CN113834418B - Flexible strain sensor with adjustable Poisson ratio - Google Patents
Flexible strain sensor with adjustable Poisson ratio Download PDFInfo
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- CN113834418B CN113834418B CN202111037421.8A CN202111037421A CN113834418B CN 113834418 B CN113834418 B CN 113834418B CN 202111037421 A CN202111037421 A CN 202111037421A CN 113834418 B CN113834418 B CN 113834418B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
Abstract
The invention provides a flexible strain sensor with an adjustable Poisson ratio, and belongs to the technical field of strain sensing electronic devices. According to the strain sensor, the Poisson's ratio of the device is regulated and controlled under different parameter conditions by designing a special mechanical superstructure. The mechanical superstructure is formed by arranging m multiplied by m mechanical superstructure units in an array mode, the mechanical superstructure units are obtained by sequentially rotating 60 degrees and one circle by using a basic unit with an end point as a circle center, the basic unit is in an s shape and is formed by alternately connecting three straight lines and two circular arcs, and the straight lines are tangent to the circular arcs; wherein, the three straight lines have the same size, and the two circular arcs have the same size. The regulation and control of different Poisson ratios can be realized by changing the size parameters of the straight line and the circular arc, so that the requirements of different application scenes are met, and the realization process is simple and easy to operate.
Description
Technical Field
The invention belongs to the technical field of strain sensing electronic devices, and particularly relates to a Poisson ratio adjustable flexible strain sensor.
Background
Flexible strain sensors are essentially a way to convert strain deformations into electronic signals from which the required measurement information is obtained. According to different use environments (such as different fields of medical health monitoring, sports, robots, machining, aerospace and the like), the strain sensor is combined with different flexible substrate materials to manufacture the sensing device.
The positive Poisson ratio of the flexible strain sensor is an inherent property of the flexible strain sensor, which means that when the sensor is stretched in the x direction, the y axis can be simultaneously deformed, and the performance of the sensor is severely limited by the inherent property of the Poisson ratio. The device mainly based on the performance of the positive Poisson ratio reduces the influence of the positive Poisson ratio by changing the substrate material and mixing substances such as curing agent and the like with the substrate material, and the y axis still has a contraction effect in the process of stretching the x axis, so that a conductive channel in the direction of the x axis is extruded, the strain range is small, the sensitivity is low, and the sensing performance and the sensing range of the flexible strain sensor cannot be actually and effectively regulated and improved; at present, devices with zero Poisson ratio performance as a main part are few, and most of the devices are in a simple shaping structure, namely, the structure is fixed in the stretching process, so that the y-axis direction of the devices is ensured not to deform.
The poisson ratio of the prior art device is fixed whether it is a positive poisson ratio, a negative poisson ratio, or a zero poisson ratio. However, under different deformation test conditions, such as large deformation conditions, the device is expected to be capable of stretching in the x axis and deforming in a large way, and the y axis does not shrink or expand obviously, so that the conductive sensitive layer is not influenced by the stress of the substrate in the y direction, and the test range of the conductive sensitive layer is further improved; under the small deformation, the device is expected to have higher sensitivity, the deformation quantity can be more accurately tested, the device can realize the regulation and control of Poisson ratio, the large deformation can be solved, the sensing range is enlarged, and the small deformation can improve the sensing sensitivity. Therefore, how to realize the poisson ratio control in the same pattern structure becomes a problem to be solved urgently.
Disclosure of Invention
In view of the problems in the background art, the present invention is directed to a flexible strain sensor with adjustable poisson ratio. According to the strain sensor, the special mechanical superstructure is designed, so that the Poisson ratio of the device can be regulated and controlled under different parameter conditions, different application scene requirements can be met, and the implementation process is simple and easy to operate.
In order to realize the purpose, the technical scheme of the invention is as follows:
a Poisson ratio adjustable flexible strain sensor comprises a first flexible substrate layer, a mechanical super-structure layer, a second flexible substrate layer and a conductive sensitive layer which are sequentially arranged from bottom to top, wherein an electrode is arranged on the surface of the conductive sensitive layer; the mechanical superstructure is characterized in that the mechanical superstructure is formed by arranging m multiplied by m mechanical superstructure units in an array manner, the mechanical superstructure units are obtained by sequentially rotating 60 degrees and rotating a circle by taking an end point as a circle center by a base unit, the base unit is in an s shape and is formed by alternately connecting three sections of straight lines and two sections of circular arcs, and the straight lines are tangent to the circular arcs; wherein the three straight lines have the same size, the two circular arcs have the same size, the line width of the straight line is 50-200 mu m, and the length of the straight line is 0.8-1.2 mm; the angle of the circular arc is 120-150 degrees, the radius of the circle where the circular arc is located is 0.6-0.8 mm, and the width of the circular arc is 25-100 mu m.
Further, the Poisson's ratio is regulated and controlled by adjusting the line widths of the straight line and the circular arc, specifically, the line width of the straight line is less than 100 μm, the line width of the circular arc is less than 50 μm, and the sensor has the effect of positive Poisson's ratio; the linear line width is 100-150 μm, the arc line width is 50-75 μm, and the sensor can show the effect of approximate zero Poisson ratio; the linear line width is more than 150 μm, the arc line width is more than 75 μm, and the sensor can have the effect of negative Poisson ratio.
Furthermore, the number m of the mechanical superstructure units is more than or equal to 3, so that the mechanical superstructure layer has a certain appropriate filling rate and a certain tensile rate.
Further, the thickness of the first flexible substrate layer is 100-150 μm, and the material is Polydimethylsiloxane (PDMS); the mechanical super-structure layer is made of Polyimide (PI) and has a thickness of 50-100 microns; the second flexible substrate layer is made of Polydimethylsiloxane (PDMS) and has the thickness of 100-150 microns; the thickness of the conductive sensitive layer is about 100-200 nm, and the conductive sensitive layer is made of gold (Au) or platinum (Pt) and the like; the electrode material is silver (Ag).
Further, the first flexible substrate material and the second flexible substrate material are one of Polydimethylsiloxane (PDMS), polybutylene adipate/terephthalate (PBAT), and hydrogenated styrene-butadiene block copolymer (SEBS), and the two materials may be the same or different.
The mechanism of the invention is as follows: by introducing the mechanical superstructure, the structure can be isotropically rotated and expanded by stretching the superstructure, the contraction of the substrate can be counteracted by the expansion of the superstructure, even the substrate is expanded, and the inherent property-Poisson's ratio of the substrate material can be effectively regulated and controlled. Selecting mechanical superstructures with different parameters, wherein due to the fact that line widths of straight lines and circular arcs are different, the isotropy opening force which can be provided is different and is offset with the longitudinal positive Poisson ratio contraction force of the substrate, and if the opening force of the mechanical superstructures is larger than the longitudinal contraction force of the substrate, the sensor longitudinally expands in the transverse stretching process and presents a negative Poisson ratio effect; if the opening force of the mechanical superstructure is approximately equal to the contraction force of the substrate, the longitudinal direction of the sensor can be kept unchanged in the transverse stretching process, and the effect of zero Poisson ratio is presented; if the opening force of the mechanical superstructure is smaller than the contraction force of the substrate, the sensor can continuously contract in the longitudinal direction in the transverse stretching process, and the positive Poisson ratio effect is achieved.
In summary, due to the adoption of the technical scheme, the invention has the beneficial effects that:
1. according to the invention, an interlayer transfer printing mechanical super-structure layer is added into a flexible substrate, the device can work under large deformation (30%) by regulating the Poisson ratio to zero, the device is a higher level of a metal strain sensor, gold is used as a conductive sensitive layer material, the metal sensing layer micro-deformation crack expansion is used as a sensing principle, and the sensitivity of the strain sensor can be effectively improved.
2. The invention realizes the regulation and control of the positive Poisson's ratio to the negative Poisson's ratio of the device through changing the specific parameters of the mechanical super-structure layer. Under the condition of positive Poisson ratio, in the stretching process, the y axis is compressed simultaneously, the y direction can be extruded, and extrusion wrinkles and cracks are generated, so that the flexible sensor is in an initial state. Under the condition of zero Poisson ratio, the length of the y axis is kept in the stretching process, so that the crack of the tube can generate the x direction, and the y direction can not be extruded, thereby improving the test range of the tube, and being suitable for large-strain application; under the condition of negative Poisson ratio, the x axis is stretched, and the y axis is simultaneously opened, so that the upper limit of the sensitivity of the device can be improved to a great extent, and the measurement precision is further improved. Therefore, the invention can adaptively adjust the Poisson ratio of the device according to different application scene requirements, and the implementation means is simple and easy to operate.
Drawings
FIG. 1 is a schematic diagram of the overall construction of a flexible strain sensor according to the present invention;
wherein, 1 is first flexible stratum basale, 2 is the mechanics super structural layer, 3 is the second flexible stratum basale, 4 is the sensitive layer of electrically conducting, and 5 is the silver electrode.
Fig. 2 is a schematic diagram of a mechanical superstructure layer of a flexible strain sensor according to the invention.
FIG. 3 is a schematic diagram of a mechanical superstructure unit of the flexible strain sensor of the present invention.
FIG. 4 is a schematic diagram of a base unit in a mechanical superstructure unit of the flexible strain sensor of the present invention.
Fig. 5 is a graph of the electrical performance of the flexible strain sensors of examples 1, 2 and 3 of the present invention at different poisson's ratios.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the embodiments and the accompanying drawings.
A Poisson ratio adjustable flexible strain sensor is shown in the overall structural schematic diagram of the Poisson ratio adjustable flexible strain sensor and comprises a first flexible substrate layer 1, a mechanical super-structural layer 2, a second flexible substrate layer 3 and a conductive sensitive layer 4 which are sequentially arranged from bottom to top, wherein electrodes 5 are arranged on two sides of the surface of the conductive sensitive layer in the direction opposite to the stretching direction; the schematic diagram of the mechanical superstructure layer 2 is shown in fig. 2, the mechanical superstructure layer comprises two side connection regions and a central pattern region, the central pattern region is formed by arranging m × m mechanical superstructure unit arrays, the two side connection regions are only used for closing the patterns of the central pattern region, and the realization of the whole device function is not affected by not arranging the region; the structural schematic diagram of the mechanical superstructure unit is shown in fig. 3, the mechanical superstructure unit is obtained by sequentially rotating 60 degrees and rotating a circle by taking an end point as a circle center, the base unit is s-shaped and is formed by alternately connecting three sections of straight lines and two sections of circular arcs, and the straight lines are tangent to the circular arcs; the three straight lines have the same size, the two circular arcs have the same size, the structural schematic diagram of the basic unit is shown in fig. 4, the circular arc has the angle of G, the radius of R, the width of D2, the length of L and the width of D1.
Example 1
A preparation method of a flexible strain sensor with an adjustable Poisson ratio comprises the following steps:
step 1, selecting two quartz glasses with the size of 60 x 1mm as hard substrates, and sequentially carrying out ultrasonic cleaning on absolute ethyl alcohol and acetone;
step 2, respectively spin-coating a layer of release agent on the two quartz glass hard substrates;
step 3, mixing polydimethylsiloxane and a curing agent according to a mass ratio of 10;
step 4, processing the polyimide film by adopting nanosecond laser ablation equipment, wherein the laser power is 1.8w, and pattern cutting is carried out for four times to obtain a mechanical super-structure layer; the mechanical superstructure is formed by arranging 3 x 3 mechanical superstructure units in an array manner, the mechanical superstructure units are obtained by sequentially rotating 60 degrees and rotating for one circle by using a basic unit as a circle center by taking an end point, the basic unit is in an s shape and is formed by alternately connecting three straight lines and two circular arcs, and the straight lines are tangent to the circular arcs; the three straight lines have the same size, the two circular arcs have the same size, the line width of the straight line is 100 mu m, and the length of the straight line is 1mm; the angle of the arc is 140 degrees, the radius of the circle where the arc is located is 0.7mm, and the width of the arc is 50 microns;
step 5, transferring the mechanical super-structure layer obtained in the step 4 to the surface of the first flexible substrate layer obtained in the step 3, slightly pressing to attach the mechanical super-structure layer to the surface of the first flexible substrate layer, then attaching a second flexible substrate layer to the mechanical super-structure layer, and drying for 1 hour at 60 ℃ to obtain a main body structure of the flexible strain sensor;
and 6, slowly stripping the main structure obtained in the step 5 from the quartz glass, then performing magnetron sputtering on a gold (Au) conductive sensitive layer with the thickness of 150nm on the surface of the second PDMS flexible substrate, and applying silver paste on two end points on the surface of the conductive sensitive layer and leading out a lead to obtain the required flexible strain sensor.
The electrical properties of the flexible strain sensor prepared in this example are shown in fig. 5.
Example 2
Preparing a flexible strain sensor according to the steps of example 1, and only adjusting the specific structure of the mechanical super-structure layer in the step 4 as follows: the line width of the straight line is 200 μm, and the length is 1mm; the angle of the circular arc is 140 degrees, the radius of the circle where the circular arc is located is 0.7mm, the line width of the circular arc is 100 mu m, and other steps are not changed.
The electrical properties of the flexible strain sensor prepared in this example are shown in fig. 5.
Example 3
A flexible strain sensor was prepared according to the procedure of example 1, and only the specific structure of the mechanical super-structured layer in step 4 was adjusted to: the line width of the straight line is 80 μm, and the length is 1mm; the angle of the arc is 140 degrees, the radius of the circle where the arc is located is 0.7mm, the line width of the arc is 40 mu m, and other steps are unchanged.
The electrical properties of the flexible strain sensor prepared in this example are shown in fig. 5.
Comparative example 1
A flexible strain sensor was prepared according to the procedure of example 1, and only the specific structure of the mechanical super-structured layer in step 4 was adjusted to: the line width of the straight line is 400 μm, and the length is 1mm; the angle of the arc is 140 degrees, the radius of the circle where the arc is located is 0.7mm, the line width of the arc is 200 mu m, and other steps are unchanged.
The strain sensor prepared by the comparative example has negative Poisson ratio performance, but the tensile property is extremely poor due to wide line widths of straight lines and circular arcs, and the range of the tensile ratio is less than 5%.
Comparative example 2
A flexible strain sensor was prepared according to the procedure of example 1, with the mechanical superstructure layer removed and the other steps unchanged.
The flexible substrate prepared by the comparative example is polydimethylsiloxane with positive Poisson's ratio, the inner part of the flexible substrate is not provided with a chemical superstructure, and the sensor is deformed into a substrate which has the effect of positive Poisson's ratio and is the initial Poisson's ratio of the sensor. Compared with the sensor prepared by adding the superstructure in example 3, the sensing precision of the device obtained by the comparative example is still insufficient in sensitivity.
Electrical property diagrams of the flexible strain sensors of the embodiments 1, 2 and 3 of the invention under different poisson's ratios. As can be seen from the figure, the line width of the flexible strain sensor prepared in example 1 is 100 μm, the line width at the arc is 50 μm, and the grid expansion force and the substrate contraction force are offset in the stretching process, so that the y-axis is not changed in the x-axis stretching process, and the flexible strain sensor has an effect of zero poisson ratio; meanwhile, the zero-Poisson ratio flexible strain sensor has a larger stretching range, and the testing range of the strain sensor is effectively improved. The line width of the flexible strain sensor prepared in the embodiment 2 is 200 μm, the line width at the arc position is 100 μm, the grid expansion force is larger than the substrate contraction force in the stretching process, the deformation of the sensor is guided by the grid deformation, so that the y axis is also expanded in the x axis stretching process, the effect of negative poisson ratio is achieved, the sensitivity of the strain sensor with negative poisson ratio is greatly improved, and the precision of the strain sensor is effectively improved. The line width of the flexible strain sensor prepared in embodiment 3 is 80 μm, the line width at the arc is 40 μm, the grid expansion force is smaller than the base contraction force in the stretching process, the deformation of the sensor is dominated by the deformation of the base, so that the y axis is also reduced in the x axis stretching process, the effect of positive poisson ratio is achieved, the sensitivity of the strain sensor with positive poisson ratio is improved to a certain extent, and the precision of the strain sensor is effectively improved.
While the invention has been described with reference to specific embodiments, any feature disclosed in this specification may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise; all of the disclosed features, or all of the method or process steps, may be combined in any combination, except mutually exclusive features and/or steps.
Claims (4)
1. A Poisson ratio adjustable flexible strain sensor comprises a first flexible substrate layer, a mechanical super-structure layer, a second flexible substrate layer and a conductive sensitive layer which are sequentially arranged from bottom to top, wherein an electrode is arranged on the surface of the conductive sensitive layer; the mechanical superstructure is characterized in that the mechanical superstructure is formed by arranging m multiplied by m mechanical superstructure units in an array manner, the mechanical superstructure units are obtained by sequentially rotating 60 degrees and rotating a circle by taking an end point as a circle center by a base unit, the base unit is in an s shape and is formed by alternately connecting three sections of straight lines and two sections of circular arcs, and the straight lines are tangent to the circular arcs; wherein the three straight lines have the same size, the two circular arcs have the same size, the line width of the straight line is 50-200 mu m, and the length of the straight line is 0.8-1.2 mm; the angle of the circular arc is 120-150 degrees, the radius of the circle where the circular arc is located is 0.6-0.8 mm, and the width of the circular arc is 25-100 mu m;
the Poisson ratio is regulated and controlled by adjusting the line widths of the straight line and the circular arc, specifically, the line width of the straight line is less than 100 mu m, the line width of the circular arc is less than 50 mu m, and the sensor has the effect of positive Poisson ratio; the linear line width is 100-150 μm, the arc line width is 50-75 μm, and the sensor can show the effect of approximate zero Poisson ratio; the linear line width is more than 150 μm, the arc line width is more than 75 μm, and the sensor can have the effect of negative Poisson ratio.
2. The flexible strain sensor of claim 1, wherein the number m of mechanical superstructure units is ≧ 3.
3. The flexible strain sensor of claim 1, wherein the first flexible substrate layer has a thickness of 100 to 150 μm and is made of polydimethylsiloxane; the mechanical super-structure layer is made of polyimide and has a thickness of 50-100 microns; the second flexible substrate layer is made of polydimethylsiloxane, and the thickness of the second flexible substrate layer is 100-150 micrometers; the thickness of the conductive sensitive layer is 100-200 nm, and the conductive sensitive layer is made of gold or platinum; the electrode material is silver.
4. The flexible strain sensor of claim 1, wherein the first and second flexible substrate materials are one of polydimethylsiloxane, polybutylene adipate-terephthalate, and hydrogenated styrene-butadiene block copolymer, and wherein the first and second flexible substrate materials are the same or different.
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