CN113419352A - Optical mechanism for Gaussian beam shaping, laser cutting system and process - Google Patents
Optical mechanism for Gaussian beam shaping, laser cutting system and process Download PDFInfo
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- CN113419352A CN113419352A CN202110966018.7A CN202110966018A CN113419352A CN 113419352 A CN113419352 A CN 113419352A CN 202110966018 A CN202110966018 A CN 202110966018A CN 113419352 A CN113419352 A CN 113419352A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
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Abstract
The invention provides an optical mechanism for gaussian beam shaping, comprising: the device comprises a first lens and a collimation structure, wherein the first lens is used for shaping a Gaussian beam into a fan-shaped divergent linear beam, the collimation structure is used for collimating the linear beam to enable the beam section of the linear beam to be a linear light spot, and the energy of the linear light spot is uniformly distributed along the length direction of the linear light spot; the first lens comprises a first incident surface and a first emergent surface, the curvature radius of the first incident surface is positive, the cone coefficient is negative, and the first emergent surface is a plane. Due to the fact that the novel CO Laser (carbon monoxide Laser) is adopted and the optical mechanism of the linear light beam is matched, cutting quality and cutting strength of the ultrathin glass are greatly improved, a process solution of Laser cutting is provided for application scenes with high strength requirements of the ultrathin glass, the optical mechanism is simple in structure, and cost is greatly reduced.
Description
Technical Field
The invention relates to the technical field of ultrathin glass cutting processing, in particular to an optical mechanism for Gaussian beam shaping, a laser cutting system and a laser cutting process.
Background
The ultra-thin glass mentioned herein refers to glass with thickness below 0.1mm, and in the cutting field, the cutting is basically completed by using laser cutting or laminated cutter wheel cutting; the laser cutting generally uses infrared (femtosecond or picosecond) laser shaping to be Bessel beams, and by adopting the cutting scheme, the front cutting quality is poor, edge breakage exists to a certain degree, the section is rough, and the strength of the ultrathin glass product is greatly reduced. In some applications such as folding screens, the above process solutions do not meet the product requirements.
Disclosure of Invention
The invention aims to provide an optical mechanism, a laser cutting system and a laser cutting process for Gaussian beam shaping, which are used for improving the cutting quality and improving the strength of an ultrathin glass product.
The invention provides an optical mechanism for Gaussian beam shaping, which comprises: the device comprises a first lens and a collimation structure, wherein the first lens is used for shaping a Gaussian beam into a fan-shaped divergent linear beam, the collimation structure is used for collimating the linear beam to enable the beam section of the linear beam to be a linear light spot, and the energy of the linear light spot is uniformly distributed along the length direction of the linear light spot;
the first lens comprises a first incident surface and a first emergent surface, the curvature radius of the first incident surface is positive, the cone coefficient is negative, and the first emergent surface is a plane.
Preferably, the collimating structure includes a second lens and a third lens, an axis of the second lens is parallel to the horizontal direction, and an axis of the third lens is parallel to the vertical direction.
Preferably, the length of the linear light beam islSaidlConstrained by the distance L from the first exit surface to the second entrance surface of the second lens, the thickness H of the first lens, and the fan-shaped divergence angle Ѳ, the constraint formula is:
as a preferred technical scheme, the fan-shaped divergence angle is 15-30 degrees;
the curvature radius of the first incidence surface is 0.4-0.8, and the cone coefficient is-3.2-10.
Preferably, the diameter of the gaussian beam incident on the first lens is 0.78 ± 0.02 mm.
Preferably, the linear light beam has a length of 16mm and a width of 0.3 mm.
The ultrathin glass laser cutting system comprises a laser source and a reverse laser beam expander; the laser source is used for outputting a Gaussian beam, and the reverse laser beam expander is used for adjusting the diameter of the Gaussian beam to a preset value;
the laser cutting system further comprises an optical mechanism for gaussian beam shaping as described above.
As a preferred technical scheme, the laser source is a carbon monoxide laser.
As a preferred technical solution, the laser cutting system further comprises a mirror for changing the propagation direction of the gaussian beam.
The laser cutting process of the ultrathin glass comprises the following steps:
a direction adjusting step, namely, emitting a Gaussian beam to the surface of the reflector, wherein the reflected Gaussian beam is vertical to the processed surface of the ultrathin glass;
a beam shaping step, wherein a first lens is used for shaping an incident Gaussian beam, then a fan-shaped divergent linear beam is emitted, and collimation is sequentially carried out through a second lens and a third lens, so that the cross section of the beam is a linear light spot, and the energy of the linear light spot is uniformly distributed along the length direction of the linear light spot;
and a position calibration step, namely adjusting the position of the ultrathin glass or the linear light beam to enable the position of the linear light beam to be parallel to the cutting line on the ultrathin glass.
As a preferred technical solution, the position calibration step includes:
identifying the position of the ultrathin glass product by using a high-precision camera or a laser sensor to generate a product position coordinate; collecting the position of a linear light spot by using a laser light spot collector or a light beam analyzer, and generating a linear light spot position coordinate; and adjusting the position of the ultrathin glass or the linear light beam according to the position coordinates of the product and the position coordinates of the linear light spot to enable the position of the linear light beam to be parallel to the cutting line on the ultrathin glass.
As a preferable technical solution, before the beam shaping step, the method further comprises a diameter adjusting step:
adjusting the diameter of the Gaussian beam to a preset value by using a reverse laser beam expander;
the preset value is 0.78 +/-0.02 mm.
As a preferable technical scheme, the thickness of the ultrathin glass is less than 0.1 mm.
In conclusion, the novel CO Laser (carbon monoxide Laser) is adopted and matched with the optical mechanism of the linear light beam, so that the quality and the cutting strength of the Laser cutting ultrathin glass are greatly improved, a process solution of Laser cutting is provided for an application scene with the requirement of high strength of the ultrathin glass, the optical mechanism is simple in structure, and the cost is greatly reduced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic diagram of an optical mechanism according to a first embodiment of the present invention;
FIG. 2 is a schematic diagram illustrating a positional relationship between a second lens element and a third lens element according to a first embodiment of the present invention;
FIG. 3 is a diagram illustrating the energy distribution of a linear beam along the length direction according to a first embodiment of the present invention;
FIG. 4 is a schematic view of a laser cutting system according to a second embodiment of the present invention;
FIG. 5 is a flow chart of a laser cutting process according to a third embodiment of the present invention;
icon:
1 is a laser source, 2 is a reflector, 3 is a reverse laser beam expander, 4 is an optical mechanism, 5 is ultra-thin glass, 6 is a linear beam, 7 is a cutting line, 8 is a first lens, 9 is a second lens, 10 is a third lens, 81 is a first incident surface, 82 is a first emergent surface, 91 is a second incident surface, 92 is a second emergent surface, 101 is a third incident surface, and 102 is a third emergent surface.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The inventor finds in daily research that the existing ultra-thin glass cutting is basically finished by using a laser cutting or a lamination cutter wheel cutting mode; after cutting, the front cutting quality is poor, edge breakage exists to a certain degree, the section is rough, and the strength of the ultrathin glass product is greatly reduced. In some applications such as folding screens, the above process solutions do not meet the product requirements.
Based on this, the inventor proposes an optical mechanism, a laser cutting system and a process for gaussian beam shaping. In summary, a CO Laser (carbon monoxide Laser) is used, an emergent light beam of the CO Laser is a gaussian light beam, the central wavelength is 5.5 ± 0.25um, and the frequency is 0 to 200kHz, then the gaussian light beam of the CO Laser is shaped by an optical mechanism, and the gaussian light beam is shaped into a uniform linear light beam for processing. The optical mechanism, the laser cutting system and the process of the present invention will be specifically described below by way of examples.
Example one
As shown in fig. 1, 2, and 3, the present embodiment proposes an optical mechanism for gaussian beam shaping, including: a first lens 8 and a collimating structure.
The incident beam is a Gaussian beam with the length of 0.78 +/-0.02 mm (1/e 2), the first lens 8 is used for shaping the Gaussian beam into a fan-shaped divergent linear beam, and the length of the linear beam changes along with the propagation distance of the beam; the first lens 8 comprises a first incident surface 81 and a first emergent surface 82, the curvature radius of the first incident surface 81 is positive, the conic coefficient is negative, and the first emergent surface 82 is a plane, and the function of the first lens is to enable the generated linear light beam to have good uniformity. If the divergence angle of the fan-shaped divergent linear beam is to be changed, it is possible to change the radius of curvature and the conic coefficient of the first incident surface 81. Considering the size and spatial layout of the optical lens, it is necessary to ensure that the divergence angle cannot be too large, the divergence angle in this embodiment is controlled to be 15 ° to 30 °, the curvature radius of the first incident surface 81 is controlled to be 0.4 to 0.8, and the conic coefficient is controlled to be-3.2 to-10.
The collimating structure is used for collimating the linear light beam, and the collimating structure includes a second lens 9 and a third lens 10, as shown in fig. 2, a second exit surface 92 and a third exit surface 102, the surfaces of which are similar to cylindrical surfaces, the dotted line in fig. 2 represents the axes of the second exit surface 92 and the third exit surface 102, the axis of the second lens 9 is parallel to the horizontal direction, and the axis of the third lens 10 is parallel to the vertical direction, and it can also be understood that the second lens 9 is perpendicular to the third lens 10. The collimating structure enables the beam section of the linear light spot to be a linear light spot, the energy of the linear light spot is uniformly distributed along the length direction of the linear light spot, the linear light beam from a third emergent surface 102 of a third lens 10 to a processing section is guaranteed to be transmitted in the same length and width, the second lens 9 is composed of a second incident surface 91 and a second emergent surface 92, and the third lens 10 is composed of a third incident surface 101 and a third emergent surface 102.
Wherein, the radius of curvature of the second exit surface 92 of the second lens 9 may be-30 and the radius of curvature of the third exit surface 102 of the third lens 10 may be-28 with respect to the light beam propagation direction. The linear beam mentioned in this example has a length of 16mm and a width of 0.3 mm. However, the length of the linear light beam can be adjusted by adjusting the distance between the first exit surface 82 and the second entrance surface 91 and the fan-shaped divergence angle, and the relationship between them is as follows:
the length of the linear beam islSaidlConstrained by the distance L from the first exit surface 82 to the second entrance surface 91 of the second lens 9, the thickness H of the first lens 8, and the fan-shaped divergence angle Ѳ, the constraint formula is:
in conclusion, the novel CO Laser (carbon monoxide Laser) is adopted and matched with the optical mechanism of the linear light beam, so that the cutting quality and the cutting strength of the ultrathin glass are greatly improved, a process solution of Laser cutting is provided for an application scene with high strength requirement of the ultrathin glass, the optical mechanism is simple in structure, and the cost is greatly reduced.
Example two
The present embodiment provides an ultra-thin glass laser cutting system, as shown in fig. 1, fig. 2, fig. 3, and fig. 4, which includes the optical mechanism described in the first embodiment.
Specifically, the ultra-thin glass laser cutting system comprises a laser source 1 and a reverse laser beam expander 3; the laser source 1 is used for outputting a Gaussian beam, and the reverse laser beam expander 3 is used for adjusting the diameter of the Gaussian beam to a preset value; the preset value is 0.78 +/-0.02 mm. The laser source 1 used in this embodiment is a carbon monoxide laser, and the specification parameters thereof are shown in table 1.
| Carbon monoxide laser | |
| Wavelength of light | 5.5 ±0.25um |
| Average power | 100W |
| Frequency of | 0- 200kHz |
| Quality of light beam | M2<1.2 |
| Angle of divergence of light beam | ≤8.0mrad |
| Roundness of light spot | ≥0.83, ≤1.2 |
| Power stability | ±5% |
| Spot diameter | 1.8±0.2 (mm, 1/e2) |
Table 1.
For the ultra-thin glass 5 with different thicknesses, carbon monoxide lasers with different parameters (frequency, power, processing speed and pulse width) are used for cutting, the specific parameters are shown in table 2, and the development and test are mainly performed on the ultra-thin glass 5 with the thickness of less than 0.1mm in the embodiment.
| Thickness of ultra-thin glass | Frequency of | Power of | Speed of rotation | Percentage of pulse width | Pulse width |
| 0.03 mm | 50 kHz | 2.1 W | 80 mm/s | 17% | 3.4 us |
| 0.07 mm | 50 kHz | 3.6 W | 80 mm/s | 19% | 3.8 us |
| 0.100 mm | 50 kHz | 18.4 W | 100 mm/s | 34% | 7 us |
Table 2.
The laser cutting system mentioned above further includes an optical mechanism 4, the optical mechanism 4 includes a first lens 8 and a collimating structure, the first lens 8 is configured to shape the adjusted gaussian beam into a fan-shaped divergent linear beam 6, the collimating structure is configured to collimate the linear beam 6 so that a beam cross section of the linear beam is a linear spot, and energy of the linear spot is uniformly distributed along a length direction of the linear beam.
The first lens 8 includes a first incident surface 81 and a first exit surface 82, the radius of curvature of the first incident surface 81 is positive, the conic coefficient is negative, and the first exit surface 82 is a plane. The effect is to produce a linear beam 6 with good uniformity. If one wants to change the divergence angle of the fan-shaped diverging linear beam 6, this can be achieved by changing the radius of curvature and the conic coefficient of the first entrance face 81. Considering the size and spatial layout of the optical lens, it is necessary to ensure that the divergence angle cannot be too large, the divergence angle in this embodiment is controlled to be 15 ° to 30 °, the curvature radius of the first incident surface 81 is controlled to be 0.4 to 0.8, and the conic coefficient is controlled to be-3.2 to-10.
The collimating structure is used for collimating the linear light beam 6, the collimating structure comprises a second lens 9 and a third lens 10, the second lens 9 and the third lens 10 are arranged perpendicularly, the cross section of the light beam of the collimating structure is a linear light spot, the energy of the linear light spot is uniformly distributed along the length direction of the linear light spot, the linear light beam 6 from a third emergent surface 102 of the third lens 10 to a processing section is ensured to be transmitted in the same length and width, the second lens 9 is composed of a second incident surface 91 and a second emergent surface 92, and the third lens 10 is composed of a third incident surface 101 and a third emergent surface 102.
The radius of curvature of the second exit surface 92 of the second lens 9 may be-30, and the radius of curvature of the third exit surface 102 of the third lens 10 may be-28, with respect to the light propagation direction. The linear beam 6 mentioned in this example is 16mm in length and 0.3mm in width. However, the length of the linear light beam 6 can be adjusted by adjusting the distance between the first exit surface 82 and the second entrance surface 91 and the fan-shaped divergence angle, and the relationship between them is as follows:
the length of the linear light beam 6 islSaidlConstrained by the distance L from the first entrance/exit surface to the second entrance surface 91 of the second lens 9, the thickness H of the first lens 8, and the fan-shaped divergence angle Ѳ, the constraint formula is:
in addition, due to space limitations, it is often necessary to change the direction of propagation of the light beam, and therefore, the laser cutting system further includes a mirror 2 for changing the direction of propagation of the gaussian light beam. The mirror 2 is installed at a predetermined angle to ensure that the laser beam of the carbon monoxide laser is perpendicular to the processing surface after being reflected by the mirror 2, and the position of the ultra-thin glass 5 or the linear beam 6 needs to be adjusted as the case may be in order to ensure that the position of the linear beam 6 is parallel to (approximately coincides with) the cutting line 7 on the ultra-thin glass 5. Identifying the position of the ultrathin glass product by using a high-precision camera or a laser sensor to generate a product position coordinate; collecting the position of a linear light spot by using a laser light spot collector or a light beam analyzer, and generating a linear light spot position coordinate; and adjusting the position of the ultrathin glass 5 or the linear light beam 6 according to the position coordinates of the product and the position coordinates of the linear light spot, so that the position of the linear light beam 6 is parallel to the cutting line 7 on the ultrathin glass 5.
In summary, the Laser cutting system of this embodiment adopts novel CO Laser (carbon monoxide Laser), and optical mechanism 4 of the linear light beam 6 of collocation has promoted the cutting quality and the cutting strength of ultra-thin glass 5 greatly, provides Laser cutting's technology solution for the application scene that ultra-thin glass 5 high strength required to, optical mechanism 4 simple structure, greatly reduced the cost.
EXAMPLE III
The present embodiment provides a laser cutting process for ultra-thin glass, as shown in fig. 5, the process corresponds to the laser cutting system in the second embodiment, and is used for laser cutting ultra-thin glass with a thickness of less than 0.1 mm.
The method specifically comprises the following steps:
a direction adjusting step, namely, emitting a Gaussian beam to the surface of the reflector, wherein the reflected Gaussian beam is vertical to the processed surface of the ultrathin glass;
a diameter adjusting step, namely adjusting the diameter of the Gaussian beam to a preset value by using a reverse laser beam expander, wherein the preset value is 0.78 +/-0.02 mm;
a beam shaping step, wherein a first lens is used for shaping an incident Gaussian beam, then a fan-shaped divergent linear beam is emitted, and collimation is sequentially carried out through a second lens and a third lens, so that the cross section of the beam is a linear light spot, and the energy of the linear light spot is uniformly distributed along the length direction of the linear light spot;
and a position calibration step, namely adjusting the position of the ultrathin glass or the linear light beam to enable the position of the linear light beam to be parallel to the cutting line on the ultrathin glass.
As a preferred embodiment, the position calibration step includes:
identifying the position of the ultrathin glass product by using a high-precision camera or a laser sensor to generate a product position coordinate; collecting the position of a linear light spot by using a laser light spot collector or a light beam analyzer, and generating a linear light spot position coordinate; and adjusting the position of the ultrathin glass or the linear light beam according to the position coordinates of the product and the position coordinates of the linear light spot to enable the position of the linear light beam to be parallel to the cutting line on the ultrathin glass.
In order to better implement and understand the technical solution, those skilled in the art will now perform the following detailed description.
In practical application
In step 1, a Laser light source is needed to emit a Laser beam, and in the embodiment, a CO Laser (carbon monoxide Laser) is used to emit a Gaussian beam with the diameter of 1.8mm (1/e 2).
And 2, due to space limitation, the propagation direction of the light beam needs to be changed, a reflecting mirror is used for changing the propagation direction of the Laser beam, and the CO Laser beam enters the surface of the Laser beam and is reflected to ensure that the Laser beam is vertical to the processing surface.
In step 3, the size of the Laser beam needs to be changed, a Laser beam expander is used, the diameter of the input Laser beam is required to be 0.78 +/-0.02 mm (1/e 2) by using the optical components mentioned in the embodiment, but the diameter of the output beam of a CO Laser (carbon monoxide Laser) is 1.8mm (1/e 2), so that the diameter of the beam needs to be adjusted, the reverse Laser beam expander can achieve the purpose of reducing the Laser beam, and the diameter of the beam needs to be adjusted by using 2.3-2.4 times of the beam expander in the embodiment.
In the 4 th step, the optical mechanism mentioned in the above embodiment is used, the diameter of the laser beam adjusted in the 3 rd step is 0.78 ± 0.02mm (1/e 2), and the laser beam is input into the optical mechanism, and is shaped by the lenses of the optical mechanism, and the beam of 0.78 ± 0.02mm (1/e 2) is changed into a linear beam with the length of 16mm, the width of 0.3mm and uniform energy distribution. Although the present embodiment uses a linear beam having a length of 16mm, the output beam length is not limited to 16mm, and the beam length may be changed according to the requirements of the actual application scenario.
And 5, adding an ultrathin glass product, wherein the process method is suitable for ultrathin glass with the thickness of less than 0.1mm, and the product needs to be placed on a horizontal plane to ensure that the product is vertical to the linear light beam emitted in the step 4.
And 6, processing the ultrathin glass, wherein the linear light beam with the length of 16mm and the width of 0.3mm is subjected to laser cutting on the surface of the ultrathin glass, and in order to ensure the processing efficiency, the linear light beam and the cutting line must be parallel.
And 7, generating a cutting line on the ultrathin glass, separating the product and finishing the laser cutting process.
The specific production implementation of the process method provided by the embodiment is as follows:
1) the ultra-thin glass product is put into the process, and in order to ensure the efficiency of the process, an automatic feeding mode is adopted and can be completed by using a mechanical arm, a conveying sucker or a conveying belt;
2) the ultra-thin glass product is fixed, the process mode provided by the embodiment is a high-speed processing process, and in order to ensure the stability of the process, the ultra-thin glass product needs to be fixed on a cutting platform and can be fixed by using a vacuum adsorption or clamping hoop mode;
3) identifying the position of the ultrathin glass product, namely identifying the position of the ultrathin glass product by using a high-precision camera or a laser sensor to generate a product position coordinate in order to ensure the precision of a cutting process;
4) the method comprises the following steps of (1) horizontally calibrating the ultrathin glass, measuring the flatness of the placed ultrathin glass by using a high-precision laser sensor, matching with a lifting platform, and adjusting the flatness according to the requirement of the 5 th step of the working principle to ensure that the ultrathin glass is perpendicular to a linear light beam;
5) linear light beam position identification, namely acquiring the position of the linear light beam generated in the step 4 by using a laser spot collector or a light beam analyzer, and generating position coordinate information of the linear light beam;
6) calibrating the relative position of the ultrathin glass and the linear light beam, adjusting the position of the ultrathin glass or the linear light beam according to the coordinate information of the ultrathin glass and the linear light beam generated by the steps 3) and 5), and ensuring that the cutting line of the ultrathin glass is parallel to the linear light beam according to the requirement of the step 6 of the working principle;
7) cutting, namely performing laser cutting on the ultrathin glass according to the requirements of a cutting drawing after the position of the ultrathin glass and the position of the linear light beam are adjusted;
8) separating the ultrathin glass residual materials, grabbing a finished product by using a mechanical arm or a vacuum chuck after cutting is finished, and cleaning the residual materials to a waste box by using a cleaning brush;
9) and (4) detecting, namely detecting the cut ultrathin glass finished product, and checking the cutting size, the cutting precision and the appearance.
In summary, the Laser cutting process of the embodiment adopts a novel CO Laser (carbon monoxide Laser) and an optical mechanism of linear light beams, so that the cutting quality and the cutting strength of the ultrathin glass are greatly improved, a process solution of Laser cutting is provided for an application scene with high strength requirement of the ultrathin glass, and the optical mechanism is simple in structure and greatly reduces the cost.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (13)
1. An optical mechanism for gaussian beam shaping, comprising: the device comprises a first lens and a collimation structure, wherein the first lens is used for shaping a Gaussian beam into a fan-shaped divergent linear beam, the collimation structure is used for collimating the linear beam to enable the beam section of the linear beam to be a linear light spot, and the energy of the linear light spot is uniformly distributed along the length direction of the linear light spot;
the first lens comprises a first incident surface and a first emergent surface, the curvature radius of the first incident surface is positive, the cone coefficient is negative, and the first emergent surface is a plane.
2. The optical mechanism for gaussian beam shaping of claim 1 wherein said collimating structure comprises a second lens and a third lens, said second lens having an axis parallel to the horizontal direction and said third lens having an axis parallel to the vertical direction.
3. The optical mechanism of claim 2, wherein the linear beam has a length oflSaidlIs received by the first emergent surfaceThe constraint of the distance L of the second incident surface of the second lens, the thickness H of the first lens, and the fan-shaped divergence angle Ѳ is given by:
4. the optical mechanism for gaussian beam shaping according to claim 3, wherein said fan-shaped divergence angle is 15-30 °;
the curvature radius of the first incidence surface is 0.4-0.8, and the cone coefficient is-3.2-10.
5. The optical mechanism for gaussian beam shaping of claim 1 wherein the diameter of the gaussian beam entering said first lens is 0.78 ± 0.02 mm.
6. The optical mechanism for gaussian beam shaping according to any of claims 1-5, wherein said linear beam has a length of 16mm and a width of 0.3 mm.
7. The laser cutting system for the ultrathin glass is characterized by comprising a laser source and a reverse laser beam expander; the laser source is used for outputting a Gaussian beam, and the reverse laser beam expander is used for adjusting the diameter of the Gaussian beam to a preset value;
the laser cutting system further comprising an optical mechanism for gaussian beam shaping as defined in any one of claims 1 to 5.
8. The laser cutting system of claim 7, wherein the laser source is a carbon monoxide laser.
9. The laser cutting system of claim 7, further comprising a mirror for changing the direction of propagation of the Gaussian beam.
10. A laser cutting process of ultra-thin glass, comprising:
a direction adjusting step, namely, emitting a Gaussian beam to the surface of the reflector, wherein the reflected Gaussian beam is vertical to the processed surface of the ultrathin glass;
a beam shaping step, wherein a first lens is used for shaping the incident Gaussian beam, a fan-shaped divergent linear beam is emitted, and then collimation is carried out through a second lens and a third lens in sequence, so that the cross section of the beam is a linear light spot, and the energy of the linear light spot is uniformly distributed along the length direction of the linear light spot;
and a position calibration step, namely adjusting the position of the ultrathin glass or the linear light beam to enable the position of the linear light beam to be parallel to the cutting line on the ultrathin glass.
11. The laser cutting process of claim 10, wherein the position calibration step comprises:
identifying the position of the ultrathin glass product by using a high-precision camera or a laser sensor to generate a product position coordinate; collecting the position of a linear light spot by using a laser light spot collector or a light beam analyzer, and generating a linear light spot position coordinate; and adjusting the position of the ultrathin glass or the linear light beam according to the position coordinates of the product and the position coordinates of the linear light spot to enable the position of the linear light beam to be parallel to the cutting line on the ultrathin glass.
12. The laser cutting process of claim 10, further comprising, before the beam shaping step, a diameter adjustment step of:
adjusting the diameter of the Gaussian beam to a preset value by using a reverse laser beam expander;
the preset value is 0.78 +/-0.02 mm.
13. The laser cutting process of claim 10, wherein the ultra-thin glass has a thickness of less than 0.1 mm.
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