CN113433606B - Quasi-metal line structure for realizing on-chip wavefront shaping and application of asymmetric transmission - Google Patents
Quasi-metal line structure for realizing on-chip wavefront shaping and application of asymmetric transmission Download PDFInfo
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- 239000010410 layer Substances 0.000 claims abstract description 34
- 239000011229 interlayer Substances 0.000 claims abstract description 5
- 230000010365 information processing Effects 0.000 claims abstract description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 12
- 229910052709 silver Inorganic materials 0.000 claims description 12
- 239000004332 silver Substances 0.000 claims description 12
- 229910052752 metalloid Inorganic materials 0.000 claims description 10
- 150000002738 metalloids Chemical class 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 230000000737 periodic effect Effects 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
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- G02B5/00—Optical elements other than lenses
- G02B5/008—Surface plasmon devices
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
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Abstract
The invention provides a quasi-metal wire structure for realizing on-chip wavefront shaping and application of asymmetric transmission. The one-dimensional plasmon metallic wire structure is formed by stacking a bottom metal film, a middle dielectric medium and an upper metal trapezoidal nano antenna; the metal trapezoid nano-antennas are periodically and longitudinally arranged on the interlayer dielectric in a one-dimensional mode. The one-dimensional plasmon metallic line structure can respond to the wavelength of a broadband visible light region, and realizes in-plane SPP wave deflection in broadband visible light. On the basis of the structure, the array grating is arranged to form a cascade double-layer structure, the structure can realize the transmission function of the asymmetric deflection of the SPP in the plane, and then the function of the asymmetric lens in the plane is realized through further design. The one-dimensional plasmon quasi-metallic line structure and the cascade structure have the advantages of simple structure, small scale, easy on-chip integration and the like, and can be widely applied to the important fields of on-chip conversion optical devices, waveguide devices, information processing, spectrometers, sensing and the like.
Description
Technical Field
The invention belongs to the technical field of micro-nano near-field optics and integrated photonics, and particularly relates to a technology for on-chip wave front shaping design and on-chip asymmetric transmission based on a surface plasma polaron.
Background
Conventional three-dimensional metamaterials and two-dimensional metamaterials exhibit overwhelming capabilities in controlling electromagnetic waves. However, the challenges of fabricating complex three-dimensional bulk structures or nano-scale alignment between multiple layers limit their practical applications and do not enable on-chip integrated photonic devices. Therefore, the emerging on-chip meta-device dimension reduction design has wide research value.
To implement multifunctional on-chip photonic integrated devices, there is a particular need for a system of devices that can manipulate surface waves in-plane. Surface Plasmon Polaritons (SPPs) are electromagnetic waves that propagate along the interface between a metal and a dielectric and are exponentially attenuated in a direction perpendicular to the interface. Since it is confined to the sub-wavelength range with significant field enhancement, it can be used in a variety of electronic and photonic applications. Controlling the propagation of SPPs along metal-dielectric interfaces is a key to the development of integrated plasmonic systems on-chip. Subwavelength structures have become a useful way to control surface waves. Currently, different structures such as nano-slits, nano-holes, rings, bragg mirrors, dielectric micro-disks or micro-cubes, plasmonic super-surfaces (supergratings), etc. have been used to achieve modulation of SPP propagation. However, these dielectric structures or super-surfaces are mainly based on effective refractive index theory to achieve the manipulation and focusing of SPP waves, and generally have large in-plane dimensions, which makes further on-chip integration difficult.
In addition, irreversible light propagation has attracted a great deal of attention due to its potential value in integrated optics and irreversible optical components. Irreversibility has traditionally been achieved by magneto-optical materials, time-varying components or nonlinear materials that have large losses and are too bulky to be integrated into modern photonic systems. As far as we know, there is no research method for on-chip irreversible light propagation of SPP waves in visible light, and therefore it is very challenging to realize broadband on-chip irreversible light propagation, and therefore new technical innovations and innovations are urgently needed how to make various optical devices more compact, more miniaturized, multifunctional, integrated on-chip, and the like.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides an asymmetric transmission technology for realizing broadband in-plane deflection design and a cascade double-layer structure thereof based on a one-dimensional plasmon metallic line structure.
The technical scheme provided by the invention is as follows:
in a first aspect, the invention provides a quasi-metal wire structure for realizing on-chip wave front shaping, which is formed by stacking a bottom metal film, a middle dielectric medium and an upper metal trapezoidal nano antenna;
the metal trapezoid nano-antennas are periodically and longitudinally arranged on the interlayer dielectric in a one-dimensional mode.
Further, through optimization of structural parameters of the nano antenna, the SPP in a broadband visible light region is deflected in a plane through the one-dimensional plasmon metallic wire structure.
Further, the structural parameters include upper bottom, lower bottom, height, thickness and period of the nano-antenna. The period is the longitudinal spacing of the nano-antennas.
Further, the material of the bottom metal film includes gold, silver, aluminum, copper, and the like; the metal trapezoidal nano antenna is made of gold, silver, aluminum, copper and the like.
Further, the material of the interlayer dielectric is silicon dioxide. In a second aspect, the present invention provides a one-dimensional plasmon metallic line structure cascade double-layer structure, which is formed by arranging a periodic grating array in parallel on one side of the nano-antenna described in the first aspect.
Further, through double-layer structure parameter optimization, after SPPs propagating from the opposite direction perpendicular to the array structure pass through the double-layer structure, asymmetric deflection is achieved.
Furthermore, on the basis of realizing asymmetric deflection, the double-layer structure further realizes the function of an in-plane asymmetric lens by longitudinally and symmetrically arranging the trapezoidal nano-antennas, namely the function of a convergent lens during forward propagation and the function of a divergent lens during backward propagation.
Further, the parameters of the double-layer structure comprise the upper bottom, the lower bottom, the height, the thickness and the period of the nano antenna, and the parameters of the grating structure comprise the length, the width, the thickness and the period of the grating and the distance between the nano antenna and the grating.
Furthermore, the period of the nano antenna is the longitudinal distance of the nano antenna; the period of the gratings is the spacing between the gratings.
Furthermore, the thicknesses of the bottom layer silver film and the middle layer dielectric medium, and the upper layer silver trapezoidal nano antenna and the periodic grating structure are both in sub-wavelength or wavelength magnitude.
In a third aspect, the invention utilizes the cascaded two-layer structure of the second aspect as an asymmetric transmission device (e.g., asymmetric lens) for use in on-chip conversion optics, information processing, spectrometers, and sensors.
Compared with the traditional SPP device operated in a plane, the asymmetric propagation technology for realizing the deflection design in a visible light broadband plane and the cascade double-layer system thereof based on the one-dimensional plasmon metallic wire structure has the following advantages and beneficial effects:
(1) the one-dimensional plasmon metallic structure consisting of only one row of trapezoidal nano antenna arrays vertical to the propagation direction realizes the in-plane SPP deflection function of the broadband visible light region, has simple structure and easy processing, and simultaneously has the important advantages of ultramicro size, easy processing, broadband response, easy on-chip cascade integration and the like.
(2) An in-plane double-layer system is formed by cascading a well-designed periodic grating structure behind a one-dimensional plasmon metallic wire, so that the transmission function of the in-plane SPP in a broadband visible light region can be realized, and the design is very simple.
(3) Based on the asymmetric deflection function of the double-layer system in the step (2), the in-plane asymmetric transmission technology (such as asymmetric lenses) can be realized by symmetrically arranging the trapezoidal structures in the one-dimensional plasmon metal lines in the double layers, and the technology can be applied to important fields such as on-chip conversion optical devices, information processing, spectrometers, sensors and the like.
Drawings
FIG. 1 is a schematic diagram of an in-plane SPP deflection function implemented by a one-dimensional plasmon metallic wire structure and a schematic diagram of a specific structure of a trapezoid unit in the present invention;
FIG. 2 is a simulation effect diagram of a corresponding relationship between an in-plane deflection angle of an SPP deflected by a one-dimensional plasmon metallic line and a change of an incident wavelength in the broadband visible light region according to an embodiment of the present invention;
FIG. 3 is a diagram illustrating a simulation effect of a planar electric field generated by SPPs deflected by a one-dimensional plasmon metalloid line at different wavelengths according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of an in-plane double-layer structure and a positional relationship of a one-dimensional plasmon metalloid line post-cascaded grating in accordance with the present invention;
FIG. 5 is a simulation effect diagram of a corresponding relationship between in-plane deflection angles of asymmetric deflection realized by SPPs in a broadband visible light region through a cascaded double-layer structure according to an embodiment of the present invention, and changes of incident wavelengths;
FIG. 6 is a diagram illustrating the simulation effect of the planar electric field of the embodiment of the present invention in which SPPs propagate forward and backward at a single wavelength, respectively, through a cascaded two-layer structure to achieve asymmetric deflection;
FIG. 7 is a schematic diagram of asymmetric focusing achieved by using an in-plane double-layer structure of a one-dimensional plasmon metalloid line cascaded grating in the present invention;
FIG. 8 is a diagram illustrating a simulation effect of a planar electric field of an embodiment of the present invention in which SPPs achieve asymmetric focusing through a cascaded two-layer structure at a single wavelength;
in the figure, H1Thickness of the bottom silver layer, H2Thickness of the intermediate layer silicon dioxide, H3Thickness of the top silver microstructure, W1、W2Upper and lower bottoms of trapezoidal structure, LyIs trapezoidalHeight, PyIs the period of the cell in the y direction, WgThe width of the cascade grating, L the length of the cascade grating, and d the length of the gap between the trapezoid and the grating.
Detailed Description
In order to explain the structure of the invention and the functions realized by the invention more clearly, the invention is further explained by the following embodiments in combination with the attached drawings, the content of which is not limited to this.
Example 1
The embodiment is a specific design process of a one-dimensional plasmon based metal line structure and a specific implementation method for realizing in-plane deflection of an SPP in a broadband visible light region by using the same.
In this embodiment, a trapezoidal silver nano antenna is used as a unit structure of a one-dimensional plasmon metallic wire, as shown in fig. 1, a slit with a width of 100nm is etched on a silver film with a thickness of 200nm at the bottom for exciting an SPP mode, and a silicon dioxide layer is used as an intermediate layer with a thickness of 50 nm. The trapezoidal silver nano antenna layer is optimized and simulated by using electromagnetic simulation software FDTD Solutions, the obtained trapezoidal period (namely the longitudinal distance of the nano antenna) is 950nm, the lower bottom and the upper bottom are respectively 450nm and 60nm, and the thickness and the height are respectively 130nm and 800 nm. The SPP mode excited by the slit propagates in the plane and passes through the one-dimensional plasmon metallic line to realize in-plane deflection, and a simulation diagram of the corresponding relation of the in-plane deflection angle of the SPP along with the change of the incident wavelength is drawn in FIG. 2. Fig. 3 shows simulation effect diagrams of in-plane deflection electric field distributions of the SPP mode at three wavelengths of 520nm, 600nm and 680nm, indicating deflection angles (relative to the incident direction) of 33.2 °, 38.9 ° and 45.9 °, respectively, and it can be seen that there is a good in-plane wavefront shaping effect in the broadband visible region.
Example 2
In this embodiment, the asymmetric deflection in the broadband visible light region of the SPP can be realized by obtaining an in-plane double-layer structure by cascading gratings after a one-dimensional plasmon metallic line, as shown in fig. 4.
In this embodiment, a periodic silver grating structure is placed at a distance of 900nm from the back of the one-dimensional plasmon metalloid line in fig. 1, and the structure parameters and positions of the grating of the second layer are optimally designed by FDTD Solutions. Considering the performance of asymmetric transmission and the size of the device, the parameters of the grating are selected as follows: the period of the grating (i.e., the longitudinal distance of the grating) was also 950nm, the length and width were 1350nm and 150nm, respectively, the thickness was the same as the thickness of the ladder structure, both 130nm, and the ridges of the grating were aligned with the gaps between adjacent ladder nano-antennas. Two identical slits are respectively placed on both sides of the cascade system for exciting SPP modes propagating in opposite directions. In the design of the present embodiment, after SPP propagating from different directions pass through such a two-layer system, asymmetric transmission in the broadband visible region on the sheet is exhibited, and as shown in fig. 5, a simulation graph of the correspondence of the deflection angle with the change of the incident wavelength is plotted according to the deflection angle of SPP propagating from different directions and the wavelength of the incident light. Fig. 6 shows a simulation effect diagram of the distribution of the in-plane deflection electric field of the forward-propagating and backward-propagating SPP mode with the wavelength of 672nm after passing through the double-layer structure, and it can be seen that the wavefront propagating forward along the x direction through the double-layer structure deflects downward, and the wavefront deflects upward during backward propagation along the-x direction.
Based on the asymmetric transmission performance of the double-layer system, the asymmetric lens function design of in-plane transmission is further performed in this embodiment, as shown in fig. 7, the trapezoidal nano-antennas are longitudinally and symmetrically arranged, and the grating is unchanged. Fig. 8 is a simulation effect diagram of in-plane electric field distribution at a wavelength of 656nm, and a good in-plane asymmetric lens function effect can be seen from the wave front distribution of the SPP mode transmitted in different directions, that is, a converging lens function in forward propagation and a diverging lens function in backward propagation.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any modification, equivalent replacement, and improvement made by those skilled in the art within the technical scope of the present invention should be included in the scope of the present invention.
Claims (10)
1. Realize the quasi-linear metal structure of wave front shaping on the chip, its characteristic is: the antenna is formed by stacking a bottom metal film, a middle dielectric medium and an upper metal trapezoidal nano antenna;
the metal trapezoid nano-antennas are periodically and longitudinally arranged on the interlayer dielectric in a one-dimensional mode.
2. The metalloid line structure of claim 1, wherein: through optimization of structural parameters of the nano antenna, SPPs in a broadband visible light region are deflected in a plane after passing through the quasi-metal wire structure.
3. The metalloid line structure of claim 2, wherein: the structural parameters comprise the upper bottom, the lower bottom, the height, the thickness and the period of the nano antenna.
4. The metalloid line structure of claim 3, wherein: the period is the longitudinal spacing of the nano-antennas.
5. The metalloid line structure of claim 1, wherein: the material of the bottom metal film comprises gold, silver, copper and aluminum; the metal trapezoidal nano antenna is made of gold, silver, copper and aluminum.
6. The metalloid line structure of claim 1, wherein: the material of the interlayer dielectric is silicon dioxide.
7. One-dimensional plasmon metalloid line structure cascade bilayer structure, its characterized in that: is formed by arranging a periodic grating array in parallel on one side of the nano-antenna according to any one of claims 1 to 6.
8. The cascaded bilayer structure of claim 7, wherein: through the optimization of parameters of the double-layer structure, the SPP which is transmitted from the opposite direction vertical to the array structure passes through the double-layer structure, and then the asymmetric deflection is realized.
9. The cascaded bilayer structure of claim 8, wherein: the parameters of the double-layer structure comprise the upper bottom, the lower bottom, the height, the thickness and the period of the nano antenna, and the parameters of the grating structure comprise the length, the width, the thickness and the period of the grating and the distance between the nano antenna and the grating.
10. Use of the cascaded bilayer structure of claim 7 as an asymmetric transmission device in on-chip switching optics, information processing, spectrometers and sensors.
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