CN113385756B - Device for processing surface microstructure of cylinder - Google Patents
Device for processing surface microstructure of cylinder Download PDFInfo
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- CN113385756B CN113385756B CN202110674573.2A CN202110674573A CN113385756B CN 113385756 B CN113385756 B CN 113385756B CN 202110674573 A CN202110674573 A CN 202110674573A CN 113385756 B CN113385756 B CN 113385756B
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- cathode roller
- workpiece
- auxiliary wheel
- mask
- cylindrical
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
- B23H3/10—Supply or regeneration of working media
Abstract
The invention discloses a device for processing a surface microstructure of a cylinder, which comprises an electrolytic power supply, a cylinder workpiece, a nozzle, a mask, a cathode roller, a workpiece pressing wheel and an auxiliary wheel, wherein the cathode roller is arranged on the surface of the cylinder workpiece; the mask is sleeved on the surface of the cathode roller, the workpiece is tightly combined with the mask under the action of the auxiliary wheel and the workpiece pressing wheel, the auxiliary wheel and the cathode roller do synchronous rotary motion, the workpiece does uniform rotary motion under the action of friction force of the auxiliary wheel and the cathode roller, the electrolyte nozzle sprays high-speed flowing electrolyte, and the cylindrical workpiece is uniformly electrochemically dissolved on the surface of the cylinder under the action of a uniform electric field and a uniform flow field until the microstructure on the surface of the cylinder is processed. The invention provides a novel technology for processing a surface microstructure of a cylinder, which can improve the stability and the processing efficiency of a processing process and can obtain the surface microstructure with higher precision and higher surface quality.
Description
Technical Field
The invention relates to a device for processing a surface microstructure of a cylinder, belonging to the field of mask electrolytic processing.
Background
Cylindrical metal parts are core components of products such as sliding bearings. Research and application practice shows that: the micro-structural treatment on the surface of the cylinder can achieve the purposes of changing the wetting characteristic, reducing wear and resistance, strengthening mass and heat transfer and the like. At present, methods for preparing a microstructure on a metal surface mainly comprise electron beam machining, laser machining, mechanical machining, electric spark machining, mask electrolytic machining and the like. Among these, mask electrochemical machining is advantageous for microtexturing products that are in service in variable load environments. The main reasons are: electrochemical machining is the fabrication of microstructures by electrochemical selective etching. The formed microstructure has no residual stress, no crack, no hot recast layer and other defects. In addition, the mask electrolytic machining can realize one-time high-precision parallel preparation of mass microstructures, and the efficiency is much higher than that of a single one-by-one machining method. When the conventional mask is used for electrolytic machining, the mask is prepared on the surface of the anode of the workpiece through a photoetching process, but the process is very complex, the prepared mask can be used only once, and the mask with high quality is very difficult to prepare on a curved workpiece. This makes microstructural treatment on the surface of the cylinder by conventional mask electrolytic processing difficult, the operation is complex, the cost is high, and the engineering application effect is not ideal.
In order to solve the above problems, patent application No. 201910673940.X proposes a belt-type movable mask processing microtexture technology and device. The proposal of the patent greatly improves the process flexibility and adaptability (can process workpieces with different shapes). Nevertheless, there are some disadvantages to using this patented technique to machine an array of microstructures on a cylindrical surface. For example, driving the rotation of the workpiece based on the movement of the mask belt is extremely difficult to ensure the rigidity and rotation ratio of the processing apparatus to be constant, thereby inevitably bringing about processing errors. In addition, the mask belt is extruded by the tool cathode and the tool anode in the processing process, so that the deformation is easily caused, and the precision of the processed array micro-pits is reduced. Moreover, when the diameter of the workpiece is larger, the cylindrical surface of the workpiece can be completely processed by a very long mask belt, so that the process cost is increased to a certain extent, and the process applicability is reduced. In addition, the installation, adjustment and unloading of the workpiece in the technology are time-consuming and labor-consuming, and the production efficiency is low. Therefore, new techniques and devices are needed to process the surface microstructure of the cylinder with higher precision, higher efficiency and lower cost.
Disclosure of Invention
The purpose of this patent is to provide a device that is used for price cylinder surface microstructure that machining precision is higher, machining efficiency is higher, the technology cost is lower and more agree with engineering practical application.
The technical scheme of this patent is: the utility model provides a device for processing cylinder surface microstructure, includes electrolysis power, cylinder work piece, nozzle and the electrolyte that erupts from the nozzle, its characterized in that: the device also comprises a cathode roller, an auxiliary wheel and a workpiece pressing wheel, wherein the cylindrical surface of the cathode roller is coated with a mask; the cathode roller and the auxiliary wheel are both cylindrical, the distance between the cathode roller and the auxiliary wheel is adjustable, and the central axes of the cathode roller and the auxiliary wheel are positioned on the same horizontal plane and are parallel to each other; the cylindrical workpiece is arranged in a concave seam formed by the cathode roller and the auxiliary wheel and is respectively contacted with the cathode roller and the auxiliary wheel; the workpiece pressing wheel is positioned right above the cylindrical workpiece and flexibly and lightly presses the cylindrical workpiece; the central axes of the cylindrical workpiece and the workpiece pressing wheel are parallel to the central axis of the cathode roller; the cathode roller and the workpiece pressing wheel can freely rotate around the central axis of the cathode roller and the workpiece pressing wheel; the cathode roller and the auxiliary wheel are driven by an external power source (not shown) to rotate at the same uniform speed with the same rotating speed and direction; the nozzle is arranged below the cylindrical workpiece and points to the tangent position of the cathode roller and the cylindrical workpiece; the anode and the cathode of the electrolytic power supply are respectively and electrically connected with the workpiece pressing wheel and the cathode roller.
The workpiece pressing wheel is cylindrical and is made of pure titanium, so that the workpiece pressing wheel (with positive electricity) is prevented from being dissolved in the using process.
The auxiliary wheel is made of polypropylene.
The mask contains a plurality of through micro-holes.
The mask is made of an electric insulation polymer flexible thin film material, is uniform in thickness and is 0.05mm in thickness.
The cathode roller is made of stainless steel.
The non-mask covered area of the cathode roller is coated with an electric insulating material layer so as to prevent the non-processing area from being corroded by electrochemical dissolution.
The working principle of the invention is as follows: the annular mask with through square micropores is sleeved on the surface of the cathode roller and tightly pressed and attached to the surface of the cylindrical workpiece under the action of the auxiliary wheel and the workpiece pressing wheel. The auxiliary wheel and the cathode roller wheel rotate anticlockwise and synchronously under the action of an external power source, the cylindrical workpiece rotates clockwise at a constant speed under the driving of the friction force between the auxiliary wheel and the cathode roller wheel, and the workpiece pressing wheel rotates anticlockwise at a constant speed under the friction force of the workpiece. Meanwhile, the electrolyte flowing at high speed is sprayed to the machining gap between the cathode roller and the workpiece. At the moment, metal on the surface to be processed of the cylindrical workpiece is selectively removed under the action of electrolysis, insoluble electrolysis products and residual electrolyte are quickly washed away by fresh electrolyte along with the rotation of the cathode roller, so that the machining gap is quickly discharged, and short circuit and secondary electrolytic etching are avoided. Along with the continuous rotation processing of the cathode roller, the surface of the cylindrical workpiece is continuously processed into array square micro-pits.
The outstanding advantages of the invention compared to the prior art are as follows.
(1) The high-precision (forming precision and repeating precision) and high-surface-quality processing of the surface microstructure of the cylinder can be realized. Compared with the prior art, the device has the advantages that the system is high in rigidity and not easy to deform, the mask is directly pasted on a solid tool, the deformation of the mask and the array holes of the mask is small, all positions of the workpiece machining surface are equal in machining site chance and time, and the forming precision and the repetition precision are high. Because the roller is always in the rotating and electrolyte uniformly-scouring state, products can be timely removed, the flow field and the electric field in the processing area are uniformly distributed, the mass transfer effect is good, the processing precision is higher, and the quality of the processed surface is high.
(2) The installation clamping is convenient, easy operation, and production efficiency is high. The device realizes the installation and clamping of the workpiece by the up-and-down movement of the anode roller, and the workpiece is placed in the groove formed by the cathode roller and the auxiliary wheel, and the workpiece installation can be finished by moving the anode roller to contact with the workpiece. After the machining is finished, the anode roller is lifted upwards, so that the workpiece can be dismounted, and the operation process is very simple and convenient. When carrying out processing in batches, the mask can be recycled, need not change the mask after processing is accomplished at every turn, when processing different diameters is with the same type work piece, only need adjust the distance between cathode roller and the auxiliary wheel can, technology adaptability is better, and machining efficiency is higher.
(3) The process is stable and easy to control, and is fit for actual production. In the processing process, due to the high-speed scouring of the electrolyte and the rotation of the cathode roller, the processed insoluble electrolysis products cannot be accumulated in the processing gap, the products and the electrolyte are efficiently and timely discharged, the phenomena of short circuit, open circuit or secondary etching cannot occur in the processing process, and the technical process is stable. The device has a mechanical structure, is simple in structure and low in cost, can process workpieces with different sizes, and is fit for actual production.
Drawings
FIG. 1 is a schematic diagram of an apparatus for processing microstructures on the surface of a cylinder.
FIG. 2 shows a cathode roller and a mask according to the present invention.
Reference numbers and designations in the drawings: 1. an anode pinch roller; 2. arraying the holes; 3. a cylindrical workpiece; 4. an auxiliary wheel; 5. a nozzle; 6. an electrolyte; 7. masking; 8. hollowing out micropores; 9. a layer of electrically insulating material; 10. a cathode roller; 11. and (4) an electrolysis power supply.
Detailed Description
The following describes the embodiments of the present invention in detail with reference to the accompanying drawings.
The invention provides a device for processing a microstructure on the surface of a cylinder, which comprises an electrolysis power supply 11, a cylinder workpiece 3, a nozzle 5 and electrolyte 6 sprayed out from the nozzle 5. The device also comprises a cathode roller 10, an auxiliary wheel 4 and a workpiece pressing wheel 1, wherein the cylindrical surface of the cathode roller 10 is coated with a mask 7, the cathode roller 10 and the auxiliary wheel 4 are cylindrical, the distance between the cathode roller 10 and the auxiliary wheel 4 is adjustable, and the central axes of the cathode roller and the auxiliary wheel are positioned on the same horizontal plane and are parallel to each other; the cylindrical workpiece 3 is arranged in a concave seam formed by the cathode roller 10 and the auxiliary wheel 4 and is respectively contacted with the cathode roller 10 and the auxiliary wheel 4; the workpiece pressing wheel 1 is positioned right above the cylindrical workpiece 3 and flexibly and lightly presses the cylindrical workpiece 3; the central axes of the cylindrical workpiece 3 and the workpiece pressing wheel 1 are parallel to the central axis of the cathode roller 10; the cathode roller 10 and the workpiece pressing wheel 1 can freely rotate around the central axis of the cathode roller and the workpiece pressing wheel; the cathode roller 10 and the auxiliary wheel 4 are driven by an external power source (not shown) to rotate at a uniform speed with the same rotating speed and direction; the nozzle 5 is arranged below the workpiece 3 and points to the tangent position of the cathode roller 10 and the cylindrical workpiece 3; the anode and the cathode of the electrolytic power supply 11 are respectively and electrically connected with the workpiece pressing wheel 1 and the cathode roller 10.
The workpiece pressing wheel 1 is cylindrical and is made of pure titanium (mark TA 1), the diameter of the workpiece pressing wheel is 10mm, and the length of the workpiece pressing wheel is 60 mm.
The cylindrical workpiece is made of zirconium-based amorphous alloy.
The auxiliary wheel 4 is made of polypropylene, with a diameter of 25mm and a length of 90 mm.
The mask 7 contains a large number of through-going micro-holes 8 of 0.2mm diameter with a hole pitch of 0.2 mm.
The mask 7 is made of an electrically insulating high polymer flexible film material (polyester film), and is uniform in thickness and 0.05mm in thickness.
The cathode roller 10 is made of stainless steel, 25mm in diameter and 90mm in length, and the non-masked covered area is coated with a layer of epoxy resin 9 of an electrically insulating material.
The anode pinch roller 1 is connected with the anode of an electrolysis power supply 11, and the cathode roller 10 is connected with the cathode of the electrolysis power supply 11.
The electrolyte nozzle 5 is installed below the cylindrical workpiece 3 toward the machining gap between the cathode roller 10 and the cylindrical workpiece 3.
The auxiliary wheel and the cathode roller wheel synchronously rotate at a constant speed anticlockwise, and the rotating speed is 1 r/min.
The electrolyte adopts NaNO with the mass fraction of 20%3The solution, electrolyte temperature 25 ℃, processing voltage 20V.
The present invention can be carried out by processing the cylindrical surface of the cylindrical workpiece 3 in the following steps.
(1) The cylindrical workpiece 3 is placed between the concave seam formed by the cathode roller 10 and the auxiliary wheel 4, and the workpiece pressing wheel 1 applies flexible force to slightly press the workpiece.
(2) And opening an electrolyte circulating system (not shown in the figure), and adjusting the pressure to ensure that the electrolyte 6 with the temperature of 25 ℃ and the mass fraction of 20 percent is uniformly sprayed into the processing gap between the cathode roller 10 and the cylindrical workpiece 3 through the nozzle 5.
(3) And opening an external power source switch (not shown in the figure), so that the cathode roller 10 and the auxiliary wheel 4 rotate at the same uniform speed and anticlockwise direction under the driving of an external power source (not shown in the figure), wherein the rotating speed is 1 r/min. At this time, the cylindrical workpiece 3 is driven by the cathode roller 10 and the auxiliary wheel 4 to start clockwise rotation.
(4) And (3) turning on an electrolytic power supply 11, adjusting the electrolytic voltage to be 20V, starting processing, turning off the electrolytic power supply 11 after the surface of the cylindrical workpiece is processed into a complete array square hole, turning off an external power source switch (not shown in the figure) and an electrolyte circulating system (not shown in the figure), and finishing processing to obtain a micro pit with the surface diameter of the cylinder of 0.2mm and the depth of 0.05 mm.
The method can effectively improve the processing efficiency, the processing stability, the processing precision and the surface integrity of the surface microstructure of the mask electrochemical machining cylinder, but the above description is not understood as the limitation of the invention. It should be noted that, for other persons skilled in the art, various modifications can be made without departing from the spirit of the present invention, and all of the modifications belong to the protection of the present invention.
Claims (7)
1. The utility model provides an apparatus for processing cylinder surface microstructure, includes electrolysis power (11), cylinder work piece (3), nozzle (5) and the electrolyte (6) that erupts from nozzle (5), its characterized in that: the device also comprises a cathode roller (10) with a cylindrical surface coated with a mask (7), an auxiliary wheel (4) and a workpiece pressing wheel (1); the cathode roller (10) and the auxiliary wheel (4) are both cylindrical, the distance between the cathode roller and the auxiliary wheel is adjustable, and the central axes of the cathode roller and the auxiliary wheel are positioned on the same horizontal plane and are parallel to each other; the cylindrical workpiece (3) is arranged in a concave seam formed by the cathode roller (10) and the auxiliary wheel (4) and is respectively contacted with the cathode roller (10) and the auxiliary wheel (4); the workpiece pressing wheel (1) is positioned right above the cylindrical workpiece (3) and is flexibly and lightly pressed on the cylindrical workpiece (3); the central axes of the cylindrical workpiece (3) and the workpiece pressing wheel (1) are parallel to the central axis of the cathode roller (10); the cathode roller (10) and the workpiece pressing wheel (1) can freely rotate around the central axis of the cathode roller and the workpiece pressing wheel; the cathode roller (10) and the auxiliary wheel (4) are driven by an external power source to rotate at the same uniform speed with the same rotating speed and direction; the nozzle (5) is arranged below the cylindrical workpiece (3) and points to the tangent position of the cathode roller (10) and the cylindrical workpiece (3); the anode and the cathode of the electrolytic power supply (11) are respectively and electrically connected with the workpiece pressing wheel (1) and the cathode roller (10).
2. The apparatus of claim 1, wherein the apparatus comprises: the workpiece pressing wheel (1) is cylindrical and is made of pure titanium.
3. The apparatus of claim 1, wherein the apparatus comprises: the auxiliary wheel (4) is made of polypropylene or polyvinyl chloride.
4. The apparatus of claim 1, wherein the apparatus comprises: the mask (7) contains a large number of hollow micro-holes (8).
5. The apparatus of claim 1, wherein the apparatus comprises: the mask (7) is made of an electric insulation high polymer flexible thin film material, and is uniform in thickness and 0.05mm in thickness.
6. The apparatus of claim 1, wherein the apparatus comprises: the cathode roller (10) is made of stainless steel or copper.
7. The apparatus of claim 1, wherein the apparatus comprises: the non-mask covered area of the cathode roller (10) is coated with an electric insulating material layer (9).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110674573.2A CN113385756B (en) | 2021-06-18 | 2021-06-18 | Device for processing surface microstructure of cylinder |
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| CN202110674573.2A CN113385756B (en) | 2021-06-18 | 2021-06-18 | Device for processing surface microstructure of cylinder |
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| CN113385756A CN113385756A (en) | 2021-09-14 |
| CN113385756B true CN113385756B (en) | 2022-07-05 |
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| CN114131125B (en) * | 2021-11-30 | 2023-01-31 | 清华大学 | Tool electrode with surface hydrophobic structure and preparation method thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1158205A (en) * | 1997-08-25 | 1999-03-02 | Unique Technol Internatl Pte Ltd | Electrolytic polishing as well as polishing texture processing device and manufacture thereof and electrolytic polishing as well as polishing texture tapeused thereto |
| JP2000144375A (en) * | 1998-11-13 | 2000-05-26 | Toray Ind Inc | Production and production device for metallic vapor- deposited film |
| JP2006281333A (en) * | 2005-03-31 | 2006-10-19 | Minebea Co Ltd | Electro-chemical machining electrode tool and manufacturing method thereof |
| CN103429191A (en) * | 2010-10-28 | 2013-12-04 | 帕尔玛兹科学公司 | Method for mass transfer of micro-patterns onto medical devices |
| CN107214387A (en) * | 2017-06-29 | 2017-09-29 | 浙江工业大学 | The micro- texture rolling erosion electrochemical machining method of radial ultrasonic vibration auxiliary and device |
| CN211759024U (en) * | 2020-02-27 | 2020-10-27 | 河南理工大学 | Device for electrolytically machining planar workpiece through belt type movable mask |
| CN112404618A (en) * | 2020-10-27 | 2021-02-26 | 河南理工大学 | Device for continuously electrolytically machining metal microstructure through mask |
-
2021
- 2021-06-18 CN CN202110674573.2A patent/CN113385756B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1158205A (en) * | 1997-08-25 | 1999-03-02 | Unique Technol Internatl Pte Ltd | Electrolytic polishing as well as polishing texture processing device and manufacture thereof and electrolytic polishing as well as polishing texture tapeused thereto |
| JP2000144375A (en) * | 1998-11-13 | 2000-05-26 | Toray Ind Inc | Production and production device for metallic vapor- deposited film |
| JP2006281333A (en) * | 2005-03-31 | 2006-10-19 | Minebea Co Ltd | Electro-chemical machining electrode tool and manufacturing method thereof |
| CN103429191A (en) * | 2010-10-28 | 2013-12-04 | 帕尔玛兹科学公司 | Method for mass transfer of micro-patterns onto medical devices |
| CN107214387A (en) * | 2017-06-29 | 2017-09-29 | 浙江工业大学 | The micro- texture rolling erosion electrochemical machining method of radial ultrasonic vibration auxiliary and device |
| CN211759024U (en) * | 2020-02-27 | 2020-10-27 | 河南理工大学 | Device for electrolytically machining planar workpiece through belt type movable mask |
| CN112404618A (en) * | 2020-10-27 | 2021-02-26 | 河南理工大学 | Device for continuously electrolytically machining metal microstructure through mask |
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