CN113832505B - Automatic copying device for large-size thin-wall X-ray focusing lens - Google Patents

Abstract

An automatic copying device for a large-size thin-wall X-ray focusing lens belongs to the technical field of X-ray focusing lens processing. This copying device, the assurance of very big degree the uniformity and the controllability of copying process technology, shorten the production cycle of focus lens greatly, improve the efficiency of duplicating, the cost of using manpower sparingly can carry out nimble adjustment according to the duplication demand of not unidimensional focus lens simultaneously, possesses high adaptability. Separating mechanism, fixture and sealed cowling are all installed on the base, and the dabber mould is installed on fixture, and separating mechanism is used for separating the lens on the dabber mould, and the sealed cowling cover is established and is made the three be in sealed environment on dabber mould, separating mechanism, fixture to by liquid nitrogen circulating device pour into the liquid nitrogen into to the dabber mould and to pour into nitrogen gas into in the sealed cowling, make things convenient for breaking away from of mirror shell. By applying the invention, the requirement of the copying process can be met only by the movement of the vertical shaft, the complex movement control is avoided, and the batch copying is realized.

Description

Automatic copying device for large-size thin-wall X-ray focusing lens

Technical Field

The invention belongs to the technical field of X-ray focusing lens processing, and particularly relates to an automatic copying device for a large-size thin-wall X-ray focusing lens.

Background

In order to study and observe new high-energy radiation phenomena of celestial bodies such as black holes, neutron stars and the like, astronomical platforms and space centers of a plurality of countries and regions including the United states and the like emit more than ten X-ray astronomical satellites to the space. In 1952, the german physicist Hans Wolter designed three Wolter-type X-ray focusing telescopes of grazing incidence that meet the abbe sine condition, called Wolter I II III-type focusing telescopes. The Wolter-I type X-ray telescope is composed of a paraboloidal internal reflection mirror and a hyperboloid internal reflection mirror, has the advantages of being capable of being nested in multiple layers, beneficial to weak source observation and the most common type of the X-ray telescope at present. China predicts the next generation of flagship-level X-ray astronomical satellite-enhanced X-ray time-varying and polarization detection (exttp) space astronomical stage emitted in 2026. The eXTP project deploys 4 payloads, where the Spectral Focusing Array (SFA) and the Polarimetric Focusing Array (PFA) consist of 9 and 4 sets of 5.25m focal length, 500mm aperture Focusing telescope arrays, respectively, with different focal plane detectors. In order to increase the effective measurement area of the telescope, the X-ray focusing telescope adopts a nested design of a multilayer thin-wall structure, and meanwhile, because the main load of eXTP is 13 groups and total number of lenses is 645, the process of batch production of ultrathin, large-size and high-precision lenses becomes a key process. Therefore, the efficiency of the manufacture of the focusing lens is an important consideration.

The X-ray focusing lens is manufactured by a copying method, and the main processing technological processes of copying comprise chemical nickel-phosphorus alloy plating of a mould, ultra-precision processing of the mould, film coating of the mould, nickel matrix electroforming and copying. The replication is one of the key links of the manufacture of the focusing lens and is a key process for ensuring the replication precision of the focusing lens. After the nickel substrate is electroformed, the electroformed nickel mirror shell needs to be separated from the die in a copying mode, and the inner surface of the gold film is the reflecting surface of the X-ray focusing mirror, so that copying and manufacturing are realized. The manufacture of the focusing telescope array is a very key link of a satellite project, in order to meet the requirements of a working energy area, a collection area, an angular resolution and the like required by indexes of the focusing telescope array, a focusing mirror lens with the length of 600mm and the maximum diameter of 500mm needs to be produced, wherein the surface roughness requirement is 0.5nm, the surface shape precision requirement is 0.2 mu m, the thinnest lens is only 0.2mm in thickness, and the deformation is very easy to occur. After copying, the high-precision focusing lens mold can be reused circularly, so that the manufacturing efficiency is improved, and the production cost is reduced. Although the traditional manual copying device is simple in structure and convenient to operate, time and labor are wasted, the consistency of mass copying technology cannot be guaranteed, the efficiency is low, and the requirement for mass production cannot be met.

Disclosure of Invention

In order to overcome the defects of the prior art, the invention further provides an automatic copying device for the large-size thin-wall X-ray focusing lens, which greatly ensures the consistency and controllability of the copying process, greatly shortens the production period of the focusing lens, improves the copying efficiency, saves the labor cost, can flexibly adjust according to the copying requirements of the focusing lenses with different sizes and has high adaptability.

The technical scheme adopted by the invention is as follows: the large-size thin-wall X-ray focusing mirror automatic copying device comprises a sealing cover, a separating mechanism, a clamping mechanism, a base and a liquid nitrogen circulating device; separating mechanism, fixture and sealed cowling are all installed on the base, and the dabber mould is installed on fixture, separating mechanism is used for separating the mirror shell on the dabber mould, the sealed cowling cover is established and is made the three be in sealed environment on dabber mould, separating mechanism, fixture to by liquid nitrogen circulating device to dabber mould injection liquid nitrogen and to injecting nitrogen gas in the sealed cowling, be used for the shrinkage of dabber mould, make things convenient for the separation of mirror shell.

Compared with the prior art, the invention has the following beneficial effects:

1. the sealing cover effectively isolates the influence of the external environment on the whole copying process, simultaneously provides sufficient equipment conditions for the vacuum environment required by the copying process, and can fully and circularly utilize nitrogen in the sealing cover. Meanwhile, the bottom of the sealing cover is connected with the base through a sliding block guide rail mechanism, so that the sealing cover can be conveniently moved, a workpiece can be conveniently copied, the sealing cover can be quickly installed and replaced, and the installation efficiency is greatly improved.

2. The copying claw can adjust the radial distance according to the diameters of the nickel mirror shell and the mandrel, is a radial fine adjustment device, can manually adjust and eliminate radial errors caused by assembly, clamping, positioning and the like, improves the precision of the copying process, can flexibly adjust according to workpieces with different diameters, has higher adaptability, and also ensures the process consistency of the whole copying process.

3. The vertical guide mechanism consists of three groups of guide posts and the belleville springs, so that the phenomenon that the Au film on the inner surface of the focusing mirror is scratched due to the fact that lateral stress is introduced to the device because the copying direction is not vertical can be avoided, and load moment can be well balanced.

4. The separating device is uniformly provided with the mechanical sensors, the copying force is measured in real time, the magnitude of the copying force can be effectively controlled, meanwhile, the copying claws are uniformly distributed around the workpiece, the stress is uniform, and the lens can be prevented from deforming in the copying process.

5. The invention can greatly simplify the structure of the equipment, can meet the requirement of the copying process only by the movement of the vertical shaft, avoids complex movement control, can realize automatic control, saves labor, improves the whole copying efficiency and realizes batch copying.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the separation mechanism of the present invention;

FIG. 3 is a front view of the release mechanism of the present invention;

FIG. 4 is a schematic view of a clamping mechanism of the present invention;

FIG. 5 is a schematic view of the vertical guide mechanism of the present invention;

FIG. 6 is a schematic view of a replication claw of the present invention;

FIG. 7 is a schematic representation of the replication principle of the present invention;

FIG. 8 is a schematic diagram of the fine adjustment between the steel jaw lifting block and the steel jaw adjusting block of the present invention;

wherein: 1. a sealing cover; 2. a mandrel die; 3. a separating mechanism; 4. a clamping mechanism; 5. a base; 6. a liquid nitrogen circulating device; 7. a mechanical sensor; 8. a thermocouple instrument; 31. a vertical guide mechanism; 32. a replication claw; 33. copying a disc; 311. a linear guide rail mechanism; 312. supporting ribs; 313. a guide bar; 314. a disc spring; 315. a support rod seat; 321. a cylinder; 322. an adapter plate; 323. a support arm; 324. a long slide rail pair; 325. a screw; 326. a short slide rail pair; 327. a steel claw lifting block; 328. a steel claw adjusting block; 41. a pneumatic chuck; 42. a flange plate; 43. switching a liquid nitrogen inlet; 44. a catheter port; 51. a slider guide rail mechanism; 61. a liquid nitrogen tank; 62. a liquid nitrogen pipe; 63. and (4) a valve.

Detailed Description

The lens and the lens housing being one part

The first embodiment is as follows: the embodiment is described with reference to fig. 1 to 7, and the embodiment provides an automatic copying device of a large-size thin-wall X-ray focusing lens, which comprises a sealing cover 1, a separating mechanism 3, a clamping mechanism 4, a base 5 and a liquid nitrogen circulating device 6; separating mechanism 3, fixture 4 and seal cover 1 all install on base 5, and dabber mould 2 installs on fixture 4, separating mechanism 3 is used for separating the mirror shell on dabber mould 2, seal cover 1 covers and establishes and makes the three be in sealed environment on dabber mould 2, separating mechanism 3, fixture 4 to pour into the liquid nitrogen into and pour into nitrogen gas into in seal cover 1 into to dabber mould 2 by liquid nitrogen circulating device 6 for the shrinkage of dabber mould 2 makes things convenient for breaking away from of mirror shell.

In the present embodiment, the clamping mechanism 4 and the separating mechanism 3 are fixed to the base 5 by bolting, and the mandrel die 2 is fixed to the clamping mechanism 4 by the flange 42.

In the present embodiment, the sealing cap 1 is slidably connected to the base 5 by a slider rail mechanism 51 attached to the upper surface of the base 5.

The second embodiment is as follows: the present embodiment will be described with reference to fig. 4, which further defines the first embodiment, in which the clamping mechanism 4 includes a gas chuck 41, a flange 42, and a liquid nitrogen inlet adapter 43; air chuck 41 passes through bolted connection to be fixed on base 5, liquid nitrogen inlet switching 43 one end is by air chuck 41 centre gripping, and flange 42 is connected to the other end, flange 42 is used for installing dabber mould 2, makes dabber mould 2 connect through flange 42 and fixes on fixture 4 to press from both sides tightly through air chuck 41. Other components and connection modes are the same as those of the first embodiment.

In this embodiment, a pipe port 44 communicating with the inner cavity is attached to the liquid nitrogen inlet adapter 43.

The third concrete implementation mode: the present embodiment will be described with reference to fig. 2, 3, 5, and 6, and the present embodiment further defines the first embodiment, and in the present embodiment, the separation mechanism 3 includes a transfer disk 33, a plurality of vertical guide mechanisms 31, and a plurality of transfer claws 32; the replication disc 33 is coaxially sleeved outside the mandrel mould 2, the replication disc 33 is driven by a plurality of vertical guide mechanisms 31 arranged on the base 5 to move up and down, the replication claws 32 are all arranged on the replication disc 33, the replication claws 32 are used for lifting a mirror shell on the mandrel mould 2, and each replication claw 32 is provided with a mechanical sensor 7 for controlling the replication force. Other components and connection modes are the same as those of the first embodiment.

In this embodiment, a plurality of vertical guide mechanisms 31 are uniformly arranged around the copying disk 33, and one copying claw 32 is arranged on each of both sides of each vertical guide mechanism 31.

In the present embodiment, the number of the vertical guide mechanisms 31 is preferably three, and the number of the transfer pawls 32 is preferably six.

In the present embodiment, the plurality of vertical guide mechanisms 31 are mounted on the base 5 by bolts.

Fourth embodiment, the present embodiment is described with reference to fig. 5, and is further limited to the third embodiment, in which each of the vertical guide mechanisms 31 includes a linear guide mechanism 311, a support rib 312, a guide rod 313, and a support rod seat 315; the linear guide mechanism 311 is vertically installed on the base 5 through a support rib 312 arranged on the back surface of the linear guide mechanism, the support rod seat 315 is installed on a slide block of the linear guide mechanism 311 through a bolt, the guide rod 313 is vertically installed on the upper surface of the support rod seat 315, and the guide rod 313 penetrates through a through hole arranged on the copy disk 33, so that the copy disk 33 is lapped on the support rod seat 315 and is driven by the linear guide mechanism 311 to vertically move.

In the present embodiment, the support rib 312 is fixed to the base 5 by a bolt.

The fifth concrete implementation mode: the present embodiment will be described with reference to fig. 3 and 5, and the present embodiment is further limited to the fourth embodiment, in which a disc spring 314 is provided between each support rod holder 315 and the replica disk 33 to balance the load moment, and each disc spring 314 is fitted around the corresponding guide rod 313. The other components and the connection mode are the same as those of the fourth embodiment.

The sixth specific implementation mode: the present embodiment is described with reference to fig. 6, and is further limited to the fifth embodiment, in which each of the transfer claws 32 includes a cylinder 321, a support arm 323, a steel claw lift block 327, a steel claw adjustment block 328, a long slide rail pair 324, and a short slide rail pair 326; the cylinder 321 is installed on the front end of the supporting arm 323, the steel claw adjusting block 328 is installed on the telescopic end of the cylinder 321 through a screw 325, the cylinder 321 is used for realizing up-and-down movement of the steel claw adjusting block 328, the lower end of the steel claw adjusting block 328 is connected with the steel claw lifting block 327 through threaded connection, the distance between the steel claw lifting block 327 and the steel claw adjusting block 328 in the front-and-back direction is adjusted according to different thicknesses of a mirror shell, the steel claw lifting block 327 and the steel claw adjusting block 328 is in a step shape, the long slide rail pair 324 is installed on the bottom surface of the supporting arm 323 along the length direction of the supporting arm 323, the long slide rail pair 324 is installed on the copying disc 33 along the radial direction of the copying disc 33, and the copying claw 32 can move along the radial direction of the copying disc 33.

The space between the claw lift 327 and the claw adjuster 328 is stepped, as shown in figure 8,

in order to facilitate the forward and backward adjustment of the steel claw adjusting block 328, long round holes are formed in the steel claw adjusting block 328 in the forward and backward direction, and bolts penetrate through the long round holes to be connected with the steel claw lifting block 327.

The other components and the connection mode are the same as the fifth embodiment mode.

In this embodiment, the guide rail of the long slide rail pair 324 is fixedly connected to the support arm 323, and the slider of the long slide rail pair 324 is fixedly connected to the copy disk 33.

The seventh embodiment: referring to fig. 6, this embodiment will be described, but the present embodiment further defines a sixth embodiment, and in this embodiment, a short slide rail pair 326 is connected between each of the steel claw adjusting blocks 328 and the front end surface of the support arm 323. Other components and connection modes are the same as those of the sixth embodiment.

The specific implementation mode is eight: the present embodiment will be described with reference to fig. 6, which further defines a seventh embodiment, in which the cylinder 321 is attached to the front end of the support arm 323 via an adapter plate 322. The other components and the connection mode are the same as those of the seventh embodiment.

In this embodiment, the front end of the upper surface of the support arm 323 is provided with a mounting groove, the rear end of the adapter plate 322 is mounted in the mounting groove, and the front end of the adapter plate 322 is used for mounting the cylinder 321.

The specific implementation method nine: the present embodiment will be described with reference to fig. 7, which further defines a second embodiment, wherein the liquid nitrogen circulation device includes a liquid nitrogen tank 61, a liquid nitrogen pipe 62, and a valve 63; the liquid nitrogen tank 61 is communicated with the liquid nitrogen inlet adapter 43 through a liquid nitrogen pipe 62 through a conduit port 44, liquid nitrogen is continuously injected into the mandrel mold 2, and nitrogen gas discharged by opening a valve 63 of the liquid nitrogen tank 61 is sent into the seal cover 1 through a pipeline. The other components and the connection mode are the same as those of the second embodiment.

Liquid nitrogen is injected into the inner hole of the mandrel die 2 through a conduit port 44 of the liquid nitrogen inlet adapter 43, and due to different thermal expansion coefficients between the nickel mirror shell and the mandrel die 2, the shrinkage degree of the mandrel die 2 is larger than that of the nickel mirror shell, so that the mirror shell is separated from the mandrel die 2.

The detailed implementation mode is ten: referring to fig. 7, this embodiment is described, and the specific embodiment is further defined, in this embodiment, the large-size thin-walled X-ray focusing mirror automatic replication apparatus further includes a thermocouple instrument 8, and temperature probes of the thermocouple instrument 8 are respectively installed at the upper and lower ends of the mirror shell and the upper and lower ends of the mandrel mold 2, and are used for monitoring the temperatures of the mirror shell and the mandrel mold 2. The other components and the connection mode are the same as those of the ninth embodiment.

The working method comprises the following steps: firstly, a sealing cover 1 is installed on a base 5 through a sliding block guide rail mechanism 51, the sealing cover 1 can horizontally move on the base 5, components required by copying equipment are installed on corresponding positions of the base 5, three groups of vertical guide mechanisms 31 of a separating mechanism 3 are installed on the base 5 through bolts for fixing in combination with the mode shown in figures 2, 3 and 5, a copying disc 33, a disc spring 314, a support rod seat 315 and a guide rod 313 are connected with the vertical guide mechanisms 31, and a mechanical sensor 7 is installed on the copying disc 33;

fig. 6 shows the structural composition of the replication claw 32, in which a long slide rail pair 324, a short slide rail pair 326, an adapter plate 322 and a support arm 323 are fixed by bolts, a steel claw lifting block 327 is installed on the short slide rail pair 326, a cylinder 321 is installed on the adapter plate 322, one end of a screw 325 is connected to the cylinder 321, the other end is connected to the steel claw lifting block 327, and the replication force is provided by the cylinder 321 to drive the steel claw lifting block 327 to move on the short slide rail pair 326. Connecting a steel claw adjusting block 328 with a steel claw lifting block 327, finally installing the replication claws 32 on the replication disc 33, wherein two sets of replication claws 32 are distributed on each set of vertical guide mechanism 31, and six sets of replication claws 32 are installed on the replication disc 33;

as shown in fig. 4, a clamping mechanism 4 is installed, an air chuck 41 is installed on a base 5, a mandrel mold 2 with a mirror shell after being cleaned is placed on an antistatic worktable, a flange 42 and a liquid nitrogen inlet adapter 43 are installed and vertically placed in the center of an inner hole of the air chuck 41, a compressed air valve is opened, air pressure is adjusted, and the air chuck 41 is clamped tightly;

the copying equipment is leveled by a level gauge, the vertical guide mechanism 31 is ensured to be on a horizontal plane, and the vertical guide mechanism 31 has higher vertical guide precision in the lifting process;

the adjusting steel claw lifting block 327 and the steel claw adjusting block 328 are fine-tuned in the front-back direction, (the long slide rail pair 324 is coarse-tuned in the front-back direction) correspondingly adjust the size of a front step of the copying claw according to the thickness of different mirror shells, and the copying claw 32 is manually adjusted to move to the lower end of the mirror shell; observing by using a magnifying lens, locking a guide rail brake caliper, installing a clamping spring and applying pretightening force; resetting the mechanical sensor 7, finely adjusting each copying claw 32 until the upper end of each copying claw contacts the lower edge of the mirror shell, and recording the pre-tightening force; adjusting the vertical guide mechanism 31 of the duplicating claw 32 to ensure that the duplicating claw 32 is on a horizontal plane;

the sealing cover 1 is moved, and the entire replication facility is moved into the sealing cover 1. Closing a sealing cover door, starting a vacuum pump, vacuumizing for a period of time, assisting in detecting internal pressure by using a pressure gauge, paying attention to observe the reading of the pressure gauge, opening an exhaust hole of the sealing cover 1, opening a liquid nitrogen tank 61 of a liquid nitrogen circulating device 6, filling nitrogen into the sealing cover 1, circulating for several times, and stopping when paying attention to humidity display to reach a corresponding numerical value. Liquid nitrogen is continuously injected into the mandrel die 2 through the liquid nitrogen pipe 62 connected to the liquid nitrogen inlet adapter 43. And observing the readings of the thermocouple instrument 8, keeping for a period of time, and according to the different sizes of the 1# to 45# mandrel molds 2, hearing 'crack' sound in the process to explain that the mirror shell is separated from the mandrel, continuously observing the readings of the thermocouple instrument 8, stopping injecting liquid nitrogen after reaching a corresponding target, wherein the target readings of the thermocouple instrument 8 are different according to the sizes of the 1# to 45# mirrors, and have larger difference.

1# -45# mandrel die 2: each set of the lens group is provided with 45 mirrors, which have different sizes and correspond to 45 molds with different sizes.

The copying process is started, the PLC is used for controlling the motor to drive the vertical guide mechanism 31 to ascend, automatic copying is achieved, the copying disc 33 drives the copying claw 32 to achieve vertical movement, the mirror shell is lifted through the copying claw 32, vertical precision is guaranteed, the mirror shell stops moving after being lifted to a corresponding height, the mirror shell is lifted through a special lifting frame, and after the mirror shell is taken down, the mirror shell is transferred to a detection position to be weighed and the like. And (4) removing nitrogen in the sealing cavity, removing the sealing cover 1, loosening the air chuck 41, lifting the mandrel mould 2 out, and completing the whole replication process.

It is to be understood that the present invention has been described with reference to certain embodiments, and that various changes in the features and embodiments, or equivalent substitutions may be made therein by those skilled in the art without departing from the spirit and scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope thereof. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims (9)

1. An automatic copying device of a large-size thin-wall X-ray focusing lens is characterized in that: comprises a sealing cover (1), a separating mechanism (3), a clamping mechanism (4), a base (5) and a liquid nitrogen circulating device (6); the separation mechanism (3), the clamping mechanism (4) and the sealing cover (1) are all installed on the base (5), the mandrel mould (2) is installed on the clamping mechanism (4), the separation mechanism (3) is used for separating a mirror shell on the mandrel mould (2), the sealing cover (1) covers the mandrel mould (2), the separation mechanism (3) and the clamping mechanism (4) to enable the mandrel mould (2), the separation mechanism (3) and the clamping mechanism (4) to be in a sealed environment, liquid nitrogen is injected into the mandrel mould (2) and nitrogen is injected into the sealing cover (1) through a liquid nitrogen circulating device (6) for cold contraction of the mandrel mould (2) and separation of the mirror shell is facilitated, and the separation mechanism (3) comprises a copying disc (33), a plurality of vertical guide mechanisms (31) and a plurality of copying claws (32); the replication disc (33) is coaxially sleeved on the outer side of the mandrel mould (2), the replication disc (33) is driven to move up and down by a plurality of vertical guide mechanisms (31) arranged on the base (5), the replication claws (32) are all arranged on the replication disc (33), the replication claws (32) are used for lifting the mirror shell, and each replication claw (32) is provided with a mechanical sensor (7) for controlling the replication force.

2. The automated large-format thin-walled X-ray focusing mirror replicating apparatus of claim 1, wherein: the clamping mechanism (4) comprises a pneumatic chuck (41), a flange plate (42) and a liquid nitrogen inlet adapter (43); pneumatic chuck (41) are fixed on base (5), liquid nitrogen inlet switching (43) one end is by pneumatic chuck (41) centre gripping, and ring flange (42) is connected to the other end, ring flange (42) are used for installing dabber mould (2).

3. The automated large-format thin-walled X-ray focusing mirror replicating apparatus of claim 1, wherein: each vertical guide mechanism (31) comprises a linear guide rail mechanism (311), a support rib (312), a guide rod (313) and a support rod seat (315); the linear guide rail mechanism (311) is vertically arranged on the base (5) through a support rib (312) arranged on the back of the linear guide rail mechanism, the support rod seat (315) is arranged on a sliding block of the linear guide rail mechanism (311), the guide rod (313) is vertically arranged on the upper surface of the support rod seat (315), and the guide rod (313) penetrates through a through hole formed in the copying disk (33), so that the copying disk (33) is lapped on the support rod seat (315) and is driven by the linear guide rail mechanism (311) to realize vertical movement.

4. The automated large-format thin-walled X-ray focusing mirror replicating apparatus of claim 3, wherein: and a disc spring (314) is arranged between each support rod seat (315) and the replication disc (33) to play a role in balancing load moment, and each disc spring (314) is sleeved on the corresponding guide rod (313).

5. The automated large-format thin-walled X-ray focusing mirror replicating apparatus of claim 4, wherein: each copying claw (32) comprises an air cylinder (321), a supporting arm (323), a steel claw lifting block (327), a steel claw adjusting block (328), a long slide rail pair (324) and a short slide rail pair (326); the cylinder (321) is installed on the front end of the supporting arm (323), the steel claw adjusting block (328) is installed on the telescopic end of the cylinder (321), the cylinder (321) is used for realizing up-and-down movement of the cylinder, the lower end of the steel claw adjusting block (328) is connected with the steel claw lifting block (327) through threaded connection, the distance between the steel claw lifting block (327) and the steel claw adjusting block (328) in the front-and-back direction is adjusted according to different thicknesses of the mirror shell, the steel claw lifting block (327) and the steel claw adjusting block (328) are in a step shape, the bottom surface of the supporting arm (323) is provided with a long sliding rail pair (324) along the length direction of the supporting arm, the long sliding rail pair (324) is radially installed on the copying disc (33) along the copying disc (33), and the copying claw (32) can radially move along the copying disc (33).

6. The automated large-format thin-walled X-ray focusing mirror replicating apparatus of claim 5, wherein: and a short slide rail pair (326) is connected between each steel claw adjusting block (328) and the front end surface of the supporting arm (323).

7. The automated large-format thin-walled X-ray focusing mirror replicating apparatus of claim 6, wherein: the air cylinder (321) is arranged on the front end of the supporting arm (323) through an adapter plate (322).

8. The automated large-format thin-walled X-ray focusing mirror replicating apparatus of claim 2, wherein: the liquid nitrogen circulating device comprises a liquid nitrogen tank (61), a liquid nitrogen pipe (62) and a valve (63); the liquid nitrogen tank (61) is communicated with the liquid nitrogen inlet adapter (43) through a liquid nitrogen pipe (62) through a guide pipe port (44), liquid nitrogen is continuously injected into the mandrel die (2), and nitrogen discharged by opening a valve (63) of the liquid nitrogen tank (61) is sent into the sealing cover (1) through a pipeline.

9. The automated large-format thin-walled X-ray focusing mirror replicating apparatus of claim 8, wherein: the automatic copying device for the large-size thin-wall X-ray focusing lens further comprises a thermocouple instrument (8), wherein temperature probes of the thermocouple instrument (8) are respectively installed at the upper end and the lower end of the lens shell and the upper end and the lower end of the mandrel mold (2) and used for monitoring the temperature of the lens shell and the temperature of the mandrel mold (2).

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