CN113745407B - Acid-induced color electron transfer layer, acid-induced color organic solar cell integrated device and preparation method - Google Patents
Acid-induced color electron transfer layer, acid-induced color organic solar cell integrated device and preparation method Download PDFInfo
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- 239000002253 acid Substances 0.000 title claims abstract description 70
- 238000002360 preparation method Methods 0.000 title abstract description 11
- 230000027756 respiratory electron transport chain Effects 0.000 title description 3
- 239000000758 substrate Substances 0.000 claims abstract description 53
- 230000005525 hole transport Effects 0.000 claims abstract description 43
- 229920000642 polymer Polymers 0.000 claims abstract description 28
- -1 coumarin oxazoline Chemical compound 0.000 claims abstract description 25
- 230000008859 change Effects 0.000 claims abstract description 23
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N coumarin Chemical compound C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 claims description 16
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 15
- 238000000151 deposition Methods 0.000 claims description 15
- 238000004528 spin coating Methods 0.000 claims description 13
- 238000001035 drying Methods 0.000 claims description 9
- IMSODMZESSGVBE-UHFFFAOYSA-N 2-Oxazoline Chemical compound C1CN=CO1 IMSODMZESSGVBE-UHFFFAOYSA-N 0.000 claims description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 229920000144 PEDOT:PSS Polymers 0.000 claims description 8
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 claims description 8
- 229960000956 coumarin Drugs 0.000 claims description 8
- 235000001671 coumarin Nutrition 0.000 claims description 8
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 6
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- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
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- 238000003916 acid precipitation Methods 0.000 abstract description 2
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- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/657—Polycyclic condensed heteroaromatic hydrocarbons
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/657—Polycyclic condensed heteroaromatic hydrocarbons
- H10K85/6574—Polycyclic condensed heteroaromatic hydrocarbons comprising only oxygen in the heteroaromatic polycondensed ring system, e.g. cumarine dyes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Abstract
The invention discloses an acid-induced color change organic solar cell integrated device, which comprises a transparent conductive substrate, a hole transport layer, a polymer active layer, an indolo [2,1-b ] coumarin oxazoline film layer and a top electrode; the transparent conductive substrate comprises a first part substrate and a second part substrate; the indolo [2,1-b ] coumarin oxazoline film layer is divided into two parts; one part is an electron transport layer, and the other part is an acid electrochromic layer; the hole transport layer and the polymer active layer are sequentially laminated on the first part of the substrate; the electron transport layer is stacked on the polymer active layer; the acid color change layer is laminated on the second part of the substrate; the top electrode is disposed on the electron transport layer. The invention also discloses a preparation method of the integrated device and an acid-induced color electron transport layer. The acid-induced color change organic solar cell integrated device provided by the invention not only can provide electric energy for a load, but also can sensitively respond to acid rain, and is simple in structure and simple in preparation method.
Description
Technical Field
The invention relates to the field of organic solar cells, in particular to an acid-induced color change electronic transmission layer, an acid-induced color change organic solar cell integrated device and a preparation method.
Background
Due to the continuous combustion and large-scale consumption of fossil energy, not only the greenhouse effect and the environmental pollution problem can be generated, but also the life of human beings is seriously endangered. Solar energy is taken as a renewable, pollution-free and abundant green energy source, and becomes the first choice for solving the energy problem. The organic solar cell can directly convert light energy into electric energy, has the advantages of light weight, translucency, low cost, large-scale preparation and the like, and is widely favored by scientific researchers. In the last thirty years, the photoelectric conversion efficiency of the organic solar cell has been improved from less than 1% to 18%, and the organic solar cell has a wide application prospect. Traditional organic solar cells can only convert solar energy into electrical energy, and single functionality limits the development of diversity. How to further develop a multifunctional organic solar cell while maintaining its high photoelectric conversion efficiency is a very urgent problem, which will effectively accelerate its wide application. However, the development of the diversity of organic solar cells is very limited.
Disclosure of Invention
In order to overcome the defects and shortcomings of the prior art, the invention aims to provide the acid-induced color change organic solar cell integrated device which not only can provide electric energy for a load, but also can sensitively respond to acid rain and has a simple structure.
The invention further aims to provide a preparation method of the acid-induced color change organic solar cell integrated device, which is simple and low in production cost.
It is still another object of the present invention to provide an acid-chromic electron transport layer.
The aim of the invention is achieved by the following technical scheme:
an acid-induced color change organic solar cell integrated device comprises a transparent conductive substrate, a hole transport layer, a polymer active layer, an indolo [2,1-b ] coumarin oxazoline film layer and a top electrode; the acid indolo [2,1-b ] coumarin oxazoline film layer is used as an electron transport layer and an acid color change layer at the same time;
the indolo [2,1-b ] coumarin oxazolines have the following structural formula:
preferably, the method comprises the steps of,
the thickness of the acid color changing layer is 5-500 nm;
the thickness of the hole transport layer is 20-100 nm;
the thickness of the polymer active layer is 50-300 nm.
Preferably, the acid-induced color change organic solar cell integrated device comprises a transparent conductive substrate, a hole transport layer, a polymer active layer, an indolo [2,1-b ] coumarin oxazoline film layer and a top electrode;
the transparent conductive substrate comprises a first part of substrate and a second part of substrate;
the indolo [2,1-b ] coumarin oxazoline film layer is divided into two parts; one part is an electron transport layer, and the other part is an acid electrochromic layer;
the hole transport layer and the polymer active layer are sequentially laminated on the first part of the substrate; the electron transport layer is stacked on the polymer active layer; the acid-induced color layer is stacked on the second part of the substrate;
the top electrode is disposed over the electron transport layer.
Preferably, the thickness of the top electrode of the acid-induced color organic solar cell integrated device is 20-200 nm.
Preferably, the acid-induced color change organic solar cell integrated device comprises a transparent conductive substrate, a hole transport layer, a polymer active layer, an indolo [2,1-b ] coumarin oxazoline film layer and a top electrode from bottom to top.
Preferably, the thickness of the top electrode of the acid-induced color organic solar cell integrated device is 5-20 nm.
The method for integrating the acid-induced color organic solar cell device comprises the following steps:
(1) Pretreating a transparent conductive substrate;
(2) After covering the second part of the substrate by using a shielding object, depositing a hole transport layer on the surface of the first part of the substrate;
(3) Depositing a polymer active layer on the hole transport layer;
(4) After removing the mask, spin-coating indolo [2 ] on the polymer active layer and the second part of the substrate,1-b]Coumarin oxazoline film layer: indolo [2,1-b ]]Coumarin oxazoline is dissolved in absolute methanol solution, and the concentration is 0.8-1.2 mg/ml; then, at 5×10 -4 Drying for 1-2 hours in a high vacuum environment below Pa;
(5) A top electrode is prepared over the acid-chromic layer.
Preferably, the pretreatment of the transparent conductive substrate in step (1) specifically includes:
sequentially placing the transparent conductive substrate in acetone, deionized water and alcohol, sequentially carrying out ultrasonic treatment for 20-30 minutes, then drying by high-purity nitrogen, and then treating for 5-6 minutes by adopting an ultraviolet ozone plasma cleaner;
preferably, the depositing a hole transport layer in step (2) specifically includes:
spin-coating a hole transport layer PEDOT: PSS on the surface of the first part of the substrate by adopting a spin coater; then carrying out annealing treatment on the cavity transmission layer PEDOT and PSS, wherein the temperature is 140-160 ℃ and the time is 12-18 minutes;
preferably, the shielding object in the step (2) is a transparent adhesive tape;
preferably, the depositing a polymer active layer on the hole transport layer in step (3), specifically:
mixing PM6 and Y6 in a mass ratio of (1-1.2), dissolving the mixture in a solvent to form an active layer solution, wherein the concentration is 8-12 mg/ml; spin-coating the dissolved active layer solution on a hole transport layer PEDOT: PSS, controlling the thickness of the active layer to be 100-150 nm, and standing for 18-20 minutes.
The preparation method of the acid-induced color organic solar cell integrated device comprises the following steps:
(1) Pretreating a transparent conductive substrate;
(2) Depositing a hole transport layer on the surface of the transparent conductive substrate;
(3) Depositing a polymer active layer on the hole transport layer;
(4) Spin coating an acid-electrochromic layer on the polymer active layer: indolo [2,1-b ]]Coumarin oxazoline is dissolved in absolute methanol solution, and the concentration is 0.8-1.2 mg/ml; then, at 5×10 -4 Drying for 1-2 hours in a high vacuum environment below Pa;
(5) A top electrode is prepared over the acid-chromic layer.
An acid-induced color electron transfer layer is prepared from indolo [2,1-b ] coumarin oxazoline material; the acid-induced color electron transport layer serves as both an electron transport layer and an acid-induced color layer.
According to the acid-induced color change organic solar cell integrated device, the indolo [2,1-b ] coumarin oxazoline is used as an electron transmission layer, and meanwhile, the acid-induced color change organic solar cell integrated device is used as an acid-induced color change film layer to realize the dual functions of environmental acid PH value monitoring and solar photoelectric conversion; the acid-induced color change film layer can detect the acidity of the liquid attached to the film, the color is spontaneously changed, and the solar cell can generate relatively stable electric energy for load use.
The color change reaction principle of the indolo [2,1-b ] coumarin oxazoline is specifically shown as the following formula:
compared with the prior art, the invention has the following advantages and beneficial effects:
(1) The acid-induced color change organic solar cell integrated device realizes the integration of the solar cell and the acid-induced color change device, the acid-induced color change film layer can detect the acid size of liquid attached to the film, the color can be spontaneously changed, and the solar cell can generate relatively stable electric energy for load use.
(2) The preparation method of the acid-induced color organic solar cell integrated device is simple, can be used for preparing the acid-induced color organic solar cell integrated device by adopting a large-area low-cost coating technology industrially, and has good application prospect.
Drawings
Fig. 1 is a schematic structural diagram of an integrated device of an acid-chromic organic solar cell according to an embodiment of the invention.
Fig. 2 is a J-V curve of different organic solar cells of an embodiment of the invention under AM1.5 standard simulated sunlight.
FIG. 3 is a graph showing the transmittance spectrum of an acid-chromic layer according to an embodiment of the invention in response to different pH discoloration.
Detailed Description
The present invention will be described in further detail with reference to examples, but embodiments of the present invention are not limited thereto.
Example 1
As shown in fig. 1, the acid-induced color change organic solar cell integrated device of the embodiment comprises a transparent conductive substrate 1, a hole transport layer 2, a polymer active layer 3, an indolo [2,1-b ] coumarin oxazoline film layer 4 and a top electrode 5; the transparent conductive substrate comprises a first part of substrate and a second part of substrate; the indolo [2,1-b ] coumarin oxazoline film layer is divided into two parts; one part is an electron transport layer, and the other part is an acid electrochromic layer; the hole transport layer and the polymer active layer are sequentially laminated on the first part of the substrate; the electron transport layer is stacked on the polymer active layer; the acid-induced color layer is stacked on the second part of the substrate; the top electrode is disposed over the electron transport layer.
The acid-induced color layer is prepared from an indolo [2,1-b ] coumarin oxazoline material, and the indolo [2,1-b ] coumarin oxazoline has the following molecular structure:
the principle of the color-changing reaction of the indolo [2,1-b ] coumarin oxazoline is shown in the following formula:
the preparation method of the acid-induced color organic solar cell integrated device of the embodiment is as follows:
(1) Pretreatment of the transparent conductive substrate:
before depositing the hole transport layer material, the transparent conductive glass ITO substrate is firstly placed in acetone, deionized water and alcohol, ultrasonic treatment is sequentially carried out for 30 minutes, then high-purity nitrogen is used for drying, and then an ultraviolet ozone plasma cleaning machine is used for processing for 6 minutes so as to clean surface pollutants and attach hanging bonds.
(2) After a second part of the substrate is covered by a transparent adhesive tape, a hole transport layer is deposited on the surface of the first part of the substrate, and a spin coating is carried out on the hole transport layer PEDOT/PSS on a part of the substrate treated by ultraviolet ozone by a spin coater, wherein the thickness of the hole transport layer PEDOT/PSS is 30nm; subsequently, the hole transport layer PEDOT: PSS was annealed using a heating station at a temperature of about 150℃for a period of about 15 minutes.
(3) Depositing a polymeric active layer on the hole transport layer:
mixing PM6 and Y6 at a mass ratio of 1:1.2, dissolving in a solvent CF (chloroform) at a concentration of 10mg/ml to form a solution, and dissolving for 2 hours. And spin-coating the dissolved active layer solution on a hole transport layer PEDOT: PSS to obtain an active layer with the thickness of 120nm, and standing for 20 minutes.
(4) Tearing off the transparent adhesive tape, and spin-coating an indolo [2,1-b ] coumarin oxazoline film layer on the polymer active layer and the second part of the substrate:
indolo [2,1-b ]]Coumarin oxazoline is dissolved in absolute methanol solution, and the concentration is 1.0mg/ml; then, at 5×10 -4 Drying for 1-2 hours under the high vacuum environment below Pa.
(5) Preparing a top electrode over the electron transport layer:
the silver electrode was evaporated by a metal source thermal evaporation device to a thickness of about 100nm.
To better illustrate the effect of the acid-chromic organic solar cell integrated device prepared in this example, the organic solar cell device without using the acid-chromic electron transport layer in this example was compared before and after acidification of the acid-chromic organic solar cell integrated device prepared in this example.
The characteristic parameters of the organic solar cell device without using the acid-induced color electron transport layer and the acid-induced color organic solar cell integrated device prepared in this example before and after acidification under the AM1.5 standard solar light source are shown in table 1, and fig. 2 is a J-V curve of different organic solar cells under the AM1.5 standard simulated sunlight. The organic solar cell device structure without using the acid-induced color electron transport layer is ITO/PEDOT, PSS/PM6, Y6/Ag. The organic solar cell device structure using the Acid-induced color electron transport layer is ITO/PEDOT, PSS/PM6, Y6/Acid/Ag.
TABLE 1
As shown in table 1 and fig. 2, compared with the organic solar cell device without using the acid-induced color electron transport layer, the open circuit voltage (V OC ) Short circuit current density (J) SC ) The Fill Factor (FF) and the Photoelectric Conversion Efficiency (PCE) were increased to 0.85V,24.88mA/cm, respectively 2 71.59%,15.14%. Thus, indolo [2,1-b ] is used]Coumarin oxazoline is taken as an electron transport layer, and the device performance of the organic solar cell can be remarkably improved. In addition, even if indolo [2,1-b ]]The coumarin oxazoline film layer is acidified, the performance of the organic solar cell device is not affected, and the PCE efficiency can still be kept above 14.7%.
Fig. 3 is a transmission spectrum of an acid-chromic electron transport layer in response to different PH discoloration. Wherein Sample1 is an acid-treated layer that was not treated with acid, sample 2 is an acid-treated layer that was treated with ph=1, sample 3 is an acid-treated layer that was treated with ph=2, and Sample 4 is an acid-treated layer that was treated with ph=3. Compared with the acid-treated electrochromic layer, the transmittance of the Sample 2, sample 3 and Sample 4 films is respectively increased by 21.39 percent, 17.03 percent and 10.87 percent at the wavelength of 407nm, respectively reduced by 37.10 percent, 27.78 percent and 6.38 percent at the wavelength of 586nm, and the color of the acid-treated electrochromic layer is changed from yellow to deep blue, so that the acid size of liquid in the environment can be distinguished by the color.
The acid response organic solar cell integrated device provided by the invention has a good application prospect and is very suitable for large-area industrialized production.
Example 2
The acid-induced color change organic solar cell integrated device of the embodiment comprises a transparent conductive substrate, a hole transport layer, a polymer active layer, an indolo [2,1-b ] coumarin oxazoline film layer and a top electrode from bottom to top.
The preparation method of the acid-induced color organic solar cell integrated device of the embodiment is as follows:
(1) Pretreatment of the transparent conductive substrate:
before depositing the hole transport layer material, the transparent conductive glass ITO substrate is firstly placed in acetone, deionized water and alcohol, ultrasonic treatment is sequentially carried out for 30 minutes, then high-purity nitrogen is used for drying, and then an ultraviolet ozone plasma cleaning machine is used for processing for 6 minutes so as to clean surface pollutants and attach hanging bonds.
(2) Depositing a hole transport layer on the surface of a transparent conductive substrate, and spin-coating the PEDOT/PSS of the hole transport layer on a part of the substrate treated by ultraviolet ozone by using a spin coater, wherein the thickness of the hole transport layer is about 20nm; subsequently, the hole transport layer PEDOT: PSS was annealed using a heating station at a temperature of about 150℃for a period of about 15 minutes.
(3) Depositing a polymeric active layer on the hole transport layer:
mixing PM6 and Y6 at a mass ratio of 1:1, dissolving in a solvent CF (chloroform) to form a solution, wherein the concentration is 10mg/ml, and the dissolving time is 2 hours. And spin-coating the dissolved active layer solution on a hole transport layer PEDOT: PSS to obtain an active layer with the thickness of 100nm, and standing for 20 minutes.
(4) Spin coating an indolo [2,1-b ] coumarin oxazoline film layer on the polymer active layer:
indolo [2,1-b ]]Coumarin oxazoline is dissolved in absolute methanol solution, and the concentration is 0.8mg/ml; then, at 5×10 -4 Drying for 1-2 hours under the high vacuum environment below Pa.
(5) Preparing a top electrode over the electron transport layer:
the silver electrode was evaporated by a metal source thermal evaporation device to a thickness of about 10nm.
The thickness of the top electrode of the acid-induced color organic solar cell integrated device is about 10nm, the whole device is a semitransparent device, and the indolo [2,1-b ] coumarin oxazoline film layer is used as an electron transmission layer and an acid-induced color layer.
The embodiment described above is a preferred embodiment of the present invention, but the embodiment of the present invention is not limited to the embodiment described above, for example, the shielding object of the present invention may be other shielding objects besides the transparent adhesive tape; the material of the hole transport layer can be PEDOT PSS or other common hole transport layer materials; any other changes, modifications, substitutions, combinations, and simplifications that do not depart from the spirit and principles of the invention are intended to be equivalent substitutes for those that do not depart from the spirit and principles of the invention.
Claims (5)
1. The acid-induced color change organic solar cell integrated device is characterized by comprising a transparent conductive substrate, a hole transport layer, a polymer active layer, an indolo [2,1-b ] coumarin oxazoline film layer and a top electrode; the indolo [2,1-b ] coumarin oxazoline film layer is used as an electron transport layer and an acid color change layer at the same time;
the transparent conductive substrate comprises a first part of substrate and a second part of substrate;
the indolo [2,1-b ] coumarin oxazoline film layer is divided into two parts; one part is an electron transport layer, and the other part is an acid electrochromic layer;
the hole transport layer and the polymer active layer are sequentially laminated on the first part of the substrate; the electron transport layer is stacked on the polymer active layer; the acid-induced color layer is stacked on the second part of the substrate;
the top electrode is arranged on the electron transmission layer;
the indolo [2,1-b ] coumarin oxazolines have the following structural formula:
。
2. the acid-chromic organic solar cell integrated device according to claim 1, wherein,
the thickness of the acid color changing layer is 5-500 nm;
the thickness of the hole transport layer is 20-100 nm;
the thickness of the polymer active layer is 50-300 nm.
3. The acid chromic organic solar cell integrated device according to claim 1, wherein the thickness of the top electrode is 20-200 nm.
4. The method for manufacturing an acid-chromic organic solar cell integrated device according to claim 1, comprising the steps of:
(1) Pretreating a transparent conductive substrate;
(2) After covering the second part of the substrate by using a shielding object, depositing a hole transport layer on the surface of the first part of the substrate;
(3) Depositing a polymer active layer on the hole transport layer;
(4) Spin-coating indolo [2,1-b ] on a polymer active layer and a second portion of a substrate after removal of the mask]Coumarin oxazoline film layer: indolo [2,1-b ]]Coumarin oxazoline is dissolved in an anhydrous methanol solution, and the concentration is 0.8-1.2 mg/ml; then, at 5×10 -4 Drying under a high vacuum environment below Pa;
(5) A top electrode is prepared over the acid-chromic layer.
5. The method for manufacturing an integrated device of an acid-induced color organic solar cell according to claim 4, wherein the pretreatment of the transparent conductive substrate in step (1) specifically comprises:
sequentially placing the transparent conductive substrate in acetone, deionized water and alcohol, sequentially carrying out ultrasonic treatment for 20-30 minutes, then drying by high-purity nitrogen, and then treating for 5-6 minutes by adopting an ultraviolet ozone plasma cleaner;
the step (2) of depositing a hole transport layer specifically comprises:
spin-coating a hole transport layer PEDOT: PSS on the surface of the first part of the substrate by adopting a spin coater; then carrying out annealing treatment on the cavity transmission layer PEDOT and PSS, wherein the temperature is 140-160 ℃ and the time is 12-18 minutes;
the shielding object in the step (2) is a transparent adhesive tape;
and (3) depositing a polymer active layer on the hole transport layer, wherein the polymer active layer comprises the following specific steps:
mixing PM6 and Y6 in a mass ratio of (1-1.2), and dissolving the mixture in a solvent to form an active layer solution with a concentration of 8-12 mg/ml; spin-coating the dissolved active layer solution on a hole transport layer PEDOT: PSS, controlling the thickness of the active layer to be 100-150 nm, and standing for 18-20 minutes.
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