CN113390706B - Miniature force transmission device and preparation method thereof - Google Patents
Miniature force transmission device and preparation method thereof Download PDFInfo
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- CN113390706B CN113390706B CN202110625302.8A CN202110625302A CN113390706B CN 113390706 B CN113390706 B CN 113390706B CN 202110625302 A CN202110625302 A CN 202110625302A CN 113390706 B CN113390706 B CN 113390706B
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Abstract
The invention relates to a micro force transmission device and a preparation method thereof, wherein the micro force transmission device comprises the following components: the device comprises a fixed base, a movable base and a switching mechanism, wherein the movable base is connected with the fixed base, one side of the switching mechanism is connected with the movable base, and the other side of the switching mechanism is connected with the fixed base; when an external load acts on the movable base, the movable base drives the conversion mechanism to convert the external load acting on the movable base into one or more of a compression load, a tensile load or a shearing load. The micro force transmission device provided by the invention can solve the problem that the loading mode of the small-scale force sensor is generally single, and can transmit and convert the single load mode of the small-scale force sensor into other required load modes.
Description
Technical Field
The invention relates to a micro-nano device and micro-manufacturing, in particular to a micro force transmission device and a preparation method thereof.
Background
With the rapid development of nano science and technology, on one hand, various micro-nano electromechanical systems are developed, and the characterization of the mechanical reliability of the micro-nano electromechanical systems is urgent; on the other hand, mechanical experiments on materials with micro-nano dimensions are helpful for exploring the nature of material deformation, and analysis of the relationship between the microstructure of the material and the macroscopic mechanical properties of the material is also necessary, and various nano mechanical experimental methods and techniques are developed, for example: the method comprises the following steps of performing in-situ pressing and bending experiments on nanowires based on an AFM (atomic force microscope), in-situ pressing and bending experiments based on an SEM (scanning electron microscope), in-situ pressing and bending experiments based on a TEM (transmission electron microscope) and the like.
In the related art, the force sensor under a small scale is used for completing the mechanical experiment.
However, the force sensor at small scale is loaded in a single way, such as nanoindenter, although miniaturized and integrated into SEM or TEM, typically nanoindenter by bruker and nanoindenter by kojic, which can only provide compressive load, so it is necessary to design a micro force transfer device and a method for manufacturing the same to overcome the above problems.
Disclosure of Invention
The embodiment of the invention provides a micro force transmission device and a preparation method thereof, which aim to solve the problem that the loading mode of a small-scale force sensor in the related technology is generally single.
In a first aspect, a micro force transfer device is provided, comprising: a fixed base; a movable base connected to the fixed base; a switching mechanism having one side connected to the movable base and the other side connected to the fixed base; when an external load acts on the movable base, the movable base drives the conversion mechanism to convert the external load acting on the movable base into one or more of a compression load, a tensile load or a shearing load.
In some embodiments, the conversion mechanism comprises: a drive unit located between the movable base and the fixed base; two clamps, which are respectively fixed on the driving part; when an external load acts on the movable base, the driving part drives the distance between the two clamps to be increased, and the external load is converted into a tensile load; or the driving part drives the distance between the two clamps to be reduced, and the external load is converted into a compression load; or the driving part drives the two clamps to move towards or away from each other, and simultaneously the size of the gap between the two clamps is not changed, so that the external load is converted into the shearing load.
In some embodiments, two of the clamps are arranged in a central symmetry manner, and one ends of the two clamps close to each other are respectively provided with a protrusion, the two protrusions are partially overlapped in a direction perpendicular to the moving direction of the clamps, and the gap is arranged between the two protrusions; when an external load acts on the movable base, the two protrusions move in the direction away from each other, and the size of the gap is unchanged.
In some embodiments, the driving part includes: the clamp comprises a first elastic rod piece and a second elastic rod piece, wherein the first elastic rod piece and the second elastic rod piece are obliquely arranged on two opposite sides of the clamp, one end of the first elastic rod piece is connected with the movable base, the other end of the first elastic rod piece is connected with the clamp, one end of the second elastic rod piece is connected with the fixed base, and the other end of the second elastic rod piece is connected with the clamp.
In some embodiments, the micro force transfer device further comprises: the elastic elements are arranged on two opposite sides of the movable base, one end of each elastic element is fixed on the movable base, and the other end of each elastic element is fixed on the fixed base; when the movable base moves, the elastic element restrains the movement track of the movable base, so that the movable base moves towards the direction close to or away from the conversion part.
In a second aspect, a method for manufacturing a micro force transfer device is provided, which includes the steps of: making the metal glass flow into a mould under a preset pressure and a preset temperature; grinding and polishing to remove redundant metal glass; and demolding to obtain the miniature force transmission device.
In some embodiments, the metallic glass composition includes at least one of zirconium, platinum, gold, titanium, palladium, nickel, or copper.
In some embodiments, before flowing the metallic glass into the mold at the preset pressure and the preset temperature, the method further comprises: preparing the mold; and cutting the metal glass into proper sizes and prepressing the metal glass into sheets.
In some embodiments, the flowing the metallic glass into the mold at the preset pressure and the preset temperature comprises: and placing the metallic glass and the mold between two stainless steel gaskets, and enabling the metallic glass to flow into the mold at the temperature of the supercooled liquid region under the action of preset pressure.
In some embodiments, the demolding produces the micro force transmitting device comprising: corroding the mold and the metal glass in the mold together by using KOH or NaOH solution at 50-70 ℃, and then cleaning by using deionized water to obtain the miniature force transmission device.
The technical scheme provided by the invention has the beneficial effects that:
the embodiment of the invention provides a micro force transmission device and a preparation method thereof, and the micro force transmission device comprises: the movable base is connected with the fixed base, one side of the switching mechanism is connected with the movable base, and the other side of the switching mechanism is connected with the fixed base; when a compression load acts on the movable base, the movable base drives the conversion mechanism to convert the compression load acting on the movable base into one or more of a compression load, a tensile load or a shearing load; when a tensile load acts on the movable base, the movable base drives the conversion mechanism to convert the tensile load acting on the movable base into one or more of a compression load, a tensile load or a shearing load; therefore, the miniature force transmission device can transmit and convert the single load form of the small-scale force sensor into other required load forms, and the problem that the loading mode of the small-scale force sensor is generally single is solved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a micro force transfer device according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a first clamping structure of a micro force transfer device according to an embodiment of the present invention;
FIG. 3 is a diagram illustrating a second exemplary clamping structure of the micro force transfer device according to the present invention;
FIG. 4 is a schematic diagram illustrating a displacement of a first connection of a micro force transfer device according to an embodiment of the present invention;
FIG. 5 is a schematic diagram illustrating a displacement of a second connection mode of the micro force transmission device according to the embodiment of the present invention;
FIG. 6 is an enlarged partial view of a clamp of a micro force transfer device according to an embodiment of the present invention;
FIG. 7 is a schematic view of a variation curve of a variation of a distance between clamps of the micro force transfer device according to an embodiment of the present invention along with a load under loading and unloading;
FIG. 8 is a schematic view of a variation curve of a fixture pitch variation with a load under two loading and unloading actions of the micro force transfer device according to the embodiment of the present invention;
FIG. 9 is an enlarged partial schematic view of a micro force transfer device according to an embodiment of the present invention with nanowires attached to a fixture;
FIG. 10 is a schematic view of a micro force transfer device according to an embodiment of the present invention after breaking a nanowire fixed on a fixture;
fig. 11 is a schematic view of a change curve of a displacement variation of a nanowire fixed on a micro force transfer device under loading and unloading according to a load according to an embodiment of the present invention;
FIG. 12 is a schematic process flow diagram illustrating a first step of a method for fabricating a micro force transfer device according to an embodiment of the present invention;
FIG. 13 is a second schematic process flow diagram illustrating a method for fabricating a micro force transfer device according to an embodiment of the present invention;
FIG. 14 is a schematic process flow diagram illustrating a third step of a method for fabricating a micro force transfer device according to an embodiment of the present invention;
FIG. 15 is a schematic process flow diagram illustrating a fourth step of a method for fabricating a micro force transfer device in accordance with an embodiment of the present invention;
FIG. 16 is a schematic view of a mold for making a micro force-delivery device according to an embodiment of the present invention;
FIG. 17 is a schematic illustration of a first exemplary embodiment of a micro force transfer device;
fig. 18 is a schematic view of a second micro force transmission device according to an embodiment of the present invention.
In the figure:
1. a fixed base;
2. a movable base;
3. a clamp;
4. a first elastic rod member;
5. a second elastic rod member;
6. an elastic element.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
The embodiment of the invention provides a micro force transmission device and a preparation method thereof, which can solve the problem that the loading mode of a small-scale force sensor is generally single.
Referring to fig. 1, a micro force transmission device according to an embodiment of the present invention may include: the micro force transmission device comprises a fixed base 1, a movable base and a conversion mechanism, wherein the movable base 2 can be positioned on the fixed base 1, in the embodiment, a boss can be arranged on the movable base 2, the conversion mechanism can be positioned between the fixed base 1 and the movable base 2, the upper side of the conversion mechanism can be fixedly connected with the movable base 2, the lower side of the conversion mechanism can be fixedly connected with the fixed base 1, the movable base 2 can move downwards when a compression load acts on the movable base 2, the conversion mechanism can be driven to convert the compression load acting on the movable base 2 into one or more of a compression load, a tensile load or a shearing load, the movable base 2 can move upwards when a tensile load acts on the movable base 2, the conversion mechanism can be driven to convert the tensile load acting on the movable base 2 into one or more of a compression load, a tensile load or a shearing load, the structure is simple and strong in structure, the micro force transmission device can convert the single load acting on the movable base 2 into one or more of a plurality of loads through the single load acting on the movable base 2, and the conversion mechanism can be driven by the movement of the movable base 2, and the conversion mechanism, and the force transmission form is diversified.
Referring to fig. 2 and 3, in some embodiments, the switching mechanism may include: the driving part can be fixed between the movable base 2 and the fixed base 1, the driving part can be used for driving the two clamps 3 to move close to or away from each other, the two clamps 3 can be horizontally arranged relative to the movable base 2 and are vertically symmetrical, two states can be arranged between the ends, close to each other, of the two clamps 3, the first state can be that a distance exists between the ends, close to each other, of the two clamps 3, the initial distance can be as small as 2 micrometers, the second state can be that a gap exists between the overlapping positions and the parts, close to each other, of the two clamps 3, the other ends, far away from each other, of the two clamps 3 are respectively fixed on the driving part, external loads act on the movable base 2, the movable base 2 moves to drive the driving part to move, when the ends, close to each other, of the two clamps 3 are in the first state, the driving part can drive the distance between the ends, close to each other, of the two clamps 3 to be larger, the external loads can be converted into tensile loads, or the driving part can drive the distance between the ends, close to be converted into the gaps, when the ends, the two clamps 3 are in the second state, the ends, the driving part can be converted into tensile loads, the gaps, the external loads, the gaps can be converted into shearing loads, and the gaps, the gaps are not changed into the sizes of the two clamps 3, and the external loads; through acting on movable base 2 with external load, movable base 2 removes and drives drive division drive anchor clamps 3 and remove for two anchor clamps 3 are close to the interval grow between the one end each other, become little or 3 overlap the gap of department and do not change of anchor clamps, realize converting external load into tensile load, compressive load or shear load, and this kind of conversion mode form is various.
Referring to fig. 3, in some embodiments, the two clamps 3 may be disposed point-symmetrically with respect to the center of the conversion mechanism, one end of each of the two clamps 3 close to each other may have a protrusion perpendicular to the clamp 3, the shape of the protrusion may be a cube, the sidewalls of the two protrusions in the horizontal direction may partially overlap, the two protrusions may move relatively in the horizontal direction, the overlapping portion may have a gap, so that the axis of the nanowire is perpendicular to the gap at the overlapping portion, one end of the nanowire is fixed to one protrusion, and the other end of the nanowire is fixed to the other protrusion, when an external load acts on the movable base 2, the movable base 2 may drive the driving portion to move upward or downward, and the driving portion drives the two protrusions to move relatively in the horizontal direction, so that the gap at the overlapping portion is not changed, and the external load may be converted into a shearing load acting on the nanowire.
Referring to fig. 1 to 3, in some embodiments, the driving part may include: first elastic rod piece 4 and second elastic rod piece 5, first elastic rod piece 4 and second elastic rod piece 5 can be placed for anchor clamps 3 slope, first elastic rod piece 4 can be located between movable base 2 and anchor clamps 3, the one end of first elastic rod piece 4 can be with movable base 2 fixed connection, the other end can be with anchor clamps 3 fixed connection, second elastic rod piece 5 can be located between fixed base 1 and anchor clamps 3, the one end of second elastic rod piece 5 can be with fixed base 1 fixed connection, the other end can be with anchor clamps 3 fixed connection, in this embodiment, first elastic rod piece 4 can include two elastic rods, two elastic rods are placed for anchor clamps 3 slope and relative vertical symmetry, the one end of two elastic rods can be respectively with movable base 2 fixed connection, the other end of two elastic rods can be respectively with the one end fixed connection that two anchor clamps 3 kept away from each other, second elastic rod piece 5 can include two elastic rods, second elastic rod piece 5 can be placed for anchor clamps 3 with first elastic rod piece 4 symmetry, through the quantity of changing elastic rods, the line width of elastic rods or the line length of elastic rods, the effective transmission line length of adjustable and controllable sample to-strength, micro-scale device to-be measured.
In some embodiments, the inclination angles of the first elastic rod member 4 and the second elastic rod member 5 and the clamp 3 may be adjusted, so that the movable base 2 can realize conversion of loads in different forms under the same external load, in this embodiment, the first elastic rod member 4 and the second elastic rod member 5 are symmetrical with respect to the clamp 3, the first elastic rod member 4 may include two elastic rods that are vertically symmetrical, when an inclination angle between the elastic rod on the left side of the vertical symmetry axis and the clamp 3 along the clockwise direction is smaller than 90 degrees, when the movable base 2 moves downward under the external load, the driving portion may drive the distance between the ends, close to each other, of the two clamps 3 to become larger, and may convert the external load into a tensile load, and when the movable base 2 moves upward under the external load, the driving portion may also drive the distance between the ends, close to each other, of the two clamps 3 to become smaller, and may convert the external load into a compressive load; when the inclined included angle between the elastic rod on the left side of the vertical symmetry axis and the clamp 3 in the clockwise direction is larger than 90 degrees, and the movable base 2 moves downwards under the action of an external load, the driving part can drive the distance between the ends, close to each other, of the two clamps 3 to be small, the external load can be converted into a compression load, and when the movable base 2 moves upwards under the action of the external load, the driving part can also drive the distance between the ends, close to each other, of the two clamps 3 to be large, and the external load can be converted into a tensile load; through setting up the different inclination of elastic rod and anchor clamps 3, can realize the load conversion of more forms.
Referring to fig. 1-5, in some embodiments, the micro force transfer device may further include: at least two elastic elements 6, the elastic elements 6 may be symmetrically disposed on the left and right sides of the movable base 2 and located in the groove of the fixed base 1, one end of the elastic element 6 may be fixed on one end of the movable base 2, the other end of the elastic element 6 may be fixed on the groove sidewall of the fixed base 1, when an external load acts on the movable base 2 to drive the movable base 2 to move, the elastic element 6 may constrain the movement track of the movable base 2, so that the movable base 2 moves toward or away from the converting portion, and the movable base 2 is restrained from moving in other directions.
Referring to fig. 6-8, in some embodiments, a no-load test is performed using a micro force transfer device, which may include the steps of: the fixing base 1 of the micro force transmission device can be adhered to a sample table of an in-situ nano-indentation instrument by using conductive adhesive, and the nano-indentation instrument can be integrally arranged on the sample table of an SEM; driving a pressure head of the nanoindentor to approach and contact a boss on the movable base 2 of the micro force transfer device under the SEM in-situ observation condition; the indentation experiment can be operated, and the change of the distance between the clamps 3 of the miniature force transmission device under different loading actions can be recorded by adopting a screen recording method; carrying out image analysis and data processing to obtain a load-clamp 3 distance curve data diagram of the miniature force transfer device under different loading effects; carrying out no-load test on the micro force transmission device again to obtain a load-clamp 3 distance curve data diagram under the action of twice loading; according to the obtained data graph of the load-clamp 3 spacing curve, the micro force transmission device has good linear property in a large measuring range and can be repeatedly used.
Referring to fig. 9-11, in some embodiments, a tensile testing of nanowires is performed using a micro force transfer device, which may include the steps of: a nanowire with the diameter of 430nm can be transferred and fixed on a clamp 3 of the micro force transmission device by using a nano manipulator; adhering the fixing base 1 of the micro force transmission device to a sample table of an in-situ nano-indentation instrument by using conductive adhesive, and mounting the whole nano-indentation instrument on the sample table of an SEM (scanning electron microscope); driving a pressure head of the nanoindentor to approach and contact a boss on the movable base 2 of the micro force transmission device under the SEM in-situ observation condition; an indentation experiment can be operated, and meanwhile, the change of the distance between the clamps 3 of the micro force transmission device under different loading actions can be recorded by adopting a screen recording method until the nano wire is broken, and the loading is stopped; carrying out image analysis and data processing to obtain a load-displacement curve data diagram of the nanowire; according to the load-displacement curve data graph of the nano wire, the micro force transmission device has good linear property when converting external load into tensile load.
In some embodiments, the material for manufacturing the micro force transfer device may be metallic glass, the composition of the metallic glass may include at least one of zirconium, platinum, gold, titanium, palladium, nickel or copper, and the related devices are made of silicon, silicon oxide or silicon nitride, and the metallic glass has superior properties of high strength (capable of withstanding a pressure of 0 to 2 GPa), high hardness, high elasticity (elastic limit may be 0 to 2%, much higher than that of a brittle material by 0 to 0.1%), corrosion resistance and wear resistance compared to silicon, silicon oxide or silicon nitride, and the micro force transfer device manufactured by using the metallic glass material has the advantages of high mechanical reliability and long service life, referring to the movable base 2 movement verification data diagrams of fig. 4 and 5, it can be seen that when the material reaches the yield stress, the spring element connection is significantly improved compared to the elastic rod connection, and the maximum displacement is approximately linear to the yield stress due to the elastic deformation phase, and considering that the strength and elastic limit of the metallic glass are much higher than that of silicon is manufactured by using the metallic glass, obviously, the micro force transfer device manufactured by using the present invention has the advantages of several stages of manufacturing the micro force transfer device based on silicon material, and the large range.
Referring to fig. 13, a method for manufacturing a micro force transfer device according to an embodiment of the present invention may include the following steps:
step 1: the metallic glass is compressed into a mold.
Referring to fig. 12 and 16, in some embodiments, before compressing the metallic glass into the mold, there may be further included: the mold can be prepared by silicon electronic micromachining technology, and the material of the mold can be one of silicon, silicon oxide or silicon nitride; according to the size of the manufactured die, a metal glass rod with the diameter of 1mm is cut into short columns with the thickness of about 1.5mm, the cut metal glass short columns are placed between two stainless steel gaskets and then placed on a flat surface clamp of a testing machine, the flat surface clamp can be heated through a resistor, the temperature of the flat surface clamp is measured through a thermocouple and controlled by PID (proportion integral derivative), the short columns are pre-pressed at the temperature of 250 ℃, the maximum pre-pressing load is 2000N, the pre-pressing time is 1min, a sample is taken out after the pre-pressing is finished, a pre-pressed metal glass sheet is obtained, and metal glass is conveniently compressed into the die.
Referring to fig. 13, in some embodiments, the compressing the metallic glass into the mold may include: the first stainless steel gasket, the pre-pressed metal glass sheet, the mold and the first stainless steel gasket are sequentially stacked on a flat surface clamp of a testing machine from top to bottom, loaded to 7000N at the temperature of 270 ℃, and taken out and cooled after thermoplastic forming is completed, wherein the thermoplastic forming temperature is the supercooled liquid region temperature of the metal glass, generally 1.1Tg is not less than T < Tx, tg is the glass transition temperature of the metal glass material, tx is the crystallization temperature of the metal glass material, and the metal glass is more easily compressed into the mold at the supercooled liquid region temperature.
And 2, step: and grinding and polishing to remove the redundant metal glass.
Referring to fig. 14, in some embodiments, the polishing to remove the excess metal glass may include: and (4) polishing one side of the metal glass, which is far away from the mold, by using a polishing machine, and removing the redundant metal glass which is not compressed into the mold, so that the metal glass pressed into the mold is exposed.
And 3, step 3: and demolding to obtain the miniature force transmission device.
Referring to fig. 15 and 17, in some embodiments, the demolding to obtain the micro force transmitting device may include: the method can be used for preparing 6mol/L KOH solution or NaOH solution, can corrode a polished sample and a mold for more than 1h in a 60 ℃ solution environment, can also corrode the polished sample and the mold for more than 1h in a 50 ℃ or 70 ℃ solution environment, and can obtain the micro force transmission device by removing the mold through chemical corrosion and cleaning the sample with deionized water.
Referring to fig. 18, in some embodiments, different molds may be prepared, and the above steps may be repeated to prepare different micro force transfer devices, the preparation process is simple and has good repeatability, the shape of the fixing base 1 may be designed to be the circular arc shape of the TEM grid, and the micro force transfer device prepared to have the circular arc shape may be directly placed in the TEM to perform high resolution characterization on the sample on the clamp 3.
The principle of the micro force transmission device and the preparation method thereof provided by the embodiment of the invention is as follows:
since the micro force transmission device includes: the device comprises a fixed base 1 and a movable base 2, wherein the movable base 2 is fixedly connected with the fixed base 1; the switching mechanism is positioned between the movable base 2 and the fixed base 1 and comprises a first elastic rod piece 4, a second elastic rod piece 5 and two clamps 3, the first elastic rod piece 4 is positioned between the movable base 2 and the clamps 3, one end of the first elastic rod piece 4 is fixedly connected with the movable base 2, the other end of the first elastic rod piece 4 is connected with the clamps 3, the second elastic rod piece 5 is positioned between the clamps 3 and the fixed base 1, one end of the second elastic rod piece 5 is fixedly connected with the clamps 3, the other end of the second elastic rod piece 5 is fixedly connected with the bottom of the fixed base 1, when an external load acts on the movable base 2, the movable base 2 can move downwards or upwards to drive the first elastic rod piece 4 and the second elastic rod piece 5 to move, the first elastic rod piece 4 and the second elastic rod piece 5 can drive the distance between the ends, close to each other, of the two clamps 3 to be increased, the external load acting on the movable base 2 is converted into tensile load, or the first elastic rod piece 4 and the second elastic rod piece 5 can drive the distance between the ends, close to each other, of the two clamps 3 to be reduced, so that the external load acting on the movable base 2 is converted into compressive load, or the first elastic rod piece 4 and the second elastic rod piece 5 can drive the two clamps 3 to move relatively, the size of a gap at the overlapping part of the ends, close to each other, of the two clamps 3 is not changed, so that the external load acting on the movable base 2 is converted into shear load, therefore, the micro force transmission device can transmit and convert the single load form of the small-scale force sensor into other required load forms, and the problem that the loading mode of the small-scale force sensor is generally single is solved.
In the description of the present invention, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and operate, and thus, should not be construed as limiting the present invention. The terms "connected" and "connected," unless expressly specified or limited otherwise, are to be construed broadly and may, for example, be fixedly connected or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
It is to be noted that, in the present invention, relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising a," "8230," "8230," or "comprising" does not exclude the presence of additional like elements in a process, method, article, or apparatus that comprises the element.
The above description is merely illustrative of particular embodiments of the invention that enable those skilled in the art to understand or practice the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. A micro force transfer device, comprising:
a fixed base (1);
a movable base (2) attached to the fixed base (1);
a switching mechanism having one side connected to the movable base (2) and the other side connected to the fixed base (1);
when an external load acts on the movable base (2), the movable base (2) drives the conversion mechanism to convert the external load acting on the movable base (2) into one or more of a compression load, a tensile load or a shearing load;
the conversion mechanism includes: a drive unit mounted between the movable base (2) and the fixed base (1); two clamps (3), wherein the two clamps (3) are respectively arranged on the driving part; when an external load acts on the movable base (2), the driving part drives the distance between the two clamps (3) to be increased, and the external load is converted into a tensile load; or the driving part drives the distance between the two clamps (3) to be smaller, and the external load is converted into a compression load; or the driving part drives the two clamps (3) to move towards or away from each other, and simultaneously the size of a gap between the two clamps (3) is not changed, so that the external load is converted into the shearing load;
the driving part includes: the clamp comprises a first elastic rod piece (4) and a second elastic rod piece (5) which are obliquely arranged on two opposite sides of the clamp (3), one end of the first elastic rod piece (4) is connected with the movable base (2), the other end of the first elastic rod piece is connected with the clamp (3), one end of the second elastic rod piece (5) is connected with the fixed base (1), and the other end of the second elastic rod piece is connected with the clamp (3);
the micro force transfer device further comprises: at least two elastic elements (6), wherein the elastic elements (6) are arranged on two opposite sides of the movable base (2), one end of each elastic element (6) is fixed on the movable base (2), and the other end of each elastic element (6) is fixed on the fixed base (1); when the movable base (2) moves, the elastic element (6) restrains the motion track of the movable base (2) and enables the movable base (2) to move towards or away from the conversion mechanism.
2. The micro force transfer device of claim 1, wherein:
the two clamps (3) are arranged in a central symmetry manner, one ends, close to each other, of the two clamps (3) are respectively provided with a protrusion, the two protrusions are partially overlapped in the moving direction perpendicular to the clamps (3), and a gap is formed between the two protrusions;
when an external load acts on the movable base (2), the two protrusions move in the direction away from each other, and the size of the gap is unchanged.
3. A method of manufacturing a micro force transfer device according to any of claims 1 to 2, comprising the steps of:
flowing the metallic glass into a mold at a preset pressure and a preset temperature;
grinding and polishing to remove redundant metal glass;
and demolding to obtain the miniature force transmission device.
4. A method of making a micro force transfer device according to claim 3, wherein:
the metallic glass component includes at least one of zirconium, platinum, gold, titanium, palladium, nickel, or copper.
5. The method of making a micro force transfer device according to claim 3, further comprising, prior to flowing the metallic glass into the mold at the predetermined pressure and the predetermined temperature:
preparing the mold;
and cutting the metal glass into proper sizes and prepressing the metal glass into sheets.
6. The method of making a micro force transfer device according to claim 3, wherein flowing the metallic glass into the mold at a predetermined pressure and a predetermined temperature comprises:
and placing the metallic glass and the mold between two stainless steel gaskets, and compressing the metallic glass into the mold at a super-cooled liquid phase region temperature and under the action of a preset pressure.
7. The method of making a micro force transfer device of claim 3, wherein the demolding produces the micro force transfer device comprising:
corroding the mold and the metal glass in the mold together by using KOH or NaOH solution at 50-70 ℃, and then cleaning by using deionized water to obtain the miniature force transmission device.
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