CN113720161A - Rapid cooling system in furnace - Google Patents
Rapid cooling system in furnace Download PDFInfo
- Publication number
- CN113720161A CN113720161A CN202010448730.3A CN202010448730A CN113720161A CN 113720161 A CN113720161 A CN 113720161A CN 202010448730 A CN202010448730 A CN 202010448730A CN 113720161 A CN113720161 A CN 113720161A
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- CN
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- Prior art keywords
- heat dissipation
- furnace
- tube
- fan
- assemblies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 50
- 230000017525 heat dissipation Effects 0.000 claims abstract description 79
- 238000010438 heat treatment Methods 0.000 claims abstract description 26
- 238000000429 assembly Methods 0.000 claims description 22
- 230000000712 assembly Effects 0.000 claims description 22
- 238000009529 body temperature measurement Methods 0.000 claims description 10
- 238000003466 welding Methods 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 6
- 230000000694 effects Effects 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000005587 bubbling Effects 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
- F27D2009/0002—Cooling of furnaces
- F27D2009/0005—Cooling of furnaces the cooling medium being a gas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
- F27D2009/0002—Cooling of furnaces
- F27D2009/0037—Cooling of furnaces the cooling medium passing a radiator
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0028—Regulation
- F27D2019/0056—Regulation involving cooling
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Details (AREA)
Abstract
The invention discloses a rapid cooling system in a furnace, which comprises a heating furnace body, a furnace tube arranged in the heating furnace body, a heat dissipation assembly, a connecting tube, a fan assembly and a controller, wherein the heat dissipation assembly is arranged in the furnace tube, an air inlet and an air outlet of the heat dissipation assembly penetrate through the outer wall of the furnace tube and extend outwards, the air inlet of the heat dissipation assembly is connected with the fan assembly through the connecting tube, the controller is connected with the fan assembly, and the controller is used for controlling the start and stop of the fan assembly and the air volume. The invention has the advantages of simple structure, high cooling efficiency, good cooling effect and the like.
Description
Technical Field
The invention relates to the field of photovoltaic and semiconductor equipment, in particular to a rapid cooling system in a furnace.
Background
The heating furnace tube is widely applied to the fields of photovoltaic and semiconductor equipment, such as a diffusion furnace, a PECVD (plasma enhanced chemical vapor deposition), an LPCVD (low pressure chemical vapor deposition), an annealing furnace, an oxidation furnace, an alloy furnace and the like. The rapid temperature rise and fall is an important index of the heating furnace tube, and the rapid temperature rise is mainly realized by increasing the heat insulation layer of the heating furnace body, the heating power or auxiliary heating and the like; and the rapid cooling adopts a water-cooled furnace body or a thinned heating furnace body heat-insulating layer. The water-cooled furnace body has high requirements on the processing technology of the heating furnace body, and risks of water leakage, furnace body bubbling and cracking and the like exist; and the thinning of the heat-insulating layer of the heating furnace body can influence the heating rate and increase the heating power. Therefore, in view of the shortcomings of the two rapid cooling methods for heating furnace tubes, a need exists in the art for a system that can achieve rapid cooling of the heating furnace body without affecting the heat preservation and heating rate of the heating furnace body.
Disclosure of Invention
Aiming at the technical problems in the prior art, the invention provides the rapid cooling system in the furnace, which has the advantages of simple structure, high cooling efficiency and good cooling effect.
In order to solve the technical problems, the invention adopts the following technical scheme:
the utility model provides a quick cooling system in stove, includes the heating furnace body, be equipped with the boiler tube in the heating furnace body, still include radiator unit, connecting pipe, fan subassembly and controller, radiator unit sets up in the boiler tube, radiator unit's air intake and air outlet all pass the outer wall of boiler tube and outwards stretch out, radiator unit's air intake passes through the connecting pipe and links to each other with the fan subassembly, the controller is used for controlling the fan subassembly and opens and stop and the amount of wind size.
As a further improvement of the above technical solution: the heat dissipation assembly is a U-shaped heat dissipation tube or an S-shaped heat dissipation tube or a spiral heat dissipation tube, and an air inlet and an air outlet of the heat dissipation assembly penetrate through the outer wall of the tail end of the furnace tube and extend outwards.
As a further improvement of the above technical solution: the heat dissipation assemblies are arranged in the furnace pipe symmetrically.
As a further improvement of the above technical solution: the heat dissipation assemblies are arranged in the furnace tube in an annular and uniform mode.
As a further improvement of the above technical solution: the fan assembly is one and is respectively connected with the air inlets of the plurality of radiating assemblies through connecting pipes.
As a further improvement of the above technical solution: the number of the fan assemblies is matched with the number of the heat dissipation assemblies, and the fan assemblies are connected with the heat dissipation assemblies through connecting pipes.
As a further improvement of the above technical solution: the inner wall of the furnace tube is provided with a supporting component, and the heat dissipation component is arranged on the inner wall of the furnace tube through the supporting component.
As a further improvement of the above technical solution: the heat dissipation assembly is connected with the inner wall of the furnace tube in a welding mode.
As a further improvement of the above technical solution: the fan assembly is a high-pressure centrifugal fan or a blower.
As a further improvement of the above technical solution: the joints of the air inlet and the air outlet of the heat dissipation assembly and the outer wall of the furnace tube are sealed in a welding mode or are in sealing connection through sealing pieces.
As a further improvement of the above technical solution: the temperature measurement device is characterized by further comprising a temperature measurement component, wherein the temperature measurement component is arranged in the heating furnace body and connected with the controller, and the temperature measurement component is used for detecting the temperature of the furnace tube and feeding a temperature measurement result back to the controller.
Compared with the prior art, the invention has the advantages that:
1. the invention relates to a furnace interior rapid cooling system, which is characterized in that a heat dissipation assembly, a fan assembly and a controller are arranged, the heat dissipation assembly is connected with the fan assembly, the controller is connected with the fan assembly to control the starting and stopping of the fan assembly and the air volume, an air inlet of the heat dissipation assembly is connected with the fan assembly through a connecting pipe, when a furnace tube needs to be cooled, the controller controls the fan assembly to be started, cooling air is fed from the air inlet of the heat dissipation assembly, the cooling air exchanges heat with the furnace tube in the heat dissipation assembly, heat in the furnace tube is carried and discharged from an air outlet, the temperature in the furnace tube can be rapidly reduced, the air volume of the fan assembly is controlled through the controller, different cooling rates can be realized, an air cooling mode adopted by the system is low in furnace body processing technology requirement, and risks of water leakage, bubbling and the like of a furnace body cannot exist.
2. According to the in-furnace rapid cooling system, the heat dissipation assembly adopts the U-shaped heat dissipation tube or the S-shaped heat dissipation tube or the spiral heat dissipation tube, and the surface area of the heat dissipation assembly can be effectively increased by setting the heat dissipation assembly into any shape, so that the heat exchange area between the heat dissipation assembly and the furnace tube can be enlarged, the heat exchange amount is increased, more heat can be taken by the heat dissipation assembly within the same time, and the in-furnace rapid cooling is realized.
Drawings
Fig. 1 is a schematic structural diagram of a first embodiment of the present invention.
Fig. 2 is a perspective view of a heat dissipation assembly according to a first embodiment of the invention.
Fig. 3 is a side view structural diagram of the heat dissipation assembly in the second embodiment of the invention.
Fig. 4 is a side view structural diagram of the heat dissipation assembly of the present invention in the third embodiment.
Illustration of the drawings:
1. heating the furnace body; 2. a furnace tube; 3. a heat dissipating component; 4. a connecting pipe; 5. a fan assembly; 6. and a controller.
Detailed Description
The invention will be described in further detail below with reference to the drawings and specific examples.
Example one
As shown in fig. 1 to 2, the invention discloses a rapid cooling system in a furnace, which comprises a heating furnace body 1, a furnace tube 2 arranged in the heating furnace body 1, a heat dissipation assembly 3, a connecting tube 4, a fan assembly 5 and a controller 6, wherein the heat dissipation assembly 3 is arranged in the furnace tube 2, an air inlet and an air outlet of the heat dissipation assembly 3 both penetrate through the outer wall of the furnace tube 2 and extend outwards, the air inlet of the heat dissipation assembly 3 is connected with the fan assembly 5 through the connecting tube 4, the controller 6 is connected with the fan assembly 5, and the controller 6 is used for controlling the start and stop of the fan assembly 5 and the air volume.
According to the in-furnace rapid cooling system, the heat dissipation assembly 3 is connected with the fan assembly 5, the controller 6 is connected with the fan assembly 5 to control the starting and stopping of the fan assembly 5 and the air quantity, the air inlet of the heat dissipation assembly 3 is connected with the fan assembly 5 through the connecting pipe 4, when the furnace tube 2 needs to be cooled, the controller 6 controls the fan assembly 5 to be started to feed cooling air from the air inlet of the heat dissipation assembly 3, the cooling air exchanges heat with the furnace tube 2 in the heat dissipation assembly 3 and carries heat in the furnace tube 2 to be discharged from the air outlet, the temperature in the furnace tube 2 can be rapidly reduced, the air quantity of the fan assembly 5 is controlled through the controller 6, different cooling rates can be achieved, the in-furnace rapid cooling system adopts an air cooling mode, the requirements on the furnace body processing technology are low, and water leakage does not exist, The furnace body bubbles and cracks and other risks.
In this embodiment, the heat dissipation assembly 3 is a U-shaped heat dissipation tube, and the air inlet and the air outlet of the heat dissipation assembly 3 both penetrate through the outer wall of the tail end of the furnace tube 2 and extend outward. The quantity of U type cooling tube can set up according to the cooling needs, and is further, in preferred embodiment, U type cooling tube is a plurality of, for symmetrical arrangement or be annular evenly distributed in boiler tube 2, through setting up a plurality of U type cooling tubes, has increased the area of heat exchange, and symmetrical arrangement or be annular evenly distributed and can realize the even quick cooling of boiler tube 2, the cooling effect is better.
In this embodiment, fan subassembly 5 is one, and radiator unit 3 is a plurality of U type cooling tubes, and fan subassembly 5 passes through connecting pipe 4 and links to each other with a plurality of radiator unit 3's air intake respectively, and the air supply volume through controller 6 control fan subassembly 5 can realize letting in the cooling air to a plurality of radiator unit 3 simultaneously. In other embodiments, the number of fan assemblies 5 may match the number of heat dissipation assemblies 3, i.e., one fan assembly 5 is connected to one heat dissipation assembly 3 through a connecting pipe 4. Independent control of fan assemblies 5 can be realized by independently connecting fan assemblies 5 with radiating assemblies 3, and opening and closing control and air supply volume control can be independently performed on fan assemblies 5 according to different cooling requirements.
In this embodiment, the inner wall of the furnace tube 2 is provided with a supporting component, and the heat dissipation component 3 is installed on the inner wall of the furnace tube 2 through the supporting component. The heat dissipation component 3 is convenient to disassemble, assemble and maintain through the connection of the supporting component. In other embodiments, the heat dissipation assembly 3 and the inner wall of the furnace tube 2 can be directly connected in a welding manner, and the connection reliability is higher due to the welding manner.
In this embodiment, the fan assembly 5 is a centrifugal fan or a blower, and further, the fan assembly 5 is preferably a high-pressure centrifugal fan.
In this embodiment, the joints between the air inlet and the air outlet of the heat dissipation assembly 3 and the outer wall of the furnace tube 2 are sealed in a welding manner, and the sealing effect is good. In other embodiments, the connection between the air inlet and the air outlet of the heat dissipation assembly 3 and the outer wall of the furnace tube 2 can be hermetically connected through a sealing element, such as a sealing ring, so that the heat dissipation assembly 3 can be conveniently disassembled and assembled.
In this embodiment, the furnace further comprises a temperature measuring component, the temperature measuring component is arranged in the heating furnace body 1, the temperature measuring component is connected with the controller 6, and the temperature measuring component is used for detecting the temperature of the furnace tube 2 and feeding back a temperature measuring result to the controller 6. The temperature in the furnace tube 2 can be detected in real time through the temperature measuring component, the temperature measuring component feeds temperature measuring data back to the controller 6 in real time, and the controller 6 automatically controls the fan component 5 to adjust the air supply volume, so that the accurate adjustment of the cooling rate is realized.
Example two
As shown in fig. 3, the present embodiment is substantially the same as the first embodiment, except that in the present embodiment, the heat dissipation assembly 3 is an S-shaped heat dissipation tube, the S-shaped heat dissipation tube is formed by connecting upright U-shaped heat dissipation tubes and inverted U-shaped heat dissipation tubes in series, further, in the preferred embodiment, two upright U-shaped tubes and one inverted U-shaped heat dissipation tube in series are connected, in other embodiments, the number of the U-shaped heat dissipation tubes in series can be adjusted as required, and the heat exchange contact area can be effectively increased and the cooling rate can be increased by connecting a plurality of U-shaped heat dissipation tubes in series.
EXAMPLE III
As shown in fig. 4, the present embodiment is substantially the same as the first embodiment, except that in the present embodiment, the heat dissipation assembly 3 is a spiral heat dissipation tube, and the heat dissipation assembly 3 is designed to be spiral, so as to increase the heat exchange contact area, meanwhile, because the heat dissipation assembly 3 is spiral, the speed of the cooling air flowing in the heat dissipation assembly 3 is slower than that of the straight heat dissipation tube, thereby ensuring that the heat dissipation assembly 3 and the furnace tube 2 perform sufficient heat exchange, and increasing the utilization rate of the cooling air.
The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above-mentioned embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may be made by those skilled in the art without departing from the principle of the invention.
Claims (10)
1. The utility model provides a quick cooling system in stove, includes heating furnace body (1), be equipped with boiler tube (2) in heating furnace body (1), its characterized in that still includes radiator unit (3), connecting pipe (4), fan subassembly (5) and controller (6), radiator unit (3) set up in boiler tube (2), the outer wall that boiler tube (2) were all passed to radiator unit's (3) air intake and air outlet outwards stretches out, radiator unit's (3) air intake passes through connecting pipe (4) and links to each other with fan subassembly (5), controller (6) link to each other with fan subassembly (5), controller (6) are used for controlling fan subassembly (5) and open and stop and the amount of wind size.
2. The system for rapidly cooling a furnace according to claim 1, wherein the heat dissipation assembly (3) is a U-shaped heat dissipation pipe, an S-shaped heat dissipation pipe or a spiral heat dissipation pipe, and the air inlet and the air outlet of the heat dissipation assembly (3) both penetrate through the outer wall of the tail end of the furnace tube (2) and protrude outwards.
3. The system for rapidly cooling in a furnace according to claim 2, wherein the number of the heat dissipation assemblies (3) is multiple, and the heat dissipation assemblies (3) are symmetrically arranged in the furnace tube (2) or uniformly arranged in the furnace tube (2) in an annular shape.
4. The system for rapidly cooling in a furnace according to claim 3, wherein the number of the fan assemblies (5) is one, and the fan assemblies (5) are respectively connected with the air inlets of the plurality of heat dissipation assemblies (3) through connecting pipes (4).
5. The system for rapidly cooling the interior of a furnace in accordance with claim 3, wherein the number of the fan assemblies (5) is matched with the number of the heat dissipation assemblies (3), and the fan assemblies (5) are connected with the heat dissipation assemblies (3) through connecting pipes (4).
6. The system for rapidly cooling in a furnace according to any one of claims 1 to 5, wherein the inner wall of the furnace tube (2) is provided with a supporting component, and the heat dissipation component (3) is mounted on the inner wall of the furnace tube (2) through the supporting component.
7. The system for rapidly cooling in a furnace according to any one of claims 1 to 5, wherein the heat dissipation assembly (3) is connected with the inner wall of the furnace tube (2) by welding.
8. The rapid cooling system in a furnace according to any one of claims 1 to 5, wherein the fan assembly (5) is a high pressure centrifugal fan or a blower.
9. The system for rapidly cooling in a furnace according to any one of claims 1 to 5, wherein the joints of the air inlet and the air outlet of the heat dissipation assembly (3) and the outer wall of the furnace tube (2) are sealed by welding or by sealing elements.
10. The system for rapidly cooling in the furnace according to any one of claims 1 to 5, further comprising a temperature measurement component, wherein the temperature measurement component is arranged in the heating furnace body (1), the temperature measurement component is connected with the controller (6), and the temperature measurement component is used for detecting the temperature of the furnace tube (2) and feeding back the temperature measurement result to the controller (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010448730.3A CN113720161A (en) | 2020-05-25 | 2020-05-25 | Rapid cooling system in furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010448730.3A CN113720161A (en) | 2020-05-25 | 2020-05-25 | Rapid cooling system in furnace |
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| Publication Number | Publication Date |
|---|---|
| CN113720161A true CN113720161A (en) | 2021-11-30 |
Family
ID=78671562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010448730.3A Pending CN113720161A (en) | 2020-05-25 | 2020-05-25 | Rapid cooling system in furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN113720161A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4600181A (en) * | 1983-09-08 | 1986-07-15 | Italimpianti Societa Italiana Impianti P.A. | Gas cooling and recirculating device in continuous strip furnaces |
| US4753192A (en) * | 1987-01-08 | 1988-06-28 | Btu Engineering Corporation | Movable core fast cool-down furnace |
| CN102252782A (en) * | 2011-05-10 | 2011-11-23 | 上海量值测控仪器科技有限公司 | Special temperature-reduction accelerator for horizontal type thermocouple testing furnace |
| CN105222597A (en) * | 2015-09-30 | 2016-01-06 | 中国电子科技集团公司第四十八研究所 | A kind of horizontal diffusion furnace fast cooling body of heater |
| CN205119807U (en) * | 2015-10-13 | 2016-03-30 | 天津市盛通达实验设备有限公司 | Energy -saving open -type tubular fibre stove |
| CN206113628U (en) * | 2016-10-25 | 2017-04-19 | 赵春祥 | Steerable temperature lifting speed's car -type resistance furnace |
| CN107621166A (en) * | 2017-09-08 | 2018-01-23 | 深圳粤通新能源环保技术有限公司 | A kind of variable-frequency electromagnetic energy non-ferrous metal casting furnace |
| CN212620153U (en) * | 2020-05-25 | 2021-02-26 | 湖南红太阳光电科技有限公司 | Rapid cooling system in furnace |
-
2020
- 2020-05-25 CN CN202010448730.3A patent/CN113720161A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4600181A (en) * | 1983-09-08 | 1986-07-15 | Italimpianti Societa Italiana Impianti P.A. | Gas cooling and recirculating device in continuous strip furnaces |
| US4753192A (en) * | 1987-01-08 | 1988-06-28 | Btu Engineering Corporation | Movable core fast cool-down furnace |
| CN102252782A (en) * | 2011-05-10 | 2011-11-23 | 上海量值测控仪器科技有限公司 | Special temperature-reduction accelerator for horizontal type thermocouple testing furnace |
| CN105222597A (en) * | 2015-09-30 | 2016-01-06 | 中国电子科技集团公司第四十八研究所 | A kind of horizontal diffusion furnace fast cooling body of heater |
| CN205119807U (en) * | 2015-10-13 | 2016-03-30 | 天津市盛通达实验设备有限公司 | Energy -saving open -type tubular fibre stove |
| CN206113628U (en) * | 2016-10-25 | 2017-04-19 | 赵春祥 | Steerable temperature lifting speed's car -type resistance furnace |
| CN107621166A (en) * | 2017-09-08 | 2018-01-23 | 深圳粤通新能源环保技术有限公司 | A kind of variable-frequency electromagnetic energy non-ferrous metal casting furnace |
| CN212620153U (en) * | 2020-05-25 | 2021-02-26 | 湖南红太阳光电科技有限公司 | Rapid cooling system in furnace |
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