CN113720451B

CN113720451B - Infrared detector based on CMOS (complementary Metal oxide semiconductor) process

Info

Publication number: CN113720451B
Application number: CN202110324018.7A
Authority: CN
Inventors: 翟光杰; 武佩; 潘辉; 翟光强
Original assignee: Beijing North Gaoye Technology Co ltd
Current assignee: Beijing North Gaoye Technology Co ltd
Priority date: 2021-03-26
Filing date: 2021-03-26
Publication date: 2022-09-06
Anticipated expiration: 2041-03-26
Also published as: CN113720451A

Abstract

The utility model relates to an infrared detector based on CMOS technology, in which, both the CMOS measuring circuit system and the CMOS infrared sensing structure are prepared by CMOS technology, and the CMOS infrared sensing structure is directly prepared above the CMOS measuring circuit system; the CMOS manufacturing process of the CMOS infrared sensing structure comprises a metal interconnection process, a through hole process and an RDL (remote data link) process, wherein the CMOS infrared sensing structure comprises at least two metal interconnection layers, at least two dielectric layers and a plurality of interconnection through holes, the dielectric layers at least comprise a sacrificial layer and a heat-sensitive dielectric layer, and the heat-sensitive dielectric layer comprises a thermosensitive material with the resistance temperature coefficient larger than a set value; the CMOS infrared sensing structure comprises a resonant cavity formed by a reflecting layer and a heat sensitive medium layer, a suspended microbridge structure for controlling heat transfer and a columnar structure with electric connection and support functions. Through the technical scheme, the problems of low performance, low pixel scale, low yield and the like of the traditional MEMS process infrared detector are solved, and the performance of the infrared detector is optimized.

Description

Infrared detector based on CMOS (complementary Metal oxide semiconductor) process

Technical Field

The present disclosure relates to the field of infrared detection technologies, and in particular, to an infrared detector based on a CMOS process.

Background

The fields of monitoring markets, vehicle and auxiliary markets, home markets, intelligent manufacturing markets, mobile phone applications and the like have strong demands on uncooled high-performance chips, certain requirements are provided for the performance of the chips, the performance consistency and the product price, the potential demands of more than one hundred million chips are expected every year, and the current process scheme and architecture cannot meet the market demands.

At present, an infrared detector adopts a mode of combining a measuring circuit and an infrared sensing structure, the measuring circuit is prepared by adopting a Complementary Metal-Oxide-Semiconductor (CMOS) process, and the infrared sensing structure is prepared by adopting a Micro-Electro-Mechanical System (MEMS) process, so that the following problems are caused:

(1) the infrared sensing structure is prepared by adopting an MEMS (micro-electromechanical systems) process, polyimide is used as a sacrificial layer, and the infrared sensing structure is incompatible with a CMOS (complementary metal oxide semiconductor) process.

(2) Polyimide is used as a sacrificial layer, so that the problem that the vacuum degree of a detector chip is influenced due to incomplete release exists, the growth temperature of a subsequent film is limited, and the selection of materials is not facilitated.

(3) Polyimide can cause the height of the resonant cavity to be inconsistent, and the working dominant wavelength is difficult to ensure.

(4) The control of the MEMS process is far worse than that of the CMOS process, and the performance consistency and the detection performance of the chip are restricted.

(5) MEMS has low capacity, low yield and high cost, and can not realize large-scale batch production.

(6) The existing process capability of the MEMS is not enough to support the preparation of a detector with higher performance, and the MEMS has smaller line width and thinner film thickness, so that the miniaturization of a chip is not facilitated.

Disclosure of Invention

In order to solve the technical problems or at least partially solve the technical problems, the present disclosure provides an infrared detector based on a CMOS process, which solves the problems of low performance, low pixel scale, low yield, and the like of the conventional MEMS process infrared detector, and optimizes the performance of the infrared detector.

The present disclosure provides an infrared detector based on CMOS process, including:

the CMOS infrared sensing structure comprises a CMOS measuring circuit system and a CMOS infrared sensing structure, wherein the CMOS measuring circuit system and the CMOS infrared sensing structure are both prepared by using a CMOS process, and the CMOS infrared sensing structure is directly prepared on the CMOS measuring circuit system;

the CMOS measurement circuit system comprises at least one layer of closed release isolation layer above the CMOS measurement circuit system, wherein the closed release isolation layer is used for protecting the CMOS measurement circuit system from being influenced by a process in the etching process of manufacturing the CMOS infrared sensing structure;

the CMOS manufacturing process of the CMOS infrared sensing structure comprises a metal interconnection process, a through hole process and an RDL (remote data link) process, wherein the CMOS infrared sensing structure comprises at least two metal layers, at least two dielectric layers and a plurality of interconnection through holes, the dielectric layers at least comprise a sacrificial layer and a heat sensitive dielectric layer, and the metal layers at least comprise a reflecting layer and an electrode layer; the thermal sensitive medium layer is used for converting temperature change corresponding to infrared radiation absorbed by the thermal sensitive medium layer into resistance change, and further converting an infrared target signal into a signal capable of realizing electric reading through the CMOS measuring circuit system;

the CMOS infrared sensing structure comprises a resonant cavity formed by the reflecting layer and the heat sensitive medium layer, a suspended microbridge structure for controlling heat transfer and a columnar structure with electric connection and support functions, and the CMOS measuring circuit system is used for measuring and processing array resistance values formed by one or more CMOS infrared sensing structures and converting infrared signals into image electric signals;

the utility model discloses a micro bridge structure, including the reflection stratum, the reflection stratum includes at least one deck metal interconnection layer, the reflection stratum includes reflecting plate and support base, the microbridge structure includes absorption board and beam structure, the columnar structure contains at least one deck metal level, is located directly over the support base, utilizes CMOS through-hole technology to form the through-hole, beam structure and support base are connected to the metal level electricity, transmit the electric signal that receives on the beam structure to the support base through columnar structure, perhaps beam structure and absorption board are connected to the metal level electricity, will absorb the board electricity signal process the columnar structure transmits to the beam structure.

The CMOS measuring circuit system comprises a bias voltage generating circuit, a column-level analog front-end circuit and a row-level circuit, wherein the input end of the bias voltage generating circuit is connected with the output end of the row-level circuit, the input end of the column-level analog front-end circuit is connected with the output end of the bias voltage generating circuit, the row-level circuit comprises row-level mirror image pixels and row selection switches, and the column-level analog front-end circuit comprises blind pixels; the row-level circuit is distributed in each pixel, selects a signal to be processed according to a row strobe signal of the time sequence generating circuit, and outputs a current signal to the column-level analog front-end circuit under the action of the bias voltage generating circuit so as to perform current-voltage conversion and output;

the column-level analog front-end circuit obtains two paths of currents according to the first bias voltage and the second bias voltage, performs transimpedance amplification on the difference between the two paths of generated currents and outputs the amplified current as an output voltage.

In some embodiments, the via comprises at least one metal layer, the metal layer filling the entire via or covering the via sidewalls and bottom; the metal layer material comprises at least one of aluminum, titanium, tungsten or copper.

In some embodiments, the via may further include at least one dielectric layer on one side of the metal layer or filling the entire via.

In some embodiments, the periphery of the columnar structure may further include at least one dielectric layer located above the reflective layer.

In some embodiments, the pillar structures are used with one or more CMOS infrared sensing structures that comprise at least 2 pillar structures for electrical signal transmission.

In some embodiments, the columnar structure is connected to at least two of the beam structure, the absorption plate and the support base, and the joint may further include at least one metal layer or a dielectric layer for enhancing mechanical strength of the joint.

In some embodiments, the infrared sensing structure is fabricated on top of or at the same level as a metal interconnect layer of the CMOS measurement circuitry.

In some embodiments, the sacrificial layer is used for enabling the CMOS infrared sensing structure to form a hollow structure, the material of the sacrificial layer is silicon oxide, and the sacrificial layer is etched by a post-CMOS process.

In some embodiments, the post-CMOS process etches the sacrificial layer with at least one of gaseous hydrogen fluoride, carbon tetrafluoride, and trifluoromethane.

In some embodiments, the hermetic release barrier is composed of at least one layer composed of a combination of two or more materials, the hermetic release barrier is located at an interface between the CMOS measurement circuitry and the CMOS infrared sensing structure or in the CMOS infrared sensing structure, the hermetic release barrier is used to protect the CMOS measurement circuitry from corrosion when a sacrificial layer is released by a corrosion process;

the CMOS technology corrosion-resistant material adopted by the closed release isolation layer comprises at least one of silicon, germanium, silicon-germanium alloy, amorphous silicon, amorphous germanium, amorphous silicon-germanium, amorphous carbon, silicon carbide, aluminum oxide, silicon nitride or silicon carbonitride.

In some embodiments, the CMOS infrared sensing structure comprises the microbridge structure, the reflective layer, the sacrificial layer, and the pillar structure;

the absorption plate is used for absorbing the infrared target signal and converting the infrared target signal into an electric signal, the absorption plate comprises a metal layer and at least one layer of the heat sensitive medium layer, and the material forming the heat sensitive medium layer comprises at least one of amorphous silicon, amorphous germanium silicon, titanium oxide, vanadium oxide or titanium vanadium oxide;

the beam structure and the columnar structure are used for transmitting the electric signals and supporting and connecting the absorption plate, the beam structure comprises a metal layer and at least one dielectric layer, and the columnar structure is connected with the beam structure and the CMOS measurement circuit system by adopting the metal interconnection process and the through hole process;

the reflecting layer is used for reflecting infrared signals and forms the resonant cavity with the heat sensitive medium layer, and the reflecting layer comprises at least one metal layer.

In some embodiments, at least two ends of the beam structure and the absorption plate are electrically connected, the CMOS infrared sensing structure includes at least two of the pillar structures and at least two supporting pedestals, and the electrode layer includes at least two electrode terminals.

In some embodiments, the infrared detector is based on a 3nm, 7nm, 10nm, 14nm, 22nm, 28nm, 32nm, 45nm, 65nm, 90nm, 130nm, 150nm, 180nm, 250nm, or 350nm cmos process.

In some embodiments, the material comprising the metal layer comprises at least one of aluminum, copper, tungsten, titanium, nickel, chromium, platinum, silver, ruthenium, or cobalt.

Compared with the prior art, the technical scheme provided by the embodiment of the disclosure has the following advantages:

the CMOS measurement circuit system and the CMOS infrared sensing structure are integrally prepared on the CMOS production line by utilizing the CMOS process, compared with the MEMS process, the CMOS does not have the process compatibility problem, the technical difficulty of the MEMS process is solved, the transportation cost can be reduced by adopting the CMOS production line process to prepare the infrared detector, and the risk caused by the problems of transportation and the like is reduced; the infrared detector takes silicon oxide as a sacrificial layer, the silicon oxide is completely compatible with a CMOS (complementary metal oxide semiconductor) process, the preparation process is simple and easy to control, the CMOS process does not have the problem that the polyimide of the sacrificial layer is not released cleanly to influence the vacuum degree of a detector chip, the subsequent film growth temperature is not limited by the material of the sacrificial layer, the multilayer process design of the sacrificial layer can be realized, the process is not limited, the planarization can be easily realized by using the sacrificial layer, and the process difficulty and the possible risks are reduced; the infrared detector prepared by the integrated CMOS process can realize the aims of high yield, low cost, high yield and large-scale integrated production of chips, and provides a wider application market for the infrared detector; the infrared detector based on the CMOS process can realize smaller size and thinner film thickness of a characteristic structure, so that the infrared detector has larger duty ratio, lower thermal conductivity and smaller thermal capacity, and the infrared detector has higher detection sensitivity, longer detection distance and better detection performance; the infrared detector based on the CMOS process can make the pixel size of the detector smaller, realize smaller chip area under the same array pixel, and is more beneficial to realizing the miniaturization of a chip; the infrared detector based on the CMOS process has the advantages of mature process production line, higher process control precision, better meeting design requirements, better product consistency, more contribution to circuit chip adjustment performance and more contribution to industrialized mass production.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and, together with the description, serve to explain the principles of the disclosure.

In order to more clearly illustrate the embodiments or technical solutions in the prior art of the present disclosure, the drawings used in the description of the embodiments or prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive exercise.

Fig. 1 is a schematic perspective view of an infrared detector according to an embodiment of the present disclosure;

fig. 2 is a schematic cross-sectional structure diagram of an infrared detector provided in an embodiment of the present disclosure;

fig. 3 is a schematic cross-sectional view of another infrared detector provided in the embodiments of the present disclosure;

fig. 4 is a schematic cross-sectional view of another infrared detector provided in the embodiments of the present disclosure;

fig. 5 is a schematic structural diagram of a CMOS measurement circuitry provided in an embodiment of the present disclosure;

FIG. 6 is a schematic cross-sectional view of another infrared detector provided in the embodiments of the present disclosure;

fig. 7 is a schematic perspective view of another infrared detector provided in the embodiment of the present disclosure;

FIG. 8 is a schematic cross-sectional view of another infrared detector provided in accordance with an embodiment of the present disclosure;

fig. 9 is a schematic cross-sectional view of another infrared detector provided in the embodiments of the present disclosure;

fig. 10 is a schematic perspective view of another infrared detector provided in the embodiments of the present disclosure.

Detailed Description

In order that the above objects, features and advantages of the present disclosure may be more clearly understood, aspects of the present disclosure will be further described below. It should be noted that the embodiments and features of the embodiments of the present disclosure may be combined with each other without conflict.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present disclosure, but the present disclosure may be practiced in other ways than those described herein; it is to be understood that the embodiments disclosed in the specification are only a few embodiments of the present disclosure, and not all embodiments.

Fig. 1 is a schematic perspective structure diagram of an infrared detector provided in an embodiment of the present disclosure, and fig. 2 is a schematic cross-sectional structure diagram of an infrared detector provided in an embodiment of the present disclosure. With reference to fig. 1 and 2, the CMOS process-based infrared detector includes a CMOS measurement circuit system 1 and a CMOS infrared sensing structure 2, both the CMOS measurement circuit system 1 and the CMOS infrared sensing structure 2 are manufactured by using a CMOS process, and the CMOS infrared sensing structure 2 is directly manufactured on the CMOS measurement circuit system 1.

Specifically, the CMOS infrared sensing structure 2 is configured to convert an external infrared signal into an electrical signal and transmit the electrical signal to the CMOS measurement circuit system 1, and the CMOS measurement circuit system 1 reflects temperature information corresponding to the infrared signal according to the received electrical signal, thereby implementing a temperature detection function of the infrared detector. The CMOS measuring circuit system 1 and the CMOS infrared sensing structure 2 are both prepared by using a CMOS process, and the CMOS infrared sensing structure 2 is directly prepared on the CMOS measuring circuit system 1, namely, the CMOS measuring circuit system 1 is prepared by using the CMOS process, and then the CMOS infrared sensing structure 2 is continuously prepared by using the CMOS process by using a CMOS production line and parameters of various processes compatible with the CMOS production line.

Therefore, the CMOS measurement circuit system 1 and the CMOS infrared sensing structure 2 are integrally prepared on the CMOS production line by utilizing the CMOS process, compared with the MEMS process, the CMOS process does not have the process compatibility problem, the technical difficulty of the MEMS process is solved, the transportation cost can be reduced by adopting the CMOS production line process to prepare the infrared detector, and the risk caused by the transportation problem and the like is reduced; the infrared detector takes silicon oxide as a sacrificial layer, the silicon oxide is completely compatible with a CMOS (complementary metal oxide semiconductor) process, the preparation process is simple and easy to control, the CMOS process does not have the problem that the polyimide of the sacrificial layer is not released cleanly to influence the vacuum degree of a detector chip, the subsequent film growth temperature is not limited by the material of the sacrificial layer, the multilayer process design of the sacrificial layer can be realized, the process is not limited, the planarization can be easily realized by using the sacrificial layer, and the process difficulty and the possible risks are reduced; the infrared detector prepared by the integrated CMOS process can realize the aims of high yield, low cost, high yield and large-scale integrated production of chips, and provides a wider application market for the infrared detector; the infrared detector based on the CMOS process can realize smaller size and thinner film thickness of a characteristic structure, so that the infrared detector has larger duty ratio, lower thermal conductivity and smaller thermal capacity, and the infrared detector has higher detection sensitivity, longer detection distance and better detection performance; the infrared detector based on the CMOS process can make the pixel size of the detector smaller, realize smaller chip area under the same array pixel, and is more beneficial to realizing the miniaturization of a chip; the infrared detector based on the CMOS process has the advantages of mature process production line, higher process control precision, better meeting design requirements, better product consistency, more contribution to circuit chip adjustment performance and more contribution to industrialized mass production.

Referring to fig. 1 and 2, the CMOS infrared sensing structure 2 includes a reflective layer 4, an infrared conversion structure 40 (also referred to as a suspension micro-bridge structure 40) and a plurality of pillar structures 6 on the CMOS measurement circuitry 1, the pillar structures 6 are located between the reflective layer 4 and the infrared conversion structure 40, the reflective layer 4 includes a reflective plate 41 and a supporting base 42, and the infrared conversion structure 40 is electrically connected to the CMOS measurement circuitry 1 through the pillar structures 6 and the supporting base 42.

Specifically, the columnar structure 6 is located between the reflective layer 4 and the infrared conversion structure 40, and is used for supporting the infrared conversion structure 40 after the sacrificial layer on the CMOS measurement circuit system 1 is released, and implementing electrical connection between the infrared conversion structure 40 and the support base 42; the sacrificial layer is located between the reflective layer 4 and the infrared conversion structure 40, the columnar structure 6 is a structure including a metal material, the infrared conversion structure 40 transmits an electrical signal converted from an infrared signal to the CMOS measurement circuit system 1 through the corresponding columnar structure 6 and the corresponding support base 42, and the CMOS measurement circuit system 1 processes the electrical signal to reflect temperature information, thereby realizing non-contact infrared temperature detection of the infrared detector. The CMOS infrared sensing structure 2 outputs a positive electric signal and a ground electric signal through different electrode structures, the positive electric signal and the ground electric signal are transmitted to a supporting base 42 electrically connected with the columnar structures 6 through different columnar structures 6, fig. 1 and 2 schematically illustrate the direction parallel to the CMOS measuring circuit system 1, the CMOS infrared sensing structure 2 includes two columnar structures 6, one of the columnar structures 6 may be configured to transmit the positive electric signal, the other columnar structure 6 is configured to transmit the ground electric signal, and the CMOS infrared sensing structure 2 may also include four columnar structures 6, and each two of the columnar structures are configured to transmit the positive electric signal and the ground electric signal as a group. In addition, the reflective layer 4 includes a reflective plate 41 and a supporting base 42, a portion of the reflective layer 4 is used as a dielectric for electrically connecting the columnar structure 6 with the CMOS measurement circuit system 1, that is, the supporting base 42, the reflective plate 41 is used for reflecting the infrared rays to the infrared conversion structure 40, and the secondary absorption of the infrared rays is realized by matching with a resonant cavity formed between the reflective layer 4 and the infrared conversion structure 40, so as to improve the infrared absorption rate of the infrared detector and optimize the infrared detection performance of the infrared detector.

Referring to fig. 1 and 2, the infrared conversion structure includes an absorption plate 10 and a plurality of beam structures 11, the absorption plate 10 is used for converting an infrared signal into an electrical signal and is electrically connected to the corresponding pillar structures 6 through the corresponding beam structures 11, and illustratively, the absorption plate 10 and the beam structures 11 may each include a thermosensitive layer 12, and a material constituting the thermosensitive layer 12 includes at least one of amorphous silicon, amorphous carbon, amorphous germanium, amorphous silicon germanium, titanium oxide, vanadium oxide, or titanium vanadium oxide. In particular, the absorbing plate 10 is used to convert infrared signals into electrical signals and is electrically connected to the corresponding pillar structures 6 via the corresponding beam structures 11, the absorbing plate 10 comprising a support layer 13, an electrode layer 14, a thermosensitive layer 12 and a passivation layer 15, the beam structures 11 may likewise comprise a support layer 13, the beam structure 11 may further include a thermal sensitive layer 12, the supporting layer 13 is located on one side of the passivation layer 15 close to the CMOS measurement circuit system 1, the electrode layer 14 and the thermal sensitive layer 12 are located between the supporting layer 13 and the passivation layer 15, the passivation layer 15 covers the electrode layer 14, the thermal sensitive layer 12 covers the beam structure 11, the thermal conductivity of the beam structure 11 is reduced by using the characteristic of small thermal conductivity of a thermal sensitive material such as amorphous silicon, amorphous germanium or amorphous silicon germanium, and the thermal sensitive layer 12 may serve as a supporting material of the beam structure 11 instead of the supporting layer 13 or may serve as an electrode protection material of the beam structure 11 instead of the passivation layer 15.

Specifically, the supporting layer 13 is used for supporting an upper film layer in the infrared conversion structure 40 after the sacrificial layer is released, the thermosensitive layer 12 is used for converting infrared temperature detection signals into infrared detection electrical signals, the electrode layer 14 is used for transmitting the infrared detection electrical signals converted from the thermosensitive layer 12 to the CMOS measurement circuit system 1 through the beam structures 11 on the left side and the right side, the two beam structures 11 respectively transmit positive and negative signals of the infrared detection electrical signals, a readout circuit in the CMOS measurement circuit system 1 realizes non-contact infrared temperature detection through analysis of the acquired infrared detection electrical signals, and the passivation layer 15 is used for protecting the electrode layer 14 from oxidation or corrosion. The thermosensitive layer 12 may be located above the electrode layer 14, or may be located below the electrode layer 14. The absorption plate 10 can be arranged correspondingly, the thermosensitive layer 12 and the electrode layer 14 are located in a closed space formed by the supporting layer 13 and the passivation layer 15, so that the thermosensitive layer 12 and the electrode layer 14 in the absorption plate 10 can be protected, and the electrode layer 14 is located in a closed space formed by the supporting layer 13 and the passivation layer 15 correspondingly to the beam structure 11, so that the electrode layer 14 in the beam structure 11 can be protected.

For example, the material constituting the thermosensitive layer 12 may include at least one of amorphous silicon, amorphous germanium, amorphous silicon germanium, titanium oxide, vanadium oxide, or titanium vanadium oxide, the material constituting the supporting layer 13 may include one or more of amorphous carbon, aluminum oxide, amorphous silicon, amorphous germanium, or amorphous silicon germanium, the material constituting the electrode layer 14 may include one or more of titanium, titanium nitride, tantalum nitride, titanium tungsten alloy, nickel-chromium alloy, nickel-silicon alloy, nickel, or chromium, and the material constituting the passivation layer 15 may include one or more of amorphous carbon, aluminum oxide, amorphous silicon, amorphous germanium, or amorphous silicon germanium. In addition, when the absorption plate 10 is provided with the thermosensitive layer 12, and the material of the thermosensitive layer 12 is amorphous silicon, amorphous carbon, amorphous germanium or amorphous silicon germanium, the supporting layer 13 and/or the passivation layer 15 on the beam structure 11 can be replaced by the thermosensitive layer 12, because the thermal conductivity of the amorphous silicon, the amorphous germanium or the amorphous silicon germanium is small, which is beneficial to reducing the thermal conductivity of the beam structure 11 and further improving the infrared responsivity of the infrared detector.

With reference to fig. 1 and fig. 2, at least one layer of hermetic release isolation layer 3 may be included above the CMOS measurement circuitry 1, and the hermetic release isolation layer 3 is used to protect the CMOS measurement circuitry 1 from process influence during an etching process for manufacturing the CMOS infrared sensing structure 2. Optionally, a hermetic release barrier 3 is located at an interface between the CMOS measurement circuitry 1 and the CMOS infrared sensing structure 2 and/or in the CMOS infrared sensing structure 2, the hermetic release barrier 3 is used to protect the CMOS measurement circuitry 1 from erosion when a corrosion process is performed to release the sacrificial layer, and a CMOS process corrosion resistant material used for the hermetic release barrier 3 includes at least one of silicon, germanium, a silicon germanium alloy, amorphous silicon, amorphous germanium, amorphous silicon germanium, amorphous carbon, silicon carbide, aluminum oxide, silicon nitride, or silicon carbonitride.

Fig. 2 exemplarily sets the hermetic release isolation layer 3 in the CMOS infrared sensing structure 2, the hermetic release isolation layer 3 may be, for example, located above the metal interconnection layer of the reflection layer 4, the hermetic release isolation layer 3 covers the columnar structure 6, and by setting the hermetic release isolation layer 3 to cover the columnar structure 6, on one hand, the hermetic release isolation layer 3 may be utilized as a support for the columnar structure 6, so as to improve the stability of the columnar structure 6, and ensure the electrical connection between the columnar structure 6 and the infrared conversion structure 40 as well as the support base 42. On the other hand, the airtight release insulating layer 3 coating the columnar structure 6 can reduce the contact between the columnar structure 6 and the external environment, reduce the contact resistance between the columnar structure 6 and the external environment, further reduce the noise of the infrared detector pixel, and improve the detection sensitivity of the infrared detection sensor. In addition, the resonant cavity of the infrared detector is realized by releasing the vacuum cavity after the silicon oxide sacrifice layer is released, the reflecting layer 4 is used as the reflecting layer of the resonant cavity, the sacrifice layer is positioned between the reflecting layer 4 and the infrared conversion structure 40, and when at least one layer of closed release isolating layer 3 positioned on the reflecting layer 4 selects silicon, germanium, silicon-germanium alloy, amorphous silicon, amorphous germanium or amorphous silicon-germanium as a part of the resonant cavity, the reflecting effect of the reflecting layer is not influenced, the height of the resonant cavity can be reduced, the thickness of the sacrifice layer is further reduced, and the release difficulty of the sacrifice layer formed by silicon oxide is reduced. In addition, a closed release isolation layer 3 and the columnar structure 6 are arranged to form a closed structure, so that the CMOS measurement circuit system 1 is completely separated from the sacrificial layer, and the CMOS measurement circuit system 1 is protected.

Fig. 3 is a schematic cross-sectional structural view of another infrared detector provided in the embodiment of the present disclosure. Unlike the infrared detector having the structure shown in fig. 2, in the infrared detector having the structure shown in fig. 3, the close release isolation layer 3 is located at the interface between the CMOS measurement circuitry 1 and the CMOS infrared sensing structure 2, for example, the close release isolation layer 3 is located between the reflective layer 4 and the CMOS measurement circuitry 1, that is, the close release isolation layer 3 is located below the metal interconnection layer of the reflective layer 4, and the support base 42 is electrically connected to the CMOS measurement circuitry 1 through a through hole penetrating through the close release isolation layer 3. Specifically, because the CMOS measurement circuit system 1 and the CMOS infrared sensing structure 2 are both formed by using a CMOS process, after the CMOS measurement circuit system 1 is formed, a wafer including the CMOS measurement circuit system 1 is transferred to a next process to form the CMOS infrared sensing structure 2, and since silicon oxide is the most commonly used dielectric material in the CMOS process and silicon oxide is mostly used as an insulating layer between metal layers on the CMOS circuit, if no insulating layer is used as a barrier when silicon oxide with a thickness of about 2um is corroded, the circuit will be seriously affected, so in order to release the silicon oxide of the sacrificial layer, the silicon oxide medium on the CMOS measurement circuit system is not corroded, and the hermetic release insulating layer 3 is provided. After the CMOS measuring circuit system 1 is prepared and formed, a closed release isolation layer 3 is prepared and formed on the CMOS measuring circuit system 1, the CMOS measuring circuit system 1 is protected by the closed release isolation layer 3, in order to ensure the electric connection between the support base 42 and the CMOS measuring circuit system 1, after the closed release isolation layer 3 is prepared and formed, a through hole is formed in the area, corresponding to the support base 42, of the closed release isolation layer 3 through an etching process, and the support base 42 is electrically connected with the CMOS measuring circuit system 1 through the through hole. In addition, the sealing release isolation layer 3 and the supporting base 42 are arranged to form a sealing structure, so that the CMOS measurement circuit system 1 is completely separated from the sacrificial layer, and the CMOS measurement circuit system 1 is protected.

Fig. 4 is a schematic cross-sectional structure view of another infrared detector provided in the embodiment of the present disclosure. Different from the infrared detector with the structure shown in fig. 2 and 3, in the infrared detector with the structure shown in fig. 4, the interface between the CMOS measurement circuit system 1 and the CMOS infrared sensing structure 2 is provided with at least one layer of closed release insulating layer 3, that is, at least one layer of closed release insulating layer 3 is provided between the reflection layer 4 and the CMOS measurement circuit system 1, and at least one layer of closed release insulating layer 3 is provided on the reflection layer 4, the effect is the same as above, and the description is omitted here.

Illustratively, the material constituting the hermetic release barrier layer 3 may include at least one of silicon, germanium, silicon-germanium alloy, amorphous silicon, amorphous germanium, amorphous silicon-germanium, amorphous carbon, silicon carbide, aluminum oxide, silicon nitride, or silicon carbonitride, and the thickness of the hermetic release barrier layer 3 is equal to or greater than

Is less than or equal to

Specifically, silicon, germanium, a silicon-germanium alloy, amorphous silicon, amorphous germanium, amorphous silicon-germanium, amorphous carbon, silicon carbide, aluminum oxide, silicon nitride, and silicon carbonitride are all CMOS process corrosion resistant materials, i.e., these materials are not corroded by the sacrificial layer release agent, so the hermetic release barrier layer 3 can be used to protect the CMOS measurement circuitry 1 from corrosion when the corrosion process is performed to release the sacrificial layer. In addition, the closed release isolation layer 3 covers the CMOS measurement circuit system 1, and the closed release isolation layer 3 can also be used for protecting the CMOS measurement circuit system 1 from being influenced by the process in the etching process of manufacturing the CMOS infrared sensing structure 2. In addition, when at least one layer of the closed release isolating layer 3 is arranged on the reflecting layer 4, the material forming the closed release isolating layer 3 comprises at least one of silicon, germanium, silicon-germanium alloy, amorphous silicon, amorphous germanium, amorphous silicon-germanium, amorphous carbon, silicon carbide, aluminum oxide, silicon nitride or silicon carbonitride, and the thickness of the first dielectric layer is larger than that of the first dielectric layer

Is less than or equal to

When the stability of the columnar structure 6 is improved by arranging the airtight release insulating layer 3, the airtight release insulating layer 3 hardly influences the reflection process in the resonant cavity, and the airtight release insulating layer can be avoidedInsulating layer 3 influences the reflection process of resonant cavity, and then avoids airtight release insulating layer 3 to infrared detector detection sensitivity's influence.

With reference to fig. 1 to 4, a CMOS fabrication process of the CMOS infrared sensing structure 2 includes a metal interconnection process, a via process and an RDL process, the CMOS infrared sensing structure 2 includes at least two metal interconnection layers, at least two dielectric layers and a plurality of interconnection vias, the dielectric layers include at least one sacrificial layer and one heat-sensitive dielectric layer, the heat-sensitive dielectric layer includes at least a thermal-sensitive layer 12, and may further include a supporting layer 13 and/or a passivation layer 15, and the metal interconnection layers include at least a reflective layer 4 and an electrode layer 14; the thermal sensitive medium layer comprises a thermal sensitive material with a resistance temperature coefficient larger than a set value, the resistance temperature coefficient can be larger than or equal to 0.015/K, for example, the thermal sensitive material with the resistance temperature coefficient larger than the set value forms a thermal sensitive layer 12 in the thermal sensitive medium layer, the thermal sensitive medium layer is used for converting temperature change corresponding to infrared radiation absorbed by the thermal sensitive medium layer into resistance change, and further converting an infrared target signal into a signal capable of realizing electric reading through the CMOS measuring circuit system 1.

Specifically, the metal interconnection process is used for realizing the electrical connection of an upper metal interconnection layer and a lower metal interconnection layer, the through hole process is used for forming an interconnection through hole for connecting the upper metal interconnection layer and the lower metal interconnection layer, the RDL process is a rewiring layer process, specifically, a layer of metal is newly distributed above the top metal of the circuit and is electrically connected with the top metal of the circuit through a tungsten column, the reflection layer 4 in the infrared detector can be prepared on the top metal of the CMOS measurement circuit system 1 by adopting the RDL process, and the support base 42 on the reflection layer 4 is electrically connected with the top metal of the CMOS measurement circuit system 1. In addition, the heat-sensitive dielectric layer comprises a heat-sensitive material with a resistance temperature coefficient larger than a set value, and the resistance temperature coefficient can be larger than or equal to 0.015/K, so that the detection sensitivity of the infrared detector can be improved.

In addition, as shown in fig. 2, the CMOS manufacturing process of the CMOS measurement circuit system 1 may also include a metal interconnection process and a via process, the CMOS measurement circuit system 1 includes metal layers 101, dielectric layers 102 and a silicon substrate 103 located at the bottom, and the upper and lower metal layers 101 are electrically connected through vias 104.

With reference to fig. 1 to 4, the CMOS infrared sensing structure 2 includes a resonant cavity formed by a reflective layer 4 and a thermal sensitive dielectric layer, a suspended microbridge structure for controlling heat transfer, and a pillar structure 6 having electrical connection and support functions, and the CMOS measurement circuit system 1 is configured to measure and process an array resistance value formed by one or more CMOS infrared sensing structures 2, and convert an infrared signal into an image electrical signal.

Specifically, the resonant cavity may be formed by a cavity between the reflective layer 4 and the absorption plate 10, for example, the infrared light passes through the absorption plate 10 and is reflected back and forth in the resonant cavity to improve the detection sensitivity of the infrared detector, and due to the arrangement of the columnar structure 6, the beam structure 11 and the absorption plate 10 form a suspended micro-bridge structure for controlling heat transfer, i.e., the infrared conversion structure 40; the columnar structure 6 is used both to electrically connect the support base 42 and the corresponding beam structure 11 and to support the infrared conversion structure 40 located on the columnar structure 6.

Illustratively, the reflective layer 4 may include at least one metal interconnection layer, the pillar structure 6 may include at least one metal layer, and the pillar structure 60 is located above the supporting base 42 in the reflective layer 4, enabling support of the infrared conversion structure 40 and electrically connecting the infrared conversion structure 40 with the CMOS measurement circuitry 1 through the supporting base 42.

Fig. 5 is a schematic structural diagram of a CMOS measurement circuit system according to an embodiment of the present disclosure. With reference to fig. 1 to 5, the CMOS measurement circuit system 1 includes a bias voltage generation circuit 7, a column-level analog front-end circuit 8 and a row-level circuit 9, an input end of the bias voltage generation circuit 7 is connected to an output end of the row-level circuit 9, an input end of the column-level analog front-end circuit 8 is connected to an output end of the bias voltage generation circuit 7, the row-level circuit 9 includes a row-level mirror image element Rsm and a row selection switch K1, and the column-level analog front-end circuit 8 includes a blind image element RD; the row-level circuit 9 is distributed in each pixel, selects a signal to be processed according to a row strobe signal of the time sequence generating circuit, and outputs a current signal to the column-level analog front-end circuit 8 under the action of the bias generating circuit 7 to perform current-voltage conversion and output; the row stage circuit 9 outputs a third bias voltage VRsm to the bias generation circuit 7 when being controlled by the row selection switch K1 to be gated, the bias generation circuit 7 outputs a first bias voltage V1 and a second bias voltage V2 according to the input constant voltage and the third bias voltage VRsm, and the column stage analog front-end circuit 8 obtains two currents according to the first bias voltage V1 and the second bias voltage V2, performs transimpedance amplification on the difference between the two generated currents, and outputs the amplified current as an output voltage.

Specifically, the row-level circuit 9 includes a row-level mirror image element Rsm and a row selection switch K1, and the row-level circuit 9 is configured to generate a third bias voltage VRsm according to a gating state of the row selection switch K1. Illustratively, the row-level image elements Rsm may be subjected to a light-shielding process such that the row-level image elements Rsm are subjected to a fixed radiation by a light-shielding sheet having a temperature constantly equal to a substrate temperature, the row selection switch K1 may be implemented by a transistor, the row selection switch K1 is closed, and the row-level image elements Rsm are connected to the bias generation circuit 7, that is, the row-level circuit 9 outputs the third bias voltage VRsm to the bias generation circuit 7 when being gated by the row selection switch K1. The bias generation circuit 7 may include a first bias generation circuit 71 and a second bias generation circuit 72, the first bias generation circuit 71 being configured to generate a first bias voltage V1 according to an input constant voltage, which may be, for example, a positive power supply signal with a constant voltage. The second bias generating circuit 72 may include a bias control sub-circuit 721 and a plurality of gate driving sub-circuits 722, the bias control sub-circuit 721 controlling the gate driving sub-circuits 722 to generate the corresponding second bias voltages V, respectively, according to the third bias voltage VRsm.

The column-level analog front-end circuit 8 includes a plurality of column control sub-circuits 81, the column control sub-circuits 81 are disposed in correspondence with the gate driving sub-circuits 722, and exemplarily, the column control sub-circuits 81 may be disposed in one-to-one correspondence with the gate driving sub-circuits 722, and the gate driving sub-circuits 722 are configured to provide the second bias voltage V2 to the corresponding column control sub-circuits 81 according to their own gate states. For example, it may be set that when the gate driving sub-circuit 722 is gated, the gate driving sub-circuit 722 supplies the second bias voltage V2 to the corresponding column control sub-circuit 81; when the gate driving sub-circuit 722 is not gated, the gate driving sub-circuit 722 stops supplying the second bias voltage V2 to the corresponding column control sub-circuit 81.

The column-level analog front-end circuit 8 comprises an effective pixel RS and a blind pixel RD, the column control sub-circuit is used for generating a first current I1 according to a first bias voltage V1 and the blind pixel RD, generating a second current I2 according to a second bias voltage V2 and the effective pixel RS, performing transimpedance amplification on a difference value of the first current I1 and the second current I2, and outputting the difference value, and the row-level mirror image pixel Rsm and the effective pixel RS have the same temperature drift amount at the same ambient temperature.

Illustratively, the row-level image elements Rsm are thermally insulated from the CMOS measurement circuitry 1 and are shaded, and the row-level image elements Rsm are subjected to a fixed radiation from a shade plate at a temperature that is constantly equal to the substrate temperature. The absorption plate 10 of the active pixel RS is thermally insulated from the CMOS measurement circuitry 1 and the active pixel RS receives external radiation. The absorbing plates 10 of the row-level mirror image elements Rsm and the effective elements RS are thermally insulated from the CMOS measuring circuit system 1, so that the row-level mirror image elements Rsm and the effective elements RS have a self-heating effect.

When the corresponding row-level mirror image element Rsm is gated by the row selection switch K1, the resistance value of both the row-level mirror image element Rsm and the effective element RS is changed due to Joule heat, but when the row-level mirror image element Rsm and the effective element RS are subjected to the same fixed radiation, the resistance value of the row-level mirror image element Rsm and the resistance value of the effective element RS are the same, the temperature coefficients of the row-level mirror image element Rsm and the temperature coefficient of the effective element RS are also the same, the temperature drift amounts of the row-level mirror image element Rsm and the effective element RS at the same environmental temperature are the same, the change of the row-level mirror image element Rsm and the effective element RS at the same environmental temperature is synchronous, the resistance value change of the row-level mirror image element Rsm and the effective element RS due to the self-heating effect is effectively compensated, and the stable output of the reading circuit is realized.

In addition, by arranging the second bias generating circuit 7 to include a bias control sub-circuit 721 and a plurality of gate driving sub-circuits 722, the bias control sub-circuit 721 is configured to control the gate driving sub-circuits 722 to generate the corresponding second bias voltages V2 respectively according to the row control signals, so that each row of pixels has one path to drive the whole columns of pixels of the row individually, the requirement for the second bias voltage V2 is reduced, that is, the driving capability of the bias generating circuit 7 is improved, and the readout circuit is advantageously used to drive a larger-scale infrared detector pixel array. In addition, the specific detailed operation principle of the CMOS measurement circuit system 1 is well known to those skilled in the art and will not be described herein.

In some embodiments, the CMOS infrared sensing structure 2 may be disposed on top of a metal interconnect layer of the CMOS measurement circuitry 1 or fabricated on the same layer. Specifically, the metal interconnection layer of the CMOS measurement circuitry 1 may be a top metal layer in the CMOS measurement circuitry 1, and in conjunction with fig. 1 to 4, the CMOS infrared sensing structure 2 may be fabricated on the metal interconnection layer of the CMOS measurement circuitry 1, and the CMOS infrared sensing structure 2 is electrically connected to the CMOS measurement circuitry 1 through a supporting base 42 on the metal interconnection layer of the CMOS measurement circuitry 1, so as to transmit the electrical signal converted by the infrared signal to the CMOS measurement circuitry 1.

Fig. 6 is a schematic cross-sectional structure diagram of another infrared detector provided in the embodiment of the present disclosure, as shown in fig. 6, a CMOS infrared sensing structure 2 is prepared on the same layer of a metal interconnection layer of a CMOS measurement circuit system 1, that is, the CMOS measurement circuit system 1 and the CMOS infrared sensing structure 2 are arranged on the same layer, a supporting base in the CMOS infrared sensing structure 2 can be electrically connected to the CMOS measurement circuit system 1 through a circuit 100, as shown in fig. 6, the CMOS infrared sensing structure 2 is arranged on one side of the CMOS measurement circuit system 1, and a hermetic release isolation layer 3 can also be arranged on the top of the CMOS measurement circuit system 1 to protect the CMOS measurement circuit system 1.

In some embodiments, in conjunction with fig. 1-6, the sacrificial layer is used to form the CMOS infrared sensing structure 2 into a hollowed-out structure, the material of the sacrificial layer is silicon oxide, and the sacrificial layer is etched by a post-CMOS process, which may, for example, etch the sacrificial layer by using at least one of gaseous hydrogen fluoride, carbon tetrafluoride, and trifluoromethane. Specifically, a sacrificial layer (not shown in fig. 1 to 4) is provided between the reflective layer 4 and the beam structure 11, and when the close release isolation layer 3 is provided on the reflective layer 4, the sacrificial layer is provided between the close release isolation layer 3 and the beam structure 11, and the material constituting the sacrificial layer is silicon oxide, so as to be compatible with a CMOS process, a post-CMOS process may be adopted, that is, the post-CMOS process corrodes the sacrificial layer to release the sacrificial layer in the final infrared detection chip product.

In some embodiments, referring to fig. 1 to 4, the CMOS infrared sensing structure 2 includes an absorption plate 10, a beam structure 11, a reflection layer 4 and a pillar structure 6, the absorption plate 10 includes a metal interconnection layer and at least one thermal sensitive medium layer, the material of the thermal sensitive medium layer includes at least one of amorphous silicon, amorphous germanium, amorphous silicon germanium, titanium oxide, vanadium oxide or vanadium titanium oxide, the metal interconnection layer of the absorption plate 10 is an electrode layer 14 of the absorption plate 10 for transmitting the electrical signal converted from the infrared signal, the thermal sensitive medium layer includes at least a thermal sensitive layer 12 and may further include a supporting layer 13 and a passivation layer 15, the material of the thermal sensitive medium layer includes at least one of amorphous silicon, amorphous germanium, amorphous silicon germanium, titanium oxide, vanadium oxide or vanadium titanium oxide, that is, the material constituting the thermosensitive layer 12 includes at least one of amorphous silicon, amorphous germanium, amorphous silicon-germanium, titanium oxide, vanadium oxide, or titanium vanadium oxide.

The beam structure 11 and the columnar structure 6 are used for transmitting electrical signals and for supporting and connecting the absorption plate 10, the electrode layer 14 in the absorption plate 10 includes two patterned electrode structures, the two patterned electrode structures output positive electrical signals and ground electrical signals respectively, the positive electrical signals and the ground electrical signals are transmitted to the supporting base electrically connected with the columnar structure 6 through different beam structures 11 and different columnar structures 6 and then transmitted to the CMOS measurement circuit system 1, the beam structure 11 includes a metal interconnection layer and at least one dielectric layer, the metal interconnection layer in the beam structure 11 is the electrode layer 14 in the beam structure 11, the electrode layer 14 in the beam structure 11 is electrically connected with the electrode layer 14 in the absorption plate 10, and the dielectric layer in the beam structure 11 may include a supporting layer 13 and a passivation layer 15.

The columnar structure 6 is connected with the beam structure 11 and the CMOS measuring circuit system 1 by adopting a metal interconnection process and a through hole process, the upper part of the columnar structure 6 needs to be electrically connected with an electrode layer 14 in the beam structure 11 through a through hole penetrating through a supporting layer 13 in the beam structure 11, and the lower part of the columnar structure 6 needs to be electrically connected with a corresponding supporting base 42 through a through hole penetrating through a dielectric layer on the supporting base 42. The reflecting plate 41 is used for reflecting infrared signals and forms a resonant cavity with the heat-sensitive medium layer, that is, the reflecting plate 41 is used for reflecting infrared signals and forms a resonant cavity with the heat-sensitive medium layer, and the reflecting layer 4 comprises at least one metal interconnection layer which is used for forming the supporting base 42 and also used for forming the reflecting plate 41. In addition, the pillar structure 6 may include one layer of independent pillar structures as shown in fig. 1, or may include multiple layers of independent pillar structures as shown in fig. 2, which is beneficial to optimizing the straightness of the pillar structure 6.

In some embodiments, at least two ends of the beam structure 11 and the absorption plate 10 may be electrically connected, the CMOS infrared sensing structure 2 includes at least two pillar structures 6 and at least two supporting pedestals 42, and the electrode layer 14 includes at least two electrode terminals. Specifically, as shown in fig. 1, the beam structures 11 are electrically connected to two ends of the absorption plate 10, each beam structure 11 is electrically connected to one end of the absorption plate 10, the CMOS infrared sensing structure 2 includes two pillar structures 6, the electrode layer 14 includes at least two electrode terminals, at least a portion of the electrode terminals transmit positive electrical signals, at least a portion of the electrode terminals transmit negative electrical signals, and the signals are transmitted to the supporting base 42 through the corresponding beam structures 11 and pillar structures 6.

Fig. 7 is a schematic perspective view of another infrared detector provided in the embodiments of the present disclosure. As shown in fig. 7, it is also possible to provide beam structures 11 electrically connected to four ends of the absorption plate 10, each beam structure 11 electrically connected to two ends of the absorption plate 10, and the CMOS infrared sensing structure 2 includes four columnar structures 6, and one beam structure 11 connects two columnar structures 6. It should be noted that, in the embodiment of the present disclosure, the number of the connecting ends of the beam structure 11 and the absorbing plate 10 is not particularly limited, and it is sufficient that the beam structure 11 and the electrode terminal are respectively present, and the beam structure 11 is used for transmitting the electrical signal output by the corresponding electrode terminal.

In some embodiments, the infrared detector may be configured based on a 3nm, 7nm, 10nm, 14nm, 22nm, 28nm, 32nm, 45nm, 65nm, 90nm, 130nm, 150nm, 180nm, 250nm, or 350nm cmos process that characterizes a process node of the integrated circuit, i.e., a feature size during processing of the integrated circuit.

In some embodiments, the material constituting the metal interconnection layer in the infrared detector may be configured to include at least one of aluminum, copper, tungsten, titanium, nickel, chromium, platinum, silver, ruthenium, or cobalt, for example, the material constituting the reflective layer may be configured to include at least one of aluminum, copper, tungsten, titanium, nickel, chromium, platinum, silver, ruthenium, or cobalt. In addition, the CMOS measuring circuit system 1 and the CMOS infrared sensing structure 2 are both prepared by using a CMOS process, the CMOS infrared sensing structure 2 is directly prepared on the CMOS measuring circuit system 1, the radial side length of the columnar structure 6 is more than or equal to 0.5um and less than or equal to 3um, the width of the beam structure 11, namely the width of a single line in the beam structure 11 is less than or equal to 0.3um, the height of a resonant cavity is more than or equal to 1.5um and less than or equal to 2.5um, and the side length of a single pixel of the CMOS infrared sensing structure 2 is more than or equal to 6um and less than or equal to 17 um.

In some embodiments, the through holes may include at least one metal layer, so as to electrically connect the infrared conversion structure 40 and the supporting base 42 by using the pillar structures 6 associated with the through holes, and different types of pillar structures 6 may be correspondingly formed by arranging the spatial position distribution of the metal layers in the through holes. Optionally, the metal layer may fill the entire through hole, so that a solid metal pillar may be formed, which has relatively small resistance and high support stability, and is beneficial to improving the structural stability of the infrared detector, and meanwhile, reduces the loss of signal transmission through the columnar structure 6, and improves the detection performance. Or, the metal layer can cover the side wall and the bottom of the through hole, so that a hollow column or a non-metal solid column can be formed, the heat conduction is less, and the detection performance of the infrared detector is favorably improved.

In some embodiments, the metal layer material may include at least one of aluminum, titanium, tungsten, or copper, so as to utilize the better electrical properties thereof to achieve a good electrical connection between the infrared conversion structure 40 and the support base 42, and ensure better detection performance of the infrared detector.

In some embodiments, the via hole may further include at least one dielectric layer, which may be located on at least one side of the metal layer to achieve insulation protection of the metal layer, slow down performance degradation of the metal layer, and prolong the service life of the metal layer, where the dielectric layer corresponds to the pillar structure 6 of the hollow pillar.

Or, at least one dielectric layer may be further filled in the entire through hole to form a non-metal solid column, so that while the heat conduction of the columnar structure 6 is reduced, the mechanical stability of the columnar structure 6 can be improved by using the dielectric filling, thereby realizing the stable support of the infrared conversion structure 40.

The at least one dielectric layer is arranged to play a role in insulating and protecting the metal layer used as the reflecting layer so as to slow down the performance attenuation of the reflecting layer; meanwhile, the at least one dielectric layer can cover at least the bottom of the columnar structure, or when the thickness of the at least one dielectric layer is thicker, the at least one dielectric layer can cover the middle of the columnar structure upwards or even cover the whole columnar structure, so that the effect of stable support is achieved. Alternatively, the at least one dielectric layer may be used as a hermetic release barrier layer, or the at least one dielectric layer and the hermetic release barrier layer may be separately disposed, which is not limited herein.

In some embodiments, with continued reference to fig. 2, the pillar structures 6 are used with one CMOS infrared sensing structure 2, and the CMOS infrared sensing structure 2 includes at least 2 (2 are shown in fig. 2) pillar structures 6 for electrical signal transmission.

By the arrangement, signal interference among the CMOS infrared sensing structures 2 is small, and detection accuracy and resolution are improved.

In some embodiments, fig. 8 is a schematic cross-sectional structure diagram of another infrared detector provided in the embodiments of the present disclosure. Referring to fig. 8, the pillar structures 6 are used for two or more CMOS infrared sensing structures 2, and the CMOS infrared sensing structure 2 includes at least 2 (2 are shown in fig. 8) pillar structures 6 for electrical signal transmission.

The columnar structures 6 are shared between the at least two CMOS infrared sensing structures 2, and compared with the situation that the columnar structures 6 of each CMOS infrared sensing structure 2 are respectively arranged, the number of the columnar structures 6 in the infrared detector can be reduced, so that the space occupied by the columnar structures 6 in the infrared detector is reduced; correspondingly, the effective area ratio in the infrared conversion structure 40 is increased, the duty ratio of the infrared detector is improved, and the detection sensitivity is improved.

In some embodiments, fig. 9 is a schematic cross-sectional structure diagram of another infrared detector provided in the embodiments of the present disclosure. Referring to fig. 9, in conjunction with fig. 2 and 9, the pillar structure 6 includes at least one metal layer, which is located right above the supporting base 42, and through holes are formed by using a CMOS via process, the metal layer electrically connects the beam structure 11 and the supporting base 42, and transmits an electrical signal received on the beam structure 11 to the supporting base 42 through the pillar structure 6, see fig. 2 and 9; or a metal layer electrically connects the beam structure 11 and the absorber plate 10 to transmit an electrical signal on the absorber plate 10 to the beam structure 11 via the columnar structure 6, see fig. 9.

Fig. 2 shows an infrared detector including a single-layer columnar structure 6, which is simple in structure and low in process difficulty. Fig. 9 shows an infrared detector including a double-layer columnar structure 6, in which one layer of the columnar structure 6 is used to connect the support base 42 and the beam structure 11, and the other layer of the columnar structure 6 is used to connect the beam structure 11 and the absorber plate 10, so that an electric signal transmission path from the absorber plate 10, the columnar structure 6, the beam structure 11, the columnar structure 6, the support base 42 to the CMOS measurement circuit system 1 is formed.

In the infrared detector structure shown in fig. 9, the absorption plate 10 is disposed above the beam structure 11, and compared with a structure in which the beam structure 11 and the absorption plate 10 are disposed in the same plane, the effective area occupied by the beam structure 11 can be reduced, so that the occupation ratio of the absorption plate 10 in the plane where the absorption plate is located is increased, that is, the duty ratio is increased, thereby facilitating the improvement of the detection sensitivity.

Thus, in some embodiments, the columnar structure 6 is connected between the beam structure 11 and the absorption plate 10, or the columnar structure 6 is connected between the beam structure 11 and the support base 42, i.e., the columnar structure 6 is connected with at least two of the beam structure 11, the absorption plate 10, and the support base 42. Optionally, at least one metal layer or dielectric layer may be further included at the joint to form a reinforcing structure 65, see fig. 10, for enhancing the mechanical strength of the joint, thereby enhancing the overall stability of the structure.

For example, referring to fig. 10, taking the connection between the beam structure 11 and the column structure 6 as an example, the reinforcing structure 65 may be disposed on a side of the beam structure 11 away from the column structure 6, and can press the beam structure 11 to enhance the connection stability between the beam structure 11 and the column structure 6.

In other embodiments, reinforcing structure 65 may be implemented in other relative spatial locations, which are not limited herein.

In some embodiments, the radial dimension of the columnar structures 6, i.e., their cross-sectional maximum unidirectional width, is greater than or equal to 0.5 microns and less than or equal to 3 microns.

By the arrangement, the size of the columnar structure 6 on the plane where the reflecting plate 41 is located can be reduced while stable support is met by the columnar structure 6, so that the smaller chip area under the same array pixel is realized, and the miniaturization of a chip is realized; in addition, the ratio of the effective areas of the reflection plate 41 and the corresponding infrared conversion structure 40 is improved, the signal intensity is enhanced, and the detection performance is improved.

Illustratively, when the cross-section of the columnar structure 6 is circular, its diameter is less than or equal to 3 micrometers; when the cross section of the columnar structure 6 is square, the side length is more than or equal to 0.5 micrometer and less than or equal to 3 micrometers; when the cross section of the columnar structure 6 is polygonal, the diagonal length is greater than or equal to 0.5 micrometer and less than or equal to 3 micrometers; when the cross section of the columnar structure 6 is a long strip, the length of the long side is greater than or equal to 0.5 micrometer and less than or equal to 3 micrometers.

Illustratively, the cross-sectional maximum unidirectional width of the columnar structures 6 may be 3 micrometers, 2.5 micrometers, 2 micrometers, 1 micrometer, 0.8 micrometer, or other width values, and may be set based on the requirements of the infrared detector, which is not limited herein.

In some embodiments, to meet other requirements of the infrared detector, the maximum unidirectional width of the cross section of the columnar structure 6 may also be set to be greater than 3 micrometers, which is not limited herein.

In some embodiments, the height of the columnar structures 6 in a direction perpendicular to the plane of the reflection plate 41 is greater than or equal to 1.5 micrometers, and less than or equal to 2.5 micrometers.

The height of the columnar structure 6 in the direction perpendicular to the plane of the reflection plate 41 may be referred to as the height of the columnar structure 6, which is the supporting height of the columnar structure 6 and is also the distance between two parallel planes of the resonant cavity of the infrared detector pixel, i.e. the distance between the reflection surface of the reflection plate 41 and the absorption surface of the infrared conversion structure 40.

On the basis, the height of the columnar structure 6 is larger than or equal to 0.5 micrometer, so that the implementation by adopting a CMOS (complementary metal oxide semiconductor) process is facilitated, and the process difficulty is reduced; on the other hand, the requirement of the distance between the parallel planes of the resonant cavity can be met, and the absorption efficiency of infrared rays is improved, so that the detection sensitivity is improved. Meanwhile, the height of the columnar structure 6 is smaller than or equal to 2.5 microns, so that the height of the columnar structure 6 cannot be too high, the problem of poor stability caused by the fact that the columnar structure 6 is too high is solved, and the structural stability is improved; meanwhile, the size of the infrared detector pixel and the size of the whole infrared detector in the height direction are reduced, and the light, thin and small design of the infrared detector is realized.

Illustratively, the height of the pillar structures 6 may be 0.5 microns, 0.8 microns, 1.0 microns, 1.8 microns, 2.0 microns, 2.3 microns, 2.5 microns, or other height values, and may be set based on the performance requirements of the infrared detector and the CMOS process requirements, but is not limited thereto.

The CMOS measurement circuit system 1 and the CMOS infrared sensing structure 2 are integrally prepared on the CMOS production line by utilizing the CMOS process, compared with the MEMS process, the CMOS process does not have the process compatibility problem, the technical difficulty of the MEMS process is solved, the transportation cost can be reduced by adopting the CMOS production line process to prepare the infrared detector, and the risk caused by the transportation problem and the like is reduced; the infrared detector takes silicon oxide as a sacrificial layer, the silicon oxide is completely compatible with a CMOS (complementary metal oxide semiconductor) process, the preparation process is simple and easy to control, the CMOS process does not have the problem that the polyimide of the sacrificial layer is not released cleanly to influence the vacuum degree of a detector chip, the subsequent film growth temperature is not limited by the material of the sacrificial layer, the multilayer process design of the sacrificial layer can be realized, the process is not limited, the planarization can be easily realized by using the sacrificial layer, and the process difficulty and the possible risks are reduced; the infrared detector prepared by the integrated CMOS process can realize the aims of high yield, low cost, high yield and large-scale integrated production of chips, and provides a wider application market for the infrared detector; the infrared detector based on the CMOS process can realize smaller size and thinner film thickness of a characteristic structure, so that the infrared detector has larger duty ratio, lower thermal conductivity and smaller thermal capacity, and the infrared detector has higher detection sensitivity, longer detection distance and better detection performance; the infrared detector based on the CMOS process can make the pixel size of the detector smaller, realize smaller chip area under the same array pixel, and is more beneficial to realizing the miniaturization of a chip; the infrared detector based on the CMOS process has the advantages of mature process production line, higher process control precision, better meeting design requirements, better product consistency, more contribution to circuit chip adjustment performance and more contribution to industrialized mass production.

It is noted that, in this document, relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

The previous description is only for the purpose of describing particular embodiments of the present disclosure, so as to enable those skilled in the art to understand or implement the present disclosure. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the disclosure. Thus, the present disclosure is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An infrared detector based on a CMOS process, comprising:

the CMOS manufacturing process of the CMOS infrared sensing structure comprises a metal interconnection process, a through hole process and an RDL (remote data link) process, wherein the CMOS infrared sensing structure comprises at least two metal layers, at least two dielectric layers and a plurality of interconnection through holes, the dielectric layers at least comprise a sacrificial layer and a heat sensitive dielectric layer, and the metal layers at least comprise a reflecting layer and an electrode layer; the thermal sensitive medium layer is used for converting temperature change corresponding to infrared radiation absorbed by the thermal sensitive medium layer into resistance change, and further converting an infrared target signal into a signal capable of realizing electric reading through the CMOS measuring circuit system; the closed release isolation layer is positioned above the metal interconnection layer of the reflection layer, wraps the columnar structure, is used for protecting the CMOS measurement circuit system from being corroded when a sacrificial layer is released by a corrosion process, is used for supporting the columnar structure, reduces the contact resistance between the columnar structure and the external environment and reduces the thickness of the sacrificial layer; the CMOS technology corrosion-resistant material adopted by the closed release isolation layer comprises at least one of silicon, germanium, silicon-germanium alloy, amorphous silicon, amorphous germanium, amorphous silicon-germanium, amorphous carbon, silicon carbide, aluminum oxide, silicon nitride or silicon carbonitride;

the reflecting layer comprises at least one metal interconnection layer, the reflecting layer comprises a reflecting plate and a supporting base, the micro-bridge structure comprises an absorption plate and a beam structure, the columnar structure comprises at least one metal layer, the metal layer is positioned right above the supporting base, a through hole is formed by utilizing a CMOS through hole process, the metal layer is electrically connected with the beam structure and the supporting base, an electric signal received on the beam structure is transmitted to the supporting base through the columnar structure, or the metal layer is electrically connected with the beam structure and the absorption plate, and an electric signal on the absorption plate is transmitted to the beam structure through the columnar structure;

2. The CMOS process-based infrared detector according to claim 1, wherein the via hole comprises at least one metal layer, the metal layer filling the entire via hole or covering the via hole sidewall and bottom; the metal layer material comprises at least one of aluminum, titanium, tungsten or copper.

3. The CMOS process-based infrared detector according to claim 2, wherein the via hole further comprises at least one dielectric layer on one side of the metal layer or filling the entire via hole.

4. The CMOS process-based infrared detector of claim 2, wherein the columnar structure further comprises at least one dielectric layer disposed around the columnar structure above the reflective layer.

5. The CMOS process-based infrared detector according to claim 1, wherein the pillar structures are used for one or more CMOS infrared sensing structures, and the CMOS infrared sensing structures comprise at least 2 pillar structures for electrical signal transmission.

6. The CMOS process-based infrared detector according to claim 1, wherein the pillar structure is connected to at least two of the beam structure, the absorption plate and the support base, and the connection portion further comprises at least one metal layer or a dielectric layer for enhancing mechanical strength of the connection portion.

7. The CMOS process-based infrared detector according to claim 1, wherein the infrared sensing structure is fabricated on top of or in the same layer as a metal interconnect layer of the CMOS measurement circuitry.

8. The CMOS process-based infrared detector as claimed in claim 1, wherein said sacrificial layer is used for making said CMOS infrared sensing structure form a hollowed-out structure, a material constituting said sacrificial layer is silicon oxide, and said sacrificial layer is etched by a post-CMOS process.

9. The CMOS process-based infrared detector of claim 8, wherein the post-CMOS process etches the sacrificial layer with at least one of gaseous hydrogen fluoride, carbon tetrafluoride, and trifluoromethane.

10. The CMOS process-based infrared detector according to claim 1, wherein the CMOS infrared sensing structure comprises the microbridge structure, the reflective layer, and the pillar structure;

the absorption plate is used for absorbing the infrared target signal and converting the infrared target signal into an electric signal, the absorption plate comprises a metal layer and at least one layer of the heat sensitive dielectric layer, and the material for forming the heat sensitive dielectric layer comprises at least one of amorphous silicon, amorphous germanium, amorphous silicon germanium, titanium oxide, vanadium oxide or titanium vanadium oxide;

the reflecting layer is used for reflecting infrared signals and forms the resonant cavity together with the heat-sensitive medium layer, and the reflecting layer comprises at least one metal layer.

11. The CMOS process based infrared detector of claim 6, wherein at least two ends of said beam structure and said absorber plate are electrically connected, said CMOS infrared sensing structure comprises at least two said pillar structures and at least two supporting pedestals, and said electrode layer comprises at least two electrode terminals.

12. The CMOS process based infrared detector of claim 1, wherein the infrared detector is based on a 3nm, 7nm, 10nm, 14nm, 22nm, 28nm, 32nm, 45nm, 65nm, 90nm, 130nm, 150nm, 180nm, 250nm, or 350nm CMOS process.

13. The CMOS process-based infrared detector according to claim 1, wherein a material constituting the metal layer includes at least one of aluminum, copper, tungsten, titanium, nickel, chromium, platinum, silver, ruthenium, or cobalt.