CN113447531A - Indium oxide-based gas sensor manufacturing method and method for detecting methanol - Google Patents

Indium oxide-based gas sensor manufacturing method and method for detecting methanol Download PDF

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CN113447531A
CN113447531A CN202110560782.4A CN202110560782A CN113447531A CN 113447531 A CN113447531 A CN 113447531A CN 202110560782 A CN202110560782 A CN 202110560782A CN 113447531 A CN113447531 A CN 113447531A
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sensor
indium oxide
methanol
based gas
gas sensor
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CN113447531B (en
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程鹏飞
李旭
王莹麟
刘彦明
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Xidian University
Wuhu Research Institute of Xidian University
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Wuhu Research Institute of Xidian University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Abstract

The invention belongs to the technical field of semiconductor oxide gas sensors, and discloses a preparation method of an indium oxide-based gas sensor and a method for detecting methanol, wherein the method for detecting methanol by the indium oxide-based gas sensor comprises the following steps: when the sensor is exposed to the air, oxygen in the air is adsorbed on the surface of the material, and oxygen molecules capture electrons, so that the sensor presents a high-resistance state in the air; when the sensor is placed in methanol gas, the methanol molecules will react with the adsorbed oxygen and release electrons, so that the sensor exhibits a tendency to decrease in resistance. The invention uses NaF as a synthesis template to carry out spray pyrolysis reaction. The reaction process is green and pollution-free, the synthesis process is simple, and a new idea is provided for synthesizing the metal semiconductor oxide by using a spray pyrolysis method. The sensor still keeps extremely short response recovery time for methanol gas with different concentrations, and is very important in practical application.

Description

Indium oxide-based gas sensor manufacturing method and method for detecting methanol
Technical Field
The invention belongs to the technical field of semiconductor oxide gas sensors, and particularly relates to a preparation method of an indium oxide-based gas sensor and a method for detecting methanol.
Background
At present, new energy automobiles are in the process of being transported in the face of the current situation of petroleum energy shortage and environmental pollution. New energy vehicles include hybrid electric vehicles, battery electric vehicles and fuel cell vehicles. Wherein, the fuel cell uses hydrogen or methanol as fuel, which gets rid of the dependence on petroleum energy and has wide market prospect. For methanol fueled automobiles, detection of methanol is essential because methanol is a flammable and explosive gas. Meanwhile, in order to regulate the release of the methanol fuel and reasonably control the amount of the methanol, the real-time monitoring of the methanol is also important. For the detection of methanol, gas sensors have been widely studied and applied because of their small size, light weight, easy integration, and real-time detection.
The prior art gas sensors for methanol include quartz crystal type sensors, conductive polymer material type sensors, solid electrolyte type sensors, and metal semiconductor oxide sensors. Among them, metal semiconductor oxides have been receiving wide attention because of their good stability and high response value. The response of a sensor made of Tan CuO as a main material to 100ppm methanol at 190 ℃ reaches 2.6. yellow et al prepared a metal oxide semiconductor thin film gas sensor having a response value of 3.51 to 100ppm methanol at 200 ℃ and a very fast response recovery time (1s/1 s).
Metal semiconductor oxides are generally classified into n-type semiconductors and p-type semiconductors according to the type of carriers. n-type semiconductors generally have higher response values to volatile organic gases than p-type semiconductors. In an n-type semiconductor, In2O3The sensor as a sensitive material can be used for detecting various gases, such as acetone, ethanol, formaldehyde, trimethylamine and the like. In order to obtain better performance, a great deal of surface modification work of sensitive materials is carried out, such as preparing a porous structure and a large specific surface area, so that the surface of the sensitive material is increased to be more activeA site. Besides, the heterojunction can be obtained by doping with other materials, thereby shortening the time of the sensor for the reaction gas. However, the sensitivity of the existing gas sensor for detecting organic gas is not high, and the working temperature of the semiconductor metal oxide gas sensor is high; simultaneously as a typical n-type semiconductor In2O3The selectivity of different gases is poor, and particularly methanol, ethanol, acetone and the like are distinguished.
Through the above analysis, the problems and defects of the prior art are as follows:
(1) the existing gas sensor has low sensitivity of detecting organic gas and higher working temperature of the semiconductor metal oxide gas sensor.
(2) As a typical n-type semiconductor In2O3The selectivity of different gases is poor, and particularly methanol, ethanol, acetone and the like are distinguished.
The difficulty in solving the above problems and defects is:
(1) the working temperature of the n-type metal semiconductor oxide to the organic volatile gas is generally higher, and the n-type metal semiconductor oxide needs to be overcome through certain modification work.
(2) The method has high sensitivity to methanol and high response value to ethanol, and is difficult to identify methanol and ethanol simultaneously.
(3) The experimental steps for preparing the sensitive material are complicated, and a simple method is needed for synthesizing the material, so that the mass production is realized.
The significance of solving the problems and the defects is as follows: studies have shown that the presence of NaF, as a template during the reaction, allows to obtain a loose and porous structure. Through test data, the response value of 10.51 can be reached for 100ppm of methanol gas, and the response/recovery time is only 1s/9 s. In general, in a high-concentration gas environment, the response value of the sensor tends to be saturated, but the sensor in the work still keeps a high response value for high-concentration methanol gas.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a preparation method of an indium oxide-based gas sensor and a method for detecting methanol.
The present invention is achieved by a method for detecting methanol using an indium oxide-based gas sensor, the method comprising:
when the sensor is exposed to air, oxygen in the air will adsorb on the surface of the material and the oxygen molecules will capture electrons. The oxygen gas plays a role of an electron acceptor, the number of electrons of the sensitive material is reduced in the process, and a thick electron depletion layer is formed on the surface, so that the sensor presents a high-resistance state in the air;
when the sensor is placed in methanol gas, methanol molecules will react with adsorbed oxygen and release electrons back into the conduction band of the sensitive material, the thickness of the surface depletion layer decreases, and the sensor exhibits a tendency to decrease in resistance.
Further, the material is adsorbed in the surface of the material, the material is a porous material, and the inner surface and the outer surface of the porous material participate in gas sensing reaction, so that the gas sensing property of the material is promoted.
Further, the porous structure of the porous material generates a large specific surface area, provides active sites and realizes gas transfer.
Another object of the present invention is to provide a method for manufacturing an indium oxide-based gas sensor, which is used for a method for detecting methanol, the method comprising:
step one, weighing a certain mass of indium chloride, and dispersing the indium chloride in a certain volume of deionized water; continuously stirring at room temperature until the solution is transparent; adding a certain amount of sodium fluoride into the transparent solution, stirring for a period of time to turn the solution into white, then continuously stirring, and carrying out the next spray pyrolysis experiment on the obtained solution;
step two, extracting a certain amount of the prepared solution, adding the solution into an atomization device in spray pyrolysis, setting the temperature of spraying, and adding N2Setting as carrier gas;
collecting a terminal reaction product after the solution completely reacts, cleaning and ultrasonically treating twice by using deionized water, cleaning once by using ethanol, and drying at a corresponding temperature in a vacuum drying oven;
fourthly, the dried product is placed in a muffle furnace for treatment; ultrasonically dispersing the prepared sensitive material in deionized water, coating the sensitive material on a ceramic tube of a sensor by using a brush, and then treating a sensitive electrode; and welding the sensitive electrode and the heating wire on the hexagonal base, aging for three days, and starting to test after the resistance of the device is stable.
Further, in the first step, 1.026g indium chloride was weighed and dispersed in 60mL deionized water.
Further, in the first step, the mass of the added sodium fluoride is 0.882g, and the stirring is continued for 2 h.
Further, the second step specifically comprises the following steps: extracting 10mL of the prepared solution, adding the solution into an atomization device in spray pyrolysis, setting the temperature of spraying to be 800 ℃, and adding N2As carrier gas, N2The flow rate of (2) was set to 500 mL/min.
Further, in the third step, the drying temperature is 60 ℃, and the drying time is as follows: and (5) standing overnight.
Further, in the fourth step, the specific process of treating the dried product in a muffle furnace is as follows: and putting the dried product into a muffle furnace, calcining for 2h at 500 ℃, and raising the temperature at the rate of 2 ℃/min.
Further, in the fourth step, the calcination is carried out for 2h at 350 ℃, and the heating rate is 1 ℃/min.
Another object of the present invention is to provide an indium oxide-based gas sensor fabricated by the indium oxide-based gas sensor fabrication method.
The invention also aims to provide a new energy automobile which is provided with the indium oxide-based gas sensor
By combining all the technical schemes, the invention has the advantages and positive effects that: the invention realizes the loose porous structure of the surface of the sensitive material, thereby improving the specific surface area and improving the sensitivity of the sensor; the response recovery time of the sensor to the methanol is shortened.
The invention uses NaF as a synthesis template to carry out spray pyrolysis reaction. The reaction process is green and pollution-free, the synthesis process is simple, and a new idea is provided for synthesizing the metal semiconductor oxide by using a spray pyrolysis method.
Porous In synthesized by the invention2O3The material has large specific surface area, thereby being methanol and In2O3The contact provides more possibilities, and the response value can reach 10.51 for 100ppm of methanol gas.
The sensor still maintains extremely short response recovery time for different concentrations of methanol gas, which is very important in practical application.
The comparative analysis of the present invention with respect to the prior art is as follows:
TABLE 1 operating temperatures and response values of various sensors
Sensor with a sensor element Optimum working temperature (. degree.C.) Response value S ═ Ra/Rg
NiO 300 10.9
SnO2 280 ~5
SmFeO3 320 ~1.69
SnO2 - 9
In2O3 240 10.51
Drawings
Fig. 1 is a flow chart of a method for manufacturing an indium oxide-based gas sensor according to an embodiment of the present invention.
Fig. 2 is a scanning electron microscope image of a sample provided by an embodiment of the present invention.
Figure 3 is a graphical representation of the sensitivity curve with operating temperature for a 100ppm concentration methanol device provided by an example of the present invention.
Fig. 4 is a graph illustrating the variation of the resistance of the device in air with the operating temperature according to the embodiment of the present invention.
Fig. 5 is a graph showing the dynamic sensitivity curves of the device provided by the embodiment of the invention for methanol gas with different concentrations.
Fig. 6 is a linear fit of the device provided by the embodiment of the invention for different concentrations of methanol gas.
Fig. 7 is a bar graph of selectivity of devices provided by embodiments of the present invention for different organic gases at optimal operating temperatures.
Fig. 8 is a graph of the resistance of a device provided by an embodiment of the present invention at its optimum operating temperature for five cycles of 100ppm methanol gas.
Fig. 9 is a graph showing the response recovery time of the device provided by the embodiment of the present invention at an operating temperature of 240 c for 100ppm of methanol gas.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In view of the problems in the prior art, the present invention provides a method for preparing an indium oxide-based gas sensor and a method for detecting methanol, and the present invention is described in detail below with reference to the accompanying drawings.
The method for detecting methanol by using the indium oxide-based gas sensor provided by the invention can be implemented by adopting other steps by persons skilled in the art, and the method for detecting methanol by using the indium oxide-based gas sensor provided by the invention in fig. 1 is only one specific example.
As shown in fig. 1, an indium oxide-based gas sensor provided in an embodiment of the present invention includes:
s101: weighing a certain mass of indium chloride, and dispersing in a certain volume of deionized water; continuously stirring at room temperature until the solution is transparent; adding a certain amount of sodium fluoride into the transparent solution, stirring for a period of time to turn the solution into white, then continuously stirring, and carrying out the next spray pyrolysis experiment on the obtained solution.
S102: extracting a certain amount of the prepared solution, adding the solution into an atomization device in spray pyrolysis, setting the temperature of spraying, and adding N2Is provided as a carrier gas.
S103: and after the solution completely reacts, collecting a terminal reaction product, washing with deionized water twice by ultrasonic waves, washing with ethanol once, and drying at a corresponding temperature in a vacuum drying oven.
S104: putting the dried product in a muffle furnace for treatment; ultrasonically dispersing the prepared sensitive material in deionized water, coating the sensitive material on a ceramic tube of a sensor by using a brush, and then treating a sensitive electrode; and welding the sensitive electrode and the heating wire on the hexagonal base, aging for three days, and starting to test after the resistance of the device is stable.
In S101 provided by the embodiment of the invention, 1.026g of indium chloride is weighed and dispersed in 60mL of deionized water.
In S101 provided by the embodiment of the invention, the mass of the added sodium fluoride is 0.882g, and the continuous stirring time is 2 h.
In S102 provided by the embodiment of the present invention, the specific process is: extracting 10mL of the prepared solution, adding the solution into an atomization device in spray pyrolysis, setting the temperature of spraying to be 800 ℃, and adding N2As carrier gas, N2The flow rate of (2) was set to 500 mL/min.
In S103 provided by the embodiment of the present invention, the drying temperature is 60 ℃, and the drying time is: and (5) standing overnight.
In S104 provided by the embodiment of the present invention, a specific process of disposing the dried product in the muffle furnace is as follows: and putting the dried product into a muffle furnace, calcining for 2h at 500 ℃, and raising the temperature at the rate of 2 ℃/min.
In S104 provided by the embodiment of the invention, the calcination is carried out for 2h at 350 ℃, and the heating rate is 1 ℃/min.
The technical scheme of the invention is described in detail in combination with simulation experiments.
The method for detecting methanol by using the indium oxide-based gas sensor provided by the invention adopts a spray pyrolysis method and mild NaF as a salt template to synthesize microspheres with porous structures, and the specific experimental method is as follows:
the chemical reagents in the experiment are analytically pure and can be directly used without further purification. Drugs used in the experiment: indium chloride and sodium fluoride are both available from Shanghai nationality medicine.
The first step is as follows: preparing precursor liquid for spray pyrolysis
Dissolving 1.026g of indium chloride into 60mL of deionized water, adding 0.882g of sodium fluoride into the solution after the solution is stirred uniformly and transparently, changing the solution into white, and continuously stirring for 2h to obtain a solution for the next spray pyrolysis experiment.
The second step is that: spray pyrolysis
The prepared solution is pumped by about 10mL and injected into an ultrasonic atomizer, and the atomization amount is adjusted to the maximum. The atomized droplets were blown into a quartz tube in a tube furnace using nitrogen as a carrier gas. The heating temperature of the tube furnace was 800 ℃. The end of the quartz tube was used to collect the final product using a conical flask containing deionized water. And continuously pumping after the solution is atomized until all the solution is atomized, and finally collecting white precipitate in the conical flask. The resulting precipitate was ultrasonically centrifuged 3 times with deionized water and ethanol 1 time, and dried at 60 ℃ for 10 hours. The powder obtained was calcined in a muffle furnace at 500 ℃ for 2 hours at a heating rate of 1 ℃/min to stabilize the crystalline phase of the product.
Both the inner and outer surfaces of the porous material may participate in gas sensing reactions, which will promote the gas sensing properties of the material. The porous structure also generates a large specific surface area which can provide more active sites. Higher pore volumes facilitate gas transfer. Both are critical to the interaction between the sensing material and the target gas, and the interaction promotes the response of the gases. When the sensor is exposed to air, oxygen in the air is adsorbed on the surface of the material, and the oxygen molecules capture electrons, so that the sensor presents a high-resistance state in the air. When the sensor is placed in methanol gas, the methanol molecules will react with the adsorbed oxygen and release electrons, so that the sensor exhibits a tendency to decrease in resistance.
The above description is only for the purpose of illustrating the present invention and the appended claims are not to be construed as limiting the scope of the invention, which is intended to cover all modifications, equivalents and improvements that are within the spirit and scope of the invention as defined by the appended claims.

Claims (10)

1. A method for detecting methanol by an indium oxide-based gas sensor, the method comprising:
when the sensor is exposed to the air, oxygen in the air is adsorbed on the surface of the material, and oxygen molecules capture electrons, so that the sensor presents a high-resistance state in the air;
when the sensor is placed in methanol gas, the methanol molecules will react with the adsorbed oxygen and release electrons, so that the sensor exhibits a tendency to decrease in resistance.
2. The indium oxide based gas sensor for detecting methanol as claimed in claim 1 wherein the adsorption is in the surface of a material which is porous, and both the inner and outer surfaces of the porous material participate in the gas sensing reaction to promote the gas sensing properties of the material.
3. The indium oxide based gas sensor for detecting methanol as claimed in claim 2, wherein the porous structure of the porous material generates a large specific surface area to provide active sites for gas transfer.
4. A method of fabricating an indium oxide-based gas sensor according to any one of claims 1 to 3, the method comprising:
step one, weighing a certain mass of indium chloride, and dispersing the indium chloride in a certain volume of deionized water; continuously stirring at room temperature until the solution is transparent; adding a certain amount of sodium fluoride into the transparent solution, stirring for a period of time to turn the solution into white, then continuously stirring, and carrying out the next spray pyrolysis experiment on the obtained solution;
step two, extracting a certain amount of the prepared solution, adding the solution into an atomization device in spray pyrolysis, setting the temperature of spraying, and adding N2Setting as carrier gas;
collecting a terminal reaction product after the solution completely reacts, cleaning and ultrasonically treating twice by using deionized water, cleaning once by using ethanol, and drying at a corresponding temperature in a vacuum drying oven;
fourthly, the dried product is placed in a muffle furnace for treatment; ultrasonically dispersing the prepared sensitive material in deionized water, coating the sensitive material on a ceramic tube of a sensor by using a brush, and then treating a sensitive electrode; and welding the sensitive electrode and the heating wire on the hexagonal base, aging for three days, and starting to test after the resistance of the device is stable.
5. The method for manufacturing an indium oxide-based gas sensor according to claim 4, wherein in the first step, 1.026g of indium chloride is weighed and dispersed in 60mL of deionized water.
6. The indium oxide-based gas sensor fabrication method according to claim 4, wherein in the first step, the mass of the added sodium fluoride is 0.882g, and the duration of the stirring is 2 hours.
7. The indium oxide-based gas sensor manufacturing method according to claim 4, wherein the second step comprises the specific process of: extracting 10mL of the prepared solution, adding the solution into an atomization device in spray pyrolysis, setting the temperature of spraying to be 800 ℃, and adding N2As carrier gas, N2The flow rate of (2) was set to 500 mL/min.
8. The indium oxide-based gas sensor manufacturing method according to claim 4, wherein in the third step, the drying temperature is 60 ℃, and the drying time is: overnight;
in the fourth step, the specific process of treating the dried product in the muffle furnace is as follows: placing the dried product in a muffle furnace, calcining for 2h at 500 ℃, wherein the heating rate is 2 ℃/min;
in the fourth step, the mixture is calcined at 350 ℃ for 2h, and the heating rate is 1 ℃/min.
9. An indium oxide-based gas sensor fabricated by the indium oxide-based gas sensor fabrication method of claim 4.
10. A new energy automobile, characterized in that the new energy automobile is equipped with the indium oxide-based gas sensor according to claim 9.
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