CN113686879A - Optical film defect visual detection system and method - Google Patents
Optical film defect visual detection system and method Download PDFInfo
- Publication number
- CN113686879A CN113686879A CN202111054081.XA CN202111054081A CN113686879A CN 113686879 A CN113686879 A CN 113686879A CN 202111054081 A CN202111054081 A CN 202111054081A CN 113686879 A CN113686879 A CN 113686879A
- Authority
- CN
- China
- Prior art keywords
- film
- dark field
- defect
- film plane
- visual inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 title claims abstract description 77
- 239000012788 optical film Substances 0.000 title claims abstract description 32
- 238000000034 method Methods 0.000 title claims abstract description 11
- 238000001514 detection method Methods 0.000 title abstract description 23
- 230000000007 visual effect Effects 0.000 title description 8
- 239000010408 film Substances 0.000 claims abstract description 88
- 238000005286 illumination Methods 0.000 claims abstract description 43
- 238000011179 visual inspection Methods 0.000 claims abstract description 25
- 239000013078 crystal Substances 0.000 claims description 8
- 238000007689 inspection Methods 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 5
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 7
- 239000000428 dust Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Mathematical Physics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention discloses a system and a method for visual inspection of optical film defects. The optical film defect visual inspection system and method are used for visually inspecting the defect defects of the film plane. The optical film defect visual inspection system comprises a photographic device, a scanning device and a control device, wherein the photographic device is arranged above a film plane and defines a photographic scanning area on the film plane; a lens component disposed below the film plane; an illumination source disposed below the lens component and in a focal plane position of the lens component, the illumination source being parallel to the photographic scan area, the illumination source, the photographic scan area and the lens component having a common centerline; and a dark field block formed on a top surface of the illumination light source and located at a middle region of the illumination light source. The invention has the beneficial effects that: the scratch detection method has an obvious detection effect on scratch defects.
Description
Technical Field
The present invention relates to optical film defect inspection, and in particular, to optical film defect visual inspection systems and methods.
Background
Referring to fig. 1, a conventional optical film defect inspection system is shown. The optical film defect visual inspection system generally comprises a film plane 1, a camera 2 and an illuminator 3. The camera device is fixed above the plane of the film and comprises a series of pixels for receiving images on its scan lines 4. The illumination device is fixed below the plane of the film, typically an LED or similar illumination source. The film plane is driven by the roller to move horizontally, so that the photographic device can obtain a complete image of the film plane. And detecting the defects by using a detection algorithm according to the complete image of the film plane. The defect detection method has the defects that the defect detection precision is not high, and defects such as scratches, concave-convex points or crystal points cannot be accurately detected.
Disclosure of Invention
The invention provides a novel optical film defect visual detection system and method, aiming at solving the problem of detection precision of optical film defects in the prior art.
In order to achieve the purpose, the technical scheme of the invention is as follows: an optical film defect visual inspection system for visually inspecting defect defects in a film plane, comprising,
a photographic device disposed above the film plane, the photographic device defining a photographic scan area on the film plane;
a lens component disposed below the film plane;
an illumination source disposed below the lens component while also in a focal plane position of the lens component, the illumination source, the photographic scan area, and the lens component having a common centerline; and the number of the first and second groups,
a dark field block formed on the top surface of the illumination light source, wherein the dark field block is also positioned at the middle position of the illumination light source;
the illumination light source emits light upwards, and the light emitting beam of the illumination light source is divided into a shielding part and a non-shielding part according to the dark field stop block, wherein the shielding part forms a film dark field in the photographing scanning area, the film dark field covers the whole length of the photographing scanning area, and the non-shielding part reaches the photographing scanning area through the lens component.
As a preferable scheme of the optical film defect visual inspection system, the film plane is translated along the length direction thereof in the visual inspection process, the length directions of the illumination light source and the photographing scanning area both extend along the width direction of the film plane, the width directions of the illumination light source and the photographing scanning area both extend along the length direction of the film plane, and the photographing scanning area covers the whole width of the film plane.
As a preferred solution for the optical film defect visual inspection system, the film dark field also covers the entire width of the photogrammetric scanning zone at the same time, i.e. the photogrammetric scanning zone is completely covered by the film dark field.
As a preferred embodiment of the optical film defect visual inspection system, the film dark field does not completely cover the entire width of the photographic scanning zone, i.e. one part of the photographic scanning zone is covered by the film dark field and the other part is not covered by the film dark field.
Preferably, the photographing device is a single photographing camera as the optical film defect visual inspection system.
As a preferred scheme of the optical film defect visual detection system, the photographing device is a linear array camera set arranged according to a line or an area array camera set arranged according to a rectangle.
As a preferable scheme of the optical film defect visual detection system, the lens component is a cylindrical lens, an aspheric lens, a Fresnel lens or a free-form lens.
Preferably, the defect detection system for optical thin film defects comprises defects such as scratches, concave-convex points, crystal points, dirt, textures or imprints.
The invention also provides a visual inspection method for the defects of the optical film, which comprises the following steps,
providing the optical film defect visual detection system;
translating the film plane, and photographing the film plane by the photographing device to acquire a photographed image about the film plane; and the number of the first and second groups,
and judging whether the film plane has a flaw or not according to the shot image.
Compared with the prior art, the invention has the beneficial effects that: 1. the scratch detection method has an obvious detection effect on scratch defects. 2. Can be compatible with the detection of various defects (except scratches, concave-convex points, crystal points, dirt, textures or imprints).
In addition to the technical problems solved by the present invention, the technical features constituting the technical solutions, and the advantageous effects brought by the technical features of the technical solutions described above, other technical problems solved by the present invention, other technical features included in the technical solutions, and advantageous effects brought by the technical features will be described in further detail with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic structural diagram of the prior art.
Fig. 2 is a schematic structural diagram according to an embodiment of the present invention.
FIG. 3 is a top view of an illumination source according to an embodiment of the invention.
FIG. 4 is a schematic diagram illustrating the principle of dark field of the pellicle according to an embodiment of the present invention.
FIG. 5 is a schematic diagram of the inspection according to an embodiment of the present invention (no defect).
FIG. 6 is a schematic diagram of the inspection according to one embodiment of the present invention (defective defect).
Fig. 7 is a schematic structural diagram of another embodiment of the present invention.
FIG. 8 is a top view of an illumination source in another embodiment of the present invention.
FIG. 9 is a schematic diagram of the detection of another embodiment of the present invention (no defect).
Detailed Description
The invention will be described in further detail below with reference to specific embodiments and drawings. Here, the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example 1:
referring to fig. 2-3, a system for visual inspection of optical film defects is shown. The optical film defect visual inspection system is used for detecting defect defects of a film plane 1 (such as a polarizing film), particularly scratch-type defect defects.
The optical film defect visual detection system comprises a photographic device 2, a lens component 3, an illuminating light source 4, a dark field stop 5 and the like.
The film plane 1 can be arranged horizontally. The film plane 1 has a length direction and a width direction. During the visual inspection, the film plane 1 is driven by the external roller to move horizontally along the length direction.
The camera device 2 is arranged directly above the film plane 1. The camera device 2 defines a camera scan area 20 on the film plane 1. The scan region 20 has a length and a width. The length direction of the photographic scan area 20 extends along the width direction of the film plane 1. The photographic scan area 20 covers the entire width of the film plane 1, i.e. the photographic scan area 20 extends all the way from one long side of the film plane 1 to the other long side. The width direction of the photographic scan area 20 extends along the length direction of the film plane 1. In this embodiment, the photographing device 2 is a single photographing camera. In other embodiments, the photographing device is a linear array camera set arranged in a line or an area array camera set arranged in a rectangle.
The lens component 3 is arranged directly below the membrane plane 1. In the present embodiment, the lens member 3 is not limited to the selection of a cylindrical lens, an aspherical lens, a fresnel lens, or a free-form lens.
The illumination light source 4 is disposed directly below the lens part 3 at the focal plane position of the lens part 3. The length direction of the illumination light source 4 extends in the width direction of the film plane 1. The width direction of the illumination light source 4 extends along the length direction of the film plane 1. The illumination light source 4 corresponds upward to the photographic scanning area 20.
The dark field block 5 is arranged on the top surface of the illumination light source 4 at a mid-position (i.e., at and/or near the focal position) of the illumination light source 4. The dark field block 5 covers the entire width of the illumination light source 4, i.e. the dark field block 5 extends from one long side of the illumination light source 4 all the way to the other long side (see fig. 3).
Wherein the photographing scanning area 20, the lens part 3, the illumination light source 4 and the dark field block 5 have a common vertical center line.
The illumination light source 4 emits light upward. The light beam of the illumination light source 4 is divided into a shielding part and a non-shielding part according to the dark field stop block 5. The shielded portion is shielded by the dark field block 5 to form a film dark field in the photographing scanning area 20, and the film dark field covers the entire length and the entire width of the photographing scanning area 20, that is, the film dark field covers the entire photographing scanning area 20. The non-occluded part passes through the lens unit 3 to reach the photographic scanning area 20.
And (3) visual detection process: the film plane is translated and photographed by the photographing apparatus to obtain a photographed image with respect to the film plane. And judging whether the film plane 1 has a defect or not according to the shot image.
Visual inspection principle: referring to fig. 4, the light beams 17, 18 and 19 are emitted from the focal point of the lens component, and then are emitted in parallel as light beams 20, 21 and 22 through the lens component. I.e. the dark field stop will project a film dark field at infinity, equivalent to the lens component size, to the photographic scan area. The film dark field provides a dark field environment for the photographic device to photograph the film plane.
It should be noted that the film dark field is not a dark field with a gray scale of 0 in the strict sense. As can be further understood from the optical principle, the light beams 23, 24 and 25 emitted from the portion of the focal plane not blocked by the dark field block will be emitted in parallel as the light beams 26, 27 and 28 through the lens component. It can be seen that the light beam from the illumination source is also received by the camera device at the film plane, so that the dark field environment is actually a "bright" dark field. The degree of darkness of the film dark field is determined by the size of the dark field stop and the properties of the illumination source (length, power, etc., primarily length). In this embodiment, the ratio of the length of the dark field stop to the length of the illumination light source is 1/4. The proportional relation is not the only proportion of the embodiment of the invention, and the proportional relation can be properly adjusted according to actual requirements, so that the required dark field environment can be provided for the photographic device.
Referring to fig. 5 and 6, the captured image obtained by the camera device is a series of regularly arranged pixels. The pixel is for receiving a brightness distribution of the photogrammetric scan area of the film plane. Each pixel in the series of pixels receives an outgoing light beam from the illumination source. These outgoing light beams will illuminate the film plane in the form of parallel light. Taking three continuous pixels 30, 31 and 32 as an example, the circular areas 30a, 31a and 32a represent the corresponding brightness of the three pixels, and the brightness is expressed by the color depth. If there are no defect defects in the photo-scanned area of the film plane, the circular areas 30a, 31a, 32a are of the same color, i.e. equal intensity (i.e. fig. 5). If a defect exists in the photographic scanning area of the film plane, a scattering phenomenon occurs at a defect position where the light beam of the illumination light source passes through the film plane, so that the brightness at the positions of the pixels 30, 31, and 32 is changed from a uniform state to a bright-dark state, the brightness 30b at the position of the pixel 30 is darkest, the brightness 31b at the position of the pixel 31 is brightest, and the brightness 32b at the position of the pixel 32 is between 30b and 31b (i.e., fig. 6). This effect eventually presents a bright spot in the dark field in the captured image, from which defects can be discerned. For scratch defect, the shot image is often represented in the form of a bright dot strip, and the scratch defect which is originally invisible to naked eyes can be clearly seen in the shot image according to the form of the scratch defect.
If the lens component and the dark field stop block are removed, all parts of the light-emitting beams of the illuminating light source directly reach the photographic scanning area of the film plane, and the light-emitting beams of the illuminating light source are disordered in the photographic scanning area, so that the film plane is illuminated uniformly, that is, the defect of the film plane cannot be accurately identified from the shot image.
The lens component and the dark field stop are added to have a first function that the shielding part in the light-emitting beam of the illuminating light source forms a film dark field on the film plane, and a second function that the dark field stop shields the illuminating light source to directly irradiate the photographic device, so that the illuminating light source is in an oblique side lighting mode.
Example 2:
example 1 has a disadvantage that it is impossible to detect well whether the film plane has defects such as irregularities or crystal grains. This is because the defect such as a concave-convex point or a crystal point forms a single bright point in the captured image, and the bright point strip formed by the defect such as a scratch is less likely to be observed and the morphological feature thereof is lost, and the defect on the captured image loses its concave-convex feeling and is easily confused with the dust and impurities on the film plane, thereby increasing the detection difficulty.
The present embodiment is proposed for this purpose. Referring to fig. 7 to 8, in comparison with embodiment 1, in this embodiment, the dark field block 5 is shifted toward a long side direction of the illumination light source 4, so that the dark field block 5 only covers a part of the width of the illumination light source 4, that is, a part of the film dark field covered (dark) in the photographing scanning area 20 and another part of the film dark field uncovered (bright) in the photographing scanning area 20, so that the photographing apparatus 2 can better capture the brightness variation information on the photographing scanning area 20 of the film plane 1.
Referring to fig. 9, the brightness information received by a series of pixels in the photographing device is light and dark alternately, that is, only a part of a single pixel is illuminated and the other part is in a dark state. By the method, the brightness distribution of concave-convex points and crystal point defects in the shot image is more obvious, concave-convex information of the defects is not lost, dust and the like which do not belong to a detected object can be prevented from influencing the analysis of the final detection result, and flaw defect classification is facilitated.
Therefore, the comprehensive detection method can realize comprehensive detection of common defect defects such as scratches, concave-convex points, crystal points and the like.
The foregoing merely represents embodiments of the present invention, which are described in some detail and detail, and therefore should not be construed as limiting the scope of the invention. It should be noted that, for those skilled in the art, various changes and modifications can be made without departing from the spirit of the invention, and these changes and modifications are all within the scope of the invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (9)
1. An optical film defect visual inspection system for visually inspecting defect defects in a film plane, comprising,
a photographic device disposed above the film plane, the photographic device defining a photographic scan area on the film plane;
a lens component disposed below the film plane;
an illumination source disposed below the lens component while also in a focal plane position of the lens component, the illumination source, the photographic scan area, and the lens component having a common centerline; and the number of the first and second groups,
a dark field block formed on the top surface of the illumination light source, wherein the dark field block is also positioned at the middle position of the illumination light source;
the illumination light source emits light upwards, and the light emitting beam of the illumination light source is divided into a shielding part and a non-shielding part according to the dark field stop block, wherein the shielding part forms a film dark field in the photographing scanning area, the film dark field covers the whole length of the photographing scanning area, and the non-shielding part reaches the photographing scanning area through the lens component.
2. The optical film defect visual inspection system of claim 1, wherein the film plane translates along its length during visual inspection, the length of the illumination source and the camera scan area both extend along the width of the film plane, the width of the illumination source and the camera scan area both extend along the length of the film plane, and the camera scan area covers the entire width of the film plane.
3. The optical film defect visual inspection system of claim 2, wherein said film dark field also covers the entire width of said photogrammetric scan zone simultaneously, i.e., said photogrammetric scan zone is completely covered by said film dark field.
4. The optical film defect visual inspection system of claim 2, wherein the film dark field does not completely cover the entire width of the photographic scan zone, i.e., a portion of the photographic scan zone is covered by the film dark field and another portion is not covered by the film dark field.
5. The optical film defect vision inspection system of any one of claims 1 to 4, wherein said camera device is a single camera.
6. The system of any one of claims 1 to 4, wherein the camera is a linear array camera or a rectangular array camera.
7. The optical film defect visual inspection system of any one of claims 1 to 4, wherein the lens component is a cylindrical lens, an aspherical lens, a Fresnel lens or a free-form lens.
8. The optical film defect visual inspection system of any one of claims 1 to 4, wherein the defect is a scratch-type, a bump-type, a crystal dot-type, a smudge-type, a texture-type or an imprint-type defect.
9. The visual inspection method for the defects of the optical film is characterized by comprising the following steps,
providing an optical film defect visual inspection system of any one of claims 1 to 4;
translating the film plane, and photographing the film plane by the photographing device to acquire a photographed image about the film plane; and the number of the first and second groups,
and judging whether the film plane has a flaw or not according to the shot image.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111054081.XA CN113686879A (en) | 2021-09-09 | 2021-09-09 | Optical film defect visual detection system and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111054081.XA CN113686879A (en) | 2021-09-09 | 2021-09-09 | Optical film defect visual detection system and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113686879A true CN113686879A (en) | 2021-11-23 |
Family
ID=78586106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111054081.XA Pending CN113686879A (en) | 2021-09-09 | 2021-09-09 | Optical film defect visual detection system and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113686879A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114937041A (en) * | 2022-07-25 | 2022-08-23 | 聊城市博源节能科技有限公司 | Method and system for detecting defects of copper bush of oil way of automobile engine |
| TWI781840B (en) * | 2021-12-02 | 2022-10-21 | 友達光電股份有限公司 | A light control device, testing system and method for dark field photography |
| CN116879316A (en) * | 2023-09-04 | 2023-10-13 | 杭州利珀科技有限公司 | Film material surface defect detection system and method based on optical fiber light source |
| CN117110309A (en) * | 2023-10-18 | 2023-11-24 | 武汉市品持科技有限公司 | Glass film defect detection method, device and system |
| CN117684953A (en) * | 2023-12-11 | 2024-03-12 | 江苏省环境科学研究院 | Visual detection equipment and detection method for non-aqueous phase liquid pollutants of underground water |
| CN117871415A (en) * | 2024-03-11 | 2024-04-12 | 天津大学四川创新研究院 | Exposure type structural flaw detection system and method based on parallel light source |
Citations (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06258231A (en) * | 1991-01-31 | 1994-09-16 | Central Glass Co Ltd | Defect detecting device for plate glass |
| JPH09189665A (en) * | 1996-01-10 | 1997-07-22 | Nippon Sheet Glass Co Ltd | Dark field illumination device used for defect inspecting device |
| JP2001201429A (en) * | 2000-01-18 | 2001-07-27 | Mitsubishi Chemicals Corp | Method and device for inspecting defect in inspected base body |
| JP2001235432A (en) * | 2000-02-22 | 2001-08-31 | Nippon Maxis Co Ltd | Flaw inspection method, light source for flaw inspection and flaw inspection instrument |
| US20040179193A1 (en) * | 2001-07-05 | 2004-09-16 | Shinji Maezono | Method and device for inspecting defect of sheet-shaped transparent body |
| JP2005127989A (en) * | 2003-10-03 | 2005-05-19 | Olympus Corp | Flaw detector and flaw detecting program |
| US20050122508A1 (en) * | 2003-10-31 | 2005-06-09 | Sachio Uto | Method and apparatus for reviewing defects |
| TW200706827A (en) * | 2004-01-22 | 2007-02-16 | Wintriss Engineering Corp | Illumination system for material inspection |
| EP2144052A1 (en) * | 2008-07-11 | 2010-01-13 | Dr. Schenk GmbH Industriemesstechnik | Method and device for detecting and classifying defects |
| CN101832945A (en) * | 2010-04-29 | 2010-09-15 | 中国科学院上海技术物理研究所 | Online detection method and device for defects of coated glass film |
| CN101871896A (en) * | 2009-04-24 | 2010-10-27 | 湖南科创信息技术股份有限公司 | On-line detection method and device for surface embossing glass blemishes |
| CN102288622A (en) * | 2011-04-29 | 2011-12-21 | 浙江师范大学 | Method and device for detecting internal defect of optical element |
| CN102435618A (en) * | 2010-09-29 | 2012-05-02 | 旭硝子株式会社 | Transparent tabular body defect inspection method and transparent tabular body defect inspection system |
| US20130044209A1 (en) * | 2011-08-18 | 2013-02-21 | Samsung Corning Precision Materials Co., Ltd. | Apparatus and method for detecting the surface defect of the glass substrate |
| CN104764798A (en) * | 2015-03-26 | 2015-07-08 | 电子科技大学 | Visual magnetic flux leakage detection device |
| CN105352969A (en) * | 2015-11-25 | 2016-02-24 | 武汉楚锐自动化控制设备有限公司 | Edible oil product color and luster, transparency and impurity detecting device |
| JP2016045194A (en) * | 2014-08-19 | 2016-04-04 | 東友ファインケム株式会社Dongwoo Fine−Chem Co., Ltd. | Optical film inspection device |
| US20170010220A1 (en) * | 2015-07-12 | 2017-01-12 | Camtek Ltd. | System for inspecting a backside of a wafer |
| CN107328786A (en) * | 2017-08-21 | 2017-11-07 | 中导光电设备股份有限公司 | A kind of film surface defect detection apparatus and its detection method |
| CN207215722U (en) * | 2017-08-21 | 2018-04-10 | 中导光电设备股份有限公司 | A kind of film surface defect detection apparatus |
| DE102017110080A1 (en) * | 2017-05-10 | 2018-11-15 | 5Micron Gmbh | Method and device for detecting surface defects of a surface |
| CN109030495A (en) * | 2018-06-26 | 2018-12-18 | 大连鉴影光学科技有限公司 | A kind of optical element defect inspection method based on machine vision technique |
| CN110412055A (en) * | 2019-05-06 | 2019-11-05 | 天津大学 | A kind of lens white haze defect inspection method based on multiple light courcess dark-ground illumination |
| CN111751386A (en) * | 2020-07-27 | 2020-10-09 | 杭州利珀科技有限公司 | Machine vision optical detection system and method |
| CN112557408A (en) * | 2021-02-25 | 2021-03-26 | 中科慧远视觉技术(北京)有限公司 | Stroboscopic step lighting defect detection system |
-
2021
- 2021-09-09 CN CN202111054081.XA patent/CN113686879A/en active Pending
Patent Citations (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06258231A (en) * | 1991-01-31 | 1994-09-16 | Central Glass Co Ltd | Defect detecting device for plate glass |
| JPH09189665A (en) * | 1996-01-10 | 1997-07-22 | Nippon Sheet Glass Co Ltd | Dark field illumination device used for defect inspecting device |
| JP2001201429A (en) * | 2000-01-18 | 2001-07-27 | Mitsubishi Chemicals Corp | Method and device for inspecting defect in inspected base body |
| JP2001235432A (en) * | 2000-02-22 | 2001-08-31 | Nippon Maxis Co Ltd | Flaw inspection method, light source for flaw inspection and flaw inspection instrument |
| US20040179193A1 (en) * | 2001-07-05 | 2004-09-16 | Shinji Maezono | Method and device for inspecting defect of sheet-shaped transparent body |
| JP2005127989A (en) * | 2003-10-03 | 2005-05-19 | Olympus Corp | Flaw detector and flaw detecting program |
| US20050122508A1 (en) * | 2003-10-31 | 2005-06-09 | Sachio Uto | Method and apparatus for reviewing defects |
| TW200706827A (en) * | 2004-01-22 | 2007-02-16 | Wintriss Engineering Corp | Illumination system for material inspection |
| EP2144052A1 (en) * | 2008-07-11 | 2010-01-13 | Dr. Schenk GmbH Industriemesstechnik | Method and device for detecting and classifying defects |
| CN101871896A (en) * | 2009-04-24 | 2010-10-27 | 湖南科创信息技术股份有限公司 | On-line detection method and device for surface embossing glass blemishes |
| CN101832945A (en) * | 2010-04-29 | 2010-09-15 | 中国科学院上海技术物理研究所 | Online detection method and device for defects of coated glass film |
| CN102435618A (en) * | 2010-09-29 | 2012-05-02 | 旭硝子株式会社 | Transparent tabular body defect inspection method and transparent tabular body defect inspection system |
| CN102288622A (en) * | 2011-04-29 | 2011-12-21 | 浙江师范大学 | Method and device for detecting internal defect of optical element |
| US20130044209A1 (en) * | 2011-08-18 | 2013-02-21 | Samsung Corning Precision Materials Co., Ltd. | Apparatus and method for detecting the surface defect of the glass substrate |
| JP2016045194A (en) * | 2014-08-19 | 2016-04-04 | 東友ファインケム株式会社Dongwoo Fine−Chem Co., Ltd. | Optical film inspection device |
| CN104764798A (en) * | 2015-03-26 | 2015-07-08 | 电子科技大学 | Visual magnetic flux leakage detection device |
| US20170010220A1 (en) * | 2015-07-12 | 2017-01-12 | Camtek Ltd. | System for inspecting a backside of a wafer |
| CN105352969A (en) * | 2015-11-25 | 2016-02-24 | 武汉楚锐自动化控制设备有限公司 | Edible oil product color and luster, transparency and impurity detecting device |
| DE102017110080A1 (en) * | 2017-05-10 | 2018-11-15 | 5Micron Gmbh | Method and device for detecting surface defects of a surface |
| CN107328786A (en) * | 2017-08-21 | 2017-11-07 | 中导光电设备股份有限公司 | A kind of film surface defect detection apparatus and its detection method |
| CN207215722U (en) * | 2017-08-21 | 2018-04-10 | 中导光电设备股份有限公司 | A kind of film surface defect detection apparatus |
| CN109030495A (en) * | 2018-06-26 | 2018-12-18 | 大连鉴影光学科技有限公司 | A kind of optical element defect inspection method based on machine vision technique |
| CN110412055A (en) * | 2019-05-06 | 2019-11-05 | 天津大学 | A kind of lens white haze defect inspection method based on multiple light courcess dark-ground illumination |
| CN111751386A (en) * | 2020-07-27 | 2020-10-09 | 杭州利珀科技有限公司 | Machine vision optical detection system and method |
| CN112557408A (en) * | 2021-02-25 | 2021-03-26 | 中科慧远视觉技术(北京)有限公司 | Stroboscopic step lighting defect detection system |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI781840B (en) * | 2021-12-02 | 2022-10-21 | 友達光電股份有限公司 | A light control device, testing system and method for dark field photography |
| CN114937041A (en) * | 2022-07-25 | 2022-08-23 | 聊城市博源节能科技有限公司 | Method and system for detecting defects of copper bush of oil way of automobile engine |
| CN116879316A (en) * | 2023-09-04 | 2023-10-13 | 杭州利珀科技有限公司 | Film material surface defect detection system and method based on optical fiber light source |
| CN116879316B (en) * | 2023-09-04 | 2023-11-17 | 杭州利珀科技有限公司 | Film material surface defect detection system and method based on optical fiber light source |
| CN117110309A (en) * | 2023-10-18 | 2023-11-24 | 武汉市品持科技有限公司 | Glass film defect detection method, device and system |
| CN117684953A (en) * | 2023-12-11 | 2024-03-12 | 江苏省环境科学研究院 | Visual detection equipment and detection method for non-aqueous phase liquid pollutants of underground water |
| CN117684953B (en) * | 2023-12-11 | 2024-05-24 | 江苏省环境科学研究院 | Visual detection equipment and detection method for non-aqueous phase liquid pollutants of underground water |
| CN117871415A (en) * | 2024-03-11 | 2024-04-12 | 天津大学四川创新研究院 | Exposure type structural flaw detection system and method based on parallel light source |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113686879A (en) | Optical film defect visual detection system and method | |
| US6011620A (en) | Method and apparatus for the automatic inspection of optically transmissive planar objects | |
| KR101326455B1 (en) | Apparatus and method for characterizing defects in a transparent substrate | |
| JP4719284B2 (en) | Surface inspection device | |
| US8081840B2 (en) | Appliance for controlling transparent or reflective elements | |
| CA2615117C (en) | Apparatus and methods for inspecting a composite structure for inconsistencies | |
| US20110310244A1 (en) | System and method for detecting a defect of a substrate | |
| CN110018167A (en) | A kind of Curved screen open defect rapid detection method and system | |
| JPH07209210A (en) | Method and device for optically inspecting transparent region of container | |
| KR860001344A (en) | Selective refractive defect detection system of transparent products | |
| JP2008249568A (en) | Visual examination device | |
| KR20170020605A (en) | Multi optic vision device | |
| JPH1090198A (en) | Defect detection method and irradiation unit | |
| KR20060053847A (en) | Method for inspecting defects of glass plate and apparatus thereof | |
| US7869021B2 (en) | Multiple surface inspection system and method | |
| US20100245560A1 (en) | Method and device for imaging a fragmentation pattern formed in a ply of toughened glass | |
| KR20180116154A (en) | Inspection apparatus for cover glass | |
| JP2017166903A (en) | Defect inspection device and defect inspection method | |
| CN214097211U (en) | Transparent plate glass's defect detecting device | |
| KR20220110291A (en) | Laser-based inclusion detection system and method | |
| KR20130108971A (en) | Inspection of defects in a contact lens | |
| CN115791831A (en) | Method for detecting defects of irregular reflective surface | |
| JP2014169988A (en) | Defect inspection device of transparent body or reflection body | |
| JP5787668B2 (en) | Defect detection device | |
| US20240085342A1 (en) | Glass inspection |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |