CN113555305A - Parallel rotary transmission mechanism - Google Patents
Parallel rotary transmission mechanism Download PDFInfo
- Publication number
- CN113555305A CN113555305A CN202111103433.6A CN202111103433A CN113555305A CN 113555305 A CN113555305 A CN 113555305A CN 202111103433 A CN202111103433 A CN 202111103433A CN 113555305 A CN113555305 A CN 113555305A
- Authority
- CN
- China
- Prior art keywords
- parallel
- groups
- tray
- plate
- connecting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Transmission Devices (AREA)
Abstract
The invention discloses a parallel rotary conveying mechanism which comprises a top plate, a universal shaft, a first station side plate and a second station side plate, wherein two groups of the first station side plate and two groups of the second station side plate are arranged. Drive the driving shaft through actuating mechanism and rotate, can drive first station curb plate and second station curb plate when the driving shaft rotates and rotate, and first station curb plate and second station curb plate can drive another a set of first station curb plate and second station curb plate rotation through the universal shaft respectively, first parallel tray and the parallel tray of second can rotate and keep horizontal angle unchangeable simultaneously this moment, drive mechanism's structure has been simplified to this kind of mode, it uses to need not the multiunit structure combination, prevent the unstable condition of system operation, semiconductor chip's production efficiency has been improved greatly, moreover, the steam generator is simple in structure, production and use cost are lower, be convenient for maintain and safeguard simultaneously.
Description
Technical Field
The invention belongs to the field of semiconductor chip production equipment, and particularly relates to a parallel rotary conveying mechanism.
Background
The semiconductor chip is a semiconductor device which is etched and wired on a semiconductor wafer and can realize a certain function, the most common method for producing high-purity single crystal semiconductor material at present is called a Czochralski method, the process comprises the steps of putting a single crystal seed crystal into dissolved liquid with the same material, slowly pulling the seed crystal upwards in a rotating mode, and when the seed crystal is pulled, the solute is solidified along the interface of the solid and the liquid, and the solute can be uniformly heated by the rotation;
in the chip manufacturing process, the wafer is often subjected to multi-station transmission, a traditional transmission mechanism needs multiple sets of power to perform complex parallel and vertical motion combination so as to meet the requirement of multi-station positioning, but due to the combination of multiple sets of power systems, the system can be unstable in operation, and the production efficiency of the chip is greatly reduced.
Therefore, the parallel rotation transmission mechanism is provided to solve the problems in the prior art, so that the system is more stable in operation, and the production efficiency of the chip is improved.
Disclosure of Invention
The present invention is directed to a parallel rotation transmission mechanism, so as to solve the problems of unstable system operation and reduced chip production efficiency in the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme: the parallel rotary conveying mechanism comprises a top plate, universal shafts, a first station side plate and a second station side plate, wherein the first station side plate and the second station side plate are respectively provided with two groups, the first station side plate comprises a first connecting plate and a first connecting arm, the second station side plate comprises a second connecting plate and a second connecting arm, the first connecting plate and the second connecting plate are respectively of a disc-shaped structure, the first connecting arm is integrally formed on the side wall of the first connecting plate, the second connecting arm is integrally formed on the side wall of the second connecting plate, a first parallel tray is rotatably connected between the two groups of the first connecting arms, a second parallel tray is rotatably connected between the two groups of the second connecting arms, and the universal shafts are respectively and fixedly mounted between the two groups of the first connecting plates and between the two groups of the second connecting plates;
a driving shaft is fixedly mounted between the first connecting plate and the second connecting plate, a driving mechanism is arranged between the driving shaft and the top plate, driven shafts are mounted at the center parts of the first connecting plate and the second connecting plate, two groups of supporting frames are mounted at the bottom of the top plate, and the driven shafts are respectively connected to the surfaces of the two groups of supporting frames in a rotating mode.
Preferably, actuating mechanism includes motor, driving gear, drive chain and driven gear, there is the motor on the surface of roof through frame fixed mounting, the driving gear is installed to the output of motor, the fixed surface of driving shaft has driven gear, be connected through the drive chain transmission between driving gear and the driven gear.
Preferably, the top of roof has the protective housing through screw fixed mounting, the output of driving gear and motor all sets up in the inside of protective housing.
Preferably, the bottom welding of first parallel tray has the rotation foot, the surface of rotating the foot is provided with the connecting axle, and the connecting axle runs through in the surface of rotating foot and first connecting arm, the both ends threaded connection of connecting axle has locking bolt.
Preferably, the outer wall of the connecting shaft is sleeved with a rotating sleeve, the connecting shaft is rotatably connected to the surface of the first connecting arm through the rotating sleeve, and the rotating foot and the first parallel tray are attached to the surface of the rotating sleeve.
Preferably, the outer wall of connecting axle has cup jointed lubricated pad and lock washer, lubricated pad laminating in the surface of first connecting arm, lock washer laminates in lubricated pad's surface.
Preferably, one set of the locking bolts is attached to the surface of the locking washer, and the other set of the locking bolts is attached to the surface of the rotating foot through the locking washer.
Preferably, one end of each of the driving shaft and the universal shaft is arranged at the central part of the first connecting plate and the central part of the second connecting plate, and one end of each of the driving shaft, the first connecting plate, the second connecting plate and the universal shaft is arranged concentrically.
Preferably, the first parallel tray and the second parallel tray are parallel to the top plate, and at least six groups of the first parallel tray and the second parallel tray are arranged.
Preferably, the two groups of first connecting plates and the two groups of second connecting plates are eccentrically arranged, the linear distance between the midpoints of the two groups of first connecting plates is 50cm, and the linear distance between the midpoints of the two groups of second connecting plates is 70 cm.
Preferably, the two groups of rotating feet are arranged, the two groups of rotating feet are distributed in a central symmetry mode around the center of the first parallel tray, and the installation mode of the second parallel tray is the same as that of the first parallel tray.
Preferably, the number of the first connecting arms and the second connecting arms is twice the number of the first parallel trays and the second parallel trays, and the first connecting arms and the second connecting arms are distributed on the side walls of the first connecting plate and the second connecting plate at equal intervals.
Preferably, the first parallel tray and the second parallel tray are both in an octagonal structure, and the inner diameter of the first parallel tray is 1.2-1.4 times that of the second parallel tray.
The invention has the technical effects and advantages that: compared with the prior art, the parallel rotation transmission mechanism provided by the invention has the following advantages:
drive the driving shaft through actuating mechanism and rotate, can drive first station curb plate and second station curb plate when the driving shaft rotates and rotate, and first station curb plate and second station curb plate can drive another a set of first station curb plate and second station curb plate rotation through the universal shaft respectively, first parallel tray and the parallel tray of second can rotate and keep horizontal angle unchangeable simultaneously this moment, drive mechanism's structure has been simplified to this kind of mode, it uses to need not the multiunit structure combination, prevent the unstable condition of system operation, semiconductor chip's production efficiency has been improved greatly, moreover, the steam generator is simple in structure, production and use cost are lower, be convenient for maintain and safeguard simultaneously.
Drawings
FIG. 1 is a schematic front view of the present invention;
FIG. 2 is a schematic bottom view of the present invention;
FIG. 3 is a schematic view of a connection structure of a first connecting arm and a first parallel tray according to the present invention;
fig. 4 is a front view of the side plate of the first station of the present invention.
In the figure: 1. a first parallel tray; 2. a first connecting plate; 3. a drive shaft; 4. a first connecting arm; 5. a support frame; 6. a top plate; 7. a motor; 8. a protective shell; 9. a driving gear; 10. a drive chain; 11. a cardan shaft; 12. a second connecting plate; 13. a driven gear; 14. a second connecting arm; 15. a second parallel tray; 16. a driven shaft; 17. a locking washer; 18. locking the bolt; 19. rotating the sleeve; 20. a lubrication pad; 21. a connecting shaft; 22. a rotating foot; 23. a first station side plate; 24. a second station side plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The specific embodiments described herein are merely illustrative of the invention and do not delimit the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides a parallel rotary conveying mechanism as shown in figures 1-4, which comprises a top plate 6, a universal shaft 11, a first station side plate 23 and a second station side plate 24;
the first station side plate 23 and the second station side plate 24 are respectively provided with two groups, the first station side plate 23 comprises a first connecting plate 2 and a first connecting arm 4, the second station side plate 24 comprises a second connecting plate 12 and a second connecting arm 14, the first connecting plate 2 and the second connecting plate 12 are both of a disc-shaped structure, the first connecting arm 4 is integrally formed on the side wall of the first connecting plate 2, the second connecting arm 14 is integrally formed on the side wall of the second connecting plate 12, a first parallel tray 1 is rotatably connected between the two groups of first connecting arms 4, a second parallel tray 15 is rotatably connected between the two groups of second connecting arms 14, and universal shafts 11 are respectively and fixedly arranged between the two groups of first connecting plates 2 and between the two groups of second connecting plates 12;
a driving shaft 3 is fixedly arranged between the first connecting plate 2 and the second connecting plate 12, a driving mechanism is arranged between the driving shaft 3 and the top plate 6, driven shafts 16 are arranged at the central parts of the first connecting plate 2 and the second connecting plate 12, two groups of supporting frames 5 are arranged at the bottom of the top plate 6, the two groups of driven shafts 16 are respectively and rotatably connected with the surfaces of the two groups of supporting frames 5, the driving shaft 3 is driven to rotate by the driving mechanism, the first station side plate 23 and the second station side plate 24 are driven to rotate when the driving shaft 3 rotates, the first station side plate 23 and the second station side plate 24 drive the other group of first station side plate 23 and second station side plate 24 to rotate through the universal shaft 11 respectively, and at the moment, the first parallel tray 1 and the second parallel tray 15 synchronously rotate and keep the horizontal angle unchanged, so that the semiconductor chips are conveyed, and the production efficiency of the semiconductor chips is improved;
the driving mechanism comprises a motor 7, a driving gear 9, a transmission chain 10 and a driven gear 13, the motor 7 is fixedly mounted on the surface of the top plate 6 through a rack, the driving gear 9 is mounted at the output end of the motor 7, the driven gear 13 is fixed on the surface of the driving shaft 3, the driving gear 9 and the driven gear 13 are in transmission connection through the transmission chain 10, and the driving mechanism can drive the driving shaft 3, so that the normal operation of the whole device is ensured;
the top of the top plate 6 is fixedly provided with a protective shell 8 through screws, the output ends of the driving gear 9 and the motor 7 are arranged inside the protective shell 8, the protective shell 8 can protect the driving gear 9 and the transmission chain 10, and the phenomenon that the driving gear 9 and the driving gear 9 are blocked due to the fact that foreign matters enter between the transmission chain 10 and the driving gear 9 is prevented;
the bottom of the first parallel tray 1 is welded with a rotating foot 22, the surface of the rotating foot 22 is provided with a connecting shaft 21, the connecting shaft 21 penetrates through the rotating foot 22 and the surface of the first connecting arm 4, two ends of the connecting shaft 21 are in threaded connection with locking bolts 18, and the second parallel tray 15 and the first parallel tray 1 have the same structure and can rotate through the rotating foot 22;
the outer wall of the connecting shaft 21 is sleeved with the rotating sleeve 19, the connecting shaft 21 is rotatably connected to the surface of the first connecting arm 4 through the rotating sleeve 19, the rotating pins 22 and the first parallel tray 1 are attached to the surface of the rotating sleeve 19, the rotating sleeve 19 can facilitate the rotation of the rotating pins 22, and when the rotating pins 22 are disassembled, the whole body cannot rotate due to the disassembly of the rotating pins 22, so that the first parallel tray 1 and the second parallel tray 15 can be conveniently replaced;
the outer wall of the connecting shaft 21 is sleeved with a lubricating pad 20 and a locking gasket 17, the lubricating pad 20 is attached to the surface of the first connecting arm 4, the locking gasket 17 is attached to the surface of the lubricating pad 20, and the arrangement of the lubricating pad 20 can reduce the friction between the lubricating pad 20 and the first connecting arm 4, so that the friction resistance borne by the rotating foot 22 during rotation is reduced;
one group of locking bolts 18 is attached to the surface of the locking gasket 17, the other group of locking bolts 18 is attached to the surface of the rotating foot 22 through the locking gasket 17, and the rotating foot 22 is fixed through the locking bolts 18 matching with the locking gasket 17, so that the rotating foot 22 can rotate normally;
one end of the driving shaft 3 and one end of the universal shaft 11 are both arranged at the central parts of the first connecting plate 2 and the second connecting plate 12, and one end of the driving shaft 3, one end of the first connecting plate 2, one end of the second connecting plate 12 and one end of the universal shaft 11 are all concentrically arranged, so that the structure can smoothly drive the first parallel tray 1 and the second parallel tray 15 to move in a parallel state all the time through the matching of the universal shaft 11;
the first parallel tray 1 and the second parallel tray 15 are parallel to the top plate 6, at least six groups of the first parallel tray 1 and the second parallel tray 15 are arranged, a plurality of groups of the first parallel tray 1 and the second parallel tray 15 can simultaneously produce a plurality of groups of semiconductor chips, thereby improving the production efficiency of the semiconductor chips, the two groups of the rotating pins 22 are arranged, the two groups of the rotating pins 22 are distributed in central symmetry about the center of the first parallel tray 1, the installation mode of the second parallel tray 15 is the same as that of the first parallel tray 1, the first parallel tray 1 and the second parallel tray 15 are both arranged in an octagonal structure, the inner diameter of the first parallel tray 1 is 1.2-1.4 times of the inner diameter of the second parallel tray 15, and the first parallel tray 1 and the second parallel tray 15 with different sizes can convey chips with different specifications, so that the overall universality of the device is improved;
the two groups of first connecting plates 2 and the two groups of second connecting plates 12 are eccentrically arranged, the straight line distance between the midpoints of the two groups of first connecting plates 2 is 50cm, the straight line distance between the midpoints of the two groups of second connecting plates 12 is 70cm, and the first connecting plates 2 and the second connecting plates 12 are eccentrically arranged to enable the first parallel trays 1 and the second parallel trays 15 to keep parallel movement.
The quantity of first linking arm 4 and second linking arm 14 is the twice of first parallel tray 1 and the parallel tray 15 quantity of second respectively, and first linking arm 4 and second linking arm 14 are the equidistance respectively and distribute at the lateral wall of first connecting plate 2 and second connecting plate 12, and this kind of structure makes first parallel tray 1 and the parallel tray 15's of second distribution more even to be convenient for carry the chip.
When the device is used, a switch of the motor 7 is turned on, the motor 7 drives the driving gear 9, the driving gear 9 drives the driven gear 13 to rotate through the transmission chain 10 when rotating, the driven gear 13 drives the driving shaft 3 to synchronously rotate when rotating, the driving shaft 3 drives the first station side plate 23 and the second station side plate 24 to rotate when rotating, the first station side plate 23 and the second station side plate 24 drive the other group of the first station side plate 23 and the second station side plate 24 to rotate due to the limitation of the first parallel tray 1 and the second parallel tray 15 when rotating, the universal shaft 11 limits the rotation of the first station side plate 23 and the second station side plate 24, at the moment, the first parallel tray 1 and the second parallel tray 15 synchronously rotate under the driving of the first station side plate 23 and the second station side plate 24, and the first parallel tray 1 and the second parallel tray 15 can respectively rotate on the surfaces of the first connecting arm 4 and the second connecting arm 14, the first parallel tray 1 and the second parallel tray 15 are always moved in parallel with the top plate 6.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.
Claims (13)
1. Parallel rotatory transport mechanism, including roof (6), cardan shaft (11), first station curb plate (23) and second station curb plate (24), its characterized in that: two groups of first station side plates (23) and two groups of second station side plates (24) are arranged, the first station side plate (23) comprises a first connecting plate (2) and a first connecting arm (4), the second station side plate (24) comprises a second connecting plate (12) and a second connecting arm (14), the first connecting plate (2) and the second connecting plate (12) are both arranged into a disc-shaped structure, the first connecting arm (4) is integrally formed on the side wall of the first connecting plate (2), the second connecting arms (14) are integrally formed on the side walls of the second connecting plates (12), first parallel trays (1) are rotatably connected between the two groups of first connecting arms (4), second parallel trays (15) are rotatably connected between the two groups of second connecting arms (14), and universal shafts (11) are respectively and fixedly mounted between the two groups of first connecting plates (2) and between the two groups of second connecting plates (12);
fixed mounting has driving shaft (3) between first connecting plate (2) and second connecting plate (12), be provided with actuating mechanism between driving shaft (3) and roof (6), driven shaft (16) are installed with the central point of second connecting plate (12) in first connecting plate (2), two sets of support frames (5) are installed to the bottom of roof (6), and are two sets of driven shaft (16) rotate respectively and connect in the surface of two sets of support frames (5).
2. The parallel rotary transfer mechanism of claim 1, wherein: the driving mechanism comprises a motor (7), a driving gear (9), a transmission chain (10) and a driven gear (13), the surface of the top plate (6) is fixedly provided with the motor (7) through a rack, the driving gear (9) is installed at the output end of the motor (7), the surface of the driving shaft (3) is fixedly provided with the driven gear (13), and the driving gear (9) and the driven gear (13) are in transmission connection through the transmission chain (10).
3. The parallel rotary transfer mechanism of claim 2, wherein: the top of roof (6) has protective housing (8) through screw fixed mounting, the output of driving gear (9) and motor (7) all sets up in the inside of protective housing (8).
4. The parallel rotary transfer mechanism of claim 1, wherein: the bottom welding of first parallel tray (1) has rotation foot (22), the surface of rotating foot (22) is provided with connecting axle (21), and connecting axle (21) run through in the surface of rotating foot (22) and first connecting arm (4), the both ends threaded connection of connecting axle (21) has locking bolt (18).
5. The parallel rotary transfer mechanism of claim 4, wherein: the outer wall of connecting axle (21) has cup jointed and has rotated cover (19), connecting axle (21) rotates through rotating cover (19) and connects in the surface of first connecting arm (4), rotate foot (22) and first parallel tray (1) and laminate in the surface that rotates cover (19).
6. The parallel rotary transfer mechanism of claim 5, wherein: the outer wall of connecting axle (21) has cup jointed lubricated pad (20) and lock washer (17), lubricated pad (20) laminating in the surface of first connecting arm (4), lock washer (17) laminate in the surface of lubricated pad (20).
7. The parallel rotary transfer mechanism of claim 6, wherein: one group of the locking bolts (18) is attached to the surface of the locking gasket (17), and the other group of the locking bolts (18) is attached to the surface of the rotating foot (22) through the locking gasket (17).
8. The parallel rotary transfer mechanism of claim 1, wherein: the driving shaft (3) and one end of the universal shaft (11) are arranged at the central parts of the first connecting plate (2) and the second connecting plate (12), and the driving shaft (3), the first connecting plate (2), the second connecting plate (12) and one end of the universal shaft (11) are arranged concentrically.
9. The parallel rotary transfer mechanism of claim 1, wherein: the first parallel tray (1), the second parallel tray (15) and the top plate (6) are parallel to each other, and at least six groups of the first parallel tray (1) and the second parallel tray (15) are arranged.
10. The parallel rotary transfer mechanism of claim 1, wherein: the two groups of first connecting plates (2) and the two groups of second connecting plates (12) are eccentrically arranged, the linear distance between the middle points of the two groups of first connecting plates (2) is 50cm, and the linear distance between the middle points of the two groups of second connecting plates (12) is 70 cm.
11. The parallel rotary transfer mechanism of claim 4, wherein: the rotary tray is characterized in that two groups of rotary feet (22) are arranged, the two groups of rotary feet (22) are distributed in a central symmetry mode about the center of the first parallel tray (1), and the installation mode of the second parallel tray (15) is the same as that of the first parallel tray (1).
12. The parallel rotary transfer mechanism of claim 9, wherein: the number of the first connecting arms (4) and the second connecting arms (14) is twice the number of the first parallel trays (1) and the second parallel trays (15), and the first connecting arms (4) and the second connecting arms (14) are distributed at equal intervals on the side walls of the first connecting plate (2) and the second connecting plate (12).
13. The parallel rotary transfer mechanism of claim 1, wherein: the first parallel tray (1) and the second parallel tray (15) are both arranged in an octagonal structure, and the inner diameter of the first parallel tray (1) is 1.2-1.4 times that of the second parallel tray (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111103433.6A CN113555305B (en) | 2021-09-22 | 2021-09-22 | Parallel rotary transmission mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111103433.6A CN113555305B (en) | 2021-09-22 | 2021-09-22 | Parallel rotary transmission mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113555305A true CN113555305A (en) | 2021-10-26 |
| CN113555305B CN113555305B (en) | 2021-11-19 |
Family
ID=78106411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111103433.6A Active CN113555305B (en) | 2021-09-22 | 2021-09-22 | Parallel rotary transmission mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113555305B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04204535A (en) * | 1990-11-30 | 1992-07-24 | Ushio Inc | Moving mechanism and exposure device by use of same |
| JPH09186216A (en) * | 1995-12-27 | 1997-07-15 | Sony Corp | Transfer device |
| CN1831547A (en) * | 2005-03-11 | 2006-09-13 | 由田新技股份有限公司 | Detection device capable of automatic aligning detected material |
| CN101847594A (en) * | 2008-12-19 | 2010-09-29 | 韩美半导体株式会社 | Transfer apparatus for wafer cassette |
| CN101899792A (en) * | 2009-05-27 | 2010-12-01 | 贵州山力钢丝绳索具有限责任公司 | Power transmission method of strander and device thereof |
| CN205500210U (en) * | 2016-02-29 | 2016-08-24 | 广东吕顺智能科技有限公司 | Quick collating unit of product |
| CN106449485A (en) * | 2016-10-26 | 2017-02-22 | 东莞市锐祥智能卡科技有限公司 | Double interface chip package device |
| CN208898011U (en) * | 2018-07-25 | 2019-05-24 | 天津源天晟科技发展有限公司 | A kind of silicon wafer fragment and transfer structure |
-
2021
- 2021-09-22 CN CN202111103433.6A patent/CN113555305B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04204535A (en) * | 1990-11-30 | 1992-07-24 | Ushio Inc | Moving mechanism and exposure device by use of same |
| JPH09186216A (en) * | 1995-12-27 | 1997-07-15 | Sony Corp | Transfer device |
| CN1831547A (en) * | 2005-03-11 | 2006-09-13 | 由田新技股份有限公司 | Detection device capable of automatic aligning detected material |
| CN101847594A (en) * | 2008-12-19 | 2010-09-29 | 韩美半导体株式会社 | Transfer apparatus for wafer cassette |
| CN101899792A (en) * | 2009-05-27 | 2010-12-01 | 贵州山力钢丝绳索具有限责任公司 | Power transmission method of strander and device thereof |
| CN205500210U (en) * | 2016-02-29 | 2016-08-24 | 广东吕顺智能科技有限公司 | Quick collating unit of product |
| CN106449485A (en) * | 2016-10-26 | 2017-02-22 | 东莞市锐祥智能卡科技有限公司 | Double interface chip package device |
| CN208898011U (en) * | 2018-07-25 | 2019-05-24 | 天津源天晟科技发展有限公司 | A kind of silicon wafer fragment and transfer structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113555305B (en) | 2021-11-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113555305B (en) | Parallel rotary transmission mechanism | |
| CN107984468B (en) | Based on crossed roller horizontal rotation cradle head of bearing | |
| CN207390277U (en) | The dividing rotary disc device in automatic assembling machine is decomposed for iron core | |
| CN208037730U (en) | A kind of liftable cable drum fixation swivel mount | |
| CN207026917U (en) | A kind of the screwed lock mechanism for automatic assembling machine people | |
| CN214399024U (en) | Conveyor is used in water-based ink processing | |
| CN205294012U (en) | Cavity carousel structure | |
| CN208648613U (en) | Lifting device and mould pressing foaming machine | |
| CN112815716B (en) | Curing furnace, and pipe column conveying and rotating device and method used in curing furnace | |
| CN202988139U (en) | Annular material conveying device | |
| CN218892751U (en) | Conveying mechanism for electronic accessories | |
| CN213378383U (en) | Mechanism for automatically wiping and cleaning outer wall of round bottle | |
| CN220392934U (en) | Anti-skid adjusting device of cable conveyor | |
| CN111939080A (en) | Large-scale industrialized pill dropping machine for processing Naoan pill dropping Chinese patent medicine | |
| CN216888515U (en) | Intelligent conveyor based on PLC control | |
| CN219312124U (en) | Mechanical arm is thrown to press plastic post | |
| CN211896001U (en) | Filling device is used in daily chemicals production and processing | |
| CN220145606U (en) | Polishing machine for machining engine crankshaft | |
| CN218079184U (en) | Intelligent apple sorting and packaging device | |
| CN214020407U (en) | A mixer for garrulous food of baby | |
| CN219182121U (en) | Fresh corn husker | |
| CN219844601U (en) | Automatic feeding equipment for microalgae baits | |
| CN218806002U (en) | Core shaft transfer device | |
| CN219468737U (en) | Conveying support for optical axis | |
| CN221295058U (en) | Combined auger conveying device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |