CN113532979A - 一种铝钪靶材样品的制备方法 - Google Patents
一种铝钪靶材样品的制备方法 Download PDFInfo
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- CN113532979A CN113532979A CN202110640369.9A CN202110640369A CN113532979A CN 113532979 A CN113532979 A CN 113532979A CN 202110640369 A CN202110640369 A CN 202110640369A CN 113532979 A CN113532979 A CN 113532979A
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- sample
- aluminum scandium
- area
- sampled
- scandium target
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- LUKDNTKUBVKBMZ-UHFFFAOYSA-N aluminum scandium Chemical compound [Al].[Sc] LUKDNTKUBVKBMZ-UHFFFAOYSA-N 0.000 title claims abstract description 54
- 238000002360 preparation method Methods 0.000 title claims abstract description 14
- 239000013077 target material Substances 0.000 title claims description 17
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000004506 ultrasonic cleaning Methods 0.000 claims abstract description 18
- 238000010008 shearing Methods 0.000 claims abstract description 15
- 238000000227 grinding Methods 0.000 claims abstract description 13
- 238000001035 drying Methods 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims description 21
- 238000007789 sealing Methods 0.000 claims description 6
- 238000002791 soaking Methods 0.000 claims description 6
- 238000007664 blowing Methods 0.000 claims description 5
- 238000005498 polishing Methods 0.000 claims description 4
- 230000002745 absorbent Effects 0.000 claims description 3
- 239000002250 absorbent Substances 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 239000004745 nonwoven fabric Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 238000010926 purge Methods 0.000 claims description 2
- 239000000523 sample Substances 0.000 claims 16
- 239000012496 blank sample Substances 0.000 claims 5
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 12
- 229910000542 Sc alloy Inorganic materials 0.000 abstract description 8
- 238000005070 sampling Methods 0.000 abstract description 7
- 238000012216 screening Methods 0.000 abstract description 6
- 239000000126 substance Substances 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 239000012535 impurity Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 238000012360 testing method Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 244000137852 Petrea volubilis Species 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
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CN202110640369.9A CN113532979A (zh) | 2021-06-08 | 2021-06-08 | 一种铝钪靶材样品的制备方法 |
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CN202110640369.9A CN113532979A (zh) | 2021-06-08 | 2021-06-08 | 一种铝钪靶材样品的制备方法 |
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CN113532979A true CN113532979A (zh) | 2021-10-22 |
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CN202110640369.9A Pending CN113532979A (zh) | 2021-06-08 | 2021-06-08 | 一种铝钪靶材样品的制备方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115139208A (zh) * | 2022-07-26 | 2022-10-04 | 先导薄膜材料(广东)有限公司 | 一种针对成品靶材的表面处理方法 |
Citations (7)
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CN109855933A (zh) * | 2019-01-14 | 2019-06-07 | 大冶特殊钢股份有限公司 | 一种金相试样制备方法 |
CN111521462A (zh) * | 2020-05-06 | 2020-08-11 | 中国航发成都发动机有限公司 | 一种涂层的金相制备方法 |
CN111781043A (zh) * | 2020-07-09 | 2020-10-16 | 江苏隆达超合金航材有限公司 | 一种镍基高温合金氧含量测量的样品制备方法 |
CN111855337A (zh) * | 2019-04-26 | 2020-10-30 | 国标(北京)检验认证有限公司 | 一种制备高纯钌靶ebsd样品的方法 |
CN112067643A (zh) * | 2020-09-08 | 2020-12-11 | 宁波江丰电子材料股份有限公司 | 一种高纯铝靶材组件焊接扩散层sem检测的制样方法 |
KR20210030029A (ko) * | 2019-09-09 | 2021-03-17 | 현대위아 주식회사 | 알루미늄 분석 시편 전처리 방법 |
CN112548069A (zh) * | 2020-11-04 | 2021-03-26 | 深圳市众诚达应用材料科技有限公司 | 铝钪合金靶材的制备方法 |
-
2021
- 2021-06-08 CN CN202110640369.9A patent/CN113532979A/zh active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109855933A (zh) * | 2019-01-14 | 2019-06-07 | 大冶特殊钢股份有限公司 | 一种金相试样制备方法 |
CN111855337A (zh) * | 2019-04-26 | 2020-10-30 | 国标(北京)检验认证有限公司 | 一种制备高纯钌靶ebsd样品的方法 |
KR20210030029A (ko) * | 2019-09-09 | 2021-03-17 | 현대위아 주식회사 | 알루미늄 분석 시편 전처리 방법 |
CN111521462A (zh) * | 2020-05-06 | 2020-08-11 | 中国航发成都发动机有限公司 | 一种涂层的金相制备方法 |
CN111781043A (zh) * | 2020-07-09 | 2020-10-16 | 江苏隆达超合金航材有限公司 | 一种镍基高温合金氧含量测量的样品制备方法 |
CN112067643A (zh) * | 2020-09-08 | 2020-12-11 | 宁波江丰电子材料股份有限公司 | 一种高纯铝靶材组件焊接扩散层sem检测的制样方法 |
CN112548069A (zh) * | 2020-11-04 | 2021-03-26 | 深圳市众诚达应用材料科技有限公司 | 铝钪合金靶材的制备方法 |
Non-Patent Citations (3)
Title |
---|
ZHU, L等: "The influence of powder characteristics on mechanical properties of Al2O3-TiC-Co ceramic materials prepared by Co-coated Al2O3/TiC powders", INTERNATIONAL JOURNAL OF REFRACTORY METALS AND HARD MATERIALS * |
李明: "基于Al-Mg-Si-Sc-Zr合金的商用车轮毂轻量化全流程设计及优化", 中国优秀博士学位论文全文数据库工程科技Ⅰ辑 * |
高远 等: "热压烧结P型碲化铋基热电材料的显微组织与性能", 粉末冶金工业 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115139208A (zh) * | 2022-07-26 | 2022-10-04 | 先导薄膜材料(广东)有限公司 | 一种针对成品靶材的表面处理方法 |
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Effective date of registration: 20230625 Address after: In the workshop of Leading Film Materials Co., Ltd. at the intersection of Longzihu Road and Tongnenenebb Huainan Road, Xinzhan District, Hefei City, Anhui Province, 230000 Applicant after: Leading Film Materials (Anhui) Co.,Ltd. Address before: 230000 northwest corner of the intersection of Longzihu road and tonghuai South Road, Xinzhan District, Hefei City, Anhui Province Applicant before: Pilot film materials Co.,Ltd. |
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Application publication date: 20211022 |