CN113791527A - Spin coating developing equipment and process thereof - Google Patents

Spin coating developing equipment and process thereof Download PDF

Info

Publication number
CN113791527A
CN113791527A CN202011492169.5A CN202011492169A CN113791527A CN 113791527 A CN113791527 A CN 113791527A CN 202011492169 A CN202011492169 A CN 202011492169A CN 113791527 A CN113791527 A CN 113791527A
Authority
CN
China
Prior art keywords
stirring
vertical
electric rail
motor
spray head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011492169.5A
Other languages
Chinese (zh)
Inventor
钟兴进
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CN202011492169.5A priority Critical patent/CN113791527A/en
Publication of CN113791527A publication Critical patent/CN113791527A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/30Imagewise removal using liquid means
    • G03F7/3042Imagewise removal using liquid means from printing plates transported horizontally through the processing stations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)

Abstract

The invention relates to a glue homogenizing and developing device, which comprises a machine body, wherein the machine body comprises a stirring device, a material conveying device and a glue spraying device, the stirring device comprises a stirring box, a feed inlet, a stirrer, a stirring shaft and stirring blades, the material conveying device comprises a material storage box, a discharge pipe and a transmission pipe, the glue spraying device comprises a material conveying pump, a spray head, an operating platform, a support and a support, a vertical electric rail is arranged on one side of the support, a transverse electric rail is arranged at the bottom end of the glue spraying device, a longitudinal electric rail is arranged at the bottom end of a transverse sliding block, glue materials are uniformly stirred by the stirring device, the glue spraying device vertically moves on the vertical electric rail, the distance between the spray head and a workpiece is adjusted, the transverse sliding block is controlled by a transverse motor, the glue spraying device transversely moves on the transverse electric rail, the position between the spray head and the workpiece is adjusted, the longitudinal sliding block is controlled by the longitudinal motor, so that the material conveying pump can move longitudinally on the longitudinal electric rail to adjust the position between the spray head and the workpiece.

Description

Spin coating developing equipment and process thereof
Technical Field
The invention relates to the technical field of developing equipment, in particular to a glue homogenizing developing equipment and a process thereof.
Background
As is well known, the conventional development is a process of developing an image in the printing, photocopying, copying, blueprinting and other industries, and includes forward development and reverse development, in which the polarity of the charge carried by the developing toner is developed, the charge polarity of the electrostatic latent image on the surface of the photosensitive drum is opposite to that of the electrostatic latent image on the surface of the photosensitive drum, the charge polarity of the photosensitive drum and the toner in the reversal development is the same, development in copiers, printers, etc. is a process of converting an electrostatic latent image on a photosensitive drum into a visible toner image with charged toner, and includes forward development and reverse development, because the production process requirements and the technical level of manufacturers are different, the glue spreading and developing equipment of each brand is also different, the configuration and the arrangement of each block, module and unit in the machine table in the prior art are different, the difference between the loading and unloading blocks and the interface blocks is only that the configuration and the arrangement of the modules and units in the process blocks are different.
If the patent "CN 201226080Y" is named as "glue spreading developing equipment with novel structure", it includes feeding and discharging block, first process block, second process block, interface block, the first process block is composed of heat treatment process tower, coating module, process robot; the second process module consists of a heat treatment process tower, a developing module and a process robot, wherein the process robot is positioned among the heat treatment process tower, the coating module or the developing module is stacked, and heat treatment process units are stacked in the heat treatment process tower, so that the production technology node is low, the production capacity requirement cannot be met, and the maintenance is inconvenient.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides the spin coating developing equipment and the process thereof, which are convenient to maintain and high in efficiency.
(II) technical scheme
In order to achieve the purpose, the invention provides the following technical scheme: a glue homogenizing and developing device comprises a machine body, wherein the machine body comprises a stirring device, a material conveying device and a glue spraying device, the stirring device comprises a stirring box, a feed inlet, a stirring machine, a stirring shaft and stirring blades, the feed inlet is arranged at the top end of the stirring box, the feed inlet is communicated with the stirring box, the stirring machine is arranged at one side of the stirring box, the stirring shaft is arranged in the stirring box, the stirring shaft is communicated with the stirring machine, the stirring blades are arranged at the outer side of the stirring shaft, the material conveying device comprises a storage box, a discharge pipe and a transmission pipe, the storage box is arranged at the bottom end of the stirring box, the storage box is communicated with the stirring box, the discharge pipe is arranged at one side of the storage box, the transmission pipe is arranged at one side of the discharge pipe, the discharge pipe is communicated with the storage box and the transmission pipe, the glue spraying device comprises a material conveying pump, a spray head, an operating platform, a support and a support, wherein the support is arranged at the top end of the operating platform, the support is arranged at the bottom end of the operating platform, a plurality of supports are arranged, a vertical electric rail is arranged on one side of the support, a vertical sliding block is arranged on the vertical electric rail, the vertical sliding block is connected with the glue spraying device, a vertical motor is arranged inside the glue spraying device, a circuit wire is arranged between the vertical motor and the vertical sliding block for connection, a transverse electric rail is arranged at the bottom end of the glue spraying device, a transverse sliding block is arranged on the transverse electric rail, a transverse motor is arranged inside the glue spraying device, a circuit wire is arranged between the transverse motor and the transverse sliding block for connection, a longitudinal electric rail is arranged at the bottom end of the transverse sliding block, a longitudinal sliding block is arranged on the longitudinal electric rail, and the material conveying pump is arranged at the bottom end of the longitudinal sliding block, the top of conveying pump is equipped with vertical motor, vertical motor with be equipped with the circuit line between the vertical slider and connect, the shower nozzle is installed the bottom of conveying pump, the conveying pump intercommunication transmission pipe and shower nozzle, one side of operation panel is equipped with operating panel, operating panel with be equipped with the circuit line between mixer, conveying pump, vertical motor, horizontal motor and the vertical motor and connect.
In order to facilitate the rubber material to reach the optimal efficiency, the invention improves that one side of the stirring box is provided with a heating device, the heating device comprises a heater and a heating pipe, the heating device is arranged on one side of the stirring box, the heating pipe is attached to the inner wall of the stirring box, the heater is communicated with the heating pipe, and a circuit wire is arranged between the operation panel and the heater for connection.
In order to facilitate the detection of the sizing material temperature by workers, the invention has the improvement that a temperature detector is arranged inside the stirring box, a circuit line is arranged between the temperature detector and the heater for connection, and a circuit line is arranged between the operation panel and the temperature detector for connection.
In order to prevent external factors from influencing the normal operation of equipment, the invention improves that a plurality of protection plates are arranged on the outer side of the operating platform.
In order to facilitate the detection of the residual amount of the sizing material by workers, the invention has the improvement that a water level detector is arranged inside the material storage tank, and a circuit line is arranged between the operation panel and the water level detector for connection.
In order to facilitate the operation and feeding of workers, the invention is improved in that an electromagnetic valve is arranged inside the feeding hole, and a circuit line is arranged between the operation panel and the electromagnetic valve for connection.
In order to prevent the electric rail from sliding off in the moving process, the invention improves that two ends of the longitudinal electric rail, the transverse electric rail and the vertical electric rail are respectively provided with a limiting block.
The invention also provides a spin coating developing process, which comprises the following steps:
step 1: pouring the sizing material into the stirring box from the feeding hole, starting the stirring machine through the operation panel, rotating the stirring shaft through the stirring machine, and fully stirring the sizing material through the stirring blades of the stirring shaft;
step 2: the evenly stirred rubber material enters a material storage box for storage;
and step 3: the material conveying pipe is connected with the material discharging pipe, the material conveying pump is used for conveying the material to the spray head from the material conveying pipe, and the spray head is used for uniformly spraying the material on the workpiece;
and 4, step 4: the vertical sliding block is controlled by a vertical motor, so that the glue spraying device can vertically move on a vertical electric rail, and the distance between the spray head and the workpiece is adjusted;
and 5: the transverse sliding block is controlled by a transverse motor, so that the glue spraying device moves transversely on the transverse electric rail, and the position between the spray head and the workpiece is adjusted;
step 6: the longitudinal sliding block is controlled by a longitudinal motor, so that the material conveying pump can move longitudinally on a longitudinal electric rail, and the position between the spray head and the workpiece is adjusted, so that the workpiece is uniformly coated with glue.
In order to facilitate the coating of the sizing material, the invention has the improvement that the heater is started through the operation panel, and the heating pipe is heated through the heater, so that the sizing material is subjected to heat preservation treatment.
(III) advantageous effects
Compared with the prior art, the invention provides a spin coating developing device and a process thereof, which have the following beneficial effects:
the glue homogenizing developing equipment and the process thereof uniformly stir glue materials through the stirring device, so that the glue materials achieve a better smearing effect, the glue materials are transmitted to the spray heads through the material conveying pump, the vertical slide block is controlled through the vertical motor, the glue spraying device vertically moves on the vertical electric rail, the distance between the spray heads and a workpiece is adjusted, the horizontal slide block is controlled through the horizontal motor, the glue spraying device transversely moves on the horizontal electric rail, the position between the spray heads and the workpiece is adjusted, the vertical slide block is controlled through the vertical motor, the material conveying pump longitudinally moves on the vertical electric rail, the position between the spray heads and the workpiece is adjusted, so that the workpiece is uniformly coated with glue, the production technology node quality is high, the requirement of high production capacity is met, and the maintenance is good.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a front view, in half section, of the glue-spraying apparatus of FIG. 1 according to the present invention;
FIG. 3 is a front half-sectional view of the stirring device of FIG. 1 according to the present invention;
FIG. 4 is a top half sectional view of the glue-spraying apparatus of FIG. 1 according to the present invention;
FIG. 5 is an enlarged front half sectional view of the feed pump of FIG. 1 according to the present invention.
In the figure: 1. a stirring device; 2. a stirring box; 3. a feed inlet; 4. a blender; 5. a stirring shaft; 6. stirring blades; 7. a heating device; 8. a heater; 9. heating a tube; 10. a material storage box; 11. a discharge pipe; 12. a conveying pipe; 13. a feeding device; 14. a delivery pump; 15. a spray head; 16. a glue spraying device; 17. an operation table; 18. a support; 19. a pillar; 20. a vertical power rail; 21. a vertical motor; 22. a vertical slide block; 23. a transverse electrical rail; 24. a transverse motor; 25. a transverse slide block; 26. a longitudinal electrical rail; 27. a longitudinal motor; 28. a longitudinal slide block; 29. an operation panel; 30. a protection plate; 31. a temperature detector; 32. a water level detector.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-5, the invention is a spin coating developing apparatus, comprising a machine body, the machine body includes a stirring device 1, a material conveying device 13 and a glue spraying device 16, the stirring device 1 includes a stirring tank 2, a feeding port 3, a stirring shaft 4, a stirring shaft 5 and stirring blades 6, the feeding port 3 is installed at the top end of the stirring tank 2, the feeding port 3 is communicated with the stirring tank 2, the stirring shaft 4 is installed at one side of the stirring tank 2, the stirring shaft 5 is installed inside the stirring tank 2, the stirring shaft 5 is communicated with the stirring shaft 4, the stirring blades 6 are installed at the outer side of the stirring shaft 5, the material conveying device 13 includes a material storage tank 10, a material discharging pipe 11 and a material conveying pipe 12, the material storage tank 10 is installed at the bottom end of the stirring tank 2, the material storage tank 10 is communicated with the stirring tank 2, the material discharging pipe 11 is installed at one side of the material storage tank 10, the glue spraying device is characterized in that the transmission pipe 12 is installed on one side of the discharge pipe 11, the discharge pipe 11 is communicated with the storage box 10 and the transmission pipe 12, the glue spraying device 16 comprises a feed delivery pump 14, a spray head 15, an operation table 17, a support 18 and a support column 19, the support 18 is installed on the top end of the operation table 17, the support column 19 is installed on the bottom end of the operation table 17, the support columns 19 are multiple, a vertical electric rail 20 is arranged on one side of the support 18, a vertical sliding block 22 is arranged on the vertical electric rail 20, the vertical sliding block 22 is connected with the glue spraying device 16, a vertical motor 21 is arranged inside the glue spraying device 16, a circuit line is arranged between the vertical motor 21 and the vertical sliding block 22 for connection, a horizontal electric rail 23 is arranged at the bottom end of the glue spraying device 16, a horizontal sliding block 25 is arranged on the horizontal electric rail 23, and a horizontal motor 24 is arranged inside the glue spraying device 16, horizontal motor 24 with be equipped with the circuit line between the horizontal slider 25 and connect, the bottom of horizontal slider 25 is equipped with vertical electric rail 26, be equipped with vertical slider 28 on the vertical electric rail 26, the feeding pump 14 is installed vertical slider 28's bottom, the top of feeding pump 14 is equipped with vertical motor 27, vertical motor 27 with be equipped with the circuit line between the vertical slider 28 and connect, shower nozzle 15 is installed the bottom of feeding pump 14, feeding pump 14 intercommunication transmission pipe 12 and shower nozzle 15, one side of operation panel 17 is equipped with operating panel 29, operating panel 29 with be equipped with the circuit line between mixer 4, feeding pump 14, vertical motor 21, horizontal motor 24 and the vertical motor 27 and connect.
In conclusion, when the spin coating developing device is used, a worker pours the glue into the stirring box 2 from the feeding hole 3, the device is connected with a power supply, the stirring machine 4 is started through the operation panel 29, the stirring shaft 5 is rotated through the stirring machine 4, the glue is fully stirred through the stirring blades 6 of the stirring shaft 5, the uniformly stirred glue enters the storage box 10 to be stored, the discharge pipe 11 is connected through the conveying pipe, the glue is conveyed to the spray head 15 from the conveying pipe through the conveying pump 14, the glue is uniformly sprayed on a workpiece through the spray head 15, the vertical sliding block 22 is controlled through the vertical motor 21, the glue spraying device 16 vertically moves on the vertical electric rail 20, the distance between the spray head 15 and the workpiece is adjusted, the horizontal sliding block 25 is controlled through the horizontal motor 24, the glue spraying device 16 horizontally moves on the horizontal electric rail 23, and the position between the spray head 15 and the workpiece is adjusted, the longitudinal slide block 28 is controlled by a longitudinal motor 27, so that the material conveying pump 14 moves longitudinally on the longitudinal electric rail 26, and the position between the spray head 15 and the workpiece is adjusted, so that the workpiece is uniformly coated with glue.
In this embodiment, one side of agitator tank 2 is equipped with heating device 7, heating device 7 includes heater 8 and heating pipe 9, heating device 7 installs one side of agitator tank 2, heating pipe 9 is attached on the inner wall of agitator tank 2, heater 8 intercommunication heating pipe 9, operating panel 29 with be equipped with the circuit line between the heater 8 and be connected, make things convenient for the sizing material to reach and be the best efficiency.
In this embodiment, the inside of agitator tank 2 is equipped with thermodetector 31, thermodetector 31 with be equipped with the circuit line between the heater 8 and be connected, operating panel 29 with be equipped with the circuit line between the thermodetector 31 and connect, make things convenient for the staff to detect the sizing material temperature.
In this embodiment, the outside of operation panel 17 is equipped with guard plate 30, guard plate 30 is equipped with a plurality ofly, prevents that external factors from influencing equipment normal operating.
In this embodiment, the inside of storage tank 10 is equipped with water level detector 32, operating panel 29 with be equipped with the circuit line between water level detector 32 and be connected, make things convenient for the staff to detect the surplus of sizing material.
In this embodiment, the inside of feed inlet 3 is equipped with the solenoid valve, operating panel 29 with be equipped with the circuit line between the solenoid valve and connect, make things convenient for the staff to operate the feeding.
In this embodiment, the two ends of the longitudinal power rail 26, the transverse power rail 23 and the vertical power rail 20 are provided with limiting blocks to prevent sliding off in the moving process.
The invention also provides a spin coating developing process, which comprises the following steps:
step 1: pouring the sizing material into the stirring box 2 from the feeding hole 3, starting the stirring machine 4 through the operation panel 29, rotating the stirring shaft 5 through the stirring machine 4, and fully stirring the sizing material through the stirring blade 6 of the stirring shaft 5;
step 2: the uniformly stirred rubber material enters a material storage box 10 for storage;
and step 3: the material discharging pipe 11 is connected through a material conveying pipe, sizing materials are conveyed to a spray head 15 from the material conveying pipe through a material conveying pump 14, and the sizing materials are uniformly sprayed on a workpiece through the spray head 15;
and 4, step 4: the vertical sliding block 22 is controlled by a vertical motor 21, so that the glue spraying device 16 vertically moves on a vertical electric rail 20, and the distance between the spray head 15 and the workpiece is adjusted;
and 5: the transverse sliding block 25 is controlled by a transverse motor 24, so that the glue spraying device 16 moves transversely on the transverse electric rail 23, and the position between the spray head 15 and the workpiece is adjusted;
step 6: the longitudinal slide block 28 is controlled by a longitudinal motor 27, so that the material conveying pump 14 moves longitudinally on the longitudinal electric rail 26, and the position between the spray head 15 and the workpiece is adjusted, so that the workpiece is uniformly coated with glue.
In this embodiment, the heater 8 is turned on through the operation panel 29, and the heating pipe 9 is heated through the heater 8, so that the sizing material is subjected to heat preservation treatment, and the sizing material is conveniently and better smeared.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (9)

1. The utility model provides a glue homogenizing developing equipment, which is characterized in that, includes the organism, the organism includes agitating unit (1), feeding device (13) and spouts mucilage binding and put (16), agitating unit (1) includes agitator tank (2), feed inlet (3), mixer (4), (mixing) shaft (5) and stirring leaf (6), install feed inlet (3) the top of agitator tank (2), feed inlet (3) intercommunication agitator tank (2), install mixer (4) one side of agitator tank (2), install (mixing) shaft (5) the inside of agitator tank (2), mixer (5) intercommunication mixer (4), stirring leaf (6) are installed the outside of mixer shaft (5), feeding device (13) is including (10), discharging pipe (11) and transmission pipe (12), the glue spraying device is characterized in that the storage box (10) is arranged at the bottom end of the stirring box (2), the storage box (10) is communicated with the stirring box (2), the discharge pipe (11) is arranged at one side of the storage box (10), the transmission pipe (12) is arranged at one side of the discharge pipe (11), the discharge pipe (11) is communicated with the storage box (10) and the transmission pipe (12), the glue spraying device (16) comprises a feed delivery pump (14), a spray head (15), an operation table (17), a support (18) and a support pillar (19), the support pillar (18) is arranged at the top end of the operation table (17), the support pillar (19) is arranged at the bottom end of the operation table (17), the support pillar (19) is provided with a plurality of vertical electric rails (20), vertical sliding blocks (22) are arranged on the vertical electric rails (20), and the vertical sliding blocks (22) are connected with the glue spraying device (16), spout the inside of mucilage binding device (16) and be equipped with vertical motor (21), vertical motor (21) with be equipped with circuit line connection between vertical slider (22), the bottom of spouting mucilage binding device (16) is equipped with horizontal electric rail (23), be equipped with horizontal slider (25) on horizontal electric rail (23), the inside of spouting mucilage binding device (16) is equipped with horizontal motor (24), horizontal motor (24) with be equipped with circuit line connection between horizontal slider (25), the bottom of horizontal slider (25) is equipped with vertical electric rail (26), be equipped with vertical slider (28) on vertical electric rail (26), install delivery pump (14) in the bottom of vertical slider (28), the top of delivery pump (14) is equipped with vertical motor (27), vertical motor (27) with be equipped with circuit line connection between vertical slider (28), shower nozzle (15) are installed the bottom of defeated material pump (14), defeated material pump (14) intercommunication transmission pipe (12) and shower nozzle (15), one side of operation panel (17) is equipped with operating panel (29), operating panel (29) with be equipped with the circuit line between mixer (4), defeated material pump (14), vertical motor (21), horizontal motor (24) and vertical motor (27) and connect.
2. The spin coater developing apparatus according to claim 1, wherein a heating device (7) is disposed on one side of the stirring tank (2), the heating device (7) comprises a heater (8) and a heating pipe (9), the heating device (7) is mounted on one side of the stirring tank (2), the heating pipe (9) is attached to the inner wall of the stirring tank (2), the heater (8) is communicated with the heating pipe (9), and a circuit line connection is disposed between the operating panel (29) and the heater (8).
3. The track roller developing apparatus according to claim 2, wherein a temperature detector (31) is provided inside the stirring tank (2), a circuit line connection is provided between the temperature detector (31) and the heater (8), and a circuit line connection is provided between the operation panel (29) and the temperature detector (31).
4. The track roller developing apparatus according to claim 1, wherein a plurality of shielding plates (30) are provided outside the operation table (17).
5. The track roller developing apparatus according to claim 1, wherein a water level detector (32) is disposed inside the storage box (10), and a circuit line connection is disposed between the operation panel (29) and the water level detector (32).
6. The track roller developing device according to claim 1, wherein an electromagnetic valve is arranged inside the feed port (3), and a circuit line connection is arranged between the operation panel (29) and the electromagnetic valve.
7. The track roller according to claim 1, wherein the two ends of the longitudinal electric rail (26), the transverse electric rail (23) and the vertical electric rail (20) are provided with limiting blocks.
8. The spin coating developing process is characterized by comprising the following steps of:
step 1: pouring the sizing material into the stirring box (2) from the feeding hole (3), starting the stirring machine (4) through the operation panel (29), rotating the stirring shaft (5) through the stirring machine (4), and fully stirring the sizing material through the stirring blade (6) of the stirring shaft (5);
step 2: the uniformly stirred rubber material enters a material storage box (10) for storage;
and step 3: the material conveying pipe is connected with the material discharging pipe (11), sizing materials are conveyed to a spray head (15) from the material conveying pipe through a material conveying pump (14), and the sizing materials are uniformly sprayed on a workpiece through the spray head (15);
and 4, step 4: the vertical sliding block (22) is controlled by a vertical motor (21), so that the glue spraying device (16) vertically moves on the vertical electric rail (20), and the distance between the spray head (15) and the workpiece is adjusted;
and 5: a transverse sliding block (25) is controlled by a transverse motor (24), so that the glue spraying device (16) moves transversely on a transverse electric rail (23), and the position between the spray head (15) and the workpiece is adjusted;
step 6: the longitudinal sliding block (28) is controlled by a longitudinal motor (27), so that the material conveying pump (14) moves longitudinally on the longitudinal electric rail (26), and the position between the spray head (15) and the workpiece is adjusted, so that the workpiece is uniformly coated with glue.
9. The spin coating developing process according to claim 1, wherein the heater (8) is turned on through the operation panel (29), and the heating pipe (9) is heated by the heater (8) to keep the glue warm.
CN202011492169.5A 2020-12-17 2020-12-17 Spin coating developing equipment and process thereof Pending CN113791527A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011492169.5A CN113791527A (en) 2020-12-17 2020-12-17 Spin coating developing equipment and process thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011492169.5A CN113791527A (en) 2020-12-17 2020-12-17 Spin coating developing equipment and process thereof

Publications (1)

Publication Number Publication Date
CN113791527A true CN113791527A (en) 2021-12-14

Family

ID=79181108

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011492169.5A Pending CN113791527A (en) 2020-12-17 2020-12-17 Spin coating developing equipment and process thereof

Country Status (1)

Country Link
CN (1) CN113791527A (en)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5968268A (en) * 1997-01-31 1999-10-19 Tokyo Electron Limited Coating apparatus and coating method
JP2001239199A (en) * 1999-12-20 2001-09-04 Tokyo Electron Ltd Coating film forming device and coating film forming method
JP2001239198A (en) * 1999-12-20 2001-09-04 Tokyo Electron Ltd Coating film forming device
JP2002223058A (en) * 2001-01-24 2002-08-09 Hitachi Via Mechanics Ltd Resist coating device
KR100880905B1 (en) * 2007-09-18 2009-02-03 정우화인 주식회사 Method of coating eps beads for fire proof board
CN205184982U (en) * 2015-10-14 2016-04-27 福建省武平县云河木业有限公司 Automatic rubber coating device of plywood
CN108380412A (en) * 2018-03-20 2018-08-10 李丽倩 A kind of chemical industry spray equipment
CN210894988U (en) * 2019-11-15 2020-06-30 河北光森电子科技有限公司 Wafer glue homogenizing equipment in semiconductor photoetching process
CN211887497U (en) * 2020-01-08 2020-11-10 中山保易达新材料有限公司 Metal antirust emulsion spraying device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5968268A (en) * 1997-01-31 1999-10-19 Tokyo Electron Limited Coating apparatus and coating method
JP2001239199A (en) * 1999-12-20 2001-09-04 Tokyo Electron Ltd Coating film forming device and coating film forming method
JP2001239198A (en) * 1999-12-20 2001-09-04 Tokyo Electron Ltd Coating film forming device
JP2002223058A (en) * 2001-01-24 2002-08-09 Hitachi Via Mechanics Ltd Resist coating device
KR100880905B1 (en) * 2007-09-18 2009-02-03 정우화인 주식회사 Method of coating eps beads for fire proof board
CN205184982U (en) * 2015-10-14 2016-04-27 福建省武平县云河木业有限公司 Automatic rubber coating device of plywood
CN108380412A (en) * 2018-03-20 2018-08-10 李丽倩 A kind of chemical industry spray equipment
CN210894988U (en) * 2019-11-15 2020-06-30 河北光森电子科技有限公司 Wafer glue homogenizing equipment in semiconductor photoetching process
CN211887497U (en) * 2020-01-08 2020-11-10 中山保易达新材料有限公司 Metal antirust emulsion spraying device

Similar Documents

Publication Publication Date Title
CN207890697U (en) A kind of steel-making automation feeding device
CN107716182A (en) Viscose spray equipment
CN214438002U (en) Dye mixing device for textile printing and dyeing
CN212524741U (en) Battery sheet coating device
CN107503275A (en) Coating automatic ration controls roadmarking device
CN108601240A (en) A kind of SMT printing apparatus
CN113791527A (en) Spin coating developing equipment and process thereof
CN212349274U (en) Fire-proof plate flat-pasting machine coating device
CN207641746U (en) A kind of viscose spray equipment
CN212441759U (en) Coating equipment is used in protection film production
CN111016391B (en) Waterproof coiled material production device and waterproof coiled material production method
CN214295070U (en) Environment-friendly steel sheet processing is with inkjet coating device
CN211963831U (en) A compounding equipment for coating production
CN214288882U (en) Baking finish excess recycling device for baking finish boards
CN211808477U (en) Color printing equipment capable of improving ink jet uniformity
CN212021206U (en) Lime spraying machine for building decoration
CN211641334U (en) Flat screen printing machine adds thick liquid device
CN208529541U (en) One kind removing electrostatic photocuring film-making machine
CN208617444U (en) A kind of flocculant adder
CN218485761U (en) Coating production mixing arrangement that stirring effect is good
CN216149569U (en) Coating mixing arrangement is used in production of coating white board paper
CN213792560U (en) Coating mechanism
CN220143156U (en) Efficient coating mixing arrangement
CN105772281B (en) A kind of oiling method and device for remanufacturing shaped piece
CN220429599U (en) Printing equipment for graphene heating coating

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination