CN113607206A - Six-axis double-camera imaging instrument - Google Patents
Six-axis double-camera imaging instrument Download PDFInfo
- Publication number
- CN113607206A CN113607206A CN202110881829.7A CN202110881829A CN113607206A CN 113607206 A CN113607206 A CN 113607206A CN 202110881829 A CN202110881829 A CN 202110881829A CN 113607206 A CN113607206 A CN 113607206A
- Authority
- CN
- China
- Prior art keywords
- axis
- axis servo
- driving module
- camera
- dual
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 title description 2
- 230000007246 mechanism Effects 0.000 claims abstract description 30
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 22
- 238000001514 detection method Methods 0.000 claims abstract description 19
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 11
- 239000010438 granite Substances 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000007493 shaping process Methods 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/16—Elements for restraining, or preventing the movement of, parts, e.g. for zeroising
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/24—Housings ; Casings for instruments
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a six-axis dual-camera imager, which comprises a frame, a shell arranged on the frame, a nitrogen spring, a supporting platform with a abdication groove A formed in the middle, a Z-axis servo driving module, a rotary driving platform arranged on the back of the Z-axis servo driving module, two XY-axis driving mechanisms and two detection mechanisms, wherein the nitrogen spring penetrates through the abdication groove A and is fixedly connected with the rotary driving platform, the Z-axis servo driving module partially penetrates through the abdication groove A and is connected with the supporting platform through a base, the two XY-axis driving mechanisms are respectively arranged on the supporting platform corresponding to two opposite sides of the abdication groove A, the two detection mechanisms are respectively connected and arranged on the two XY-axis driving mechanisms, the detection mechanisms arranged on two sides of the supporting platform can synchronously work in real time, simultaneously, the product can be driven to rotate 90 degrees by the rotary driving platform, and the height of the product can be measured by driving the supporting platform to lift by the upper Z-axis servo driving module, has high use value.
Description
Technical Field
The invention relates to the technical field of detection equipment, in particular to a six-axis double-camera imager.
Background
As is well known, four side features of a semiconductor wafer storage box need to be measured after production, but a traditional imager can only measure one side of a product, and an operator needs to turn the product back and forth during measurement to measure the side, which is time-consuming and labor-consuming; moreover, the measurement accuracy is affected when the person switches back and forth to the product direction; and the storage box is made of plastic materials, the contact type can cause micro deformation of products, and the measuring efficiency is not high.
Disclosure of Invention
The purpose of the invention is as follows: in order to solve the defects in the background technology, the invention discloses a six-axis double-camera imager.
The technical scheme is as follows: the utility model provides a six camera image appearance, includes the frame, installs shell, nitrogen spring, the middle part shaping in the frame have a supporting bench, Z axle servo drive module of groove A of stepping down, install at the rotary driving platform at Z axle servo drive module back, two XY axle actuating mechanism and two detection mechanism, nitrogen spring passes groove A of stepping down and rotary driving platform rigid coupling, Z axle servo drive module part is passed groove A of stepping down and is connected with a supporting bench through setting up the base, two XY axle actuating mechanism sets up respectively on the supporting bench that the relative both sides of groove A of stepping down correspond, two detection mechanism connects respectively and sets up on two XY axle actuating mechanism.
As a preferable mode of the present invention, each of the two XY axis driving mechanisms includes an X axis servo driving module and a Y axis servo driving module, the Y axis servo driving module is installed on the supporting platform in a matching manner, and the X axis servo driving module and the Y axis servo driving module are connected.
As a preferred mode of the present invention, two ends of the lateral surface of the X-axis servo drive module, the Y-axis servo drive module, and the Z-axis servo drive module are respectively provided with a grating detection device.
As a preferable mode of the present invention, each of the two detection mechanisms includes a mounting seat, a digital camera equipped with a small field telecentric lens, and a sliding plate connected to the Y-axis servo drive module, and the digital camera is fixed to the sliding plate through the mounting seat.
As a preferable mode of the present invention, the Z-axis servo driving module is connected to the rotary driving platform through a connecting frame, and the connecting frame is connected to the nitrogen spring.
In a preferred embodiment of the present invention, the base is a granite base.
In a preferred embodiment of the present invention, the housing has a relief groove B formed on a surface thereof.
In a preferred mode of the invention, a display and an alarm are arranged on the top of the shell.
The invention realizes the following beneficial effects:
the detection mechanisms are arranged on the two sides of the supporting platform, so that the supporting platform can work synchronously in real time, the lifting is more than that of a single camera, meanwhile, the product can be driven to rotate by 90 degrees by rotating the driving platform, and the other two boundary characteristics can be measured; the height of a product can be measured by driving the supporting table to lift through the upper Z-axis servo driving module, and compared with the prior art, the device has higher use value.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the disclosure and together with the description, serve to explain the principles of the disclosure.
Fig. 1 is a schematic view of the overall structure disclosed in the present invention.
Fig. 2 is a schematic view of a part of the structure disclosed in the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Examples
Referring to fig. 1-2, a six-axis dual-camera imager comprises a frame 10, a housing 160 mounted on the frame, a nitrogen spring 20, a support 40 with an abdicating slot a30 formed in the middle, a Z-axis servo driving module 120, a rotary driving platform 60 mounted on the back of the Z-axis servo driving module, two XY-axis driving mechanisms and two detection mechanisms 90, wherein an abdicating slot B170 is formed on the surface of the housing, the nitrogen spring passes through the abdicating slot a and is fixedly connected with the rotary driving platform, the Z-axis servo driving module partially passes through the abdicating slot a and is connected with the support through a base 130, during assembly, the Z-axis servo driving module is connected with the rotary driving platform through a connecting frame 50, and the connecting frame is connected with the nitrogen spring, during specific installation, the base specifically adopts a granite base, the two XY-axis driving mechanisms are respectively disposed on the support corresponding to two opposite sides of the abdicating slot a, the two detection mechanisms are respectively connected and arranged on the two XY axis driving mechanisms.
In this embodiment, two XY axle actuating mechanism all include X axle servo drive module 100 and Y axle servo drive module 110, and the cooperation of Y axle servo drive module is installed on a supporting bench, and X axle servo drive module is connected the setting with Y axle servo drive module, uses through the cooperation of Y axle servo drive module and X axle servo drive module, can make things convenient for detection mechanism to carry out XY axle removal in real time, and the precision is higher, the effect preferred.
In this embodiment, grating detection devices 80 are disposed at two ends of the sides of the X-axis servo driving module, the Y-axis servo driving module and the Z-axis servo driving module, so as to conveniently detect the walking distance of the Y-axis servo driving module driving the X-axis servo driving module, facilitate the moving distance of the X-axis servo driving module driving the sliding plate, and facilitate the lifting and moving distance of the Z-axis servo linear driving module driving the supporting table.
In this embodiment, the two detection mechanisms each include a mounting seat 92, a digital camera 94 equipped with a small field telecentric lens 91, and a sliding plate 93 connected with the Y-axis servo drive module, the digital camera is fixed on the sliding plate through the mounting seat, and under the drive of the X-axis servo drive module and the Y-axis servo drive module, the digital camera can detect the side of the product in real time, so that the use is flexible, and the effect is better.
In this embodiment, a display 170 and an alarm 150 are provided on the top of the housing for the operator to observe the effect of the detection and to alarm the product 70 with the abnormality detected by the alarm so that the operator can know.
Through the implementation of the above embodiments, the detection mechanisms are arranged on the two sides of the support platform, so that the device can synchronously work in real time, and compared with a single camera, the device can be greatly improved, and meanwhile, the product can be driven to rotate by 90 degrees by rotating the driving platform, and the other two boundary characteristics can be measured; the height of a product can be measured by driving the supporting table to lift through the upper Z-axis servo driving module, and the device has high use value.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and are intended to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the scope of the present invention. All equivalent changes or modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (8)
1. The utility model provides a six camera image appearance, its characterized in that, includes the frame, installs shell, nitrogen spring in the frame, the middle part shaping has a brace table, Z axle servo drive module, installs at the rotary driving platform at Z axle servo drive module back, two XY axle actuating mechanism and two detection mechanism that step down groove A, nitrogen spring passes groove A and rotary driving platform rigid coupling of stepping down, Z axle servo drive module part is passed groove A of stepping down and is connected with the brace table through setting up the base, two XY axle actuating mechanism sets up respectively on the brace table that the relative both sides in groove A of stepping down correspond, two detection mechanism connects respectively and sets up on two XY axle actuating mechanism.
2. The dual-camera six-axis imager of claim 1, wherein each of the two XY-axis driving mechanisms includes an X-axis servo driving module and a Y-axis servo driving module, the Y-axis servo driving module is mounted on the supporting platform, and the X-axis servo driving module and the Y-axis servo driving module are connected.
3. The six-axis dual-camera imager of claim 2, wherein grating detection devices are disposed at two ends of the lateral surfaces of the X-axis servo driving module, the Y-axis servo driving module and the Z-axis servo driving module.
4. The six-axis dual-camera imager of claim 2, wherein each of the two inspection mechanisms comprises a mounting base, a digital camera with a small field-of-view telecentric lens, and a sliding plate connected to the Y-axis servo drive module, and the digital camera is fixed to the sliding plate through the mounting base.
5. The six-axis dual-camera imager of claim 1, wherein the Z-axis servo driving module is connected to the rotary driving platform through a connecting frame, and the connecting frame is connected to the nitrogen spring.
6. The six-axis dual-camera imager of claim 1, wherein said base is a granite base.
7. The dual-camera six-axis imager of claim 1, wherein the housing has relief grooves B formed on its surface.
8. The dual-camera six-axis imager of claim 1, wherein a display and an alarm are disposed on the top of the housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110881829.7A CN113607206A (en) | 2021-08-02 | 2021-08-02 | Six-axis double-camera imaging instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110881829.7A CN113607206A (en) | 2021-08-02 | 2021-08-02 | Six-axis double-camera imaging instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113607206A true CN113607206A (en) | 2021-11-05 |
Family
ID=78339058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110881829.7A Pending CN113607206A (en) | 2021-08-02 | 2021-08-02 | Six-axis double-camera imaging instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113607206A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170350917A1 (en) * | 2016-06-06 | 2017-12-07 | Kun Shan University | Six-axis motion mechanism |
| CN110523650A (en) * | 2019-08-08 | 2019-12-03 | 苏州诺威特测控科技有限公司 | Gas spring cylindrical shell appearance delection device |
| CN210570495U (en) * | 2019-10-18 | 2020-05-19 | 南京二维纳米科技有限公司 | All-round imager |
| CN210676013U (en) * | 2019-08-08 | 2020-06-05 | 苏州诺威特测控科技有限公司 | Gas spring cylinder shell outward appearance detection device |
-
2021
- 2021-08-02 CN CN202110881829.7A patent/CN113607206A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170350917A1 (en) * | 2016-06-06 | 2017-12-07 | Kun Shan University | Six-axis motion mechanism |
| CN110523650A (en) * | 2019-08-08 | 2019-12-03 | 苏州诺威特测控科技有限公司 | Gas spring cylindrical shell appearance delection device |
| CN210676013U (en) * | 2019-08-08 | 2020-06-05 | 苏州诺威特测控科技有限公司 | Gas spring cylinder shell outward appearance detection device |
| CN210570495U (en) * | 2019-10-18 | 2020-05-19 | 南京二维纳米科技有限公司 | All-round imager |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101363706B (en) | Lens thickness meter | |
| WO2018201590A1 (en) | Rapid measurement device for 3d curved-surface glass | |
| CN203704886U (en) | Flatness optical measuring device | |
| CN208765665U (en) | Mobile phone center detection device based on 3D vision | |
| TW201937648A (en) | Wafer prober | |
| CN106597115A (en) | High-precision aligned stitching testing machine | |
| CN115274484B (en) | Wafer detection device and detection method thereof | |
| CN113607206A (en) | Six-axis double-camera imaging instrument | |
| CN209910612U (en) | High-precision flatness detection machine | |
| CN206627064U (en) | A kind of bimodulus segment difference detection means | |
| CN105954597B (en) | A kind of touch screen capacity measurement jig | |
| CN103292702B (en) | A kind of silicon rod physical dimension measuring instrument | |
| CN108398111A (en) | A kind of method for soft package lithium ion power thickness measurement device | |
| CN113932733B (en) | Visual measurement system for three-dimensional outline dimension of large sealing ring | |
| CN213579225U (en) | Battery size measuring device | |
| CN115711578A (en) | 2D and 3D measuring mechanism equipment | |
| CN213543452U (en) | Device for detecting surface flatness of stamping element | |
| CN108519050A (en) | A kind of mechanical body of non-contact image measuring instrument | |
| JP2556567Y2 (en) | Column type coordinate measuring device | |
| CN209069160U (en) | A kind of fine module gear radial accuracy detection device used suitable for production scene | |
| CN219455022U (en) | Gear height detection device with various sizes | |
| CN110044264B (en) | Detection device and working method thereof | |
| CN217331074U (en) | Coplanarity detection device for terminal pins of components | |
| CN216482847U (en) | Glass automatic checkout device | |
| CN218097656U (en) | Test fixture |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |