CN113471390B - Display panel, preparation method, super-surface structure construction method and display device - Google Patents

Display panel, preparation method, super-surface structure construction method and display device Download PDF

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CN113471390B
CN113471390B CN202110757523.0A CN202110757523A CN113471390B CN 113471390 B CN113471390 B CN 113471390B CN 202110757523 A CN202110757523 A CN 202110757523A CN 113471390 B CN113471390 B CN 113471390B
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surface structure
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CN113471390A (en
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彭玮婷
孟宪芹
王维
凌秋雨
田依杉
陈小川
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BOE Technology Group Co Ltd
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    • H10K50/00Organic light-emitting devices
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    • HELECTRICITY
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    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
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Abstract

The embodiment of the application provides a display panel, a preparation method, a super-surface structure construction method and a display device. The display panel includes: a back plate; a plurality of light emitting pixels located at one side of the back plate; the super-surface structure layer is positioned on the light emitting side of the light emitting pixel and is configured to perform phase modulation on the first light beam emitted from the light emitting pixel to the super-surface structure layer so that the divergence angle of the second light beam emitted from the super-surface structure layer is smaller than that of the first light beam. According to the technical scheme, the divergence angle spectrum of the luminous pixels is narrowed, the brightness of the luminous pixels is improved, the brightness of the display panel is further improved, and the light energy utilization rate is improved. And the super-surface structure has small size, which is beneficial to realizing the light and thin display panel.

Description

Display panel, preparation method, super-surface structure construction method and display device
Technical Field
The disclosure relates to the technical field of display, in particular to a display panel, a preparation method thereof, a super-surface structure construction method and a display device.
Background
Organic Light-Emitting Diode (OLED) is a display lighting technology that has been developed in recent years, and in particular, in the display industry, OLED display has been considered to have a wide application prospect due to advantages of high response, high contrast, flexibility, and the like.
The silicon-based OLED micro display combines the CMOS technology and the OLED technology, and has the characteristics of self-luminescence, adoption of a silicon substrate and the like. Silicon-based OLEDs are small, lightweight, low power consumption, high resolution (PPI), the core device of near-eye display systems, and the trend of next generation microdisplay technology. The light emitting mechanism of the silicon-based OLED is that the light emitting material generates light under the action of an electric field. In general, pixel emission is achieved by applying the same voltage to all the light-emitting pixels. However, it has been found in practical development or application that, since the OLED has a lambertian emission characteristic, there is a problem that the pixel brightness is low for a display device having a high PPI.
Disclosure of Invention
The embodiment of the disclosure provides a display panel, a preparation method, a super-surface structure construction method and a display device, which are used for solving or relieving one or more technical problems in the prior art.
As a first aspect of the embodiments of the present disclosure, the embodiments of the present disclosure provide a display panel including:
a back plate;
a plurality of light emitting pixels located at one side of the back plate;
the super-surface structure layer is positioned on the light emitting side of the light emitting pixel and is configured to perform phase modulation on the first light beam emitted from the light emitting pixel to the super-surface structure layer so that the divergence angle of the second light beam emitted from the super-surface structure layer is smaller than that of the first light beam.
In some possible implementations, the display panel further includes a layer of silicon-based material between the light emitting pixels and the super surface structure layer.
In some possible implementations, the display panel further includes a color film layer disposed between the plurality of light emitting pixels and the silicon-based material layer.
In some possible implementations, the super-surface structure layer includes a plurality of super-surface unit structures matched to the wavelength of the first light beam, the super-surface unit structures are cylindrical, the height of the super-surface unit structures is less than or equal to 500nm, and each super-surface unit structure corresponds to one phase value.
In some possible implementations, the super-surface structure layer includes at least one of:
the first light beam is a first color light beam, the super-surface structure layer comprises a first sub-super-surface structure layer matched with the wavelength of the first color light beam, the first sub-super-surface structure layer comprises a plurality of first super-surface unit structures, and the radius of the first super-surface unit structures ranges from 40nm to 95nm;
the first light beam is a second color light beam, the super-surface structure layer comprises a second sub-super-surface structure layer matched with the wavelength of the second color light beam, the second sub-super-surface structure layer comprises a plurality of second super-surface unit structures, and the radius of the second super-surface unit structures ranges from 45nm to 100nm;
The first light beam is a third color light beam, the super-surface structure layer comprises a third sub-super-surface structure layer matched with the wavelength of the third color light beam, the third sub-super-surface structure layer comprises a plurality of third super-surface unit structures, and the radius of the third super-surface unit structures ranges from 50nm to 110nm.
In some possible implementations, the display panel further includes a protective glue layer filled between the super surface unit structures.
In some possible implementations, the display panel further includes a package glass disposed on a side of the super surface structure layer facing away from the back plate.
As a second aspect of the embodiments of the present disclosure, embodiments of the present disclosure provide a method for constructing a super surface structure, including:
constructing a light receiving lens matched with the light emitting pixel based on the parameter of the light emitting pixel, wherein the light receiving lens is configured to enable light beams emitted to the light receiving lens by the light emitting pixel to emit at a preset divergence angle;
extracting phase distribution information of a light receiving lens;
discretizing the phase distribution information according to the periodic size of the super-surface unit structure library to obtain a phase discretization result, wherein the super-surface unit structure library corresponds to the luminous spectrum range of the luminous pixels and comprises a plurality of super-surface unit structures, each super-surface unit structure corresponds to one phase value in the range of 0 to 2 pi, and the phase values corresponding to the super-surface unit structures are different;
And carrying out super-surface unit structure arrangement according to the phase discretization result to construct a super-surface structure.
In some possible implementations, discretizing the phase distribution information according to the period size of the super surface unit structure library includes: the period of the super surface unit structure is taken as the minimum dividing scale, the phase distribution information is divided, and the phase distribution information is dispersed into phase values within the range of 0-2 pi.
In some possible implementations, the arrangement of the super-surface unit structure according to the phase discretization result includes: based on the phase discretization result, the receiving lens is spatially replaced with a super surface unit structure representing the corresponding phase value.
As a third aspect of the embodiments of the present disclosure, the embodiments of the present disclosure provide a method for manufacturing a display panel, including:
forming a plurality of light emitting pixels on one side of a back plate;
and forming a super-surface structure layer on one side of the luminous pixel, which is away from the backboard, wherein the super-surface structure layer is configured to perform phase modulation on a first light beam emitted from the luminous pixel to the super-surface structure layer so that the divergence angle of a second light beam emitted from the super-surface structure layer is smaller than that of the first light beam.
In some possible implementations, forming a super surface structure layer on a side of the light emitting pixel facing away from the back plate includes:
sequentially depositing a super surface material film and a hard mask film on one side of the packaging glass;
patterning the hard mask film to form a super-surface structure pattern on the hard mask film to form a hard mask layer;
etching the super-surface material film by taking the hard mask layer as a mask so as to transfer the pattern of the hard mask layer onto the super-surface material film, and removing the hard mask layer to form a super-surface structure layer, wherein the super-surface structure layer comprises a plurality of super-surface unit structures matched with the wavelength of the first light beam;
and (3) aligning and attaching the packaging glass formed with the super-surface structure layer with the backboard formed with the plurality of luminous pixels, so that the super-surface structure layer faces the luminous pixels.
In some possible implementations, before the packaging glass is aligned and attached to the back plate formed with the plurality of light emitting pixels, the method further includes:
and coating protective glue on the super surface structure layer to fill in the space between the super surface unit structures to form the protective glue layer.
As a fourth aspect of the embodiments of the present disclosure, the embodiments of the present disclosure provide a display device including the display panel in the embodiments of the present disclosure.
According to the technical scheme, the super-surface structure layer is arranged on the light emitting side of the luminous pixel, the super-surface structure layer is used for carrying out phase modulation on the first light beam emitted by the luminous pixel, so that the divergence angle of the second light beam emitted by the super-surface structure layer is smaller than that of the first light beam, the narrowing of the divergence angle spectrum of the luminous pixel is realized, the maximum enhancement of the capacity within the range of +/-5 degrees of the center is facilitated, the brightness of the luminous pixel is improved, the brightness of a display panel is further improved, and the light energy utilization rate is improved. And the super-surface structure is formed by arranging super-surface unit structure groups with the dimensions smaller than the wavelength of incident light according to a certain arrangement rule, and the structure size is small, so that the light and thin display panel is realized.
The foregoing summary is for the purpose of the specification only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments, and features described above, further aspects, embodiments, and features of the present disclosure will become apparent by reference to the drawings and the following detailed description.
Drawings
In the drawings, the same reference numerals refer to the same or similar parts or elements throughout the several views unless otherwise specified. The figures are not necessarily drawn to scale. It is appreciated that these drawings depict only some embodiments according to the disclosure and are not to be considered limiting of its scope.
FIG. 1 is a schematic view of the divergence angle distribution of an OLED;
FIG. 2 is a schematic diagram of a display panel according to an embodiment of the disclosure;
FIG. 3 is a schematic view of an angular spectrum of a second light beam emitted from a display panel according to an embodiment of the disclosure;
FIG. 4 is a schematic diagram of a library of super surface unit structures designed for 620nm wavelengths;
FIG. 5 is a schematic diagram of a display panel according to another embodiment of the disclosure;
FIG. 6 is a schematic view of a display panel according to another embodiment of the disclosure;
FIG. 7 is a schematic diagram of a process for creating a super-surface structure according to an embodiment;
FIG. 8a is a schematic diagram showing the effect of the light-receiving lens before and after optimization;
FIG. 8b is a schematic diagram showing a phase distribution of the extracted receiving lens according to an embodiment;
FIG. 8c is a representation of the phase of the center row of the light receiving lens for a super surface unit structure according to one embodiment;
FIG. 8d is a schematic diagram of a resumption simulation effect of the super surface structure according to an embodiment;
FIG. 9 is a flow chart of the construction of a super surface structure in an embodiment of the present disclosure;
FIG. 10 is a structural model for implementing an optimization design in accordance with one embodiment of the present disclosure;
FIG. 11a is a schematic diagram of a display panel according to an embodiment of the disclosure after forming a hard mask film;
FIG. 11b is a schematic diagram of a display panel according to an embodiment of the disclosure after forming a photoresist;
FIG. 11c is a schematic diagram of a display panel according to an embodiment of the present disclosure after a super surface structure pattern is formed on the photoresist;
FIG. 11d is a schematic diagram of a display panel according to an embodiment of the disclosure after transferring the photoresist pattern to the hard mask layer;
FIG. 11e is a schematic diagram of a display panel according to an embodiment of the disclosure after forming a super surface structure;
fig. 11f is a schematic diagram of a display panel according to an embodiment of the disclosure after forming a protective adhesive layer.
Reference numerals illustrate:
10. a back plate; 101. a silicon-based substrate; 102. an array structure layer; 11. a light emitting pixel; 12. a silicon-based material layer; 13. a protective layer; 14. a color film layer; 141. a first color film; 142. a second color film; 143. a third color film; 15. a flat layer; 16. a protective adhesive layer; 17. packaging glass; 30. a super surface structure layer; 301. a first sub-supersurface structure layer; 302. a second sub-supersurface structure layer; 303. a third sub-supersurface structure layer; 31. a super surface unit structure; 32. a photoresist; 33. and a hard mask layer.
Detailed Description
Hereinafter, only certain exemplary embodiments are briefly described. As will be recognized by those of skill in the pertinent art, the described embodiments may be modified in various different ways without departing from the spirit or scope of the present disclosure. Accordingly, the drawings and description are to be regarded as illustrative in nature and not as restrictive.
Fig. 1 is a schematic view of the divergent angle distribution of an OLED. The emission energy distribution of the OLED is lambertian, and as can be seen from fig. 1, the divergence angles of the red (R), green (G), and blue (B) OLEDs are about ±40°, and thus, there is generally only about 40% energy utilization in the forward viewing angle direction (within ±10°) of the OLED display device. In order to improve the light-emitting brightness of the OLED, in the related art, a microlens array is constructed on the light-emitting side of the OLED light-emitting pixel to improve the brightness, but in this way, crosstalk between adjacent pixels exists, and meanwhile, the thickness of the display panel is increased, and the incremental effect on the OLED is about 30%.
In the related art, the performance improvement technology of the display device based on the super surface can be used for optimally designing a light-emitting layer (such as a light-emitting micro-cavity modulation type of an OLED), so that the development period is long, and the mass production introduction difficulty is high. By utilizing the super-surface structure, the light-emitting surface type of the OLED is modulated, certain difficulty exists in the aspects of traditional OLED devices and processing, and meanwhile, the precise processing capability of the sub-wavelength scale is also an influence point for limiting the combination of the sub-wavelength scale with the traditional devices.
In order to improve the brightness of the OLED pixels and achieve light and thin performance, embodiments of the present disclosure provide a display panel. The technical scheme of the present disclosure is described in detail below through specific embodiments.
Fig. 2 is a schematic structural diagram of a display panel according to an embodiment of the disclosure. As shown in fig. 2, the display panel may include a back plate 10 and a plurality of light emitting pixels 11, the plurality of light emitting pixels 11 being located at one side of the back plate 10. The display panel also includes a super surface structure layer 30. The super surface structure layer 30 is located on the light emitting side of the light emitting pixel 11. The super surface structure layer 30 is configured to phase-modulate a first light beam emitted from the light emitting pixel 11 to the super surface structure layer 30 such that a divergence angle of a second light beam emitted from the super surface structure layer 30 is smaller than that of the first light beam.
The super surface structure can be formed by arranging super surface unit structure groups with the scale smaller than the wavelength of incident light according to a certain arrangement rule, and is usually constructed on silicon-based materials (SiO 2 Etc.) on an oxide (TiO 2 Or SiN x ) Structure is as follows. The ultra-surface structure can realize accurate modulation of the incident light phase by the micro-nano structure optical modulation characteristic, thereby realizing accurate regulation and control of the incident light. The light-controllable LED lamp has the characteristics of strong designability, small structural size and accurate light control design.
According to the display panel disclosed by the embodiment of the disclosure, the super-surface structural layer 30 is arranged on the light emitting side of the luminous pixel, the super-surface structural layer 30 is used for carrying out phase modulation on the first light beam emitted by the luminous pixel 11, so that the divergence angle of the second light beam emitted by the super-surface structural layer 30 is smaller than that of the first light beam, the narrowing of the divergence angle spectrum of the luminous pixel is realized, the maximum enhancement of the internal energy within the range of +/-5 degrees of the center is facilitated, the brightness of the luminous pixel is improved, the brightness of the display panel is further improved, and the light energy utilization rate is improved. And the super-surface structure is formed by arranging super-surface unit structure groups with the dimensions smaller than the wavelength of incident light according to a certain arrangement rule, and the structure size is small, so that the light and thin display panel is realized.
Fig. 3 is an angular spectrum diagram of a second light beam emitted from a display panel according to an embodiment of the disclosure. Compared with the first light beam (i.e., the light beam incident between the super-surface structure layers) shown in fig. 1, after the technical scheme of the embodiment of the disclosure is adopted, the divergence angle of the second light beam emitted by the sub-super-surface structure layers is greatly reduced, which is about within ±10° of the front view angle direction of the display panel.
The super surface structure can be constructed on silicon-based materialsA dielectric microstructure smaller than the wavelength scale on the layer, the dielectric microstructure being required to satisfy a large refractive index difference between the material refractive index of the super surface structure and the material refractive index of the silicon-based material layer of greater than or equal to 0.5, for example, the material of the super surface structure is SiN x The silicon-based material layer is SiO 2 ,SiN x With SiO 2 The refractive index difference of (2) is greater than or equal to 0.5.
The phase modulation principle of the super-surface structure comprises a transmission phase type super-surface modulation principle which introduces equivalent refractive index changes based on different unit structure scale changes (including height, width, diameter and the like) to form phase delay, a geometric super-surface modulation principle which introduces polarized component electromagnetic field phase differences based on the same unit structure and different rotation angles, and a hybrid phase modulation principle which is realized by combining the two. Taking the transmission phase modulation principle as an example, the phase change caused by the transmission of light within a structure can be expressed as:
Figure BDA0003148378710000062
Where k is a propagation constant, expressed as
Figure BDA0003148378710000061
n is the equivalent refractive index of the super surface unit structure, and d is the propagation distance. If SiN is used x When the radius of the nano column or the hole is changed, the equivalent refractive index of the super surface unit structure is changed, so that different phase delays are introduced. Because the phase change of the optical field is continuous change between 2 pi (namely 360 DEG phase change), a group of super-surface unit structures which contain 2 pi phase change as far as possible can be obtained as a structure library by scanning the structural parameters of the nano column, and the construction of corresponding super-surface structures aiming at different phase modulation requirements is realized.
In one embodiment, as shown in fig. 2, the display panel may further include a silicon-based material layer 12, where the silicon-based material layer 12 is located between the light emitting pixels 11 and the super surface structure layer 30. Thus, the super surface structure layer 30 can be fabricated on the silicon-based material layer 12, and the beam-converging characteristic of the super surface structure layer 30 can be better achieved. Illustratively, the difference between the material refractive index of the silicon-based material layer 12 and the material refractive index of the super surface structure layer 30 is greater than or equal to 0.5.
In one embodiment, the silicon-based material layer 12 may be silicon oxide, such as SiO 2 . The material of the super surface structure layer 30 may be silicon nitride, such as SiN x
In one embodiment, as shown in fig. 2, the super surface structure layer 30 may include a plurality of super surface unit structures 31, where the super surface unit structures 31 match the wavelength of the light emitted from the light emitting pixel 11. Illustratively, the super surface unit structures 31 may have a cylindrical shape, and the height of the super surface unit structures 31 is less than or equal to 500nm, and each super surface unit structure 31 corresponds to a phase value in the range of 0 to 2 pi. With the display panel of the super surface structure layer 30 in the embodiment of the disclosure, the thickness of the super surface structure layer 30 is less than or equal to 500nm, and compared with the prior art in which a microlens array with a thickness of 1.7 μm is used for light beam converging, the thickness of the super surface structure layer 30 is reduced to 500nm, so that the thickness of the display panel can be reduced to the greatest extent.
The size of the super surface unit structure is of the order of sub-wavelength, and the super surface unit structure is periodically arranged at sub-wavelength intervals, and the super surface unit structure can be made of silicon (Si) or (TiO) 2 ) And dielectric materials.
By way of example, a set of libraries of super surface unit structures may be designed for light of a certain wavelength. For example, for light with a wavelength of 620nm, a group of super-surface unit structures containing 0-2 pi phase change can be obtained as a structure library by scanning the structural parameters of the nano-pillars, so as to realize construction of corresponding super-surface structures according to different phase modulation requirements. FIG. 4 is a schematic diagram of a library of super surface unit structures designed for 620nm wavelength, as shown in FIG. 4, including a library of super surface unit structures for 620nm, comprising a library of super surface unit structures built on silicon dioxide (SiO 2 ) 500nm high, radius ranging from 40nm to 125nm inclusive silicon nitride (SiN) on substrate x ) The nano columns, the super surface unit structures respectively correspond to phase modulation values in the range of 0 to 2 pi.Each super-surface unit structure corresponds to phase modulation in the range of 300nm, and by combining the super-surface unit structures, the phase modulation effect in the whole light-emitting pixel plane can be obtained.
In one embodiment, the super surface unit structure may be a cylindrical hole, and the corresponding super surface unit structure may be obtained as a structural library by scanning structural parameters of the nanopore for light of a specific wavelength. The manner of obtaining the library of the super-surface unit structure when the super-surface unit structure is in a hole shape may be the same as the manner of obtaining the library of the super-surface unit structure when the super-surface unit structure is in a column shape.
The display panel may be a silicon-based OLED display panel, for example. The light emitting pixel 11 may be an OLED light emitting pixel, which may include an anode, a cathode, and a light emitting material layer between the anode and the cathode. As shown in fig. 2, the display panel may further include a planarization layer 15, and the planarization layer 15 may be disposed between the light emitting pixels 11 and the silicon-based material layer 12. By providing the planarization layer 15, the flatness of the silicon-based material layer 12 can be ensured, the super surface structure layer is ensured to be provided on the planar surface, and the beam-converging effect of the super surface structure layer is improved. It will be appreciated that the planar layer 15 and the silicon-based material layer 12 may act as a water-oxygen barrier layer to protect the OLED pixels from water-oxygen attack.
Fig. 5 is a schematic structural diagram of a display panel according to another embodiment of the disclosure. In one embodiment, as shown in fig. 5, the back plate 10 may include a silicon-based substrate 101 and an array structure layer 102 disposed on a side of the silicon-based substrate 101 facing the light emitting pixels 11. The first light beam exiting to the super surface structure layer 30 may include at least one of a first color light beam, a second color light beam, and a third color light beam. It is understood that when the wavelengths of the light rays emitted from the light emitting pixels to the super surface structure layers are different, the super surface structure layers may be different to achieve the same beam-converging effect.
In the disclosed embodiment, for a first color light beam, the super surface structure layer 30 may include a first sub super surface structure layer 301, the first sub super surface structure layer 301 matching the wavelength of the first color light beam. The first sub-super surface structure layer 301 may include a plurality of first super surface unit structures having a radius ranging from 40nm to 95nm.
TABLE 1 first super surface cell Structure library corresponding to first color Beam
Figure BDA0003148378710000081
Illustratively, the first color light beam may be a blue light beam having a wavelength of 450nm, and the height H of the first super surface unit structure may be 400nm to 500nm (inclusive), e.g., the height H of the first super surface unit structure may be one of 400nm, 450nm, 500 nm. Each first subsurface unit structure corresponds to a phase modulation in the range of p=225 nm.
It will be appreciated that, as shown in fig. 5, the first sub-super-surface structure layer 301 is disposed on the light emitting side of the light emitting pixel corresponding to the first color light beam, and the front projection range of the first sub-super-surface structure layer 301 on the back plate coincides with the front projection range of the corresponding light emitting pixel on the back plate, that is, the first sub-super-surface structure layer 301 and the corresponding light emitting pixel have the same size.
For a second color light beam, the super surface structure layer 30 may include a second sub super surface structure layer 302, the second sub super surface structure layer 302 matching the wavelength of the second color light beam. The second sub-subsurface structure layer 302 may include a plurality of second subsurface unit structures having a radius ranging from 45nm to 100nm.
TABLE 2 second super surface unit Structure library corresponding to second color Beam
Figure BDA0003148378710000091
Illustratively, a 6 th order design is performed for a second super surface unit structure corresponding to the second color light beam. The second color light beam may be a green light beam having a wavelength of 520nm, and the height H of the second super surface unit structure may be 400nm to 500nm (inclusive), for example, the height H of the second super surface unit structure may be one of 400nm, 450nm, 500 nm. Each second subsurface unit structure corresponds to a phase modulation in the range of p=250 nm.
It will be appreciated that, as shown in fig. 5, the second sub-super-surface structure layer 302 is disposed on the light emitting side of the light emitting pixel corresponding to the light beam of the second color, and the orthographic projection range of the second sub-super-surface structure layer 302 on the back plate coincides with the orthographic projection range of the corresponding light emitting pixel on the back plate, that is, the second sub-super-surface structure layer 302 has the same size as the corresponding light emitting pixel.
For a third color light beam, the super surface structure layer 30 may comprise a third sub super surface structure layer 303, the third sub super surface structure layer 303 matching the wavelength of the third color light beam. The third sub-subsurface structure layer 303 may include a plurality of third subsurface unit structures having a radius ranging from 50nm to 110nm.
TABLE 3 third super surface cell Structure library for third color light beams
Figure BDA0003148378710000092
Illustratively, a 4-order design is performed for a third super surface unit structure corresponding to a third color light beam. The third color light beam may be a red light beam having a wavelength of 620nm, and the height H of the third super surface unit structure may be 400nm to 500nm (inclusive), for example, the height H of the third super surface unit structure may be one of 400nm, 450nm, 500 nm. Each third subsurface unit structure corresponds to a phase modulation in the range of p=300 nm.
It will be appreciated that, as shown in fig. 5, the third sub-super-surface structure layer 303 is disposed on the light emitting side of the light emitting pixel corresponding to the light beam of the third color, and the orthographic projection range of the third sub-super-surface structure layer 303 on the back plate coincides with the orthographic projection range of the corresponding light emitting pixel on the back plate, that is, the third sub-super-surface structure layer 303 and the corresponding light emitting pixel have the same size.
By arranging the first sub-super-surface structure layer 301, the second sub-super-surface structure layer 302 and the third sub-super-surface structure layer 303, and the orthographic projection range of the sub-super-surface structure layer on the back plate is overlapped with the orthographic projection range of the corresponding luminous pixel on the back plate, the beam converging effect can be realized for the light beams with corresponding wavelengths, and therefore the brightness of the whole display panel is improved.
It should be noted that, in the embodiment shown in fig. 5, the side of the light emitting pixel 11 facing away from the back plate 10 may be provided with a thin film encapsulation layer, and the thin film encapsulation layer may include an inorganic encapsulation layer, such as a silicon oxide layer, facing away from the light emitting pixel 11. The super surface structure layer 30 may be disposed on the inorganic encapsulation layer.
The light emitting pixels may include a first color light emitting pixel, a second color light emitting pixel, and a third color light emitting pixel, the first color light emitting pixel generating a first color light beam, the second color light emitting pixel generating a second color light beam, the third color light emitting pixel generating a third color light beam.
Fig. 6 is a schematic view of a display panel according to another embodiment of the disclosure. In one embodiment, as shown in fig. 6, the display panel may further include a protective layer 13 and a color film layer 14. The protective layer 13 is disposed between the plurality of pixels 11 and the silicon-based material layer 12, and the color film layer 14 is disposed between the protective layer 13 and the silicon-based material layer 12. In the embodiment shown in fig. 6, the light emitting pixel may be a white light emitting pixel, and the color film layer 14 may include a first color film 141, a second color film 142, and a third color film 143. Thus, the light beams generated by the white light emitting pixels respectively generate the first color light beam, the second color light beam, and the third color light beam after passing through the first color film 141, the second color film 142, and the third color film 143.
Illustratively, the first, second and third color films 141, 142 and 143 may be a blue, green and red color film, respectively, and the first, second and third color light beams may be blue, green and red light beams, respectively, corresponding thereto.
In fig. 6, the arrangement of the color film layers 14 is shown, and the first color film 141, the second color film 142, and the third color film 143 may be arranged in a "delta" shape. It is understood that the arrangement of the color film layer 14 is not limited to the "delta" arrangement, and in other embodiments, the color film layer 14 may take other practical arrangements.
The protective layer 13 may be a thin film encapsulation layer, for example.
In one embodiment, in order that the super surface structure layer may be disposed on the flat surface, the display panel may further include a flat layer 15, and the flat layer 15 may be disposed between the silicon-based material layer 12 and the light emitting pixels 11, as shown in fig. 2 and 6. Illustratively, in the embodiment shown in fig. 6, a planarization layer 15 may be disposed between the silicon-based material layer 12 and the color film layer 14.
In one embodiment, the display panel may further include a protective adhesive layer 16, the protective adhesive layer 16 being filled between the super surface unit structures. By arranging the protective adhesive layer 16, the combination of the super surface unit structure and the display panel can be realized, and the structure protection and the supporting function are achieved.
In one embodiment, the display panel may further include an encapsulation glass 17, the encapsulation glass 17 being located on a side of the super surface structure layer 30 facing away from the back plate 10. Illustratively, the super surface structure layer 30 may be formed on the silicon-based material layer 12, or the super surface structure layer 30 may be formed on the encapsulation glass 17, and after the encapsulation glass 17 formed with the super surface structure layer 30 is attached to the back plate forming the light emitting pixel, the super surface structure layer 30 is oriented to the light emitting pixel.
The display panel of the embodiment of the disclosure adopts the super-surface structure layer to realize the narrowing of the luminous angular spectrum, realizes that the maximum energy enhancement within the range of +/-5 degrees of the forward viewing angle of the display panel is 3 times of the original energy enhancement, realizes the forward brightness enhancement of the display panel, improves the light energy utilization rate and realizes the light and thin design of the display panel.
The embodiment of the disclosure further provides a schematic diagram of a method for constructing a super-surface structure, where the super-surface structure is applicable to the super-surface structure layer in any embodiment of the disclosure, and the method for constructing the super-surface structure may include:
s11, constructing a light receiving lens matched with the luminous pixel based on the parameter of the luminous pixel, wherein the light receiving lens is configured to enable light beams emitted to the light receiving lens by the luminous pixel to be emitted at a preset divergence angle;
s12, extracting phase distribution information of a light receiving lens;
s13, discretizing the phase distribution information according to the periodic size of the super-surface unit structure library to obtain a phase discretization result, wherein the super-surface unit structure library corresponds to the luminous spectrum range of the luminous pixels and comprises a plurality of super-surface unit structures, each super-surface unit structure corresponds to one phase value in the range of 0 to 2 pi, and the phase values corresponding to the super-surface unit structures are different;
S14, carrying out super-surface unit structure arrangement according to the phase discretization result to construct a super-surface structure.
According to the method for constructing the super-surface structure, the super-surface structure with the corresponding light field regulation and control effect is constructed by extracting and discretizing the phase distribution of the light receiving lens and replacing and arranging the super-surface unit structure with the corresponding phase modulation value. The construction method breaks through the unavoidable structural errors in the processing and design processes of the traditional geometric optical device, and can realize the design of the optical device in a small-scale range.
FIG. 7 is a schematic diagram of a process for creating a super-surface structure according to an embodiment. Fig. 8a to 8d are schematic diagrams illustrating simulation processes of the super-surface structure in an embodiment, in which fig. 8a is a schematic diagram illustrating the beam-converging effect before and after the optimization of the light-receiving lens in an embodiment, and fig. 8b is a schematic diagram illustrating the phase distribution of the extracted light-receiving lens in an embodiment; FIG. 8c is a representation of the phase of the center row of the light receiving lens for a super surface unit structure according to one embodiment; FIG. 8d is a schematic diagram of a resumption simulation effect of the super surface structure according to an embodiment.
In one embodiment, the light emitting pixels may be OLED light emitting pixels. The emission energy distribution of an OLED light emitting pixel is lambertian as shown in fig. 1, and thus, there is generally only about 40% energy utilization in the forward viewing direction (within 10 °) of the OLED light emitting pixel. In order to improve the light-emitting brightness of the light-emitting pixel in the positive viewing angle, an optical element may be designed on the light-emitting surface of the light-emitting pixel, so that the emergent light with a large angle on the pixel surface is converged through the lens surface, and the angular spectrum distribution with highly concentrated energy as shown in fig. 3 is obtained, thereby improving the brightness in the positive viewing angle.
The silicon-based OLED luminescent pixel material and structure are analyzed, the super-surface structure can be arranged on the silicon-based material layer at the light emitting side of the luminescent pixel, the luminescent surface of each luminescent pixel is realized, and the requirement of improving the brightness of the silicon-based OLED is met. The light source can be equivalently used for carrying out weak convergence on a surface light source with a large divergence angle (+ -40-60 degrees) so as to enable the surface light source to be close to parallel light emission, and the capability is concentrated in a forward viewing angle (+ -10 degrees) range, so that the brightness improvement efficiency of the final forward viewing angle is obtained.
FIG. 9 is a flow chart of the construction of a super surface structure in an embodiment of the present disclosure. The step of S11 may be called as a convergence performance optimization design.
Parameters of the luminescent pixel may include the luminescent spectrum, angular spectrum characteristics, morphology of the luminescent pixel, and cell structure size of the luminescent pixel. The unit structure size of the light emitting pixel may include structural information of the OLED light emitting layer.
In one embodiment, step S11 may include: determining the coverage morphology of the light receiving lens according to the morphology of the luminous pixels, namely the morphology of the corresponding optical element; determining the placement height of the light receiving lens according to the OLED light-emitting layer structure information; according to the parameters of the OLED luminous pixels, optical software is adopted to design the light receiving lenses, the appearance of the light receiving lenses meets the appearance of the luminous pixels, and the placement height meets the distance between the luminous surface of the luminous pixels and the silicon-based material layer, namely the distance of the super-surface structural layer.
By way of example, a short focal lens with the same appearance as the luminous surface of the luminous pixel can be used as a basic model of the light receiving lens, and the final optimization solution is obtained by repeatedly optimizing the beam receiving capacities of different angles in the actual luminous process, so that an optimized light receiving lens is constructed, and the optimized light receiving lens enables light beams emitted from the luminous pixel to the light receiving lens to be emitted at a preset divergence angle. In the process of constructing the light receiving lens, the basic model of the light receiving lens can be optimized by constructing pixel size, lambertian light source, damping square method, non-sequence tracking and other modes through optical design software such as Zemax, lighttools, so as to obtain the optimized model of the light receiving lens with the beam converging function, as shown in (a) of fig. 7, and the light receiving effect of the light receiving lens is shown in fig. 8 a.
For example, a range of preset divergence angles may be set as needed, and the preset divergence angles may be forward viewing angles ±10°.
As shown in fig. 9, constructing a library of super surface unit structures may include: and designing and screening the super-surface unit structure according to the light-emitting spectrum, and constructing a super-surface unit structure library capable of realizing phase modulation in the range of 0-2 pi. For example, a super surface unit structure library may be constructed, in which a plurality of super surface unit structures are included, the super surface unit structures corresponding to the light emission spectrum ranges of the light emitting pixels. For example, when a red light beam is emitted to a super surface structure layer, a super surface unit structure library corresponding to the wavelength of the red light beam may be constructed, as shown in fig. 3, each super surface unit structure in the super surface unit structure library corresponds to one phase value in the range of 0 to 2pi, and each super surface unit structure in the same super surface unit structure library corresponds to a different phase value.
It can be understood that the super-surface unit structure can realize independent phase modulation, so that the phase distribution information of the light receiving lens can be extracted, the phase dispersion is performed according to the period of the super-surface unit structure library, the corresponding position is replaced by the super-surface unit structure of the corresponding phase modulation solution, and an optical modulation device can be further constructed, namely the super-surface structure is constructed.
The design and screening of the super-surface unit structure can be performed according to the spectrum range of the luminous pixel, and the super-surface unit structure capable of realizing the 0-2 pi modulation range in the required wavelength range can be obtained by scanning the structural parameters of the nano column, for example, the super-surface unit structure library corresponding to the wavelength of 450nm is shown in table 1, the super-surface unit structure library corresponding to the wavelength of 520nm is shown in table 2, and the super-surface unit structure library corresponding to the wavelength of 620nm is shown in table 3.
The step of building the library of super surface unit structures shown in fig. 9 is located after the OLED convergence performance optimization design, and it is understood that the building of the library of super surface unit structures is not limited to the sequence shown in fig. 9, as long as the library of super surface unit structures is obtained before the arrangement of the super surface unit structures is performed.
For example, the extracted phase distribution information of the light receiving lens may be phase data of the light receiving lens, as shown in fig. 8b, and in the simulation process, the extracted phase distribution information of the light receiving lens may be shown as a phase plane. Fig. 7 (b) shows the extracted phase distribution information of the light receiving lens.
In one embodiment, in S13, discretizing the phase distribution information according to the period size of the super surface unit structure library to obtain a phase discretization result may include: the method comprises the steps of dividing phase distribution information of a light receiving lens by taking a period of a super-surface unit structure as a minimum dividing scale, discretizing the phase distribution information into phase values in a range of 0-2 pi, and obtaining a phase discretization result, wherein (c) in fig. 7 shows the phase discretization result obtained after phase division, and the range of the phase discretization result is 0-2 pi.
For example, with the super-surface unit structure library shown in table 3, and the period p=300 of the structure library shown in table 3, the phase distribution information of the light receiving lens is divided with the period 300 as the minimum division scale, so that the phase distribution information is scattered into the phase value in the range of 0-2 pi, and a group of phase discretization results with the period 300 are obtained.
In one embodiment, the arrangement of the super surface unit structure according to the phase discretization result in S14 may include: according to the phase discretization result, the light receiving lens is replaced by a super-surface unit structure representing the corresponding phase value in space, and the super-surface structure with the same light receiving characteristic as the light receiving lens is obtained. That is, according to the phase discretization result, by performing phase expression by the super-surface unit structure of the corresponding phase modulation solution in the super-surface unit structure library, a super-surface structure that can be equivalent to a light receiving lens can be obtained.
The phase discretization result may include position information and a phase value corresponding to the position information, and the super surface unit structure corresponding to the phase value in the super surface unit structure library is set at a corresponding position until all positions in the phase discretization result are replaced by the super surface unit structure in the super surface unit structure library, so as to obtain a super surface lens composed of the super surface unit structure, where the super surface lens is a super surface structure with the same light receiving characteristic as the light receiving lens, and fig. 7 (d) shows the super surface structure obtained after the structure replacement, and the period of the super surface structure is the same as that of the super surface unit structure library. By simulating the super-surface structure shown in fig. 8c, the effect shown in fig. 8d can be obtained, fig. 8d shows a comparison schematic diagram of the first light beam and the second light beam, and it can be seen from fig. 8d that after the light-emitting pixel exits to the super-surface structure, the light-emitting light beam is narrowed, and the light-emitting brightness of the central area is greatly enhanced.
The following describes the construction of a super surface structure in detail using a 0.39 inch silicon-based OLED display panel as an example. FIG. 10 is a structural model for implementing an optimal design in an embodiment of the present disclosure. According to the structure and the light emitting parameters of the 0.39 inch silicon-based OLED display panel, the constructed light receiving lens can achieve the beam receiving of the corresponding light emitting pixels under the condition of the placement height of 2.5 mu m and n=1.5, and the incremental design of the light emitting pixels in the positive viewing angle is achieved.
The Zemax software is adopted to set a light source with a light emitting spectrum and an angle spectrum corresponding to an OLED light emitting pixel, a short focal lens with the same appearance and the same size (3 x 4.5 mu m) as the light emitting pixel is designed under the conditions of a placement height of 2.5 mu m and a medium refractive index n=1.5 to serve as a basic model, weak convergent lens optimization of the light source with a divergence angle of +/-50 DEG is carried out, and finally, the optimized light receiving lenses can be respectively obtained for R, G, B three-color light emitting pixels.
Table 4 shows the light receiving effect of OLED pixels obtained by Zemax optimization design
Figure BDA0003148378710000141
According to analysis of brightness distribution before and after optimization, the optimized light receiving lens of each color can achieve the improvement ratio of 79% -300% of brightness within the range of plus or minus 10 degrees of a positive viewing angle. Compared with the micro-lens array which can realize the 30% brightness enhancement within the range of plus or minus 30 degrees, the super-surface structure constructed by the embodiment of the disclosure has higher brightness enhancement ratio, and meanwhile, the thickness of the lens structure layer is reduced from at least 1.7 mu m of the micro-lens array to 500nm of the super-surface structure, so that the thickness of the display panel is reduced to the greatest extent.
It will be appreciated that the super-surface has a certain wavelength sensitivity and that for an OLED display panel with R, G, B three color emissive pixels, a brightness enhancing lens design is required for each of the three R, G, B wavelengths. Aiming at R, G, B luminous pixels, the construction method of the super-surface structure in the embodiment of the disclosure is adopted to construct the super-surface structure aiming at R, G, B luminous pixels, so that the super-surface structure of the display panel is obtained, and the brightness improvement effect of the display panel within the range of positive viewing angle +/-10 degrees is realized.
The embodiment of the disclosure also provides a method for manufacturing the display panel, which comprises the following steps:
forming a plurality of light emitting pixels on one side of a back plate;
a super-surface structure layer is formed on a side of the light emitting pixel facing away from the back plate, the super-surface structure layer being configured to phase modulate a first light beam emitted from the light emitting pixel to the super-surface structure layer such that a divergence angle of a second light beam emitted from the super-surface structure layer is smaller than a divergence angle of the first light beam.
In one embodiment, forming a super surface structure layer on a side of the light emitting pixel facing away from the back plate includes: sequentially depositing a super surface material film and a hard mask film on one side of the packaging glass; patterning the hard mask film to form a super-surface structure pattern on the hard mask film to form a hard mask layer; etching the super-surface material film by taking the hard mask layer as a mask so as to transfer the pattern of the hard mask layer onto the super-surface material film, and removing the hard mask layer to form a super-surface structure layer, wherein the super-surface structure layer comprises a plurality of super-surface unit structures matched with the wavelength of the first light beam; and (3) aligning and attaching the packaging glass formed with the super-surface structure layer with the backboard formed with the plurality of luminous pixels, so that the super-surface structure layer faces the luminous pixels.
In one embodiment, before the encapsulation glass is aligned and attached to the back plate formed with the plurality of light emitting pixels, the method further comprises: and coating protective glue on the super surface structure layer to fill in the space between the super surface unit structures to form the protective glue layer.
The method of manufacturing the display panel is described in detail below through the process of manufacturing the display panel. It will be appreciated that the back plate and the luminescent pixels may be fabricated by methods commonly used in the art, and the fabrication of the super surface structure layer is described in detail herein. It should be understood that, as used herein, the term "patterning" includes processes such as photoresist coating, mask exposure, development, etching, photoresist stripping, etc. when the patterned material is inorganic or metal, and processes such as mask exposure, development, etc. when the patterned material is organic, evaporation, deposition, coating, etc. are all well-known processes in the related art.
A super-surface structure layer is formed on a side of the light emitting pixel facing away from the back plate, the super-surface structure layer being configured to phase modulate a first light beam emitted from the light emitting pixel to the super-surface structure layer such that a divergence angle of a second light beam emitted from the super-surface structure layer is smaller than a divergence angle of the first light beam. This step may include:
A super surface material film 30 'and a hard mask film 33' are sequentially deposited on one side of the encapsulation glass 17, as shown in fig. 11a, fig. 11a is a schematic view of a display panel according to an embodiment of the present disclosure after forming the hard mask film. Wherein, the thickness of the super surface material film is the same as the height of the super surface unit structure in the super surface structure layer. The subsurface material may be SiN x . The hard mask film may be made of at least one of aluminum (Al) and titanium (Ti). It is understood that the material of the hard mask film is not limited to aluminumOr titanium, but other materials can be used.
The hard mask film 33 'is subjected to patterning process so that the hard mask film 33' is patterned into a super surface structure to form the hard mask layer 33. This step may include: coating a photoresist 32 on the hard mask film 33', wherein the photoresist 32 may be an electron beam Exposure (EBL) dedicated photoresist, such as PMML, as shown in fig. 11b, and fig. 11b is a schematic diagram of the display panel according to an embodiment of the disclosure after forming the photoresist; exposing and developing the photoresist 32 by adopting an electron beam exposure method, and processing the inverse structure of the super-surface structure on the photoresist to form a pattern consistent with the super-surface structure on the photoresist, wherein as shown in fig. 11c, fig. 11c is a schematic diagram of the display panel according to an embodiment of the disclosure after the super-surface structure pattern is formed on the photoresist; the exposed hard mask film 33' is etched by an etching process, such as a dry etching process, and the photoresist pattern is transferred onto the hard mask film 33', so that the hard mask film 33' forms a super surface structure pattern to form a hard mask layer 33, and the remaining photoresist is stripped, as shown in fig. 11d, fig. 11d is a schematic diagram of the display panel according to an embodiment of the present disclosure after the photoresist pattern is transferred onto the hard mask layer.
Using the hard mask layer 33 as a mask, the super surface material film 30 'is etched, for example, by a dry etching process, so as to transfer the pattern of the hard mask layer 33 onto the super surface material film 30', and remove the hard mask layer 33 to form the super surface structure layer 30, where the super surface structure layer 30 includes a plurality of super surface unit structures matching the wavelength of the first light beam, as shown in fig. 11e, and fig. 11e is a schematic diagram after forming the super surface structure in the display panel according to an embodiment of the disclosure.
The encapsulation glass with the super surface structure layer 30 is aligned and attached to the back plate with a plurality of luminous pixels, so that the super surface structure layer 30 faces the luminous pixels. It can be appreciated that a high-precision alignment and lamination technology can be adopted to align and laminate the package glass formed with the super-surface structure layer 30 with the back plate formed with a plurality of light-emitting pixels, so that the high alignment precision of the light-emitting pixels and the corresponding sub-super-surface structure layers is ensured in the lamination process, the single pixel is ensured to correspond to a single modulation structure, and the brightness of the whole display panel is improved.
Before the package glass is aligned and attached with the backboard formed with the plurality of luminous pixels, the method further comprises the following steps: a protective glue layer is coated on the super surface structure layer 30 to fill in between the super surface unit structures to form a protective glue layer 16, as shown in fig. 11f, fig. 11f is a schematic view of the display panel after forming the protective glue layer according to an embodiment of the disclosure.
It will be appreciated that a silicon-based material layer may be formed on the side of the light emitting pixel facing away from the back plate, and a super-surface material film and a hard mask layer may be sequentially deposited on the silicon-based material layer, and the super-surface structure layer may be formed by the same method as described above.
Based on the inventive concept of the foregoing embodiments, the present disclosure also provides a display device including a display panel employing the foregoing embodiments. The display device may be: any product or component with display function such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator and the like.
In the description of the present specification, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present disclosure.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present disclosure, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present disclosure, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; the device can be mechanically connected, electrically connected and communicated; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the terms in this disclosure will be understood by those of ordinary skill in the art as the case may be.
In this disclosure, unless expressly stated or limited otherwise, a first feature being "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other by way of additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is less level than the second feature.
The above disclosure provides many different embodiments or examples for implementing different structures of the disclosure. The components and arrangements of specific examples are described above in order to simplify the present disclosure. Of course, they are merely examples and are not intended to limit the present disclosure. Furthermore, the present disclosure may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not themselves indicate the relationship between the various embodiments and/or arrangements discussed.
The above is merely a specific embodiment of the disclosure, but the protection scope of the disclosure is not limited thereto, and any person skilled in the art can easily think of various changes or substitutions within the technical scope of the disclosure, which should be covered in the protection scope of the disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.

Claims (12)

1. A display panel, comprising:
a back plate;
a plurality of light emitting pixels located at one side of the back plate;
a super surface structure layer located at the light emitting side of the light emitting pixel and configured to phase modulate a first light beam emitted from the light emitting pixel to the super surface structure layer so that a divergence angle of a second light beam emitted from the super surface structure layer is smaller than a divergence angle of the first light beam;
A silicon-based material layer located between the light emitting pixels and the super surface structure layer, the super surface structure layer being formed on the silicon-based material layer;
the thickness of the super surface structure layer is less than or equal to 500nm, and the difference value between the material refractive index of the super surface structure layer and the material refractive index of the silicon-based material layer is more than or equal to 0.5.
2. The display panel of claim 1, further comprising a color film layer disposed between the plurality of light emitting pixels and the silicon-based material layer.
3. The display panel according to claim 1 or 2, wherein the super surface structure layer comprises a plurality of super surface unit structures matched with the wavelength of the first light beam, the super surface unit structures are cylindrical, the height of the super surface unit structures is less than or equal to 500nm, and each super surface unit structure corresponds to one phase value.
4. A display panel according to claim 3, wherein the super surface structure layer comprises at least one of:
the first light beam is a first color light beam, the super-surface structure layer comprises a first sub-super-surface structure layer matched with the wavelength of the first color light beam, the first sub-super-surface structure layer comprises a plurality of first super-surface unit structures, and the radius of the first super-surface unit structures ranges from 40nm to 95nm;
The first light beam is a second color light beam, the super-surface structure layer comprises a second sub-super-surface structure layer matched with the wavelength of the second color light beam, the second sub-super-surface structure layer comprises a plurality of second super-surface unit structures, and the radius of the second super-surface unit structures ranges from 45nm to 100nm;
the first light beam is a light beam with a third color, the super-surface structure layer comprises a third sub-super-surface structure layer matched with the wavelength of the light beam with the third color, the third sub-super-surface structure layer comprises a plurality of third super-surface unit structures, and the radius of the third super-surface unit structures ranges from 50nm to 110nm.
5. A display panel according to claim 3, further comprising a protective glue layer filled between the super surface unit structures.
6. The display panel of claim 1, further comprising an encapsulation glass disposed on a side of the super surface structure layer facing away from the back plane.
7. A construction method of a super-surface structure comprises the following steps:
determining a coverage morphology of a light receiving lens according to the morphology of a light emitting pixel, wherein the light receiving lens is configured to enable light beams emitted to the light receiving lens by the light emitting pixel to emit at a preset divergence angle;
Determining the placement height of a light receiving lens according to the structural information of the OLED light emitting layer;
according to parameters of the OLED luminous pixels, adopting optical software to design a light receiving lens, wherein the appearance of the light receiving lens meets the appearance of the luminous pixels, and the placement height of the light receiving lens meets the distance between the luminous surface of the luminous pixels and the silicon-based material layer;
extracting phase distribution information of the light receiving lens;
performing discretization processing on the phase distribution information according to the cycle size of a super-surface unit structure library to obtain a phase discretization result, wherein the super-surface unit structure library corresponds to the light emitting spectrum range of the light emitting pixels and comprises a plurality of super-surface unit structures, each super-surface unit structure corresponds to a phase value in the range of 0 to 2 pi, and the phase values corresponding to the super-surface unit structures are different;
and according to the phase discretization result, spatially replacing the light receiving lens by a super-surface unit structure representing the corresponding phase value to construct the super-surface structure.
8. The method of claim 7, wherein discretizing the phase distribution information according to the period size of the super surface unit structure library comprises: and dividing the phase distribution information by taking the period of the super-surface unit structure as the minimum division scale, so that the phase distribution information is dispersed into phase values in the range of 0-2 pi.
9. A method for manufacturing a display panel, comprising:
forming a plurality of light emitting pixels on one side of a back plate;
forming a silicon-based material layer on one side of the light emitting pixel away from the back plate, and forming a super-surface structure layer on the silicon-based material layer, wherein the super-surface structure layer is configured to perform phase modulation on a first light beam emitted from the light emitting pixel to the super-surface structure layer so that the divergence angle of a second light beam emitted from the super-surface structure layer is smaller than that of the first light beam;
the thickness of the super surface structure layer is less than or equal to 500nm, and the difference value between the material refractive index of the super surface structure layer and the material refractive index of the silicon-based material layer is more than or equal to 0.5.
10. The method of claim 9, wherein forming a super surface structure layer on the silicon-based material layer comprises:
sequentially depositing a super-surface material film and a hard mask film on the silicon-based material layer;
patterning the hard mask film to form a hard mask layer by patterning the hard mask film to form the super-surface structure;
etching the super-surface material film by using the hard mask layer as a mask so as to transfer the pattern of the hard mask layer to the super-surface material film, and removing the hard mask layer to form the super-surface structure layer, wherein the super-surface structure layer comprises a plurality of super-surface unit structures matched with the wavelength of the first light beam;
And aligning and attaching the silicon-based material layer with the super-surface structure layer and the backboard with a plurality of luminous pixels, so that the super-surface structure layer faces the luminous pixels.
11. The method of claim 10, wherein prior to the aligning and bonding the layer of silicon-based material with the super surface structure layer to the back plate with the plurality of light emitting pixels formed thereon, the method further comprises:
and coating protective glue on the super surface structure layer so as to fill the space between the super surface unit structures to form a protective glue layer.
12. A display device comprising the display panel according to any one of claims 1 to 6.
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