CN113834901A - Gas mixing effect detection device and detection method - Google Patents
Gas mixing effect detection device and detection method Download PDFInfo
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- CN113834901A CN113834901A CN202010579429.6A CN202010579429A CN113834901A CN 113834901 A CN113834901 A CN 113834901A CN 202010579429 A CN202010579429 A CN 202010579429A CN 113834901 A CN113834901 A CN 113834901A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0021—Sample conditioning involving the use of a carrier gas for transport to the sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0022—General constructional details of gas analysers, e.g. portable test equipment using a number of analysing channels
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Abstract
The invention discloses a gas mixing effect detection device and a detection method, wherein the device comprises: gaseous reposition of redundant personnel unit, concentration detection pipeline, gaseous confluence unit and gas concentration detector, wherein, gaseous reposition of redundant personnel unit includes a plurality of gaseous reposition of redundant personnel exhauxes for treating and detect the mist reposition of redundant personnel, gaseous confluence unit includes a plurality of gaseous confluence entrances for to the gaseous confluence that accomplishes the detection, gaseous confluence entrance just passes through with gaseous reposition of redundant personnel exhauxes one-to-one concentration detection tube coupling, gas concentration detector sets up on the concentration detection pipeline for detect the concentration of the corresponding gas in its place concentration detection pipeline. The gas mixing effect detection device and the detection method convert the detection of the gas mixing effect into the detection of the uniformity of the concentration of one or more gases after the gases are mixed, and can effectively judge the gas mixing effect.
Description
Technical Field
The invention relates to the technical field of semiconductor coating, and particularly provides a gas mixing effect detection device and a detection method.
Background
In the process of coating the wafer, mixed gas is introduced into the reaction chamber, but if the gas is not uniformly mixed, the uniformity difference of the polymer on the surface of the wafer and the thickness difference of the polymer on the surface of the wafer between the chambers are caused, so that in order to improve the uniformity of the polymer on the surface of the wafer and reduce the thickness difference of the polymer on the surface of the wafer between the chambers, the mixed gas introduced into the reaction chamber needs to be ensured to be uniformly mixed.
Therefore, it is an urgent need to provide a device and a method for detecting the gas mixing effect to determine whether the gas in the mixed gas is sufficiently mixed.
Disclosure of Invention
In view of the above, an object of the present invention is to provide a device and a method for detecting a gas mixing effect, so as to solve the problems that the uniformity of the mixed gas is not detected and cannot be effectively detected in the prior art.
The invention provides a gas mixing effect detection device, which reflects the gas mixing effect by detecting the concentration uniformity of one or more gases in the mixed gas to be detected, and comprises the following steps: gaseous reposition of redundant personnel unit, concentration detection pipeline, gaseous confluence unit and gas concentration detector, wherein, gaseous reposition of redundant personnel unit includes a plurality of gaseous reposition of redundant personnel exhauxes for treating and detect the mist reposition of redundant personnel, gaseous confluence unit includes a plurality of gaseous confluence entrances for to the gaseous confluence that accomplishes the detection, gaseous confluence entrance just passes through with gaseous reposition of redundant personnel exhauxes one-to-one concentration detection tube coupling, gas concentration detector sets up on the concentration detection pipeline for detect the concentration of the corresponding gas in its place concentration detection pipeline.
Preferably, the gas flow dividing unit and the gas flow converging unit are arranged oppositely, and the concentration detection pipelines are arranged in parallel.
Preferably, the gas concentration detectors for detecting the concentration of each gas are multiple and are correspondingly arranged on the multiple concentration detection pipelines.
Preferably, the gas diversion unit comprises a diversion column and a diversion chamber, a plurality of gas inlet runners are arranged in the middle of the diversion column along the axial direction of the diversion column, the middle of the diversion chamber is connected with the diversion column, and gas diversion runners which are in one-to-one correspondence with the gas inlet runners in the diversion column are correspondingly arranged in the diversion chamber and are used for guiding gas to correspondingly flow into corresponding concentration detection pipelines.
Further preferably, the gas inlet flow channels are uniformly distributed in the middle of the flow guide column.
The invention also provides a gas mixing effect detection method, which comprises the following steps:
a gas shunting unit is used for shunting the mixed gas to be detected;
converging the detected gas by using a gas converging unit;
the gas confluence inlets and the gas shunt outlets are correspondingly connected one by one through concentration detection pipelines, and a gas concentration detector is utilized to detect the gas concentration of corresponding gas in the mixed gas in the concentration detection pipeline to obtain corresponding gas concentration detection results;
and comparing the obtained gas concentration detection result with the pre-calculated target concentration of the corresponding gas in the mixed gas to be detected, and reflecting the gas mixing effect through the concentration uniformity of one or more gases in the mixed gas to be detected.
Preferably, the gas flow dividing unit and the gas flow converging unit are arranged oppositely, and the concentration detection pipelines are arranged in parallel.
Preferably, the gas concentration detectors for detecting the concentration of each gas are multiple and are correspondingly arranged on the multiple concentration detection pipelines.
Preferably, the gas diversion unit comprises a diversion column and a diversion chamber, a plurality of gas inlet runners are arranged in the middle of the diversion column along the axial direction of the diversion column, the middle of the diversion chamber is connected with the diversion column, and gas diversion runners which are in one-to-one correspondence with the gas inlet runners in the diversion column are correspondingly arranged in the diversion chamber and are used for guiding gas to correspondingly flow into corresponding concentration detection pipelines.
Further preferably, the gas inlet flow channels are uniformly distributed in the middle of the flow guide column.
The invention provides a gas mixing effect detection device and a detection method, which convert the detection of gas mixing effect into the detection of gas mixing.
The invention provides a gas mixing effect detection device and a detection method, which convert the detection of gas mixing effect into the detection of the uniformity of the concentration of one or more gases after gas mixing, and represent the mixing effect of the gases by utilizing the uniformity of the gas concentration, wherein the detection process of the uniformity of the gas concentration is as follows: firstly, distributing mixed gas to be detected to a concentration detection pipeline through a gas distribution unit, then detecting the concentration of corresponding gas through a gas concentration detector on the concentration detection pipeline, then comparing the detected concentration data of a certain gas with the pre-calculated target concentration of the gas, if the detected concentration data of the certain gas is equal to the pre-calculated target concentration of the certain gas, indicating that the gas is uniformly mixed, otherwise, indicating that the gas is not uniformly mixed, and in the same way, the uniformity of the concentration and the uniformity of the mixing of each gas can be obtained through the method.
Drawings
The invention is described in further detail below with reference to the following figures and embodiments:
FIG. 1 is a schematic structural diagram of a gas mixing effect detection apparatus according to the present invention;
FIG. 2 is a front view of the gas mixing effect detecting apparatus provided in the present invention;
fig. 3 is a front view of the guide column.
Detailed Description
The invention will be further explained with reference to specific embodiments, without limiting the invention.
As shown in fig. 1, the present invention provides a gas mixing effect detection apparatus, which reflects a gas mixing effect by detecting a concentration uniformity of one or more gases in a mixed gas to be detected, and includes: gas reposition of redundant personnel unit 1, concentration detection pipeline 2, gaseous confluence unit 3 and gas concentration detector 4, wherein, gas reposition of redundant personnel unit 1 includes a plurality of gas reposition of redundant personnel exhauxes for treating and detect the mixed gas reposition of redundant personnel, gaseous confluence unit 3 includes a plurality of gas confluence entries for the gaseous confluence to accomplishing the detection, gaseous confluence entry just passes through with gas reposition of redundant personnel exhauxes one-to-one concentration detection pipeline 2 connects, gas concentration detector 4 sets up on concentration detection pipeline 2 for detect the concentration of the corresponding gas in its place concentration detection pipeline 2.
Whether the judgment of whether the multiple gases are fully mixed can be converted into the judgment of whether the concentrations of the gases in the cross section of the pipeline perpendicular to the gas flowing direction are uniformly distributed, theoretically, according to a finite element principle, the concentrations of one or more gases in the mixed gases are detected in the pipelines as much as possible, and compared with the pre-calculated target concentrations, whether the corresponding gases are fully mixed can be judged close to reality, specifically: if the pre-calculated target concentration is equal to the detected concentration, it can be said that the mixing effect of the gas is better, otherwise, it can be said that the gas is not fully mixed.
Based on the above principle, this gas mixture effect detection device converts the detection of gas mixture effect into the detection of the homogeneity of the concentration of the gas mixture back one or more gas, utilizes the homogeneity of gas concentration, and the gaseous mixed effect of sign, the testing process of the homogeneity of the concentration of gas is as follows: firstly, distributing mixed gas to be detected to a concentration detection pipeline through a gas distribution unit, then detecting the concentration of corresponding gas through a gas concentration detector on the concentration detection pipeline, then comparing the detected concentration data of a certain gas with the pre-calculated target concentration of the gas, if the detected concentration data of the certain gas is equal to the pre-calculated target concentration of the certain gas, indicating that the gas is uniformly mixed, otherwise, indicating that the gas is not uniformly mixed, and in the same way, the uniformity of the concentration and the uniformity of the mixing of each gas can be obtained through the method.
As a technical improvement, the gas flow dividing unit 1 and the gas flow merging unit 3 are arranged oppositely, and the concentration detection pipelines 2 are arranged in parallel.
As the improvement of the technical scheme, the gas concentration detectors 4 for detecting the concentration of each gas are multiple and are correspondingly arranged on the multiple concentration detection pipelines 2, and the judgment result can be closer to the reality by arranging multiple detection points.
As an improvement of the technical solution, the gas diversion unit 1 includes a flow guiding column 11 and a diversion chamber 12, the middle part of the flow guiding column 11 is provided with a plurality of gas inlet runners 111 along the axial direction thereof, the middle part of the diversion chamber 12 is connected with the flow guiding column 11, and gas diversion runners corresponding to the gas inlet runners 111 in the flow guiding column 11 one by one are correspondingly arranged in the diversion chamber for guiding the gas to correspondingly flow into the corresponding concentration detection pipelines 2.
As an improvement of the technical solution, as shown in fig. 2 and 3, the gas inlet channels 111 are uniformly arranged in the middle of the flow guiding column 11, the gas inlet channels are arranged in a plurality of circles with the central axis of the flow guiding column as an axis, the gas inlet channels on each circle are uniformly arranged, the gas inlet channels on adjacent circles are arranged in a staggered manner, and the arrangement can ensure that the mixed gas to be detected equally enters each gas inlet channel.
The invention also provides a gas mixing effect detection method, which comprises the following steps:
the gas shunting unit 1 is used for shunting the mixed gas to be detected;
merging the detected gases by using a gas merging unit 3;
the gas confluence inlets and the gas shunt outlets are correspondingly connected one by one through the concentration detection pipelines 2, and the gas concentration detector 4 is utilized to detect the gas concentration of the corresponding gas in the mixed gas in the concentration detection pipeline 2 to obtain the corresponding gas concentration detection result;
and comparing the obtained gas concentration detection result with the pre-calculated target concentration of the corresponding gas in the mixed gas to be detected, and reflecting the gas mixing effect through the concentration uniformity of one or more gases in the mixed gas to be detected.
The gas mixing effect detection method converts the detection of the gas mixing effect into the detection of the uniformity of the concentration of one or more gases after gas mixing, and represents the gas mixing effect by utilizing the uniformity of the gas concentration, and the detection process of the uniformity of the gas concentration is as follows: firstly, distributing mixed gas to be detected to a concentration detection pipeline through a gas distribution unit, then detecting the concentration of corresponding gas through a gas concentration detector on the concentration detection pipeline, then comparing the detected concentration data of a certain gas with the pre-calculated target concentration of the gas, if the detected concentration data of the certain gas is equal to the pre-calculated target concentration of the certain gas, indicating that the gas is uniformly mixed, otherwise, indicating that the gas is not uniformly mixed, and in the same way, the uniformity of the concentration and the uniformity of the mixing of each gas can be obtained through the method.
As a technical improvement, the gas flow dividing unit 1 and the gas flow merging unit 3 are arranged oppositely, and the concentration detection pipelines 2 are arranged in parallel.
As a technical improvement, the gas flow dividing unit 1 and the gas flow merging unit 3 are arranged oppositely, and the concentration detection pipelines 2 are arranged in parallel.
As the improvement of the technical scheme, the gas concentration detectors 4 for detecting the concentration of each gas are multiple and are correspondingly arranged on the multiple concentration detection pipelines 2, and the judgment result can be closer to the reality by arranging multiple detection points.
As an improvement of the technical solution, the gas diversion unit 1 includes a flow guiding column 11 and a diversion chamber 12, the middle part of the flow guiding column 11 is provided with a plurality of gas inlet runners 111 along the axial direction thereof, the middle part of the diversion chamber 12 is connected with the flow guiding column 11, and gas diversion runners corresponding to the gas inlet runners 111 in the flow guiding column 11 one by one are correspondingly arranged in the diversion chamber for guiding the gas to correspondingly flow into the corresponding concentration detection pipelines 2.
As an improvement of the technical solution, as shown in fig. 2 and 3, the gas inlet channels 111 are uniformly arranged in the middle of the flow guiding column 11, the gas inlet channels are arranged in a plurality of circles with the central axis of the flow guiding column as an axis, the gas inlet channels on each circle are uniformly arranged, the gas inlet channels on adjacent circles are arranged in a staggered manner, and the arrangement can ensure that the mixed gas to be detected equally enters each gas inlet channel.
The embodiments of the present invention have been written in a progressive manner with emphasis placed on the differences between the various embodiments, and similar elements may be found in relation to each other.
The embodiments of the present invention have been described in detail with reference to the drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the gist of the present invention.
Claims (10)
1. Gas mixing effect detection device, its characterized in that: reflecting the gas mixing effect by detecting the concentration uniformity of one or more gases in the mixed gas to be detected, comprising the following steps: gas reposition of redundant personnel unit (1), concentration detection pipeline (2), gaseous confluence unit (3) and gas concentration detector (4), wherein, gas reposition of redundant personnel unit (1) includes a plurality of gas reposition of redundant personnel exhauxes for treating and detect the mixed gas reposition of redundant personnel, gaseous confluence unit (3) includes a plurality of gas confluence entries for to accomplishing the gaseous confluence that detects, gas confluence entry just passes through with gas reposition of redundant personnel exhauxes one-to-one concentration detection pipeline (2) is connected, gas concentration detector (4) set up on concentration detection pipeline (2) for detect the concentration of its place corresponding gas in concentration detection pipeline (2).
2. The gas mixing effect detecting device according to claim 1, wherein: the gas flow dividing unit (1) and the gas flow converging unit (3) are arranged oppositely, and the concentration detection pipelines (2) are arranged in parallel.
3. The gas mixing effect detecting device according to claim 1, wherein: the gas concentration detectors (4) for detecting the concentration of each gas are multiple and are correspondingly arranged on the multiple concentration detection pipelines (2).
4. The gas mixing effect detecting device according to claim 1, wherein: the gas flow distribution unit (1) comprises a flow guide column (11) and a flow distribution chamber (12), wherein the middle of the flow guide column (11) is provided with a plurality of gas inlet flow channels (111) along the axial direction of the flow guide column, the middle of the flow distribution chamber (12) is connected with the flow guide column (11), and gas turning flow channels which are in one-to-one correspondence with the gas inlet flow channels (111) in the flow guide column (11) are correspondingly arranged in the flow distribution chamber and used for guiding gas to correspondingly flow into the corresponding concentration detection pipelines (2).
5. The gas mixing effect detecting device according to claim 4, wherein: the gas inlet flow channels (111) are uniformly distributed in the middle of the flow guide column (11).
6. The gas mixing effect detection method is characterized by comprising the following steps of:
a gas shunting unit (1) is used for shunting the mixed gas to be detected;
converging the detected gas by using a gas converging unit (3);
the gas confluence inlets and the gas shunt outlets are correspondingly connected one by one through the concentration detection pipelines (2), and the gas concentration detector (4) is used for detecting the gas concentration of the corresponding gas in the mixed gas in the concentration detection pipeline (2) to obtain the corresponding gas concentration detection result;
and comparing the obtained gas concentration detection result with the pre-calculated target concentration of the corresponding gas in the mixed gas to be detected, and reflecting the gas mixing effect through the concentration uniformity of one or more gases in the mixed gas to be detected.
7. The method for detecting a gas mixing effect according to claim 6, characterized in that: the gas flow dividing unit (1) and the gas flow converging unit (3) are arranged oppositely, and the concentration detection pipelines (2) are arranged in parallel.
8. The method for detecting a gas mixing effect according to claim 1, characterized in that: the gas concentration detectors (4) for detecting the concentration of each gas are multiple and are correspondingly arranged on the multiple concentration detection pipelines (2).
9. The method for detecting a gas mixing effect according to claim 1, characterized in that: the gas flow distribution unit (1) comprises a flow guide column (11) and a flow distribution chamber (12), wherein the middle of the flow guide column (11) is provided with a plurality of gas inlet flow channels (111) along the axial direction of the flow guide column, the middle of the flow distribution chamber (12) is connected with the flow guide column (11), and gas turning flow channels which are in one-to-one correspondence with the gas inlet flow channels (111) in the flow guide column (11) are correspondingly arranged in the flow distribution chamber and used for guiding gas to correspondingly flow into the corresponding concentration detection pipelines (2).
10. The method for detecting a gas mixing effect according to claim 9, characterized in that: the gas inlet flow channels (111) are uniformly distributed in the middle of the flow guide column (11).
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| CN202010579429.6A CN113834901A (en) | 2020-06-23 | 2020-06-23 | Gas mixing effect detection device and detection method |
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