CN1135593C - Display apparatus - Google Patents

Abstract

A display apparatus utilizing plasma discharge and having pixels of high definition can be obtained. An AC drive type display apparatus utilizing plasma discharge has a discharge sustain electrode group formed of a plurality of discharge sustain electrodes on one substrate, and an address electrode group formed of a plurality of address electrodes thereon. Dielectric layers are formed at least on the discharge sustain electrode group and a discharge start address electrode group formed of a plurality of discharge start address electrodes forming a part of the address electrode group.

Description

Display unit

The present invention relates to a kind of driving display unit of AC of utilizing so-called plasma discharge, as a kind of AC type plasma display panel (calling AC type PDP in the following text).

Existing AC type PDP is used for accumulation is realized showing with the flash-over characteristic of utilizing the high-frequency discharge phenomenon to cause to the accumulation layer between discharge sustain electrodes group and address electrode group.This AC type PDP comprises the color that presents the light that discharge gas sends, and makes fluorescent material send visible light by the ultraviolet ray that utilizes discharge generation.

The known various methods to set up that AC type PDP is arranged.In order to reduce the thickness of PDP, many PDP have adopted the edge of relative front surface glass plate and rear surface glass plate to seal and the setting of discharge gas injection confined space.

One discharge display cells forms in the position of bar formula first electrode group and the bar formula second electrode group usually.Around discharge display cells, be formed with barrier rib, to prevent in the inside and outside differential pressure and the interelectrode distance that occur occurring in erroneous discharge and the adjacent unit color penetration and holding plate between adjacent unit.

A kind of colored AC type PDP is described below.One shows that sparking electrode is arranged to so-called plane discharge type so that it is not positioned at the position that fluorescent material forms.Known conventional colored AC type PDP comprises what those were driven by two-phase electrode and three-phase electrode.

Fig. 1 has shown the setting of the colored AC type of two-phase electrode PDP.Fig. 2 is the cutaway view along the colored AC type of this two-phase electrode PDP of the A-A line among Fig. 1.

Fig. 1 has shown the setting a part of accordingly with a pixel of the colored AC type of two-phase PDP.One PDP1 has the relative bipolar electrode structure of show electrode 2 and address electrode 6 and is formed on fluorescent material 8 on address electrode 6 one sides in its matrix display light emitter region.

On the front surface of the glass substrate on display surface one side, dispose the show electrode 2 that is used for plane discharge, and cover so that it is not exposed to discharge space by the dielectric layer 4 that is used for the AC driving.On the surface of dielectric layer 4, dispose black matrix" 5 and be used for setup unit light emitter region with later barrier rib 9 corresponding positions with description.

On the rear surface of glass substrate 7, be provided with and be used for selectively making the luminous address electrode in unit light emitter region 6 so that it is vertical with show electrode 2 every predetermined spacing.

On the white dielectric substance layer 8 between the adjacent address electrode 6, dispose the bar formula barrier rib 9 with preset width of the discharge space distance that is used to keep certain, thereby go up discharge space divided into unit light emitter region in horizontal (that is the direction of show electrode 2 extensions).Disposing three primary colors on the rear surface of glass substrate 7 is the fluorescent material 10 of red, green, blue, to cover the inner surface (comprising the upper surface of address electrode 2 and the side surface of barrier rib 9) of rear surface one side.Peng Ning (Penning) gas that neon or argon is mixed with xenon and obtain injects with as discharge gas, sends ultraviolet ray by exciting in discharge space and is used for fluorescent material 10.

Fig. 3 has shown the setting of a kind of three-phase AC type PDP.Fig. 4 is the cutaway view of the edge of the three-phase AC type PDP among Fig. 3 B-B line parallel with the extension direction of address electrode.Fig. 5 is the cutaway view of the edge of the three-phase AC type PDP among Fig. 3 C-C line parallel with the extension direction of address electrode.

Fig. 3 is a perspective view, shown the colored AC type of three-phase PDP with pixel part accordingly.One PDP11 has the relative three-electrode structure of a pair of show electrode 13,13 and address electrode 18 and form fluorescent material 21 on address electrode 18 1 side in its matrix display light emitter region.The colored AC type of this three electrode PDP is called plane discharge type PDP.

On the front surface of the glass substrate 12 on display surface one side, dispose the show electrode 13,13 that is used for plane discharge, and cover so that it is not exposed to discharge space by the dielectric layer 15 that is used for the AC driving.On the surface of dielectric layer 15, have a layer thickness for the MgO film of several thousand A approximately with protective layer 16 as dielectric layer 15.On show electrode 13,13, be formed with low- resistance bus electrode 14,14.

On the rear surface of glass substrate 17, be provided with and be used for selectively making the luminous address electrode in unit light emitter region 18 so that it is vertical with show electrode 13,13 every the spacing of about 200 μ m.

Between adjacent address electrode 18, dispose the bar formula barrier rib 20 with about 100 μ m width of the discharge space distance that is used to keep certain, thereby go up discharge space divided into unit light emitter region at laterally (that is, show electrode 13,13 extend direction).On the rear surface of glass substrate 17, dispose phosphor layer 21 (that is, fluorescent material 21R, the 21B of three primary colors red, green, blue, 21G), to cover the inner surface (comprising the upper surface of address electrode 18 and the side surface of barrier rib 20) of rear surface one side.Peng Ning (Penning) gas that neon is mixed with xenon and obtain injects with as discharge gas, sends ultraviolet ray by exciting in discharge space and is used for fluorescent material 21R, 21B, 21G.

Have same area and setting in the horizontal with a pixel red accordingly (R) that constitutes display screen, green (G) and blue (B) three unit light emitter regions.One plane discharge unit (the main discharge unit that is used to show) determined by a pair of show electrode 13,13, and is used for selecting its address discharge cell that whether is used to show to be determined by one of show electrode 13,13 and address electrode 18.Therefore, can allow selectively with each corresponding position, unit light emitter region of fluorescent material 21R, 21G and 21B (transversely being provided with continuously in Fig. 4) luminous, thereby utilize red (R), green (G) and blue (B) in conjunction with realizing the full color demonstration.

Yet in order to obtain the display pixel of high definition, the distance between the show electrode 13,13 must be provided with shortlyer in so colored AC type PDP11.What link to each other therewith is, show electrode 13,13 and distance between the address electrode 18 must be provided with and show electrode 13,13 between distance identical.At this moment, the phosphor layer 21 that forms if the distance between the show electrode 13,13 is no more than 20 μ m has the thickness of 20-40 μ m, does not then have the space to leave discharge plasma space 22 for and the puncture that may occur being harmful between electrode.Promptly enable to guarantee the space of discharge plasma space 22, phosphor layer 21 also can only form on limited position.In addition, if reduce phosphor layer 21, then luminosity reduction and phosphor layer 21 can be subjected to the collision of ion and damage.

Consider above-mentioned aspect, one object of the present invention is to provide a kind of display unit, even interelectrode distance is provided with shortlyer in this device, also can guarantees discharge plasma space and make fluorescent material not be damaged.

Another object of the present invention is to provide a kind of display unit of high definition.

According to an aspect of the present invention, display unit is to utilize the AC drive-type display apparatus of plasma discharge.On same substrate, be formed with discharge sustain electrodes group and address electrode group.

According to display unit of the present invention,,, still can keep enough discharge plasma spaces by barrier rib even the distance between discharge sustain electrodes and address electrode diminishes because discharge sustain electrodes group and address electrode group are formed on the same substrate.Thereby, can obtain the display pixel of high definition.

If the phosphor layer on the another side of substrate is ultraviolet ray exited and luminous by plasma generation, then can keep enough ultraviolet rays of plasma generation, and phosphor layer can send the light of high brightness.In addition, avoid outside the plasma contacting, therefore can prevent that fluorescent material is subjected to the damage of the collision of plasma with plasma owing to phosphor layer can place.

Because address electrode group and discharge sustain electrodes group form on same substrate, therefore in the process that forms electrode, can realize interelectrode accurate positioning relation, thereby, the substrate of enclosed electrode side and with the process of its opposing substrates in, the tolerance of location and space make things convenient for seal process apart from becoming big.Thereby, raise the efficiency, cause production cost to reduce.

Fig. 1 has shown the setting of the major part of an AC type two-phase electrode PDP.

Fig. 2 is the cutaway view along this PDP of the A-A line among Fig. 1.

Fig. 3 has shown the setting of the major part of an AC type three-phase electrode PDP.

Fig. 4 is the cutaway view along this PDP of the B-B line among Fig. 3.

Fig. 5 is the cutaway view along this PDP of the C-C line among Fig. 3.

Fig. 6 has shown the setting according to a display unit of the first embodiment of the present invention.

Fig. 7 is a cutaway view, has shown the setting according to the display unit of the first embodiment of the present invention.

Fig. 8 is a plane graph, has shown the electrode structure according to the display unit of the first embodiment of the present invention.

Fig. 9 is the cutaway view according to the display unit of the first embodiment of the present invention along the D-D line among Fig. 8.

Figure 10 is a plane graph, is used to explain discharge sustain electrodes and the interelectrode distance in discharge enabling address.

Figure 11 A and 11B are used to explain the relation between the thickness of distance between sparking electrode and insulating barrier.

Figure 12 is a perspective view, has shown the structure according to the fluorescent material surface of the first embodiment of the present invention.

Figure 13 is a plane graph, has shown the region of discharge according to a pixel of the first embodiment of the present invention.

Figure 14 A and 14B have shown the process of manufacturing according to the electrode base board of the display unit of the first embodiment of the present invention, and wherein Figure 14 A is a plane graph, and Figure 14 B is the cutaway view along the E-E line among Figure 14 A.

Figure 15 A and 15B have shown the process of manufacturing according to the electrode base board of the display unit of the first embodiment of the present invention, and wherein Figure 15 A is a plane graph, and Figure 15 B is the cutaway view along the E-E line among Figure 15 A.

Figure 16 A and 16B have shown the process of manufacturing according to the electrode base board of the display unit of the first embodiment of the present invention, and wherein Figure 16 A is a plane graph, and Figure 16 B is the cutaway view along the E-E line among Figure 16 A.

Figure 17 A and 17B have shown the process of manufacturing according to the electrode base board of the display unit of the first embodiment of the present invention, and wherein Figure 17 A is a plane graph, and Figure 17 B is the cutaway view along the E-E line among Figure 17 A.

Figure 18 A and 18B have shown the process of manufacturing according to the electrode base board of the display unit of the first embodiment of the present invention, and wherein Figure 18 A is a plane graph, and Figure 18 B is the cutaway view along the E-E line among Figure 18 A.

Figure 19 A and 19B have shown the process of manufacturing according to the electrode base board of the display unit of the first embodiment of the present invention, and wherein Figure 19 A is a plane graph, and Figure 19 B is the cutaway view along the E-E line among Figure 19 A.

Figure 20 is a perspective view, has shown the setting according to the bus electrode of the first embodiment of the present invention.

Figure 21 has shown the setting of a display unit according to a second embodiment of the present invention.

Figure 22 A-22C has shown the process of the electrode base board of display unit shown in the Figure 21 that makes according to a second embodiment of the present invention, wherein Figure 22 A is a plane graph, Figure 22 B is the cutaway view along the F-F line among Figure 22 A, and Figure 22 C is the cutaway view along the G-G line among Figure 22 A.

Figure 23 A-23C has shown the process of the electrode base board of display unit shown in the Figure 21 that makes according to a second embodiment of the present invention, wherein Figure 23 A is a plane graph, Figure 23 B is the cutaway view along the F-F line among Figure 23 A, and Figure 23 C is the cutaway view along the G-G line among Figure 23 A.

Figure 24 A-24C has shown the process of the electrode base board of display unit shown in the Fig. 21 that makes according to a second embodiment of the present invention, wherein Figure 24 A is a plane graph, Figure 24 B is the cutaway view along the F-F line among Figure 24 A, and Figure 24 C is the cutaway view along the G-G line among Figure 24 A.

Figure 25 A and 25B have shown the process of making the display unit according to a second embodiment of the present invention shown in Figure 21.

Figure 26 is the perspective view of major part of fluorescent material substrate of the display unit of a third embodiment in accordance with the invention.

Figure 27 has shown the major part of the display unit of a third embodiment in accordance with the invention.

Figure 28 has shown the major part of the display unit of a fourth embodiment in accordance with the invention.

Figure 29 A-29C has shown the process of making the electrode base board of display unit according to a fifth embodiment of the invention, and wherein Figure 29 A is a plane graph, and Figure 29 B is the cutaway view along the H-H line among Figure 29 A, and Figure 29 C is the cutaway view along the I-I line among Figure 29 A.

Figure 30 A-30C has shown the process of making according to a fifth embodiment of the invention of the electrode base board of display unit as shown in Figure 29 A-29C, wherein Figure 30 A is a plane graph, Figure 30 B is the cutaway view along the H-H line among Figure 30 A, and Figure 30 C is the cutaway view along the I-I line among Figure 30 A.

Figure 31 A-31C has shown the process of making according to a fifth embodiment of the invention of the electrode base board of display unit as shown in Figure 29 A-29C, wherein Figure 31 A is a plane graph, Figure 31 B is the cutaway view along the H-H line among Figure 31 A, and Figure 31 C is the cutaway view along the I-I line among Figure 31 A.

Figure 32 A-32C has shown the process of making according to a fifth embodiment of the invention of the electrode base board of display unit as shown in Figure 29 A-29C, wherein Figure 32 A is a plane graph, Figure 32 B is the cutaway view along the H-H line among Figure 32 A, and Figure 32 C is the cutaway view along the I-I line among Figure 32 A.

Figure 33 A and 33B are respectively the plane graph of display unit according to a fifth embodiment of the invention and the end view that part is cut open.

Figure 34 A-34D has shown the process of making the electrode base board of display unit according to a sixth embodiment of the invention, wherein Figure 34 A is a plane graph, Figure 34 B is the cutaway view along the J-J line among Figure 34 A, Figure 34 C is the cutaway view along the K-K line among Figure 34 A, and Figure 34 D is the cutaway view along the L-L line among Figure 34 A.

Figure 35 A-35D has shown the process of making according to a sixth embodiment of the invention of the electrode base board of display unit as shown in Figure 34 A-34D, wherein Figure 35 A is a plane graph, Figure 35 B is the cutaway view along the J-J line among Figure 35 A, Figure 35 C is the cutaway view along the K-K line among Figure 35 A, and Figure 35 D is the cutaway view along the L-L line among Figure 35 A.

Figure 36 A-36D has shown the process of making according to a sixth embodiment of the invention of the electrode base board of display unit as shown in Figure 34 A-34D, wherein Figure 36 A is a plane graph, Figure 36 B is the cutaway view along the J-J line among Figure 36 A, Figure 36 C is the cutaway view along the K-K line among Figure 36 A, and Figure 36 D is the cutaway view along the L-L line among Figure 36 A.

Figure 37 A-37D has shown the process of making according to a sixth embodiment of the invention of the electrode base board of display unit as shown in Figure 34 A-34D, wherein Figure 37 A is a plane graph, Figure 37 B is the cutaway view along the J-J line among Figure 37 A, Figure 37 C is the cutaway view along the K-K line among Figure 37 A, and Figure 37 D is the cutaway view along the L-L line among Figure 37 A.

Figure 38 A and 38B are respectively the plane graph of display unit according to a sixth embodiment of the invention and the end view that part is cut open.

Figure 39 A and 39B have shown the process of making the electrode base board of display unit according to a seventh embodiment of the invention, and wherein Figure 39 A is a plane graph, and Figure 39 B is the cutaway view along the M-M line among Figure 39 A.

Figure 40 A and 40B have shown the process of making according to a seventh embodiment of the invention of the electrode base board of display unit as shown in Figure 39 A and 39B, and wherein Figure 40 A is a plane graph, and Figure 40 B is the cutaway view along the N-N line among Figure 40 A.

Figure 41 A and 41B have shown the process of making according to a seventh embodiment of the invention of the electrode base board of display unit as shown in Figure 39 A and 39B, and wherein Figure 41 A is a plane graph, and Figure 41 B is the cutaway view along the N-N line among Figure 41 A.

Figure 42 has shown the setting of the major part of display unit according to a seventh embodiment of the invention.

Display unit according to the present invention is to utilize the AC drive-type display apparatus of plasma discharge. By many The discharge sustain electrodes group that individual discharge sustain electrodes consists of and the address electrode group that is consisted of by a plurality of address electrodes Be formed on the same substrate. At least be formed with electricity in discharge sustain electrodes group and discharge enabling address electrode group Dielectric layer, this discharge enabling address electrode group are made of a plurality of discharges enabling address electrode and as address electrode The part of group.

By utilizing ultraviolet ray that plasma discharge produces luminous phosphor layer can with above-mentioned base Form on relative another substrate of plate.

Discharge sustain electrodes group and address electrode group are arranged to mutual intersection, in discharge sustain electrodes group and address Be formed with insulating barrier between the electrode group.

This insulating barrier can form or is independent of above-mentioned dielectric layer and shape by the above-mentioned dielectric layer that extends Become.

Discharge sustain electrodes and discharge enabling address electrode can be formed on the same surface, address electrode and putting Electricity enabling address electrode interconnects by the hole that arranges on the insulating barrier under the address electrode.

Discharge sustain electrodes and discharge enabling address electrode can be formed on the same surface, and address electrode is through ground Insulating barrier between location electrode and discharge sustain electrodes intersects with discharge enabling address electrode, and each address electrode Extension directly links to each other with discharge enabling address electrode along the side surface of insulating barrier.

In this case, can on the whole surface of discharge sustain electrodes group, discharge enabling address electrode group and address electrode group, form dielectric layer.

According to the present invention, the end of discharge sustain electrodes and discharge sustain electrodes is directly covered by dielectric film.In this case, can on discharge sustain electrodes and discharge enabling address electrode, form dielectric layer respectively.

Discharge sustain electrodes and end thereof and can cover with dielectric film as the discharge enabling address electrode of the part of address electrode.

In this is provided with, can adopt dielectric film as dielectric layer.When dielectric film is used as dielectric layer, can on dielectric film, form the MgO film to make diaphragm.Self-evident, dielectric layer can comprise formation separately on the dielectric film on whole surface.

The thickness of dielectric film can be arranged in the scope of 10 μ m-100 μ m.

According to the present invention, the address electrode group intersects through insulating barrier and discharge sustain electrodes group, and discharge enabling address electrode group can form simultaneously continuously.

In this display unit, can form dielectric film to cover the whole surface of discharge sustain electrodes group or substrate, comprise the discharge sustain electrodes group, the address electrode group that intersects with the discharge sustain electrodes group and the discharge enabling address electrode group that forms simultaneously continuously.

In this case, the address electrode group can form on dielectric film through an insulating barrier.

On that side of another substrate, be formed with a reflectance coating, thereby improve the brightness of the light that shows when from then on this side of substrate is watched.

For example, reflectance coating can be formed between another substrate and the phosphor layer.

On this side of this substrate, be formed with a reflectance coating, thereby improve the brightness of the light that when that side of another substrate is watched, shows.

For example, discharge sustain electrodes group, discharge enabling address electrode group and address electrode group can be formed on this substrate through reflectance coating and dielectric film.

The material of high reflectance such as aluminium (Al), nickel (Ni), silver (Ag), other metal film or analog can be used as reflectance coating.

According to the present invention, discharge enabling address on this side of this substrate can be formed in each region of discharge, and barrier rib is forming on another substrate constituting phosphor layer between adjacent barrier rib, and this substrate and another base plate seals make barrier rib and address electrode corresponding mutually separately.

First and second discharge sustain electrodes of discharge sustain electrodes group between distance can be arranged to 50 μ m or littler, or 30 μ m or littler, for example 5 μ m-20 μ m can also be set to 5 μ m or littler, or 1 μ m or littler.

First and second discharge sustain electrodes of discharge sustain electrodes group between distance and discharge enabling address electrode and discharge sustain electrodes (promptly, discharge sustain electrodes to one of) between distance can be arranged to basic identically, promptly be arranged to identical or roughly the same.

Distance between discharge enabling address electrode and the discharge sustain electrodes one of (that is, discharge sustain electrodes to) can first and second discharge sustain electrodes of discharge sustain electrodes group between distance ± 30% scope in setting.

For example, if discharge start voltage is chosen as the minimum value of this old (Paschen) curve of training, then first and second discharge sustain electrodes of discharge sustain electrodes group between distance and discharge sustain electrodes and discharge enabling address distance between electrodes can above-mentioned selected interelectrode distance ± increase and decrease in tens percent the allowed band.Even discharge start voltage is not set to train the minimum value of this old (Paschen) curve, interelectrode above-mentioned two distances also can above-mentioned selected interelectrode distance ± 30% scope in.

One or more gases of He, Ne, Ar, Xe and Kr can inject by sealing the confined space that this substrate and another substrate form, and promptly in the discharge space, the air pressure of the feasible gas that injects is 0.8～3.0 atmospheric pressure.

Discharge enabling address electrode can form the L type.

On the surface of discharge enabling address electrode except that address electrode and the dielectric layer on the discharge sustain electrodes, can form the magnesium oxide layer with as diaphragm be used to reduce work function.

Preferably be provided with the dielectric layer thickness on discharge sustain electrodes and the discharge enabling address electrode less than interelectrode distance, promptly first and second discharge sustain electrodes to distance and discharge sustain electrodes to one of with the interelectrode distance in discharge enabling address.

Discharge sustain electrodes can wait and constitute with nesa coating or AL, Cr, Au or Ag metal film, the double-deck metal film with Al/Cr, metal film with three-decker of Cr/Al/Cr.If discharge enabling address electrode group and discharge sustain electrodes group form simultaneously, the enabling address electrode group of then discharging can be with forming with the same material of discharge sustain electrodes group.The address electrode group can wait with metal material such as Al, Au and form.

Can be used for colour display device and monochromatic display unit according to display unit of the present invention.

In colour display device, pixel by the be combined into of emitter region, unit (that is so-called point) to be used for red, green and blue.In monochromatic display unit, a pixel is made of emitter region, a unit (that is so-called point).

Can be used for colour display device and monochromatic display unit according to display unit of the present invention.

In colour display device, a set of emitter region, red, green and blue unit (that is so-called point) constitutes a pixel.In monochromatic display unit, emitter region, a unit (that is so-called point) constitutes a pixel.

Fig. 6-8 has shown the display unit according to the first embodiment of the present invention.In this first embodiment, the present invention is used for a colored AC type PDP.

Display unit 31 has so-called electrode base board 33, this electrode base board 33 by as first substrate of this substrate for example lower surface glass substrate 32, form a plurality of formula discharge sustain electrodes I (I1 thereon, I2, ..., Im) the so-called discharge sustain electrodes group of Zu Chenging, a plurality of address electrode J (J1, J2 ..., Jn) the address electrode group of Zu Chenging and a plurality of discharges enabling address electrode JA (J11, ..., Jn1, J12 ..., Jn2, J1m ..., the discharge enabling address electrode group of Jnm) forming constitutes.Display unit 31 has the so-called fluorescent material substrate 36 relative with electrode base board 33, and this fluorescent material substrate 36 is by for example upper surface glass substrate 34 and phosphor layer 35 disposed thereon constitute as second substrate of another substrate.Display unit 31 forms by enclosed electrode substrate 33 and fluorescent material substrate 36.

As shown in Figure 8, the discharge sustain electrodes group is provided with like this, makes discharge sustain electrodes to I1 and I2, I3 and I4 ..., every pair of electrode of Im-1 and Im begins to form the back in discharge and keeps discharge.

Each address electrode J1 in the address electrode group ..., Jn is the electrode that is used to specify explicit address, this electrode discharge sustain electrodes I (I1, I2 ..., thereby vertically going up to be provided with the discharge sustain electrodes group and intersect Im) with predetermined interval.

Each discharge enabling address electrode JA (J11 in the electrode group of discharge enabling address, ..., Jnm) be to be used to start itself and discharge sustain electrodes to (I1 and I2), (I3 and I4) ..., an electrode in (Im-1 and Im) is I2 for example, I4, ..., the electrode of the discharge between the Im, and be provided with correspondingly with each unit light emitter region.

Each enabling address electrode J11 that discharges ..., Jnm constitutes by a part parallel with discharge sustain electrodes I with along another part that address electrode J is provided with, and becomes the L type.

Discharge sustain electrodes I1, I2 ..., Im and discharge enabling address electrode J11, ..., Jnm is formed on the same surface of lower surface glass substrate 32, at discharge sustain electrodes I1, I2, ..., Im and discharge enabling address electrode J11 ..., be formed with dielectric layer 37 on the Jnm.

Address electrode J1 ..., Jn is formed on the dielectric layer 37 being flat on discharge enabling address electrode J11 ..., on the part of Jnm, and with discharge sustain electrodes I1, I2 ..., the Im quadrature, for example.

Be disposed at bar formula address electrode J1 ..., the dielectric layer 37 under the Jn is as so-called insulating barrier.The insulating barrier that is formed by dielectric layer 37 is address electrode J1 ..., Jn and discharge enabling address electrode J11 ..., insulation is to prevent its short circuit between the Jnm.

As shown in Fig. 8 and 9, each address electrode J1, ..., Jn is listed as discharge enabling address electrode J11 through a contact hole 39 and each ..., Jnm links to each other, this contact hole 39 is arranged on address electrode J1 ..., Jn and discharge enabling address electrode J11, ..., on the insulating barrier that the dielectric layer 37 at each position that Jnm intersects forms.Especially, discharge enabling address electrode J11, J12 ..., J1m links to each other with public address electrode J1, discharge enabling address electrode J21, J22 ..., J2m links to each other with public address electrode J2, and discharge enabling address electrode Jn1, Jn2 ..., Jnm links to each other with public address electrode Jn.

Each discharge sustain electrodes I1, I2, I3, I4 ..., Im-1, Im and discharge enabling address electrode J11, J21 ..., Jn1 ..., Jnm can for example below form hyaline membrane such as the ITO film of describing with the conducting film of expectation.In this case, because the ITO film has higher resistance value, in order to reduce resistance value, discharge sustain electrodes I1, I2, I3, I4 ..., Im-1, Im and discharge enabling address electrode J11, J21 ..., Jn1 ..., Jnm respectively with bus electrode K1, K2, K3, K4 ..., the corresponding discharge sustain electrodes I1 of Km, I2, I3, I4, ..., Im last and with bus electrode K11, K21, ..., Kn1 ..., the Knm enabling address electrode J11 that discharges accordingly, J21 ..., Jn1 ..., the last formation of Jnm is to reduce resistance value.

Because address electrode J1, J2, J3..., Jn make and have lower resistance value with metal material such as silver or analog, so at address electrode J1, J2, J3 ..., bus electrode is not set on the Jn.

In addition, comprise address electrode J1 on whole surface, J2, J3 ..., be formed with dielectric layer 40 on the Jn.Magnesium oxide (MgO) film 41 that is used to reduce discharge start voltage forms on the surface of dielectric layer 40 with as diaphragm.In this case, in order to prevent magnesium oxide layer 41 to address electrode J1, J2, J3 ..., the Jn discharge, 41 on magnesium oxide layer is removing bar formula address electrode J1 ..., form on the outer dielectric layer 40 of Jn.

Though do not show, consider the reduction of dielectric layer thickness, at the bar formula address electrode J1 that does not have dielectric layer 40 to form, J2, J3 ..., the last insulating barrier that forms of Jn, magnesium oxide layer 41 is formed on the surface of dielectric layer 37.

As shown in Figure 10, discharge sustain electrodes to be provided with basic identically (that is, be set to identical or roughly the same) with the discharge enabling address relative with it is interelectrode apart from d2 apart from d1 and a discharge sustain electrodes.

Shown among Figure 10 discharge sustain electrodes between I1 and I2 apart between d1 and discharge sustain electrodes I2 and the discharge enabling address electrode J11 relative with it apart from d2, in other emitter region, unit discharge sustain electrodes to similarly be provided with under the condition apart from d2 with the discharge enabling address relative with it is interelectrode apart from discharge sustain electrodes in d1 and other emitter region, unit.

One of discharge sustain electrodes centering and discharge enabling address interelectrode apart from d2 can discharge sustain electrodes to apart from d1 ± 30% scope in setting.

In this case, as described in following equation (1), according to this old (Paschen) law of training, the pressure of the gas that is injected that will describe below must be provided with to such an extent that to make between the pressure P of institute's injecting gas and sparking electrode be constant apart from the long-pending of d.

Pd=constant value ... (1)

If the pressure P of institute's injecting gas is a constant, then apart from d2 can the distance of determining by the minimum value of this old (Paschen) curve of training ± 30% scope in setting.

If discharge start voltage is chosen as the minimum value of this old (Paschen) curve of training, then interelectrode apart from d1 and interelectrode distance d2 can above-mentioned selected apart from d ± tens percent allowed band in setting.Even it is discharge start voltage is not set to train the minimum value of this old (Paschen) curve, interelectrode apart from d1 with interelectrodely also can in above-mentioned selected pact ± 30% scope, be provided with apart from d apart from d2.

Discharge sustain electrodes is to I1 and I2, I3 and I4 ..., Im-1 and Im every pair is interelectrode can be set to 50 μ m or littler apart from d1, and for example 5 μ m-20 μ m can also be set to 5 μ m or littler, or 1 μ m or littler.Determine according to the value of distance d1 apart from d2.

As the film of dielectric layer be dielectric layer 37 and 40 and total film thickness t1 of MgO film 41 can be provided be formed on same lip-deep discharge sustain electrodes to apart from d1 and to be formed on right one of same lip-deep discharge enabling address electrode and discharge sustain electrodes interelectrode be little apart from d2.

Especially, as shown in Figure 11 A, when on substrate 51, forming sparking electrode to 52,53 and dielectric layer 54 when being formed on sparking electrode 52 and 53, if sparking electrode 52 and 53 s' distance is d, the thickness of the dielectric layer 54 on the sparking electrode 52 and 53 is t, and satisfy 2t＜d, then the discharge between the sparking electrode 52 and 53 produces on dielectric layer 54.

As shown in Figure 11 B, if the thickness of dielectric layer 54 is big and satisfy 2t＞d, then the discharge between the sparking electrode 52 and 53 produces in dielectric layer 54, and punctures between guiding discharge electrode 52 and 53.Thereby, in this embodiment, dielectric layer 37 and 40 and total film thickness t1 of MgO film 41 be provided with less than distance d1 and d2, promptly be provided with to such an extent that satisfy 2t1＜d2 and 2t1＜d1.

As shown in Fig. 7 and Figure 12, wholely on as the upper surface glass substrate 34 of second substrate be formed with a plurality of formula barrier ribs 56 to separate each adjacent emitter region, unit row.Phosphor layer 35 is coated between the adjacent rib 56.Especially, being used for the phosphor layer 35R of redness (R), the phosphor layer 35B that is used for the phosphor layer 35G of green (G) and is used for blueness (B) repeatedly forms.As shown in Fig. 7 and 13, barrier rib form like this so that its width greater than each address electrode J1 ..., the width of Jn.

The fluorescent material substrate 36 that has upper surface glass substrate 34 and form phosphor layer 35 thereon and the electrode base board 33 with discharge sustain electrodes group, address electrode group and discharge enabling address electrode group of being formed on the lower surface glass substrate 32 are by being positioned the address electrode J1 of electrode base board 33, J2, ..., each barrier rib 56 of the fluorescent material substrate 36 on the Jn seals.Required gas injects the confined space of fluorescent material substrate 36 and electrode base board 33 formation, promptly in the internal discharge space.

Can adopt one or more gases among He, Ne, Ar, Xe, the Kr as the gas that injects.The main employing constitutes Peng Ning gas by composite gas of Ar/Xe or analog.Ultraviolet ray exited RGB phosphor layer 35R, 35G and 35B that plasma discharge produces, thus RGB phosphor layer 35R, 35G and 35B send the light of color separately.

Contrast when the surface that barrier rib 56 can have black shows to improve.

Figure 13 has shown the colored region of discharge of a pixel that is made of red (R), green (G), blue (B) three color element region of discharges.

The operation of above-mentioned display unit 31 is described below.For example, when the discharge that is used to support discharge support voltage be applied to discharge sustain electrodes to I1 and I2 between, and the ratio discharge that is used to start discharge supports the high discharge start voltage of voltage when address electrode J1 is applied between discharge sustain electrodes I2 and the discharge enabling address electrode J11, discharge between discharge sustain electrodes I2 and the discharge enabling address electrode J11 begins, and after this discharge sustain electrodes is held the discharge between I1 and the I2.Discharge generation plasma between discharge sustain electrodes I1 and the I2, then the ultraviolet ray exited phosphor layer 35 of plasma generation (35R, 35G, corresponding site 35B), thus this position is luminous.Correspondingly, when discharge start voltage is applied to address electrode J1 selectively in succession, J2 ..., Jn is last and discharge supports that voltage is applied to discharge sustain electrodes in succession to I1 and I2, I3 and I4 ..., when Im-1 and Im went up, the colour that can obtain to expect showed.

Especially, the three fluorescence material layer 35R, 35G, the 35B that are used for red (R), green (G), blue (B) that the ultraviolet irradiation that plasma discharge produces is provided with between the adjacent barrier rib 56 in the emitter region of a pixel, thus phosphor layer 35R, 35G, 35B send the light of respective color.Therefore, realize colored the demonstration.

Be used to make the luminous pulse of pixel at predetermined address location place to be applied to address electrode J1 ..., on the Jn, make the discharge enabling address electrode J11 of pixel of this position ..., Jnm and a discharge sustain electrodes I2, I4 ..., the discharge between the Im begins.

The demonstration that display unit 31 produces can be watched from electrode base board 33 1 sides or fluorescent material substrate 36 1 sides.Correspondingly, watching the substrate of that side at least is transparency carrier.

When watching demonstration from electrode base board 33 1 sides, need form discharge sustain electrodes I1 with nesa coating, I2 ..., In and discharge enabling address electrode J11, J12 ..., Jnm.And the substrate 34 of fluorescent material substrate 36 1 sides does not need to constitute with transparency carrier.In order to obtain more satisfied brightness, preferably make opening big as much as possible.

When watching from fluorescent material substrate 36 1 sides when showing, substrate 34 is made of transparency carrier.And the substrate 32 of electrode base board 33 1 sides need not be made of transparency carrier.Preferably, discharge sustain electrodes I1, I2 ..., In and discharge enabling address electrode J11, J12 ..., Jnm uses metal such as aluminium or analog to constitute, and has low resistance and reflective to reduce resistance value and the satisfied brightness of acquisition.

The method of making above-mentioned display unit is described below by example.

Figure 14-19 has shown the process of making electrode base board 33.

As shown in Figure 14 A and 14B, a nesa coating 58 is as ITO (In ₂O ₃/ SnO ₂), tin-oxide film (SnO ₂) or analog, be that the ITO film places on the surface of first substrate such as glass substrate 32 in this embodiment.

As shown in Figure 15 A and 15B, to nesa coating 58 patterning cases; Thereby form each discharge sustain electrodes to I1 and I2, I3 and I4 ..., Im-1 and Im, and discharge enabling address electrode J11, J12 ..., Jnm.

By above-mentioned discharge sustain electrodes I1 and the I2 that nesa coating 58 forms, I3 and I4 ..., Im-1 and Im and discharge enabling address electrode J11, J12 ..., Jnm forms by following engraving method or stripping means.(1) process by engraving method formation electrode comprises

(i) will be formed into by the ITO film that nesa coating 58 constitutes on the whole surface of glass substrate 32

(usually without SnO ₂Film is because of its difficult etching),

(ii) on the ITO film, form the negative pattern of electrode with resist,

The (iii) etching process by using hydrochloric acid or analog to carry out removes not by the resist cover part

The ITO film.(2) process by stripping means formation electrode comprises

(i) the usefulness resist forms the negative pattern of electrode on the ITO film,

(ii) on a whole surface of glass substrate 32, form ITO by sputter, evaporation or similar approach

Film comprises the position on the negative pattern of resist, and

(iii) by resist peel off reagent remove resist and on the ITO film.

Shown in Figure 16 A and 16B, at discharge sustain electrodes I1, I2 ..., Im and discharge enabling address electrode J11, J12 ..., be formed with on the Jnm resistance value that is used to reduce these electrodes low-resistance bus electrode K (K1 ..., Km, K11 ..., Knm).

Bus electrode K (K1 ..., Km, K11 ..., Knm) can and have with low-resistance metal formation strip than those discharge sustain electrodes I1, I2 ..., Im and discharge enabling address electrode J11, J12 ..., the width that Jnm is little, or can use the conduction paste to form similarly by silk screen printing.When bus electrode K (K1 ..., Km, K11 ..., the conduction of using when Knm) forming by silk screen printing is stuck with paste with silver-colored (Ag), silver-palladium (Ag-Pd), nickel (Ni) or analog and is made.

Figure 20 shown be formed with bus electrode K (K1 ..., Km, K11 ..., pattern Knm).Bus electrode K (K1 ..., Km, K11 ..., Knm) form by a side end or middle part (on the Width of electrode) that vertically is superimposed upon discharge sustain electrodes I and discharge enabling address electrode JA.Can adopt silver-colored Ag or have the material of the material of copper Cu/ chromium Cr/Cu three-decker as bus electrode K.

As shown in Figure 17 A and 17B, dielectric layer 37 is formed on the substrate 32 and discharge sustain electrodes I1, I2 ..., Im-1, Im and discharge enabling address electrode J11 ..., on the last and subregion except that the end of Jnm.

With discharge enabling address electrode J11, J21 ..., Jn1 ..., the resist film that the corresponding position of Jnm has opening places whole surface to comprise on the surface of dielectric layer 37.Average particle size particle size is that the calcium carbonate of 20-30 μ m injects resist film by the method for sandblasting with high pressure, thereby contact hole 59 is formed on and discharges enabling address electrode J11, J21 ..., Jn1 ..., the corresponding position of Jnm.

Dielectric layer 37 can form with glass paste.Dielectric layer 37 must also can prevent that to high-tension resistance the material that produces bubble easily from forming with having high-k and considering with transparent as far as possible.

Shown in Figure 18 A and 18B, address electrode J1 ..., Jn is formed on the dielectric layer 37 partly to insert contact hole 59.Simultaneously, as address electrode J1 ..., when Jn forms, address electrode J1 ..., Jn is through contact hole 59 and corresponding discharge enabling address electrode J11, J21 ..., Jn1 ..., Jnm links to each other.Address electrode J1 ..., the evaporation that Jn can be by Al or when adopting above-mentioned bus electrode K to form used various conductions stick with paste to print and form.Perhaps, address electrode J1 ..., Jn can stick with paste with photosensitive silver and form.In this case, because address electrode J1 ..., Jn has low resistance, does not need to be provided with bus electrode.

As shown in Figure 19 A and 19B, dielectric layer 40 is formed on whole surface and comprises address electrode J1 ..., on the surface of Jn.Dielectric layer 40 can form with being similar to the glass paste that is used for dielectric layer 37.The oxide of magnesium (MgO) film 41 places on the surface of dielectric layer 40.

Though do not show, MgO film 41 can be formed on and remove and address electrode J1 ..., on the dielectric layer 40 outside the corresponding position of Jn.

Thereby make electrode base board 33.

The manufacturing of fluorescent material substrate 36 is as follows.

By silk screen printing or the bar formula barrier rib 56 that sandblasts and on second substrate such as glass substrate 34, be formed with glass paste.Barrier rib 56 is separated the emitter region, unit of discharge sustain electrodes I in the vertical, thereby prevents phase mutual interference and maintenance insulation therebetween between the adjacent cells emitter region.Barrier rib 56 is by guaranteeing discharge plasma space at first substrate 32 and 34 intervals that keep certain of second substrate.Barrier rib 56 must be handled accurately.

Between adjacent barrier rib 56, form red accordingly (R), green (G) and blue (B) phosphor layer 35R, 35G, 35B by applying.Can adopt and commercially availablely be subjected to ultraviolet ray exited luminous down PDP fluorescent material that plasma discharge produces as phosphor material.

Thereby, make fluorescent material substrate 36.

The electrode base board of making like this 33 and fluorescent material substrate 36 location like this makes each barrier rib 56 and address electrode J1 of fluorescent material substrate 36 ..., the location matches of Jn, and its periphery is airtight except that the end.Produce vacuum in airtight space in discharge space, discharge gas such as above-mentioned Peng Ning gas or analog inject the process of pruning that wherein also realizes then.Then, obtain desired display unit 31.

According to above-mentioned display unit 31, because discharge sustain electrodes group I (I1, I2, ..., Im), discharge enabling address electrode group JA (J11 ..., Jnm) and address electrode group J (J1, J2 ..., Jn) being formed on same substrate is on first substrate 32, and phosphor layer 35 is formed on second substrate 34 relative with first substrate 32, even discharge sustain electrodes is to I1 and I2, I3 and I4 ..., Im-1 and Im every pair is interelectrode apart from d1 and discharge sustain electrodes I2, I4, ..., one and discharge enabling address electrode J11 among the Im, ..., become littler apart from d2 between Jnm, also can guarantee discharge plasma spaces by the barrier rib 56 that is formed on substrate 34 sides.Especially, because phosphor layer 35 can form in the position away from plasma, can prevent that the plasma of discharge generation from contacting with phosphor layer 35.As a result, prevent that the charged particle in the plasma from colliding phosphor layer 35 and preventing that phosphor layer 35 is damaged.Therefore, can obtain extremely thin high-definition plasma body display unit.

Because discharge sustain electrodes forms with same conducting film on the same surface of first substrate 32 by the etching or the method for pruning simultaneously to I and discharge enabling address electrode JA, thus discharge sustain electrodes between I apart from the d1 and can accurately set between an enabling address electrode JA and a discharge sustain electrodes I of discharging apart from d2.

The discharge enabling address electrode JA of the part of discharge sustain electrodes I, address electrode J and formation address electrode J is formed on first substrate, 32 1 sides, barrier rib 56 and phosphor layer 35 are formed on second substrate, 34 1 sides, thereby hermetic sealing substrate 32 and 34 constitutes display unit 31 then.Can accurately set interelectrode position relation.When sealing, it can locate substrate 32 and 34.The tolerance of space interval can be provided with greatlyyer, and is convenient to forming process, seal process of electrode etc.Thereby the productivity ratio of display unit 31 is improved, and manufacturing cost can reduce.

Especially, since each discharge sustain electrodes to I and discharge enabling address electrode JA by the patterning case with the formation of same conducting film and interelectrodely can accurately be provided with apart from d1 and d2, therefore, can prevent because the fluctuation of the emission of the light (discharge generation) that the error in electrode base board 33 and 36 assemblings of fluorescent material substrate causes.

Especially, the interval of electrode and fluorescent material interlayer is not a constant in the emitter region, unit if electrode base board 33 and fluorescent material substrate 36 are assembled into that fluorescent material substrate 36 tilts with electrode base board 33, then interelectrodely is set to constant with d2 in each emitter region, unit and launching condition can consistently be set apart from d1.In addition, be gratifying in closed gas medium ultraviolet optical transmission rate.Thereby, there is not uneven luminosity, on whole viewing area, can send the light of uniform luminance.Therefore, display unit 31 has the real advantage that is easy to make.

Because MgO film 41 is used to reduce work function, discharge becomes easily if MgO film 41 is formed on the surface of dielectric layer 40, can reduce discharge voltage in addition.When 41 of MgO films in display unit 31 are formed on except that bar formula address electrode J1, ..., the discharge sustain electrodes I1 that Jn is outer, ..., Im and discharge enabling address electrode J11 ..., on the surface of the dielectric layer 40 on the Jnm, then feasible discharge enabling address electrode J11, ..., Jnm and discharge sustain electrodes I2, I4, ..., discharge between Im and discharge sustain electrodes be to I1 and I2, I3 and I4 ..., discharge between Im-1 and Im becomes easily, makes that simultaneously producing discharge between bar formula address electrode J and discharge sustain electrodes I becomes difficult.Thereby, can prevent the phase mutual interference.

Because each can be provided with lessly apart from d1 and d2, promptly can be set to 50 μ m or littler, or 30 μ m or littler, for example, therefore 5 μ m-20 μ m even 5 μ m or littler, and 1 μ m or littler can obtain the display unit of high definition.

If each can be provided with lessly apart from d1 and d2, promptly can be set to 50 μ m or littler, for example, 5 μ m-20 μ um even 5 μ m or littler, and 1 μ m or littler, and the pressure of the gas that injects is provided with greatly and in 0.8～3.0 atmospheric scope, then can produce a large amount of ultraviolet rays, makes phosphor layer 35 send very bright light.

If discharge sustain electrodes I and discharge between the electrode JA of enabling address apart from d2 be arranged on discharge sustain electrodes to apart from d1 ± 30% scope in, then can smoothly and lentamente change, thereby improve the degree of freedom of drive condition in being provided with corresponding to distance d2 discharge start voltage.If interelectrode apart from d1 and d2 all be arranged on ± tens percent or ± 30% scope in, then can suppress the fluctuation of discharge voltage.Thereby, when making display unit 31, form discharge sustain electrodes I1 ..., Im and discharge enabling address electrode J11 ..., Jnm can have some tolerances.

As discharge enabling address electrode J11 ..., when Jnm forms the L type, can guarantee itself and each discharge sustain electrodes I2, I4 ..., enough electrode lengths at the position that Im is relative, and be convenient to discharge sustain electrodes I2, I4 ..., Im and the discharge between it begin.

Except above-mentioned advantage, discharge enabling address electrode J11 ..., Jnm and address electrode J1 ..., Jn can easily interconnect.Especially, because discharge enabling address electrode J11 ..., Jnm is the L type, at address electrode J1 ..., the positional tolerance of vertically going up contact hole 59 of the Jn enabling address electrode J11 of being convenient to discharge ..., Jnm and address electrode J1 ..., the connection between the Jn and the assembling of electrode.

Since address electrode J1 ..., Jn is formed on discharge sustain electrodes I1 through the insulating barrier that dielectric layer 37 constitutes ..., on the Im, discharge sustain electrodes I1 ..., Im and address electrode J1 ..., Jn is insulation reliably each other, thereby prevents inter-electrode short-circuit.In addition, because contact hole 59 is arranged on address electrode J1 through insulating barrier ..., under the Jn, and address electrode J1 ..., Jn and discharge enabling address electrode J11 ..., Jnm interconnects through contact hole 59, therefore, can utilize simple structural entity calculated address electrode J1 ..., Jn and discharge enabling address electrode J11, ..., Jnm and do not reduce the open area of emitter region, unit.

Since discharge sustain electrodes I1 ..., Im and discharge enabling address electrode J11, ..., dielectric layer on the Jnm be the total thickness t 1 of dielectric layer 37,40 and MgO film 41 be provided with less than interelectrode apart from d1 and d2, therefore, can on dielectric layer, produce discharge.Especially, prevent from dielectric layer 37,40,41 to produce discharge, thereby can on dielectric layer, produce discharge, and can not occur discharge sustain electrodes to or the puncture of discharge sustain electrodes and the interelectrode insulation in discharge enabling address.

Since the barrier rib 56 on second substrate, 34 1 sides be configured in first substrate, 32 1 sides on address electrode J1, ..., the corresponding position of Jn, and the width of barrier rib 56 is greater than each address electrode J1 ..., the width of Jn, therefore the opening of emitter region, unit can be provided with to such an extent that produce more greatly and hardly directly to address electrode J1, ..., the discharge of Jn, thus the phase mutual interference prevented.Barrier rib 56 makes discharge space obtain enough assurances.

Since discharge sustain electrodes to the enabling address is interelectrode is provided with basic identically apart from d2 apart from d1 and discharge sustain electrodes and discharge, applying high voltage startup discharge enabling address electrode J11, ..., Jnm and discharge sustain electrodes I2, I4 ..., after the discharge between Im, can with relatively low voltage keep discharge sustain electrodes to discharge, thereby utilize discharge generation luminously obtain satisfied demonstration.

Because discharge plasma space can be guaranteed by electrode base board 33 and the fluorescent material substrate 36 with barrier rib 56 and phosphor layer 35 relative with electrode base board 33, therefore can launch enough ultraviolet rays.Because phosphor layer 35 is formed on the whole zone of 56 of adjacent barrier ribs, so phosphor layer 35 has the zone of broad and can obtain the demonstration of high brightness.

As shown in Figure 18 A and 18B, through being formed on the hole on the dielectric layer 37, bar formula address electrode J1 ..., Jn and each corresponding discharge enabling address electrode J11 ..., Jnm links to each other.As mentioned above, contact hole 59 forms through following process, by apply forming the process of dielectric layer 37, resist film being carried out the process that the patterning case is handled, and utilize the resist film of patterning case to form the process of opening by the method that sandblasts as face shield.Comprise more process if form the process in hole, three processes for example, then fluctuation appears in the size in the hole 59 that forms by the method that sandblasts, thus address electrode J1 ..., Jn and discharge enabling address electrode J11 ..., unsettled connection may appear in Jnm.

Figure 21 has shown the display unit according to second embodiment that addresses the above problem of the present invention.

Be similar to display unit 31, display unit 61 has first substrate such as glass substrate 32, and have many to discharge sustain electrodes (I1, I2), (I3, I4), ..., (Im-1, Im) the discharge enabling address electrode (J11-Jn1) of the discharge sustain electrodes group of Gou Chenging and a plurality of L types, (J12-Jn2), ..., (J1m-Jnm), this discharge enabling address electrode vertical (directions X) of discharge sustain electrodes go up be formed on constant interval each discharge sustain electrodes between, be discharge sustain electrodes (I1, I2) and (I3, I4), ..., (Im-3, Im-2) and (Im-1, Im) between.

Display unit 61 has the bar formula insulating barrier 62 that is formed on corresponding position, interelectrode position, adjacent discharge enabling address, discharge enabling address electrode on directions X, arrange and comprise with discharge sustain electrodes I1 ..., Im be orthogonal direction (Y direction) discharge sustain electrodes I1 ..., the part on the Im, and address electrode J1, ..., Jn is formed on the corresponding bar formula insulating barrier 62.Address electrode J1 ..., the part of Jn is extended to discharge enabling address electrode J11 along the side surface of insulating barrier 62 ..., on the Jnm.Direct and the discharge enabling address electrode J11 of the part of these extensions ..., Jnm links to each other.In addition, dielectric layer 40 and as the MgO film of the diaphragm of dielectric layer 40 be formed on comprise on the whole surface discharge sustain electrodes I1 ..., Im, discharge enabling address electrode J11 ..., Jnm and address electrode J1 ..., on the surface of Jn.

A plurality of the formula barrier ribs 56 extending on the direction Y that are similar to first embodiment are integrally formed on second substrate such as the glass substrate 34 with constant interval.On the position between the adjacent barrier rib 56, be formed with the phosphor layer 35 that is used for red (R), green (G), blue (B) in succession, i.e. phosphor layer 35R, 35G and 35B.Thereby, constitute fluorescent material substrate 36.

Substrate 33 and 36 in the sealing of its edge so that the address electrode J1 of the barrier rib of substrate 36 and substrate 33 ..., Jn is corresponding.Required demonstration gas injects above-mentioned confined space.

MgO film 41 is formed on the whole surface of dielectric layer 40 in Figure 21, the invention is not restricted to this, and MgO film 41 can be formed on its whole surface and be not limited to position on the aforesaid address electrode J.

Other setting (electrode material, interelectrode apart from d1 and d2, the kind of the gas of injection, air pressure, dielectric layer thickness, or the like) can be identical with the display unit 31 according to first embodiment, and the class of operation of display unit 61 is similar to the display unit 31 according to first embodiment.Thereby other setting of display unit 61 and operation are no longer described in detail.

Figure 17-22 has shown the process of making the electrode base board 33 of display unit 61.

As Figure 22 A, shown in 22B and the 22C, discharge sustain electrodes I1 ..., the discharge enabling address electrode J11 of Im and L type ..., Jnm is formed on first substrate such as the glass substrate 32 by method similar to the above.A plurality of formula insulating barriers 62 are formed on and L type discharge enabling address electrode J11 ..., the part of Jnm (that is, and with extend on the perpendicular direction of discharge sustain electrodes I that part of) corresponding position, with each discharge sustain electrodes I1 ..., Im intersects.

As Figure 23 A, shown in 23B and the 23C, address electrode J1 ..., Jn is formed on each bar formula insulating barrier 62.Address electrode J1 ..., the part of Jn is extended to discharge enabling address electrode J11 along the side surface of insulating barrier 62 ..., on the Jnm.Address electrode J1 ..., the direct and discharge enabling address electrode J11 of the part of these extensions of Jn ..., Jnm links to each other.Address electrode J1 ..., Jn and extension thereof can form simultaneously by the method for pruning of use Al evaporation or by etching method.

As Figure 24 A, shown in 24B and the 24C, dielectric layer 40 is formed on the whole surface, and is formed on the dielectric layer 40 as the MgO film 41 of diaphragm.Thereby, constitute electrode base board 33.

Figure 25 A and 25B are flow charts, have shown the method for making above-mentioned display unit 61 by example.

Fluorescent material substrate 36 is made through process a1-a8.

In process a1, glass paste be coated to as on the glass substrate 34 of second substrate to have preset thickness.Perhaps, will have glassine paper (for example, trade mark by name green paper (green the sheet)) cementation of predetermined thickness on it.In process a2, the glass paste of coating or the glassine paper of cementation are carried out the prebake processing to form insulating barrier.

In process a3, resist film is coated on the whole surface.In process a4, resist film is through exposure and be developed in formation face shield against corrosion on the position that will form barrier rib 56.

In process a5, above-mentioned insulating barrier is removed selectively by powderject process (or the process that sandblasts), and in process a6, insulating barrier is with for example 600 ℃ temperature sintering, to form barrier rib 56 then.

In process a7, each color fluorescence material that will be used for red (R), green (G) and blue (B) by puddling is coated to the position of 56 of adjacent barrier ribs.In process a8, the fluorescent material of coating is with for example 430 ℃ temperature sintering.Thereby, make fluorescent material substrate 36.

Electrode base board 33 is made through process b1-b10.

In process b1, the resist film with predetermined pattern is formed on the surface as the glass substrate 34 of first substrate.In process b2, for example, on resist film and glass substrate 34, form nesa coating (for example, ITO film) or Al film by spraying, evaporation or similar approach.Then, in process b3, by use corrosion inhibitor stripper with resist film and on nesa coating or the Al film be removed with form discharge sustain electrodes I1 ..., Im and discharge enabling address electrode J11 ..., Jnm.

In process b4, the photosensitive glass muddle overlays on that the temperature with 80 ℃ kept 20 minutes on the whole surface, then, in process b5, exposes and develops.Then, in process b6, the photosensitive glass of coating stick with paste with 600 ℃ temperature sintering with form with discharge sustain electrodes I1 ..., the bar formula insulating barrier 62 that intersects of Im.

In process b7, form resist film with predetermined pattern.In process b8, form the Al film of evaporation.In process b9, by stripping process remove resist film and on the Al evaporating film with calculated address electrode J1 ..., Jn, the part of address electrode along insulating barrier 62 extend and with discharge enabling address electrode J11 ..., Jnm links to each other.In process b10, for example the dielectric layer 40 of SiO2 film formation and MgO film 41 form by evaporation.Thereby, make electrode base board 33.

In process C1, electrode base board 33 and fluorescent material substrate 36 are assembled together, and the edge of its contact site seals with melted glass.Then, in process C2, the confined spaces that substrate 33 and 36 constitutes exhaust two hours under 380 ℃ temperature, then, in process C3, the Ne/Xe gaseous mixture injects that wherein to make its air pressure be an atmospheric pressure.In process C4, realize pruning processing.Thereby, finish the assembling of desired display unit.

According to display unit 61, owing to be used to separate address electrode J1 ..., Jn and discharge sustain electrodes I1 ..., the insulating barrier 62 of Im forms strip, and address electrode J1 ..., Jn and discharge enabling address electrode J11 ..., interconnect along the part of the side surface extension of insulating barrier 62 by the former between the Jnm, therefore, can make address electrode J1 ..., Jn and discharge enabling address electrode J11, ..., interconnecting between the Jnm is stable and reliable.

Consider the assembling of display unit 61, owing to form contact hole 59 not necessarily, manufacture process can be simplified, and connection is therebetween stablized and ripple disable.

The ultraviolet irradiation that plasma discharge by the gas that will inject produces makes phosphor layer luminous to phosphor layer, and display unit 61 realizes showing.In this case, when the image that shows on the display unit 61 can be when electrode base board 33 1 sides or fluorescent material substrate 36 1 sides be watched, the part of the light of the high brightness that is sent shines on the rear surface that is positioned at opposite side through substrate 33 or 36, and no matter be to watch image from electrode base board 33 1 sides or from fluorescent material substrate 36 1 sides, cause since issued light lose the brightness that causes this shortcoming that descends.

The display unit of a third embodiment in accordance with the invention that description is addressed the above problem below.

Figure 26 and 27 has shown the display unit of using 64 when electrode base board 33 1 sides are watched image, have on the electrode base board 33 discharge sustain electrodes I1 ..., Im, the discharge enabling address electrode J11 ..., Jnm and address electrode J1 ..., Jn.

Display unit 64 has fluorescent material substrate 36, this fluorescent material substrate 36 has and is arranged on as the reflectance coating 65 of 34 of the glass substrates of second substrate and has barrier rib 56 and phosphor layer 35 (35R, 35G, 35B), display unit 64 by with fluorescent material substrate 33 and be formed with discharge sustain electrodes I1 ..., Im, discharge enabling address electrode J11, ..., Jnm and address electrode J1 ..., Jn electrode base board 36 thereon seals and constitutes.

As shown in Figure 26, after barrier rib 56 is formed on the glass substrate 34, go up the film that forms highly reflective material such as aluminium (Al), nickel (Ni), silver (Ag) or analog by (comprising the inner surface of substrate 34 and the inner surface of barrier rib 56) on whole surface, in this 3rd embodiment, be the aluminium film for example, and formation reflectance coating 65, so that it has the thickness of about 1000A 5000A, be preferably 1500A-3000A.After reflectance coating 65 formed, (35B) position between adjacent barrier rib 56 formed phosphor layer 35 for 35R, 35G.

In this embodiment, have and be similar to the setting shown in Figure 21, electrode is formed on glass substrate 32 1 sides as first substrate.In this case, discharge sustain electrodes I1 ..., Im and address electrode J1 ..., Jn with nesa coating for example the ITO film form.

Reflectance coating 65 forms between the process a6 of the manufacture process shown in Figure 25 A and the 25B and a7.

Other of display unit 64 are provided with and class of operation is similar to display unit 31, therefore no longer describe in detail.

According to display unit 64, phosphor layer 35 (35R, 35G, 35B) by discharge sustain electrodes to I1 and J2 ..., the discharge excitation between Im-1 and Im and luminous.The light of directive fluorescent material substrate 36 1 sides of the light that is sent is reflected film 65 reflections and points to electrode base board 33.Thereby, can prevent the losing of light of directive fluorescent material substrate one side, and make the user watch the display image of brightness improving from electrode base board 33 1 sides.

Figure 28 has shown the display unit 67 of a fourth embodiment in accordance with the invention of using when second substrate, 34 1 sides that are formed with phosphor layer 35 are from it watched image.

Display unit 67 has electrode base board 33, electrode base board 33 has the whole lip-deep reflectance coating 65 as the glass substrate 32 of first substrate of being formed on that is similar to the 3rd embodiment, insulating barrier 68 is formed on the reflectance coating 65, discharge sustain electrodes I1 ..., Im and address electrode J1, ..., Jn has the setting that is similar to the 3rd embodiment and is formed on the insulating barrier 68, insulating barrier 62 forms thereon, discharge enabling address electrode J11, ..., Jnm is formed on the insulating barrier 62, and dielectric layer 40 forms thereon, and MgO film 41 is formed on the dielectric layer 40.Display unit 67 has fluorescent material substrate 36, fluorescent material substrate 36 have barrier rib and the phosphor layer 35 by forming on the position that is coated in 56 of adjacent barrier ribs (35R, 35G, 35B).Display unit 67 forms by sealing fluorescent material substrate 36 and electrode base board 33.

In this case, discharge sustain electrodes I1 ..., Im and discharge enabling address electrode J11 ..., Jnm can form with the aluminium film.They also can form with nesa coating.

Reflectance coating 65 formed before the process b1 of the manufacture process shown in Figure 25 A and the 25B.

According to display unit 67, phosphor layer 35 (35R, 35G, 35B) by discharge sustain electrodes to I1 and I2 ..., the discharge excitation between Im-1 and Im and luminous.The light of directive electrode base board 33 1 sides of the light that is sent is reflected film 65 reflections and points to fluorescent material substrate 36.Thereby, can prevent the losing of light of directive electrode base board 33 1 sides, and make the user watch the display image of brightness improving from fluorescent material substrate 36 1 sides.

When the display unit of making shown in Figure 21 61, discharge sustain electrodes I1 ..., Im and discharge enabling address electrode J11 ..., Jnm is formed on the same substrate 32, and bar formula insulating barrier 62 is stuck with paste formation by sintered glass.Afterwards, address electrode J1 ..., Jn is formed on the insulating barrier 62.Yet, consider that insulating barrier 62 has the possibility of porous and can not obtain enough insulation, need to make more reliably discharge sustain electrodes I (I1 ..., Im) and address electrode J (J1 ..., Jn) between insulation.

Because insulating barrier 62 forms with about 600 ℃ temperature sintering, the sintering temperature of this moment may make the electrode tip oxidation nocuously.

Even discharge sustain electrodes I (I1 ..., Im) and address electrode J (J1 ..., Jn) wait with nesa coating such as ITO film or analog and form, discharge sustain electrodes I (I1 ..., the ITO film at place, end Im) may reduce conductance because of oxidation.

In addition, consider the time oxidation of the end of electrode with melted glass enclosed electrode substrate 33 and fluorescent material substrate 36 and sintered glass melt.

The display unit according to a fifth embodiment of the invention that addresses the above problem is described below.

Figure 29-33 has shown the continuous process of making display unit 71 according to a fifth embodiment of the invention.

As shown in Figure 29 A, 29B and 29C, as mentioned above, discharge sustain electrodes I1 ..., Im and L type discharge enabling address electrode J11 ..., Jnm is formed on the surface as a glass substrate of first substrate.Discharge sustain electrodes I1, ..., Im and discharge enabling address electrode J11 ..., Jnm is formed by nesa coating, for example, ITO film or analog, perhaps metal such as Al, Cr, Au, Ag film, the upper strata with Cr and lower floor with the duplicature of the Al/Cr structure of Al, Al is used and the levels trilamellar membrane of the Cr/Al/Cr structure of Cr or analog in the intermediate layer.In this 5th embodiment, form with the aluminium film.

Dielectric film 72 places whole surface to comprise discharge sustain electrodes I1 ..., Im and discharge sustain electrodes I1 ..., Im and discharge enabling address electrode J11 ..., the so-called end of Jnm.Dielectric film 72 has excellent insulation property.Can adopt the dielectric film that forms by chemical vapor deposition (CVD).Especially, form the SiO2 film by CVD.The thickness of dielectric film 72 can be arranged between the 10 μ m-100 μ m.When dielectric film 72 forms by silk screen printing, if thickness then can produce small pore less than 10 μ m, and bring very big short circuit possibility, thereby cause the insulating properties deficiency.On the other hand, if the thickness of film then must form dielectric film by multiple coating greater than 100 μ m, thereby increase manufacture process and make the transparency variation of dielectric film 72 and reduce brightness.

As shown in Figure 30 A, 30B and 30C, on dielectric film 72, be formed with contact hole 73, contact hole 73 is used to connect the discharge enabling address electrode J11 that forms thereafter ..., Jnm and address electrode J1 ..., Jn.

Bar formula insulating barrier 62 is formed on address electrode J1 ..., on the position that Jn will form.Be similar to second embodiment, insulating barrier 62 can the sintered glass paste forms by stick with paste also with the strip pattern coated glass.

As shown in Figure 31 A, 31B and 31C, the address electrode J1 that constitutes by the aluminum evaporation film ..., Jn is formed on each insulating barrier 62, address electrode J1 simultaneously ..., Jn and discharge enabling address electrode J11 ..., Jnm interconnects through contact hole 73.

As shown in Figure 32 A, 32B and 32C, dielectric layer 40 is formed on except that discharge sustain electrodes I1 ..., on the viewing area outside the end of Im, and form thereon as the MgO film 41 of diaphragm.Thereby, constitute electrode base board 33.

Though show, barrier rib 56 is formed on the glass substrate 34 as second substrate, and phosphor layer 35 (35R, 35G 35B) are formed on the position of 56 of adjacent barrier ribs.Thereby, constitute fluorescent material substrate 36.

Electrode base board 33 and fluorescent material substrate 36 assemble and seal with melted glass, so that discharge sustain electrodes I1 ..., the end 74 of Im and address electrode J1 ..., the end of Jn is relative with the surface.

Therefore, shown in Figure 33 A and 33B, can obtain thin dielectric membrane 72 and evenly be formed on discharge sustain electrodes J1, ..., Im and discharge enabling address electrode J11 ..., Jnm and discharge sustain electrodes I1 ..., the lip-deep desired display unit 71 of the end 74 of Im.

Other of display unit 71 are provided with and class of operation is similar to display unit 31, therefore no longer describe in detail.

Much less, when electricity consumption drove display unit 71, display unit 71 was by the AC driven that is applied on it, even thin dielectric membrane 72 is formed on end 74, driving voltage still is applied to discharge sustain electrodes I1 ..., on the Im.

According to display unit 71, be formed on discharge sustain electrodes I1 owing to have the dielectric film 72 of satisfied insulating properties ..., Im and discharge enabling address electrode J11 ..., on the Jnm, even be formed on address electrode J1, ..., the insulating properties of the insulating barrier 62 under the Jn degenerates, and also can improve discharge sustain electrodes I1, ..., Im and address electrode J1 ..., the insulating properties between the Jn.Because insulating barrier 72 is formed on discharge sustain electrodes I1 ..., on the surface of the end of Im, therefore in the sintering process that forms insulating barrier 62 or analog and in the process of melted glass hermetic sealing substrate 33 and 36, can prevent end 74 oxidations or distillation.

Figure 34-38 has shown the continuous process of making display unit 76 according to a sixth embodiment of the invention.

Shown in Figure 34 A, 34B, 34C and 34D, as mentioned above, discharge sustain electrodes I1 ..., Im and discharge enabling address electrode J11 ..., Jnm is formed on the surface as a glass substrate of first substrate.Discharge sustain electrodes I1 in this 6th embodiment ..., Im and discharge enabling address electrode J11 ..., Jnm can be formed by the aluminium film.Be similar to the bar formula dielectric film 72 that adopts among the 5th embodiment and place covering to remove discharge enabling address electrode J11 ..., each discharge sustain electrodes I1 that Jnm is outer ..., Im and end 74 thereof.

Shown in Figure 35 A, 35B, 35C and 35D, bar formula insulating barrier 62 is formed on will calculated address electrode J1 ..., the position of Jn.Be similar to top describedly, insulating barrier 62 can be by sticking with paste with the strip pattern coated glass and sintered glass is stuck with paste and be formed.

Insulating barrier 62 can be at the discharge enabling address electrode J11 that prevents to have exposed ..., form by heat treatment under the treatment conditions of Jnm oxidation or distillation, for example 1 * 10 ^-5Heat-treat under Torr or the higher vacuum degree.

Shown in Figure 36 A, 36B, 36C and 36D, the address electrode J1 that constitutes by evaporation aluminium film ..., Jn is formed on each insulating barrier 62, while address electrode J1 ..., the extension of Jn is along the side surface and discharge enabling address electrode J11 of insulating barrier 62, ..., Jnm directly links to each other, thus discharge enabling address electrode J11, ..., Jnm and address electrode J1 ..., realize between Jn being electrically connected mutually.

Shown in Figure 37 A, 37B, 37C and 37D, dielectric layer 40 is formed on and removes so-called discharge sustain electrodes I1 ..., on the viewing area outside the end of Im, and form thereon as the MgO film 41 of diaphragm.Thereby, constitute electrode base board 33.

As shown in Figure 42, barrier rib 56 is formed on the glass substrate 34 as second substrate, and phosphor layer 35 (35R, 35G 35B) are formed on the position of 56 of adjacent barrier ribs.Thereby, with melted glass sealing fluorescent material substrate 33.

Electrode base board 33 and the sealing of fluorescent material substrate 36 usefulness melted glass, so that discharge sustain electrodes I1 ..., the end 74 of Im and address electrode J1 ..., the end of Jn is relative with the surface.

Therefore, shown in Figure 38 A and 38B, can obtain thin dielectric membrane 72 and evenly be formed on discharge sustain electrodes I ..., the desired display unit 76 on Im and the end 74 thereof.

Other of display unit 76 are provided with and class of operation is similar to display unit 31, therefore no longer describe in detail.

According to display unit 76, as mentioned above, be formed on discharge sustain electrodes I1 owing to have the dielectric film 72 of satisfied insulating properties ..., on the surface of Im, can improve discharge sustain electrodes I1 ..., Im and address electrode J1 ..., the insulating properties between the Jn.

Because insulating barrier 72 is formed on discharge sustain electrodes I1 ..., on the surface of the end 74 of Im, therefore in the sintering process that forms insulating barrier 62 and in the process of melted glass hermetic sealing substrate 33 and 36, can prevent end 74 oxidations or distillation.

According to display unit 76, because 72 of dielectric films are formed on discharge sustain electrodes to I1 and I2 ..., Im-1 and Im upward are not formed on discharge enabling address electrode J11, ..., on the Jnm, therefore, the process of formation contact hole 73 as shown in Figure 30 becomes and does not need, thereby simplify manufacture process and stablized address electrode J1 ..., Jn and discharge enabling address electrode J11, ..., the connection between the Jnm.

If only need improve discharge sustain electrodes I1 ..., Im and address electrode J1 ..., the insulating properties between the Jn, then dielectric film 72 can only be formed on the viewing area except that end 74.In this case, can regulate and form insulating barrier 62 or, maybe can dispose the parts that only prevent end 74 oxidations at 36 o'clock with the air of melted glass hermetic sealing substrate 33 and.

Dielectric film on the end 74 can stay or remove after the assembling of insulating barrier 62 is finished.

When forming dielectric layer 40 and MgO film 41 shown in Figure 32 A-32C, MgO film 41 can be formed directly on the dielectric film 72 as dielectric layer, and does not re-use dielectric layer 40.

The display unit according to a seventh embodiment of the invention that it is provided with and manufacture process is simplified is described below.

Figure 39-42 has shown the continuous process of making this display unit 78.

Shown in Figure 39 A and 39B, discharge sustain electrodes I1 ..., Im is formed on the surface as the glass substrate 32 of first substrate.Discharge sustain electrodes I1 ..., Im can form with quadrat method with aforesaid.Be similar to top described, discharge sustain electrodes I1 ..., Im can form with nesa coating, as ITO film or analog, and metal A l, Cr, Au or Ag film, or have the double-deck metal film that forms by Al and Cr, a metal film with the three-decker that forms by Cr/Al/Cr.In this 7th embodiment, discharge sustain electrodes I1 ..., Im is formed by the aluminium film.

Be similar on the whole surface that thin dielectric membrane 72 recited above places substrate 32 and comprise discharge sustain electrodes I1 ..., on the surface of Im.

Shown in Figure 40 A and 40B, bar formula insulating barrier 62 is formed on will calculated address electrode J1 ..., the position of Jn, with discharge sustain electrodes I1 ..., Im intersects vertically.

Integrally formed in succession address electrode J1 ..., Jn and discharge enabling address electrode J11 ..., Jnm is formed on the insulating barrier 62 and on the part of dielectric film 72 simultaneously.Address electrode J1 ..., Jn and discharge enabling address electrode J11 ..., Jnm can form by stripping process or etching.

Shown in Figure 41 A and 41B, dielectric layer 40 is formed on except that discharge sustain electrodes I1 ..., on the whole surface of the viewing area outside the end (not shown) of Im, the MgO film 41 as the diaphragm of dielectric layer 40 forms thereon in addition.Thereby, constitute electrode base board 33.

Though show, barrier rib 56 is formed on the glass substrate 34 as second substrate, and phosphor layer 35 (35R, 35G 35B) are formed on the position of 56 of adjacent barrier ribs.Thereby, constitute fluorescent material substrate 36.

Electrode base board 33 and fluorescent material substrate 36 assemble and seal with melted glass, so that discharge sustain electrodes I1 ..., the end 74 of Im and address electrode J1 ..., the end of Jn is relative with the surface.

Therefore, as shown in figure 42, can obtain thin dielectric membrane 72 and evenly be formed on discharge sustain electrodes I1 ..., Im and address electrode J1, ..., on the surface of Jn and address electrode J1 ..., Jn and discharge enabling address electrode J11, ..., Jnm is with the integrally formed desired display unit 78 of same electric conducting material.

Other of display unit 78 are provided with and class of operation is similar to display unit 31, therefore no longer describe in detail.

According to display unit 78, because address electrode J1 ..., Jn and discharge enabling address electrode J11 ..., Jnm is not independent but integrally formed, therefore, being provided with of electrode can be simplified.Be formed on discharge sustain electrodes I1 owing to have the dielectric film 72 of satisfied insulating properties ..., on the surface of Im, can improve discharge sustain electrodes I1 ..., Im and address electrode J1 ..., the insulating properties between the Jn.

Because dielectric film 72 is formed on discharge sustain electrodes I1 ..., on the surface of the end of Im, therefore in the sintering process that forms insulating barrier 62 and in the process of melted glass hermetic sealing substrate 33 and 36, can prevent end oxidation or distillation.

When making display unit 78, form contact hole so that discharge enabling address electrode no longer needs through the process that dielectric film 72 links to each other with address electrode, thereby can simplify manufacture process.

Although dielectric film 72 is formed on and comprises discharge sustain electrodes I1 in the 7th embodiment shown in Figure 39-42 ..., on the whole surface on the surface of Im, the invention is not restricted to this.Though do not show, can adopt following setting.Especially, at discharge sustain electrodes I1 ..., Im forms the back and dielectric film 72 when not forming, form and discharge sustain electrodes I1 ..., the insulating barrier 62 that Im directly intersects, then, at calculated address electrode J1 simultaneously on the insulating barrier 62 and on the part of glass substrate 32 ..., Jn and discharge enabling address electrode J11, ..., Jnm.In this case, because address electrode J1 ..., Jn and discharge enabling address electrode J11 ..., Jnm forms simultaneously, and the setting of display unit and manufacture method thereof can be simplified.

In first to the 7th above-mentioned embodiment, thereby the present invention is used for a display unit to make its luminous display image by the activating fluorescent material layer.The invention is not restricted to this, can also be used for the display unit of display image by produce luminous of the plasma discharge that does not have phosphor layer.

According to display unit of the present invention, because discharge sustain electrodes group and address electrode group are formed on the same substrate of the AC drive-type display apparatus that utilizes plasma discharge, even the distance between address electrode and discharge sustain electrodes diminishes, also can guarantee discharge plasma space.Thereby, can make display unit as thin as a wafer and its pixel has higher definition.

Phosphor layer is formed on another substrate relative with this substrate because discharge sustain electrodes group and address electrode group are formed on the same substrate, even interelectrode distance diminishes, also can guarantee discharge plasma space and utilize the ultraviolet ray exited phosphor layer of plasma generation and make phosphor layer luminous.

Because the plasma of discharge generation is prevented from contacting with phosphor layer, therefore can prevent that phosphor layer is by plasma damage.Thereby, can make display unit as thin as a wafer and its pixel has higher definition.

Because discharge sustain electrodes group and address electrode group are formed on the same substrate, therefore can accurately be provided with discharge sustain electrodes to distance and the interelectrode distance in discharge enabling address of the part of discharge sustain electrodes and formation address electrode.

As a result, can have certain tolerance and realize forming the process of electrode and the process that electrode of sealing reaches another electrode relative with it.Thereby, improved the productivity ratio of the display unit of utilizing plasma discharge, and reduced manufacturing cost.

Because discharge sustain electrodes group and address electrode group intersect and form insulating barrier between discharge sustain electrodes group and address electrode group, therefore can prevent from short circuit to occur between discharge sustain electrodes group and address electrode group.

If discharge enabling address electrode forms in each emitter region, unit, barrier rib is formed on another substrate and forms phosphor layer with the position between adjacent barrier rib, and a substrate and another base plate seals make barrier rib and address electrode mate respectively, and then the opening of emitter region, unit can be done greatly and electric current can be transmitted directly on the address electrode hardly.As a result, can prevent the phase mutual interference.Because barrier rib makes discharge space obtain enough assurances and phosphor layer is formed on the whole surface at the position between adjacent barrier rib, therefore, can make the zone of phosphor layer bigger.As a result, above-mentioned effect realizes the demonstration of high brightness.

If the distance that constitutes between first and second discharge sustain electrodes of a pair of discharge sustain electrodes is set to 50 μ m or littler, then can obtain the display unit of high definition.

Since constitute distance between first and second discharge sustain electrodes of a pair of discharge sustain electrodes be provided with and discharge enabling address electrode and discharge sustain electrodes between distance basic identical, make after discharge between discharge enabling address electrode and discharge sustain electrodes begins applying high voltage, apply a relatively low voltage can keep discharge sustain electrodes to discharge, thereby show by the satisfied image of the luminous acquisition of discharge generation.

If discharge sustain electrodes and the distance of discharge enabling address interelectrode distance between first and second discharge sustain electrodes that constitute a pair of discharge sustain electrodes ± 30% scope in setting, then discharge start voltage can slowly change with the discharge interelectrode distance in enabling address in response to discharge sustain electrodes, thereby improves the degree of freedom that drive condition is set.

Owing to inject He, Ne, Ar, therefore one or more mists of Xe and Kr and to make the air pressure of injecting gas be 0.8～3.0 atmospheric pressure can make the light that sends brighter.Especially, make in its luminous display unit, produce a large amount of ultraviolet rays, thereby make the luminous brighter of phosphor layer at the activating fluorescent material layer.

If discharge enabling address electrode forms the L type, then can guarantee the sufficient length of its relative part with discharge sustain electrodes, and the beginning of being convenient to discharge.Simultaneously, the tolerance of locating when discharge enabling address electrode and address electrode interconnect, the interconnecting of be convenient to discharge enabling address electrode and address electrode.

If address electrode interconnects with the discharge hole of electrode through being formed on the insulating barrier, enabling address, then can guarantee address electrode and the discharge interelectrode insulation in enabling address, make the address electrode and the enabling address of discharging interelectrode be connected reliable.

If on the surface of discharge enabling address electrode except that address electrode and the dielectric layer on the discharge sustain electrodes, form the magnesium oxide film, then can be so that the discharge between discharge enabling address electrode and discharge sustain electrodes and constitute discharge between the first and second a pair of discharge sustain electrodes, and reduce discharge voltage.Simultaneously, make the discharge difficulty between address electrode and discharge sustain electrodes, thereby prevent phase mutual interference therebetween.

Because the dielectric layer thickness on discharge enabling address electrode and the discharge sustain electrodes is provided with to such an extent that therefore discharge and can realize on dielectric layer less than interelectrode distance.Especially, can prevent the discharge in the dielectric layer, and prevent the puncture of interelectrode insulation in the dielectric layer.

If the address electrode group that intersects with the discharge sustain electrodes group forms and the extension position of each address electrode directly links to each other with discharge enabling address electrode along the side surface of insulating barrier through insulating barrier, then address electrode can be stablized with the enabling address electrode that discharges and interconnect reliably.Because the assembling of display unit does not need to form contact hole, therefore can simplify its manufacture process.

If on another substrate one side, reflectance coating is set, then be reflected film reflection of the light of directive second substrate one side of the light that is sent.Thereby, when substrate one side that forms from electrode as the user is watched the image of demonstration, can prevent scattering and disappearing and improving brightness of light.

If reflectance coating is arranged on first substrate, one side, then be reflected film reflection of the light of directive first substrate one side of the light that is sent.Thereby, when second substrate, one side that forms from electrode as the user is watched the image of demonstration, can prevent scattering and disappearing and improving brightness of light.

Because discharge sustain electrodes and end thereof directly cover with dielectric film, degenerate even be arranged on the insulating properties of the insulating barrier under the address electrode, also can guarantee the insulating properties of the satisfaction between address electrode and discharge sustain electrodes.Can prevent discharge sustain electrodes and end and the oxidized or distillation of discharge enabling address electrode in the heat treatment of manufacture process.Thereby, can obtain the display unit of high reliability.

Because the thickness of dielectric film is set to 10 μ m-100 μ m, therefore can guarantee the insulating properties of dielectric film.Can reduce forming the required number of steps of dielectric film, and the transparency of dielectric film can be guaranteed.

If dielectric film then do not need to form dielectric layer again, and dielectric layer thickness can reduce as dielectric layer.

Owing to, so can simplify the setting of electrode through insulating barrier and discharge sustain electrodes group the address electrode group that intersects and whole formation of enabling address electrode group while of discharging.

Because address electrode group and whole formation of discharge enabling address electrode group while that the dielectric film of formation covers the discharge sustain electrodes group and intersects with the discharge sustain electrodes group, so can simplify the setting of electrode.

In addition, degenerate even be arranged on the insulating properties of the insulating barrier under the address electrode, dielectric film also can guarantee the insulating properties of the satisfaction between address electrode and discharge sustain electrodes.

When forming insulating barrier, can prevent in the heat treatment discharge sustain electrodes and the end is oxidized or distillation.

The preferred embodiments of the present invention have been described with reference to the drawings above, have been noted that the invention is not restricted to the embodiments described, those skilled in the art can make variations and modifications and not break away from the spirit and scope of the invention that claims limit.

Claims (41)

1, a kind of AC drive-type display apparatus that utilizes plasma discharge comprises:

The discharge sustain electrodes group that constitutes by a plurality of discharge sustain electrodes on the substrate;

The address electrode group that constitutes by a plurality of address electrodes on described substrate;

The discharge enabling address electrode group that constitutes as a plurality of discharges enabling address electrode of the part of described address electrode group and

At least be formed on the dielectric layer on described discharge sustain electrodes group and the described discharge enabling address electrode group.

2, display unit as claimed in claim 1 wherein, is formed with phosphor layer on another substrate relative with a described substrate.

3, display unit as claimed in claim 1, wherein, described discharge sustain electrodes group and described address electrode are formed intersection mutually, and are formed with insulating barrier between described discharge sustain electrodes group and described address electrode group.

4, display unit as claimed in claim 2, wherein, described discharge sustain electrodes group and described address electrode are formed intersection mutually, and are formed with insulating barrier between described discharge sustain electrodes group and described address electrode group.

5, display unit as claimed in claim 2, wherein, described discharge enabling address electrode forms in each emitter region, unit, on described another substrate, be formed with barrier rib between adjacent barrier rib, forming described phosphor layer, and seal a described substrate with described another substrate so that described barrier rib is mutual corresponding separately with described address electrode.

6, display unit as claimed in claim 1, the distance between the electrode pair that first and second discharge sustain electrodes of wherein said discharge sustain electrodes group are formed is set to 50 μ m or littler.

7, display unit as claimed in claim 2, the distance between the electrode pair that first and second discharge sustain electrodes of wherein said discharge sustain electrodes group are formed is set to 50 μ m or littler.

8, display unit as claimed in claim 1, the electricity that first and second discharge sustain electrodes of wherein said discharge sustain electrodes group are formed and to distance and the distance between described discharge enabling address electrode and described discharge sustain electrodes be provided with basic identically.

9, display unit as claimed in claim 2, distance between the electrode pair that first and second discharge sustain electrodes of wherein said discharge sustain electrodes group are formed and the distance between described discharge enabling address electrode and described discharge sustain electrodes are provided with basic identically.

10, display unit as claimed in claim 1 is provided with in 30% the scope of the described distance of the described distance between wherein said discharge enabling address electrode and described discharge sustain electrodes between the electrode pair that first and second discharge sustain electrodes of described discharge sustain electrodes group are formed.

11, display unit as claimed in claim 2 is provided with in 30% the scope of the described distance of the described distance between wherein said discharge enabling address electrode and described discharge sustain electrodes between the electrode pair that first and second discharge sustain electrodes of described discharge sustain electrodes group are formed.

12, display unit as claimed in claim 1, one or more He wherein, Ne, Ar, Xe, Kr gas inject and make that the pressure of the gas that injected is 0.8～3.0 atmospheric pressure.

13, display unit as claimed in claim 2, one or more He wherein, Ne, Ar, Xe, Kr gas inject and make that the pressure of the gas that injected is 0.8～3.0 atmospheric pressure.

14, display unit as claimed in claim 3, wherein said discharge enabling address electrode forms the L type.

15, display unit as claimed in claim 4, wherein said discharge enabling address electrode forms the L type.

16, display unit as claimed in claim 3, wherein said address electrode and described discharge enabling address electrode interconnect by the hole that is arranged on the described insulating barrier.

17, display unit as claimed in claim 4, wherein said address electrode and described discharge enabling address electrode interconnect by the hole that is arranged on the described insulating barrier.

18, display unit as claimed in claim 1 wherein is formed with magnesium oxide layer on the described dielectric layer on electricity power of the described discharge enabling address except that described address electrode and the described discharge sustain electrodes.

19, display unit as claimed in claim 2 wherein is formed with magnesium oxide layer on described discharge enabling address electrode except that described address electrode and the described dielectric layer on the described discharge sustain electrodes.

20, display unit as claimed in claim 1, the described dielectric layer thickness on wherein said discharge enabling address electrode and the described discharge sustain electrodes is less than the distance between discharge sustain electrodes.

21, display unit as claimed in claim 2, the described dielectric layer thickness on wherein said discharge enabling address electrode and the described discharge sustain electrodes is less than the distance between discharge sustain electrodes.

22, display unit as claimed in claim 1, wherein the described address electrode group that intersects with described discharge sustain electrodes group forms through an insulating barrier, and the extension position of described each address electrode directly links to each other with the described enabling address electrode that respectively discharges along the survey surface of described insulating barrier.

23, display unit as claimed in claim 2, wherein the described address electrode group that intersects with described discharge sustain electrodes group forms through an insulating barrier, and the extension position of described each address electrode directly links to each other with the described enabling address electrode that respectively discharges along the side surface of described insulating barrier.

24, display unit as claimed in claim 1 also comprises: the reflectance coating on described another substrate one side.

25, display unit as claimed in claim 2 also comprises: the reflectance coating on described another substrate one side.

26, display unit as claimed in claim 1 also comprises: the reflectance coating on a described substrate one side.

27, display unit as claimed in claim 2 also comprises: the reflectance coating on a described substrate one side.

28, display unit as claimed in claim 1, wherein said discharge sustain electrodes and end thereof directly cover with an insulating barrier.

29, display unit as claimed in claim 2, wherein said discharge sustain electrodes and end thereof directly cover with an insulating barrier.

30, display unit as claimed in claim 3, wherein said discharge sustain electrodes and end thereof and described discharge enabling address electrode directly cover with an insulating barrier.

31, display unit as claimed in claim 4, wherein said discharge sustain electrodes and end thereof and described discharge enabling address electrode directly cover with an insulating barrier.

32, display unit as claimed in claim 28, the thickness of wherein said insulating barrier are 10 μ m-100 μ m.

33, display unit as claimed in claim 30, the thickness of wherein said insulating barrier are 10 μ m-100 μ m.

34, display unit as claimed in claim 29, the thickness of wherein said insulating barrier are 10 μ m-100 μ m.

35, display unit as claimed in claim 31, the thickness of wherein said insulating barrier are 10 μ m-100 μ m.

36, display unit as claimed in claim 30, wherein said insulating barrier are also as described dielectric layer.

37, as claim 31 described display unit, wherein said insulating barrier is also as described dielectric layer.

38, display unit as claimed in claim 1 is wherein through an insulating barrier and crossing described address electrode group and the formation continuously simultaneously of described discharge enabling address electrode group of described discharge sustain electrodes group.

39, display unit as claimed in claim 1 wherein forms a dielectric film covering described discharge sustain electrodes group, and protects described address electrode group and the described discharge enabling address electrode group that special electrode group intersects with described discharge and form continuously simultaneously.

40, display unit as claimed in claim 2 is wherein through an insulating barrier and crossing described address electrode group and the formation continuously simultaneously of described discharge enabling address electrode group of described discharge sustain electrodes group.

41, display unit as claimed in claim 2 wherein forms a dielectric film covering described discharge sustain electrodes group, and forms continuously simultaneously with described address electrode group and described discharge enabling address electrode group that described discharge sustain electrodes group intersects.

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