CN113790831A - 一种超快响应的透气式柔性压力传感器及其制备方法 - Google Patents

一种超快响应的透气式柔性压力传感器及其制备方法 Download PDF

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CN113790831A
CN113790831A CN202111096476.6A CN202111096476A CN113790831A CN 113790831 A CN113790831 A CN 113790831A CN 202111096476 A CN202111096476 A CN 202111096476A CN 113790831 A CN113790831 A CN 113790831A
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李元岳
任萌娜
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Abstract

本发明属于传感器技术领域，涉及一种超快响应的透气式柔性压力传感器及其制备方法，第一PVP纳米纤维薄膜层和第二PVP纳米纤维薄膜层相对设置；第一电极层附着在第一PVP纳米纤维薄膜层内侧；第二电极层附着在第二PVP纳米纤维薄膜层内侧，第一电极层和第二电极层之间设置有PVP纳米纤维膜介质层；该透气式柔性压力传感器的基底和介电层均为利用静电纺丝得到具有微纳结构的PVP纳米纤维膜，简化了制备流程，成本低，能大面积生产，传感器的灵敏度高，响应时间快；将PVP纳米纤维膜用在透气式柔性压力传感器中，使整个器件具备良好的透气性和极佳的柔韧性，有利于人体的长时间穿戴来实时监测人体呼吸情况和人体的微弱生命体征信号。

Description

一种超快响应的透气式柔性压力传感器及其制备方法
技术领域：
本发明属于传感器技术领域，涉及一种超快响应的透气式柔性压力传感器及其制备方法。
背景技术：
传感器是能感受被测量并按照一定的规律转换成可用输出信号的器件或装置，是获取测量、测控和智能自动化***信息的重要手段。压力传感器通常由压力敏感元件和信号处理单元组成。根据信号转换机理，柔性压力传感器主要分为压电式、压阻式和电容式。基于这些柔性压力传感器的可穿戴***能够对人体重要生命体征信号进行连续、无创、实时、舒适的监测，为疾病诊断、预防和康复保健提供重要的临床信息。特别是电容式柔性压力传感器由于具有灵敏度高、响应时间短、检测范围广、迟滞小等优势，近年来被广泛应用于许多新兴可穿戴柔性电子器件，如人体运动监测设备、医疗健康设备等。
目前，常用的提高传感器灵敏度的技术是引入微结构，引入微结构可以显著提升传感器的信号强度和传感性能，但是微结构的获取方式例如硅倒膜法、光刻法、反应离子束刻蚀法等，制备工艺复杂、耗时费力，不利于大规模生产，从而限制了其广泛应用。聚二甲基硅氧烷薄膜(PDMS)和聚对苯二甲酸乙二醇酯(PET)是目前柔性压力传感器常采用的基底，但是这种基底不透气，长时间贴附皮肤会出现发炎的症状，而且这些薄膜厚度较厚时会影响传感器的灵敏度和响应时间，例如专利CN 111552381 A设计了一种在PDMS基底上镀金的电极，AgNWs/TPU(银纳米线/热塑性聚氨酯弹性体橡胶)纳米纤维膜为介电层的电容式压力传感器，可以一定程度上改善低压强状态的灵敏度，但是其响应时间慢，透气性差；专利CN110926663 A设计了一种以钯源和PAN(聚丙烯腈)纺丝的纳米纤维膜通过化学镀银得到的导电纳米纤维膜作为电极，尼龙网作为介质层的柔性电容式压力传感器，具有制备工艺简单、透气性好的优点，但是其响应时间仍没有很大改善。
发明内容：
本发明的目的在于克服现有技术中柔性压力传感器响应时间不高、透气性差、制备步骤繁琐等缺陷，设计提供一种具有超快响应时间的透气式柔性压力传感器及其制备方法。
为了实现上述目的，本发明所述超快响应的透气式柔性压力传感器包括第一PVP纳米纤维薄膜层、第二PVP纳米纤维薄膜层、第一电极层、第二电极层和PVP纳米纤维膜介质层；第一PVP纳米纤维薄膜层和第二PVP纳米纤维薄膜层相对设置；第一电极层附着在第一PVP纳米纤维薄膜层内侧；第二电极层附着在第二PVP纳米纤维薄膜层内侧，第一电极层和第二电极层之间设置有PVP纳米纤维膜介质层。
进一步的，所述第一PVP纳米纤维薄膜层、第二PVP纳米纤维薄膜层和PVP纳米纤维膜介质层均为采用聚乙烯吡咯烷酮(PVP)，利用静电纺丝得到具有微纳结构的纳米纤维膜。
进一步的，所述第一电极层和第二电极层采用银纳米颗粒或银纳米线、金、铜箔、铝箔中的一种，优先选择银纳米线。
本发明制备超快响应的透气式柔性压力传感器的具体过程为：
(1)先将1g的聚乙烯吡咯烷酮(PVP)粉末加入到5g的N,N-二甲基甲酰胺(DMF)有机溶剂中，室温下磁力搅拌12小时制得纺丝液，再将纺丝液加入注射器中，进行静电纺丝得到PVP纳米纤维膜，静电纺丝参数为：纺丝电压14kV，进液速度10mL/h，接收距离15cm，纺丝时间1h；然后将制得的PVP纳米纤维膜置于加热台于150℃温度下干燥10min，之后在UV灯下照射40min，得到第一PVP纳米纤维薄膜层；采用同样的方法制备得到第二PVP纳米纤维薄膜层；
(2)在第一PVP纳米纤维薄膜层和第二PVP纳米纤维薄膜层上分别喷涂第一电极层和第二电极层；
(3)采用步骤(1)的方法制备PVP纳米纤维膜介质层；
(4)将带有第一电极层的第一PVP柔性纳米纤维薄膜层、PVP纳米纤维膜介电层和带有第二电极层的第二PVP柔性纳米纤维薄膜层按照电极层相对的形式通过超声波键以“夹心三明治”结构进行封装，得到透气式柔性压力传感器。
本发明与现有技术相比，具有以下有益效果：一是该透气式柔性压力传感器的基底和介电层均为利用静电纺丝得到具有微纳结构的PVP纳米纤维膜，极大的简化了传统微结构的制备流程，实现了柔性压力传感器件的低成本、大面积生产的同时，由于纳米纤维薄膜的多孔结构，使得纳米纤维膜更容易受压形变，进一步提高了传感器的灵敏度(0.3kPa-1)和响应时间(～50ms)；二是将PVP纳米纤维膜运用在透气式柔性压力传感器的各个组件中，使整个器件具备良好的透气性和极佳的柔韧性，有利于人体的长时间穿戴来实时监测人体呼吸情况和人体的微弱生命体征信号。
附图说明：
图1为本发明所述超快响应的透气式柔性压力传感器的结构原理示意图。
图2为本发明所述超快响应的透气式柔性压力传感器的制备过程示意图。
图3为本发明实施例制备的透气式柔性压力传感器在不同的压强下的电容响应图，其中S为灵敏度。
图4为本发明实施例制备的透气式柔性压力传感器的响应时间图。
图5为本发明实施例制备的透气式柔性压力传感器的8000次循环测试结果图。
具体实施方式：
下面通过实施例并结合附图对本发明作进一步说明。
实施例：
本实施例所述透气式柔性压力传感器的结构如图1所示，包括第一PVP纳米纤维薄膜层、第二PVP纳米纤维薄膜层、第一电极层、第二电极层和PVP纳米纤维膜介质层；第一PVP纳米纤维薄膜层和第二PVP纳米纤维薄膜层相对设置；第一电极层附着在第一PVP纳米纤维薄膜层内侧；第二电极层附着在第二PVP纳米纤维薄膜层内侧，第一电极层和第二电极层之间设置有PVP纳米纤维膜介质层。
本实施例制备透气式柔性压力传感器的具体过程为：
(1)将1g的PVP粉末加入到5g的N,N-二甲基甲酰胺(DMF)有机溶剂中，室温下磁力搅拌12小时，制得纺丝液，将纺丝液加入注射器中，进行静电纺丝得到PVP纳米纤维膜，纺丝参数如下：纺丝电压为14kV，进液速度为10mL/h，接收距离为15cm，纺丝时间为1h；再将制得的PVP纳米纤维膜置于加热台150℃干燥10min，之后在UV灯下照射40min，得到第一PVP纳米纤维薄膜层，然后采用相同方法制备第二PVP纳米纤维薄膜层；
(2)在第一PVP纳米纤维薄膜层和第二PVP纳米纤维薄膜层上分别用一个条形喷气压缩机(IS-50，岩田)喷涂商用的AgNWs(XFJ81,XFNANO)作为第一电极层和第二电极层；在制备完第一电极层和第二电极层之后，采用铜线作为导电线，用银胶(Silver glue,SPI)与电极粘接用于测试传感器的性能。
(3)采用步骤(1)的方法制备PVP纳米纤维膜介质层；
(4)将涂有第一电极层的第一PVP纳米纤维薄膜层和涂有第二电极层的第二PVP纳米纤维薄膜层作为上下两个电极，中间层选取PVP纳米纤维膜介质层作为介电层，进行超声波键合，将三层进行组合得到透气式柔性压力传感器。
本实施例制备的柔性电容式压力传感器的工作原理为：当作为基底的第一柔性PVP纳米纤维薄膜层和第二柔性PVP纳米纤维薄膜层受到压力时，PVP纳米纤维膜介电层发生形变，分别附着于第一柔性PVP纳米纤维薄膜层和第二柔性PVP纳米纤维薄膜层内侧的第一电极层和第二电极层之间的间距随之发生变化，从而引起传感器电容值的变化，通过外引导线连接电容测试仪来检测电容值变化，进一步可反映传感器的受力情况，从而实现压力传感。
本实施例对制备的透气式柔性压力传感器进行性能测试,其结果图3-5所示,由图中可以看出,本实施例制备的透气式柔性压力传感器响应时间短,在极小压强和循环多次后仍能达到快速响应的效果。

Claims (4)

1.一种超快响应的透气式柔性压力传感器，其特征在于，包括第一PVP纳米纤维薄膜层、第二PVP纳米纤维薄膜层、第一电极层、第二电极层和PVP纳米纤维膜介质层；第一PVP纳米纤维薄膜层和第二PVP纳米纤维薄膜层相对设置；第一电极层附着在第一PVP纳米纤维薄膜层内侧；第二电极层附着在第二PVP纳米纤维薄膜层内侧，第一电极层和第二电极层之间设置有PVP纳米纤维膜介质层。
2.根据权利要求1所述超快响应的透气式柔性压力传感器，其特征在于，所述第一PVP纳米纤维薄膜层、第二PVP纳米纤维薄膜层和PVP纳米纤维膜介质层均为采用聚乙烯吡咯烷酮，利用静电纺丝得到具有微纳结构的纳米纤维膜。
3.根据权利要求2所述超快响应的透气式柔性压力传感器，其特征在于，所述第一电极层和第二电极层采用银纳米颗粒或银纳米线、金、铜箔、铝箔中的一种，优先选择银纳米线。
4.一种如权利要求3所述超快响应的透气式柔性压力传感器的制备方法，其特征在于，具体制备过程为：
(1)先将1g的聚乙烯吡咯烷酮粉末加入到5g的N,N-二甲基甲酰胺有机溶剂中，室温下磁力搅拌12小时制得纺丝液，再将纺丝液加入注射器中，进行静电纺丝得到PVP纳米纤维膜，静电纺丝参数为：纺丝电压14kV，进液速度10mL/h，接收距离15cm，纺丝时间1h；然后将制得的PVP纳米纤维膜置于加热台于150℃温度下干燥10min，之后在UV灯下照射40min，得到第一PVP纳米纤维薄膜层；采用同样的方法制备得到第二PVP纳米纤维薄膜层；
(2)在第一PVP纳米纤维薄膜层和第二PVP纳米纤维薄膜层上分别喷涂第一电极层和第二电极层；
(3)采用步骤(1)的方法制备PVP纳米纤维膜介质层；
(4)将带有第一电极层的第一PVP柔性纳米纤维薄膜层、PVP纳米纤维膜介电层和带有第二电极层的第二PVP柔性纳米纤维薄膜层按照电极层相对的形式通过超声波键以“夹心三明治”结构进行封装，得到透气式柔性压力传感器。
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