CN113448183A - Cooling device for heat treatment module of spin coater - Google Patents
Cooling device for heat treatment module of spin coater Download PDFInfo
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- CN113448183A CN113448183A CN202110748798.8A CN202110748798A CN113448183A CN 113448183 A CN113448183 A CN 113448183A CN 202110748798 A CN202110748798 A CN 202110748798A CN 113448183 A CN113448183 A CN 113448183A
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- 238000001816 cooling Methods 0.000 title claims abstract description 150
- 238000010438 heat treatment Methods 0.000 title claims abstract description 78
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 63
- 230000007246 mechanism Effects 0.000 claims abstract description 43
- 238000004528 spin coating Methods 0.000 claims abstract description 12
- 238000009423 ventilation Methods 0.000 claims abstract description 12
- 230000017525 heat dissipation Effects 0.000 claims description 48
- 239000007788 liquid Substances 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 21
- 238000007669 thermal treatment Methods 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 4
- 230000002146 bilateral effect Effects 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000002045 lasting effect Effects 0.000 abstract 1
- 239000002826 coolant Substances 0.000 description 7
- 239000000110 cooling liquid Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 230000001502 supplementing effect Effects 0.000 description 6
- 244000309464 bull Species 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
- F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
- F25D17/04—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating air, e.g. by convection
- F25D17/06—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating air, e.g. by convection by forced circulation
Abstract
The invention relates to the technical field of spin coating developers, in particular to a cooling device for a heat treatment module of a spin coating developer, which comprises a spin coating developer case, wherein a heat treatment unit module is arranged in each vertical case; the water cooling mechanisms are the same as the heat treatment unit modules in number and are arranged at the bottom of each heat treatment unit module in a one-to-one correspondence mode, and each water cooling mechanism comprises a water cooling plate bottom plate; the number of the ventilation mechanisms is the same as that of the heat treatment unit modules, the ventilation mechanisms are arranged above each heat treatment unit module in a one-to-one correspondence manner, and each ventilation mechanism comprises an air inlet channel and an air exhaust channel; a thermostat; a main air inlet pipeline; a blower; the total air outlet pipeline, this equipment can be high-efficient and lasting cool off the heating process unit module to can be automatic take away the unnecessary heat that the heating process unit module produced, improve cooling efficiency.
Description
Technical Field
The invention relates to the technical field of spin coating developers, in particular to a cooling device for a heat treatment module of a spin coating developer.
Background
The spin coater is a device for performing all lithography processes except exposure, including coating, baking, developing, cleaning the back of a wafer, and rinsing the wafer surface with deionized water for an immersion process.
The cooling device of the spin coater disclosed in the Chinese utility model patent CN208796024U comprises cold plates, each cold plate is communicated with an independent cooling liquid supply system, each cooling liquid supply system comprises a cooling liquid supply box, a heat exchanger and a liquid supply pump, a liquid inlet pipe of the liquid supply pump extends into the cooling liquid supply box, a liquid outlet pipe of the liquid supply pump is communicated with an inlet of a first heat exchange channel of the heat exchanger, an outlet of the first heat exchange channel is communicated with an inlet of a cooling channel on the cold plate, an outlet of the cooling channel is communicated with an inner cavity of the cooling liquid supply box through a return pipe, the cooling device further comprises a liquid supplementing box and a liquid supplementing pump, a liquid outlet of the liquid supplementing pump is respectively communicated with each cooling liquid supply box through a liquid supplementing pipe, a liquid supplementing sensor, a liquid supplementing stopping sensor and a temperature sensor are arranged on the inner wall of the cooling liquid supply box, the cooling device of the spin coater has a poor heat dissipation effect, the heat radiation heat of the heat treatment unit module can not be continuously taken away, and the redundant heat generated by the heating treatment unit module of the spin coater can not be taken away, so that the work of the heating treatment unit module of the spin coater is influenced, therefore, the cooling device for the heat treatment module of the spin coater is provided, so that the problem provided by the cooling device can be solved.
Disclosure of Invention
First, technical problem to be solved
The invention provides a cooling device for a heat treatment module of a spin coater, aiming at the defects in the prior art and solving the problems of single function and low heat dissipation efficiency of the existing cooling device.
Second, technical scheme
In order to solve the technical problem, the invention provides a cooling device for a heat treatment module of a spin coater, which comprises a spin coater cabinet, wherein the spin coater cabinet is internally provided with three vertical cabinets, and heat treatment unit modules are arranged in the vertical direction of each vertical cabinet at equal intervals;
the number of the water cooling mechanisms is the same as that of the heat treatment unit modules, and the water cooling mechanisms are arranged at the bottom of each heat treatment unit module in a one-to-one correspondence manner, and each water cooling mechanism comprises a water cooling plate bottom plate fixed at the bottom of each heat treatment unit module and used for carrying out water cooling treatment on the heat treatment unit modules;
the ventilation mechanisms are arranged above each heat treatment unit module in the same number as the heat treatment unit modules in a one-to-one correspondence manner, each ventilation mechanism comprises an air inlet channel and an air exhaust channel, and the air inlet channels and the air exhaust channels are arranged on two sides above the heat treatment unit modules in a bilateral symmetry manner;
the thermostat is arranged on the rear side of the spin coating developing machine case and is communicated with the inside of each water cooling mechanism through a guide water pipe;
the main air inlet pipeline is arranged at the top of the spin coating developing machine case and is communicated with the interior of each air inlet pipeline through a first vertical pipeline;
the air blower is arranged on the side wall of the spin coating developing machine case, and the working end of the air blower is communicated with one end of the main air inlet pipeline;
and the main air outlet pipeline is arranged at the top of the spin coater chassis and is communicated with the inside of each air outlet pipeline through a second vertical pipeline.
Preferably, every vertical cabinet all includes left side board and right side board, the equal hollow structure of left side board and right side board, the inside of right side board is provided with the wind-guiding passageway with every inlet channel one-to-one, first vertical pipeline is vertical to be located the inside one side of right side board, first vertical pipeline passes through the inside intercommunication of extension pipe with every wind-guiding passageway, the top of first vertical pipe and total inlet channel's inside intercommunication.
Preferably, each air intake channel includes:
the rectangle passageway, the laminating sets up on the inside wall of vertical cabinet, and the air inlet opening with the inside intercommunication of wind-guiding passageway is seted up to the inside of rectangle passageway, and the one side that the rectangle passageway is close to thermal treatment module is for opening the structure.
The blade has a plurality of, and the equipartition that all blades can overturn along rectangular channel's vertical direction sets up the open end at rectangular channel, and the both ends of every blade all are through the inside both sides coupling of first bull stick with rectangular channel.
Preferably, each air inlet channel further comprises:
the rack is vertically positioned on one side of the rectangular channel and can move up and down along the vertical direction of the rectangular channel;
the gear, its quantity is the same with the quantity of every blade and the one-to-one is located one side of every blade, and the center department of every gear all is connected with the first bull stick transmission of the blade that corresponds through the second bull stick, and every gear all sets up with the rack meshing for drive every blade and make the upset action.
Preferably, each air inlet channel further comprises:
the sliding rail is vertically positioned on one side of the rack, and the side wall of the sliding rail is connected with the side wall of the rectangular channel;
the bearing seats are provided with a pair of bearings and are respectively arranged at the upper end and the lower end of the slide rail;
the screw rod is vertically positioned between the two bearing seats, and two ends of the screw rod are respectively in shaft connection with the inner ring of each bearing seat;
the screw rod sliding sleeve is arranged on the screw rod and is in threaded connection with the screw rod, and one side, away from the sliding rail, of the screw rod sliding sleeve is connected with one side of the rack;
the limiting sliding block is arranged on one side, close to the sliding rail, of the screw rod sliding sleeve and can slide in the sliding rail in a limiting mode;
and the driving motor is arranged on the outer wall of one of the two bearing seats, and the output end of the driving motor is in transmission connection with one end of the screw rod.
Preferably, each exhaust channel comprises:
the air duct is horizontally arranged inside the left side plate, one end of the air duct close to the heat treatment unit module penetrates through one side of the left side plate and extends outwards, and a second vertical pipeline is communicated with the inside of the air duct;
and the exhaust fan is arranged at the extending end of the air duct.
Preferably, each water cooling mechanism further includes:
the water-cooling cover plate is mutually attached to the water-cooling plate bottom plate, the water-cooling cover plate is fixedly connected with the water-cooling plate bottom plate, a metal pipe is clamped between the water-cooling plate bottom plate and the water-cooling plate cover plate, and two opposite side walls of the water-cooling plate bottom plate and the water-cooling plate cover plate are respectively and correspondingly provided with a fixing groove for accommodating the metal pipe;
the guide cover is arranged on one side, back to the water-cooling plate bottom plate, of the water-cooling plate cover plate, one end of the guide cover is fixedly connected with the wind shield, the guide cover is communicated with the wind shield, and a radiating fan is arranged at one end, back to the guide cover, of the wind shield;
one side of the water cooling plate cover plate, which is back to the water cooling plate bottom plate, is fixedly connected with a plurality of heat dissipation plates, and the heat dissipation plates are perpendicular to the water cooling plate cover plate;
one end of the metal tube is communicated with a radiating tube which is fixedly arranged on the radiating plate in a penetrating way.
Preferably, a plurality of heat dissipation plates arranged in each water cooling mechanism are arranged in parallel, a distance is reserved between every two adjacent heat dissipation plates, and each heat dissipation plate is arranged in a wave shape along the length direction of the heat dissipation plate.
Preferably, a temperature control valve is arranged between the metal pipe and the radiating pipe in each water cooling mechanism, the temperature control valves are respectively communicated with the metal pipe and the radiating pipe, a liquid inlet and outlet pipe is arranged on one side of each temperature control valve, and the liquid inlet and outlet pipes are communicated with the thermostat through guide water pipes.
Preferably, all rotate the cover on the body of the cooling tube between every heating panel and be equipped with the rotating sleeve, the vertical setting of rotating sleeve, a plurality of radiator blade of circumference fixedly connected with on the lateral wall of rotating sleeve.
Third, beneficial effect
Compared with the prior art, the invention cools the corresponding heat treatment module through each water cooling mechanism, and discharges hot air generated by the heat treatment module through the matching between the air inlet pipeline and the air outlet pipeline, thereby solving the technical problems of continuously cooling each heat treatment unit module and discharging the hot air efficiently.
Specifically, air blown out by the air blower uniformly enters each air inlet channel through mutual communication between the extension pipe on each first vertical pipe and the air guide channel corresponding to each air inlet channel of the heat treatment module; through every blade that can overturn that sets up in the rectangle passageway, the messenger blows the wind-gas change orientation of heat treatment module direction, can diversely blow, realizes that more even blows off the steam that heat treatment module produced.
The water cooling heat treatment module is characterized in that cold and hot replacement is carried out on the water cooling plate bottom plate, the water cooling plate cover plate and the metal pipe, so that water cooling of the water cooling plate bottom plate is realized, air flow is blown out to the heat dissipation plate through the heat dissipation fan, heat on the heat dissipation plate is taken away, air cooling of the water cooling plate is realized through heat dissipation of the heat dissipation plate, water cooling is more stable, and the water cooling heat treatment module is further formed; the contact area between each wavy heat dissipation plate and the air is increased, more heat on the heat dissipation plates can be taken away, and the technical problem of improving the air cooling heat dissipation effect of the bottom plate of the water cooling plate is solved.
But through the real-time detection temperature of temperature control valve, and then change the coolant liquid fast, make the cooling tube continuous operation, drive the continuous water-cooling work of water-cooling plate bottom plate simultaneously, drive all rotating sleeve through radiator fan's wind-force, evenly dispel the heat through rotating the sleeve.
Drawings
FIG. 1 is a first perspective view of the present invention;
FIG. 2 is a second perspective view of the present invention;
FIG. 3 is a third perspective view of the present invention;
FIG. 4 is a front view of the present invention;
FIG. 5 is a cross-sectional view taken along A-A of FIG. 4 of the present invention;
FIG. 6 is a cross-sectional view taken along line B-B of FIG. 4 of the present invention;
FIG. 7 is a partial top view of the vertical cabinet of the present invention;
FIG. 8 is a partial perspective view of the present invention;
FIG. 9 is a partial perspective view of the air intake duct of the present invention;
FIG. 10 is an enlarged view of the invention at C of FIG. 9;
FIG. 11 is a partial perspective view I of the water cooling mechanism of the present invention;
FIG. 12 is a partially exploded view of the water cooling mechanism of the present invention;
FIG. 13 is a second partial perspective view of the water cooling mechanism of the present invention;
FIG. 14 is a fragmentary perspective view of the water cooling mechanism of the present invention;
fig. 15 is an enlarged view at D of fig. 14 of the present invention.
In the figure:
1 is a case of a spin coater; 2 is a vertical cabinet; 3 is a heat treatment unit module; 4 is a water cooling mechanism; 5 is a water-cooling plate bottom plate; 6 is a ventilation mechanism; 7 is an air inlet channel; 8 is an exhaust channel; 9 is a thermostat; 10 is a main air inlet pipeline; 11 is a first vertical pipeline; 12 is a blower; 13 is a total air outlet pipeline; 14 is a second vertical pipe; 15 is a left side plate; 16 is a right side plate; 17 is a wind guide channel; 18 is an extension pipe; 19 is a rectangular channel; 20 is an air inlet port; 21 is a blade; 22 is a rack; 23 is a gear; 24 is a slide rail; 25 is a bearing seat; 26 is a screw rod; 27 is a screw rod sliding sleeve; 28 is a limit slide block; 29 is a driving motor; 30 is a wind barrel; 31 is an exhaust fan; 32 is a water-cooling cover plate; 33 is a metal tube; 34 is a guide cover; 35 is a wind shield; 36 is a heat dissipation fan; 37 is a heat dissipation plate; 38 is a radiating pipe; 39 is a liquid inlet and outlet pipe; 40 is a rotating sleeve; 41 is a radiating fin; and 42 is a temperature control valve.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
Example 1:
as shown in fig. 1 to 6, the cooling device for the thermal treatment module of the spin coater of the present embodiment includes a spin coater cabinet 1, the interior of the spin coater cabinet 1 is composed of three vertical cabinets 2, and the interior of each vertical cabinet 2 is provided with thermal treatment unit modules 3 which are distributed at equal intervals along the vertical direction of each vertical cabinet 2;
the number of the water cooling mechanisms 4 is the same as that of the heat treatment unit modules 3, and the water cooling mechanisms 4 are arranged at the bottom of each heat treatment unit module 3 in a one-to-one correspondence manner, and each water cooling mechanism 4 comprises a water cooling plate bottom plate 5 fixed at the bottom of each heat treatment unit module 3 and used for carrying out water cooling treatment on the heat treatment unit modules 3;
the number of the ventilation mechanisms 6 is the same as that of the heat treatment unit modules 3, the ventilation mechanisms are arranged above each heat treatment unit module 3 in a one-to-one correspondence manner, each ventilation mechanism 6 comprises an air inlet channel 7 and an air exhaust channel 8, and the air inlet channels 7 and the air exhaust channels 8 are arranged on two sides above the heat treatment unit modules 3 in bilateral symmetry;
the thermostat 9 is arranged at the rear side of the spin coater cabinet 1, and the thermostat 9 is communicated with the interior of each water cooling mechanism 4 through a guide water pipe;
the main air inlet pipeline 10 is arranged at the top of the spin coating developing machine case 1, and the main air inlet pipeline 10 is communicated with the interior of each air inlet pipeline through a first vertical pipeline 11;
the air blower 12 is arranged on the side wall of the spin coating developing machine case 1, and the working end of the air blower 12 is communicated with one end of the main air inlet pipeline 10;
and the main air outlet pipeline 13 is arranged at the top of the spin coater cabinet 1, and the main air outlet pipeline 13 is communicated with the inside of each air outlet pipeline through a second vertical pipeline 14.
Specifically, when each heat treatment module works, each heat treatment module generates hot air, the corresponding heat treatment module is cooled by the water cooling plate bottom plate 5 arranged in each water cooling mechanism 4, the corresponding heat treatment module is cooled, the air blower 12 is started at the same time, air is blown into the main air inlet pipeline 10 through the air blower 12, the air respectively enters each air inlet channel 7 through the main air inlet pipeline 10 and the first vertical pipeline 11, the air is guided into the corresponding heat treatment module through each air inlet channel 7, the hot air on the corresponding heat treatment module is blown into the air exhaust channel 8 corresponding to the air inlet channel 7, the air exhaust channel 8 respectively exhausts the hot air into the main air outlet pipeline 13 through the second vertical pipeline 14, and then the hot air is exhausted through the main air outlet pipeline 13.
Further, every vertical cabinet 2 all includes left side board 15 and right side board 16, the equal hollow structure of left side board 15 and right side board 16, the inside of right side board 16 is provided with the wind-guiding passageway 17 with every inlet channel 7 one-to-one, first vertical pipeline 11 is vertical to be located the inside one side of right side board 16, first vertical pipeline 11 passes through extension pipe 18 and every wind-guiding passageway 17's inside intercommunication, the top of first vertical pipe and the inside intercommunication of total inlet channel 7.
Specifically, when the air blower 12 works, air is blown into the main air inlet pipeline 10 and then is respectively guided into each first vertical pipeline 11 by the main air inlet pipeline 10, the air is guided into each air guide channel 17 by the extension pipes 18 arranged on each first vertical pipeline 11 and communicated with each air guide channel 17, each air guide channel 17 is communicated with the corresponding air inlet channel 7, then the air is guided into the air inlet channels 7, and then the air is respectively blown onto the corresponding heat treatment modules by each air inlet channel 7, so that hot air generated by the heat treatment modules is blown away.
As shown in fig. 7 to 9, each air intake channel 7 includes:
The blades 21 are provided with a plurality of blades, the blades 21 are uniformly arranged at the open end of the rectangular channel 19 along the vertical direction of the rectangular channel 19 in a turnover mode, and two ends of each blade 21 are connected with two sides of the inside of the rectangular channel 19 in a shaft mode through first rotating rods.
Specifically, after the wind enters into rectangular channel 19, every blade 21 that sets up all can overturn, can change the orientation of wind through the upset, makes the wind can be more even blow off the hot gas that the heat treatment module produced.
As shown in fig. 9 to 10, each air intake channel 7 further includes:
the rack 22 is vertically arranged on one side of the rectangular channel 19, and the rack 22 can move up and down along the vertical direction of the rectangular channel 19;
the number of the gears 23 is the same as that of each blade 21, the gears are correspondingly arranged on one side of each blade 21, the center of each gear 23 is in transmission connection with the first rotating rod of the corresponding blade 21 through the second rotating rod, and each gear 23 is meshed with the rack 22 and used for driving each blade 21 to turn.
Specifically, when each blade 21 needs to be turned over, the rack 22 capable of reciprocating up and down along the vertical direction of the rectangular channel 19 drives each gear 23 to rotate clockwise and counterclockwise, and then drives the blade 21 to turn over and swing.
Every inlet air channel 7 still all includes:
the sliding rail 24 is vertically positioned on one side of the rack 22, and the side wall of the sliding rail 24 is connected with the side wall of the rectangular channel 19;
a pair of bearing blocks 25 respectively disposed at upper and lower ends of the slide rail 24;
the screw 26 is vertically positioned between the two bearing blocks 25, and two ends of the screw 26 are respectively in shaft connection with the inner ring of each bearing block 25;
the screw rod sliding sleeve 27 is arranged on the screw rod 26, the screw rod sliding sleeve 27 is in threaded connection with the screw rod 26, and one side, away from the sliding rail 24, of the screw rod sliding sleeve 27 is connected with one side of the rack 22;
the limiting slide block 28 is arranged on one side, close to the slide rail 24, of the screw rod slide sleeve 27, and the limiting slide block 28 can slide in the slide rail 24 in a limiting mode;
and the driving motor 29 is arranged on the outer wall of one 25 of the two bearing blocks 25, and the output end of the driving motor 29 is in transmission connection with one end of the screw 26.
Specifically, when the rack 22 needs to be driven to move up and down, the driving motor 29 is started, the screw rod 26 is driven to rotate by the driving motor 29, the screw rod 26 drives the screw rod sliding sleeve 27 to move along the screw rod 26 in a threaded engagement mode, the limiting slide block 28 on the screw rod sliding sleeve 27 moves along the sliding rail 24 in a limiting mode, the screw rod sliding sleeve 27 drives the rack 22 to move simultaneously, and the driving motor 29 can rotate clockwise and counterclockwise so as to drive the screw rod sliding sleeve 27 and the rack 22 to move up and down.
As shown in fig. 6 to 7, each exhaust duct 8 includes:
the air duct 30 is horizontally arranged inside the left side plate 15, one end of the air duct 30 close to the heat treatment unit module 3 penetrates through one side of the left side plate 15 to extend outwards, and the second vertical pipeline 14 is communicated with the inside of the air duct 30;
and an exhaust fan 31 disposed at an extending end of the wind drum 30.
Specifically, the hot air generated by the heat treatment module is blown away through the air inlet pipeline, the blown-away hot air is sucked into the air duct 30 through the exhaust fan 31 arranged at the extending end of the air duct 30, the hot air in the air duct 30 is guided into the main air outlet pipeline 13 through the second vertical pipeline 14, and then the hot air is discharged through the main air outlet pipeline 13.
As shown in fig. 11 to 15, each water cooling mechanism 4 further includes:
the water-cooling cover plate 32 is mutually attached to the water-cooling plate bottom plate 5, the water-cooling cover plate 32 is fixedly connected with the water-cooling plate bottom plate 5, a metal pipe 33 is clamped between the water-cooling plate bottom plate 5 and the water-cooling plate cover plate, and two opposite side walls of the water-cooling plate bottom plate 5 and the water-cooling plate cover plate are respectively and correspondingly provided with fixing grooves for accommodating the metal pipe 33;
the guide cover 34 is arranged on one side, back to the water-cooling plate bottom plate 5, of the water-cooling plate cover plate, one end of the guide cover 34 is fixedly connected with a wind shield 35, the guide cover 34 is communicated with the wind shield 35, and one end, back to the guide cover 34, of the wind shield 35 is provided with a radiating fan 36;
one side of the water-cooling plate cover plate, which is back to the water-cooling plate bottom plate 5, is fixedly connected with a plurality of heat dissipation plates 37, and the heat dissipation plates 37 are arranged perpendicular to the water-cooling plate cover plate;
one end of the metal tube 33 is connected to a heat dissipating tube 38, and the heat dissipating tube 38 is fixed to the heat dissipating plate 37.
Specifically, in the coolant liquid that produces through thermostat 9 lets in tubular metal resonator 33, in the flow in-process in tubular metal resonator 33, carry out cold and hot replacement with water-cooling board bottom plate 5, water-cooling board apron, realize the water-cooling to water-cooling board bottom plate 5, continuously cool down the thermal treatment module through water-cooling board bottom plate 5, the heat firstly transmits to water-cooling board bottom plate 5 on, transmits to water-cooling board apron again. Because heating panel 37 and water-cooling plate apron welded fastening, consequently, the heat can be transmitted to heating panel 37 on, heating panel 37's setting has increased the heat radiating area of water-cooling plate, has improved the air-cooled radiating effect of water-cooling plate, and radiator fan 36 works, blows off the air current to heating panel 37 on, has taken away the heat on heating panel 37, realizes the air-cooling to the water-cooling plate through the heat dissipation to heating panel 37.
Example 2:
as shown in fig. 14, compared to embodiment 1, in this embodiment, a plurality of heat dissipation plates 37 are disposed in parallel in each water cooling mechanism 4, a space is provided between two adjacent heat dissipation plates 37, and each heat dissipation plate 37 is disposed in a wave shape along the length direction thereof.
Specifically, the heat dissipation plate 37 is wave-shaped and is arranged to further increase the contact area with air, more heat on the heat dissipation plate 37 can be taken away through air flowing, the heat dissipation effect of the water cooling plate bottom plate 5 in air cooling is improved, and the technical problem of improving the heat dissipation effect of the water cooling plate bottom plate 5 in air cooling is solved.
As shown in fig. 14 to 15, a temperature control valve 42 is disposed between the metal pipe 33 and the heat dissipation pipe 38 disposed in each water cooling mechanism 4, the temperature control valves 42 are respectively communicated with the metal pipe 33 and the heat dissipation pipe 38, a liquid inlet and outlet pipe 39 is disposed on one side of the temperature control valve 42, and the liquid inlet and outlet pipe 39 is communicated with the thermostat 9 through a guide water pipe.
Specifically, communicate with thermostat 9 through temperature-sensing valve 42, and temperature-sensing valve 42 can detect the temperature of the coolant liquid that tubular metal resonator 33 flows out, when the temperature of coolant liquid is lower, the coolant liquid is direct to flow to thermostat 9 from the drain pipe, radiator fan 36 closes this moment, when the temperature of coolant liquid is higher, radiator fan 36 opens, the coolant liquid flows into in radiator pipe 38 through temperature-sensing valve 42 again, dispel the heat through radiator fan 36, then continuously carry out water-cooling to water-cooling board bottom plate 5.
Further: in order to solve the technical problem of how to improve the heat dissipation effect of the heat dissipation blades 41, as shown in fig. 14 to 15, the following technical solutions are provided:
the pipe body of the radiating pipe 38 between each radiating plate 37 is rotatably sleeved with a rotating sleeve 40, the rotating sleeve 40 is vertically arranged, and a plurality of radiating blades 41 are fixedly connected to the outer side wall of the rotating sleeve 40 in the circumferential direction.
Specifically, when the heat dissipation fan 36 blows, the rotating sleeve 40 can rotate under the action of the wind of the heat dissipation fan 36, so that the heat dissipation blades 41 can uniformly dissipate heat, which is beneficial to improving the heat dissipation effect of the heat dissipation blades 41.
This application cools off the heat treatment module that corresponds through every water cooling mechanism 4, cooperation between rethread intake stack and the exhaust pipe makes the steam that heat treatment module produced discharge, the efficient is with every heat treatment unit module 3 continuously cool off and steam exhaust's technical problem has been solved, through water-cooling board bottom plate 5, water-cooling board apron and tubular metal resonator 33 carry out cold and hot replacement, realize the water-cooling to water-cooling board bottom plate 5, rethread radiator fan 36 blows off the air current to on the heating panel 37, the heat on the heating panel 37 has been taken away, realize the air-cooling to the water-cooling board through the heat dissipation to heating panel 37, make the water-cooling more stable, further water-cooling heat treatment module, the stable technical problem that continues water-cooling with heat treatment module has been solved.
The above is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, it is possible to make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be considered as the protection scope of the present invention.
Claims (10)
1. The cooling device for the heat treatment module of the spin coater is characterized by comprising a spin coater cabinet (1), wherein three vertical cabinets (2) are arranged in the spin coater cabinet (1), and heat treatment unit modules (3) are arranged in each vertical cabinet (2) at equal intervals in the vertical direction of each vertical cabinet (2);
the number of the water cooling mechanisms (4) is the same as that of the heat treatment unit modules (3), the water cooling mechanisms are arranged at the bottom of each heat treatment unit module (3) in a one-to-one correspondence manner, and each water cooling mechanism (4) comprises a water cooling plate bottom plate (5) fixed with the bottom of each heat treatment unit module (3) and used for carrying out water cooling treatment on the heat treatment unit modules (3);
the number of the ventilation mechanisms (6) is the same as that of the heat treatment unit modules (3), the ventilation mechanisms are arranged above each heat treatment unit module (3) in a one-to-one correspondence mode, each ventilation mechanism (6) comprises an air inlet channel (7) and an air exhaust channel (8), and the air inlet channels (7) and the air exhaust channels (8) are arranged on two sides above the heat treatment unit modules (3) in a bilateral symmetry mode;
the thermostat (9) is arranged on the rear side of the spin coater cabinet (1), and the thermostat (9) is communicated with the interior of each water cooling mechanism (4) through a guide water pipe;
the main air inlet pipeline (10) is arranged at the top of the spin coating developing machine cabinet (1), and the main air inlet pipeline (10) is communicated with the interior of each air inlet pipeline through a first vertical pipeline (11);
the air blower (12) is arranged on the side wall of the spin coating developing machine case (1), and the working end of the air blower (12) is communicated with one end of the main air inlet pipeline (10);
and the main air outlet pipeline (13) is arranged at the top of the spin coater chassis (1), and the main air outlet pipeline (13) is communicated with the inside of each air outlet pipeline through a second vertical pipeline (14).
2. The cooling device for the thermal treatment module of the spin coater according to claim 1, wherein each vertical cabinet (2) comprises a left side plate (15) and a right side plate (16), each of the left side plate (15) and the right side plate (16) has a hollow structure, the inside of the right side plate (16) is provided with air guide channels (17) corresponding to each air guide channel (7) one by one, the first vertical pipe (11) is vertically positioned on one side of the inside of the right side plate (16), the first vertical pipe (11) is communicated with the inside of each air guide channel (17) through an extension pipe (18), and the top of the first vertical pipe is communicated with the inside of the total air guide channel (7).
3. The cooling device for the thermal processing module of the track roller according to claim 1, wherein each air inlet channel (7) comprises:
rectangle passageway (19), the laminating sets up on the inside wall of vertical cabinet (2), and air inlet opening (20) with the inside intercommunication of wind-guiding passageway (17) are seted up to the inside of rectangle passageway (19), and the one side that rectangle passageway (19) are close to thermal treatment module is for opening the structure.
The blades (21) are provided with a plurality of blades, all the blades (21) are arranged at the open end of the rectangular channel (19) in an evenly-distributed mode and can be turned over along the vertical direction of the rectangular channel (19), and two ends of each blade (21) are connected with two sides of the interior of the rectangular channel (19) in a shaft mode through first rotating rods.
4. A cooling device for a thermal processing module of a track roller according to claim 3, wherein each air inlet channel (7) further comprises:
the rack (22) is vertically positioned on one side of the rectangular channel (19), and the rack (22) can move up and down along the vertical direction of the rectangular channel (19);
the number of the gears (23) is the same as that of each blade (21), the gears are located on one side of each blade (21) in a one-to-one correspondence mode, the center of each gear (23) is in transmission connection with the first rotating rod of the corresponding blade (21) through the second rotating rod, and each gear (23) is meshed with the rack (22) and used for driving each blade (21) to turn.
5. A cooling device for a thermal processing module of a track roller according to claim 4, wherein each air inlet channel (7) further comprises:
the sliding rail (24) is vertically positioned on one side of the rack (22), and the side wall of the sliding rail (24) is connected with the side wall of the rectangular channel (19);
a pair of bearing blocks (25) respectively arranged at the upper and lower ends of the slide rail (24);
the screw rod (26) is vertically positioned between the two bearing blocks (25), and two ends of the screw rod (26) are respectively in shaft connection with the inner ring of each bearing block (25);
the screw rod sliding sleeve (27) is arranged on the screw rod (26), the screw rod sliding sleeve (27) is in threaded connection with the screw rod (26), and one side, far away from the sliding rail (24), of the screw rod sliding sleeve (27) is connected with one side of the rack (22);
the limiting sliding block (28) is arranged on one side, close to the sliding rail (24), of the screw rod sliding sleeve (27), and the limiting sliding block (28) can slide in the sliding rail (24) in a limiting mode;
and the driving motor (29) is arranged on the outer wall of one bearing seat (25) of the two bearing seats (25), and the output end of the driving motor (29) is in transmission connection with one end of the screw rod (26).
6. A cooling device for a thermal process module of a track coater according to claim 1, wherein each exhaust channel (8) comprises:
the air duct (30) is horizontally arranged inside the left side plate (15), one end, close to the heat treatment unit module (3), of the air duct (30) penetrates through one side of the left side plate (15) to extend outwards, and the second vertical pipeline (14) is communicated with the inside of the air duct (30);
and the exhaust fan (31) is arranged at the extending end of the air duct (30).
7. The cooling device for the thermal processing module of the track coater according to claim 1, wherein each water cooling mechanism (4) further comprises:
the water-cooling cover plate (32) is attached to the water-cooling base plate (5), the water-cooling cover plate (32) is fixedly connected with the water-cooling base plate (5), a metal pipe (33) is clamped between the water-cooling base plate (5) and the water-cooling cover plate, and two opposite side walls of the water-cooling base plate (5) and the water-cooling cover plate are respectively and correspondingly provided with fixing grooves for accommodating the metal pipe (33);
the guide cover (34) is arranged on one side, back to the water-cooling plate bottom plate (5), of the water-cooling plate cover plate, one end of the guide cover (34) is fixedly connected with a wind shield (35), the guide cover (34) is communicated with the wind shield (35), and one end, back to the guide cover (34), of the wind shield (35) is provided with a cooling fan (36);
one side of the water cooling plate cover plate, which is back to the water cooling plate bottom plate (5), is fixedly connected with a plurality of heat dissipation plates (37), and the heat dissipation plates (37) are arranged perpendicular to the water cooling plate cover plate;
one end of the metal tube (33) is communicated with a radiating tube (38), and the radiating tube (38) is fixedly arranged on the radiating plate (37) in a penetrating way.
8. The cooling device for the thermal processing module of the spin coater according to claim 7, wherein a plurality of heat dissipation plates (37) are disposed in parallel in each water cooling mechanism (4), a space is provided between two adjacent heat dissipation plates (37), and each heat dissipation plate (37) is disposed in a wave shape along a length direction thereof.
9. The cooling device for the thermal processing module of the spin coater according to claim 8, wherein a temperature control valve (42) is disposed between the metal tube (33) and the heat dissipation tube (38) disposed in each water cooling mechanism (4), the temperature control valve (42) is respectively communicated with the metal tube (33) and the heat dissipation tube (38), a liquid inlet and outlet tube (39) is disposed at one side of the temperature control valve (42), and the liquid inlet and outlet tube (39) is communicated with the thermostat (9) through a guide water tube.
10. The cooling device for the thermal processing module of the spin coater according to claim 9, wherein a rotating sleeve (40) is rotatably sleeved on the pipe body of the heat dissipation pipe (38) between each heat dissipation plate (37), the rotating sleeve (40) is vertically arranged, and a plurality of heat dissipation blades (41) are circumferentially and fixedly connected to the outer side wall of the rotating sleeve (40).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110748798.8A CN113448183A (en) | 2021-07-02 | 2021-07-02 | Cooling device for heat treatment module of spin coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110748798.8A CN113448183A (en) | 2021-07-02 | 2021-07-02 | Cooling device for heat treatment module of spin coater |
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| CN113448183A true CN113448183A (en) | 2021-09-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110748798.8A Pending CN113448183A (en) | 2021-07-02 | 2021-07-02 | Cooling device for heat treatment module of spin coater |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113937038A (en) * | 2021-11-12 | 2022-01-14 | 芯达半导体设备(苏州)有限公司 | Heat treatment unit exhaust system |
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