensation method is effective.
Further, the expression of step 1 is specifically,
Wtα＝WαsinαA
wherein, WtαBeing travelling waves in the stator of the machine, WαTo adjust alphaAMaximum value of travelling wave amplitude in process, alphaAIs the voltage conduction angle.
Further, the two-phase voltage conduction angles in the step 2 are respectively
And
the beneficial effects of the invention are:
the invention relates to a novel ultrasonic type piezoelectric push rod motor utilizing the inverse piezoelectric effect and ultrasonic vibration of piezoelectric ceramics, which has the advantages of quick response, small volume, light weight, large low-speed torque, easy control and the like.
The motor adopts the screw transmission and can directly output linear motion.
The invention adopts the linear bearing and the shell end cover to be provided with the central round hole, has centering guide and can ensure that the moving push rod always keeps linear motion.
The invention adopts the PCB Hall sensor as the ultrasonic piezoelectric push rod motor stroke detection and adopts the reluctance type encoder as the ultrasonic piezoelectric push rod motor rotating speed detection, thereby forming double closed loop control, having high positioning precision, easy control and high anti-interference performance.
A limit protection device is arranged in the motor, and when the stroke of the push rod reaches the limit position, the motor stops running and limits the stroke.
The invention adopts a voltage amplitude modulation driving method based on the self-adjusting standing wave, can improve the friction characteristic of the motor, and further compensates the speed regulation dead zone of the ultrasonic motor driving system.
Drawings
Fig. 1 is a schematic structural diagram of the motor of the present invention.
Fig. 2 is a schematic view of the internal structure of the present invention.
Fig. 3 is a control block diagram of the present invention.
Fig. 4 is a schematic diagram of input voltage when the voltage quadrature amplitude modulation method is applied in the present invention.
FIG. 5 is a schematic diagram of the static regulation characteristic of the ultrasonic motor under the voltage quadrature amplitude modulation of the present invention, wherein (a) αASchematic diagram of static regulation characteristic of ultrasonic motor when changing from small to big, (b) alphaAWhen the voltage amplitude is taken as an independent variable, the static regulation characteristic diagram of the ultrasonic motor is changed from small to big, (c) alphaASchematic diagram of static regulation characteristic of ultrasonic motor when changing from big to small, (d) alphaAWhen the voltage amplitude is taken as an independent variable, the static regulation characteristic diagram of the ultrasonic motor is shown.
Fig. 6 is a schematic diagram of the static regulation characteristic of the ultrasonic motor when the voltage amplitudes are equal according to the invention.
FIG. 7 is a schematic diagram of the mechanical properties of an ultrasonic motor under voltage amplitude modulation in accordance with the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
An ultrasonic piezoelectric push rod motor comprises a shell 1-1, a shell end cover 1-2, a moving push rod 2, a threaded lead screw 3, a driving unit 4, a PCB Hall sensor 5, a magnetic coding patch 6, a linear bearing 7, a reluctance type encoder 8 and a driving controller;
the tail end of the shell 1-1 is fixedly provided with a driving unit 4, the linear bearing 7 is installed in the shell 1-1, the moving push rod 2 is fixedly connected with the shell 1-1 through a threaded lead screw 3, the moving push rod 2 penetrates through a center hole of the linear bearing 7 and a center hole of a shell end cover 1-2, a groove 2-1 is formed in the surface of one side of the moving push rod 2, a magnetic coding patch 6 is installed in the groove 2-1, the magnetic coding patch 6 is right opposite to the PCB Hall sensor 5, the PCB Hall sensor 5 is installed on the inner side of the shell 1-1, one end of a rotor of the driving unit 4 is connected with a reluctance type encoder 8, the reluctance type encoder 8 is arranged outside the tail end of the shell 1-1 and corresponds to the driving unit 4, and the other end of the PCB Hall sensor 5 is connected with a driving controller, the output signal of the magnetoresistive encoder 8 is connected to a drive controller.
Further, the output signal of the PCB hall sensor 5 is connected with the driving controller of the driving unit 4, and the output signal of the magneto-resistive encoder 8 is connected with the driving controller of the driving unit 4, so as to form a double closed-loop negative feedback system as shown in fig. 3; the travel of the ultrasonic piezoelectric push rod motor is detected through the PCB Hall sensor 5, compared with a given travel and an adjusting signal is output; the rotating speed of the ultrasonic piezoelectric push rod motor is detected through the magnetic resistance type encoder 8, and then the rotating speed is changed.
A dead zone compensation method of an ultrasonic piezoelectric push rod motor comprises the following steps:
step 1: obtaining an expression of the amplitude of a traveling wave in the stator under the modulation of the positive amplitude and the negative amplitude of the voltage;
step 2: by varying the voltage conduction angle alphaA∈[0,2π]The rotating speed of the motor is adjusted, and the input voltage frequency of the fixed motor and the transformation ratio of the self-coupling voltage regulator are changed;
and step 3: step 2 based transformation ratio measurement alphaAThe relationship between the rotational speed and the rotational speed; the results are shown in FIG. 5;
and 4, step 4: measuring the amplitude modulation speed regulation characteristic of the ultrasonic motor when the input voltage amplitudes are equal to obtain the step 3 alphaAComparing the relation with the rotating speed;
and 5: based on the same experiment platform, the MOSFET switching logics of the two driving circuits in the step 3 and the step 4 are changed, so that the conduction angles of two phases of voltages are equal, namely alpha is keptA＝αB∈[0,π/2]And two phases of voltage phase
The input voltage amplitude and the rotation speed are respectively equal to 90 degrees and minus 90 degrees, the relation between the input voltage amplitude and the rotation speed at the moment is measured, the experimental result is shown as figure 6, wherein curves shown as figures 5(b) and (d) are respectively obtained by coordinate transformation of (a) and (c); the transformed abscissa is no longer alphaABut rather that
Step 6: and (5) verifying the relation between the amplitude of the input voltage obtained in the step (5) and the rotating speed, and confirming that the dead zone compensation method is effective.
Further, the expression of step 1 is specifically,
Wtα＝Wα sinαA
wherein, WtαFor travelling waves in the stator of an electric machine，WαTo adjust alphaAMaximum value of travelling wave amplitude in process, alphaAIs the voltage conduction angle.
Further, the two-phase voltage conduction angles in the step 2 are respectively
And
as can be seen from comparing fig. 5 and fig. 6, after the voltage quadrature amplitude modulation method is applied, the speed regulation dead zone of the ultrasonic motor is significantly reduced.
The input current of the hysteresis dynamometer is changed, the load moment of the ultrasonic motor is controlled, the transformation ratio of the self-coupling voltage regulator is fixed, the mechanical characteristics of the ultrasonic motor under the condition of voltage quadrature amplitude modulation are measured, and the measurement result is shown in fig. 7.
FIG. 7 shows that under load conditions, by adjusting αAThe minimum rotating speed of the ultrasonic motor is still obviously lower than the minimum rotating speed with equal voltage amplitude in the figure 6 even if the load moment exists, so that the voltage quadrature amplitude modulation method can still effectively reduce the minimum rotating speed of the ultrasonic motor and expand the speed regulation range of the ultrasonic motor.
No matter whether a load moment exists or not, the voltage quadrature amplitude modulation method can effectively compensate the speed regulation dead zone of the ultrasonic motor and expand the speed regulation range of the ultrasonic motor. In addition, the voltage quadrature amplitude modulation method does not influence the basic mechanical characteristics of the ultrasonic motor, so that the method can be directly applied to the existing ultrasonic motor driving system.
As shown in fig. 2, a driving unit (including a stator and a rotor) composed of piezoelectric ceramics or the like is fixed inside the housing; the threaded lead screw is coaxially connected with the rotor; the moving push rod is then mounted in the central bores of the housing, threaded lead screw, linear bearing and housing end cap. Install linear bearing (linear guide) between shell and motion push rod, it has the circular port to open at the shell end cover corresponding position simultaneously for the push rod motor can remain linear motion throughout. The magnetic coding piece is arranged in a groove formed in the surface of the moving push rod, and the PCB Hall sensor is arranged at the position, right opposite to the shell, of the magnetic coding piece, so that the stroke of the push rod can be detected. A reluctance type encoder is arranged at the other end of the rotor of the driving unit, namely at the side of the shell, and can detect and feed back the rotating speed of the motor.
The voltage amplitude modulation driving method based on the self-adjusting standing wave is adopted in the controller C2, so that the friction characteristic of the motor can be improved, and the speed adjusting dead zone of the ultrasonic motor driving system is compensated.
Claims (5)
1. The ultrasonic piezoelectric push rod motor is characterized by comprising a shell (1-1), a shell end cover (1-2), a moving push rod (2), a threaded lead screw (3), a driving unit (4), a PCB Hall sensor (5), a magnetic coding patch (6), a linear bearing (7), a reluctance type encoder (8) and a driving controller;
the tail end of the shell (1-1) is fixedly provided with a driving unit (4), the linear bearing (7) is installed in the shell (1-1), the moving push rod (2) is fixedly connected with the shell (1-1) through a threaded lead screw (3), the moving push rod (2) penetrates through a center hole of the linear bearing (7) and a center hole of a shell end cover (1-2), one side surface of the moving push rod (2) is provided with a groove (2-1), a magnetic coding patch (6) is installed in the groove (2-1), the magnetic coding patch (6) is right opposite to a PCB Hall sensor (5), the PCB Hall sensor (5) is installed on the inner side of the shell (1-1), one end of a rotor of the driving unit (4) is connected with a reluctance type encoder (8), the reluctance type encoder (8) is arranged outside the shell (1-1) and corresponds to the driving unit (4), the other end of the PCB Hall sensor (5) is connected with a driving controller of the driving unit (4), and an output signal of the reluctance type encoder (8) is connected with the driving controller of the driving unit (4).
2. The ultrasonic piezoelectric push rod motor according to claim 1, wherein the output signal of the PCB Hall sensor (5) is connected with the drive controller of the drive unit (4), and the output signal of the reluctance type encoder (8) is connected with the drive controller of the drive unit (4) to form a double closed loop negative feedback system; the travel of the ultrasonic piezoelectric push rod motor is detected through a PCB Hall sensor (5), and is compared with a given travel to output an adjusting signal; the rotating speed of the ultrasonic piezoelectric push rod motor is detected through the magnetic resistance type encoder (8), and then the rotating speed is changed.
3. The dead zone compensation method of the ultrasonic type piezoelectric push rod motor according to any one of claims 1 to 2, wherein the dead zone compensation method comprises the steps of:
step 1: obtaining an expression of the amplitude of a traveling wave in the stator under the modulation of the positive amplitude and the negative amplitude of the voltage;
step 2: by varying the voltage conduction angle alphaA∈[0,2π]The rotating speed of the motor is adjusted, and the input voltage frequency of the fixed motor and the transformation ratio of the self-coupling voltage regulator are changed;
and step 3: alpha is measured based on the transformation ratio of step 2AThe relationship between the rotational speed and the rotational speed;
and 4, step 4: measuring the amplitude modulation speed regulation characteristic of the ultrasonic motor when the input voltage amplitude is equal to be used as the step 3 alphaAComparing the relation with the rotating speed;
and 5: based on the same experiment platform, the MOSFET switching logics of the two driving circuits in the step 3 and the step 4 are changed, so that the conduction angles of two phases of voltages are equal, namely alpha is keptA＝αB∈[0,π/2]And two phases of voltages are in phase
Respectively equal to 90 degrees and minus 90 degrees, and measuring the relation between the amplitude of the input voltage and the rotating speed at the moment;
step 6: and (5) verifying the relation between the amplitude of the input voltage obtained in the step (5) and the rotating speed, and confirming that the dead zone compensation method is effective.
4. The dead zone compensation method of the ultrasonic piezoelectric push rod motor according to claim 3, wherein the expression of step 1 is specifically,
Wtα＝WαsinαA
wherein, WtαBeing travelling waves in the stator of the machine, WαTo adjust alphaAMaximum value of travelling wave amplitude in process, alphaAIs the voltage conduction angle.
5. The dead zone compensation method of ultrasonic type piezoelectric push rod motor according to claim 3, wherein the two-phase voltage conduction angles of step 2 are respectively
And
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101283460A (en) * | 2005-06-14 | 2008-10-08 | 新阶科技股份有限公司 | Mechanism comprised of ultrasonic lead screw motor |
| EP2562521A2 (en) * | 2011-07-06 | 2013-02-27 | Robert Bosch Gmbh | Linear movement device with surface wave sensor and wireless sensor signal transfer |
| CN106341065A (en) * | 2016-10-12 | 2017-01-18 | 闽江学院 | Ultrasonic motor servo control system speed dead zone compensation control apparatus and method |
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| DE102008016684B4 (en) * | 2008-04-01 | 2015-10-08 | Minebea Co., Ltd. | Electromechanical motor |
| CN108512457B (en) * | 2018-04-19 | 2019-10-18 | 西安交通大学 | Linear inertial piezoelectric actuator and actuation method with displacement perceptional function |
| KR102506824B1 (en) * | 2018-08-13 | 2023-03-06 | 미니스뷔스 에스에이 | Lens driving device, camera module, and camera mounting device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101283460A (en) * | 2005-06-14 | 2008-10-08 | 新阶科技股份有限公司 | Mechanism comprised of ultrasonic lead screw motor |
| EP2562521A2 (en) * | 2011-07-06 | 2013-02-27 | Robert Bosch Gmbh | Linear movement device with surface wave sensor and wireless sensor signal transfer |
| CN106341065A (en) * | 2016-10-12 | 2017-01-18 | 闽江学院 | Ultrasonic motor servo control system speed dead zone compensation control apparatus and method |
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