CN113578555A - Many shower nozzles of electrofluid device - Google Patents
Many shower nozzles of electrofluid device Download PDFInfo
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- CN113578555A CN113578555A CN202110906241.2A CN202110906241A CN113578555A CN 113578555 A CN113578555 A CN 113578555A CN 202110906241 A CN202110906241 A CN 202110906241A CN 113578555 A CN113578555 A CN 113578555A
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- nozzle
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- flow channel
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- 239000000976 ink Substances 0.000 claims abstract description 94
- 238000007789 sealing Methods 0.000 claims abstract description 41
- 238000007639 printing Methods 0.000 claims abstract description 14
- 230000005611 electricity Effects 0.000 claims abstract description 4
- 230000007306 turnover Effects 0.000 claims abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000007921 spray Substances 0.000 claims description 18
- 238000005260 corrosion Methods 0.000 claims description 10
- 238000003825 pressing Methods 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000000741 silica gel Substances 0.000 claims description 4
- 229910002027 silica gel Inorganic materials 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000002360 preparation method Methods 0.000 abstract description 7
- 239000010408 film Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 8
- 238000005507 spraying Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
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- 238000000576 coating method Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
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- 238000012986 modification Methods 0.000 description 3
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- 238000004806 packaging method and process Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005686 electrostatic field Effects 0.000 description 2
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- 230000009471 action Effects 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/08—Plant for applying liquids or other fluent materials to objects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
- B05B5/0255—Discharge apparatus, e.g. electrostatic spray guns spraying and depositing by electrostatic forces only
Abstract
The invention discloses an electrofluid multi-nozzle device which comprises an ink seat, a sealing connector, a runner plate, a precision nozzle and a printing base platform, wherein the ink seat is provided with a plurality of nozzles; the utility model discloses a printing machine, including china ink seat, flow channel board, power supply unit, precision shower nozzle, flow channel board, power supply unit, china ink seat upper surface is provided with the sealing connection head who is used for connecting business turn over ink, china ink seat lower surface is provided with and is used for the runner plate with the ink water conservancy diversion, the runner plate is provided with a plurality of accurate shower nozzles, and is a plurality of the accurate shower nozzle all with runner plate intercommunication, the below interval of accurate shower nozzle is provided with print the base station, the nozzle of a plurality of accurate shower nozzles all moves towards print the base station setting, power supply unit respectively with china ink seat and print the base station electricity and connect. The device disperses ink into a large number of micro-nano-scale droplets in a ten-thousand-volt-level high-pressure mode, so that the manufacturing of micro-nano-scale films is realized, the surfaces are flat and uniform, no salient points or pits exist, the yield is improved by adopting a multi-nozzle mode, the film preparation efficiency is greatly improved, and the production capacity of an industrial field is improved.
Description
Technical Field
The invention belongs to the technical field related to electrofluid nozzles, and particularly relates to an electrofluid multi-nozzle device.
Background
With the development of nanotechnology, the most promising process for preparing micro-nano-scale thin films by electrofluid spray film production is generally regarded by academia and industry. The basic principle of electrofluid spraying is based on electrofluid power spraying, and ink droplets are uniformly spread on an electronic chip or other components needing film making. The preparation objects comprise a semiconductor photoresist film, a flat display glass coating, an organic packaging layer, a metal film, a photoelectric conversion film and the like, and relate to a plurality of fields of display, electrons, energy and the like.
However, in the prior art, the electrofluid spray has large fog drops, poor uniformity and low surface flatness, and easily generates convex points and concave pits, thereby affecting the quality of the film.
Disclosure of Invention
Based on the defects of the prior art, the invention provides the electrofluid multi-nozzle device, which uniformly splits ink into micro-nano-scale liquid drops by applying a high-voltage electric field and spreads the liquid drops on the surface of a target substrate.
The utility model provides an electrofluid many shower nozzles device, includes china ink seat, a plurality of accurate shower nozzle, power supply unit who is used for the inkjet and prints the base station, china ink seat upper surface is provided with the sealing connection head who is used for connecting the business turn over ink, china ink seat lower surface is provided with and is used for the runner plate with the ink water conservancy diversion, the runner plate is provided with a plurality of accurate shower nozzles, and is a plurality of accurate shower nozzle all with runner plate intercommunication, the below interval of accurate shower nozzle is provided with print the base station, the nozzle of a plurality of accurate shower nozzles all moves towards print the base station setting, power supply unit respectively with china ink seat and print the base station electricity and connect.
Furthermore, an annular micro-channel is formed in the channel plate, and the precise nozzles are distributed in the annular micro-channel at equal intervals.
Furthermore, sealing connector is provided with two, one of them sealing connector is used for connecting the ink and flows into the china ink seat, another sealing connector is used for connecting the ink and flows out the china ink seat.
Furthermore, the inner diameters of the precision spray heads are micron-sized apertures, and the power supply device is 20KV voltage.
Further, the distance between the nozzle of the precision spray head and the printing base station is 30-60 mm.
Furthermore, still include a plurality of bumping post, it is a plurality of bumping post sets up around all accurate shower nozzles.
The precision sprayer is characterized by further comprising a pressing plate, wherein a plurality of through holes for positioning the precision sprayer on the flow channel plate are formed in the pressing plate, and the pressing plate is connected with the flow channel plate.
Furthermore, a first groove is formed in the upper surface of the runner plate, a peripheral sealing ring is arranged in the groove, nozzle sealing rings are arranged on the precise nozzles, and a second groove matched with the nozzle sealing rings is formed in the runner plate.
Furthermore, the upper surface of the ink seat is provided with a lower concave platform, the lower concave platform is internally provided with the sealing connector, and an anti-corrosion sealing ring is arranged between the lower concave platform and the sealing connector.
Furthermore, the ink seat, the runner plate and the precise nozzle are all made of metal materials, and the anti-corrosion sealing ring, the nozzle sealing ring and the peripheral sealing ring are made of VMQ silica gel.
In general, compared with the prior art, the invention mainly has the following beneficial technical effects:
the ink is connected into the ink base through the sealing connector, the power supply device is respectively connected with the ink base and the printing base station, so that the ink in the ink base is excited under a high-voltage electrostatic field of ten thousand volts, the ink is further dispersed into a large number of micro-nano-scale droplets, meanwhile, the ink in the ink base is communicated through the runner plate and is connected with a plurality of precision nozzles, so that the precision nozzles are all provided with high voltage, ten thousand volts of high voltage applied between the precision nozzles and the printing base station is used for forming a strong electric field, the ink is sprayed out of the precision nozzles and is uniformly spread on the surface of an electronic chip or other components needing film preparation on the printing base station to finish spraying, the device disperses the ink into a large number of micro-nano-scale droplets in a manner of ten thousand volts of high voltage, thereby realizing the manufacture of micro-nano-scale films with flat and uniform surfaces and without convex points and pits, the yield is improved by adopting a multi-nozzle mode, the film preparation efficiency is greatly improved, the preparation objects comprise a semiconductor photoresist film, a flat display glass coating, an organic packaging layer, a metal film and a photoelectric conversion film, the application range is wide, and the production capacity of an industrial field is improved.
Drawings
The invention will be further understood from the following description in conjunction with the accompanying drawings. The components in the figures are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the embodiments. Like reference numerals designate corresponding parts throughout the different views.
FIG. 1 is a schematic structural diagram of an electrofluidic multi-nozzle device in an embodiment of the present invention;
FIG. 2 is a front view of an electrofluidic multi-nozzle device in an embodiment of the present invention;
FIG. 3 is a front cross-sectional view of an electrofluidic multi-nozzle assembly in an embodiment of the present invention;
FIG. 4 is a schematic diagram of the operation of an electrofluidic multi-nozzle assembly in an embodiment of the present invention;
FIG. 5 is an enlarged schematic view of the position I in the embodiment of the present invention;
FIG. 6 is a schematic view of an ink fountain according to an embodiment of the present invention;
FIG. 7 is a sectional view of the connection of a precision spray head and a runner plate in an embodiment of the present invention.
The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein:
1. sealing the connector; 2. an anti-corrosion seal ring; 3. an ink holder; 4. a peripheral seal ring; 5. a runner plate; 6. a precision spray head; 7. a nozzle seal ring; 8. pressing a plate; 9. an impact post; 10. printing a base station; 11. an annular microchannel; 12. a power supply device; 13. a through hole; 14. a first groove; 15. a second groove; 16. a concave platform; 17. a connector body; 18. a tightening part; 19. a locking portion.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to embodiments thereof; it should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. Other systems, methods, and/or features of the present embodiments will become apparent to those skilled in the art upon review of the following detailed description. It is intended that all such additional systems, methods, features and advantages be included within this description, be within the scope of the invention, and be protected by the accompanying claims. Additional features of the disclosed embodiments are described in, and will be apparent from, the detailed description that follows.
The same or similar reference numerals in the drawings of the embodiments of the present invention correspond to the same or similar components; in the description of the present invention, it should be understood that if there is an orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", etc. based on the orientation or positional relationship shown in the drawings, it is only for convenience of describing the present invention and simplifying the description, but it is not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and are not to be construed as limiting the present patent, and the specific meaning of the terms described above will be understood by those of ordinary skill in the art according to the specific circumstances.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features mentioned in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
The utility model provides an electrofluid multi-nozzle device, includes china ink seat 3, a plurality of accurate shower nozzle 6, power supply unit 12 that are used for the inkjet and prints base station 10, power supply unit 12 is preferred to be ten thousand volt level voltage, china ink seat 3 upper surface is provided with and is used for connecting business turn over sealing connection head 1 of ink, 3 lower surfaces of china ink seat are provided with and are used for the runner plate 5 with the ink water conservancy diversion, runner plate 5 is provided with a plurality of accurate shower nozzles 6, and is a plurality of accurate shower nozzle 6 all with runner plate 5 intercommunication, the below interval of accurate shower nozzle 6 is provided with print base station 10, the nozzle of a plurality of accurate shower nozzles 6 all moves towards print base station 10 sets up, power supply unit 12 respectively with china ink seat 3 and print base station 10 electricity and be connected.
Specifically, as shown in fig. 1-7, the ink is connected into the ink holder 3 through the sealed connector 1, the power supply device 12 is respectively connected to the ink holder 3 and the printing base 10, so that the ink in the ink holder 3 is excited in a ten thousand volt-level high-voltage electrostatic field, and further the ink is dispersed into a large number of micro-nano-scale droplets, and meanwhile, the ink in the ink holder 3 is communicated through the runner plate 5 and is connected to the plurality of precision nozzles 6, so that the precision nozzles 6 all have high voltage, the ten thousand-level high voltage applied between the precision nozzles 6 and the printing base 10 forms a strong electric field, the ink is ejected from the precision nozzles 6 and uniformly spread on the surface of the electronic chip or other components to be manufactured on the printing base 10, and the spraying is completed, the device disperses the ink into a large number of micro-nano-scale droplets in a ten thousand-volt-level high-voltage manner, therefore, the manufacturing of the micro-nano film is realized, the surface is flat and uniform, no salient points or pits exist, the yield is improved by adopting a multi-nozzle mode, the film preparation efficiency is greatly improved, the preparation objects comprise a semiconductor photoresist film, a flat display glass coating, an organic packaging layer, a metal film and a photoelectric conversion film, the application range is wide, and the production capacity of an industrial field is improved.
In one embodiment, as shown in fig. 6, the flow channel plate 5 is provided with an annular micro flow channel 11, the precision nozzles 6 are equidistantly distributed in the annular micro flow channel 11, when ink is inserted into the ink holder 3, the ink holder 3 flows through the flow channel plate 5, the ink is uniformly dispersed along the annular micro flow channel 11 through the annular micro flow channel 11 on the flow channel plate 5, so that the ink distributed by the precision nozzles 6 equidistantly distributed in the annular micro flow channel 11 is uniform, and the spraying effect of the precision nozzles 6 is improved.
Further, sealing connector 1 is provided with two, one of them sealing connector 1 is used for connecting the ink and flows in china ink seat 3, another sealing connector 1 is used for connecting the ink and flows out china ink seat 3, when the ink in the china ink seat is too little, the ink of can filling in china ink seat 3 toward one of them sealing connector 1 of accessible, when the ink in the china ink seat is too much, the unnecessary ink of another sealing connector 1 of accessible toward the interior extraction of china ink seat 3, convenience of customers operation, it is more simple and convenient to use.
In one embodiment, the inner diameters of the plurality of precision nozzles 6 are micron-sized apertures, the power supply 12 is 20KV voltage, the ink is dispersed into smaller micro-nano-sized droplets by the 20KV voltage, and the inner diameters of the precision nozzles 6 are micron-sized apertures, so that the size of the ejected ink droplets can be reduced, and the ink flows through the inside of the apertures of the precision nozzles 6, so that the ink droplets can be formed at the tips of the nozzles of the precision nozzles 6, thereby improving the spraying precision.
Furthermore, the distance between the nozzle of the precision spray head 6 and the printing base platform 10 is 30-60 mm, so that the strong electric field formed between the nozzle of the precision spray head 6 and the printing base platform 10 is more reasonable in strength, and ink can be sprayed out from the precision spray head 6.
In one embodiment, the spray head further comprises a plurality of anti-collision columns 9, the anti-collision columns 9 are arranged around all the precise spray heads 6, and the anti-collision columns 9 are made of stainless steel materials, so that the precise spray heads 6 are prevented from being damaged carelessly or under the action of external force.
In one embodiment, the precision spray head positioning device further comprises a pressing plate 8, a plurality of through holes 13 used for positioning the precision spray head 6 on the flow channel plate 5 are formed in the pressing plate 8, the pressing plate 8 is connected with the flow channel plate 5, the precision spray head 6 can be accurately positioned, and the precision spray head 6 is not prone to shaking.
In one embodiment, a first groove 14 is formed in the upper surface of the runner plate 5, a peripheral sealing ring 4 is arranged in the groove, a nozzle sealing ring 7 is arranged on each precision nozzle 6, a second groove 15 matched with the nozzle sealing ring 7 is formed in the runner plate 5, a lower concave table 16 is arranged on the upper surface of the ink seat 3, the sealing connector 1 is arranged in the lower concave table 16, and an anti-corrosion sealing ring 2 is arranged between the lower concave table 16 and the sealing connector 1; through the second groove 15, the nozzle sealing ring 7 can be uniformly placed between the flow channel plate 5 and the precision nozzle 6, so that the leakage of ink is prevented; the peripheral sealing ring 4 can be clamped in the first groove 14 through the first groove 14 formed in the upper surface of the runner plate 5, the runner plate 5 is arranged below the ink seat 3, and the peripheral sealing ring 4 is tightly pressed by the ink seat 3, so that the sealing performance of the runner plate 5 can be ensured, and the leakage of ink is prevented; through the concave station 16, can arrange corrosion protection sealing washer 2 inside in, protection corrosion protection sealing washer 2 is indeformable and remove, and the structure is more reasonable stable.
In one embodiment, as shown in fig. 5, the sealing connector 1 includes a connector body 17, a tightening portion 18 and a locking portion 19, the tightening portion 18 is rotated to make the tightening portion 18 and the ink holder 3 connected in a sealing manner, and the locking portion 19 extends towards two opposite inner walls of the recessed platform 16 during the rotation of the tightening portion 18 until the locking portion 19 is clamped against the two opposite inner walls of the recessed platform 16, that is, the sealing connector 1 adopts a barb type joint, so that the pipeline can be prevented from falling off.
In one embodiment, the ink holder 3, the flow channel plate 5 and the precision nozzle 6 are made of metal materials, so that the ink holder 3, the flow channel plate 5 and the precision nozzle 6 have good electrical conductivity, and the anti-corrosion seal ring 2, the nozzle seal ring 7 and the peripheral seal ring 4 are made of VMQ silica gel, wherein the VMQ silica gel is based on silicon elements obtained from quartz, and has good ink corrosion resistance due to saturated nonpolar rubber formed by adhering side chains such as methyl, vinyl and the like to silicon atoms.
Although the invention has been described above with reference to various embodiments, it should be understood that many changes and modifications may be made without departing from the scope of the invention. That is, the methods, systems, and devices discussed above are examples. Various configurations may omit, substitute, or add various procedures or components as appropriate. For example, in alternative configurations, the methods may be performed in an order different than that described, and/or various components may be added, omitted, and/or combined. Moreover, features described with respect to certain configurations may be combined in various other configurations, as different aspects and elements of the configurations may be combined in a similar manner. Further, elements therein may be updated as technology evolves, i.e., many elements are examples and do not limit the scope of the disclosure or claims.
Specific details are given in the description to provide a thorough understanding of the exemplary configurations including implementations. However, configurations may be practiced without these specific details, e.g., well-known circuits, processes, algorithms, structures, and techniques have been shown without unnecessary detail in order to avoid obscuring the configurations. This description provides example configurations only, and does not limit the scope, applicability, or configuration of the claims. Rather, the foregoing description of the configurations will provide those skilled in the art with an enabling description for implementing the described techniques. Various changes may be made in the function and arrangement of elements without departing from the spirit or scope of the disclosure.
In sum, it is intended that the foregoing detailed description be regarded as illustrative rather than limiting, and that it be understood that it defines the spirit and scope of the invention. The above examples are to be construed as merely illustrative and not limitative of the remainder of the disclosure. After reading the description of the invention, the skilled person can make various changes or modifications to the invention, and these equivalent changes and modifications also fall into the scope of the invention defined by the claims.
Claims (10)
1. The utility model provides an electrofluid many shower nozzles device, its characterized in that, includes china ink seat (3), a plurality of accurate shower nozzle (6), power supply unit (12) and the printing base station (10) that are used for the inkjet, china ink seat (3) upper surface is provided with sealing connection head (1) that is used for connecting the business turn over ink, china ink seat (3) lower surface is provided with runner plate (5) that are used for the ink water conservancy diversion, runner plate (5) are provided with a plurality ofly accurate shower nozzle (6), accurate shower nozzle (6) all with runner plate (5) intercommunication, the below interval of accurate shower nozzle (6) is provided with print base station (10), the nozzle of a plurality of accurate shower nozzles (6) all moves towards print base station (10) setting, power supply unit (12) respectively with china ink seat (3) and print base station (10) electricity and be connected.
2. The electrofluid multi-nozzle device according to claim 1, wherein the flow channel plate (5) is provided with an annular micro flow channel (11), and the precision nozzles (6) are equidistantly distributed in the annular micro flow channel (11).
3. The electrofluid multi-nozzle device according to claim 1, wherein the number of the hermetic connectors (1) is two, one of the hermetic connectors (1) is used for connecting ink flowing into the ink holder (3), and the other hermetic connector (1) is used for connecting ink flowing out of the ink holder (3).
4. The electrofluidic multi-nozzle device according to claim 1, wherein the inside diameters of the precision nozzles (6) are micron-sized apertures, and the power supply device 12 is at a voltage of 20 KV.
5. The electrofluidic multi-nozzle device according to claim 1, characterized in that the spacing between the nozzles of the precision nozzle (6) and the printing base (10) is 30-60 mm.
6. The electrofluid multiple spray head device according to claim 1, further comprising a plurality of crash posts (9), wherein the plurality of crash posts (9) are disposed around all of the precision spray heads (6).
7. The electrofluid multi-nozzle device according to claim 1, further comprising a pressing plate (8), wherein a plurality of through holes (13) for positioning the precision nozzle (6) on the flow channel plate (5) are formed in the pressing plate (8), and the pressing plate (8) is connected with the flow channel plate (5).
8. The electrofluid multi-nozzle device according to claim 1, wherein a first groove (14) is formed in an upper surface of the flow channel plate (5), a peripheral seal ring (4) is disposed in the groove, nozzle seal rings (7) are disposed on the precision nozzles (6), and a second groove (15) in which the nozzle seal rings (7) are fitted is formed in the flow channel plate.
9. The electrofluid multi-nozzle device according to claim 1, wherein a lower concave platform (16) is provided on the upper surface of the ink holder (3), the sealing connector (1) is provided in the lower concave platform, and an anti-corrosion seal ring (2) is provided between the lower concave platform (16) and the sealing connector.
10. The electrofluid multi-nozzle device according to claim 9, wherein the ink holder (3), the runner plate (5) and the precision nozzle (6) are made of metal materials, and the anti-corrosion seal ring (2), the nozzle seal ring (7) and the peripheral seal ring (4) are made of VMQ silica gel.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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CN202110906241.2A CN113578555A (en) | 2021-08-09 | 2021-08-09 | Many shower nozzles of electrofluid device |
PCT/CN2022/097368 WO2023016072A1 (en) | 2021-08-09 | 2022-06-07 | Electrohydrodynamic multi-spray head apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202110906241.2A CN113578555A (en) | 2021-08-09 | 2021-08-09 | Many shower nozzles of electrofluid device |
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CN113578555A true CN113578555A (en) | 2021-11-02 |
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CN202110906241.2A Pending CN113578555A (en) | 2021-08-09 | 2021-08-09 | Many shower nozzles of electrofluid device |
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WO (1) | WO2023016072A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023016072A1 (en) * | 2021-08-09 | 2023-02-16 | 广东思谷智能技术有限公司 | Electrohydrodynamic multi-spray head apparatus |
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CN111152559A (en) * | 2019-02-28 | 2020-05-15 | 广东聚华印刷显示技术有限公司 | Ink jet printing nozzle, ink jet printing head, ink jet printing device and preparation method of display panel |
CN112937122A (en) * | 2021-01-28 | 2021-06-11 | 华中科技大学 | Electronic jet printing nozzle and system capable of spraying uniformly |
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WO2023016072A1 (en) * | 2021-08-09 | 2023-02-16 | 广东思谷智能技术有限公司 | Electrohydrodynamic multi-spray head apparatus |
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