CN113566745A - High-precision roll angle measuring device and method based on laser collimation technology - Google Patents

High-precision roll angle measuring device and method based on laser collimation technology Download PDF

Info

Publication number
CN113566745A
CN113566745A CN202110868223.XA CN202110868223A CN113566745A CN 113566745 A CN113566745 A CN 113566745A CN 202110868223 A CN202110868223 A CN 202110868223A CN 113566745 A CN113566745 A CN 113566745A
Authority
CN
China
Prior art keywords
laser
measuring
measurement
light beam
roll angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202110868223.XA
Other languages
Chinese (zh)
Other versions
CN113566745B (en
Inventor
高洁
张大庆
郭贤斌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Radio Equipment Research Institute
Original Assignee
Shanghai Radio Equipment Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Radio Equipment Research Institute filed Critical Shanghai Radio Equipment Research Institute
Priority to CN202110868223.XA priority Critical patent/CN113566745B/en
Publication of CN113566745A publication Critical patent/CN113566745A/en
Application granted granted Critical
Publication of CN113566745B publication Critical patent/CN113566745B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention relates to a high-precision roll angle measuring device and method based on a laser collimation technology, and belongs to the technical field of photoelectric measurement. Based on the principle of collimated laser displacement measurement, the invention sets a pyramid prism and a long-focus converging lens on an optical cooperation target body, converges a measuring beam reflected by the pyramid prism through the long-focus converging lens, focuses and irradiates on a photoelectric detector, and then calculates the roll angle of an antenna and the two-dimensional displacement of the antenna by measuring the offset of a detection light spot and the distance of the double-pyramid prism. The invention reduces the detection light spot, improves the measurement precision, inherits the advantage of simple structure of the existing laser collimation technology, has small and exquisite measurement device, light weight and high reliability, is suitable for satellite-borne application, and solves the bottleneck problem of the roll angle measurement in the multi-degree-of-freedom in-orbit measurement field of the long-baseline large-size antenna of the conventional high-stability satellite platform.

Description

High-precision roll angle measuring device and method based on laser collimation technology
Technical Field
The invention relates to the technical field of photoelectric measurement, in particular to a high-precision roll angle measuring device and method based on a laser collimation technology.
Background
The six-degree-of-freedom error measurement is a necessary technical means in the fields of high-precision machining and manufacturing, target attitude identification, geometric and motion error correction, linear motion system precision improvement and the like, but the roll angle error measurement is a main technical difficulty. Especially in the field of multi-degree-of-freedom in-orbit measurement of long-baseline large-size antennas of high-stability satellite platforms, due to the special technical application environment, more severe technical indexes are provided in the aspects of measurement accuracy, device miniaturization, light weight and the like, the measurement difficulty of roll angle measurement is further increased, and the roll angle measurement becomes an application bottleneck which needs to be solved urgently in the field.
At present, the roll angle measurement method is mostly based on a laser polarization technology or a laser alignment technology. The laser polarization measurement method is a measurement method taking the polarization direction of light as a reference, and has the characteristics of large measurement range, high measurement precision, high integration level and the like, but a measurement device adopting the measurement method is complex in structure, large in size and not suitable for satellite-borne application. The laser collimation displacement method, most typically a parallel double-beam method, is based on laser collimation characteristics, and calculates a roll angle by detecting the spot position change of two parallel laser collimation beams; the measuring device of the method has a simple structure, but the measuring precision is limited by the aperture of the collimated light beam, and the method is difficult to realize remote measurement while considering miniaturization, light weight and high precision and cannot meet the requirement of satellite-borne application.
Disclosure of Invention
The invention aims to provide a high-precision roll angle measuring device and method based on a laser collimation technology, which can be applied to most roll angle measuring occasions, are particularly suitable for high-precision measuring occasions of space mechanism unfolding, optical film unfolding and large-caliber antennas, realize high precision and small and light weight, and are convenient for satellite-borne application.
In order to achieve the purpose, the invention is realized by the following technical scheme:
a high-precision roll angle measuring device based on a laser collimation technology comprises a measuring end and an optical target cooperative body;
the measuring end is arranged outside the measuring target, a measuring distance is arranged between the measuring end and the measuring target, and the measuring end is used for transmitting measuring beams to the optical target cooperative body, receiving reflected beams of the measuring beams, processing the reflected beams and generating a calculation result; the optical target cooperative body is fixed on the measuring target, follows the measuring target and is used for reflecting the measuring beam emitted by the measuring end back so as to feed back the posture of the measuring target;
the measuring end comprises two symmetrically arranged measuring components with the same structure, and each measuring component comprises a laser emitting and collimating device and a laser receiving device; the optical target cooperative body comprises two symmetrically arranged reflecting assemblies with the same structure, and each reflecting assembly comprises a laser reflecting device; the two measurement assemblies and the two reflection assemblies are combined in a one-to-one correspondence mode to form two complete optical measurement systems which are symmetrically arranged on two sides of a central line in the baseline direction of a measurement target;
the laser emitting and collimating device is used for emitting collimated laser beams to the corresponding laser reflecting device; the laser reflection device reflects the incident collimated laser beam for 180 degrees to form a reflected beam which is opposite to the direction of the incident beam light path and is offset in the vertical direction for emission; the laser receiving device receives a reflected light beam emitted by the corresponding laser reflecting device and outputs a corresponding feedback photoelectric signal according to an irradiation position;
the measuring end also comprises a data processing system; the data processing system is electrically connected with the two laser receiving devices and used for processing feedback photoelectric signals output by the two laser receiving devices and calculating to obtain the roll angle of the measurement target and the two-dimensional displacement of the measurement target.
Preferably, the laser reflection device further includes a long-focus converging lens, and the long-focus converging lens is installed on the reflected light beam path emitted by the corner cube prism, and is used for converging the reflected light beam to form a converged light beam which enters the laser receiving device, so that the diameter of a light spot irradiated on the laser receiving device is reduced, and the measurement accuracy is improved.
Preferably, the laser reflection device is a corner cube prism.
Further, the pyramid prism is a solid pyramid prism or a hollow pyramid prism.
Preferably, the laser emitting and collimating device includes a laser source and a collimating lens, and the collimating lens is disposed on an optical path of a laser beam emitted by the laser source, and is used for collimating and emitting the incident laser beam.
Preferably, two laser sources in the two measuring assemblies are realized by one laser emitter and one beam splitter, and the beam splitter splits laser emitted by the laser emitter into two parallel laser beams which are respectively used as two measuring light sources of the two measuring assemblies.
Preferably, the laser receiving device is a high-sensitivity photoelectric Position Sensor (PSD) or a charge-coupled device (CCD).
A high-precision roll angle measuring method using the high-precision roll angle measuring device based on the laser collimation technology, comprising the steps of:
s1, the first laser source emits a first laser beam, and the first laser beam is collimated by the first collimating lens to form a first collimated beam to be emitted from the measuring end;
the second laser source emits a second laser beam parallel to the first laser beam, and the second laser beam is collimated by the second collimating lens to form a second collimated beam parallel to the first collimated beam and emitted from the measuring end;
s2, after the first collimated light beam passes through the distance measuring optical path, the first collimated light beam enters a first laser reflection device fixedly arranged on a measuring target, a first reflected light beam is formed after two reflections and is emitted, the emitting angle of the first reflected light beam is changed by 180 degrees, the first reflected light beam is mutually reverse to the optical path direction of the incident first collimated light beam, and the first laser reflection device is shifted in position in the vertical direction;
after the second collimated light beam passes through the distance measuring optical path, the second collimated light beam is incident to a laser reflection device fixedly arranged on a measuring target, a second reflected light beam is formed after two reflections and is emitted, the emitting angle of the second reflected light beam is changed by 180 degrees, the second reflected light beam is mutually reverse to the optical path direction of the incident second collimated light beam, and the position deviation is formed in the vertical direction;
s3, the first reflected light beam is incident into a first long-focus convergent lens fixedly arranged on the measuring target, and a first convergent light beam is formed and emitted after being converged;
the second reflected light beam enters a second long-focus converging lens fixedly arranged on the measuring target, and is converged to form a second converging light beam for emergence;
s4, after the first convergent light beam passes through the distance and optical path measurement, the first convergent light beam is focused and irradiated on a laser receiving device at the measurement end;
after the second convergent light beam passes through the distance and optical path measurement, the second convergent light beam is focused and irradiated on a laser receiving device at the measuring end;
s5, when the measurement target rolls, the two laser reflection devices and the two long-focus convergent lenses fixed with the measurement target roll in a linkage manner, and the positions of light spots of the two convergent light beams on the two laser receiving devices change along with the two convergent light beams;
and S6, outputting the corresponding spot positions by the two laser receiving devices through feedback photoelectric signals respectively, transmitting the spot positions to a data processing system for processing, and calculating to obtain the roll angle of the measurement target and the two-dimensional displacement of the measurement target.
Further, in step S6, the roll angle of the measurement target is calculated by the formula:
Figure BDA0003188046520000041
wherein, thetayIs the roll angle, m1Is the horizontal deviation of the spot on the first laser receiver, m2Is the horizontal offset of the spot on the second laser receiving means, D is the pixel size, and D is the separation of the two laser reflecting means.
The calculation formula of the two-dimensional displacement of the measurement target is as follows:
Figure BDA0003188046520000042
Figure BDA0003188046520000043
wherein Δ z is a horizontal direction displacement amount of the measurement target, Δ x is a vertical direction displacement amount of the measurement target, and m1Is the horizontal deviation of the spot on the first laser receiver, m2Is the horizontal deviation of the spot on the second laser receiver, n1Is the deviation of the spot on the first laser receiver in the vertical direction, n2Is the vertical offset of the spot on the second laser receiver and d is the pixel size.
In summary, compared with the prior art, the high-precision roll angle measuring device and method based on the laser collimation technology provided by the invention have the following beneficial effects:
1. the precision is high. The long-focus converging lens is arranged on the optical cooperative target body, so that the reflected light beam of the laser reflection device is converged by the long-focus converging lens to form a converging light beam which is converged on the photoelectric detector, the detection light spot is reduced, and the measurement accuracy is improved. Through experimental comparison, as shown in fig. 3-5, the optical system adopted by the invention can reduce the detection light spot by about 4 times compared with the optical system without a long-focus converging lens; compared with an optical system with a convergent lens and an optical cooperative target body non-telephoto convergent lens arranged at the measuring end, the detection light spot can be reduced by about 2 times. Through experimental measurement, the measurement precision of the invention is superior to 5 μm, and the invention meets the requirements of long-distance and wide-range measurement.
2. The structure is simple. The technical scheme of the invention is based on the principle of collimated laser displacement measurement and combines with a long-focus convergent lens, and the roll angle is obtained by checking and calculating through measuring the deviation of double beams and the distance of a double-cone prism. The long-focus converging lens is added, so that the defect of low measurement precision is improved, the advantage of simple structure of the collimated laser displacement measurement technology is inherited, the reliability is high, and the method is suitable for satellite-borne application. In addition, the converging lenses with different focal length specifications can be configured according to different measuring distances, and the lens is easy to replace and has wide applicability.
3. The size and weight are reduced. The device is small and exquisite, has light weight, further reduces the weight by selecting the hollow calibration prism, does not generate measurement errors caused by refractive index by adopting the hollow calibration prism, and is suitable for satellite-borne application.
Drawings
FIG. 1 is a general schematic diagram of a high-precision roll angle measuring device based on laser alignment technology in accordance with the present invention;
FIG. 2 is a schematic diagram of the roll angle measurement principle of the present invention;
FIG. 3 is a schematic diagram of an optical system according to the present invention;
FIG. 4 is a schematic diagram of an optical system without a tele converging lens;
FIG. 5 is a schematic view of an optical system with a converging lens placed at the measuring end and an optical target partner non-tele converging lens.
Detailed Description
The invention provides a high-precision roll angle measuring device and method based on a laser collimation technology, which are further described in detail with reference to the accompanying drawings and the detailed description. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are simplified in form and not to precise scale, and are only used for convenience and clarity to assist in describing the embodiments of the present invention, but not for limiting the conditions of the embodiments of the present invention, and therefore, the present invention is not limited by the technical spirit, and any structural modifications, changes in the proportional relationship, or adjustments in size, should fall within the scope of the technical content of the present invention without affecting the function and the achievable purpose of the present invention.
It is to be noted that, in the present invention, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Referring to fig. 1 to 3, the present embodiment provides a high-precision roll angle measuring device based on a laser collimation technology, and the device is installed on a long-baseline large-size antenna 5 of a high-stability satellite platform.
The measuring device is divided into a measuring end 3 and an optical target cooperative body 4 according to the installation position:
the measuring end 3 is installed outside the large-size antenna 5, a measuring distance is set between the measuring end 3 and the large-size antenna 5, the measuring distance meets the requirement that the measuring distance is smaller than or equal to 50m, and the measuring end 3 is used for emitting measuring beams to the optical target cooperation body 4, receiving reflected beams of the measuring beams, processing the measuring beams and generating a calculation result.
The optical target cooperative body 4 is fixed on the large-size antenna 5, follows the large-size antenna 5, and is used for reflecting the measuring beam emitted by the measuring end 3 back to feed back the posture of the large-size antenna 5.
The measuring device is divided into an optical system and a data processing system according to the structure:
the optical system comprises two sets of identical optical measurement systems, namely an optical system 1 and an optical system 2, which are equidistantly and symmetrically arranged on two sides of a long base line 6 of the large-size antenna 5 and used for measuring the positions and angles of symmetrical points on two sides of a center line of the large-size antenna 5 and feeding back the posture of the large-size antenna 5; the components of the optical system 1 are arranged according to the sequence of the light path, and comprise a laser source 10, a collimating lens 11, a pyramid prism 12, a long-focus converging lens 13 and a photoelectric detector 14 in sequence; the components of the optical system 2 are arranged in the order of the optical path, and include a laser source 20, a collimating lens 21, a pyramid prism 22, a long-focus converging lens 23 and a photodetector 24. Wherein, the laser source 10, the collimating lens 11 and the photodetector 14 are arranged at the measuring end 3 to form a first measuring component of the optical system 1; the laser source 20, the collimating lens 21 and the photodetector 24 are also arranged at the measuring end 3, and constitute a second measuring component of the optical system 2; a hollow pyramid prism 12 and a long-focus converging lens 13 are arranged on the optical target cooperative body 4 to form a first reflecting component of the optical system 1; a hollow cube-corner prism 22 and a tele converging lens 23 are also arranged at the optical target partner 4, constituting a second reflective component of the optical system 2. The corner cube prisms 12 and 22 and the telephoto condenser lenses 13 and 23 are fixedly disposed on the large-sized antenna 5. During measurement, the measuring end 3 is still, and the optical target cooperative body 4 moves synchronously with the large-size antenna 5 of the measuring target.
The data processing system is arranged at the measuring end 3, is respectively electrically connected with the photoelectric detectors 14 and 24, receives photoelectric signals output by the photoelectric detectors 14 and 24, and calculates to obtain the roll angle and the two-dimensional displacement of the large-size antenna 5 of the measuring target.
With reference to fig. 1 and 2, the present embodiment further provides a high-precision roll angle measurement method based on a laser collimation technology, which is implemented by using the above measurement apparatus, and includes the following steps:
1. the laser source 10 emits a first laser beam, and the first laser beam is collimated by the collimating lens 11 to form a first collimated beam and is emitted from the measuring end 3;
the laser source 20 emits a second laser beam parallel to the first laser beam, and the second laser beam is collimated by the collimating lens 21 to form a second collimated beam parallel to the first collimated beam and then emitted from the measuring end 3;
2. after the first collimated light beam passes through the distance and optical path measuring device, the first collimated light beam enters a laser reflection device (namely a pyramid prism 12) fixedly arranged on a measuring target (namely a large-size antenna 5), and forms a first reflected light beam to be emitted after being reflected twice, wherein the emitting angle of the first reflected light beam is changed by 180 degrees, and the first reflected light beam is mutually inverse to the optical path direction of the incident first collimated light beam and forms position deviation in the vertical direction;
after the second collimated light beam passes through the distance and optical path measuring device, the second collimated light beam enters a laser reflection device (namely, a pyramid prism 22) fixedly arranged on a measuring target, a second reflected light beam is formed after two reflections and is emitted, the emitting angle of the second reflected light beam is changed by 180 degrees, the second reflected light beam is mutually reverse to the optical path direction of the incident second collimated light beam, and the position deviation is formed in the vertical direction;
3. the first reflected light beam is incident into a long-focus convergent lens 13 fixedly arranged on a measurement target, and is converged to form a first convergent light beam for emergence;
the second reflected light beam is incident into a long-focus converging lens 23 fixedly arranged on the measuring target, and is converged to form a second converging light beam for emergence;
4. the first convergent light beam passes through the distance and optical path measuring device and then is focused and irradiated on a laser receiving device (namely a photoelectric detector 14) of the measuring end 3;
after passing through the distance measuring optical path, the second convergent light beam is focused and irradiated on a laser receiving device (namely a photoelectric detector 24) at the measuring end 3;
5. when the measurement target rolls, the two laser reflection devices (the pyramid prisms 12 and 22) and the two long- focus converging lenses 13 and 23 fixed with the measurement target roll in a linkage manner, and the positions of light spots of the two converging light beams on the two laser receiving devices (the photoelectric detectors 14 and 24) change along with the two converging light beams;
6. and the two laser receiving devices respectively output corresponding light spot positions through feedback photoelectric signals, transmit the light spot positions to a data processing system for processing, and calculate to obtain the roll angle of the measurement target and the two-dimensional displacement of the measurement target.
The specific measurement and calculation process in the invention is as follows:
in the embodiment, a semiconductor laser output by an optical fiber emits a laser beam, and the laser beam is divided into two parallel laser beams by a beam splitter and is provided as a measuring light source; the two parallel laser beams respectively enter collimating lenses 11 and 21 in front of the light path to form two collimated light beams to be emitted; after the two collimated light beams pass through the optical path of the measuring distance (less than or equal to 50m), the two collimated light beams respectively enter the solid pyramid prisms 12 and 22 which are arranged in an offset manner, and in the embodiment, the solid pyramid prisms are required to meet the requirements of the caliber of 50mm, the displacement range of +/-10 mm and the diameter of a light spot of not more than phi 20mm, so that the requirements of long-distance and large-range measurement are met; after two collimated light beams are reflected twice in the corresponding pyramid prism respectively, the emergent angle is changed by 180 degrees, and two feedback light beams which are mutually reverse to the incident collimated light beam optical path direction and form position offset in the vertical direction are formed to be emergent; the two feedback beams respectively enter the tele converging lenses 13 and 23 arranged in front of the optical path to form two converging beams to be emitted, and the focusing times of the tele converging lenses 13 and 23 in the embodiment are determined according to the measurement distance, so that the required focal length can be configured according to different measurement distances; the two converging light beams respectively focus and irradiate on the photoelectric detectors 14 and 24 after passing through the distance and optical path measurement, and the photoelectric detectors 14 and 24 sense and irradiate light spots and output corresponding photoelectric signals. The photodetectors 14 and 24 are PSD (high-sensitivity photoelectric position sensor) or CCD (charge coupled device) detectors, and the accuracy is better than 5 μm by PSD or CCD position calculation.
Further, the cube-corner prisms 12 and 22 may also be hollow cube-corner prisms, which can effectively reduce the weight and prevent measurement errors due to the refractive index, and the hollow cube-corner prisms only need to satisfy the parameter requirements of the solid cube-corner prisms, and have no other parameter requirements such as wall thickness.
When the large-size antenna 5 of the measurement target rotates by an angle thetayWhen the laser light sources 10 and 20, the collimating lenses 11 and 21 and the photoelectric detectors 14 and 24 at the measuring end 3 are fixed (namely the roll angle), the hollow pyramid prisms 12 and 22 and the long- focus converging lenses 13 and 23 of the optical target cooperation body 4 synchronously move along with the large-size antenna 5, so that light rays irradiated on the photoelectric detectors 14 and 24 can be subjected to displacement change after reflection and convergence, the photoelectric detectors 14 and 24 detect the position change of light spots, and the roll angle theta is calculated by measuring the offset of the light spots of the double light beams and combining the space between the hollow pyramid prisms 12 and 22y. The calculation formula is as follows:
Figure BDA0003188046520000081
wherein, thetayIs the roll angle, m1Is the horizontal deviation of the spot on the first laser receiver, m2Is the horizontal offset of the spot on the second laser receiving means, D is the pixel size, and D is the separation of the two laser reflecting means.
The calculation formula of the two-dimensional displacement of the measurement target is as follows:
Figure BDA0003188046520000082
Figure BDA0003188046520000083
wherein Δ z is a horizontal direction displacement amount of the measurement target, Δ x is a vertical direction displacement amount of the measurement target, and m1Is the horizontal deviation of the spot on the first laser receiver, m2Is the horizontal deviation of the spot on the second laser receiver, n1Is the deviation of the spot on the first laser receiver in the vertical direction, n2Is the vertical offset of the spot on the second laser receiver and d is the pixel size.
As an effect comparison of this embodiment, as shown in fig. 4, in the optical system without a telephoto converging lens, the optical system of this embodiment can reduce the diameter of a detection light spot on a photodetector by about 4 times, thereby solving the problem that a collimated light beam in the prior art has a large light spot after being transmitted remotely and reaching the photodetector, and effectively improving the concentration of the light spot. For the PSD or CCD for detecting the light energy mass center, the light spot position extraction error can be reduced, and therefore the measurement accuracy is improved. Taking PSD with a photosensitive surface of 12mm multiplied by 12mm as an example, when the diameter of an incident light spot is 1mm, the standard deviation of multiple positioning measurement is 2.5 μm; the standard deviation is about 4.9 μm when the incident spot is 2.5 mm; when the incident spot increases to 5.5mm, the standard deviation is as high as 13 μm. For the requirement of the same measurement range, the photosensitive size of the PSD or the CCD can be effectively reduced, and the measurement precision can be further improved.
In addition, as shown in fig. 5, in the optical system in which the converging lens is disposed at the emitting end and the telephoto converging lens is not disposed at the reflecting end, the optical system of this embodiment can reduce the detection light spot on the photodetector by about 2 times, thereby improving the measurement accuracy, and compared with the optical system, the lens is more conveniently replaced, thereby improving the use flexibility.
While the present invention has been described in detail with reference to the preferred embodiments, it should be understood that the above description should not be taken as limiting the invention. Various modifications and alterations to this invention will become apparent to those skilled in the art upon reading the foregoing description. Accordingly, the scope of the invention should be determined from the following claims.

Claims (10)

1. A high-precision roll angle measuring device based on laser collimation technology is characterized in that,
comprises two parts, namely a measuring end and an optical target cooperative body; the measuring end is arranged outside the measuring target, a measuring distance is arranged between the measuring end and the measuring target, and the measuring end is used for transmitting measuring beams to the optical target cooperative body, receiving reflected beams of the measuring beams, processing the reflected beams and generating a calculation result; the optical target cooperative body is fixed on the measuring target, follows the measuring target and is used for reflecting the measuring beam emitted by the measuring end back so as to feed back the posture of the measuring target;
the measuring end comprises two symmetrically arranged measuring components with the same structure, and each measuring component comprises a laser emitting and collimating device and a laser receiving device; the optical target cooperative body comprises two symmetrically arranged reflecting assemblies with the same structure, and each reflecting assembly comprises a laser reflecting device; the two measurement assemblies and the two reflection assemblies are combined in a one-to-one correspondence mode to form two complete optical measurement systems which are symmetrically arranged on two sides of a central line in the baseline direction of a measurement target;
the laser emitting and collimating device is used for emitting collimated laser beams to the corresponding laser reflecting device; the laser reflection device reflects the incident collimated laser beam for 180 degrees to form a reflected beam which is opposite to the direction of the incident beam light path and is offset in the vertical direction for emission; the laser receiving device receives a reflected light beam emitted by the corresponding laser reflecting device and outputs a corresponding feedback photoelectric signal according to an irradiation position;
the measuring end also comprises a data processing system; the data processing system is electrically connected with the two laser receiving devices and used for processing feedback photoelectric signals output by the two laser receiving devices and calculating to obtain the roll angle of the measurement target and the two-dimensional displacement of the measurement target.
2. The roll angle measuring device according to claim 1, wherein the laser reflection means further comprises a long-focus converging lens, the long-focus converging lens is disposed on the path of the reflected beam from the corner cube prism, and is used for converging the reflected beam to form a converged beam and entering the laser receiving means, thereby reducing the diameter of the spot on the laser receiving means and improving the measurement accuracy.
3. A high precision roll angle measuring device based on laser alignment technique as claimed in claim 1, wherein the laser reflection device is a corner cube prism.
4. The apparatus of claim 1, wherein the corner cube is a solid corner cube or a hollow corner cube.
5. The roll angle measuring device of claim 1, wherein the laser emitting and collimating device comprises a laser source and a collimating lens, and the collimating lens is disposed in the optical path of the laser beam emitted from the laser source for collimating and emitting the incident laser beam.
6. The roll angle measuring device of claim 1, wherein two laser sources of two measuring units are implemented by a laser emitter and a beam splitter, and the beam splitter splits the laser emitted from the laser emitter into two parallel laser beams as two measuring light sources of two measuring units respectively.
7. A high accuracy roll angle measuring device based on laser alignment technique as claimed in claim 1, wherein the laser receiving device is a high sensitivity photoelectric position sensor or a charge-coupled device.
8. A high-precision roll angle measuring method using the high-precision roll angle measuring apparatus based on the laser collimation technique as claimed in claim 2, comprising the steps of:
s1, the first laser source emits a first laser beam, and the first laser beam is collimated by the first collimating lens to form a first collimated beam to be emitted from the measuring end;
the second laser source emits a second laser beam parallel to the first laser beam, and the second laser beam is collimated by the second collimating lens to form a second collimated beam parallel to the first collimated beam and emitted from the measuring end;
s2, after the first collimated light beam passes through the distance measuring optical path, the first collimated light beam enters a first laser reflection device fixedly arranged on a measuring target, a first reflected light beam is formed after two reflections and is emitted, the emitting angle of the first reflected light beam is changed by 180 degrees, the first reflected light beam is mutually reverse to the optical path direction of the incident first collimated light beam, and the first laser reflection device is shifted in position in the vertical direction;
after the second collimated light beam passes through the distance measuring optical path, the second collimated light beam is incident to a laser reflection device fixedly arranged on a measuring target, a second reflected light beam is formed after two reflections and is emitted, the emitting angle of the second reflected light beam is changed by 180 degrees, the second reflected light beam is mutually reverse to the optical path direction of the incident second collimated light beam, and the position deviation is formed in the vertical direction;
s3, the first reflected light beam is incident into a first long-focus convergent lens fixedly arranged on the measuring target, and a first convergent light beam is formed and emitted after being converged;
the second reflected light beam enters a second long-focus converging lens fixedly arranged on the measuring target, and is converged to form a second converging light beam for emergence;
s4, after the first convergent light beam passes through the distance and optical path measurement, the first convergent light beam is focused and irradiated on a laser receiving device at the measurement end;
after the second convergent light beam passes through the distance and optical path measurement, the second convergent light beam is focused and irradiated on a laser receiving device at the measuring end;
s5, when the measurement target rolls, the two laser reflection devices and the two long-focus convergent lenses fixed with the measurement target roll in a linkage manner, and the positions of light spots of the two convergent light beams on the two laser receiving devices change along with the two convergent light beams;
and S6, outputting the corresponding spot positions by the two laser receiving devices through feedback photoelectric signals respectively, transmitting the spot positions to a data processing system for processing, and calculating to obtain the roll angle of the measurement target and the two-dimensional displacement of the measurement target.
9. The roll angle measuring method with high accuracy as set forth in claim 8, wherein in step S6, the roll angle of the measurement target is calculated by the formula:
Figure FDA0003188046510000031
wherein, thetayIs the roll angle, m1Is the horizontal deviation of the spot on the first laser receiver, m2Is the horizontal offset of the spot on the second laser receiving means, D is the pixel size, and D is the separation of the two laser reflecting means.
10. The high-precision roll angle measuring method according to claim 8, wherein in step S6, the calculation formula of the two-dimensional displacement amount of the measurement target is:
Figure FDA0003188046510000032
Figure FDA0003188046510000033
wherein Δ z is a horizontal direction displacement amount of the measurement target, and Δ x is the measurement targetAmount of vertical displacement of, m1Is the horizontal deviation of the spot on the first laser receiver, m2Is the horizontal deviation of the spot on the second laser receiver, n1Is the deviation of the spot on the first laser receiver in the vertical direction, n2Is the vertical offset of the spot on the second laser receiver and d is the pixel size.
CN202110868223.XA 2021-07-30 2021-07-30 High-precision roll angle measuring device and method based on laser collimation technology Active CN113566745B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110868223.XA CN113566745B (en) 2021-07-30 2021-07-30 High-precision roll angle measuring device and method based on laser collimation technology

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110868223.XA CN113566745B (en) 2021-07-30 2021-07-30 High-precision roll angle measuring device and method based on laser collimation technology

Publications (2)

Publication Number Publication Date
CN113566745A true CN113566745A (en) 2021-10-29
CN113566745B CN113566745B (en) 2024-02-20

Family

ID=78169228

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110868223.XA Active CN113566745B (en) 2021-07-30 2021-07-30 High-precision roll angle measuring device and method based on laser collimation technology

Country Status (1)

Country Link
CN (1) CN113566745B (en)

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1560563A (en) * 2004-02-25 2005-01-05 北京交通大学 Laser colimation system and method of automatic measuring light drift angle
CN101846506A (en) * 2010-05-07 2010-09-29 浙江大学 Roll angle measurement method based on common path parallel beams
CN104613900A (en) * 2014-12-05 2015-05-13 郑州轻工业学院 Full optical path drift compensation high-precision roll angle measuring method and device
WO2016123812A1 (en) * 2015-02-06 2016-08-11 浙江理工大学 Laser heterodyne interference linearity measuring apparatus and method having six-degrees-of-freedom detection
CN106124472A (en) * 2016-07-26 2016-11-16 中国科学院苏州生物医学工程技术研究所 A kind of face battle array detecting stimulated radiation loss imaging system
JP2017181233A (en) * 2016-03-30 2017-10-05 国立大学法人東北大学 Displacement measuring apparatus and displacement measuring method
CA3042042A1 (en) * 2016-10-28 2018-05-03 Magic Leap, Inc. Method and system for large field of view display with scanning reflector
US10323934B1 (en) * 2018-04-02 2019-06-18 Northrop Grumman Systems Corporation Optical protractor to measure roll angle on a static surface and rotating surface
CN110514147A (en) * 2019-08-08 2019-11-29 北京市普锐科创科技有限责任公司 A kind of two-frequency laser interferometer that can measure roll angle and straightness simultaneously
CN210346614U (en) * 2019-08-29 2020-04-17 天津大学 Calibration system for laser alignment receiving and transmitting integrated straightness accuracy measurement
CN111412832A (en) * 2020-03-13 2020-07-14 大连理工大学 Semiconductor laser six-degree-of-freedom error measurement system based on interferometer module

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1560563A (en) * 2004-02-25 2005-01-05 北京交通大学 Laser colimation system and method of automatic measuring light drift angle
CN101846506A (en) * 2010-05-07 2010-09-29 浙江大学 Roll angle measurement method based on common path parallel beams
CN104613900A (en) * 2014-12-05 2015-05-13 郑州轻工业学院 Full optical path drift compensation high-precision roll angle measuring method and device
WO2016123812A1 (en) * 2015-02-06 2016-08-11 浙江理工大学 Laser heterodyne interference linearity measuring apparatus and method having six-degrees-of-freedom detection
JP2017181233A (en) * 2016-03-30 2017-10-05 国立大学法人東北大学 Displacement measuring apparatus and displacement measuring method
CN106124472A (en) * 2016-07-26 2016-11-16 中国科学院苏州生物医学工程技术研究所 A kind of face battle array detecting stimulated radiation loss imaging system
CA3042042A1 (en) * 2016-10-28 2018-05-03 Magic Leap, Inc. Method and system for large field of view display with scanning reflector
US10323934B1 (en) * 2018-04-02 2019-06-18 Northrop Grumman Systems Corporation Optical protractor to measure roll angle on a static surface and rotating surface
CN110514147A (en) * 2019-08-08 2019-11-29 北京市普锐科创科技有限责任公司 A kind of two-frequency laser interferometer that can measure roll angle and straightness simultaneously
CN210346614U (en) * 2019-08-29 2020-04-17 天津大学 Calibration system for laser alignment receiving and transmitting integrated straightness accuracy measurement
CN111412832A (en) * 2020-03-13 2020-07-14 大连理工大学 Semiconductor laser six-degree-of-freedom error measurement system based on interferometer module

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
曹睿;张斌;冯其波;方恒楚;由凤玲;: "多自由度误差同时测量中的滚转角测量方法", 光学学报, no. 12, pages 106 - 110 *
李亚凤;吕勇;: "一种基于双准直光束的单CCD滚转角测量方法", 北京信息科技大学学报(自然科学版), no. 04, pages 67 - 71 *
苏宇浩等: "五自由度测量中直线度现场标定方法研究", 《光电工程》, vol. 47, no. 9, pages 190451 - 1 *

Also Published As

Publication number Publication date
CN113566745B (en) 2024-02-20

Similar Documents

Publication Publication Date Title
US10684359B2 (en) Long range LiDAR system and method for compensating the effect of scanner motion
CN1304879C (en) Bidimension photoelectric self collimating device based on optical length multiplication compensation method and its measuring method
US9678443B2 (en) Lithography system with differential interferometer module
CN101299066B (en) Laser radar transmission type coaxial transmitting and receiving equipment
CN109387163B (en) Large-caliber portable optical axis parallelism calibration method
CN109579777B (en) Double-light-source high-precision anti-interference large-working-distance auto-collimation device and method
CN110207588B (en) Method for assembling and adjusting optical vertex aiming device of pyramid prism
CN109631827B (en) Double-light-source high-precision anti-interference large-working-distance auto-collimation device and method based on absolute angle measurement
US20140063491A1 (en) Boresight error monitor for laser radar integrated optical assembly
CN109579779B (en) High-precision high-frequency-response anti-interference large-working-distance auto-collimation device and method
CN105424322A (en) Self-calibration optical axis parallelism detector and detection method
CN112284302B (en) Device and method for measuring laser receiving and transmitting coaxiality of active photoelectric system by scanning method
CN106094234A (en) Self-aligning optical path system with polarization beam splitting element
CN106767395A (en) One kind is used for six efficient measuring systems of geometric error high resolution of line slideway and method
CN109443219A (en) New Displacement Transducer and its measurement method with refracting telescope
CN113566745B (en) High-precision roll angle measuring device and method based on laser collimation technology
US5883719A (en) Displacement measurement apparatus and method
CN113639665B (en) High-stability nanoradian magnitude angle measurement method and device based on drift amount feedback
CN114234854B (en) Method and device for simultaneously measuring three-degree-of-freedom angles
JP2007010636A (en) Laser ranging apparatus
CN114111570B (en) Image positioning calculation method and device based on two-dimensional autocollimator
CN112504169A (en) Device and method for testing laser receiving and transmitting coaxiality of active photoelectric system
CN105674913A (en) Detection system for long-range optical surface profile
CN113686265B (en) High-stability nanoradian magnitude angle measurement method and device based on deformable mirror compensation
US11860057B2 (en) Heterodyne one-dimensional grating measuring device and measuring method thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant