CN113588884B - Pollution source searching method based on AMC on-line monitoring system - Google Patents
Pollution source searching method based on AMC on-line monitoring system Download PDFInfo
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Abstract
The invention discloses a pollution source searching method based on an AMC on-line monitoring system, which comprises the following steps: (1) When an abnormal value is measured at a certain sampling point of the AMC on-line monitoring system, determining the species of the pollutant; (2) The pollutant sources in the space of the clean room to be monitored are checked, and the pollutant sources which do not generate pollutant species related to the step (1) are eliminated; (3) According to the airflow streamline, the streamline for removing the pollutant sources cannot pass through the sampling point in the step (1) and the pollutant sources within the set range; (4) According to the operation characteristics of the machine, the non-conforming machine is eliminated; (5) And then further detecting the source of the pollutant after the step 2, the step 3 and the step 4 are eliminated by adopting movable detection equipment, so that the source of the pollutant can be determined. The method of the invention not only has no additional investment and lower cost, but also can effectively find the pollution source, thereby forming a systematic method.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a pollution source searching method based on an AMC (advanced chemical mechanical polishing) on-line monitoring system.
Background
The semiconductor Integrated Circuit (IC) industry has experienced an exponential growth, and technological advances in IC materials and design have resulted in multiple generations of ICs, each having smaller and more complex circuitry than the previous generation. During the development of ICs, functional density has increased substantially and geometry has decreased. Typically such a downscaling process provides a number of benefits by increasing production efficiency and reducing associated costs. This scaling increases the complexity of processing and producing ICs and places increasing demands on the production environment (clean room). In particular, gaseous molecular contamination (AMC) is becoming an increasingly serious problem in semiconductor manufacturing processes in order to further scale down geometry.
The clean room is a space with good tightness, which is used for controlling parameters such as air cleanliness, temperature, humidity, pressure, noise and the like as required. It has been counted in China that the qualification rate of MOS circuit dies produced under the environment without the requirement of clean level is only 10% -15%, and 64 is only 2% of the storage. Therefore, the use of clean rooms in precision machinery, semiconductors, aerospace, atomic energy, and other industries is now very common. The clean room in the prior art comprises a clean space, a ceiling and a raised floor, wherein a plurality of air supply areas are arranged on the ceiling, each air supply area comprises at least one air supply mechanism, the raised floor is provided with a plurality of air exhaust areas, the air supply mechanism is usually an FFU device (or comprises the FFU device and a chemical filter), the FFU device is used for supplying air and filtering larger particle pollutants, and the chemical filter is used for filtering corrosive gases.
As described above, in the semiconductor manufacturing process, the AMC concentration in the clean room needs to be maintained below a set level, so that the normal process and the yield of the product can be ensured. For example, chinese patent No. CN103713096a discloses a method of identifying a gaseous molecular contamination (AMC) leakage source in a plant, comprising: distributing sensors in the plant; performing a Computational Fluid Dynamics (CFD) simulation of a forward gas flow in the plant; setting an inversion model of forward CFD simulation of the airflow in the workshop; establishing a database of a spatial response probability distribution matrix of the sensor; and identifying an AMC leakage source using the AMC measurement data and a database of the spatial response probability distribution matrix of the sensor.
However, since the clean room has a large space, the points to be monitored are many, and thus a huge number of sensors need to be configured; moreover, since the species of contaminant to be monitored are also numerous, including HF, HCl, cl 2 、NH 3 、NO x 、SO 2 、H 2 S, acetic acid, TVOC and the like, and detection of all pollutants can be simultaneously realized without one sensor, so that different sensors are required to be configured to detect different pollutants, the number of the sensors is larger, the cost of the method is very high, and the method is difficult to popularize and apply practically.
Aiming at the problems, the conventional solution is to set an AMC on-line monitoring system in a clean room, namely, a mode (namely point detection) of one instrument corresponding to multiple points is adopted, for example, one AMC monitor corresponds to 64 sampling points (namely a multiple point sampler, a turntable of the multiple point sampler is periodically circulated), collected gas is sent to the turntable through a pipeline and then is sent to analysis equipment, and the sampling points are detected in turn, so that the number of sensors is greatly reduced, and the cost is saved.
However, practical applications find how to find a contamination source when the AMC on-line monitoring system detects an outlier to be a troublesome problem. In view of the problem, the prior art can only rely on personal experience to judge or survey and monitor, and even a great deal of manpower resources and time are spent, the position and the source of the pollution source are difficult to find, and no systematic method can be used for solving. Therefore, developing a pollution source searching method based on the AMC on-line monitoring system becomes a technical problem which is needed to be solved in the field but is not solved all the time.
Disclosure of Invention
The invention aims to provide a pollution source searching method based on an AMC on-line monitoring system.
In order to achieve the above purpose, the invention adopts the following technical scheme: a pollution source searching method based on an AMC on-line monitoring system comprises the following steps:
(1) When an abnormal value is measured at a certain sampling point of the AMC on-line monitoring system, determining the species of the pollutant;
(2) The pollutant sources in the space of the clean room to be monitored are checked, and the pollutant sources which do not generate pollutant species related to the step (1) are eliminated;
(3) Carrying out computational fluid dynamics simulation on the forward airflow in the clean room space to be monitored to obtain an airflow streamline from the outlet of the fan filter unit to the inlet of the fan filter unit in the clean room space to be monitored;
removing the air flow lines which do not pass through the sampling points and the setting range of the sampling points in the step (1) according to the air flow lines, and removing the related pollutant sources according to the air flow lines;
(4) Removing non-conforming machines according to the operation characteristics of the machines in the clean room space to be monitored;
(5) And (3) further detecting the source of the pollutant after the step (2), (3) and (4) are removed by adopting movable detection equipment, so that the source of the pollutant can be determined.
According to another technical scheme, the pollution source searching method based on the AMC on-line monitoring system comprises the following steps:
(1) When an abnormal value is measured at a certain sampling point of the AMC on-line monitoring system, determining the species of the pollutant;
(2) The pollutant sources in the space of the clean room to be monitored are checked, and the pollutant sources which do not generate pollutant species related to the step (1) are eliminated;
(3) Carrying out computational fluid dynamics simulation on the forward airflow in the clean room space to be monitored to obtain an airflow streamline from the outlet of the fan filter unit to the inlet of the fan filter unit in the clean room space to be monitored;
removing the air flow lines which do not pass through the sampling points and the setting range of the sampling points in the step (1) according to the air flow lines, and removing the related pollutant sources according to the air flow lines;
(4) Removing non-conforming machines according to the operation characteristics of the machines in the clean room space to be monitored;
(5) And (3) respectively further sampling the pollutant sources after the steps (2), (3) and (4) are eliminated by adopting a movable sampling device, and then further detecting to determine the pollutant sources.
According to another technical scheme, the pollution source searching method based on the AMC on-line monitoring system comprises the following steps:
(1) When an abnormal value is measured at a certain sampling point of the AMC on-line monitoring system, determining the species of the pollutant;
(2) The pollutant sources in the space of the clean room to be monitored are checked, and the pollutant sources which do not generate pollutant species related to the step (1) are eliminated;
(3) Carrying out computational fluid dynamics simulation on the forward airflow in the clean room space to be monitored to obtain an airflow streamline from the outlet of the fan filter unit to the inlet of the fan filter unit in the clean room space to be monitored;
removing the air flow lines which do not pass through the sampling points and the setting range of the sampling points in the step (1) according to the air flow lines, and removing the related pollutant sources according to the air flow lines;
(4) Removing non-conforming machines according to the operation characteristics of the machines in the clean room space to be monitored;
(5) The machine after the steps (2), (3) and (4) are removed is a suspicious machine;
and (2) sequentially closing the suspicious machine, switching the AMC on-line monitoring system to the point position when the abnormal value is found in the step (1), and using the AMC on-line monitoring system as a single-point detection mode, wherein the machine is the source of pollutants when the AMC on-line monitoring system detects the abnormal value.
In the above, computational fluid dynamics, CFD, english acronym Computational Fluid Dynamics.
Preferably, in step (1), the contaminant species comprises HF, HCl, cl 2 、NH 3 、NO x 、SO 2 、H 2 S, acetic acid and TVOC.
Preferably, in the step (2), the source of the pollutant is a machine.
Preferably, in the step (3), the computational fluid dynamics simulation of the forward airflow and the airflow streamlines are completed before the step (1). Namely: the air flow line can also be made first at the beginning.
Preferably, in the step (3), the set range of the sampling points refers to a grid size range of Computational Fluid Dynamics (CFD).
Preferably, in the step (4), excluding the non-conforming machine according to the operation characteristic of the machine in the clean room space to be monitored, the method includes the following steps:
(a) Firstly, determining the operation characteristics of a machine, wherein the operation characteristics comprise an intermittent operation mode, a periodic intermittent operation mode and a continuous operation mode;
(b) For a station in intermittent mode of operation: when P o ≥T o Or P o ＜T o When tci-te is less than or equal to Tij and less than or equal to tci-ts, the machine is indicated to be a source of pollutants, otherwise, the machine is excluded;
wherein ts refers to the time point when the machine starts to operate, and te refers to the time when the machine ends to operateIntermediate points, P o The time length between ts and te when the machine runs once is referred to;
T o the detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tij refers to the time taken by the jth machine to flow to a sampling point i in the AMC online monitoring system;
for a periodic intermittent mode of operation: when P o ≥T o Or P o ＜T o Tci-te when n-1 ≤Tij n ≤tci-ts n Indicating that the machine is a source of pollutants, otherwise, excluding the machine;
wherein n is the number of cycles, in one cycle, the time point when the machine starts to operate is ts, the time point when the machine ends to operate is te, and the time between ts and te is P o The method comprises the steps of carrying out a first treatment on the surface of the Correspondingly, in the nth period, the time point when the machine starts to operate is ts n The time point of ending the operation of the machine is te n The method comprises the steps of carrying out a first treatment on the surface of the In the n-1 th period, the time point when the machine starts to operate is ts n-1 The time point of ending the operation of the machine is te n-1 ；
T o The detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tijn is the time taken by the jth machine to flow to the sampling point i in the AMC on-line monitoring system in the running period of the nth machine;
for a station in a continuous run mode of operation: when tci-ts is greater than or equal to Tij or tci-ts is greater than T o Indicating that the machine is a source of pollutants, otherwise, excluding the machine; wherein ts refers to the time point when the machine starts to operate, T o The detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tij refers to the time taken for the jth machine to flow to sample point i in the AMC on-line monitoring system.
Preferably, in the step (3), the airflow streamline includes an airflow streamline from an outlet of the fan filter unit to a sampling point, a pollutant source, a return air channel, and an inlet of the fan filter unit.
Preferably, in the step (3), removing the airflow lines which do not pass through the sampling point and the set range in the step (1), and removing the relevant pollutant sources according to the airflow lines;
the airflow streamline is from the outlet of the fan filter unit to the sampling point, the pollutant source, the return air channel and the inlet of the fan filter unit.
Preferably, between the steps (1) and (2), there is the following step:
firstly checking whether other AMC online monitoring systems measure abnormal values, if so, indicating that a pollutant source comes from outside the clean room; if not, go to step (2).
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
1. the invention develops a novel pollution source searching method based on an AMC on-line monitoring system, which sequentially eliminates a part of pollutant sources through pollutant species, eliminates a part of pollutant sources through airflow streamlines and eliminates a part of sub-station pollution sources through the operation characteristics of the stations, thereby screening thousands of original stations to the number of stations within a single digit and greatly reducing detection objects; then further accurate detection is carried out to determine the source of the pollutant; therefore, the method of the invention not only has no additional investment and lower cost, but also can effectively find the pollution source, forms a systematic method, solves the technical problems which are needed to be solved but are not solved all the time in the field, and has positive practical significance;
2. in the pollution source searching method, forward airflow is utilized to carry out computational fluid dynamics simulation to obtain airflow streamlines, particularly those flowing from the outlet of the fan filtering unit to the sampling point, the pollutant source, the return air channel and the inlet of the fan filtering unit, so that the situation that the machines are irrelevant can be accurately judged, and the method is rapid and accurate and has extremely low cost;
3. in the step (4) of the invention, according to the operation characteristics of the machine stations in the clean room space to be monitored, the non-conforming machine stations are removed by one-to-one analysis of the machine stations in different operation modes, so that the screening quantity is further reduced, and a solid foundation is laid for the feasibility of the whole scheme;
4. the detection method is simple and feasible, has low cost and is suitable for popularization and application.
Drawings
FIG. 1 is a schematic diagram of an intermittent operation mode of a machine according to a first embodiment of the present invention;
FIG. 2 is a schematic diagram of a machine in a periodic intermittent operation mode according to a first embodiment of the present invention;
fig. 3 is a schematic diagram of a machine in a continuous operation mode according to an embodiment of the invention.
Detailed Description
The invention will be further described with reference to the accompanying drawings and examples:
example 1
Referring to fig. 1 to 3, a pollution source searching method based on an AMC on-line monitoring system includes the following steps:
(1) When an abnormal value is measured at a certain sampling point of the AMC on-line monitoring system, determining the species of the pollutant;
(1a) Firstly checking whether other AMC online monitoring systems measure abnormal values, if so, indicating that a pollutant source comes from outside the clean room; if not, entering the step (2);
(2) The pollutant sources in the space of the clean room to be monitored are checked, and the pollutant sources which do not generate pollutant species related to the step (1) are eliminated;
(3) Carrying out computational fluid dynamics simulation on the forward airflow in the clean room space to be monitored to obtain an airflow streamline from the outlet of the fan filter unit to the inlet of the fan filter unit in the clean room space to be monitored;
removing the air flow lines which do not pass through the sampling points and the setting range of the sampling points in the step (1) according to the air flow lines, and removing the related pollutant sources according to the air flow lines;
(4) Removing non-conforming machines according to the operation characteristics of the machines in the clean room space to be monitored;
(5) And (3) further detecting the source of the pollutant after the step (2), (3) and (4) are removed by adopting movable detection equipment, so that the source of the pollutant can be determined.
In this embodiment, in the step (2), the source of the contaminant is a machine. In the step (3), the set range of the sampling points refers to a grid size range of Computational Fluid Dynamics (CFD).
In this embodiment, in the step (4), according to the operation characteristics of the machine in the clean room space to be monitored, excluding the non-conforming machine includes the following steps:
(a) Firstly, determining the operation characteristics of a machine, wherein the operation characteristics comprise an intermittent operation mode, a periodic intermittent operation mode and a continuous operation mode;
(b) For a station in intermittent mode of operation: when P o ≥T o Or P o ＜T o When tci-te is less than or equal to Tij and less than or equal to tci-ts, the machine is indicated to be a source of pollutants, otherwise, the machine is excluded; see fig. 1;
wherein ts refers to the time point when the machine starts to operate, te refers to the time point when the machine ends to operate, and P o The time length between ts and te when the machine runs once is referred to;
T o the detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tij refers to the time taken by the jth machine to flow to a sampling point i in the AMC online monitoring system;
for a periodic intermittent mode of operation: when P o ≥T o Or P o ＜T o Tci-te when n-1 ≤Tij n ≤tci-ts n Indicating that the machine is a source of pollutants, otherwise, excluding the machine; see fig. 2;
wherein n is the number of cycles, the time point when the machine starts to operate is ts, and the machine ends to operateThe time point is te, the time length between ts and te is P o The method comprises the steps of carrying out a first treatment on the surface of the Correspondingly, in the nth period, the time point when the machine starts to operate is ts n The time point of ending the operation of the machine is te n The method comprises the steps of carrying out a first treatment on the surface of the In the n-1 th period, the time point when the machine starts to operate is ts n-1 The time point of ending the operation of the machine is te n-1 ；
T o The detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tijn is the time taken by the jth machine to flow to the sampling point i in the AMC on-line monitoring system in the running period of the nth machine;
for a station in a continuous run mode of operation: as shown in FIG. 3, when tci-ts.gtoreq.Tij or tci-ts > T o Indicating that the machine is a source of pollutants, otherwise, excluding the machine; wherein ts refers to the time point when the machine starts to operate, T o The detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tij refers to the time taken for the jth machine to flow to sample point i in the AMC on-line monitoring system.
In this embodiment, in the step (3), the airflow streamline includes an airflow streamline from an outlet of the fan filter unit to a sampling point, a pollutant source, a return air channel, and an inlet of the fan filter unit.
In this embodiment, in the step (3), the airflow lines that do not pass through the sampling point and the set range in the step (1) are removed, and then the relevant contaminant sources are removed according to the airflow lines; the airflow streamline is from the outlet of the fan filter unit to the sampling point, the pollutant source, the return air channel and the inlet of the fan filter unit.
Example two
The pollution source searching method based on AMC on-line monitoring system has the same steps as the first embodiment and the only difference is that: in the step (5), the source of the pollutant after the removal of the steps (2), (3) and (4) is further sampled by a movable sampling device, and then further detection is carried out, so that the source of the pollutant can be determined.
Example III
The pollution source searching method based on AMC on-line monitoring system has the same steps as the first embodiment and the only difference is that: the step (5) is as follows: the machine after the steps (2), (3) and (4) are removed is a suspicious machine;
and (2) sequentially closing the suspicious machine, switching the AMC on-line monitoring system to the point position when the abnormal value is found in the step (1), and using the AMC on-line monitoring system as a single-point detection mode, wherein the machine is the source of pollutants when the AMC on-line monitoring system detects the abnormal value.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (9)
1. The pollution source searching method based on the AMC on-line monitoring system is characterized by comprising the following steps:
(1) When an abnormal value is measured at a certain sampling point of the AMC on-line monitoring system, determining the species of the pollutant;
(2) The pollutant sources in the space of the clean room to be monitored are checked, and the pollutant sources which do not generate pollutant species related to the step (1) are eliminated;
(3) Carrying out computational fluid dynamics simulation on the forward airflow in the clean room space to be monitored to obtain an airflow streamline from the outlet of the fan filter unit to the inlet of the fan filter unit in the clean room space to be monitored;
removing the air flow lines which do not pass through the sampling points and the setting range of the sampling points in the step (1) according to the air flow lines, and removing the related pollutant sources according to the air flow lines;
(4) Removing non-conforming machines according to the operation characteristics of the machines in the clean room space to be monitored;
(5) Then adopting movable detection equipment to further detect the pollutant sources after the steps (2), (3) and (4) are eliminated, and determining the pollutant sources;
in the step (4), according to the operation characteristics of the machine in the clean room space to be monitored, excluding the non-conforming machine, the method comprises the following steps:
(a) Firstly, determining the operation characteristics of a machine, wherein the operation characteristics comprise an intermittent operation mode, a periodic intermittent operation mode and a continuous operation mode;
(b) For a station in intermittent mode of operation: when P o ≥T o Or P o ＜T o When tci-te is less than or equal to Tij and less than or equal to tci-ts, the machine is indicated to be a source of pollutants, otherwise, the machine is excluded;
wherein ts refers to the time point when the machine starts to operate, te refers to the time point when the machine ends to operate, and P o The time length between ts and te when the machine runs once is referred to;
T o the detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tij refers to the time taken by the jth machine to flow to a sampling point i in the AMC online monitoring system;
for a periodic intermittent mode of operation: when P o ≥T o Or P o ＜T o Tci-te when n-1 ≤Tij n ≤tci-ts n Indicating that the machine is a source of pollutants, otherwise, excluding the machine;
wherein n is the number of cycles, in one cycle, the time point when the machine starts to operate is ts, the time point when the machine ends to operate is te, and the time between ts and te is P o The method comprises the steps of carrying out a first treatment on the surface of the Correspondingly, in the nth period, the time point when the machine starts to operate ists n The time point of ending the operation of the machine is te n The method comprises the steps of carrying out a first treatment on the surface of the In the n-1 th period, the time point when the machine starts to operate is ts n-1 The time point of ending the operation of the machine is te n-1 ；
T o The detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tijn is the time taken by the jth machine to flow to the sampling point i in the AMC on-line monitoring system in the running period of the nth machine;
for a station in a continuous run mode of operation: when tci-ts is greater than or equal to Tij or tci-ts is greater than T o Indicating that the machine is a source of pollutants, otherwise, excluding the machine; wherein ts refers to the time point when the machine starts to operate, T o The detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tij refers to the time taken for the jth machine to flow to sample point i in the AMC on-line monitoring system.
2. The pollution source searching method based on the AMC on-line monitoring system is characterized by comprising the following steps:
(1) When an abnormal value is measured at a certain sampling point of the AMC on-line monitoring system, determining the species of the pollutant;
(2) The pollutant sources in the space of the clean room to be monitored are checked, and the pollutant sources which do not generate pollutant species related to the step (1) are eliminated;
(3) Carrying out computational fluid dynamics simulation on the forward airflow in the clean room space to be monitored to obtain an airflow streamline from the outlet of the fan filter unit to the inlet of the fan filter unit in the clean room space to be monitored;
removing the air flow lines which do not pass through the sampling points and the setting range of the sampling points in the step (1) according to the air flow lines, and removing the related pollutant sources according to the air flow lines;
(4) Removing non-conforming machines according to the operation characteristics of the machines in the clean room space to be monitored;
(5) Then adopting a movable sampling device to respectively further sample the pollutant sources after the pollutant sources are removed in the steps (2), (3) and (4), and then further detecting to determine the pollutant sources;
in the step (4), according to the operation characteristics of the machine in the clean room space to be monitored, excluding the non-conforming machine, the method comprises the following steps:
(a) Firstly, determining the operation characteristics of a machine, wherein the operation characteristics comprise an intermittent operation mode, a periodic intermittent operation mode and a continuous operation mode;
(b) For a station in intermittent mode of operation: when P o ≥T o Or P o ＜T o When tci-te is less than or equal to Tij and less than or equal to tci-ts, the machine is indicated to be a source of pollutants, otherwise, the machine is excluded;
wherein ts refers to the time point when the machine starts to operate, te refers to the time point when the machine ends to operate, and P o The time length between ts and te when the machine runs once is referred to;
T o the detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tij refers to the time taken by the jth machine to flow to a sampling point i in the AMC online monitoring system;
for a periodic intermittent mode of operation: when P o ≥T o Or P o ＜T o Tci-te when n-1 ≤Tij n ≤tci-ts n Indicating that the machine is a source of pollutants, otherwise, excluding the machine;
wherein n is the number of cycles, in one cycle, the time point when the machine starts to operate is ts, the time point when the machine ends to operate is te, and the time between ts and te is P o The method comprises the steps of carrying out a first treatment on the surface of the Correspondingly, in the nth period, the time point when the machine starts to operate is ts n The time point of ending the operation of the machine is te n The method comprises the steps of carrying out a first treatment on the surface of the In the n-1 th period, the time point when the machine starts to operate is ts n-1 When the machine is finished runningThe intermediate point is te n-1 ；
T o The detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tijn is the time taken by the jth machine to flow to the sampling point i in the AMC on-line monitoring system in the running period of the nth machine;
for a station in a continuous run mode of operation: when tci-ts is greater than or equal to Tij or tci-ts is greater than T o Indicating that the machine is a source of pollutants, otherwise, excluding the machine; wherein ts refers to the time point when the machine starts to operate, T o The detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tij refers to the time taken for the jth machine to flow to sample point i in the AMC on-line monitoring system.
3. The pollution source searching method based on the AMC on-line monitoring system is characterized by comprising the following steps:
(1) When an abnormal value is measured at a certain sampling point of the AMC on-line monitoring system, determining the species of the pollutant;
(2) The pollutant sources in the space of the clean room to be monitored are checked, and the pollutant sources which do not generate pollutant species related to the step (1) are eliminated;
(3) Carrying out computational fluid dynamics simulation on the forward airflow in the clean room space to be monitored to obtain an airflow streamline from the outlet of the fan filter unit to the inlet of the fan filter unit in the clean room space to be monitored;
removing the air flow lines which do not pass through the sampling points and the setting range of the sampling points in the step (1) according to the air flow lines, and removing the related pollutant sources according to the air flow lines;
(4) Removing non-conforming machines according to the operation characteristics of the machines in the clean room space to be monitored;
(5) The machine after the steps (2), (3) and (4) are removed is a suspicious machine;
then sequentially closing the suspicious machine, simultaneously switching the AMC on-line monitoring system to the point position when the abnormal value is found in the step (1), and using the AMC on-line monitoring system as a single-point detection mode, wherein when the AMC on-line monitoring system detects the abnormal value, the machine is the source of pollutants;
in the step (4), according to the operation characteristics of the machine in the clean room space to be monitored, excluding the non-conforming machine, the method comprises the following steps:
(a) Firstly, determining the operation characteristics of a machine, wherein the operation characteristics comprise an intermittent operation mode, a periodic intermittent operation mode and a continuous operation mode;
(b) For a station in intermittent mode of operation: when P o ≥T o Or P o ＜T o When tci-te is less than or equal to Tij and less than or equal to tci-ts, the machine is indicated to be a source of pollutants, otherwise, the machine is excluded;
wherein ts refers to the time point when the machine starts to operate, te refers to the time point when the machine ends to operate, and P o The time length between ts and te when the machine runs once is referred to;
T o the detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tij refers to the time taken by the jth machine to flow to a sampling point i in the AMC online monitoring system;
for a periodic intermittent mode of operation: when P o ≥T o Or P o ＜T o Tci-te when n-1 ≤Tij n ≤tci-ts n Indicating that the machine is a source of pollutants, otherwise, excluding the machine;
wherein n is the number of cycles, in one cycle, the time point when the machine starts to operate is ts, the time point when the machine ends to operate is te, and the time between ts and te is P o The method comprises the steps of carrying out a first treatment on the surface of the Correspondingly, in the nth period, the time point when the machine starts to operate is ts n The time point of ending the operation of the machine is te n The method comprises the steps of carrying out a first treatment on the surface of the In the n-1 th period, the time point when the machine starts to operate is ts n-1 Time point for ending operation of machineFor te n-1 ；
T o The detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tijn is the time taken by the jth machine to flow to the sampling point i in the AMC on-line monitoring system in the running period of the nth machine;
for a station in a continuous run mode of operation: when tci-ts is greater than or equal to Tij or tci-ts is greater than T o Indicating that the machine is a source of pollutants, otherwise, excluding the machine; wherein ts refers to the time point when the machine starts to operate, T o The detection period of the same sampling point in the AMC on-line monitoring system is referred to; tci is the time point when the sampling point i in the AMC on-line monitoring system detects an abnormal value; tij refers to the time taken for the jth machine to flow to sample point i in the AMC on-line monitoring system.
4. A method according to claim 1, 2 or 3, wherein in step (2), the source of the contaminant is a machine.
5. A method according to claim 1 or 2 or 3, wherein in step (3) the computational fluid dynamics simulation of the forward airflow and the obtaining of the airflow streamlines are completed before step (1).
6. A method according to claim 1, 2 or 3, wherein in the step (3), the set range of the sampling points means a computational fluid dynamics grid size range.
7. A method as claimed in claim 1, 2 or 3 wherein in step (3) the airflow streamlines comprise airflow streamlines from the outlet of the fan filter unit to the sampling point, contaminant source, return air channel, inlet of the fan filter unit.
8. The method of claim 7, wherein in step (3), air flow lines which do not pass through the sampling point and the set range in step (1) are excluded, and then the relevant contaminant sources are excluded according to the air flow lines;
the airflow streamline is from the outlet of the fan filter unit to the sampling point, the pollutant source, the return air channel and the inlet of the fan filter unit.
9. A method according to claim 1 or 2 or 3, wherein between steps (1) and (2) there is the further step of:
firstly checking whether other AMC online monitoring systems measure abnormal values, if so, indicating that a pollutant source comes from outside the clean room; if not, go to step (2).
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