CN113488777B - Graphene patch type terahertz Fabry-Perot resonant antenna and implementation method thereof - Google Patents
Graphene patch type terahertz Fabry-Perot resonant antenna and implementation method thereof Download PDFInfo
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- CN113488777B CN113488777B CN202110647297.0A CN202110647297A CN113488777B CN 113488777 B CN113488777 B CN 113488777B CN 202110647297 A CN202110647297 A CN 202110647297A CN 113488777 B CN113488777 B CN 113488777B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/12—Supports; Mounting means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q13/00—Waveguide horns or mouths; Slot antennas; Leaky-waveguide antennas; Equivalent structures causing radiation along the transmission path of a guided wave
- H01Q13/02—Waveguide horns
- H01Q13/0275—Ridged horns
Abstract
A graphene patch type terahertz Fabry-Perot resonant antenna and an implementation method thereof are disclosed, and the method comprises the following steps: the mounting fixture, fabry-perot resonant structure and add spine feed loudspeaker that from top to bottom set gradually, wherein: the fixed clamp is connected with the ridge feed source loudspeaker, the Fabry-Perot resonant structure is fixedly arranged above the ridge feed source loudspeaker and forms a Fabry-Perot resonant cavity together with the metal upper surface of the ridge feed source loudspeaker, and electromagnetic waves radiated by the ridge feed source loudspeaker oscillate in the Fabry-Perot resonant structure and form required narrow-beam electromagnetic radiation in the main direction after being regulated and controlled. According to the terahertz antenna, the patterned graphene patch structure is applied to the terahertz antenna, so that excellent performance can be provided, rich design freedom is introduced, the terahertz antenna works in a terahertz frequency band, and the terahertz antenna has the advantage that the beam width is easy to design and regulate.
Description
Technical Field
The invention relates to a technology in the field of microwave communication, in particular to a terahertz Fabry-Perot resonant antenna based on a graphene patch type structure and an implementation method thereof.
Background
The Fabry-Perot resonant structure is a common method for realizing a narrow-beam antenna in the prior art, and the working principle of the Fabry-Perot resonant structure is that when the frequency of incident electromagnetic waves meets a resonant condition, the directivity coefficient of corresponding frequency has a high peak value, and the amplitude of the directivity coefficient corresponding to the frequency which does not meet the resonant condition is small. The Fabry-Perot resonant (FPR) antenna consists of a Fabry-Perot resonant cavity and an antenna feed source, wherein the resonant cavity consists of two reflecting surfaces, one of the reflecting surfaces is usually a metal reflecting surface with total reflection characteristic, the other reflecting surface is a partial reflecting surface with partial reflection characteristic and usually consists of a Frequency Selective Surface (FSS), and the distance between the two reflecting surfaces and the reflection coefficient surface of the partial reflecting surface jointly determine the resonant frequency. After the electromagnetic wave is emitted from the antenna feed source, partial reflection and partial transmission occur on the partial reflecting surface, the total reflection occurs on the metal reflecting surface, and the oscillation is carried out back and forth in the resonant cavity. When the resonance condition is satisfied, the forward radiation of the antenna is increased, the beam width is reduced, and the directivity is enhanced.
Most of the conventional Fabry-Perot resonant antennas work in microwave and millimeter wave low frequency bands, and FPR antennas working in terahertz frequency bands are rare. Firstly, with the increase of the working frequency, higher requirements are put forward on the precision of the processing technology. Secondly, for the FPR antenna of the terahertz frequency band, the specification of the terahertz frequency band is less due to the limitation of the thickness of the medium of the middle layer serving as a resonant cavity.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides the graphene patch type terahertz Fabry-Perot resonant antenna and the implementation method thereof, the patterned graphene patch structure is applied to the terahertz antenna, so that excellent performance can be provided, rich design freedom is introduced, the antenna works in a terahertz frequency band, and the advantage that the beam width is easy to design and regulate is achieved. The provided process for patterning the metal-graphene mixed structure can be used for processing and realizing the designed terahertz antenna.
The invention is realized by the following technical scheme:
the invention relates to a terahertz narrow-beam Fabry-Perot resonant antenna based on a metal-graphene mixed structure, which comprises: from top to bottom set gradually mounting fixture, fabry-perot resonant structure and add spine feed loudspeaker, wherein: the fixed clamp is connected with the ridge feed source horn, the Fabry-Perot resonant structure is fixedly arranged above the ridge feed source horn and forms a Fabry-Perot resonant cavity together with the upper metal surface of the ridge feed source horn, and electromagnetic waves radiated by the ridge feed source horn oscillate in the Fabry-Perot resonant structure and form required narrow-beam electromagnetic radiation in the main direction after being regulated and controlled.
The fixing clamp is made of a medium with a low dielectric constant and low loss, and the specific medium comprises: polylactic acid (PLA);
the Fabry-Perot resonant structure comprises: metal pattern and graphite alkene pattern on the dielectric layer are located in proper order, wherein: the graphene pattern and the metal pattern have conductivity and form a reflective surface to achieve partial reflection of electromagnetic waves.
The dielectric layer has no conductivity and is used for dividing (1) a partial reflecting surface and (2) the upper surface of the ridge feed source loudspeaker serving as a metal reflecting surface.
The ridged feed horn comprises: loudspeaker main part, set up respectively in the metal spine and the waveguide mouth at loudspeaker main part both ends, wherein: the upper side of the horn main body is a metal upper surface, the metal ridge is positioned on one side of the horn main body close to the Fabry-Perot resonant structure, and the waveguide port for external connection feeding is positioned on one side of the bottom of the horn far away from the Fabry-Perot resonant structure.
The Fabry-Perot resonant structure is realized by a metal-graphene mixed structure process, and comprises the following steps:
And 2, spin-coating a photoresist on the substrate and drying to obtain a complete and uniform photoresist layer.
And 3, placing the mask on the substrate covered with the complete and uniform photoresist layer, and carrying out exposure, development and etching operations to form a patterned photoresist layer.
Step 4, using electron beam evaporation process to evaporate a uniform metal film on the substrate, wherein the metal film is usually nickel or copper.
And 5, putting the substrate into a photoresist solvent, and removing the patterned photoresist to obtain the patterned metal film.
And step 6, placing the substrate into a tubular reaction furnace, and growing patterned graphene on the patterned metal film by using a Chemical Vapor Deposition (CVD) method to finally obtain the graphene-loaded patch structure.
Technical effects
Most of the existing Fabry-Perot antennas work in lower frequency bands such as microwave and millimeter wave bands, and the Fabry-Perot antennas working in terahertz frequency bands are rare. With the increase of the working frequency, the common processing technology under the low frequency can not meet the technological requirements of the antenna. In addition, due to the characteristic that the electric conductivity of the graphene is adjustable, a new degree of freedom is introduced to a partial reflecting surface in the Fabry-Perot antenna. At present, due to the fact that the existing work of some Fabry-Perot antennas which utilize the adjustable characteristic of the conductivity of graphene to achieve the reconfigurable terahertz frequency band resonant frequency adopts complete non-graphical graphene, the reflection characteristic of a partial reflection surface is difficult to adjust, and the beam width of the antenna cannot be accurately controlled. In order to adjust the characteristics of the partial reflecting surface, the graphene patch type frequency selection surface is designed to be the partial reflecting surface, more design freedom degrees are introduced compared with the whole piece of graphene, and a metal-graphene mixed structure process is provided to ensure the feasibility of actual antenna processing.
Compared with the prior art, the method has the advantages that the patterned graphene, specifically the patch type graphene is applied to the design of a part of reflecting surfaces in the Fabry-Perot antenna, compared with the traditional metal material and the whole piece of graphene, more design freedom degrees are introduced, the size of a patch structure is optimized, the Fabry-Perot antenna with the beam width meeting specific conditions is realized, and the processing technology of a metal-graphene mixed structure is provided for ensuring the feasibility of design.
Drawings
FIGS. 1 (a) and 1 (b) are schematic views of the overall structure of the present invention;
FIG. 2 is a schematic view of a holding fixture of the present invention;
FIG. 3 is a schematic diagram of a Fabry-Perot resonant structure of the present invention;
fig. 4 is a schematic view of a local amplification of a graphene pattern of a fabry-perot resonant structure according to the present invention;
fig. 5 is a schematic diagram of a basic unit structure of a fabry-perot resonant structure according to the present invention;
fig. 6 (a) and 6 (b) are schematic equivalent circuit diagrams of a monolithic graphene and a frequency selective surface of a metal-graphene hybrid structure in the present invention;
fig. 7 (a) is a reflection coefficient curve of a monolithic graphene and a metal-graphene mixed structure frequency selective surface in the present invention; fig. 7 (b) is a transmission coefficient curve of a frequency selective surface of a monolithic graphene and a metal-graphene hybrid structure in the present invention;
fig. 8 is a schematic view of a processing process flow of the metal-graphene mixed structure provided by the present invention;
FIG. 9 is a schematic view of a ridged feed horn of the present invention;
FIGS. 10 (a) and 10 (b) show terahertz ridged feed horn and FPR antenna at 310GHz,
and a normalized pattern at 90 °;
in the figure: the feed horn comprises a fixed clamp 1, a Fabry-Perot resonant structure 2, a graphene pattern 21 of the Fabry-Perot resonant structure, a metal pattern 22 of the Fabry-Perot resonant structure, a dielectric layer 23 of the Fabry-Perot resonant structure, a graphene pattern 211 of a basic unit structure, a metal pattern 221 of the basic unit structure, a dielectric layer 231 of the basic unit structure, a ridge feed horn 3, a metal upper surface 31 of the ridge feed horn, a horn main body 32 of the ridge feed horn, a ridge feed horn metal ridge 33 and a standard rectangular waveguide port 34 of the ridge feed horn.
Detailed Description
In this embodiment, a patterned graphene with a patch type structure is adopted, the unit period is p, and the size of the patch is q. The graphene patch type partial reflecting surface has a band elimination characteristic, can be equivalent to a series-parallel resonant circuit of a capacitor, an inductor and a resistor, and the graphene patch resistor introduced by the finite conductivity real part of graphene is R GP The imaginary part of the conductivity being introducedInductance of L GP The inductance and capacitance introduced by the metal patch are respectively L MP 、C MP . In addition, the patch itself provides the inductance L P But because of the small values, their effect can generally be ignored for analysis.
When the in-band conductivity is dominant, the graphene can be analyzed by using a Drude model, and the surface conductivity of the graphene is as follows: σ = σ 0 /(1 + j ω τ), where: direct current conductivity of graphene
When the unit period p of the graphene patch structure is much less than half wavelength, the surface impedance may be approximated as:
wherein the equivalent capacitance
ε 0 Is a vacuum dielectric constant of ∈ eff Is the equivalent relative permittivity; when the graphene patch is arranged in two layers of media made of the same material, the equivalent relative dielectric constant of the graphene patch is equal to the relative dielectric constant of the dielectric substrate, namely: epsilon eff ＝ε r (ii) a Equivalent relative permittivity ε when graphene patch is interposed between air and medium eff ＝(ε r +1)/2。
Substituting the conductivity expression of the graphene to obtain the surface impedance of the graphene patch type structure
Wherein: z is a linear or branched member GP1 Is an inductive reactance of a resistor and an inductor connected in series, Z GP2 Is an equivalent capacitance; the resistance and inductance values of graphene are:
for the whole graphene, the graphene can be equivalent to a series resonance circuit of an inductor and a resistor, and the resistance of the graphene introduced by the finite real part of the conductivity of the graphene is R G Inductance introduced by the imaginary part of the conductivityIs L G 。
The surface impedance of the whole graphene sheet is: z G ＝1/σ G ＝(1+jωτ)/σ 0 ＝R G +jωL G The resistance and inductance of the whole graphene are: r is G ＝1/σ 0 ，L G ＝τ/σ 0 . Comparing the equivalent impedance of the FSS with that of the whole graphene, the difference between the resistance and the inductance of the graphene is p/(p-q) times. In addition, because the patch structure introduces inter-chip capacitance, the graphene patch type structure has resonance characteristics.
The imaginary part of the surface impedance of the whole graphene is always larger than zero, the whole graphene is inductive at any frequency, and the magnitude of the imaginary part is in a linear relation with the magnitude of the frequency. The patch type graphene FSS has a resonant frequency, the imaginary part of the surface impedance of the plane where the graphene is located is smaller than zero when the imaginary part is lower than the resonant frequency, and is larger than zero when the imaginary part is higher than the resonant frequency, namely, the imaginary part is lower than the resonant frequency, the plane where the graphene is located is capacitive, and the imaginary part is inductive when the imaginary part is higher than the resonant frequency. As the frequency increases, the sensitivity provided by the patch-type FSS graphene increases gradually, and exceeds the sensitivity provided by the whole graphene above a certain frequency, that is, the graphene surface of the patch-type FSS graphene can provide a higher inductance value than the whole graphene after reaching a certain frequency.
As shown in fig. 1, a terahertz fabry-perot resonator antenna based on a metal-graphene hybrid structure according to this embodiment includes: fixed clamp 1, fabry-perot resonant structure 2 and add spine feed loudspeaker 3, wherein: the Fabry-Perot resonant structure 2 is fixedly arranged between the fixed clamp 1 and the ridge feed horn 3.
The fixed clamp 1 is of a hollow cylinder structure, a polygonal geometric cavity is arranged inside the fixed clamp 1 to accommodate the Fabry-Perot resonant structure 2, the fixed clamp 1 is processed by using a 3D printing technology, and the formed material is a polylactic acid (PLA) medium with a low dielectric constant, so that the disturbance of radiation electromagnetic waves is effectively avoided while the processing precision is ensured.
The terahertz Fabry-Perot resonant antenna based on the metal-graphene mixed structure is particularly applied to systems such as 310GHz wireless communication and radar detection.
The fabry-perot resonator structure 2 includes: graphene pattern 21, metal pattern 22 and dielectric layer 23, wherein: the graphene pattern 21 is a graphene patch which is square and periodically arranged at equal intervals, and the thickness of the graphene patch is 2.6nm; the metal patterns 22 are metal nickel patches which are correspondingly arranged in a square shape at equal intervals, and the thickness of the metal nickel patches is 400nm; the dielectric layer 23 is a cylinder with the radius of 10mm, the height of the dielectric layer is 1mm, the composition material is quartz with the relative dielectric constant of 3.8, when electromagnetic waves enter the ridge feed source horn 3, the electromagnetic waves can radiate outwards from a circular horn mouth at one side of the ridge feed source horn 3 close to the Fabry-Perot resonant structure 2, the radiated electromagnetic waves reach the Fabry-Perot resonant structure 2, the beam width of the radiated electromagnetic waves is wide, the gain is low, the electromagnetic waves can oscillate back and forth in a Fabry-Perot resonant cavity formed by the Fabry-Perot resonant structure and the metal upper surface 31 of the ridge feed source horn, reflection and transmission occur at the laminated structure of the Fabry-Perot resonant structure graphene pattern 21 and the metal pattern 22, and total reflection occurs at the metal upper surface 31 of the ridge feed source horn. When the resonance condition is satisfied, the forward radiation of the antenna is enhanced, the beam width is reduced, and the required narrow beam width and high directivity are obtained in the main direction.
As shown in fig. 4, the patterns of the graphene pattern 21 and the metal pattern 22 are completely overlapped, the unit period is 400 μm, and the side length of the square patch is 360 μm.
As shown in fig. 5, the fabry-perot resonator structure is formed by repeating a periodic arrangement of basic constituent units, wherein the graphene patch 211 and the metal patch 221 have the same size and are both located above the medium 231.
An equivalent circuit of the proposed stacked structure of the fabry-perot resonant structure graphene pattern 21 and the metal pattern 22 is shown in fig. 6 (a). It can be seen that the equivalent circuit can be regarded as the parallel connection of the RLC series resonant circuit of the metal patch type structure and the RLC series resonant circuit of the graphene patch type structure, and the graphene patch resistance introduced by the limited conductivity real part of the graphene is R GP The inductance introduced by the imaginary part of the conductivity is L GP Introduced by metal patchesInductance and capacitance are respectively L MP 、C MP . In addition, the patch itself provides the inductance L P But can be generally ignored due to the small values. And the equivalent circuit of the monolithic graphene structure is shown in FIG. 6 (b), wherein R G Resistance of graphene patch, L G The inductance introduced for the limited conductivity of the graphene can be changed according to the external voltage of the graphene due to the specific conductivity adjustable characteristic of the graphene. Compared with an equivalent circuit and the invention content, the equivalent circuit of the graphene patch type structure provided by the invention has more elements, and provides more degrees of freedom compared with the design of the whole graphene.
The reflection coefficient amplitude and transmission coefficient amplitude curves of the proposed stacked structure of the fabry-perot resonant structure graphene pattern 21 and the metal pattern 22 and the entire graphene structure are shown in fig. 7 (a) and 7 (b). According to the graph shown in fig. 7 (a), since the patch type has a band-stop characteristic structure, the reflection amplitude of the patch type can reach more than-0.5 dB in a 280-330 GHz frequency band, and the difference between the reflection amplitude and the reflection coefficient of the whole graphene structure is not large. As shown in fig. 7 (b), the transmission coefficient of the patch type structure is about-10 dB at 310GHz, and the transmission coefficient of the whole graphene structure is about-50 dB, the patch type structure has significant advantages over the transmission coefficient of the whole graphene structure, and for the FPR antenna, the partial reflection surface structure has a larger transmission coefficient and can provide a larger beam focusing capability, thereby improving the gain of the antenna.
Add spine feed horn 3 for the material of copper surface gilt, include: a square metal top surface 31, a horn body 32, a metal ridge 33, and a standard rectangular waveguide port 34.
The side length of the metal upper surface 31 is 20mm.
The height of the horn main body 32 is 21.7mm, and the inner diameter of a top round horn mouth is 7mm.
The thickness of the metal ridge 33 is 1mm, and the distance is 2.3mm.
The waveguide port 34 is used for connecting external excitation, is a WR3 standard waveguide, and has the internal dimension of 0.86 multiplied by 0.43mm 2 。
The embodiment relates to a preparation method of the Fabry-Perot resonant structure 2, which comprises the following steps:
And step 2, as shown in fig. 8b, spin-coating a photoresist on the quartz substrate 23 and drying to obtain a complete uniform photoresist layer.
And step 3, as shown in fig. 8c, placing the chromium mask on a quartz substrate covered with a complete and uniform photoresist coating, and performing exposure, development and etching operations to form a graphical photoresist layer.
And 4, as shown in fig. 8d, putting the quartz substrate coated with the patterned photoresist into an electron beam evaporation machine, and evaporating a uniform nickel film by using an electron beam evaporation process.
And 5, as shown in fig. 8e, putting the substrate into a photoresist solvent, and removing the patterned photoresist to obtain the patterned nickel film 22.
And 6, as shown in fig. 8f, putting the substrate into a tubular reaction furnace, and growing patterned graphene 21 on the patterned nickel film by using a chemical vapor deposition method to finally obtain the fabry-perot resonant structure 2.
As shown in fig. 10 (a), the terahertz ridged feed horn of the antenna of the present embodiment is at 310GHz,
normalized pattern of time. It can be seen that the feed source with ridge is arranged at
The-10 dB beam width is 17.90 DEG when
The-10 dB beamwidth is 16.68 deg.. The beam widths of the E-plane and the H-plane differ by 1.22 °.
As shown in fig. 10 (b), for the FPR antenna of this embodiment at 310GHz,
normalized pattern of time. It can be seen that the FPR antenna is at
The-10 dB beam width is 14.97 DEG when
The time-10 dB beamwidth is 14.62 °. The beamwidths of the E-plane and the H-plane differ by only 0.35 °.
As shown in the figure, after the graphene Fabry-Perot resonant structure is loaded, the-10 dB beam width of the main polarization surface of the antenna is respectively reduced from 17.90 degrees and 16.68 degrees to 14.97 degrees and 14.62 degrees, which shows that the graphene Fabry-Perot resonant structure effectively narrows the beam and enhances the directivity of the antenna; and the graphene Fabry-Perot resonant structure is loaded to reduce the-10 dB beam width difference of the two main polarization surfaces from 1.22 degrees to 0.35 degrees, so that the beam equalization degree of the main polarization surfaces is effectively improved.
Compared with the prior art, the terahertz Fabry-Perot resonant antenna based on the metal-graphene mixed structure is realized based on the provided metal-graphene mixed structure processing technology, the radiation characteristic that the designed beam width is 14.62-14.97 degrees is realized at 310GHz, and the feasibility of the graphene for the terahertz frequency band antenna is verified. Through simulation experiments, after the graphene Fabry-Perot resonant structure is loaded, the-10 dB beam widths of two main polarization surfaces of the antenna are respectively reduced from 17.90 degrees and 16.68 degrees to 14.97 degrees and 14.62 degrees, the specific requirements of 15 degrees +/-10 percent are met, the-10 dB beam width difference value is reduced from 1.22 degrees to 0.35 degrees, and the beam equalization degree is obviously improved.
Compared with the prior art, the method can strictly control the beam width of the FPR antenna within a specific range (taking 15 degrees +/-10 percent as an example), and simultaneously improve the beam equalization degree of the antenna.
The foregoing embodiments may be modified in many different ways by one skilled in the art without departing from the spirit and scope of the invention, which is defined by the appended claims and not by the preceding embodiments, and all embodiments within their scope are intended to be limited by the scope of the invention.
Claims (2)
1. A terahertz narrow-beam Fabry-Perot resonant antenna based on a metal-graphene mixed structure is characterized by comprising: the mounting fixture, fabry-perot resonant structure and add spine feed loudspeaker that from top to bottom set gradually, wherein: the fixed clamp is connected with the ridge feed source loudspeaker, the Fabry-Perot resonant structure is fixedly arranged above the ridge feed source loudspeaker and forms a Fabry-Perot resonant cavity together with the metal upper surface of the ridge feed source loudspeaker, and electromagnetic waves radiated by the ridge feed source loudspeaker oscillate in the Fabry-Perot resonant structure and form required narrow-beam electromagnetic radiation in the main direction after being regulated;
the fixing clamp is of a hollow cylinder structure, a polygonal geometric cavity is arranged inside the fixing clamp to accommodate a Fabry-Perot resonant structure, and the fixing clamp is made of polylactic acid through processing by using a 3D printing technology;
the Fabry-Perot resonant structure comprises: metal pattern and graphite alkene pattern on the dielectric layer are located in proper order, wherein: the graphene pattern and the metal pattern have conductivity and form a reflective surface to achieve partial reflection of electromagnetic waves, wherein: the dielectric layer has no conductivity and is used for dividing (1) a partial reflecting surface and (2) the upper surface of the ridge feed source loudspeaker serving as a metal reflecting surface;
the metal pattern is obtained by evaporating and plating on the substrate by using an electron beam evaporation process;
the ridged feed horn comprises: loudspeaker main part, set up respectively in the metal spine and the waveguide mouth at loudspeaker main part both ends, wherein: the upper side of the horn main body is a metal upper surface, the metal ridge is positioned on one side of the horn main body close to the Fabry-Perot resonant structure, and the waveguide port for external connection feeding is positioned on one side of the bottom of the horn far away from the Fabry-Perot resonant structure.
2. The terahertz narrow-beam Fabry-Perot resonant antenna based on the metal-graphene hybrid structure as claimed in claim 1, wherein the Fabry-Perot resonant structure is implemented by a metal-graphene hybrid structure process, and comprises the following steps:
step 1, spin-coating a photoresist on a substrate which can endure a high-temperature process of 1000 ℃ and drying the photoresist to obtain a complete uniform photoresist layer;
step 2, placing the mask on a substrate covered with a complete and uniform photoresist layer, and carrying out exposure, development and etching operations to form a patterned photoresist layer;
step 3, evaporating and plating a layer of uniform nickel or copper on the substrate by using an electron beam evaporation process;
step 4, putting the substrate into a photoresist solvent, and removing the patterned photoresist to obtain a patterned metal film;
and 5, putting the substrate into a tubular reaction furnace, and growing patterned graphene on the patterned metal film by using a chemical vapor deposition method to finally obtain the graphene-loaded patch structure.
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| 太赫兹石墨烯Fabry-Perot谐振天线;江雨泽,冯金龙,吴林晟,夏彬,毛军发;《2020年全国微波毫米波会议论文集（下册）》;20200920;摘要，第1-5节，图1-5 * |
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| Publication number | Publication date |
|---|---|
| CN113488777A (en) | 2021-10-08 |
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