CN113418946B - 一种金属钌的高标定率ebsd制样方法 - Google Patents
一种金属钌的高标定率ebsd制样方法 Download PDFInfo
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- CN113418946B CN113418946B CN202110868750.0A CN202110868750A CN113418946B CN 113418946 B CN113418946 B CN 113418946B CN 202110868750 A CN202110868750 A CN 202110868750A CN 113418946 B CN113418946 B CN 113418946B
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- sample
- ruthenium
- polishing
- metal
- ebsd
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- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 title claims abstract description 115
- 238000001887 electron backscatter diffraction Methods 0.000 title claims abstract description 46
- 238000005464 sample preparation method Methods 0.000 title claims abstract description 13
- 238000005498 polishing Methods 0.000 claims abstract description 124
- 229910052707 ruthenium Inorganic materials 0.000 claims abstract description 78
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 50
- 229910052786 argon Inorganic materials 0.000 claims abstract description 50
- 229910052751 metal Inorganic materials 0.000 claims abstract description 28
- 239000002184 metal Substances 0.000 claims abstract description 28
- 238000000034 method Methods 0.000 claims abstract description 19
- 230000003247 decreasing effect Effects 0.000 claims abstract description 15
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000005520 cutting process Methods 0.000 claims abstract description 12
- 238000004140 cleaning Methods 0.000 claims abstract description 7
- 238000000227 grinding Methods 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 229910003460 diamond Inorganic materials 0.000 claims description 6
- 239000010432 diamond Substances 0.000 claims description 6
- 238000010892 electric spark Methods 0.000 claims description 6
- 244000137852 Petrea volubilis Species 0.000 claims description 2
- -1 argon ion Chemical class 0.000 abstract description 43
- 150000002500 ions Chemical class 0.000 abstract description 15
- 238000012360 testing method Methods 0.000 abstract description 10
- 230000007797 corrosion Effects 0.000 abstract description 8
- 238000005260 corrosion Methods 0.000 abstract description 8
- 238000002360 preparation method Methods 0.000 abstract description 7
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 238000011160 research Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 12
- 238000009826 distribution Methods 0.000 description 7
- 238000005245 sintering Methods 0.000 description 7
- 239000013078 crystal Substances 0.000 description 6
- 238000005477 sputtering target Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000013077 target material Substances 0.000 description 3
- 241000723353 Chrysanthemum Species 0.000 description 2
- 235000007516 Chrysanthemum Nutrition 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/203—Measuring back scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
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- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
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CN202110868750.0A CN113418946B (zh) | 2021-07-30 | 2021-07-30 | 一种金属钌的高标定率ebsd制样方法 |
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CN202110868750.0A CN113418946B (zh) | 2021-07-30 | 2021-07-30 | 一种金属钌的高标定率ebsd制样方法 |
Publications (2)
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CN113418946A CN113418946A (zh) | 2021-09-21 |
CN113418946B true CN113418946B (zh) | 2022-08-09 |
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CN202110868750.0A Active CN113418946B (zh) | 2021-07-30 | 2021-07-30 | 一种金属钌的高标定率ebsd制样方法 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113945593A (zh) * | 2021-10-18 | 2022-01-18 | 广东省科学院新材料研究所 | 一种镁基复合材料ebsd测试试样及其制备方法与应用 |
CN114166596B (zh) * | 2021-11-19 | 2022-08-09 | 贵研铂业股份有限公司 | 一种高塑性贵金属材料的透射电镜样品制样方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4973388A (en) * | 1986-02-04 | 1990-11-27 | Preci-Coat S.A. | Method of depositing a decorative wear-resistant coating layer on a substrate |
JP2007300065A (ja) * | 2006-04-05 | 2007-11-15 | Mitsui Mining & Smelting Co Ltd | 薄膜センサ、薄膜センサモジュール及び薄膜センサの製造方法 |
CN111289546A (zh) * | 2020-04-02 | 2020-06-16 | 贵研检测科技(云南)有限公司 | 一种贵金属超细丝材ebsd测试样品制备与表征方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050155677A1 (en) * | 2004-01-08 | 2005-07-21 | Wickersham Charles E.Jr. | Tantalum and other metals with (110) orientation |
DE102008058768B4 (de) * | 2008-11-24 | 2011-12-15 | Zenergy Power Gmbh | Verfahren zur Herstellung von Metallsubstraten für HTS-Schichtanordnungen |
CN104089801B (zh) * | 2014-06-26 | 2016-07-06 | 上海市计量测试技术研究院 | 一种氧化锆热障涂层的电子背散射衍射试样的制备方法 |
US10526694B2 (en) * | 2015-04-30 | 2020-01-07 | Iowa State University Research Foundation, Inc. | Method of preparing metal surfaces |
JP6037256B1 (ja) * | 2016-04-14 | 2016-12-07 | 住友電工ハードメタル株式会社 | 表面被覆切削工具およびその製造方法 |
AT15903U1 (de) * | 2017-09-29 | 2018-08-15 | Plansee Se | Molybdän-Sinterteil |
CN112654252A (zh) * | 2018-09-28 | 2021-04-13 | 株式会社小松精机工作所 | 具有生物特性的金属材料 |
CN111855337A (zh) * | 2019-04-26 | 2020-10-30 | 国标(北京)检验认证有限公司 | 一种制备高纯钌靶ebsd样品的方法 |
-
2021
- 2021-07-30 CN CN202110868750.0A patent/CN113418946B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4973388A (en) * | 1986-02-04 | 1990-11-27 | Preci-Coat S.A. | Method of depositing a decorative wear-resistant coating layer on a substrate |
JP2007300065A (ja) * | 2006-04-05 | 2007-11-15 | Mitsui Mining & Smelting Co Ltd | 薄膜センサ、薄膜センサモジュール及び薄膜センサの製造方法 |
CN111289546A (zh) * | 2020-04-02 | 2020-06-16 | 贵研检测科技(云南)有限公司 | 一种贵金属超细丝材ebsd测试样品制备与表征方法 |
Non-Patent Citations (3)
Title |
---|
EBSD sample preparation: high energy Ar ion milling;Zoltán Dankházi 等;《Materials Science Forum》;20150228;第812卷;第309-314页 * |
EBSD研究高纯金溅射靶材的微观组织与织构;阳岸恒 等;《贵金属》;20140831;第35卷(第3期);第45-48页 * |
Sample Preparation Using Broad Argon Ion Beam Milling for Electron Backscatter Diffraction (EBSD) Analysis;Pawel Nowakowski 等;《Microsc. Microanal.》;20161231;第12-13页 * |
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Address after: 650106 No. 988 Science and Technology Road, Kunming High-tech Development Zone, Yunnan Province Patentee after: GUIYAN DETECTION TECHNOLOGY (YUNNAN) CO.,LTD. Country or region after: China Patentee after: Yunnan Precious Metal New Materials Holding Group Co.,Ltd. Address before: 650106 No. 988 Science and Technology Road, Kunming High-tech Development Zone, Yunnan Province Patentee before: GUIYAN DETECTION TECHNOLOGY (YUNNAN) CO.,LTD. Country or region before: China Patentee before: Sino-Platinum Metals Co.,Ltd. |