CN113785192A

CN113785192A - Sample holder, system and method

Info

Publication number: CN113785192A
Application number: CN202080022103.1A
Authority: CN
Inventors: T.A.卡斯; S.坎德尔; N.科特瓦尔; A.顾; Z.吴; W.布罗德里克
Original assignee: Carl Zeiss SMT GmbH
Current assignee: Carl Zeiss SMT GmbH
Priority date: 2019-03-20
Filing date: 2020-03-17
Publication date: 2021-12-10
Also published as: WO2020190919A1; KR20210141595A; TW202035977A; KR102564495B1

Abstract

A sample holder for holding a sample during an X-ray imaging process, the sample holder comprising: a sample placement surface on which a sample is placed for positioning the sample in a depth direction of the sample holder; a first alignment portion for aligning the sample in a width direction of the sample holder; and a second alignment portion for aligning the sample in a height direction of the sample holder.

Description

Sample holder, system and method

The present disclosure relates to a sample holder for holding a sample during an X-ray imaging procedure, a system comprising such a sample holder, and a method of performing an X-ray imaging procedure using such a sample holder.

The present application incorporates by reference in its entirety U.S. provisional patent application serial No. 62/821,090, filed on 20/3/2019 and entitled Method for imaging a region of interest of a sample using a tomography X-ray microscope (Method for imaging a region of interest of a sample using an atomic imaging X-ray microscope, microscopice, system and computer program).

3D X radiographic imaging techniques such as X-ray microscopy (XRM) and micct have established Fault Analysis (FA) tools for bridging fault isolation and Physical Fault Analysis (PFA) because they enable visualization of defects without having to destroy the device under test. In addition, these tools provide better information for FA analysts for determining the best method of PFA for root cause analysis. The advantages of lossless, high resolution imaging XRM make it an excellent choice for routine inspection of semiconductor package features such as traces, C4 bumps, and microbumps. MicroCT is also valuable, although its resolution is lower than that achievable with XRM when applied to larger sample geometries. Since XRM and micct share significant similarities, these terms will be used interchangeably in the rest of the document.

XRM setup and acquisition time have limited its extension and application beyond FA and manual measurement applications. XRM workflow improvements provide opportunities for productivity in high resolution, site-specific inspection and measurement applications to achieve the efficiency and throughput advantages of automated device processing.

In order to perform XRM, one or more samples, such as Integrated Circuit (IC) packages, need to be accurately and repeatably secured to a sample holder so that the sample remains securely held against movement in the presence of X-ray radiation. It is essential that the placement of the sample on the sample holder does not significantly change in all three spatial dimensions between different sample holders or be reused on the same sample holder.

Against this background, it is an object of the present invention to provide an improved sample holder.

Thus, a sample holder for holding a sample during an X-ray imaging process is provided. The sample holder comprises: a sample placement surface on which a sample is placed for positioning the sample in a depth direction of the sample holder; a first alignment portion for aligning the sample in a width direction of the sample holder; and a second alignment portion for aligning the sample in a height direction of the sample holder.

Due to the fact that the sample holder has a sample placement surface and two alignment portions, the sample can be accurately and repeatably positioned in all three spatial directions. Thus, the sample remains securely held against movement in the presence of X-ray radiation. The placement of the sample does not vary significantly in the three spatial directions between different sample holders or is reused on the same sample holder.

The X-ray imaging procedure is preferably XRM. The sample may be an electronic device, in particular an IC package. The sample placement surface is preferably a flat surface of the sample holder on which the sample can be placed. The aligning sections are preferably strip-shaped and arranged on two different edges of the sample placement surface. The sample placement surface is preferably rectangular. The sample placement surface can be easily adapted to samples of different sizes. The sample placement surface is in particular a plane defined by a width direction and a height direction.

The first alignment portion extends in a height direction. The second alignment portion extends in the width direction. The first alignment portion may be referred to as a vertical ledge (ridge). The second alignment portion may be referred to as a horizontal ledge. In use of the sample holder, a first edge of the sample abuts the first alignment portion and a second edge of the sample abuts the second alignment portion. Thus, the sample is guided by the alignment portion into a corner of the sample receiving section of the sample holder. In a front view of the sample placement surface, the corner is the lower right corner of the sample receiving section. The alignment part may also be used as an X-ray alignment marker, in particular as a so-called fiducial point.

The sample holder preferably has a coordinate system with a first spatial direction or x-direction, a second spatial direction or y-direction and a third spatial direction or z-direction. The spatial directions are arranged perpendicular to each other. The z direction is to be understood as the depth direction. The x-direction is to be understood as the width direction. The y-direction is to be understood as height direction.

The sample may be placed on the sample holder as follows. In the first step, a sample is placed on the sample placement surface to position the sample in the depth direction of the sample holder. In a second step, the sample is abutted on the first alignment part for aligning the sample in the width direction of the sample holder. In a third step, the sample is abutted on the second alignment part for aligning the sample in the height direction of the sample holder. The above steps may be performed simultaneously or sequentially. The third step may be performed after the second step and vice versa.

According to one embodiment, the first alignment portion is arranged perpendicular to the sample placement surface, wherein the second alignment portion is arranged perpendicular to the sample placement surface and perpendicular to the first alignment portion.

The sample placement surface, the first alignment portion and the second alignment portion in this way form a box-shaped sample receiving section which receives and aligns the sample in all three spatial directions. Preferably, the sample receiving section is open on two sides, while the other two sides are closed by alignment portions serving as side walls of the sample receiving section.

According to other embodiments, a cut is placed at the intersection of the first and second alignment portions.

Preferably, the cut-out is circular. The cutout may be a bore located at the intersection of two aligned sections. The notch receives a corner of the sample.

According to other embodiments, the sample holder further comprises a fixing element for pressing the sample against the sample placement surface, the first alignment portion and the second alignment portion.

The securing element allows the user to apply a sufficient holding force between the sample and the sample holder. When using the sample holder, time is saved by the quick assembly, quick disassembly and assembly of the sample by the fixing element. Since no adhesive is used to secure the sample to the sample holder, there is no need to clean the sample and/or sample holder. The fixing element can be used several times.

According to other embodiments, the fixing element extends diagonally over the sample placement surface.

By "diagonally" is meant that the fixing element extends between two laterally opposite corners of the sample placement surface. Thus, the fixing element also extends diagonally over the sample, thus fixing it firmly to the sample holder.

According to other embodiments, the fixation element is made of a flexible and radiation stable material, in particular of ethylene propylene diene monomer.

Thus, the fixation element is flexible or elastic. In other words, the fixation element may be stretched. The fixation elements may be referred to as elastic fixation elements. The securing element may be an O-ring.

According to other embodiments, the sample holder further comprises a first hook portion and a second hook portion, wherein the securing element is hooked into the first hook portion and the second hook portion.

The first hook portion and the second hook portion are preferably arranged at two opposite corners of the sample placement surface.

According to other embodiments, the sample placement surface is disposed between the first hook portion and the second hook portion.

The hook portion is diagonally arranged so that the securing element extends diagonally over the sample and secures it to the sample holder.

According to other embodiments, the sample holder further comprises a rear surface arranged opposite the sample placement surface, wherein the first hook portion has a first recess (notch) provided in the rear surface for receiving the fixing element, and wherein the second hook portion has a second recess (notch) provided in the rear surface for receiving the fixing element.

In this way good retention of the fixing element is ensured. Thereby preventing the fixing element from slipping off the hook portion.

According to other embodiments, the first hook portion is arranged flush with the sample placement surface, wherein the second hook portion protrudes from the sample placement surface in the depth direction.

This results in the fixing element extending obliquely with respect to the sample placement surface. This ensures that the sample is firmly pressed against the sample placement surface and the alignment portion. By "flush" is meant that the first hook portion does not protrude above the sample placement surface.

According to other embodiments, the sample holder further comprises a sample receptacle having a plurality of sample receiving sections, wherein each sample receiving section has a sample placement surface, a first alignment portion and a second alignment portion.

The number of sample receiving sections may be arbitrary. For example, three sample receiving sections are provided. Each sample receiving section is capable of receiving one sample. Each sample receiving section has a securing element. The sample receiving sections are arranged in columns when viewed in the height direction.

According to other embodiments, the sample receptacle is integrally formed.

The phrase "integrally formed" refers to a structure formed from the same material or materials using a single, continuous process. For example, when a three-dimensional printer is used to form the sample receptacle, the three-dimensional printer may emit the same material or materials during the printing process to form the sample receptacle as a single piece. The sample receptacle is preferably made of a material that allows radiation to pass easily through the sample receptacle. The material used to make the sample receptacle may include aluminum, glassy carbon, glass fiber filled epoxy, or other low attenuation and structurally stable materials.

According to other embodiments, the sample holder further comprises a rod to which the sample receptacle is attached and a chuck to which the rod is attached, wherein the rod is secured to the chuck in a form-locking (form-locking) manner by a keyed connection.

The rod may be made of aluminum or any other suitable material. The rod preferably has a circular cross-section. The sample receptacle may be attached to the rod by a fixing element such as a screw. In addition, a pinned connection between the sample receptacle and the rod may be provided. The pin connection includes an alignment pin and two bores for receiving the alignment pin. A bore is provided at the sample receptacle and a bore is provided at the stem. The chuck is adapted to be held by a gripper or robot. The chuck has a central bore that receives the end of the rod. The sample holder further comprises a base plate to which the chuck is attached. A "form-locking" connection may be created by two elements engaging and blocking each other. The post may have a keyway for receiving a key, in particular a woodruff key. The central bore of the chuck has a recess for receiving the key. The key connection securely prevents the rod from rotating relative to the chuck.

Further, a system for performing an X-ray imaging procedure is provided. The system comprises a radiation source emitting radiation, a radiation detector receiving the radiation emitted from the radiation source, and at least one sample holder as explained before, wherein the sample holder is arranged between the radiation source and the radiation detector.

The system is preferably an XRM system. The system may have a plurality of sample holders. Each sample holder may hold a plurality of samples. The sample holder holds at least one sample. In particular, the radiation detector receives or detects radiation that passes through the sample and the sample holder.

Furthermore, a method of performing an X-ray imaging procedure using such a sample holder is provided. The method comprises the following method steps: a) placing a sample on the sample holder, b) emitting radiation by a radiation source, and c) receiving radiation passing through the sample by a radiation detector.

In particular, the radiation also passes through the sample holder. Method steps a) to c) may all be carried out simultaneously or in succession. During the execution of the X-ray imaging procedure, the sample holder with one or more samples is preferably rotated stepwise into a plurality of positions. In each position, at least one X-ray image is taken. All collected X-ray images together form a three-dimensional data set of the sample, in particular of a region of interest of the sample.

Features disclosed for the sample holder apply to the system and method, and vice versa.

Other possible implementations or alternative solutions of the disclosure also encompass combinations of features described above or below with respect to the embodiments, which are not explicitly mentioned here. Those skilled in the art will also add individual or isolated aspects and features to the most basic forms of the disclosure.

Other embodiments, features, and advantages of the present disclosure will become apparent from the subsequent description and the appended claims, taken in conjunction with the accompanying drawings, in which:

FIG. 1 shows a schematic perspective view of a first embodiment of a sample holder;

fig. 2 shows a schematic exploded view of the sample holder according to fig. 1;

FIG. 3 shows a schematic cross-sectional view of the sample holder according to FIG. 1;

FIG. 4 shows a schematic perspective view of one embodiment of a sample receptacle for the sample holder according to FIG. 1;

FIG. 5 shows a schematic front view of the sample receptacle according to FIG. 4;

FIG. 6 shows a schematic rear view of the sample receptacle according to FIG. 4;

FIG. 7 shows a schematic cross-sectional view of a sample receptacle according to the intersection line VII-VII of FIG. 5; and

fig. 8 shows a schematic block diagram of an embodiment of a method of performing an X-ray imaging procedure using a sample holder according to fig. 1.

In the drawings, like reference numbers indicate identical or functionally equivalent elements unless otherwise indicated.

Fig. 1 shows a schematic perspective view of an embodiment of a sample holder 100 for holding a sample (not shown) during X-ray imaging, in particular X-ray CT imaging, of the sample. Fig. 2 shows an exploded view of the sample holder 100. Fig. 3 shows a cross-sectional view of the sample holder 100. In the following, reference is made simultaneously to fig. 1 to 3.

In particular, sample holder 100 is used for high resolution 3D X Radiation Microscopy (XRM) of interconnects of semiconductor packages. The sample holder 100 has a base plate 102. The base plate 102 has a flat cylindrical shape and is provided with a transverse flat piece 104. The base plate 102 also has an upper side 106 and a lower side 108. The

sides

106, 108 are arranged parallel to each other. The base plate 102 has a stepped bore 110 centrally disposed in the base plate 102. A bore 110 extends through the base plate 102. Other stepped bores 112 are provided in the base plate 102. The number of boreholes is arbitrary. For example, three bores 112 are provided.

Fixation elements

114, 116 are contained within the

bores

110, 112. The

fixation elements

114, 116 may be screws. The underside 108 rests on a table (not shown). The stage can move the sample holder 100 laterally in a first spatial direction or x-direction x, a second spatial direction or y-direction y, and a third spatial direction or z-direction z. Hereinafter, the x-direction x is referred to as the width direction of the sample holder 100, the y-direction y is referred to as the height direction of the sample holder 100, and the z-direction z is referred to as the depth direction of the sample holder 100. The stage may also rotate the sample holder 100 about the height direction y. The base plate 102 is preferably made of metal. The base plate 102 may be made of aluminum, steel, or other suitable material.

The sample holder 100 also includes a chuck 118. The flat cylindrical shape of the chuck 118 has an upper side 120 and a lower side 122. The

sides

120, 122 are arranged parallel to each other. The lower side 122 rests on the upper side 106 of the base plate 102. The chuck 118 is laterally flat on both sides. One side has a recess 124 and the other side has a tapered hole 126. The recess 124 and bore 126 may be used to grip the sample holder 100 by a gripping robot (not shown).

The clamp plate 118 has a plurality of threaded bores 128, and the securing members 116 are threaded into the threaded bores 128 to secure the clamp plate 118 to the base plate 102. The bore 128 may extend through the chuck 118. The chuck 118 includes a central bore 130 extending through the chuck 118. The bore 130 is provided with a recess 132 extending in the height direction y. The chuck 118 is made of metal. Preferably, the chuck 118 is made of aluminum. The chuck 118 may also be made of steel or other suitable material.

The rod 134 is received in the bore 130. The rod 134 has a keyway 136 that receives a key 138. The key 138 is a woodruff key. The key 138 engages the notch 132 of the chuck 118 and prevents relative rotation of the rod 134 toward the chuck 118. The rod 134 is secured to the base plate 102 by a securing element 114, the securing element 114 being threaded into a central bore 140 of the rod 134. Other keys may also be used in place of the woodruff key 138.

The rod 134 is preferably made of metal. The rod 134 may be made of aluminum. Opposite the keyway 136, the lateral flat 142 of the rod 134 has two threaded

bores

144, 146. The

bores

144, 146 receive

fixation elements

148, 150. The

fixation elements

148, 150 may be screws. Between the bores 144, 146 a further bore 152 is arranged. Bore 152 receives an alignment pin or pin 154. The sample holder 100 has a source side 156 facing the radiation source 500, in particular an X-ray source, and a detector side 158 facing the radiation detector 600, in particular an X-ray detector. The radiation source 500 emits radiation 502, in particular X-rays. The radiation detector 602 detects radiation 504 that passes through the sample holder 100 and a sample placed in the sample holder 100. Sample holder 100, radiation source 500 and radiation detector 600 are part of a system 1000 for performing an X-ray imaging procedure, in particular an XRM procedure. System 1000 is an XRM system or an X-ray CT system.

The sample holder 100 includes a sample receptacle 200 secured to the rod 134 by an alignment pin 154 and securing

elements

148, 150. The sample receptacle 200 is shown in different views in fig. 4-7. In the following, reference is made simultaneously to fig. 4 to 7.

The sample receptacle 200 is made of a material that allows the radiation 502 to pass easily through the sample receptacle 200. For example, the sample receptacle 200 may be formed from a polymeric material, such as plastic. In this regard, the sample receptacle 200 may be formed using a three-dimensional printing device ("3D printer"), allowing the sample receptacle 200 to include a variety of customizable sizes and shapes to carry a variety of samples. "three-dimensional printer" refers to a printing device that emits polymeric material to form a three-dimensional structure.

However, the sample receptacle 200 may be formed by other methods. For example, the sample receptacle 200 may comprise a polymeric material that is injection molded into a mold cavity that defines the size and shape of the sample receptacle 200. Further, the sample receptacle 200 may be formed from a block of polymeric or metallic material that is subjected to a material removal process. The materials used to produce the sample receptacle 200 may include aluminum, glassy carbon, glass fiber filled epoxy, or other low attenuation and structurally stable materials.

The sample receptacle 200 is preferably integrally formed. The sample receptacle 200 is rod-shaped and has a base portion 202 secured to the rod 134. The base portion 202 has two stepped

bores

204, 206 for receiving the fixing

elements

148, 150 and one hole 208 for receiving the alignment pin 154. Alignment pins 154 are used to accurately position sample receptacle 200 at rod 134. The securing

elements

148, 150 are used to attach the sample receptacle 200 to the rod 134.

The sample receptacle 200 includes a plurality of

sample receiving sections

210, 212, 214. The number of

sample receiving sections

210, 212, 214 may be arbitrary. For example, three

sample receiving sections

210, 212, 214 are provided. Depending on the scanning range of the system 1000, the sample receptacle 200 may accommodate more or fewer

sample receiving sections

210, 212, 214. Each

sample receiving section

210, 212, 214 is capable of receiving one sample 300 (see fig. 5). The sample 300 may be an electronic device such as an integrated circuit. The

sample receiving sections

210, 212, 214 are arranged in columns when viewed in the height direction y. The

sample receiving sections

210, 212, 214 are attached to each other. The

sample receiving sections

210, 212, 214 are integrally formed. All

sample receiving sections

210, 212, 214 have the same technical features. For this reason, reference is made below only to the sample receiving section 214.

The sample receiving section 214 is generally plate-like and has a sample placement surface 216 and a rear surface 218. In use of sample holder 100, sample placement surface 216 is oriented toward radiation detector 600 and back surface 218 is oriented toward radiation source 500. The sample 300 is placed on the sample placement surface 216. The sample receiving section 214 has a first alignment portion 220 and a second alignment portion 222. When the sample 300 is placed on the sample placement surface 216, the sample 300 may be positioned in the depth direction z. However, the sample holder 100 may be placed such that the sample placement surface 216 faces the radiation source 500 and the back surface 218 faces the radiation detector 600. Thus, the sample 300 may be positioned facing the radiation detector 600 or facing the radiation source 500.

The first alignment portion 220 extends in the height direction y and is capable of positioning the sample 300 in the width direction x. The first alignment portion 220 is a vertical ledge or may be referred to as a vertical ledge (ridge). The second alignment portion 222 extends in the width direction x and is capable of positioning the sample 300 in the height direction y. The second alignment portion 222 is a horizontal ledge or may be referred to as a horizontal ledge. The

alignment portions

220, 222 are arranged perpendicular to each other. The

alignment portions

220, 222 may also serve as X-ray alignment markers, in particular as so-called fiducials.

The sample 300 may have four

side edges

302, 304, 306, 308. When the sample 300 is placed on the sample placement surface 216, the two

edges

306, 308 of the sample 300 are guided along the first and

second alignment portions

220, 222 until the sample 300 is positioned at the lower right corner of the sample receiving section 214 (see fig. 5). Thus, with the sample placement surface 216 and the two

alignment portions

220, 222, the sample receiving section 214 is able to position the sample 300 in all three spatial directions x, y, z. Other alignment portions may be used such that the origin of the sample 300 is elsewhere than in the lower right-hand corner of the sample receiving section 214.

A circular cutout 224 is disposed where the

alignment portions

220, 222 intersect. The cutout 224 receives a corner of the sample 300. The sample placement surface 216 may be defined by an upper edge 226. The sample receiving section 210 does not have such an upper edge 226. A circular cutout 228 is provided where the upper edge 226 and the first alignment portion 220 intersect with each other.

The sample receiving section 214 further comprises a diagonally disposed first hook portion 230 and a second hook portion 232. On the rear surface 218, each

hook portion

230, 232 has a

notch

234, 236. The first hook portion 230 has a first notch 234. The second hook portion 232 has a second notch 236. The

hook portions

230, 232 are capable of receiving a resilient securing element 400 (see fig. 5). The secondary hook portion 232 is disposed between two

notches

238, 240 that extend through the

alignment portions

220, 222. The securing element 400 passes through the

notches

238, 240. The sample 300 may be pressed against the sample placement surface 216 and the

alignment portions

220, 222 by the securing element 400.

On the rear surface 218, the fixing element 400 passes through the

notches

234, 236. The fixing member 400 may be an O-ring. The fixation element 400 is made of a flexible and radiation stable material. For example, the fixing member 400 may be made of Ethylene Propylene Diene Monomer (EPDM). By means of the fixing element 400, the sample 300 can be easily fixed to the sample holder 100 in a non-permanent manner. The securing element 400 applies a securing force to mate the sample 300 against the sample placement surface 216 and the

alignment portions

220, 222.

The function of the sample holder 100 is as follows. In a first step, a sample 300 is placed on the sample placement surface 216 for positioning the sample 300 in the depth direction z of the sample holder 100. In the second step, the sample 300 is abutted on the first alignment portion 220 to align the sample 300 in the width direction x of the sample holder 100. In the third step, the sample 300 is abutted on the second alignment portion 222 to align the sample 300 in the height direction y of the sample holder 100. The third step may be performed after the second step, or vice versa. The steps can be executed simultaneously or sequentially. In particular, the last two steps may be performed by applying the fixing element 400. In other words, the fixing member 400 presses the sample 300 against the aligning

sections

200, 222. Alternatively, the fixing member 400 may be applied after performing the alignment of the sample 300.

A sample 300 is placed on each

sample receiving section

210, 212, 214. The sample 300 is aligned on the sample placement surface 216 of each

sample receiving section

210, 212, 214 by the

alignment portions

220, 222. The fixing element 400 is hooked into the

hook portion

230, 232 of each

sample receiving section

210, 212, 214 before or after aligning the sample 300. The securing element 400 presses the sample 300 against the sample placement surface 216 and the

alignment portions

220, 222. Thus, a safe and reproducible positioning of the sample 300 is ensured. After the sample 300 is fixed, the X-ray scanning procedure is completed. Preferably, a plurality, e.g. fourteen, of the sample holders 100 are provided with samples 300. These sample holders 100 may be tested sequentially in the system 1000. Thereby significantly reducing operator setup time.

With the aforementioned sample holder 100, one or more samples 300, particularly IC packages, for X-ray imaging can be accurately and repeatably secured such that the sample 300 or samples 300 remain securely held and do not move in the presence of radiation 502. The placement of one or more samples 300 does not vary significantly between different sample holders 100 in the three spatial directions x, y, z or is reused on the same sample holder 100.

The sample holder 100 allows for the efficiency of repeated X-ray CT imaging of similar samples 300 that is optimized for maximum throughput, ease of use, and does not alter the physical sample 300. The sample holder 100 thus enables automation of an X-ray CT imaging workflow. The sample holder 100 supports high resolution imaging during exposure to radiation 502, in particular X-rays, during 3D tomography. Significant degradation of the sample holder 100 and its components over time will be expected due to the materials used for the sample holder 100 and the fixing element 400. The sample holder 100 is advantageously adapted to hold the sample 300 vertically. The securing element 400 allows the user to apply a sufficient holding force between the sample 300 and the sample receptacle 200.

The radiation-resistant material used for the fixation element 400 enables long life and stability to accommodate high resolution X-ray imaging. As previously mentioned, EPDM rubber is a suitable material for the fixation element 400. The sample holder 100 is capable of accurately and repeatably positioning the sample 300 on the sample holder 100, with the positioning being accomplished by the

alignment portions

220, 222. With sample holders 100, each sample holder 100 can hold one or more samples 300. The sample holder 100 is designed for repeatable sample mounting accuracy on the sample holder 100, particularly for sample-to-sample, holder-to-holder, and holder-to-system.

No tools are required for holding the sample 300. This simplifies installation. The sample holder 100 is optimized for maximum X-ray imaging throughput. This is accomplished by using a low attenuation material and minimal profile depth of the sample receptacle 200. The sample holder 100 does not damage or modify the sample 300 to be held and scanned. The sample holder 100 is preferably made entirely of a non-magnetic material. Therefore, the sample holder 100 does not affect the X-ray.

A thermally stable material is used for the sample holder 100. The material thermal expansion coefficient is suitable for the highest resolution scan. The key 138 enables accurate and repeatable assembly of the sample holder 100. The key 138 ensures that the sample 300 maintains a repeatable angular orientation in the X-ray beam path. The sample holder 100 may be optimized in shape to optimize X-ray transmission. This can be done by using a cut. Registration features, so-called fiducials, may be added to the sample holder 100 for alignment thereof. Unique identifiers, such as bar codes, may be added for automatically identifying the sample holder 100 and the sample 300. Furthermore, laser engraved identifiers may be used.

The sample holder 100 has a telescoping design that can be easily customized for each new sample geometry. The CAD model of the sample holder 100 can be used as an input to avoid collision guidance on the instrument. The sample holder 100 may be packaged with a 3D printer and a library of design templates. The scalable design allows one to quickly create new designs with minimal effort to optimize fast X-ray imaging of samples 300 having slightly different geometries.

When using the sample holder 100, time is saved by quickly assembling and disassembling the sample 300. Because no adhesive is used, there is no need to clean the sample 300 and/or the sample holder 100. It is easier to locate a region of interest on the sample 300 for X-ray imaging because the sample 300 is placed in a repeatable position on the sample holder 100. This position is defined by the design of the sample receptacle 200. The manual alignment step of the sample 300 may instead be automated. Higher imaging throughput can be achieved due to the precise positioning of the sample 300, and the need for failed scans and re-imaging is less likely. Built-in features of the sample holder 100, such as the

alignment portions

220, 222, may be used as fiducial marks for alignment in an automated protocol. This improves the X-ray scan positioning accuracy of all samples 300, saving time and labor to rescan or place manual fiducial markers.

FIG. 8 shows a block diagram of one embodiment of a method of performing an X-ray imaging procedure using sample holder 100. The X-ray imaging process is a repetitive 3D imaging and/or measurement process. In method step S1, the sample 300 is placed on the sample holder 100 as described above. A plurality of samples 300 may be attached to the sample holder 100 by a plurality of fixing elements 400. In method step S2, radiation 502 is emitted by radiation source 500. In method step S3, radiation 504 that has passed through the sample 300 is received by the radiation detector 600.

Method steps S1 to S3 may all be performed simultaneously or in sequence. During the performance of an X-ray imaging procedure, the sample holder 100 with one or more samples 300 is rotated stepwise into a plurality of positions. At each position, at least one X-ray image is taken. All collected X-ray images together form a three-dimensional data set of the sample 300, in particular of a region of interest of the sample 300.

While the present disclosure has been described in terms of preferred embodiments, it will be apparent to those skilled in the art that modifications may be made in all embodiments.

Claims

1. A sample holder for holding a sample during X-ray imaging, the sample holder comprising:

a sample placement surface on which the sample is placed for positioning the sample in a depth direction of the sample holder,

a first aligning portion for aligning the sample in a width direction of the sample holder, an

A second alignment portion for aligning the sample in a height direction of the sample holder.

2. The sample holder of claim 1, wherein the first alignment portion is arranged perpendicular to the sample placement surface, and wherein the second alignment portion is arranged perpendicular to the sample placement surface and perpendicular to the first alignment portion.

3. The sample holder of claim 1, wherein a notch is placed at the intersection of the first and second alignment portions.

4. The sample holder of claim 1, further comprising a securing element for pressing the sample against the sample placement surface, the first alignment portion, and the second alignment portion.

5. The sample holder of claim 4, wherein the securing element extends diagonally across the sample placement surface.

6. Sample holder according to claim 4, wherein the fixing element is made of a flexible and radiation stable material, in particular of ethylene propylene diene monomer.

7. The sample holder of claim 4, further comprising a first hook portion and a second hook portion, wherein the securing element is hooked into the first hook portion and the second hook portion.

8. The sample holder of claim 7, wherein the sample placement surface is disposed between the first and second hook portions.

9. The sample holder of claim 7, further comprising a back surface disposed opposite the sample placement surface, wherein the first hook portion has a first notch provided in the back surface for receiving the securing element, and wherein the second hook portion has a second notch provided in the back surface for receiving the securing element.

10. The sample holder according to claim 7, wherein the first hook portion is arranged flush with the sample placement surface, and wherein the second hook portion protrudes from the sample placement surface in the depth direction.

11. The sample holder of claim 1, further comprising a sample receptacle having a plurality of sample receiving sections, wherein each sample receiving section has a sample placement surface, a first alignment portion, and a second alignment portion.

12. The sample holder of claim 11, wherein the sample receptacle is integrally formed.

13. The sample holder of claim 11, further comprising a rod attached to the sample receptacle and a chuck attached to the rod, the rod being form-lockingly secured to the chuck by a keyed connection.

14. A system for performing an X-ray imaging procedure, the system comprising a radiation source that emits radiation, a radiation detector that receives radiation emitted from the radiation source, and at least one sample holder according to claim 1,

wherein the sample holder is arranged between the radiation source and the radiation detector.

15. A method of performing an X-ray imaging procedure using the sample holder of claim 1, the method comprising the method steps of:

a) placing the sample on the sample holder,

b) emitting radiation by a radiation source, an

c) Radiation passing through the sample is received by a radiation detector.