CN113587768B - Gauge for ring boss and detection method and application thereof - Google Patents
Gauge for ring boss and detection method and application thereof Download PDFInfo
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- CN113587768B CN113587768B CN202110953838.2A CN202110953838A CN113587768B CN 113587768 B CN113587768 B CN 113587768B CN 202110953838 A CN202110953838 A CN 202110953838A CN 113587768 B CN113587768 B CN 113587768B
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- 238000001514 detection method Methods 0.000 title claims abstract description 36
- 238000000034 method Methods 0.000 claims abstract description 20
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000007689 inspection Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000000429 assembly Methods 0.000 description 9
- 230000000712 assembly Effects 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
- G01B5/06—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/08—Measuring arrangements characterised by the use of mechanical techniques for measuring diameters
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- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention provides a checking fixture for ring boss, a checking method and application thereof. The gauge for the ring boss provided by the invention has the advantages that the structure is simple, the processing is easy, whether a plurality of ring bosses meet the standard or not can be detected simultaneously, the detection efficiency is high, the detection time can be saved, the labor cost is saved, and the accuracy can be ensured by the mode of full detection and one calliper spot check of the gauge.
Description
Technical Field
The invention belongs to the technical field of detection, relates to a gauge for a ring boss, and particularly relates to a gauge for a ring boss, and a detection method and application thereof.
Background
The ring used in the physical vapor deposition production process of the semiconductor is provided with 7 or 5 bulges which are used for being installed on a sputtering machine and also have the function of electrifying. After processing, the size of the bulge on the ring piece is required to be detected, and the batch products cause larger production pressure to the detection process, so that production bottlenecks are caused. The machining field usually adopts a three-coordinate measuring machine to detect the size of the part, but the three-coordinate measuring machine is adopted to detect the part, so that the shape of the part is required to be unchanged, each bulge is required to be measured respectively, and data are recorded to form a three-coordinate detection report, so that the detection working hour is prolonged, and the workload is increased.
CN212228005U discloses a novel three-coordinate detecting machine with auxiliary positioning device, comprising a three-coordinate detecting machine, wherein a stop block is fixedly connected to the rear side of the upper surface of the three-coordinate detecting machine, a chute is arranged on the front side of the upper surface of the three-coordinate detecting machine (1), a sliding cavity is arranged below the chute, sliding ways are arranged at two ends of the inner wall of the sliding cavity, a sliding rod and a sliding plate are respectively and slidably connected to the front side and the rear side of the inside of the sliding way, and a compression spring is fixedly connected to one side of the sliding plate; the outer wall of slide bar has cup jointed the kicking block, the top links to each other with the spout is sliding, the outer wall threaded connection of kicking block has the draw-in lever, the draw-in lever runs through the inner wall in top and smooth chamber closely laminating.
CN206855298U discloses a three-coordinate measuring clamp, which comprises a clamp base, wherein a magnetic seat is arranged on the clamp base, and the magnetic seat is controlled by a magnetic switch to open and close magnetism; the inner groove is formed along the periphery of the clamp base, one end of the mounting seat is embedded into the inner groove and fixedly connected with the mounting seat through a fastener, the other end of the mounting seat is sleeved with the elastic seat sleeve, one end of the elastic seat sleeve is sleeved with the elastic positioning head, the other end of the elastic seat sleeve is sleeved with the elastic base, a spring is further arranged between the elastic positioning head and the elastic base in the elastic seat sleeve, and the elastic positioning head, the elastic seat sleeve, the spring and the elastic base form an elastic seat.
CN110906893a discloses a ring three-coordinate gauge, the gauge comprises a base, a circular concave cavity matched with the ring to be measured is arranged on the base, and a groove for the needle of the three-coordinate measuring machine to extend in is arranged on the base along the periphery of the circular concave cavity. The measuring method comprises the steps of placing the ring to be measured in a circular concave cavity of a measuring tool, placing a lug of the ring to be measured on a base at the periphery of the circular concave cavity, and measuring the size of the ring to be measured by using a three-coordinate measuring machine. The measuring needle of the three-coordinate measuring machine extends into the groove, and the side wall and/or the bottom of the ring to be measured are/is detected.
The existing three-coordinate measuring method is adopted to measure batch components, the size of each ring boss is required to be measured respectively, data are recorded to form a three-coordinate detection report, detection working hours are prolonged, workload is increased, and working efficiency is reduced, so that a detection tool and a detection method for measuring the ring bosses are required to be developed, and the detection efficiency of the ring is improved.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention aims at providing the gauge for the ring boss, the detection method and the application thereof, which can reduce the detection time of the ring boss, and each group of ring bosses can save 50% of detection working hours, thereby improving the production efficiency.
To achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the invention provides a checking fixture for a ring boss, which comprises a base and a die, wherein the die comprises an upper die assembly and a lower die assembly, the lower die assembly is fixed on the surface of the base, the ring boss is arranged in the upper die assembly, then the upper die assembly is buckled with the lower die assembly, and when the upper die assembly completely covers the lower die assembly, the checking fixture for the ring boss is qualified in detection.
As a preferable technical scheme of the invention, the lower die assembly is of an annular boss structure, and the lower die assembly is provided with two symmetrical openings.
Preferably, the width of the opening is smaller than the inner diameter of the lower die assembly.
Preferably, a cushion layer is arranged at the joint of the lower die assembly and the base, and the diameter of the cushion layer is larger than the outer diameter of the lower die assembly.
As a preferable technical scheme of the invention, a through accommodating cavity is arranged in the center of the upper die assembly, and two mutually perpendicular limiting grooves are formed in one side surface of the upper die assembly.
Preferably, the diameter of the accommodating chamber is larger than the width of the limit groove.
As a preferable technical scheme of the invention, the diameter of the accommodating cavity is larger than that of the cushion layer of the lower die assembly, after the upper die assembly is buckled with the lower die assembly, the lower die assembly stretches into the accommodating cavity, and the inner wall of the accommodating cavity is attached to the outer wall of the cushion layer.
As a preferable technical scheme of the invention, at least two molds are arranged on the surface of the base side by side, and the molds respectively measure different ring bosses arranged on the surface of the same ring.
As a preferable technical scheme of the invention, the ring boss comprises a cylindrical main body and a supporting layer, wherein a fixing groove is formed in one side surface of the cylindrical main body, the other side surface of the cylindrical main body is connected with the supporting layer, and a cylindrical protrusion is arranged at the bottom of the fixing groove.
Preferably, the cylindrical protrusion is a through structure in the middle.
Preferably, the height of the columnar body is 22-30 mm, for example, 22mm, 22.5mm, 23mm, 23.5mm, 23.8mm, 24mm, 24.5mm, 24.8mm, 25mm, 25.5mm, 26mm, 26.5mm, 27mm, 27.6mm, 28mm, 28.4mm, 28.8mm, 29mm, 29.4mm, 29.6mm, or 30mm, but not limited to the recited values, and other non-recited values within the range of values are equally applicable.
Preferably, the diameter of the cylindrical body is 19-25 mm, for example, 19mm, 19.5mm, 20mm, 20.3mm, 20.5mm, 21mm, 21.6mm, 22mm, 22.5mm, 23mm, 23.5mm, 23.8mm, 24mm, 24.5mm, 24.8mm or 25mm, but not limited to the recited values, and other non-recited values within the range of values are equally applicable.
Preferably, the cylindrical protrusion is 0.4-0.6 mm above the surface of the cylindrical body, for example, 0.4mm, 0.45mm, 0.5mm, 0.55mm or 0.6mm, but not limited to the recited values, and other non-recited values within the range of values are equally applicable.
Preferably, the height of the cylindrical protrusion is 6 to 12mm, for example, 6mm, 6.5mm, 6.8mm, 7mm, 7.5mm, 7.8mm, 8mm, 8.5mm, 8.8mm, 9mm, 9.5mm, 9.8mm, 10mm, 10.5mm, 11mm, 11.6mm or 12mm, but not limited to the recited values, and other non-recited values within the range of values are equally applicable.
Preferably, the outer diameter of the cylindrical protrusion is 8 to 12mm, for example, 8mm, 8.5mm, 8.8mm, 9mm, 9.5mm, 9.8mm, 10mm, 10.5mm, 11mm, 11.6mm or 12mm, but not limited to the recited values, and other non-recited values within the range of values are equally applicable.
The diameter of the fixing groove is preferably 16 to 21mm, and may be, for example, 16mm, 16.5mm, 16.8mm, 17mm, 17.5mm, 17.8mm, 18mm, 18.5mm, 18.8mm, 19mm, 19.5mm, 19.8mm, 20mm, 20.5mm or 21mm, but not limited to the recited values, and other non-recited values within the range of values are equally applicable.
Preferably, the support layer has an outer diameter greater than the diameter of the cylindrical body.
The thickness of the support layer is preferably 1.2 to 1.3mm, and may be, for example, 1.2mm, 1.21mm, 1.22mm, 1.23mm, 1.24mm, 1.25mm, 1.26mm, 1.27mm, 1.28mm, 1.29mm or 1.3mm, but is not limited to the recited values, and other non-recited values within the range of values are equally applicable.
As a preferable technical scheme of the invention, the outer diameter of the supporting layer is the same as the diameter of the accommodating cavity of the upper die assembly, the boss of the ring piece is arranged in the accommodating cavity, the supporting layer is positioned at the bottom of the accommodating cavity, and the top of the columnar main body is higher than the surface of one side of the upper die assembly, on which the fixing groove is formed.
Preferably, the diameter of the cylindrical main body is the same as the outer diameter of the lower die assembly, after the upper die assembly is buckled with the lower die assembly, the surface of the lower die assembly is propped against the surface of the cylindrical main body, and the cylindrical protrusions extend into the inner ring of the lower die assembly.
In a second aspect, the present invention provides a method for detecting a ring boss by using the gauge for a ring boss in the first aspect, where the method includes:
and respectively placing the ring boss in the upper die assembly, then buckling the upper die assembly with the lower die assembly, and when the upper die assembly completely covers the lower die assembly, indicating that the ring boss is qualified in detection.
As a preferable technical scheme of the invention, the detection method specifically comprises the following steps:
providing at least two ring bosses arranged on the same ring, arranging check tools with the same number of dies as the ring bosses on the base, respectively arranging the ring bosses in the upper die assemblies, respectively buckling the upper die assemblies with the ring bosses on the lower die assemblies, if the upper die assemblies are completely matched with the lower die assemblies, detecting the ring bosses to be qualified, and then using calipers to extract the measuring size of one ring boss to record the measuring size.
In the invention, the ring boss is placed in the upper die assembly, the ring boss smoothly enters the accommodating cavity, and the supporting layer is completely matched with the bottom of the accommodating cavity, namely, whether the outer diameter of the cylindrical main body of the ring boss, the diameter of the supporting layer and the thickness of the supporting layer are qualified or not is detected. And then the upper die assembly with the ring boss is buckled on the lower die assembly respectively, the surface of the cylindrical main body of the ring boss is propped against the surface of the lower die assembly, the cylindrical boss stretches into the inner ring of the lower die assembly, meanwhile, the lower die assembly stretches into the accommodating cavity of the upper die assembly, the inner wall of the upper die assembly is attached to the outer wall of the cushion layer at the bottom of the lower die assembly, namely the upper die assembly completely covers the lower die assembly, and the size of the ring boss is qualified.
In a third aspect, the present invention provides an application of the gauge for a ring boss in the first aspect, where the gauge for a ring boss is applied to the field of semiconductors.
The gauge for the ring boss can be applied to the field of semiconductor or machining, and is particularly suitable for detecting whether a plurality of ring bosses on a group of magnetron sputtering rings meet the standard or not, so that the detection efficiency is improved, and the product precision is ensured.
Compared with the prior art, the invention has the beneficial effects that:
the gauge for the ring boss, the detection method and the application thereof provided by the invention have the advantages that the structure is simple, the processing is easy, whether a plurality of ring bosses meet the standard or not can be detected simultaneously, and the detection efficiency is high; the gauge for the ring boss can save detection time and labor cost, can ensure accuracy and can be applied to detection of batch members.
Drawings
FIG. 1 is a schematic view of a lower die assembly of a gauge for ring bosses according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an upper die assembly of a gauge for a boss of a ring according to an embodiment of the present invention;
fig. 3 is a schematic structural view of a boss of a ring according to an embodiment of the present invention.
Wherein, 1-base; 2-an upper die assembly; 3-a lower die assembly; 4-cushion layer; 5-ring bosses; 6, a limit groove; 7-a support layer; 8-a cylindrical protrusion; 9-fixing groove.
Detailed Description
It is to be understood that in the description of the present invention, the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus are not to be construed as limiting the present invention.
It should be noted that, in the description of the present invention, unless explicitly specified and limited otherwise, the terms "disposed," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art in a specific case.
The technical scheme of the invention is further described below by the specific embodiments with reference to the accompanying drawings.
In one embodiment, the invention provides a gauge for a ring boss 5, which comprises a base 1 and a die. At least two molds are arranged side by side on the surface of the base 1, and a plurality of ring bosses 5 arranged on the surface of the same ring are measured respectively. The die comprises an upper die assembly 2 and a lower die assembly 3, wherein the lower die assembly 3 is fixed on the surface of the base 1, the ring boss 5 is arranged in the upper die assembly 2, and then the upper die assembly 2 and the lower die assembly 3 are buckled to detect the ring boss 5.
The lower die assembly 3 is of an annular boss structure, the lower die assembly 3 is provided with two symmetrical openings, the width of each opening is smaller than the inner diameter of the lower die assembly 3, a cushion layer 4 is arranged at the joint of the lower die assembly 3 and the base 1, and the diameter of the cushion layer 4 is larger than the outer diameter of the lower die assembly 3.
The center of the upper die assembly 2 is provided with a through accommodating cavity, two limiting grooves 6 which are mutually perpendicular are formed in one side surface of the upper die assembly 2, and the diameter of the accommodating cavity is larger than the width of the limiting grooves 6. The diameter of the accommodating cavity is larger than that of the cushion layer 4 of the lower die assembly 3, after the upper die assembly 2 is buckled with the lower die assembly 3, the lower die assembly 3 stretches into the accommodating cavity, and the inner wall of the accommodating cavity is attached to the outer wall of the cushion layer 4.
As shown in fig. 3, the ring boss 5 includes a cylindrical body having a height of 22 to 30mm, a diameter of 19 to 25mm, and a support layer 7 having an outer diameter larger than the diameter of the cylindrical body, and a thickness of 1.2 to 1.3mm. A fixing groove 9 is formed in one side surface of the cylindrical main body, the other side surface of the cylindrical main body is connected with the supporting layer 7, and a cylindrical protrusion 8 is arranged at the bottom of the fixing groove 9. The diameter of the fixed groove 9 is 16-21 mm, the cylindrical bulge 8 is of a middle through structure, the outer diameter of the cylindrical bulge 8 is 8-12 mm, the height of the cylindrical bulge 8 is 6-12 mm, and the length of the cylindrical bulge 8, which is higher than the surface of the cylindrical main body, is 0.4-0.6 mm.
Wherein, the supporting layer 7 external diameter is the same with the diameter of the holding chamber of last module 2, holds the intracavity with ring boss 5, and supporting layer 7 is located and holds the chamber bottom, and cylindricality main part top exceeds the surface of last module 2 one side of seting up fixed slot 9. The diameter of the cylindrical main body is the same as the outer diameter of the lower die assembly 3, after the upper die assembly 2 and the lower die assembly 3 are buckled, the surface of the lower die assembly 3 is propped against the surface of the cylindrical main body, and the cylindrical protrusions 8 extend into the inner ring of the lower die assembly 3.
In another embodiment, the invention provides a method for detecting a gauge of the ring boss 5 according to one embodiment, comprising:
at least two ring bosses 5 arranged on the same ring and a checking fixture of the ring bosses 5 are provided, and at least two dies are arranged on a base 1 of the checking fixture. The ring piece bosses 5 are respectively arranged in the upper die assembly 2, the upper die assembly 2 with the ring piece bosses 5 is respectively buckled on the lower die assembly 3, if the upper die assembly 2 is completely matched with the lower die assembly 3, the detection is qualified, and then a caliper is used for measuring the size of one of the ring piece bosses 5 and recording data.
Example 1
In this embodiment, a measuring method for ring bosses 5 is provided, and first, seven ring bosses 5 and a gauge are provided that are disposed on the same ring. And (5) respectively measuring whether the seven ring bosses 5 are qualified or not by adopting a gauge, then extracting one ring boss 5 by using a caliper to measure the size of the ring boss, and recording data.
The checking fixture comprises a base 1, as shown in fig. 1, seven dies are arranged on the surface of the base 1 side by side, each die comprises an upper die assembly 2 and a lower die assembly 3, the lower die assemblies 3 are fixed on the surface of the base 1, a ring boss 5 is arranged in the upper die assembly 2, and then the upper die assembly 2 is buckled with the lower die assemblies 3.
The lower die assembly 3 is of an annular boss structure, two symmetrical openings are formed in the surface of the lower die assembly 3, the width of each opening is smaller than the inner diameter of the lower die assembly 3, a cushion layer 4 is arranged at the joint of the lower die assembly 3 and the base 1, and the diameter of the cushion layer 4 is larger than the outer diameter of the lower die assembly 3.
The center of the upper die assembly 2 is provided with a through accommodating cavity, two limiting grooves 6 which are mutually perpendicular are formed in one side surface of the upper die assembly 2, and the diameter of the accommodating cavity is larger than the width of the limiting grooves 6. Simultaneously, the diameter of the accommodating cavity is larger than that of the cushion layer 4 of the lower die assembly 3, after the upper die assembly 2 and the lower die assembly 3 are buckled, the lower die assembly 3 stretches into the accommodating cavity, and the inner wall of the accommodating cavity is attached to the outer wall of the cushion layer 4.
As shown in fig. 2, the provided ring boss 5 comprises a cylindrical main body and a supporting layer 7, wherein a fixing groove 9 is formed in one side surface of the cylindrical main body, the supporting layer 7 is connected with the other side surface of the cylindrical main body, and a cylindrical protrusion 8 with a middle through structure is arranged at the bottom of the fixing groove 9.
Seven ring bosses 5 are sequentially arranged in the accommodating cavity of the upper die assembly 2 respectively, the supporting layer 7 is positioned at the bottom of the accommodating cavity, and the top of the columnar main body is higher than the surface of one side of the upper die assembly 2 where the fixing groove 9 is arranged. After the upper die assembly 2 with the ring piece boss 5 is buckled with the corresponding lower die assembly 3 respectively, the lower die assembly 3 can extend into the accommodating cavity, the inner wall of the accommodating cavity is attached to the outer wall of the cushion layer 4, the surface of the lower die assembly 3 abuts against the surface of the cylindrical main body, the cylindrical bulge 8 extends into the inner ring of the lower die assembly 3, the upper die assembly 2 is completely matched with the lower die assembly 3, and the detection result is qualified.
The height of the cylindrical main body in the ring boss 5 is 24.31mm, the diameter of the cylindrical main body is 20.19mm, the outer diameter of the supporting layer 7 is 25.4mm, the thickness of the supporting layer 7 is 1.27mm, the diameter of the fixing groove 9 is 17.65mm, the outer diameter of the cylindrical boss 8 is 8.89mm, the height of the cylindrical boss 8 is 8.13mm, and the length of the cylindrical boss 8 higher than the surface 9 of the cylindrical main body is 0.5mm.
The detection results are shown in Table 1:
TABLE 1
Example 2
In this embodiment, a measuring method for ring bosses 5 is provided, and first, five ring bosses 5 and a gauge are provided that are disposed on the same ring. And detecting whether the five ring bosses 5 are qualified or not by adopting a gauge, extracting one ring boss 5, measuring the size by using a caliper, and recording data.
The checking fixture comprises a base 1, five dies are arranged side by side on the surface of the base 1, each die comprises an upper die assembly 2 and a lower die assembly 3, the lower die assemblies 3 are fixed on the surface of the base 1, a ring boss 5 is arranged in the upper die assembly 2, and then the upper die assembly 2 and the lower die assemblies 3 are buckled.
The lower die assembly 3 is of an annular boss structure, two symmetrical openings are formed in the surface of the lower die assembly 3, the width of each opening is smaller than the inner diameter of the lower die assembly 3, a cushion layer 4 is arranged at the joint of the lower die assembly 3 and the base 1, and the diameter of the cushion layer 4 is larger than the outer diameter of the lower die assembly 3.
The center of the upper die assembly 2 is provided with a through accommodating cavity, two limiting grooves 6 which are mutually perpendicular are formed in one side surface of the upper die assembly 2, and the diameter of the accommodating cavity is larger than the width of the limiting grooves 6. Simultaneously, the diameter of the accommodating cavity is larger than that of the cushion layer 4 of the lower die assembly 3, after the upper die assembly 2 and the lower die assembly 3 are buckled, the lower die assembly 3 stretches into the accommodating cavity, and the inner wall of the accommodating cavity is attached to the outer wall of the cushion layer 4.
The provided ring boss 5 comprises a cylindrical main body and a supporting layer 7, wherein a fixing groove 9 is formed in one side surface of the cylindrical main body, the supporting layer 7 is connected with the other side surface of the cylindrical main body, and a cylindrical boss 8 with a middle through structure is arranged at the bottom of the fixing groove 9.
Five ring bosses 5 are sequentially arranged in the accommodating cavity of the upper die assembly 2 respectively, the supporting layer 7 is positioned at the bottom of the accommodating cavity, and the top of the columnar main body is higher than the surface of one side of the upper die assembly 2, on which the fixing groove 9 is formed. After the upper die assembly 2 with the ring piece boss 5 is buckled with the corresponding lower die assembly 3 respectively, the lower die assembly 3 can extend into the accommodating cavity, the inner wall of the accommodating cavity is attached to the outer wall of the cushion layer 4, the surface of the lower die assembly 3 abuts against the surface of the cylindrical main body, the cylindrical bulge 8 extends into the inner ring of the lower die assembly 3, the upper die assembly 2 is completely matched with the lower die assembly 3, and the detection result is qualified.
The height of the cylindrical main body in the ring boss 5 is 26.31mm, the diameter of the cylindrical main body is 22.29mm, the outer diameter of the supporting layer 7 is 26.3mm, the thickness of the supporting layer 7 is 1.29mm, the diameter of the fixing groove 9 is 17.65mm, the outer diameter of the cylindrical boss 8 is 9.37mm, the height of the cylindrical boss 8 is 9.27mm, and the length of the cylindrical boss 8 higher than the surface 9 of the cylindrical main body is 0.5mm.
The detection results are shown in Table 2:
TABLE 2
According to the invention, the ring boss 5 is placed in the upper die assembly 2, the ring boss 5 smoothly enters the accommodating cavity, and the supporting layer 7 is completely matched with the bottom of the accommodating cavity, namely, whether the outer diameter of the cylindrical main body of the ring boss 5, the diameter of the supporting layer 7 and the thickness of the supporting layer 7 are qualified or not is detected. Then the upper die assembly 2 with the ring boss 5 is buckled on the lower die assembly 3 respectively, the cylindrical main body surface of the ring boss 5 is propped against the surface of the lower die assembly 3, the cylindrical bulge 8 stretches into the inner ring of the lower die assembly 3, meanwhile, the lower die assembly 3 stretches into the accommodating cavity, the inner wall of the accommodating cavity is attached to the outer wall of the cushion layer 4 at the bottom of the lower die assembly 3, namely, the upper die assembly 2 completely covers the lower die assembly 3, and the size of the ring boss 5 is qualified.
The gauge for the ring boss 5 provided by the invention has the advantages that the structure is simple, the processing is easy, whether a plurality of ring bosses 5 meet the standard or not can be detected simultaneously, and the detection efficiency is high; the gauge for the ring boss 5 provided by the invention can save detection time and labor cost, can ensure accuracy and can be applied to detection of batch members.
The applicant declares that the above is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be apparent to those skilled in the art that any changes or substitutions that are easily conceivable within the technical scope of the present invention disclosed by the present invention fall within the scope of the present invention and the disclosure.
Claims (13)
1. The detection method of the ring boss is characterized by comprising the following steps of: providing at least two ring bosses arranged on the same ring, and arranging inspection tools with the same number of dies as the ring bosses on the base, wherein the dies respectively measure different ring bosses arranged on the surface of the same ring;
the die comprises an upper die assembly and a lower die assembly, wherein a through accommodating cavity is arranged in the center of the upper die assembly, and two limiting grooves which are mutually perpendicular are formed in the surface of one side of the upper die assembly; the lower die assembly is fixed on the surface of the base, the lower die assembly is of an annular boss structure, the lower die assembly is provided with two symmetrical openings, a cushion layer is arranged at the joint of the lower die assembly and the base, the diameter of the cushion layer is larger than the outer diameter of the lower die assembly, and the diameter of the accommodating cavity is larger than the diameter of the cushion layer of the lower die assembly;
the ring boss comprises a cylindrical main body and a supporting layer, wherein a fixing groove is formed in one side surface of the cylindrical main body, the other side surface of the cylindrical main body is connected with the supporting layer, and a cylindrical protrusion is arranged at the bottom of the fixing groove; placing a ring boss in the upper die assembly, wherein the outer diameter of the supporting layer is the same as the diameter of the accommodating cavity of the upper die assembly, placing the ring boss in the accommodating cavity, the supporting layer is positioned at the bottom of the accommodating cavity, the top of the columnar main body is higher than the surface of the side, provided with the limiting groove, of the upper die assembly, the ring boss smoothly enters the accommodating cavity, and the supporting layer is completely matched with the bottom of the accommodating cavity, so that the outer diameter of the columnar main body, the diameter of the supporting layer and the thickness of the supporting layer of the detecting ring boss are qualified;
the diameter of cylindricality main part is the same with the external diameter of lower die assembly, with last die assembly and lower die assembly lock back, lower die assembly stretches into and holds the cavity in, the inner wall that holds the cavity is laminated with the outer wall of bed course, lower die assembly surface offsets with cylindricality main part surface, the cylinder protruding in stretching into the inner ring of lower die assembly, when last die assembly covers the lower die assembly completely, indicate that ring piece boss detects qualified, use the caliper rule to extract one of them ring piece boss and carry out the measurement of size afterwards to record.
2. The method of claim 1, wherein the opening has a width less than an inner diameter of the lower die assembly.
3. The method of claim 1, wherein the diameter of the receiving chamber is greater than the width of the limiting groove.
4. The method for detecting a boss of a ring according to claim 1, wherein the cylindrical protrusion is a through-center structure.
5. The method for detecting the boss of the ring member according to claim 1, wherein the height of the columnar body is 22-30 mm.
6. The method for inspecting a boss of a ring according to claim 1, wherein the diameter of the cylindrical body is 19 to 25mm.
7. The method for detecting the boss of the ring member according to claim 1, wherein the cylindrical protrusion is 0.4 to 0.6mm higher than the surface of the cylindrical body.
8. The method for detecting the boss of the ring member according to claim 1, wherein the height of the cylindrical boss is 6 to 12mm.
9. The method for detecting the boss of the ring member according to claim 1, wherein the outer diameter of the cylindrical boss is 8-12 mm.
10. The method for detecting the boss of the ring member according to claim 1, wherein the diameter of the fixing groove is 16-21 mm.
11. The method of claim 1, wherein the support layer has an outer diameter greater than the diameter of the cylindrical body.
12. The method for inspecting a boss of a ring according to claim 1, wherein the thickness of the supporting layer is 1.2-1.3 mm.
13. Use of a gauge for a ring boss employed in a detection method according to any one of claims 1 to 12, characterized in that the gauge for a ring boss is applied in the field of semiconductors.
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Citations (4)
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|---|---|---|---|---|
| CN109900191A (en) * | 2019-03-19 | 2019-06-18 | 宁波江丰电子材料股份有限公司 | Sputter ring hole location detecting tool and method |
| CN110849248A (en) * | 2019-12-12 | 2020-02-28 | 宁波江丰电子材料股份有限公司 | Ring angle gauge, and inspection method and application using same |
| CN110906893A (en) * | 2019-12-19 | 2020-03-24 | 宁波江丰电子材料股份有限公司 | Ring piece three-coordinate detection tool and measurement method and application using same |
| CN112338543A (en) * | 2020-09-22 | 2021-02-09 | 中国铁建重工集团股份有限公司 | Ring piece processing system and ring piece processing method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2008076688A2 (en) * | 2006-12-13 | 2008-06-26 | Aerojet-General Corporation | Two-piece aft closure for a rocket motor case |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109900191A (en) * | 2019-03-19 | 2019-06-18 | 宁波江丰电子材料股份有限公司 | Sputter ring hole location detecting tool and method |
| CN110849248A (en) * | 2019-12-12 | 2020-02-28 | 宁波江丰电子材料股份有限公司 | Ring angle gauge, and inspection method and application using same |
| CN110906893A (en) * | 2019-12-19 | 2020-03-24 | 宁波江丰电子材料股份有限公司 | Ring piece three-coordinate detection tool and measurement method and application using same |
| CN112338543A (en) * | 2020-09-22 | 2021-02-09 | 中国铁建重工集团股份有限公司 | Ring piece processing system and ring piece processing method |
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